JP2017017140A - Coil component - Google Patents

Coil component Download PDF

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Publication number
JP2017017140A
JP2017017140A JP2015131265A JP2015131265A JP2017017140A JP 2017017140 A JP2017017140 A JP 2017017140A JP 2015131265 A JP2015131265 A JP 2015131265A JP 2015131265 A JP2015131265 A JP 2015131265A JP 2017017140 A JP2017017140 A JP 2017017140A
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Japan
Prior art keywords
resin
coil
substrate
resin wall
winding
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JP6716866B2 (en
Inventor
大久保 等
Hitoshi Okubo
等 大久保
正純 荒田
Masazumi Arata
正純 荒田
太田 学
Manabu Ota
学 太田
優也 要
Yuya Kaname
優也 要
佳宏 前田
Yoshihiro Maeda
佳宏 前田
崇宏 川原
Takahiro Kawahara
崇宏 川原
北斗 江田
Hokuto Eda
北斗 江田
佐藤 茂樹
Shigeki Sato
佐藤  茂樹
京平 伊木
Kyohei Iki
京平 伊木
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TDK Corp
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TDK Corp
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Priority to KR1020160080507A priority patent/KR101846817B1/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/32Insulating of coils, windings, or parts thereof
    • H01F27/323Insulation between winding turns, between winding layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F17/0013Printed inductances with stacked layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/2804Printed windings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/32Insulating of coils, windings, or parts thereof
    • H01F27/324Insulation between coil and core, between different winding sections, around the coil; Other insulation structures

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a coil component that can suppress distortion and collapse of a winding portion caused by pressure from the thickness direction or surface direction of a substrate.SOLUTION: In a coil component which includes a substrate 11, a coil provided on the main surface of the substrate 11 by plating growth, a resin body which is provided on the main surface of the substrate 11 and has plural resin walls 18 between which winding portions 14 of the coil extend, and resin containing magnetic powder, the resin wall 18 has a stable cross-sectional shape in which the width d2'of the upper end portion of the resin wall 18 is larger than the width d2"of the lower end portion, and the width of the upper end portion of the winding portions 14 extending between the resin walls 18 is narrower than the width of the lower end portion. The winding portions 14 have a stable cross-sectional shape with a large cross-sectional area on the substrate 11 side. Therefore, the strength of the winding portions 14 is improved.SELECTED DRAWING: Figure 5

Description

本発明は、コイル部品に関する。   The present invention relates to a coil component.

従来、表面実装型の平面コイル素子等のコイル部品が、民生用機器、産業用機器等の電気製品に幅広く利用されている。中でも小型携帯機器においては、機能の充実化に伴い、各々のデバイスを駆動させるために単一の電源から複数の電圧を得る必要が生じてきている。そこで、このような電源用途等にも表面実装型の平面コイル素子が使用されている。   Conventionally, coil components such as surface-mount type planar coil elements have been widely used in electrical products such as consumer equipment and industrial equipment. In particular, in small portable devices, as functions are enhanced, it is necessary to obtain a plurality of voltages from a single power source in order to drive each device. Therefore, surface mount type planar coil elements are also used for such power supply applications.

このようなコイル部品は、たとえば、下記特許文献1に開示されている。この文献に開示されたコイル部品は、基板の表裏面にそれぞれ平面渦巻き状の空芯コイルが設けられ、空芯コイルの磁芯部分において基板を貫くように設けられたスルーホール導体により空芯コイル同士が接続されている。   Such a coil component is disclosed in Patent Document 1 below, for example. In the coil component disclosed in this document, a flat spiral air core coil is provided on each of the front and back surfaces of the substrate, and the air core coil is formed by a through-hole conductor provided so as to penetrate the substrate in the magnetic core portion of the air core coil. They are connected to each other.

特開2005−210010号公報Japanese Patent Laid-Open No. 2005-210010

上述した空芯コイルは、基板上に設けられたシードパターンに、Cuなどの導体材料をめっき成長させることで形成されるが、基板の面方向へのめっき成長によりコイルの巻回部の間隔が狭まる。コイルの巻回部の間隔が狭い場合には、コイルの絶縁性低下が懸念されるため、より確実に絶縁する技術が望まれている。   The above-described air-core coil is formed by plating and growing a conductor material such as Cu on a seed pattern provided on a substrate, but the interval between the coil winding portions is increased by plating growth in the surface direction of the substrate. It narrows. When the interval between the winding portions of the coil is narrow, there is a concern about a decrease in the insulating property of the coil. Therefore, a technique for insulating more reliably is desired.

そこで、コイルの隣り合う巻回部の間に樹脂壁を設けて確実な絶縁を図る技術の開発が進められている。ただし、コイル部品には、基板の厚さ方向や面方向からの圧力が付加されることが考えられ、該圧力に起因する歪みや倒壊が生じない程度の十分な強度が上記巻回部には求められる。   In view of this, development of a technique for ensuring insulation by providing a resin wall between adjacent winding portions of a coil is underway. However, it is conceivable that a pressure from the thickness direction or the surface direction of the substrate is applied to the coil component, and the winding portion has a sufficient strength that does not cause distortion or collapse due to the pressure. Desired.

本発明は、上述の課題を解決するためになされたものであり、巻回部の強度の向上が図られたコイル部品を提供することを目的とする。   The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a coil component in which the strength of a winding portion is improved.

本発明の一側面に係るコイル部品は、基板と、基板の主面上にめっき成長で設けられたコイルと、基板の主面上に設けられ、コイルの巻回部が間に延びる複数の樹脂壁を有する樹脂体と、磁性粉含有樹脂からなり、基板の主面のコイルと樹脂体とを一体的に覆う被覆樹脂とを備え、樹脂壁は、上端部の幅が下端部の幅より広い。   A coil component according to an aspect of the present invention includes a substrate, a coil provided by plating growth on the main surface of the substrate, and a plurality of resins provided on the main surface of the substrate and having a coil winding portion extending therebetween. A resin body having a wall and a coating resin made of a magnetic powder-containing resin and integrally covering the coil on the main surface of the substrate and the resin body, the resin wall having a width at the upper end wider than that at the lower end .

