TWI540601B - Low configuration high power inductors - Google Patents

Low configuration high power inductors Download PDF

Info

Publication number
TWI540601B
TWI540601B TW100123581A TW100123581A TWI540601B TW I540601 B TWI540601 B TW I540601B TW 100123581 A TW100123581 A TW 100123581A TW 100123581 A TW100123581 A TW 100123581A TW I540601 B TWI540601 B TW I540601B
Authority
TW
Taiwan
Prior art keywords
substrate
coil
nautilus
inductor
high power
Prior art date
Application number
TW100123581A
Other languages
Chinese (zh)
Other versions
TW201303925A (en
Inventor
Shu-Yan Guan
Original Assignee
Shu-Yan Guan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shu-Yan Guan filed Critical Shu-Yan Guan
Priority to TW100123581A priority Critical patent/TWI540601B/en
Publication of TW201303925A publication Critical patent/TW201303925A/en
Application granted granted Critical
Publication of TWI540601B publication Critical patent/TWI540601B/en

Links

Landscapes

  • Coils Or Transformers For Communication (AREA)

Description

低構形高功率電感器Low profile high power inductor

本發明係關於一種低構形高功率電感器,尤其是一種利用鐵磁性膠體保護層做為電磁芯的低構形高功率電感器。The present invention relates to a low profile high power inductor, and more particularly to a low profile high power inductor utilizing a ferromagnetic colloidal protective layer as an electromagnetic core.

電感器是一種用絕緣導線纏繞形成線圈,以產生一自感量的電子元件,而電感器在電子線路的應用相當廣泛,例如應用在振盪、調諧、耦合、濾波、延遲、偏轉的電子線路當中。製造時,通常是將線圈纏繞在一個鐵芯上形成一個導體迴路,當電流流經線圈時,根據法拉第電磁感應定律,導體將產生一個電動勢以「反抗」這種變化,即電磁感應現象,比如,當電流以1安培/秒的變化速率穿過一個1亨利的電感元件,則引起1伏特的感應電動勢,而電磁感應L計算公式為,其中An inductor is a kind of electronic component that is wound by an insulated wire to form a self-inductive quantity. The inductor is widely used in electronic circuits, for example, in an electronic circuit of oscillation, tuning, coupling, filtering, delay, and deflection. . When manufacturing, the coil is usually wound on a core to form a conductor loop. When current flows through the coil, according to Faraday's law of electromagnetic induction, the conductor will generate an electromotive force to "react" the change, that is, electromagnetic induction. When the current passes through a 1 Henry inductance element at a rate of change of 1 ampere/second, it induces an induced electromotive force of 1 volt, and the electromagnetic induction L is calculated as ,among them

L=電感單位亨利(H);L = inductance unit Henry (H);

μ0=自由空間的磁導率=4π×10-7H/m;μ 0 = permeability of free space = 4π × 10 -7 H / m;

μr=芯材料的相對磁導率;μ r = relative magnetic permeability of the core material;

N=線圈纏繞匝數;N = number of turns of the coil;

A=線圈環繞的橫斷面積單位平方米(m2);及A = cross-sectional area of the coil around the square meter (m 2 ); and

l=線圈盤繞長度單位米(m)。 l = coil winding length in meters (m).

從公式中可得知,纏繞線圈的匝數及橫斷面積對於電感大小所造成的影響。為提供足夠的電感值,所用線圈往往需佔用極大空間,因此電感器常有較大體積,無論在電路板的平面或高度方向,都對電路設計造成相當負擔,使得輕薄短小的設計受阻。From the formula, the influence of the number of turns and the cross-sectional area of the wound coil on the size of the inductor can be known. In order to provide sufficient inductance value, the coil used often takes a lot of space, so the inductor often has a large volume, which imposes a considerable burden on the circuit design in the plane or height direction of the circuit board, so that the thin and light design is hindered.

較早期的這類電子元件安裝至電路板的方式,主要是藉由插腳焊接,甚至為降低電路板上元件高度,在電路板上挖孔,供容納電感器的本體部分,無論插件、剪腳、將電感器本體放入預挖孔中,大部份都需輔以手工作業,不僅繁雜費時,電路板面積也受限於此等元件而不易微型化,無法應用在小型電子產品中。為解決這些問題,目前主流的電子元件,一方面體積盡量減小,並且主要配合表面安裝技術(SMT,surface mount technology)安裝至電路板,令電路板上的布線密度提升,減少佔用的面積,更使電子元件的延遲時間減少,電路回應速度更快、提升整體效能。The way in which such electronic components were mounted to the circuit board was mainly by soldering the pins, and even to reduce the height of the components on the circuit board, holes were drilled in the circuit board to accommodate the body portion of the inductor, regardless of the plug-in or the cutting feet. The inductor body is placed in the pre-drilled hole, and most of it needs to be supplemented by manual work, which is not only complicated and time-consuming, but also the circuit board area is limited by such components, and it is not easy to be miniaturized, and cannot be applied in small electronic products. In order to solve these problems, the current mainstream electronic components, on the one hand, the volume is minimized, and mainly installed with the surface mount technology (SMT, surface mount technology) to the circuit board, so that the wiring density on the circuit board is increased, and the occupied area is reduced. It also reduces the delay time of electronic components, and the circuit responds faster and improves overall performance.

