TWI542841B - Temperature compensation heater and heat treatment apparatus using the same - Google Patents

Description

Temperature compensation heater and heat treatment equipment using the temperature compensation heater

The present invention relates to a temperature-compensated heater and a heat treatment apparatus using the same, and more particularly to a module capable of transmitting heat substantially uniformly to the edge of a heating target by modularization of a temperature-compensated heater The temperature compensated heater and the heat treatment equipment using the temperature compensated heater.

Typically, the heater applies electrical power to radiate heat and is in the form of an elongated rod. Such heaters emit different amounts of heat between their opposite ends and the central portion, making it difficult to achieve a uniform heat treatment in the longitudinal direction of the heater.

Furthermore, heat cannot be uniformly transferred to the heating target in the heat treatment apparatus including such a heater.

In the prior art, Korean Patent No. 10-0835588 (published on May 30, 2008 and entitled "Heater for chamber") discloses such a heater.

The present invention is directed to a temperature compensation heater and a heat treatment apparatus using the same, the temperature compensation heater capable of passing the mold The grouping transfers heat substantially evenly to the edge of the heated target.

According to an aspect of the invention, a temperature compensation heater includes: a heating unit that is divided into a heating region that radiates heat and a dummy region that extends from opposite ends of the heating region; a compensation unit that compensates unit It is divided into a connection region and a compensation region extending from opposite end portions of the connection region and radiating heat; and a fixing unit to which the heating unit and the compensation unit are fixed.

The heating unit may include: a heating tube which is hollow and divided into the heating region and the dummy region; a heating wire inserted into the heating tube to correspond to the heating region, and the heating wire is radiated The heat generated by the power is delivered; the connector is heated, the heating connector is electrically connected to the heating wire to correspond to the dummy region; and the heating wire is electrically connected to the heating connector and fixed to the fixing unit, respectively.

Each of the heating leads may include: a heating fixing portion electrically connected to each of the heating connectors, and the heating fixing portion is inserted into the corresponding fixing unit; and a heating terminal, the heating terminal Projecting from the heating fixing portion to be exposed from the corresponding fixing unit.

Each of the fixing units may be formed with a heating fixing recess into which the heating fixing portion is inserted to prevent rotation of the heating lead.

Each of the heating leads may further include a heating coupling portion coupled to the heating terminal such that the heating fixing portion closely contacts the fixing unit.

In the heating lead and the heating connector, at least the heating lead may be spiral.

Each of the fixing units includes: a heating support connected to an end of the heating tube; and a heating hole through which the corresponding heating lead passes.

The compensation unit may include: a compensation tube that is hollow and divided into the above-mentioned connection region and the compensation region; a compensation heating wire that is inserted into the compensation tube to correspond to the compensation region, and the compensation heating The wire radiates heat generated by the power transmission; a compensation connector electrically connects the compensation heating wires to each other to correspond to the connection region; and a compensation lead electrically connected to the compensation heating wire and fixed to the fixed wire unit.

Each of the compensation leads may include: a compensation fixing portion electrically connected to each of the compensation heating wires, and the compensation fixing portion is inserted into the corresponding fixing unit; and a compensation terminal, the compensation terminal Projecting from the compensation fixing portion to be exposed from the corresponding fixing unit.

Each of the fixing units may be formed with a compensation fixing recess into which the compensation fixing portion is inserted to prevent the rotation of the compensation lead.

The compensation lead may further include a compensation coupling coupled to the compensation terminal such that the compensation fixing portion closely contacts the fixed unit.

In compensating the heating lead and the compensation connector, at least the compensation heating lead may be spiral.

Each of the fixed units may include: a compensation support connected to an end of the compensation tube; and a compensation hole through which the corresponding compensation lead passes.

Each of the heating zone and the compensation zone may be formed with an inverse The emitter, which is used to reflect heat.

According to another aspect of the present invention, a heat treatment apparatus includes: the aforementioned temperature compensation heater; a body member accommodating a heating target and a temperature compensation heater; and a support member provided to the body member, and the support member will The heating target is separated from the temperature compensation heater.

Each of the heating zone and the compensation zone may be formed with a reflector that reflects heat that is to be radiated to a heating target disposed below the temperature compensation heater.

The support member may include: a support rod coupled to the body member; and a support pin unit that is disposed to the support rod and supports the heating target.

The temperature compensating heater and the heat treating apparatus using the temperature compensating heater according to the present invention can transfer heat substantially uniformly to the edge of the heating target by modularization of the temperature compensating heater.

Further, according to the present invention, by the duplex heater, individual temperature control can be easily realized and heat can be substantially uniformly transmitted to the edge of the heating target.

Further, according to the present invention, it is possible to easily assemble the heater, and it is possible to stably supply electric power to the heating wire in an area where no heat is radiated.

Further, according to the present invention, it is possible to easily and conveniently fix the lead without rotating, to prevent a short circuit of the electrical connection, and to restrict or prevent the rotation of the heating wire.

Furthermore, according to the invention, there is no separate support knot In the case of the structure, it is possible to prevent the heating wire and the connector from rotating in a region where heat is radiated and a region where heat is not radiated.

Further, according to the present invention, it is easy to separately perform maintenance and replacement of the heater.

Further, according to the present invention, it is possible to easily load and unload a heating target, and it is possible to prevent the surface of the heating target from being damaged.

Further, according to the present invention, it is possible to prevent the heat radiated from the heater from interfering with the supplied electric power, and it is possible to prevent generation of impurities or smoke due to heat radiated in the space of the chamber.

Further, according to the present invention, it is possible to prevent the wiring of the heater from interfering with the chamber in the space of the chamber.

Further, according to the present invention, it is possible to improve the insulation effect of the chamber and the heat treatment performance of the heating target.