このようなコイル部品においては、樹脂壁の上端部の幅が下端部の幅より広く、該樹脂壁の間に延びる巻回部では、上端部の幅が下端部の幅より狭くなっている。そのため、巻回部は、基板側の断面積が大きな安定した断面形状を有している。そのため、巻回部は強度の向上が図られており、このようなコイル部品においては、基板の厚さ方向や面方向からの圧力に起因する巻回部の歪みや倒壊が抑制される。   In such a coil component, the width of the upper end portion of the resin wall is wider than the width of the lower end portion, and the width of the upper end portion is narrower than the width of the lower end portion in the winding portion extending between the resin walls. Therefore, the winding part has a stable cross-sectional shape with a large cross-sectional area on the substrate side. Therefore, the strength of the winding portion is improved, and in such a coil component, distortion and collapse of the winding portion due to pressure from the thickness direction or the surface direction of the substrate are suppressed.

樹脂壁の幅は、該樹脂壁の側面が傾斜面となるように、上端部から下端部に向けて漸次狭まる態様であってもよく、また、該樹脂壁の側面に段部が形成されるように、上端部から下端部に向けて段階的に狭まる態様であってもよい。   The width of the resin wall may be such that the side surface of the resin wall gradually decreases from the upper end portion toward the lower end portion so that the side surface of the resin wall becomes an inclined surface, and a step portion is formed on the side surface of the resin wall. Thus, the aspect which narrows in steps toward a lower end part from an upper end part may be sufficient.

また、樹脂体の樹脂壁の断面形状が四角形状である態様であってもよい。このとき、樹脂体の樹脂壁の断面は底辺の長さに対する高さの比が1より大きく、該樹脂壁が基板の主面の法線方向に沿って長く延びている態様であってもよい。   Moreover, the aspect whose cross-sectional shape of the resin wall of a resin body is square shape may be sufficient. At this time, the cross section of the resin wall of the resin body may be such that the ratio of the height to the length of the base is greater than 1, and the resin wall extends long along the normal direction of the main surface of the substrate. .

また、コイルの巻回部の断面形状が四角形状である態様であってもよい。このとき、コイルの巻回部の断面は底辺の長さに対する高さの比が1より大きく、該巻回部の断面が基板の主面の法線方向に沿って長く延びている態様であってもよい。   Moreover, the aspect whose cross-sectional shape of the winding part of a coil is square shape may be sufficient. At this time, the section of the coil winding portion has a ratio of the height to the length of the base larger than 1, and the section of the winding portion extends long along the normal direction of the main surface of the substrate. May be.

また、樹脂体の樹脂壁の高さがコイルの巻回部の高さより高い態様であってもよい。この場合、巻回部は、高さ方向にわたって設計寸法どおりの厚さとなり得る。また、巻回部同士が樹脂壁を越えて接する事態が有意に回避される。   Moreover, the aspect whose resin wall height of a resin body is higher than the height of the winding part of a coil may be sufficient. In this case, the winding portion can have a thickness according to the design dimension over the height direction. Moreover, the situation where winding parts contact | connect over a resin wall is significantly avoided.

また、樹脂体は、基板の主面上にコイルがめっき成長される前に設けられ、コイルの巻回部は、樹脂体の樹脂壁に接着されていない態様であってもよい。   Further, the resin body may be provided before the coil is plated on the main surface of the substrate, and the winding portion of the coil may not be bonded to the resin wall of the resin body.

また、基板の主面上に複数並んだ樹脂壁のうち、最外に位置する樹脂壁の厚さが内側に位置する樹脂壁の厚さより厚い態様であってもよい。   Further, among the resin walls arranged on the main surface of the substrate, the outermost resin wall may be thicker than the resin wall located inside.

本発明によれば、巻回部の強度の向上が図られたコイル部品が提供される。   ADVANTAGE OF THE INVENTION According to this invention, the coil component by which the improvement of the intensity | strength of the winding part was achieved is provided.

図1は、本発明の実施形態に係るコイル部品の概略斜視図である。FIG. 1 is a schematic perspective view of a coil component according to an embodiment of the present invention. 図2は、図1に示すコイル部品の製造に用いられる基板を示した斜視図である。FIG. 2 is a perspective view showing a substrate used for manufacturing the coil component shown in FIG. 図3は、図2に示した基板のシードパターンを示した平面図である。FIG. 3 is a plan view showing a seed pattern of the substrate shown in FIG. 図4は、図1に示すコイル部品の製造方法の一工程を示した斜視図である。FIG. 4 is a perspective view showing one step of the method of manufacturing the coil component shown in FIG. 図5は、図4のV−V線断面図である。5 is a cross-sectional view taken along line VV in FIG. 図6は、コイルの巻回部上に設けられる絶縁体を示した断面図である。FIG. 6 is a cross-sectional view showing an insulator provided on the winding portion of the coil. 図7は、図1に示すコイル部品の製造方法の一工程を示した斜視図である。FIG. 7 is a perspective view showing one step of the method of manufacturing the coil component shown in FIG. 図8は、図1に示すコイル部品の製造方法の一工程を示した斜視図である。FIG. 8 is a perspective view showing one step of the method of manufacturing the coil component shown in FIG. 図9は、樹脂壁の変形例を示した断面図である。FIG. 9 is a cross-sectional view showing a modified example of the resin wall.

以下、添付図面を参照して、本発明の実施形態について詳細に説明する。なお、説明において、同一要素又は同一機能を有する要素には、同一符号を用いることとし、重複する説明は省略する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description, the same reference numerals are used for the same elements or elements having the same function, and redundant description is omitted.

まず、本発明の実施形態に係るコイル部品の構造について、図1〜4を参照しつつ説明する。説明の便宜上、図示のようにXYZ座標を設定する。すなわち、平面コイル素子の厚さ方向をZ方向、外部端子電極の対面方向をY方向、Z方向とY方向とに直交する方向をX方向と設定する。   First, the structure of the coil component according to the embodiment of the present invention will be described with reference to FIGS. For convenience of explanation, XYZ coordinates are set as shown. That is, the thickness direction of the planar coil element is set as the Z direction, the facing direction of the external terminal electrode is set as the Y direction, and the direction orthogonal to the Z direction and the Y direction is set as the X direction.