圖1所示,是一種常見的表面安装晶片電感器,主要包括有磁芯11、線圈12、電極13及殼體15,其中線圈12被纏繞於磁芯11上,線圈12的兩端分別導接至電極13,並以殼體15封裝成為晶片形狀,供表面安裝設置到基板14的安裝面。其製造過程中,需先將線圈12纏繞於磁芯11,再打線連接至電極13,最後進行封裝。然而,一方面磁芯11必然佔有相當高度,會使得電感器晶片的厚度增加,採用這種晶片電感器焊於電路板時,會使得整體電路板不能薄形化;另方面,線圈與電極間的接點結構較脆弱,一旦在封裝灌膠過程中略有推擠偏移,就可能使得接點位置接觸不良,導致產品性能劣化,成本隨之升高;尤其此製程主要是機械作業,製造精度較差,產品價格與品質都無法輕易提昇。1 is a common surface mount chip inductor mainly comprising a magnetic core 11, a coil 12, an electrode 13 and a housing 15, wherein the coil 12 is wound around the magnetic core 11, and the two ends of the coil 12 are respectively guided. It is connected to the electrode 13 and is packaged in a shape of a wafer by a case 15 for surface mounting to a mounting surface of the substrate 14. In the manufacturing process, the coil 12 is first wound around the magnetic core 11, and then connected to the electrode 13 by wire bonding, and finally packaged. However, on the one hand, the magnetic core 11 must occupy a considerable height, which will increase the thickness of the inductor wafer. When the wafer inductor is soldered to the circuit board, the overall circuit board cannot be thinned; on the other hand, between the coil and the electrode The contact structure is relatively fragile. Once the extrusion is slightly pushed and offset during the encapsulation process, the contact position may be poorly contacted, resulting in deterioration of product performance and cost. In particular, the process is mainly mechanical operation and manufacturing precision. Poor, product prices and quality can not be easily upgraded.

另一種常見的表面安裝電感器如圖2所示,其中,線圈22纏繞方式是從中心點向外以螺旋狀單層纏繞,但是一方面其金屬導線部分尺寸甚大,不符合微型化潮流;另方面在生產過程中,是先將線圈22的兩個端部以焊接的方式焊於一個具有兩電極的長條料帶上,再將料帶及線圈整體封入金屬殼體26,最後切斷料帶與電極間的連結,從而形成個別電感器,最後安裝於基板25上,操作過程較繁複,且許多環節精度都不高,產品良率及精度都因而受限。Another common surface mount inductor is shown in FIG. 2, wherein the coil 22 is wound in a spiral single layer from the center point, but on the one hand, the metal wire portion is very large in size, which does not conform to the miniaturization trend; In the production process, the two ends of the coil 22 are first welded to a strip having two electrodes, and the strip and the coil are integrally sealed into the metal shell 26, and finally the material is cut. The connection between the strip and the electrodes forms an individual inductor, and finally is mounted on the substrate 25. The operation process is complicated, and the accuracy of many links is not high, and the product yield and precision are thus limited.

因此,如何令表面安裝的晶片電感器薄形化,以減少佔用電路佈局的空間,及提昇薄形化電感器的製造良率與精度,甚至批次大量製造,使得產出效率大增,將是提昇產品市場競爭力的重要思維方向。Therefore, how to make the surface-mounted chip inductor thinner, to reduce the space occupied by the circuit layout, and to improve the manufacturing yield and precision of the thinned inductor, even the mass production of the batch, so that the output efficiency is greatly increased, It is an important thinking direction to enhance the competitiveness of the product market.

本發明之一目的在提供一種大幅降低晶片電感器厚度的低構形高功率電感器。It is an object of the present invention to provide a low profile high power inductor that substantially reduces the thickness of the wafer inductor.

本發明之另一目的在提供一種高精度的低構形高功率電感器。Another object of the present invention is to provide a high precision low profile high power inductor.

本發明之又一目的在提供一種可批次製造而提昇產出效率的低構形高功率電感器。It is yet another object of the present invention to provide a low profile high power inductor that can be batch manufactured to increase output efficiency.

本發明之再一目的在提供一種以鐵磁性膠體取代磁芯、使得結構簡易的低構形高功率電感器。Still another object of the present invention is to provide a low profile high power inductor which is a simple structure with a ferromagnetic colloid instead of a magnetic core.

依照本發明揭露的一種低構形高功率電感器,包含:一片至少一側表面具有絕緣表面的基板;至少一個形成於該至少一側絕緣表面上的鸚鵡螺狀線圈;一組導接該至少一個鸚鵡螺狀線圈兩端的電極;及一個封閉該至少一個鸚鵡螺狀線圈的鐵磁性膠體保護層。A low profile high power inductor according to the present invention includes: a substrate having an insulating surface on at least one side surface; at least one nautilus coil formed on the at least one insulating surface; and a set of guiding the at least An electrode at both ends of a parrot screw; and a ferromagnetic colloid protective layer enclosing the at least one nautilus coil.