100‧‧‧ chamber

110‧‧‧shell

130‧‧‧Open/close the door

200‧‧‧temperature compensation heater

201‧‧‧ reflector

210‧‧‧Control area

211‧‧‧Edge area

213, 215‧‧ ‧ adjustment area

230‧‧‧Temperature sensing unit

231‧‧‧first sensor

233‧‧‧Second sensor

235‧‧‧ third sensor

300‧‧‧heating unit

301‧‧‧heating area

303‧‧‧Dummy area

310‧‧‧heating tube

330‧‧‧heating wire

350‧‧‧heat connector

370‧‧‧heating leads

371‧‧‧heating fixture

373‧‧‧heating terminal

375‧‧‧heating connection

400‧‧‧Compensation unit

401‧‧‧Compensation area

403‧‧‧Connected area

410‧‧‧Compensation tube

430‧‧‧thermal compensation wire

450‧‧‧Compensation connector

470‧‧‧Compensation lead

471‧‧‧Compensation Fixing Department

473‧‧‧Compensation terminal

475‧‧‧Compensation link

500‧‧‧Fixed unit

501‧‧‧heating support

502‧‧‧Compensation support

503‧‧‧heating holes

504‧‧‧Compensation hole

505‧‧‧heating fixed recess

506‧‧‧Compensation fixed recess

600‧‧‧ body components

610‧‧‧ Positioning members

630‧‧‧ spacer components

700‧‧‧Support members

710‧‧‧Support rod

730‧‧‧Support pin unit

800‧‧‧High temperature cable

810‧‧‧Transmission Department

830‧‧‧Insulation

850‧‧‧Metal tube

870‧‧‧ Sealing member

880‧‧‧Connecting components

900‧‧‧Sliding members

910‧‧‧ Guide members

930‧‧‧Sports components

1000‧‧‧Locking components

1001‧‧‧Fixed bracket

1100‧‧‧Latch components

1110‧‧‧Claws

1130‧‧‧Claw drive unit

1300‧‧‧First locking member

1500‧‧‧Second locking member

1510‧‧‧Second locking recess

1600‧‧‧Fixed components

1800‧‧‧Path components

1810‧‧‧ Guide members

1830‧‧‧Transportation components

M‧‧‧ heating target

The above and other aspects, features, and advantages of the present invention will become more apparent from the aspects of the embodiments of the appended claims < 2 is an exploded perspective view of the temperature compensating heater of FIG. 1; FIG. 3 is a cross-sectional view of a temperature compensating heater according to an embodiment of the present invention; and FIG. 4 is a cross-sectional view of a temperature compensating heater according to an embodiment of the present invention. Side view of the fixed unit; FIG. 5 is a temperature compensation plus in the coupled state according to an embodiment of the present invention FIG. 6 is a cross-sectional view of a temperature compensation heater according to another embodiment of the present invention; FIG. 7 is a front view of a heat treatment apparatus according to an embodiment of the present invention; and FIG. 8 is a perspective view of a heat treatment apparatus according to an embodiment of the present invention; 2 is a side view of a high temperature cable according to an embodiment of the present invention; FIG. 10 is a cross-sectional view of a high temperature cable according to another embodiment of the present invention; A partially exploded perspective view of a support member of one embodiment; FIG. 12 illustrates an operational state of a support member in a heat treatment apparatus according to an embodiment of the present invention; and FIG. 13 illustrates a heat treatment apparatus according to an embodiment of the present invention. Operational state; FIGS. 14 and 15 illustrate a closed state of a chamber of a heat treatment apparatus according to an embodiment of the present invention; FIGS. 16 and 17 illustrate an open state of a chamber of a heat treatment apparatus according to an embodiment of the present invention Figure 18 is a partial perspective view of a locking member of a heat treatment apparatus according to an embodiment of the present invention; Figure 19 is a side view of a heat treatment arrangement according to another embodiment of the present invention; a heating target divided into a plurality of control regions according to an embodiment of the present invention; FIG. 21 illustrates a temperature compensation heater arranged in accordance with a division condition of a heating target in a heat treatment apparatus according to an embodiment of the present invention; as well as Fig. 22 shows a temperature compensation heater arranged in accordance with a division condition of a heating target in a heat treatment apparatus according to another embodiment of the present invention.

Hereinafter, embodiments of the invention will be described with reference to the drawings. It should be noted that the drawings are not to scale, and that the thickness of the line or the size of the components in the drawings will be exaggerated.

Further, the terms used herein are defined by considering the functions of the present disclosure and may be changed according to the habit or intention of the user or the operator. Therefore, the definition of terms should be formulated in accordance with all of the disclosures set forth herein.

1 is a perspective view of a temperature compensation heater according to an embodiment of the present invention; FIG. 2 is an exploded perspective view of the temperature compensation heater of FIG. 1; and FIG. 3 illustrates a temperature compensation heater according to an embodiment of the present invention. FIG. 4 is a side view of a fixing unit according to an embodiment of the present invention; FIG. 5 is a cross-sectional view of a temperature compensating heater in a coupled state according to an embodiment of the present invention; and FIG. 6 is a view of the present invention. A cross-sectional view of a temperature compensated heater of another embodiment.

Referring to FIGS. 1 through 6, a temperature compensation heater according to one embodiment radiates heat to a heating target, and the heating target may be heated to have a substantially uniform temperature distribution.

The temperature compensation heater 200 includes a heating unit 300, a compensation unit 400, and a fixing unit 500.

The heating unit 300 may be divided into a heating region 301 and a dummy region 303 extending from opposite ends of the heating region 301. The input electric power is sent from the dummy area 303 to the heating area 301, and is input from the electric power. The heating zone 301 radiates heat.

The heating region 301 may be formed with a reflector 201 for reflecting the radiated heat. The heat radiated from the heating zone 301 can be concentrated by the reflector 201 onto the heating target. The reflector 201 is formed of a material that resists deformation and oxidation due to the radiated heat. Further, the reflector 201 is configured to prevent the reflection efficiency from deteriorating due to the emission of heat.

In one embodiment, the reflector 201 can be formed of gold and positioned on the heating tube 310. More specifically, 201 at a temperature of 400 ° C or higher, the gold reflector is not deformed and deterioration of reflection efficiency is prevented.

As shown in FIG. 3(a), the reflector 201 may be formed on the inner wall of the heating pipe 310. The reflector 201 is prevented from being scratched by an external impact on the inner wall of the heating pipe 310. Further, as shown in FIG. 3(b), the reflector 201 may be formed on the outer wall of the heating tube 310. The reflector 201 can be easily deposited on the outer wall of the heating tube 310.

Although the reflector 201 is formed by deposition in the present embodiment, the present invention is not limited thereto, and the reflector 201 may be formed on the heating tube 310 by various methods known in the art.

The heating unit 300 may include a heating tube 310, a heating wire 330, a heating connector 350, and a heating lead 370.

The heating tube 310 is hollow and is divided into a heating region 301 and a dummy region 303. The heating tube 310 can easily discharge the radiated heat, can be prevented from being damaged or deformed by the radiated heat, and can be formed of a transparent or translucent material. In one embodiment, the heating tube 310 can be a transparent or translucent hollow quartz tube, or a transparent or translucent hollow glass tube.

The heating wire 330 is inserted into the heating pipe 310 to correspond to the heating region 301 and radiates heat generated by the input electric power. The heating target can be heated by the heat radiated by the heating wire 330. In one embodiment, the heating wire 330 can be made of a Kanthal resistive heating wire.