コイル部品1は、略直方体形状を呈する本体部10と、本体部10の対向する一対の端面を覆うようにして設けられた一対の外部端子電極30A、30Bとによって構成されている。コイル部品1は、一例として、長辺2.0mm、短辺1.6mm、高さ0.9mmの寸法で設計される。   The coil component 1 includes a main body portion 10 having a substantially rectangular parallelepiped shape and a pair of external terminal electrodes 30A and 30B provided so as to cover a pair of opposed end faces of the main body portion 10. As an example, the coil component 1 is designed with dimensions of a long side of 2.0 mm, a short side of 1.6 mm, and a height of 0.9 mm.

以下では、本体部10を作製する手順を示しつつ、併せて、コイル部品1の構造についても説明する。   Below, while showing the procedure of producing the main-body part 10, the structure of the coil component 1 is also demonstrated.

本体部10は、図2に示す基板11を含んでいる。基板11は、非磁性の絶縁材料で構成された平板矩形状の部材である。基板11の中央部分には、主面11a、11b間を繋ぐように貫通された略円形の開口12が設けられている。基板11としては、ガラスクロスにシアネート樹脂(BT(ビスマレイミド・トリアジン)レジン:登録商標)が含浸された基板で、板厚60μmのものを用いることができる。なお、BTレジンのほか、ポリイミド、アラミド等を用いることもできる。基板11の材料としては、セラミックやガラスを用いることもできる。基板11の材料としては、大量生産されているプリント基板材料が好ましく、特にBTプリント基板、FR4プリント基板、あるいはFR5プリント基板に用いられる樹脂材料が最も好ましい。   The main body 10 includes a substrate 11 shown in FIG. The substrate 11 is a flat rectangular member made of a nonmagnetic insulating material. A substantially circular opening 12 is provided in the center portion of the substrate 11 so as to pass through the main surfaces 11a and 11b. As the substrate 11, a substrate in which a glass cloth is impregnated with a cyanate resin (BT (bismaleimide / triazine) resin: registered trademark) having a plate thickness of 60 μm can be used. In addition to BT resin, polyimide, aramid, etc. can also be used. As the material of the substrate 11, ceramic or glass can be used. The material of the substrate 11 is preferably a mass-produced printed circuit board material, and most preferably a resin material used for a BT printed circuit board, FR4 printed circuit board, or FR5 printed circuit board.

基板11には、図3に示すように、それぞれの主面11a、11bに、後述するコイル13をめっき成長させるためのシードパターン13Aが形成されている。シードパターン13Aは、基板11の開口12の周りを回る螺旋パターン14Aと、基板11のY方向に関する端部に形成された端部パターン15Aとを有し、これらのパターン14A、15Aが連続的かつ一体的に形成されている。なお、一方の主面11a側に設けられるコイル13と他方の主面11b側に設けられるコイル13とでは電極引き出し方向が逆であり、そのため、一方の主面11a側の端部パターン15Aと他方の主面11b側の端部パターンとは、基板11のY方向に関する互いに異なる端部に形成されている。   As shown in FIG. 3, a seed pattern 13A for plating growth of a coil 13 described later is formed on the main surface 11a, 11b of the substrate 11, as shown in FIG. The seed pattern 13A has a spiral pattern 14A that turns around the opening 12 of the substrate 11, and an end pattern 15A that is formed at the end of the substrate 11 in the Y direction, and these patterns 14A, 15A are continuous and It is integrally formed. The coil 13 provided on the one main surface 11a side and the coil 13 provided on the other main surface 11b side have opposite electrode drawing directions, so that the end pattern 15A on the one main surface 11a side and the other The end pattern on the main surface 11b side is formed at different end portions of the substrate 11 in the Y direction.

図2に戻って、基板11の各主面11a、11b上には、樹脂体17が設けられている。樹脂体17は、公知のフォトリソグラフィーによってパターニングされた厚膜レジストである。樹脂体17は、コイル13の巻回部14の成長領域を画定する樹脂壁18と、コイル13の引出電極部15の成長領域を画定する樹脂壁19とを有している。   Returning to FIG. 2, a resin body 17 is provided on each main surface 11 a, 11 b of the substrate 11. The resin body 17 is a thick film resist patterned by known photolithography. The resin body 17 includes a resin wall 18 that defines the growth region of the winding portion 14 of the coil 13 and a resin wall 19 that defines the growth region of the extraction electrode portion 15 of the coil 13.

図4は、シードパターン13Aを用いてコイル13をめっき成長させたときの基板11の状態を示している。コイル13のめっき成長には、公知のめっき成長方法を採用することができる。   FIG. 4 shows the state of the substrate 11 when the coil 13 is grown by plating using the seed pattern 13A. For plating growth of the coil 13, a known plating growth method can be employed.

コイル13は、銅で構成されており、シードパターン13Aの螺旋パターン14A上に形成された巻回部14と、シードパターン13Aの端部パターン15A上に形成された引出電極部15とを有している。コイル13は、平面視したときに、シードパターン13A同様、基板11の主面11a、11bに平行に延在する平面渦巻き状の空芯コイルの形状となっている。より詳しくは、基板上面11aの巻回部14は、上面側から見て外側に向かう方向に沿って左回転の渦巻きであり、基板下面11bの巻回部14は、下面側から見て、外側に向かう方向に沿って左回転の渦巻きである。基板上面11aおよび基板下面11bの両コイル13は、たとえば、開口12の近傍に別途設けられた貫通孔を介して端部同士が接続される。両コイル13に一方向に電流を流したときには、両コイル13の電流の流れる回転方向が同一となるため、コイル13で発生する磁束が重畳して強め合う。   The coil 13 is made of copper, and has a winding portion 14 formed on the spiral pattern 14A of the seed pattern 13A and an extraction electrode portion 15 formed on the end pattern 15A of the seed pattern 13A. ing. The coil 13 is in the shape of a plane spiral air-core coil extending in parallel with the main surfaces 11a and 11b of the substrate 11 when viewed in plan, like the seed pattern 13A. More specifically, the winding portion 14 of the substrate upper surface 11a is a spiral that rotates counterclockwise along the direction toward the outside when viewed from the upper surface side, and the winding portion 14 of the substrate lower surface 11b is the outer surface when viewed from the lower surface side. It is a swirl that rotates counterclockwise along the direction toward. For example, both ends of the coils 13 on the substrate upper surface 11 a and the substrate lower surface 11 b are connected to each other through a through hole separately provided in the vicinity of the opening 12. When a current is applied to both coils 13 in one direction, the rotational directions in which the currents of both coils 13 flow are the same, so that the magnetic flux generated in the coils 13 is superimposed and strengthened.