由於本案所揭露之低構形高功率電感器,是在基板上藉由例如濺鍍等製程成形鸚鵡螺狀線圈,經過增厚,並且以鐵磁性材質的膠體封裝定型而形成鐵磁性膠體保護層,使得鐵磁性膠體保護層可以取代習用電感器所需的磁芯,一方面使得晶片電感器的高度大幅降低,體積巨幅縮減,且產品精度極高,完全符合電子產品輕薄短小的潮流趨勢;尤其結構相對簡單,可批次製造,產出效率及良率均可獲提昇,一舉達成所有上述目的。The low-profile high-power inductor disclosed in the present invention is formed by forming a nautilus coil on a substrate by, for example, sputtering, thickening, and forming a ferromagnetic colloid protective layer by a colloidal package of a ferromagnetic material. The ferromagnetic colloid protective layer can replace the magnetic core required for conventional inductors. On the one hand, the height of the chip inductor is greatly reduced, the volume is greatly reduced, and the product precision is extremely high, which fully conforms to the trend of light and thin electronic products; In particular, the structure is relatively simple, batch production, output efficiency and yield can be improved, achieving all of the above objectives in one fell swoop.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之較佳實施例的詳細說明中,將可清楚的呈現。The foregoing and other objects, features, and advantages of the invention are set forth in the <RTIgt;

本案低構形高功率電感器之第一較佳實施例,如圖3所示,是以一整片例如絕緣的氧化鋁材質之基材30,藉由例如雷射加工而預切割出虛線所示例釋為刻痕的脆弱部310,從而形成複數個彼此連結的基板31,由於氧化鋁具有絕緣的特性,因而可以在其表面上設置其他電路結構。如圖4及圖5所示,在基板31的上述絕緣表面上,先濺鍍一層厚度約數微米的銅層3310,隨後在銅層3310上塗佈一層光阻膜361,並將一個具有預定圖案的光罩40覆蓋於光阻膜361上進行曝光,使光阻膜361裸露部分被固化。A first preferred embodiment of the low profile high power inductor of the present invention, as shown in FIG. 3, is a substrate 30 made of, for example, an insulating alumina material, which is pre-cut by a laser processing process, for example, by a laser processing. The example is illustrated as a scored frangible portion 310, thereby forming a plurality of substrates 31 joined to each other, and since the alumina has an insulating property, other circuit structures can be provided on the surface thereof. As shown in FIG. 4 and FIG. 5, on the insulating surface of the substrate 31, a copper layer 3310 having a thickness of about several micrometers is first sputtered, and then a photoresist film 361 is coated on the copper layer 3310, and a predetermined pattern is applied. The photomask 40 is overlaid on the photoresist film 361 for exposure, so that the exposed portion of the photoresist film 361 is cured.

其中,預定圖案呈多個螺旋狀,每一個螺旋恰對應上述的一個基板31,再以顯影劑(TMAH;Tetra methyl ammonium hydroxide)將未被固化的光阻膜361洗掉進行顯影,如圖6所示,使剩餘的光阻膜361以螺旋狀分佈於銅層3310之上。接下來,對露出的銅層3310進蝕刻行,再去除固化的光阻膜361,即形成如圖7所示的呈螺旋狀的銅層3310,由於其厚度僅數微米,故如圖8所示,在螺旋狀的銅層3310上進行電鍍使其增厚,使得每一基板31上分別形成一個如圖9所示的鸚鵡螺狀線圈32。Wherein, the predetermined pattern has a plurality of spiral shapes, each spiral corresponds to the one substrate 31, and the uncured photoresist film 361 is washed away by developing (TMAH; Tetra methyl ammonium hydroxide), as shown in FIG. 6. As shown, the remaining photoresist film 361 is spirally distributed over the copper layer 3310. Next, the exposed copper layer 3310 is etched, and the cured photoresist film 361 is removed, thereby forming a spiral copper layer 3310 as shown in FIG. 7. Since the thickness is only a few micrometers, as shown in FIG. It is shown that the spiral copper layer 3310 is plated to be thickened so that each of the substrates 31 is formed with a nautilus coil 32 as shown in FIG.

其後,是將鸚鵡螺狀線圈32的最中心與最外側的兩端部,分別以雷射鑽孔,形成如圖10所示貫穿基板31形成兩個穿孔330、340,並且在各基板31的反面、對應於穿孔330、340處,分別如圖11形成兩個導接電極331、341。因此,當以例如導電銀膠填滿穿孔330、340後,即可將基板31上方的鸚鵡螺狀線圈32兩端分別導接至位於各基板31下方的兩個導接電極331、341,以備將來表面安裝時供焊接之用。Thereafter, the most central and outermost ends of the parrot screw 32 are respectively drilled by laser to form two through holes 330, 340 formed through the substrate 31 as shown in FIG. 10, and on each of the substrates 31. The opposite side, corresponding to the perforations 330, 340, forms two conductive electrodes 331, 341 as shown in FIG. 11, respectively. Therefore, when the perforations 330 and 340 are filled with, for example, conductive silver paste, the two ends of the parrot screw 32 above the substrate 31 can be respectively connected to the two guiding electrodes 331 and 341 located under the respective substrates 31 to For future surface mounting for welding purposes.