The heating connector 350 is electrically connected to the heating wire 330 to correspond to the dummy region 303. The heating connector 350 is inserted into the heating pipe 310 to stably supply the input electric power to the heating wire 330, and prevents the heating connector 350 from being deformed or damaged by the heat radiated by the heating wire 330.

Among the heating wires 330 and the heating connectors 350, at least the heating wires 330 may be formed in a spiral shape. Since at least the heating wire 330 is spiral, the heating wire 330 and the heating connector 350 can be stably inserted into the heating pipe 310, and the electrical connection portion between the heating wire 370, the heating connector 350, and the heating wire 330 can be prevented. Short circuit.

Since the dummy region 303 is shaped to be short enough in length so as not to interfere with the movement of the heating connector 350 in the temperature compensation heater 200 according to the present embodiment, only the heating wire 330 may be formed in a spiral shape. However, it is advantageous to shape both the heating wire 330 and the heating connector 350 into a spiral shape.

When not formed into a spiral shape, both the heating wire 330 and the heating connector 350 may be deflected downward in a state of being inserted in the heating pipe 310, thereby causing uneven temperature distribution of heat radiated from the heater 200, and causing The electrical connection between the heating lead 370, the heating connector 350, and the heating wire 330 is broken.

The heating lead 370 is used as a terminal that delivers electric power to the heating wire 330. The heating lead 370 is electrically connected to the heating connector 350 and is fixed to the fixing unit 500.

Each of the heating leads 370 includes a heating fixing portion 371 and a heating terminal 373.

The heating fixing portion 371 is electrically connected to the corresponding heating connector 350 and inserted into the corresponding fixing unit 500. Since the heating fixing portion 371 is inserted into the fixing unit 500, the heating fixing portion 371 can prevent the rotation of the heating lead 370.

The heat fixing portion 371 may be shaped into various shapes other than the circular shape. In one embodiment, the heating fixture 371 may have a hexagonal shape.

A separate terminal may protrude from the heating fixing portion 371 to be easily electrically connected to the heating connector 350.

The heating terminal 373 protrudes from the heating fixing portion 371. The heating terminal 373 is exposed from the fixing unit 500 to be connected to the corresponding high temperature cable 800. The heating terminal 373 may be stably connected to the high temperature cable 800 through a connecting member 880 (which will be described later). It should be understood that the present invention is not limited to the connecting member 880, and that a stable connection between the cable 800 and the heating terminal 373 can be achieved by various methods known in the art.

The heating lead 370 may further include a heating coupling portion 375.

The heating coupling portion 375 is coupled to the heating terminal 373 such that the heating fixing portion 371 closely contacts the fixing unit 500. In one embodiment, the nut-shaped heating coupling portion 375 may be threadedly coupled to the protrusion protruding from the heating fixing portion 371. Hot terminal 373. Therefore, the heating terminal 373 may be formed with a thread for threading engagement with the heating coupling portion 375.

When the heating coupling portion 375 is screwed to the heating terminal 373, the heating fixing portion 371 can prevent the rotation of the heating terminal 373, thereby preventing the rotation of the heating wire 330 and the heating connector 350.

The compensation unit 400 may be divided into a compensation area 401 and a compensation area 401 extending from opposite ends of the compensation area 401. The input power is delivered from the connection area 403 to the compensation area 401, and heat is radiated from the compensation area 401 by inputting electric power.

The compensation region 401 may be formed with a reflector 201 that reflects the radiated heat. The heat radiated from the compensation area 401 can be concentrated by the reflector 201 onto the heating target. The reflector 201 is formed of a material that resists deformation and oxidation due to the radiated heat. Further, the reflector 201 is configured to prevent the reflection efficiency from deteriorating due to the emission of heat.

In one embodiment, the compensation unit 400 may be divided into a connection area 403 corresponding to the heating area 301 and a compensation area 401 corresponding to the dummy area 303.

In one embodiment, the reflector 201 can be made of gold and positioned on the compensation tube 410. More specifically, at a temperature of 400 ° C or higher, the gold reflector 201 does not deform and the deterioration of reflection efficiency is prevented.

As shown in FIG. 3(a), the reflector 201 may be formed on the inner wall of the compensation tube 410. The reflector 201 is on the inner wall of the compensation tube 410 to prevent scratching due to external force. Further, as shown in FIG. 3(b), the reflector 201 may be formed on the outer wall of the compensation tube 410. The reflector 201 can be It is easily deposited on the outer wall of the compensation tube 410.

Although the reflector 201 is formed by deposition in the present embodiment, the present invention is not limited thereto, and the reflector 201 may be formed on the compensation tube 410 by various methods known in the art.

The compensation unit 400 can include a compensation tube 410, a thermal compensation wire 430, a compensation connector 450, and a compensation lead 470.

The compensation tube 410 is hollow and is divided into a connection region 403 and a compensation region 401. The compensating tube 410 can easily discharge the radiated heat, can be prevented from being damaged or deformed by the radiated heat, and can be formed of a transparent or translucent material. In one embodiment, the compensation tube 410 can be a transparent or translucent hollow quartz tube, or a transparent or translucent hollow glass tube.

In one embodiment, the heating tube 310 and the compensation tube 410 may be the same size and may be formed from the same material.

The thermal compensation wire 430 is inserted into the compensation tube 410 to correspond to the compensation region 401 and emits heat by input of electric power. The heating target M can be heated by the heat radiated by the heat compensation wire 430. More specifically, the edge portion of the heating target M is heated by the heat radiated by the heat compensation wire 430, so that the temperature distribution between the edge portion and the central portion of the heating target M can be substantially uniform. In one embodiment, the thermal compensation wire 430 can be a Kanthal compensation wire.

The compensation connector 450 is electrically connected to the thermal compensation wire 430 to correspond to the connection region 403. The compensation connector 450 is inserted into the compensation tube 410 to stably supply the input power to the thermal compensation wire 430, and prevents the compensation connector 450 from being deformed or damaged by the heat radiated by the thermal compensation wire 430.

Among the thermal compensation wires 430 and the compensation connector 450, at least the thermal compensation wires 430 may be formed in a spiral shape. Since at least the thermal compensation wire 430 is spiral, the thermal compensation wire 430 and the compensation connector 450 can be stably inserted into the compensation tube 410, and the compensation lead 470, the compensation connector 450, and the thermal compensation wire 430 can be prevented. The electrical connection is partially shorted.