図5は、図4に示しためっき成長後の基板11の状態を示しており、図4のV−V線断面図である。   FIG. 5 shows a state of the substrate 11 after the plating growth shown in FIG. 4, and is a cross-sectional view taken along the line VV of FIG.

図5に示すように、基板11上には、基板11の法線方向(Z方向)に沿って長く延びる四角形状断面(図5では台形状断面)の樹脂壁18が形成されており、これらの樹脂壁18の間においてコイル13の巻回部14がZ方向に成長する。コイル13の巻回部14は、その成長領域が、めっき成長前に基板11上に形成された樹脂壁18によって予め画定されている。   As shown in FIG. 5, a resin wall 18 having a rectangular cross section (trapezoidal cross section in FIG. 5) extending long along the normal direction (Z direction) of the substrate 11 is formed on the substrate 11. The winding portion 14 of the coil 13 grows in the Z direction between the resin walls 18. The growth region of the winding portion 14 of the coil 13 is defined in advance by a resin wall 18 formed on the substrate 11 before plating growth.

コイル13の巻回部14は、螺旋パターン14Aの一部であるシード部14aと、シード部14a上にめっき成長させためっき部14bとで構成されており、シード部14a周りにめっき部14bが徐々に成長していくことにより形成される。このとき、コイル13の巻回部14は、隣り合う2つの樹脂壁18の間に画成された空間を充たすように成長して、樹脂壁18の間に画成された空間と同一の形状に形成され、その結果、コイル13の巻回部14は基板11の法線方向(Z方向)に沿って長く延びる形状となる。すなわち、樹脂壁18の間に画成される空間の形状を調整することで、コイル13の巻回部14の形状が調整され、設計したとおりの形状にコイル13の巻回部14を形成することができる。   The winding portion 14 of the coil 13 includes a seed portion 14a that is a part of the spiral pattern 14A and a plating portion 14b that is plated and grown on the seed portion 14a. The plating portion 14b is provided around the seed portion 14a. It is formed by gradually growing. At this time, the winding portion 14 of the coil 13 grows so as to fill a space defined between two adjacent resin walls 18, and has the same shape as the space defined between the resin walls 18. As a result, the winding portion 14 of the coil 13 has a shape extending long along the normal direction (Z direction) of the substrate 11. That is, by adjusting the shape of the space defined between the resin walls 18, the shape of the winding portion 14 of the coil 13 is adjusted, and the winding portion 14 of the coil 13 is formed in the shape as designed. be able to.

コイル13の巻回部14は、隣り合う2つの樹脂壁18の間を成長する際、成長領域を画定する樹脂壁18の内側面に接しながら成長していく。このとき、コイル13の巻回部14と樹脂壁18との間には、機械的結合も化学的結合も生じない。すなわち、コイル13の巻回部14は、樹脂壁18と接着されないままめっき成長し、非接着状態で樹脂壁18の間に介在する。本明細書において「非接着状態」とは、アンカー効果等の機械的結合および共有結合等の化学的結合が生じていない状態をいう。   When the winding portion 14 of the coil 13 grows between two adjacent resin walls 18, it grows in contact with the inner surface of the resin wall 18 that defines the growth region. At this time, neither mechanical bonding nor chemical bonding occurs between the winding portion 14 of the coil 13 and the resin wall 18. That is, the winding part 14 of the coil 13 is plated and grown without being bonded to the resin wall 18 and is interposed between the resin walls 18 in a non-bonded state. In the present specification, the “non-adhesion state” refers to a state where no mechanical bond such as an anchor effect or chemical bond such as a covalent bond occurs.

樹脂壁18は、四角形状断面(図5では上底よりも下底が短い台形状断面)を有し、上端部の幅d2’が下端部の幅d2’’より広くなっている。樹脂壁18、より具体的には、樹脂壁18の側面18aが傾斜面となるように、上端部から下端部に向けて漸次狭まっている。樹脂壁18の断面寸法は、一例として、高さ50〜300μm、上端部の幅(厚さ)5〜30μm、下端部の幅(厚さ)5〜30μm、下端部の幅(底辺)に対する高さの比5〜30である。樹脂壁18の断面寸法は、高さ180〜300μm、上端部の幅(厚さ)5〜12μm、下端部の幅(厚さ)5〜12μm、下端部の幅に対する高さの比15〜30であってもよい。なお、樹脂壁18の下端部の幅d2’’は、上端側の幅d2’の80%〜30%とすることができる。樹脂壁18の上端部の幅d2’を、下端部の幅d2’’に対して広くすることは、たとえば、フォトリソグラフィの露光条件を調整することにより実現することができる。   The resin wall 18 has a rectangular cross section (a trapezoidal cross section in which the lower base is shorter than the upper base in FIG. 5), and the width d2 'at the upper end is wider than the width d2' 'at the lower end. The resin wall 18, more specifically, the side wall 18a of the resin wall 18 is gradually narrowed from the upper end portion toward the lower end portion so as to be an inclined surface. The cross-sectional dimensions of the resin wall 18 are, for example, 50 to 300 μm in height, 5 to 30 μm in width (thickness) at the upper end, 5 to 30 μm in width (thickness) at the lower end, and high relative to the width (bottom) at the lower end. The ratio is 5-30. The cross-sectional dimensions of the resin wall 18 are 180 to 300 μm in height, 5 to 12 μm in width (thickness) at the upper end, 5 to 12 μm in width (thickness) at the lower end, and 15 to 30 in height ratio to the width of the lower end. It may be. Note that the width d2 ″ of the lower end portion of the resin wall 18 may be 80% to 30% of the width d2 ′ on the upper end side. Increasing the width d2 'of the upper end portion of the resin wall 18 relative to the width d2 "of the lower end portion can be realized by adjusting, for example, exposure conditions of photolithography.