此時,如圖12所示,將混有鐵磁性材質的膠體塗佈於各基板31上方,一方面填滿鸚鵡螺狀線圈32的間隙,同時包覆各鸚鵡螺狀線圈32,待膠體凝固後,即形成一個鐵磁性膠體保護層38。鐵磁性膠體保護層38一則用以保護鸚鵡螺狀線圈32不受潮氣或氧化,另方面由於其中具有鐵磁性物質,可降低磁阻,讓線圈導電所生磁力線得以順利在鐵磁性膠體保護層38中行進,提供良好的磁迴路,藉此替代習知電感器所需的磁芯。最後,利用預切割時所形成的脆弱部310,以例如敲擊方式將各基板31分離,便形成如圖13所示的個別晶片電感器。At this time, as shown in FIG. 12, a colloid mixed with a ferromagnetic material is applied over each of the substrates 31, and on the one hand, the gap of the nautilus-like coil 32 is filled, and at the same time, each of the parrot-like coils 32 is coated, and the colloid is solidified. Thereafter, a ferromagnetic colloid protective layer 38 is formed. The ferromagnetic colloid protective layer 38 is used to protect the nautilus coil 32 from moisture or oxidation, and because of the ferromagnetic substance therein, the magnetoresistance can be reduced, and the magnetic flux generated by the coil conduction can be smoothly performed in the ferromagnetic colloid protective layer 38. Traveling in, providing a good magnetic circuit, thereby replacing the magnetic core required by conventional inductors. Finally, each of the substrates 31 is separated by, for example, a tapping method using the fragile portion 310 formed at the time of pre-cutting to form an individual wafer inductor as shown in FIG.

由於製作過程是利用半導體製程,其中的精密度是以微米計算,遠優於目前常見的晶片電感器,所製成的電感器電氣性能因而精準。加以,整體僅有基板、線圈、保護層等簡單架構,製造流程相當便捷,相較於習知技術需逐個繞線形成線圈,本案電感器是利用基材整批製造,以例如濺鍍與電鍍等技術一次生產數百甚至數千顆元件,產出效率與良率相對極高;且電感器整體高度可低於1 mm,大幅節約所佔用電路空間。Since the manufacturing process utilizes a semiconductor process, the precision is calculated in micrometers, which is far superior to the current common chip inductors, and the electrical properties of the fabricated inductors are thus accurate. In addition, the whole structure is simple, such as substrate, coil, protective layer, etc., and the manufacturing process is quite convenient. Compared with the conventional technology, coils are formed one by one, and the inductors in this case are manufactured in batches using, for example, sputtering and plating. The technology produces hundreds or even thousands of components at a time, and the output efficiency and yield are relatively high; and the overall height of the inductor can be less than 1 mm, which greatly saves the occupied circuit space.

當然,如熟悉本技術領域者所能輕易理解,上述實施例中,基板的選擇、是否需預切割、電極導接成形方式等均有其他方式可實施,本案第二較佳實施例的基材是例釋為燒結成形的陶瓷基片,且為便於說明起見,雖然整片基材上並無任何脆弱部分隔,但在本例中仍將未來會形成個別電感器的部分稱為個別基板31’,並如圖14及15所示以虛線分隔。本例中,整片基材在燒結成形前,處於生胚狀態時,先於各基板31’中央處內埋一個貫通基板31’上下表面的導體柱320’,因此,燒結完成的各基板31’中央分別形成有一個貫穿基板31’的穿孔311’,以及埋在穿孔311’內的導體柱320’。此外,在各基板31’的上、下層絕緣表面分別藉由燒結的陶瓷形成一個環繞側壁36’,使得每一基板31’的上、下表面處都形成有一個圓柱狀凹陷的容置部360’。Of course, as can be easily understood by those skilled in the art, in the above embodiments, the selection of the substrate, whether the pre-cutting is required, the electrode guiding forming manner, and the like can be implemented in other manners, and the substrate of the second preferred embodiment of the present invention. It is exemplified as a sintered ceramic substrate, and for the sake of convenience, although there is no fragile partial partition on the entire substrate, in this example, the portion where the individual inductor is formed in the future is referred to as an individual substrate. 31' and separated by dashed lines as shown in Figures 14 and 15. In this example, the entire substrate is embedded in a green state before the sintering, and a conductor post 320' penetrating the upper and lower surfaces of the substrate 31' is embedded in the center of each of the substrates 31'. Therefore, each of the sintered substrates 31 is embedded. The center is respectively formed with a through hole 311' penetrating through the substrate 31', and a conductor post 320' buried in the through hole 311'. In addition, the upper and lower insulating surfaces of the respective substrates 31' are respectively formed with a surrounding side wall 36' by the sintered ceramics, so that a cylindrical recessed receiving portion 360 is formed at the upper and lower surfaces of each of the substrates 31'. '.