Since the compensation region 401 is shaped to have a shorter length with respect to the width or length of the heating target in the temperature compensation heater 200 according to the embodiment, the compensation connector 450 may be deflected downward in the connection region 403. Thus, both the thermal compensation wire 430 and the compensation connector 450 can be formed in a spiral shape. However, considering the length of the compensation region 401 and the length of the connection region 403, only the thermal compensation wire 430 may be formed in a spiral shape.

When not formed into a spiral shape, both the thermal compensating wire 430 and the compensating connector 450 may be deflected downward in a state of being inserted in the compensating tube 410, resulting in uneven temperature distribution of heat radiated from the heater 200, And the electrical connection portion between the compensation lead 470, the compensation connector 450, and the thermal compensation wire 430 is broken.

The compensation lead 470 is used as a terminal for transmitting power to the thermal compensation wire 430. The compensation lead 470 is electrically connected to the compensation connector 450 and is fixed to the fixed unit 500.

Each compensation lead 470 includes a compensation fixing portion 471 and a compensation terminal 473.

The compensation fixing portion 471 is electrically connected to the thermal compensation wire 430 and inserted into the corresponding fixing unit 500. Since the compensation fixing portion 471 is inserted into the fixing unit 500, the compensation fixing portion 471 can prevent the compensation lead 470 Turn.

The compensation fixing portion 471 can be shaped into various shapes other than the circular shape. In one embodiment, the compensation fixing portion 471 may have a hexagonal shape.

A separate terminal may protrude from the compensation fixing portion 471 to be easily electrically connected to the thermal compensation wire 430.

The compensation terminal 473 protrudes from the compensation fixing portion 471. The compensation terminal 473 is exposed from the fixed unit 500 to be connected to a power source. The compensation terminal 473 can be stably connected to the high temperature cable 800 through a connecting member 880 (which will be described later). It should be understood that the present invention is not limited to the connecting member 880, and that a stable connection between the high temperature cable 800 and the compensating terminal 473 can be stably achieved by various methods known in the art.

The compensation lead 470 can further include a compensation coupling 475.

The compensation coupling portion 475 is coupled to the compensation terminal 473 such that the compensation fixing portion 471 closely contacts the fixed unit 500. In one embodiment, the nut-shaped compensating coupling portion 475 may be threadedly coupled to the compensating terminal 473 that protrudes from the compensating fixing portion 471. Therefore, the compensation terminal 473 may be formed with a thread for threading engagement with the compensation coupling portion 475.

When the compensation coupling portion 475 is screwed to the compensation terminal 473, the compensation fixing portion 471 can prevent the rotation of the compensation terminal 473, thereby preventing the rotation of the thermal compensation wire 430 and the compensation connector 450.

The heating unit 300 and the compensation unit 400 are fixed to the fixed unit 500. A pair of fixing units 500 are coupled to the opposite ends of the heating unit 300 and the compensation unit 400, respectively.

The temperature compensation heater 200 according to the present embodiment can be modularized by coupling the heating unit 300 and the compensation unit 400 to the fixed unit 500.

Each of the fixing units 500 may include a heating support portion 501 and a heating hole 503.

The heating tube 310 is coupled to the heating support portion 501 at one end thereof, and the heat terminal 373 of the heating lead 370 passes through the heating hole 503. Therefore, the heating support portion 501, the heating hole 503, and the heating fixing recess 505 communicate with each other.

In one embodiment, as shown in FIG. 5, the heating support 501 may have a concave shape and may accommodate the heating tube 310. In another embodiment, as shown in FIG. 6, the heating support portion 501 may have a protruding shape and may be inserted into the heating tube 310.

The heating fixing recess 505 may be formed in the fixing unit 500.

The heating fixing portion 371 is inserted into the heating fixing recess 505 to restrict or prevent the rotation of the heating lead 370. Since the heating fixing portion 371 is inserted into the heating fixing recess 505, the rotation of the heating lead 370 can be prevented when the heating coupling portion 375 and the heating support portion 501 are coupled to each other.

The fixing unit 500 may further include a compensation support portion 502 and a compensation hole 504.

The compensation support 502 is coupled to one end of the compensation tube 410, and the compensation terminal 473 of the compensation lead 470 passes through the compensation hole 504. Therefore, the compensation support portion 502 is in communication with the compensation fixing recess 506, and the compensation fixing recess 506 is in communication with the compensation hole 504.

In one embodiment of the invention, as shown in FIG. 5, the compensation support 502 can have a concave shape and can accommodate the compensation tube 410. In another In an embodiment, as shown in FIG. 6, the compensation support portion 502 may have a protruding shape and may be inserted into the compensation tube 410.

Further, the compensation fixing recess 506 may be formed in the fixing unit 500.

The compensation fixing portion 471 is inserted into the compensation fixing recess 506 to restrict or prevent the rotation of the compensation lead 470. Since the compensation fixing portion 471 is inserted into the compensation fixing recess 506, the rotation of the compensation lead 470 can be prevented when the compensation coupling portion 475 and the compensation support portion 502 are coupled to each other.

In the temperature compensation heater 200 according to an embodiment of the present invention, the heating lead 370 and the compensation lead 470 are screw-coupled to the fixing unit 500, thereby allowing separate maintenance of the heating unit 300 and the compensation unit 400.

Hereinafter, a heat treatment apparatus according to an embodiment of the present invention will be described.

Figure 7 is a front view of a heat treatment apparatus according to an embodiment of the present invention; Figure 8 is a side view of a heat treatment apparatus according to an embodiment of the present invention; and Figure 9 is a cross-sectional view of a high temperature cable according to an embodiment of the present invention; Figure 10 is a cross-sectional view of a high temperature cable according to another embodiment of the present invention; Figure 11 is a partially exploded perspective view of a support member according to an embodiment of the present invention; and Figure 12 is a view showing heat treatment according to an embodiment of the present invention. An operational state of the support member in the apparatus; FIG. 13 illustrates an operational state of the heat treatment apparatus according to an embodiment of the present invention; and FIGS. 14 and 15 illustrate a closed state of the chamber of the heat treatment apparatus according to an embodiment of the present invention. 16 and 17 illustrate an open state of a chamber of a heat treatment apparatus according to an embodiment of the present invention; and FIG. 18 is a partial perspective view of a locking member of the heat treatment apparatus according to an embodiment of the present invention.

Referring to FIGS. 7 to 18, the heat treatment apparatus according to the present embodiment includes a heater 200, a body member 600, and a support member 700, and the heat treatment apparatus can be used to heat the target M by heat from the heater 200 (heating target M The heat treatment is performed by being placed in the body member 600 and supported by the support member 700.

The heater 200 radiates heat to the heating target M to heat-treat the heating target M, the heating target M and the heater 200 are disposed in the body member 600, and the supporting member 700 is disposed on the body member 600 such that the heating target M and the heater 200 are heated Separation.