コイル13の巻回部14は、図5に示すように上底よりも下底が長い台形状断面を有し、その断面寸法は、一例として、高さ80〜260μm、幅(厚さ)40〜260μm、下端部の幅(底辺)に対する高さの比1〜5である。コイル13の巻回部14の下端部の幅に対する高さの比は2〜5であってもよい。   As shown in FIG. 5, the winding portion 14 of the coil 13 has a trapezoidal cross section in which the lower base is longer than the upper base, and the cross-sectional dimensions thereof are, for example, a height of 80 to 260 μm and a width (thickness) of 40. ˜260 μm, the ratio of the height to the width (base) of the lower end is 1 to 5. The ratio of the height to the width of the lower end portion of the winding portion 14 of the coil 13 may be 2 to 5.

さらに、図5に示すように、コイル13の巻回部14の上面14cは、上側に突き出た形状となっている。より詳しくは、コイル13の巻回部14の上面14cは、中央部では基板11の主面11aに対して略平行になっているが、樹脂壁18近傍の端部では曲線状に漸次下降している。そして、コイル13の巻回部14の上面14cにおいては、基板11の主面11aに対する相対位置に関し、上面14cの樹脂壁18と接する高さ位置が、上面14cの中央部に位置する最高の高さ位置よりも低くなっている。   Furthermore, as shown in FIG. 5, the upper surface 14c of the winding part 14 of the coil 13 has a shape protruding upward. More specifically, the upper surface 14c of the winding portion 14 of the coil 13 is substantially parallel to the main surface 11a of the substrate 11 at the center, but gradually falls in a curved shape at the end near the resin wall 18. ing. And in the upper surface 14c of the winding part 14 of the coil 13, with respect to the relative position with respect to the main surface 11a of the board | substrate 11, the height position which contact | connects the resin wall 18 of the upper surface 14c is the highest height located in the center part of the upper surface 14c. It is lower than the position.

図5に示すとおり、コイル13の巻回部14の高さhは、樹脂壁18の高さHよりも低いこと(h<H)が好ましい。すなわち、コイル13の巻回部14のめっき成長が樹脂壁18の高さHよりも低い位置で止まるように調整することが好ましい。コイル13の巻回部14の高さhが樹脂壁18の高さHよりも低いと、巻回部14は高さ方向にわたって設計寸法どおりの厚さとなる。また、コイル13の巻回部14の高さhが、樹脂壁18の高さHより高いと、隣り合う巻回部14同士が接触したり後述する絶縁体40や接合層41の厚さを十分に確保できなくなったりする事態が生じ、コイル13の耐圧抵抗が低下するためである。   As shown in FIG. 5, the height h of the winding portion 14 of the coil 13 is preferably lower than the height H of the resin wall 18 (h <H). That is, it is preferable to adjust so that the plating growth of the winding portion 14 of the coil 13 stops at a position lower than the height H of the resin wall 18. When the height h of the winding part 14 of the coil 13 is lower than the height H of the resin wall 18, the winding part 14 has a thickness as designed across the height direction. Further, when the height h of the winding portion 14 of the coil 13 is higher than the height H of the resin wall 18, the adjacent winding portions 14 come into contact with each other or the thickness of the insulator 40 and the bonding layer 41 described later is set. This is because a situation occurs in which the sufficient resistance cannot be secured and the withstand voltage resistance of the coil 13 is reduced.

また、樹脂壁18によって画成された空間は、上端が開放されており、樹脂壁18の上端部が巻回部14の上側を覆うように回り込んでいないため、巻回部14の上側の設計自由度が高い。すなわち、巻回部14の上に任意の層を形成する態様も何の層も形成しない態様も選択し得る。   Moreover, since the upper end of the space defined by the resin wall 18 is open and the upper end portion of the resin wall 18 does not go around so as to cover the upper side of the winding portion 14, High design freedom. That is, an aspect in which an arbitrary layer is formed on the winding portion 14 or an aspect in which no layer is formed can be selected.

巻回部14の上に層を形成する場合には、各種の層形態や層材料を選択し得る。たとえば、図6に示すように、巻回部14の上に、後述する被覆樹脂21に含まれる金属磁性粉と巻回部14との間の絶縁性を高めるために、絶縁体40を設けることができる。絶縁体40は、絶縁樹脂または絶縁磁性材料で構成することができる。また、絶縁体40は、巻回部14の上面14cに直接的または間接的に接するとともに、巻回部14と樹脂壁18とを一体的に覆っている。なお、絶縁体40は、巻回部14のみを選択的に覆う構成にすることもできる。また、巻回部14と絶縁体40との間の接合性を高めるために、所定の接合層(たとえば、酸化による銅めっきの黒化層)41を設けることができる。   When forming a layer on the winding part 14, various layer forms and layer materials can be selected. For example, as shown in FIG. 6, an insulator 40 is provided on the winding portion 14 in order to improve the insulation between the metal magnetic powder contained in the coating resin 21 described later and the winding portion 14. Can do. The insulator 40 can be made of an insulating resin or an insulating magnetic material. The insulator 40 is in direct or indirect contact with the upper surface 14c of the winding portion 14 and integrally covers the winding portion 14 and the resin wall 18. The insulator 40 may be configured to selectively cover only the winding part 14. In addition, a predetermined bonding layer (for example, a blackened layer of copper plating by oxidation) 41 can be provided in order to improve the bonding property between the winding portion 14 and the insulator 40.