接下來,以相同的方式在各基板31’上、下雙層絕緣表面的容置部360’中,分別形成一個如圖16及17所示鸚鵡螺狀線圈32’,並於各環繞側壁36’的頂面分別形成兩個導接電極331’、341’。由於上、下兩個鸚鵡螺狀線圈32’位於中心的端部是經由導體柱320’相互導接,且其中的電路是循相同的順時針或逆時針方向繞行,使得上下兩個線圈形成的磁力彼此加成。隨後,將上方線圈的最外側端部打線連接至上方環繞側壁36’上的導接電極331’;下方線圈的最外側端部打線連接至下方環繞側壁36’上的導接電極341’。Next, in the same manner, in each of the substrates 31' and the accommodating portion 360' of the lower double-layer insulating surface, a nautilus coil 32' as shown in FIGS. 16 and 17 is formed, respectively, and each of the surrounding side walls 36 is formed. The top surfaces of the 'each form two lead electrodes 331', 341'. Since the upper and lower ends of the two nautilus coils 32' are centrally connected via the conductor post 320', and the circuits therein are bypassed in the same clockwise or counterclockwise direction, the upper and lower coils are formed. The magnetic forces add to each other. Subsequently, the outermost end of the upper coil is wire-bonded to the conductive electrode 331' on the upper surrounding side wall 36'; the outermost end of the lower coil is wire-bonded to the conductive electrode 341' on the lower surrounding side wall 36'.

請一併參考如圖18所示,此時於容置部360’內灌入鐵磁性材質的膠體,將上下兩側的鸚鵡螺狀線圈32’完全包覆其中;並讓環繞側壁36’及其上的導接電極331’、341’暴露於鐵磁性材質的膠體以外,待鐵磁性材質的膠體凝固後即形成鐵磁性膠體保護層38’。隨後,將預熱樹脂加壓至容置空間內,直到填滿環繞側壁36’,待樹脂硬化後即形成對應各個基板31’的殼體,而上下兩側的導接電極331’、341’均仍暴露。Referring to FIG. 18 together, at this time, a colloid of ferromagnetic material is poured into the accommodating portion 360', and the nautilus coil 32' on the upper and lower sides is completely covered therein; and the surrounding side wall 36' is The conductive electrodes 331', 341' are exposed to the colloid of the ferromagnetic material, and the ferromagnetic colloid protective layer 38' is formed after the colloid of the ferromagnetic material is solidified. Subsequently, the preheating resin is pressurized into the accommodating space until the surrounding side wall 36' is filled. After the resin is hardened, the housing corresponding to each of the substrates 31' is formed, and the conductive electrodes 331', 341' on the upper and lower sides are formed. Still exposed.

接下如,以例如鑽石刀切割,將基板31’與基板31’成條狀分離,並使形成有導接電極331’、341’的側邊暴露,再如圖19所示,將成條的基板31’疊置後,同時對各個基板31’側邊以例如濺鍍的方式濺鍍一層側邊導電層,使上下方的導接電極331’、341’均可延伸導接至側邊,接下來將整條的複數個元件逐個分離,再進行滾鍍作業,使得側邊電極增厚,並使得基板31’上方的導接電極331’、341’分別妥善導接至下方的導接電極331’、341’。因此,元件的上方與下方形成對稱的構造,無論上方或下方都可供焊接,從而完成如圖20所示,本例之低構形高功率電感器。Next, for example, cutting with a diamond knife, the substrate 31' is separated from the substrate 31' in a strip shape, and the side edges on which the conductive electrodes 331', 341' are formed are exposed, and as shown in FIG. After the substrate 31' is stacked, a side conductive layer is sputtered on the side of each substrate 31' by, for example, sputtering, so that the upper and lower conductive electrodes 331', 341' can be extended to the side. Next, the entire plurality of components are separated one by one, and then the barrel plating operation is performed to thicken the side electrodes, and the guiding electrodes 331' and 341' above the substrate 31' are properly guided to the lower guiding respectively. Electrodes 331', 341'. Therefore, the upper and lower sides of the element form a symmetrical structure, which can be soldered either above or below, thereby completing the low profile high power inductor of this example as shown in FIG.