In the heat treatment apparatus according to the present embodiment, the heating target M is housed in the body member 600, the support member 700 supports the bottom surface of the corresponding heating target M, and the heater 200 is disposed above the heating target M. When electric power is input to the heater 200, the heat radiated by the heater 200 may heat-treat the upper portion of the heating target M.

The reflector 201 is disposed to the heating region 301 and the compensation region 401 of the heater 200 to reflect the heat radiated from the heater 200. The reflector 201 enables heat to be radiated to the heating target M disposed under the heater 200.

When the heating target M is stacked, when the heating target M rises due to thermal expansion, the radiated heat can be subjected to secondary heat treatment to the lower portion of the heating target M.

The thermal processor 200 according to an embodiment of the present invention employs a temperature compensation heater and provides a substantially uniform temperature distribution to the heating target M to improve heat treatment performance.

The body member 600 according to the embodiment includes a positioning member 610 and a spacing member 630.

The positioning member 610 supports the heater 200 when the heater 200 is disposed in parallel with the heating target M. Each of the positioning members 610 is formed with a coupling recess 611 such that the fixing unit 500 of the heater 200 can be seated in and supported by the coupling recess 611. Further, the coupling cap 613 may be detachably attached to the coupling recess 611 of the positioning member 610 to stably fix the fixing unit 500 seated on the coupling recess 611. The heater 200 is separately attached to or detached from the body member 600 by attachment or detachment of the coupling cap 613, thereby allowing the heater 200 to be separately maintained.

The positioning member 610 may be provided with a support member 700.

Each spacer member 630 separates the heater 200 from the support member 700.

When the heating targets M are disposed to be separated from each other, the positioning members 610 supporting the heaters 200 may be separated from each other by the spacing members 630. Further, when the heating targets M are disposed to be separated from each other, the positioning members 610 provided with the support members 700 may be separated from each other by the spacing members 630. In addition, the positioning member 610 supporting the heater 200 and the positioning member 610 provided with the support member 700 may be disposed apart from each other by the spacing member 630.

Each of the support members 700 according to an embodiment of the present invention includes a support rod 710 and a support pin unit 730.

The support rod 710 is coupled to the body member 600. The support rod 710 is formed with a support groove 711 that accommodates the support pin unit 730.

The support pin unit 730 is disposed on the support rod 710 and is facing The heating target M placed in the body member 600 is supported. The support pin unit 730 includes a support bracket 731 and a support pin 733 that is coupled to a support rod 710 that protrudes from the support bracket 731 and supports the heating target M.

The support member 700 may further include a rotating shaft 750. The rotating shaft 750 is shaped to pass through the support rod 710 and the support bracket 731 to enable the support pin unit 730 to rotate.

The support member 700 can further include an elastic member 770. The elastic member 770 can elastically support the support pin unit 730 such that the support pin unit 730 can stably support the heating target M when the support pin unit 730 is rotated.

For example, as shown in FIGS. 10 and 11, when the heating target M is set into or removed from the body member 600, the support pin unit 730 may be inclined so as not to interfere with the heating target M. Here, a separate operating member (not shown) can be used.

Further, the support pin unit 730 can be repositioned to its original position to stably support the heating target M. Here, this may utilize the elastic restoring force of the elastic member 770, or a separate operating member (not shown) may be used.

Although not illustrated, the support pin unit 730 may be coupled to the support rod 710 to move upward or downward, thereby limiting or preventing interference with the heating target M.

The heat treatment apparatus according to an embodiment of the present invention may further include a chamber 100.

The chamber 100 is provided with a space for heat-treating the heating target M. Therefore, the heater 200, the body member 600, and the support member 700 are housed In the chamber 100.

The chamber 100 includes a housing 110 and an opening/closing door 130.

The housing 110 is an outer casing in which a space for heat-treating the heating target M is formed, and the opening/closing door 130 is detachably coupled to the housing 110 to open or close the space.

The closed state of the space defined by the housing 110 and the opening/closing door 130 may be set or eliminated by the locking member 1000 (which will be described later).

Since the body member 600 provided with the heater 200 and the support member 700 is housed in the chamber 100, the heat treatment apparatus may further include the high temperature cable 800.

The high temperature cable 800 is housed in the chamber 100 and electrically connected to the heater 200 such that interference of radiated heat is limited or prevented and power can be delivered to the heater 200.

Each of the high temperature cables 800 according to an embodiment of the present invention includes a conductive portion 810, an insulating portion 830, a metal tube 850, and a sealing member 870.

The conductive portion 810 is electrically connected to the heater 200 to deliver power to the heater 200. The conductive portion 810 may be formed of copper or aluminum. The conductive portion 810 may be electrically connected to at least one of the heating lead 370 and the compensation lead 470 through the connection member 880.

The insulating portion 830 surrounds the conductive portion 810. The insulating portion 830 may block heat from being transmitted from the heater 200 to the conductive portion 810 and may shield electric power flowing along the conductive portion 810. The insulating portion 830 may include magnesium oxide as a mineral-based insulating material.

The metal tube 850 wraps the insulating portion 830. The metal tube 850 can prevent deformation or damage caused by heat radiated from the heater 200. The metal tube 850 may be formed of stainless steel.

The sealing member 870 seals the opposite ends of the metal tube 850. The sealing member 870 prevents the insulating portion 830 from being exposed at the opposite ends of the metal tube 850. The sealing member 870 is formed of quartz or glass and is welded to the opposite ends of the metal tube 850.

The high temperature cable 800 according to another embodiment of the present invention includes a conductive portion 810, an insulating portion 830, a metal tube 850, a sealing member 870, and an attachment member 820.

The conductive portion 810 is electrically connected to the heater 200 to deliver power to the heater. The conductive portion 810 may be formed of copper or aluminum. The conductive portion 810 may be electrically connected to at least one of the heating lead 370 and the compensation lead 470 through the connection member 880.

The insulating portion 830 is divided into two or more portions, and the divided portions are arranged along the longitudinal direction of the conductive portion 810 to wrap the conductive portion 810. The insulating portion 830 can block heat from being transferred from the heater to the conductive portion 810 and can shield the electric power flowing along the conductive portion 810. The insulating portion 830 may include ceramic or magnesium oxide as a mineral-based insulating material.

The metal tube 850 wraps the insulating portion 830. The metal tube 850 can prevent deformation or damage caused by heat radiated from the heater. The metal tube 850 may be formed of stainless steel.