さらに、図5に示すとおり、複数の樹脂壁18のうち、最外に位置する樹脂壁18の厚さd1が内側に位置する樹脂壁18の厚さd2より厚いこと(d1>d2)が好ましい。この場合、コイル部品1の作製時や使用時に受けるZ方向の圧力に対して剛性が付与される。厚さが厚い樹脂壁18を最外位置に配置することで、この部分において主に上記圧力を受け止める。剛性の観点からは、両端に位置する樹脂壁18の両方が、内側に位置する樹脂壁18の厚さより厚いことが好ましい。   Furthermore, as shown in FIG. 5, it is preferable that the thickness d1 of the outermost resin wall 18 among the plurality of resin walls 18 is thicker than the thickness d2 of the resin wall 18 positioned inside (d1> d2). . In this case, rigidity is imparted to the pressure in the Z direction that is received when the coil component 1 is produced or used. By placing the thick resin wall 18 at the outermost position, the pressure is mainly received at this portion. From the viewpoint of rigidity, it is preferable that both of the resin walls 18 located at both ends are thicker than the thickness of the resin wall 18 located inside.

なお、上述したコイル13のめっき成長は、基板11の両主面11a、11bにおいておこなわれる。両主面11a、11bのコイル13同士は、基板11の開口においてそれぞれの端部同士が接続されて導通される。   Note that the above-described plating growth of the coil 13 is performed on both main surfaces 11 a and 11 b of the substrate 11. The coils 13 on both main surfaces 11a and 11b are electrically connected to each other at their ends in the opening of the substrate 11.

基板11上にコイル13をめっき成長させた後、図7に示すように、基板11は被覆樹脂21で全体的に覆われる。すなわち、被覆樹脂21が、基板11の主面11a、11bのコイル13と樹脂体17とを一体的に覆う。樹脂体17は、被覆樹脂21内に残ったままコイル部品1の一部を構成する。被覆樹脂21は、金属磁性粉含有樹脂からなり、ウエハ状態の基板11の上に形成され、その後、硬化されることにより形成される。   After the coil 13 is plated and grown on the substrate 11, the substrate 11 is entirely covered with a coating resin 21 as shown in FIG. That is, the coating resin 21 integrally covers the coil 13 and the resin body 17 on the main surfaces 11 a and 11 b of the substrate 11. The resin body 17 constitutes a part of the coil component 1 while remaining in the coating resin 21. The coating resin 21 is made of a metal magnetic powder-containing resin, formed on the substrate 11 in a wafer state, and then cured.

被覆樹脂21を構成する金属磁性粉含有樹脂は、金属磁性粉が分散された樹脂で構成されている。金属磁性粉は、たとえば鉄ニッケル合金(パーマロイ合金)、カルボニル鉄、アモルファス、非晶質または結晶質のFeSiCr系合金、センダスト等で構成され得る。金属磁性粉含有樹脂に用いられる樹脂は、たとえば熱硬化性のエポキシ樹脂である。金属磁性粉含有樹脂に含まれる金属磁性粉の含有量は、一例として、90〜99wt%である。   The metal magnetic powder-containing resin constituting the coating resin 21 is composed of a resin in which metal magnetic powder is dispersed. The metal magnetic powder can be composed of, for example, iron-nickel alloy (permalloy alloy), carbonyl iron, amorphous, amorphous or crystalline FeSiCr alloy, sendust, and the like. The resin used for the metal magnetic powder-containing resin is, for example, a thermosetting epoxy resin. As an example, the content of the metal magnetic powder contained in the metal magnetic powder-containing resin is 90 to 99 wt%.

さらに、ダイシングしてチップ化することで、図8に示す本体部10が得られる。チップ化した後、必要に応じてバレル研磨等によりエッジの面取りをおこなってもよい。   Furthermore, the main body 10 shown in FIG. 8 is obtained by dicing into chips. After forming the chip, the edge may be chamfered by barrel polishing or the like as necessary.

最後に、本体部10の端部パターン15Aが露出した端面(Y方向において対向する端面)に、端部パターン15Aと電気的に接続されるように外部端子電極30A、30Bを設けることで、コイル部品1が完成する。外部端子電極30A、30Bは、コイル部品を搭載する基板の回路に接続するための電極であり、複数層構造とすることができる。たとえば、外部端子電極30A、30Bは、端面に樹脂電極材料を塗布した後、その樹脂電極材料に金属めっきを施すことにより形成することができる。外部端子電極30A、30Bの金属めっきには、Cr、Cu、Ni、Sn、Au、はんだ等を用いることができる。   Finally, the external terminal electrodes 30A and 30B are provided on the end face (end face facing in the Y direction) from which the end pattern 15A of the main body part 10 is exposed so as to be electrically connected to the end pattern 15A. Part 1 is completed. The external terminal electrodes 30A and 30B are electrodes for connecting to a circuit of a substrate on which a coil component is mounted, and can have a multi-layer structure. For example, the external terminal electrodes 30 </ b> A and 30 </ b> B can be formed by applying a resin electrode material to the end surfaces and then performing metal plating on the resin electrode material. Cr, Cu, Ni, Sn, Au, solder, etc. can be used for metal plating of the external terminal electrodes 30A, 30B.

上述したコイル部品1によれば、図5で示したとおり、樹脂壁18の上端部の幅d2’が下端部の幅d2’’より広く、該樹脂壁18の間に延びる巻回部14では、上端部の幅が下端部の幅より狭くなっている。そのため、巻回部14は、基板11側の断面積が大きな安定した断面形状を有している。そのため、巻回部14は強度の向上が図られており、このようなコイル部品1においては、基板11の厚さ方向(図5の上下方向)や面方向(図5の左右方向)からの圧力に起因する巻回部14の歪みや倒壊が抑制される。   According to the coil component 1 described above, as shown in FIG. 5, the width d2 ′ of the upper end portion of the resin wall 18 is wider than the width d2 ″ of the lower end portion, and the winding portion 14 extending between the resin walls 18 The width of the upper end is narrower than the width of the lower end. Therefore, the winding part 14 has a stable cross-sectional shape with a large cross-sectional area on the substrate 11 side. Therefore, the strength of the winding part 14 is improved, and in such a coil component 1, the thickness of the substrate 11 (vertical direction in FIG. 5) and the surface direction (horizontal direction in FIG. 5) are reduced. Distortion and collapse of the winding part 14 due to pressure are suppressed.