更進一步,如果是將前一實施例中,上下兩側的鸚鵡螺狀線圈彼此斷路不導接,並且讓其中一方所形成的磁力線感應至另一方,則可構成一個微型變壓器,故參考圖21所示,本案之第三較佳實施例,在本例中,基板31”同樣具有一個貫穿上下的鐵芯320”,並在基板31”的兩相反面上,同樣形成兩個鸚鵡螺狀線圈32”,以及分別形成一個環繞側壁36”,由於在本例中,上、下兩個鸚鵡螺狀線圈32”所繞的線圈匝數並不同,且各鸚鵡螺狀線圈32”的最中央端部並未接觸鐵芯320”,而是將上方鸚鵡螺狀線圈32”最中心與最外側的兩端部分別導接至上方環繞側壁36”的導接電極331”、341”,以及下方鸚鵡螺狀線圈32”最中心與最外側的兩端部分別導接至下方環繞側壁36”的導接電極331”、341”。Further, if the nautilus coils on the upper and lower sides are not connected to each other in the previous embodiment, and the magnetic lines formed by one of the ones are induced to the other, a micro-transformer can be constructed, so referring to FIG. 21 As shown in the third preferred embodiment of the present invention, in this example, the substrate 31" also has a core 320" extending through the upper and lower sides, and on the opposite sides of the substrate 31", two nautilus coils are also formed. 32", and respectively form a surrounding side wall 36", since in this example, the upper and lower two nautilus coils 32" are wound with different numbers of turns, and the central end of each parrot screw 32" The portion does not contact the core 320", but connects the most central and outermost ends of the upper nautilus coil 32" to the guiding electrodes 331", 341" of the upper surrounding side wall 36", respectively, and the lower parrot The most central and outermost ends of the spiral coil 32" are respectively guided to the conductive electrodes 331", 341" of the lower surrounding side wall 36".

最後如圖22所示,在上、下容置部中分別填入鐵磁性膠體,形成鐵磁性膠體保護層38”,並進行各元件的分離,以及形成側邊電極,使得上方的導接電極如圖23及24所示被導引至底面,供未來表面安裝時的焊接之用。如此,藉由基板兩側之電感器元件即可共同架構出本例之晶片變壓器。Finally, as shown in FIG. 22, ferromagnetic colloids are respectively filled in the upper and lower accommodating portions to form a ferromagnetic colloid protective layer 38", and separation of the respective elements is performed, and side electrodes are formed, so that the upper conductive electrodes are formed. As shown in Figures 23 and 24, it is guided to the bottom surface for soldering in future surface mounting. Thus, the wafer transformer of this example can be constructed by the inductor elements on both sides of the substrate.

由於本發明之低構形高功率電感器,具有薄形化的結構,因此表面安裝於電路板上時,即可減少電路佈局所佔用的空間,而且在製造過程中相當精密,使得電感值(L)精確,尤其本案之晶片電感器結構簡單,單次製造過程可以製造大量元件,不受限於習知技術的個別繞線,使得作業程序簡化,提昇產品良率與產出效率,達成上述各項目的。Since the low-profile high-power inductor of the present invention has a thinned structure, when the surface is mounted on the circuit board, the space occupied by the circuit layout can be reduced, and the manufacturing process is quite precise, so that the inductance value ( L) Accurate, especially the wafer inductor of the present invention has a simple structure, a large number of components can be manufactured in a single manufacturing process, and is not limited to individual windings of the prior art, so that the operation procedure is simplified, the product yield and the output efficiency are improved, and the above is achieved. Every purpose.

惟以上所述者,僅本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications according to the scope of the present invention and the description of the invention are still It is within the scope of the patent of the present invention.

11...磁芯11. . . Magnetic core

12、22...線圈12, 22. . . Coil

13...電極13. . . electrode

14、25、31、31’、31”...基板14, 25, 31, 31', 31"... substrate

15...殼體15. . . case

26...金屬殼體26. . . Metal housing

30...基材30. . . Substrate

310...脆弱部310. . . Vulnerable department

3310...銅層3310. . . Copper layer

361...光阻膜361. . . Photoresist film

40...光罩40. . . Mask

32、32’、32”...鸚鵡螺狀線圈32, 32', 32"... Nautilus coil

330、340...穿孔330, 340. . . perforation

331、341、331’、341’、331”、341”...導接電極331, 341, 331', 341', 331", 341". . . Lead electrode

38、38’、38”...鐵磁性膠體保護層38, 38', 38"... Ferromagnetic colloidal protective layer

320’...導體柱320’. . . Conductor column

311’...穿孔311’. . . perforation

36’、36”...環繞側壁36', 36"... around the side wall

360’...容置部360’. . . Housing

320”...鐵芯320"...iron core

圖1是習知表面安装晶片電感器;Figure 1 is a conventional surface mount chip inductor;

圖2是習知具有螺旋狀單層纏繞線圈的表面安装晶片電感器;2 is a conventional surface mount wafer inductor having a spiral single layer wound coil;

圖3是本案低構形高功率電感器之第一較佳實施例之基材預切割而形成複數個彼此連結的基板之示意圖;3 is a schematic view showing the substrate of the first preferred embodiment of the low-profile high-power inductor of the present invention pre-cut to form a plurality of substrates connected to each other;

圖4是圖3之基板上先濺鍍一層銅層,於銅層上塗佈一層光阻膜,並將一個具有預定圖案的光罩覆蓋於光阻膜的側視圖;4 is a side view of the substrate of FIG. 3 with a copper layer sputtered, a photoresist film coated on the copper layer, and a photomask having a predetermined pattern covering the photoresist film;