The sealing member 870 seals the opposite ends of the metal tube 850. The sealing member 870 prevents the insulating portion 830 from being at the opposite end of the metal tube 850 The department is exposed. The sealing member 870 may be formed of ceramic, quartz, or glass, and may be welded to opposite ends of the metal tube 850, respectively. In addition, the sealing member 870 may be formed of a bush-like ceramic material and may be coupled to opposite ends of the metal tube 850, respectively.

Each attachment member 820 is coupled to one end of the conductive portion 810 to secure the insulating portion 830, the metal tube 850, and the sealing member 870 to the conductive portion 810.

The attachment member 820 is threadedly coupled to opposite ends of the conductive portion 810 to secure the sealing member 870 to the metal tube 850 in a state of close contact. A thread may be formed on the conductive portion 810 for threaded engagement with the sealing portion 820.

The heat treatment apparatus according to the embodiment may further include a sliding member 900.

The sliding member 900 connects the chamber 100 to the body member 600 to allow the body member 600 to enter or exit the chamber 100. The body member 600 can easily enter or leave the chamber 100 through the sliding member 900.

The sliding member 900 couples the body member 600 to the housing 110 such that the body member 600 slides relative to the housing 110 when the chamber 100 is opened or closed.

The sliding member 900 allows the body member 600 to slide in the housing 110 of the chamber 100, and each of the sliding members 900 may include a guiding member 910 and a moving member 930.

The guiding member 910 is disposed to the chamber 100 to form a sliding path of the body member 600; and the moving member 930 is disposed to the body member 600 to move along the guiding member 910.

The heat treatment apparatus according to the present embodiment may further include the locking member 1000.

The locking member 1000 sets or eliminates a closed state of the space in the chamber 100 where the heating target M is heat-treated. The locking member 1000 closes the space so that the airtightness of the chamber 100 can be stably maintained. Each of the locking members 1000 includes a latching member 1100 and a first locking member 1300.

The latch member 1100 selects a locked state. The latch member 1100 can be coupled to the opening/closing door 130 through the fixing bracket 1001. The latch member includes a claw 1110 and a claw driving portion 1130.

The claw 1110 can be coupled and locked to the first locking member 1300, and the claw driving portion 1130 reciprocates the claw 1110. For example, the claw driving portion 1130 can reciprocate the claw 1110 by using pneumatic or hydraulic pressure.

The claw 1110 can be inserted into the first locking member 1300, and thus can be coupled and locked to the first locking member 1300 by operating the claw driving portion 1130.

The latch member 1100 is coupled and locked to the first locking member 1300. The first locking member 1300 may be disposed to the housing 110 of the chamber 100. When the fixing member 1600 described below is used, the first locking member 1300 may be disposed on the fixing member 1600. The first locking member 1300 may be formed with a first locking recess 1310 into which the pawl 1110 of the latching member 1100 can be inserted.

Since the claw 1110 of the latch member 1100 is inserted into the first locking recess 1310 of the first locking member 1300 by operating the claw driving portion 1130 when the chamber 100 is closed, the chamber 100 can be kept closed, thereby The airtightness of the chamber 100 is maintained.

The locking member 1000 can further include a second locking member 1500.

The second locking member 1500 is spaced apart from the first locking member 1300, and the latching member 1100 can be coupled and locked to the second locking member 1500. When the fixing member 1600 described below is provided, the second locking member 1500 may be disposed on the fixing member 1600. The second locking member 1500 may be formed with a second locking recess 1510 into which the pawl 1110 of the latching member 1100 can be inserted.

When the chamber 100 is opened, the opening/closing door 130 is separated from the housing 110, and the claw 1110 of the latch member 1100 provided on the opening/closing door 130 is inserted into the second lock by operating the claw driving portion 1130. The second locking recess 1510 of the member 1500. Therefore, the position at which the chamber 100 is kept open and the opening/closing door 130 separated from the housing 110 is stably locked, thereby making it easy to determine the position of opening/closing the door 130.

Although not illustrated, when the first locking member 1300 is disposed on the opening/closing door 130, the latch member 1100 may be disposed on the housing 110 or on the fixing member 1600. When the first locking member 1300 is set to the opening/closing door 130, the pair of latch members 1100 may be spaced apart from each other and disposed on the housing 110 and the fixing member 1600. Further, when the first locking member 1300 is disposed onto the opening/closing door 130, the pair of latch members 1100 may be spaced apart from each other and disposed to the fixing member 1600.

The heat treatment apparatus according to an embodiment of the present invention may further include a fixing member 1600.

The fixing member 1600 is coupled and fixed to the housing 110 of the chamber 100, and can stably support the opening/closing door 130 when the chamber 100 is opened or closed.

The heat treatment apparatus according to an embodiment of the present invention may further include a path member 1800.

The path member 1800 couples the opening/closing door 130 to the fixing member 1600 such that the opening/closing door 130 can slide relative to the fixing member 1600 when the chamber 100 is opened and closed.

The path member 1800 allows the opening/closing door 130 to slide in the fixed member 1600, and each of the path members 1800 may include a guide member 1810 and a transport member 1830.

The guiding member 1810 is provided to the fixing member 1600 to form a sliding path of opening/closing the door, and the conveying member 1830 is provided to the opening/closing door 130 to move along the guiding member 1810.

Hereinafter, a heat treatment apparatus according to another embodiment of the present invention will be described.

Figure 19 is a side view of a heat treatment apparatus according to the present embodiment. Referring to Fig. 19, the heat treatment apparatus according to the present embodiment includes a heater 200, a body member 600, and a support member 700, and can heat the target M by heat radiated from the heater 200 (the above-described heating target M is housed in the body member 600) The heat treatment is performed by and supported by the support member 700.

The heat treatment apparatus according to the present embodiment may further include at least one chamber 100, a high temperature cable 800, a sliding member 900, a locking member 1000, a fixing member 1600, and a path member 1800.

The same components as those of the heat treatment apparatus according to the foregoing embodiment will be denoted by the same reference numerals, and a detailed description thereof will be omitted.

However, when the positioning members 610 supporting the heater 200 are arranged to be spaced apart from each other by the spacing members 630 of the body member 600, the heater 200 disposed on one side of the positioning member 610 and the heater 200 disposed on the other side of the positioning member 610 The heaters 200 can be alternately arranged.

Therefore, the temperature of the heat applied to the heating target M can be kept more evenly distributed.

Hereinafter, an operation of heat-treating a target in a heat treatment apparatus according to an embodiment of the present invention will be described.

20 shows a heating target divided into a plurality of control regions according to an embodiment of the present invention, and FIG. 21 shows a division condition according to a heating target in the heat treatment apparatus according to an embodiment of the present invention. A temperature compensated heater is arranged.

Referring to FIGS. 20 and 21, the heating target M is divided into a plurality of control regions 210 such that the control region 210 has a different temperature distribution, and the heat treatment apparatus according to the present embodiment can cause the heating target M to be in the direction of arranging the temperature compensation heater 200 Has a uniform temperature distribution.

Each of the temperature compensation heaters 200 includes a heating unit 300 and a compensation unit 400, whereby the heating target M can have a uniform temperature distribution along the longitudinal direction of the temperature compensation heater 200.

The control regions 210 are arranged in the direction in which the temperature compensation heater 200 is disposed.

Each control region 210 includes at least one temperature compensated heating 200. In one embodiment, two temperature compensated heaters 200 can be placed into each of the control zones.

The plurality of control regions 210 may be divided into an edge region 211 and a plurality of adjustment regions 213, 215. In FIG. 21, the plurality of adjustment regions 213, 215 may include a first adjustment region 213 and a second adjustment region 215.

The edge regions 211 are located at opposite ends of the heating target M in the direction in which the temperature compensation heater 200 is disposed. For example, the edge region 211 may correspond to a region heated by the temperature compensation heater 200 disposed at opposite ends of the heating target M.

The first adjustment area 213 is located on one side of each edge area 211 in the direction from the edge area 211 to the center of the heating target M. For example, each of the first adjustment regions 213 may correspond to a region heated by the temperature compensation heater 200 disposed on the side of the edge region 211.

The second adjustment area 215 is located on a side of each of the first adjustment areas 213 facing the center of the heating target M. For example, each of the second adjustment regions 215 may correspond to a region heated by the temperature compensation heater 200 disposed on the side of the first adjustment region 213.

Therefore, the edge region 211 and the plurality of adjustment regions 213, 215 have different temperature distributions, whereby the heating target M can be uniformly heated. For example, the heat radiated from the temperature compensation heater 200 is adjusted such that the temperature of the heat radiated by the temperature compensation heater 200 corresponding to the edge region 211 is the highest, and the temperature compensation corresponding to the adjustment regions 213, 215 The temperature of the heat radiated by the heater 200 gradually decreases from the opposite ends of the heating target M toward the center, so that the heating target M can be uniformly heated.

In an embodiment of the invention, the heat treatment apparatus may further include a temperature sensing unit 230 and a controller C.

The temperature sensing unit 230 detects the temperature corresponding to the control region 210.

In one embodiment, the temperature sensing unit 230 is disposed above the heating target M between the temperature compensation heaters 200 and detects the temperature of each of the control regions 210. The temperature sensing unit 230 detects the temperature of the heat radiated from the temperature compensation heater 200 corresponding to the control region 210.

The temperature sensing unit 230 may include a first sensor 231, a second sensor 233, and a third sensor 235. The first sensor 231 detects the temperature of the edge region 211 of the control region 210, the second sensor 233 detects the temperature of the first adjustment region 213 of the control region 210, and the third sensor 235 detects the second of the control region 210. The temperature of the region 215 is adjusted.

The temperature detected by the temperature sensing unit 230 is transmitted to the controller C.

The controller C adjusts the amount of heat radiated by the temperature compensation heater 200 corresponding to the control region 210 in accordance with the temperature detected by the temperature sensing unit 230.

For example, the controller C sets a temperature corresponding to the preset heating temperature of the heating target M from the heat radiated from the temperature compensation heater 200 to the control region 210. The controller C compares the temperature detected by the temperature sensing unit 230 with the temperature set by the controller C corresponding to the detected temperature, thereby adjusting the amount of heat radiated from the temperature compensation heater 200 corresponding to the control region 210.

Hereinafter, a pair according to another embodiment of the present invention will be described. An operation of heat-treating a heating target in a heat treatment apparatus.

Fig. 22 shows a temperature compensation heater arranged in accordance with a division condition of a heating target in a heat treatment apparatus according to another embodiment of the present invention. Referring to FIG. 22, the heating target M is divided into a plurality of control regions 210 such that the control regions 210 have different temperature distributions, and the heat treatment apparatus according to the present embodiment can make the heating targets M uniform in the direction in which the temperature compensation heaters 200 are disposed. Temperature Distribution.

Each of the temperature compensation heaters 200 includes a heating unit 300 and a compensation unit 400, whereby the heating target M can have a uniform temperature distribution along the longitudinal direction of the temperature compensation heater 200.

The control regions 211, 213, 215 are arranged in the direction in which the temperature compensation heater 200 is disposed.

Each control region 210 includes at least one temperature compensation heater 200. In one embodiment, two temperature compensated heaters 200 can be placed into each control zone.

The plurality of control regions 210 may be divided into an edge region 211 and a plurality of adjustment regions 213, 215. As shown in FIG. 22, the plurality of adjustment regions 213, 215 may include a first adjustment region 213 and a second adjustment region 215.

The edge regions 211 are located at opposite ends of the heating target M in the direction in which the temperature compensation heater 200 is disposed. For example, the edge region 211 may correspond to a region heated by the temperature compensation heater 200 disposed at the opposite ends of the heating target M.

The first adjustment area 213 is located on one side of each edge area 211 in the direction from the edge area 211 to the center of the heating target M. For example, every Each of the first adjustment regions 213 may correspond to a region heated by the temperature compensation heater 200 disposed on the side of the edge region 211.

The second adjustment area 215 is located on one side of each of the first adjustment areas 213 in the direction from the first adjustment area 213 to the center of the heating target M. For example, each of the second adjustment regions 215 may correspond to a region of the temperature compensation heater 200 that is disposed on the side of the first adjustment region 213.

Therefore, the edge region 211 and the plurality of adjustment regions 213, 215 have different temperature distributions, whereby the heating target M can be uniformly heated. For example, the heat radiated from the temperature compensation heater 200 is adjusted such that the temperature of the heat radiated by the temperature compensation heater 200 corresponding to the edge region 211 is the highest, and the temperature compensation corresponding to the adjustment regions 213, 215 The heat temperature of the heater 200 is gradually lowered from the opposite end portions of the heating target M toward the center portion, so that the heating target M can be uniformly heated.

In an embodiment of the invention, the heat treatment apparatus may further include a temperature sensing unit 230 and a controller C.

The temperature sensing unit 230 detects the temperature corresponding to the control region 210.

In the present embodiment, the temperature sensing unit 230 may be disposed on the support pin unit 730 that supports the heating target M or under the heating target M to detect the temperature of the heating target M in each of the control regions 210.

The temperature sensing unit 230 may include a first sensor 231, a second sensor 233, and a third sensor 235. The first sensor 231 detects the temperature of the edge region 211 of the control region 210, the second sensor 233 detects the temperature of the first adjustment region 213 of the control region 210, and the third sensor 235 detects the control region. The temperature of the second conditioning region 215 of the domain 210.

The temperature detected by the temperature sensing unit 230 is transmitted to the controller C.

The controller C adjusts the amount of heat radiated by the temperature compensation heater 200 corresponding to the control region 210 in accordance with the temperature detected by the temperature sensing unit 230.

For example, the controller C compares the temperature detected by the temperature sensing unit 230 with the preset heating temperature of the heating target M, thereby adjusting the amount of heat radiated by the temperature compensation heater 200 corresponding to the control region 210.

As described above, according to the present embodiment, the operation of the heat treatment apparatus can correspond to the actual temperature of the heating target M, thereby preventing generation of defects in the heating target M due to heat.

As described above, the temperature compensation heater according to the present invention and the heat treatment apparatus using the temperature compensation heater can allow substantially uniform heat transfer to the edge of the heating target M by modularization of the temperature compensation heater 200, and can Separate temperature control is achieved by the duplex heater 200.

Although the embodiments have been described with reference to the drawings and the drawings, it is understood that the invention is not limited to the embodiments and can be implemented in various different forms and without departing from the spirit and scope of the invention. Various modifications, changes and variations can be made by those skilled in the art. Therefore, the scope of the invention should be determined by the scope of the claims and the equivalents thereof.

201‧‧‧ reflector

210‧‧‧Control area

300‧‧‧heating unit

301‧‧‧heating area

303‧‧‧Dummy area

310‧‧‧heating tube

330‧‧‧heating wire

350‧‧‧heat connector

370‧‧‧heating leads

371‧‧‧heating fixture

373‧‧‧heating terminal

375‧‧‧heating connection

400‧‧‧Compensation unit

410‧‧‧Compensation tube

430‧‧‧thermal compensation wire

450‧‧‧Compensation connector

470‧‧‧Compensation lead

471‧‧‧Compensation Fixing Department

473‧‧‧Compensation terminal

475‧‧‧Compensation link

500‧‧‧Fixed unit

501‧‧‧heating support

502‧‧‧Compensation support

503‧‧‧heating holes

504‧‧‧Compensation hole

Claims (16)

A temperature compensation heater includes: a heating unit, the heating unit is divided into a heating region that radiates heat and a dummy region extending from opposite ends of the heating region; and a compensation unit, the compensation unit is divided into connections a region and a compensation region extending from opposite end portions of the connection region and radiating heat; and a fixing unit, the heating unit and the compensation unit being fixed to the fixing unit, wherein the heating unit comprises: a heating tube The heating tube is hollow and divided into the heating region and the dummy region; a heating wire, the heating wire is inserted into the heating tube to correspond to the heating region, and the heating wire is radiated by the power transmission. Heat; a heating connector electrically connected to the heating wire to correspond to the dummy region; and a heating lead electrically connected to the heating connector and respectively fixed to the fixing unit. The temperature compensation heater according to claim 1, wherein each of the heating leads includes: a heating fixing portion, the heating fixing portion is electrically connected to each of the heating connectors, and the heating fixing portion is Inserted into a corresponding fixing unit; and a heating terminal, the heating terminal protruding from the heating fixing portion to correspond The fixed unit is exposed. The temperature-compensated heater according to claim 2, wherein each of the fixing units is formed with a heating fixing recess, and the heating fixing portion is inserted into the heating fixing recess to prevent rotation of the heating lead. The temperature-compensated heater according to claim 2, wherein each of the heating leads further includes a heating coupling portion, the heating coupling portion being coupled to the heating terminal such that the heating fixing portion closely contacts the fixing unit. The temperature-compensated heater according to claim 1, wherein at least the heating wire is spiral in the heating wire and the heating connector. The temperature compensation heater according to claim 1, wherein each of the fixing units includes: a heating support portion coupled to an end portion of the heating pipe; and a heating hole, corresponding The heating lead passes through the above heating hole. A temperature compensation heater includes: a heating unit, the heating unit is divided into a heating region that radiates heat and a dummy region extending from opposite ends of the heating region; and a compensation unit, the compensation unit is divided into connections a region and a compensation region extending from opposite end portions of the connection region and radiating heat; and a fixing unit, the heating unit and the compensation unit being fixed to the solid The compensation unit includes: a compensation tube, the compensation tube is hollow and is divided into the connection region and the compensation region; a thermal compensation wire, the thermal compensation wire is inserted into the compensation tube to compensate with the compensation Corresponding to the area, and the heat compensation wire radiates heat generated by the power transmission; the compensation connector electrically connects the heat compensation wires to each other to correspond to the connection region; and the compensation lead, the compensation lead wire It is connected to the above-described thermal compensation wires and is respectively fixed to the above-described fixing unit. The temperature compensation heater according to claim 7, wherein each of the compensation leads includes: a compensation fixing portion electrically connected to each of the heat compensation wires, and the compensation fixing portion is Inserted into the corresponding fixing unit; and a compensation terminal, the compensation terminal protruding from the compensation fixing portion to be exposed from the corresponding fixing unit. The temperature compensation heater according to claim 8, wherein each of the fixing units is formed with a compensation fixing recess, and the compensation fixing portion is inserted into the compensation fixing recess to prevent rotation of the compensation lead. The temperature compensation heater according to claim 8, wherein the compensation lead further includes a compensation coupling portion coupled to the compensation terminal such that the compensation fixing portion closely contacts the solid portion Unit. The temperature compensation heater according to claim 7, wherein at least the heat compensation wire is spiral in the heat compensation wire and the compensation connector. The temperature compensation heater according to claim 7, wherein each of the fixing units includes: a compensation support portion, the compensation support portion is connected to an end portion of the compensation tube; and a compensation hole, corresponding The compensation lead passes through the compensation hole described above. The temperature-compensated heater according to any one of claims 1 to 12, wherein each of the heating region and the compensation region is formed with a reflector for reflecting heat. A heat treatment apparatus comprising: the temperature compensation heater according to any one of claims 1 to 12; a body member, the body member accommodating a heating target and the temperature compensation heater; and a support member, wherein the support member is disposed to The body member and the support member separate the heating target from the temperature compensation heater. The heat treatment apparatus according to claim 14, wherein each of the heating region and the compensation region is formed with a reflector, and the pair of reflectors are radiated to the heat of the heating target disposed under the temperature compensation heater Perform reflections. The heat treatment apparatus according to claim 14, wherein the support member includes: a support rod coupled to the body member; and a support pin unit, the support pin unit being disposed on the support rod and facing The above heating target is supported.