特に、樹脂壁18は、その側面18aが傾斜面となるように、上端部から下端部に向けて漸次狭まっているため、巻回部14は、応力が付加されたときに側面のどの箇所にも応力が集中しにくくなっている。そのため、巻回部14は、基板11の厚さ方向や面方向からの圧力に対するさらなる強度向上が図られている。   In particular, since the resin wall 18 is gradually narrowed from the upper end portion toward the lower end portion so that the side surface 18a becomes an inclined surface, the winding portion 14 is placed at any position on the side surface when stress is applied. The stress is less likely to concentrate. For this reason, the winding portion 14 is further improved in strength against pressure from the thickness direction or the surface direction of the substrate 11.

また、樹脂壁18の上端部の幅d2’が下端部の幅d2’’より広くなっていることで、隣り合う2つの樹脂壁18の間に画成される空間の上部開口の狭小化が図られている。換言すると、上記空間の上に樹脂壁18の上端部が張り出して、該空間を樹脂壁18の上端部が部分的に覆っている。そのため、上記空間の内部においてコイル13の巻回部14をめっき成長させる際に、上記空間からめっき部14bが溢れ出る事態が抑制され、その結果、巻回部14間で短絡が生じる事態も抑制される。   Further, since the width d2 ′ of the upper end portion of the resin wall 18 is wider than the width d2 ″ of the lower end portion, the upper opening of the space defined between the two adjacent resin walls 18 is narrowed. It is illustrated. In other words, the upper end portion of the resin wall 18 projects over the space, and the upper end portion of the resin wall 18 partially covers the space. Therefore, when the winding part 14 of the coil 13 is plated and grown inside the space, a situation where the plating part 14b overflows from the space is suppressed, and as a result, a situation where a short circuit occurs between the winding parts 14 is also suppressed. Is done.

さらに、樹脂壁18の下端部の幅d2’’が上端部の幅d2’より狭くなっていることで、隣り合う2つの樹脂壁18の間に画成される空間が広い底面積を有する。そのため、樹脂壁18の下端部の側面とシード部14aとの間に十分なクリアランスを確保しつつシード部14aの幅を拡げることができる。シード部14aの幅が拡がると、それに伴ってシード部14aとめっき部14bとの間の接合領域が広がるため、コイル13と基板11との間の接合強度が向上する。   Further, since the width d2 ″ of the lower end portion of the resin wall 18 is narrower than the width d2 ′ of the upper end portion, the space defined between the two adjacent resin walls 18 has a wide bottom area. Therefore, the width of the seed portion 14a can be expanded while ensuring a sufficient clearance between the side surface of the lower end portion of the resin wall 18 and the seed portion 14a. When the width of the seed part 14a is increased, the joining region between the seed part 14a and the plating part 14b is increased accordingly, so that the joining strength between the coil 13 and the substrate 11 is improved.

また、コイル部品1によれば、コイル13の巻回部14の上面14cが樹脂壁18と接する高さ位置が、上面14cにおける最高の高さ位置よりも低くなっている。そのため、巻回部14から、樹脂壁18を介して隣り合う巻回部14までの沿面距離の延長が図られており、隣り合う巻回部14の間において耐圧が向上している。   Moreover, according to the coil component 1, the height position where the upper surface 14c of the winding part 14 of the coil 13 is in contact with the resin wall 18 is lower than the highest height position on the upper surface 14c. Therefore, the creeping distance from the winding part 14 to the adjacent winding part 14 via the resin wall 18 is extended, and the pressure resistance is improved between the adjacent winding parts 14.

さらに、コイル部品1によれば、複数の樹脂壁18の間にコイル13の巻回部14が非接着状態で介在するため、コイル13の巻回部14と樹脂壁18とが互いに対して変位可能である。そのため、コイル部品1の使用環境が高温になったときなどの周辺温度に変化があり、コイル13の巻回部14と樹脂壁18との間の熱膨張係数の差に起因する応力が生じた場合であっても、コイル13の巻回部14と樹脂壁18とが相対移動することでその応力が緩和される。   Furthermore, according to the coil component 1, since the winding part 14 of the coil 13 is interposed between the plurality of resin walls 18 in a non-adhered state, the winding part 14 of the coil 13 and the resin wall 18 are displaced relative to each other. Is possible. Therefore, there is a change in the ambient temperature such as when the usage environment of the coil component 1 is high, and stress is generated due to the difference in the thermal expansion coefficient between the winding portion 14 of the coil 13 and the resin wall 18. Even if it is a case, the stress is relieved because the winding part 14 of the coil 13 and the resin wall 18 move relatively.

また、コイル部品1の製造方法によれば、樹脂体17の樹脂壁18の間に介在するように、コイル13の巻回部14がめっき成長されている。すなわち、被覆樹脂21でコイル13を覆う前に、コイル13の巻回部14間にはすでに樹脂壁18が介在している。そのため、コイル13の巻回部14間に樹脂を別途に充填する必要はなく、樹脂壁18によりコイル13の巻回部14間の樹脂の寸法精度の安定化が図られる。   Moreover, according to the manufacturing method of the coil component 1, the winding portion 14 of the coil 13 is plated and grown so as to be interposed between the resin walls 18 of the resin body 17. That is, before covering the coil 13 with the coating resin 21, the resin wall 18 is already interposed between the winding portions 14 of the coil 13. Therefore, it is not necessary to separately fill the resin between the winding portions 14 of the coil 13, and the resin wall 18 stabilizes the dimensional accuracy of the resin between the winding portions 14 of the coil 13.

なお、コイル部品1は、上述した形態に限らず、様々な形態を採用することができる。   The coil component 1 is not limited to the above-described form, and various forms can be adopted.

たとえば、樹脂壁の断面形状は、図9に示したような断面形状であってもよい。図9に示した樹脂壁18Aは、側面18aに段部18bが形成されるように、上端部から下端部に向けて段階的に狭まっている。樹脂壁18Aも、上述した樹脂壁18同様、上端部の幅d2’が下端部の幅d2’’より広く、該樹脂壁18の間に延びる巻回部14では、上端部の幅が下端部の幅より狭くなっている。そのため、巻回部14は強度の向上が図られており、このようなコイル部品1においては、基板11の厚さ方向(図8の上下方向)や面方向(図8の左右方向)からの圧力に起因する巻回部14の歪みや倒壊が抑制される。   For example, the cross-sectional shape of the resin wall may be a cross-sectional shape as shown in FIG. The resin wall 18A shown in FIG. 9 is gradually narrowed from the upper end portion toward the lower end portion so that the step portion 18b is formed on the side surface 18a. Similarly to the above-described resin wall 18, the resin wall 18 </ b> A has a width d <b> 2 ′ at the upper end wider than a width d <b> 2 ″ at the lower end, and the winding portion 14 extending between the resin walls 18 has a width at the upper end. It is narrower than the width. Therefore, the winding portion 14 is improved in strength, and in such a coil component 1, the thickness of the substrate 11 (up and down direction in FIG. 8) and the surface direction (left and right direction in FIG. 8) are reduced. Distortion and collapse of the winding part 14 due to pressure are suppressed.

1…コイル部品、11…基板、13…コイル、14…巻回部、14a…シード部、14b…めっき部、14c…上面、17…樹脂体、18、18A…樹脂壁、18a…側面、18b…段部、21…被覆樹脂、30A、30B…外部端子電極、40…絶縁体。   DESCRIPTION OF SYMBOLS 1 ... Coil component, 11 ... Board | substrate, 13 ... Coil, 14 ... Winding part, 14a ... Seed part, 14b ... Plating part, 14c ... Upper surface, 17 ... Resin body 18, 18A ... Resin wall, 18a ... Side surface, 18b ... Step part, 21 ... Coating resin, 30A, 30B ... External terminal electrode, 40 ... Insulator.

Claims (10)

基板と、
前記基板の主面上にめっき成長で設けられたコイルと、
前記基板の主面上に設けられ、前記コイルの巻回部が間に延びる複数の樹脂壁を有する樹脂体と、
磁性粉含有樹脂からなり、前記基板の主面の前記コイルと前記樹脂体とを一体的に覆う被覆樹脂と
を備え、
前記樹脂壁は、上端部の幅が下端部の幅より広い、コイル部品。
A substrate,
A coil provided by plating growth on the main surface of the substrate;
A resin body provided on the main surface of the substrate and having a plurality of resin walls between which the coil winding portion extends;
A magnetic powder-containing resin, and a coating resin that integrally covers the coil and the resin body on the main surface of the substrate;
The resin wall is a coil component in which an upper end portion is wider than a lower end portion.
前記樹脂壁の幅は、該樹脂壁の側面が傾斜面となるように、上端部から下端部に向けて漸次狭まる、請求項1に記載のコイル部品。   2. The coil component according to claim 1, wherein the width of the resin wall gradually decreases from an upper end portion toward a lower end portion so that a side surface of the resin wall becomes an inclined surface. 前記樹脂壁の幅は、該樹脂壁の側面に段部が形成されるように、上端部から下端部に向けて段階的に狭まる、請求項1に記載のコイル部品。   2. The coil component according to claim 1, wherein the width of the resin wall gradually decreases from an upper end portion toward a lower end portion so that a step portion is formed on a side surface of the resin wall. 前記樹脂体の樹脂壁の断面形状が四角形状である、請求項1〜3のいずれか一項に記載のコイル部品。   The coil component as described in any one of Claims 1-3 whose cross-sectional shape of the resin wall of the said resin body is square shape. 前記樹脂体の樹脂壁の断面は底辺の長さに対する高さの比が1より大きく、該樹脂壁が前記基板の主面の法線方向に沿って長く延びている、請求項4に記載のコイル部品。   The cross section of the resin wall of the resin body has a ratio of the height to the length of the base larger than 1, and the resin wall extends long along the normal direction of the main surface of the substrate. Coil parts. 前記コイルの巻回部の断面形状が四角形状である、請求項1〜5のいずれか一項に記載のコイル部品。   The coil component as described in any one of Claims 1-5 whose cross-sectional shape of the winding part of the said coil is square shape. 前記コイルの巻回部の断面は底辺の長さに対する高さの比が1より大きく、該巻回部の断面が前記基板の主面の法線方向に沿って長く延びている、請求項6に記載のコイル部品。   The cross section of the winding part of the coil has a ratio of the height to the length of the base larger than 1, and the cross section of the winding part extends long along the normal direction of the main surface of the substrate. Coil parts as described in. 前記樹脂体の樹脂壁の高さが前記コイルの巻回部の高さより高い、請求項1〜7のいずれか一項に記載のコイル部品。   The coil component according to any one of claims 1 to 7, wherein a height of a resin wall of the resin body is higher than a height of a winding portion of the coil. 前記樹脂体は、前記基板の主面上に前記コイルがめっき成長される前に設けられ、
前記コイルの巻回部は、前記樹脂体の樹脂壁に接着されていない、請求項1〜8のいずれか一項に記載のコイル部品。
The resin body is provided before the coil is plated on the main surface of the substrate,
The coil part according to any one of claims 1 to 8, wherein the winding portion of the coil is not bonded to the resin wall of the resin body.
前記基板の主面上に複数並んだ樹脂壁のうち、最外に位置する樹脂壁の厚さが内側に位置する樹脂壁の厚さより厚い、請求項1〜9のいずれか一項に記載のコイル部品。   10. The resin wall according to claim 1, wherein a thickness of the outermost resin wall among a plurality of resin walls arranged on the main surface of the substrate is thicker than a thickness of the resin wall located on the inner side. Coil parts.
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