圖5是圖4之基板的俯視圖;Figure 5 is a plan view of the substrate of Figure 4;

圖6是圖4之剩餘的光阻膜以螺旋狀分佈於基板及銅層之上的側視圖;6 is a side view of the remaining photoresist film of FIG. 4 spirally distributed over the substrate and the copper layer;

圖7是圖6之分佈於基板之銅層呈螺旋狀的側視圖;Figure 7 is a side view of the copper layer of Figure 6 distributed on the substrate in a spiral shape;

圖8是圖7之螺旋狀的銅層進行電鍍使其增厚形成一個鸚鵡螺狀線圈的側視圖;Figure 8 is a side elevational view of the spiral copper layer of Figure 7 electroplated to form a nautilus coil;

圖9是圖8之基板形成有鸚鵡螺狀線圈的俯視圖;Figure 9 is a plan view showing the base of Figure 8 formed with a nautilus coil;

圖10是圖8之基板以雷射鑽孔貫穿基板形成兩個穿孔的側視圖;Figure 10 is a side view of the substrate of Figure 8 with two holes formed by laser drilling through the substrate;

圖11是圖10之穿孔填滿導電銀膠,令鸚鵡螺狀線圈兩端分別導接至基板下方的兩個導接電極的側視圖;Figure 11 is a side view of the perforation of Figure 10 filled with conductive silver glue, so that the two ends of the parrot screw are respectively guided to the underlying electrodes of the substrate;

圖12是圖11之鸚鵡螺狀線圈由混有鐵磁性材質填滿間隙及包覆,待膠體凝固後形成一個鐵磁性膠體保護層的側視圖;12 is a side view of the nautilus coil of FIG. 11 filled with a gap and a coating filled with a ferromagnetic material, and formed into a ferromagnetic colloid protective layer after the colloid is solidified;

圖13是圖12之基板切割分離後形成本例之晶片電感器的側視圖;Figure 13 is a side elevational view of the wafer inductor of the present embodiment formed after the substrate of Figure 12 is diced and separated;

圖14是本案低構形高功率電感器之第二較佳實施例之基材內埋一個貫通基板上下表面的導體柱,以及在各基板的上、下層絕緣表面分別藉由燒結的陶瓷形成一個環繞側壁的側視圖;14 is a second preferred embodiment of the low-profile high-power inductor of the present invention, in which a conductor post is embedded in the substrate on the upper and lower surfaces of the substrate, and the upper and lower insulating surfaces of each substrate are respectively formed by sintered ceramics. a side view surrounding the side wall;

圖15是圖14之基板的俯視圖;Figure 15 is a plan view of the substrate of Figure 14;

圖16是圖14之上、下環繞側壁內分別形成兩個鸚鵡螺狀線圈,以及於各環繞側壁的頂面分別形成兩個導接電極的側視圖;Figure 16 is a side view of the upper and lower surrounding side walls of Figure 14 respectively forming two nautilus coils, and forming two guiding electrodes on the top surfaces of the surrounding side walls;

圖17是圖16之基板的俯視圖;Figure 17 is a plan view of the substrate of Figure 16;

圖18是圖16之環繞側壁內灌入鐵磁性材質的膠體,待鐵磁性材質的膠體凝固後即形成鐵磁性膠體保護層的側視圖;Figure 18 is a side view of the ferromagnetic colloid of the ferromagnetic material after the colloid of the ferromagnetic material is solidified;

圖19是圖18之基板成條疊置後,同時對各個基板側邊以例如濺鍍的方式濺鍍一層側邊導電層的側視圖;19 is a side view of the substrate of FIG. 18 after being stacked in a strip, and simultaneously sputtering a side conductive layer on each substrate side by, for example, sputtering;

圖20是圖19的基板切割分離後形成本例之晶片電感器的側視圖;Figure 20 is a side view showing the wafer inductor of this example formed after the substrate of Figure 19 is diced and separated;

圖21是本案低構形高功率電感器之第三較佳實施例之上、下兩個環繞側壁內分別形成兩個不同線圈匝數之鸚鵡螺狀線圈的側視圖;21 is a side view of a nautilus-like coil in which two different coil turns are formed in the lower two surrounding sidewalls according to a third preferred embodiment of the low-profile high-power inductor of the present invention;

圖22是圖21之環繞側壁灌入鐵磁性材質的膠體,待鐵磁性材質的膠體凝固後即形成鐵磁性膠體保護層的側視圖;Figure 22 is a side view of the colloid of ferromagnetic material filled in the surrounding side wall of Figure 21, and a side view of the ferromagnetic colloid protective layer formed after the colloid of the ferromagnetic material is solidified;

圖23是圖22之基板側邊分別形成有側邊電極的側視圖;及Figure 23 is a side elevational view showing the side electrodes of the substrate of Figure 22, respectively;

圖24是圖23之基板的仰視圖。Figure 24 is a bottom plan view of the substrate of Figure 23;

指定代表圖之元件無編號 Designated components represent no number

31’‧‧‧基板 31'‧‧‧Substrate

32’‧‧‧鸚鵡螺狀線圈 32’‧‧‧ Nautilus coil

36’‧‧‧環繞側壁 36’‧‧‧ Surrounding the side wall

38’‧‧‧鐵磁性膠體保護層 38'‧‧‧ Ferromagnetic colloidal protective layer

331’、341’‧‧‧導接電極 331', 341'‧‧‧ lead electrode

360’‧‧‧容置部 360’‧‧‧ 容

Claims (4)

一種低構形高功率電感器,包含:一片至少一側表面具有絕緣表面的基板;至少一個形成於該至少一側絕緣表面上的鸚鵡螺狀線圈;一組導接該至少一個鸚鵡螺狀線圈兩端的電極;一個封閉該至少一個鸚鵡螺狀線圈的鐵磁性膠體保護層;及一個環繞側壁,係形成於對應該基板外側邊緣、並與該基板共同形成一個容置部,且該鐵磁性膠體保護層是填充於該容置部。 A low profile high power inductor comprising: a substrate having an insulating surface on at least one side surface; at least one nautilus coil formed on the at least one insulating surface; and a set of at least one nautilus coil An electrode at both ends; a ferromagnetic colloid protective layer enclosing the at least one nautilus coil; and a surrounding sidewall formed on an outer edge of the corresponding substrate and forming a receiving portion with the substrate, and the ferromagnetic colloid The protective layer is filled in the receiving portion. 如申請專利範圍第1項的低構形高功率電感器,其中該基板在兩相反面具有兩絕緣表面,且該兩絕緣表面上分別形成有前述鸚鵡螺狀線圈,以及該鐵磁性膠體保護層封閉前述各鸚鵡螺狀線圈。 The low profile high power inductor of claim 1, wherein the substrate has two insulating surfaces on opposite sides, and the aforementioned nautilus coils are respectively formed on the two insulating surfaces, and the ferromagnetic colloid protective layer The aforementioned parrot screw is closed. 如申請專利範圍第2項的低構形高功率電感器,其中該基板中更形成有一個穿孔,且該穿孔中形成有一導接前述兩鸚鵡螺狀線圈之導接電極。 The low-profile high-power inductor of claim 2, wherein a perforation is formed in the substrate, and a guiding electrode for guiding the two parrot-shaped coils is formed in the through hole. 如申請專利範圍第1項的低構形高功率電感器,其中該容置部是一個圓柱狀凹陷。 The low profile high power inductor of claim 1, wherein the receiving portion is a cylindrical recess.
TW100123581A 2011-07-04 2011-07-04 Low configuration high power inductors TWI540601B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW100123581A TWI540601B (en) 2011-07-04 2011-07-04 Low configuration high power inductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW100123581A TWI540601B (en) 2011-07-04 2011-07-04 Low configuration high power inductors

Publications (2)

Publication Number Publication Date
TW201303925A TW201303925A (en) 2013-01-16
TWI540601B true TWI540601B (en) 2016-07-01

Family

ID=48138163

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100123581A TWI540601B (en) 2011-07-04 2011-07-04 Low configuration high power inductors

Country Status (1)

Country Link
TW (1) TWI540601B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI607539B (en) * 2015-02-16 2017-12-01 精材科技股份有限公司 Chip package and manufacturing method thereof
TWI685858B (en) * 2017-12-04 2020-02-21 希華晶體科技股份有限公司 Mass production method of thin choke

Also Published As

Publication number Publication date
TW201303925A (en) 2013-01-16

Similar Documents

Publication Publication Date Title
CN106449011B (en) Inductor
KR101525703B1 (en) Chip electronic component and manufacturing method thereof
JP6716865B2 (en) Coil parts
US11056261B2 (en) Inductor
KR101565700B1 (en) Chip electronic component, manufacturing method thereof and board having the same mounted thereon
JP6429609B2 (en) Coil component and manufacturing method thereof
TWI387980B (en) Winding electronic parts
JP6716867B2 (en) Coil component and manufacturing method thereof
US10986732B2 (en) Laminated circuit board, and electronic component
JP2022517550A (en) Packaged electronic device with suspended magnetic subassembly
KR20150105787A (en) Chip electronic component and manufacturing method thereof
CN112992476B (en) Transformer, and package module
CN108604491A (en) Inductor components and its manufacturing method
JP2018078133A (en) Built-in coil glass substrate and build-up substrate
JP2017017140A (en) Coil component
TWI540601B (en) Low configuration high power inductors
US20210265102A1 (en) Inductor component and resin sealing body
JP2016225463A (en) Coil component
JP2016225464A (en) Coil component
WO2017131011A1 (en) Inductor component and manufacturing method therefor
CN102867615A (en) Low-configuration and high-power inductor
TWI533339B (en) Chip inductor with preformed shell and method of manufacturing the same
US20110193672A1 (en) Magnetic element and method for manufacturing the same
US9053853B1 (en) Method of forming a magnetics package
JP6428203B2 (en) Coil component and manufacturing method thereof

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees