JP6520480B2 - Coil parts - Google Patents

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JP6520480B2
JP6520480B2 JP2015131267A JP2015131267A JP6520480B2 JP 6520480 B2 JP6520480 B2 JP 6520480B2 JP 2015131267 A JP2015131267 A JP 2015131267A JP 2015131267 A JP2015131267 A JP 2015131267A JP 6520480 B2 JP6520480 B2 JP 6520480B2
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coil
resin
substrate
winding portion
resin wall
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JP2017017141A (en
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大久保 等
等 大久保
正純 荒田
正純 荒田
太田 学
学 太田
優也 要
優也 要
佳宏 前田
佳宏 前田
崇宏 川原
崇宏 川原
北斗 江田
北斗 江田
佐藤 茂樹
佐藤  茂樹
田中 拓也
拓也 田中
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TDK Corp
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TDK Corp
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Priority to KR1020160080509A priority patent/KR101846150B1/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/32Insulating of coils, windings, or parts thereof
    • H01F27/323Insulation between winding turns, between winding layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F17/0013Printed inductances with stacked layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/2804Printed windings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/32Insulating of coils, windings, or parts thereof
    • H01F27/324Insulation between coil and core, between different winding sections, around the coil; Other insulation structures

Description

本発明は、コイル部品に関する。   The present invention relates to a coil component.

従来、表面実装型の平面コイル素子等のコイル部品が、民生用機器、産業用機器等の電気製品に幅広く利用されている。中でも小型携帯機器においては、機能の充実化に伴い、各々のデバイスを駆動させるために単一の電源から複数の電圧を得る必要が生じてきている。そこで、このような電源用途等にも表面実装型の平面コイル素子が使用されている。   2. Description of the Related Art Conventionally, coil components such as surface-mounted flat coil elements are widely used in electric products such as consumer devices and industrial devices. Above all, in the case of small portable devices, it is necessary to obtain a plurality of voltages from a single power source to drive each device as the functions are enhanced. Then, the surface mounting type planar coil element is used also for such a power supply application etc.

このようなコイル部品は、たとえば、下記特許文献1に開示されている。この文献に開示されたコイル部品は、基板の表裏面にそれぞれ平面渦巻き状の空芯コイルが設けられ、空芯コイルの磁芯部分において基板を貫くように設けられたスルーホール導体により空芯コイル同士が接続されている。   Such a coil component is disclosed, for example, in Patent Document 1 below. In the coil component disclosed in this document, the air core coil is provided by providing through-hole conductors provided on the front and back surfaces of the substrate with planar spiral air core coils and penetrating the substrate in the core portion of the air core coil. Are connected to each other.

特開2005−210010号公報JP, 2005-21010, A

上述した空芯コイルは、基板上に設けられたシードパターンに、Cuなどの導体材料をめっき成長させることで形成されるが、基板の面方向へのめっき成長によりコイルの巻回部の間隔が狭まる。コイルの巻回部の間隔が狭い場合には、コイルの絶縁性低下が懸念されるため、より確実に絶縁する技術が望まれている。   The air core coil described above is formed by plating and growing a conductive material such as Cu on a seed pattern provided on the substrate, but the plating growth in the surface direction of the substrate causes the distance between the winding portions of the coil to It narrows. In the case where the distance between the winding portions of the coil is narrow, there is a concern that the insulation of the coil may deteriorate, and therefore, a technique for more reliable insulation is desired.

そこで、コイルの隣り合う巻回部の間に樹脂壁を設けて確実な絶縁を図る技術の開発が進められている。ただし、樹脂壁が基板と別体で設けられる場合には、樹脂壁と基板との接合面はその他の箇所に比べて耐圧が低くなることが考えられる。そのため、巻回部の間における高い絶縁耐圧を実現するためには、上記接合面おける耐圧の向上が求められる。   Therefore, development of technology for achieving reliable insulation by providing a resin wall between adjacent winding portions of a coil has been advanced. However, in the case where the resin wall is provided separately from the substrate, it is conceivable that the pressure resistance of the bonding surface between the resin wall and the substrate is lower than that at other portions. Therefore, in order to realize a high dielectric breakdown voltage between the winding parts, improvement of the breakdown voltage at the joint surface is required.

本発明は、上述の課題を解決するためになされたものであり、巻回部の間の耐圧向上が図られたコイル部品を提供することを目的とする。   The present invention was made in order to solve the above-mentioned subject, and an object of the present invention is to provide a coil component in which pressure resistance improvement between winding parts was aimed at.

本発明の一側面に係るコイル部品は、基板と、基板の主面上にめっき成長で設けられたコイルと、基板の主面上に設けられ、コイルの巻回部が間に延びる複数の樹脂壁を有する樹脂体と、磁性粉含有樹脂からなり、基板の主面のコイルと樹脂体とを一体的に覆う被覆樹脂とを備え、巻回部が、樹脂壁の下端部が基板の主面と接合される接合面から離間している。   A coil component according to one aspect of the present invention is provided on a substrate, a coil provided by plating growth on the main surface of the substrate, and a plurality of resins provided on the main surface of the substrate, with the coil winding portion extending therebetween A resin body having a wall, and a covering resin made of a magnetic powder-containing resin and integrally covering the coil of the main surface of the substrate and the resin body, the lower end portion of the resin wall of the winding portion is the main surface of the substrate It is separated from the joint surface to be joined.

このようなコイル部品においては、樹脂壁の下端部と基板の主面との接合面から巻回部が離間しているために、樹脂壁を介して隣り合う巻回部同士が接合面付近において遠ざかっている。それにより、上記接合面を介しての短絡が抑制されることで、巻回部の間の耐圧向上が図られている。   In such a coil component, since the winding portion is separated from the bonding surface between the lower end portion of the resin wall and the main surface of the substrate, the winding portions adjacent to each other via the resin wall are in the vicinity of the bonding surface I am away. Thereby, the withstand voltage improvement between winding parts is achieved by the short circuit via the said joint surface being suppressed.

また、巻回部と接合面との間に空隙が存在し、該空隙を介して、巻回部が接合面から離間している態様であってもよい。   In addition, an air gap may be present between the winding portion and the bonding surface, and the winding portion may be separated from the bonding surface via the air gap.

また、空隙は、巻回部の下に入り込むくさび部を含む断面形状を有している態様であってもよい。   Also, the air gap may be in a form having a cross-sectional shape including a wedge portion which gets under the winding portion.

また、樹脂体の樹脂壁の断面形状が四角形状である態様であってもよい。このとき、樹脂体の樹脂壁の断面は底辺の長さに対する高さの比が1より大きく、該樹脂壁が基板の主面の法線方向に沿って長く延びている態様であってもよい。   Moreover, the aspect whose cross-sectional shape of the resin wall of a resin body is square shape may be sufficient. At this time, the cross section of the resin wall of the resin body may have an aspect in which the ratio of the height to the length of the base is larger than 1 and the resin wall extends long along the normal direction of the main surface of the substrate. .

また、コイルの巻回部の断面形状が四角形状である態様であってもよい。このとき、コイルの巻回部の断面は底辺の長さに対する高さの比が1より大きく、該巻回部の断面が基板の主面の法線方向に沿って長く延びている態様であってもよい。   Moreover, the cross-sectional shape of the winding part of a coil may be a square-shaped aspect. At this time, the section of the winding portion of the coil has a ratio of the height to the length of the base greater than 1, and the cross section of the winding portion is elongated along the normal direction of the main surface of the substrate. May be

また、樹脂体の樹脂壁の高さがコイルの巻回部の高さより高い態様であってもよい。この場合、巻回部は、高さ方向にわたって設計寸法どおりの厚さとなり得る。また、巻回部同士が樹脂壁を越えて接する事態が有意に回避される。   Further, the height of the resin wall of the resin body may be higher than the height of the winding portion of the coil. In this case, the winding portion can have a thickness as designed over the height direction. Moreover, the situation in which the wound portions contact with each other beyond the resin wall is significantly avoided.

また、樹脂体は、基板の主面上にコイルがめっき成長される前に設けられ、コイルの巻回部は、樹脂体の樹脂壁に接着されていない態様であってもよい。   The resin body may be provided before the coil is plated and grown on the main surface of the substrate, and the winding portion of the coil may not be bonded to the resin wall of the resin body.

また、基板の主面上に複数並んだ樹脂壁のうち、最外に位置する樹脂壁の厚さが内側に位置する樹脂壁の厚さより厚い態様であってもよい。   In addition, of the plurality of resin walls arranged on the main surface of the substrate, the thickness of the resin wall positioned outermost may be thicker than the thickness of the resin wall positioned inside.

本発明によれば、巻回部の間の耐圧向上が図られたコイル部品が提供される。   According to the present invention, there is provided a coil component in which the withstand voltage between the winding portions is improved.

図1は、本発明の実施形態に係るコイル部品の概略斜視図である。FIG. 1 is a schematic perspective view of a coil component according to an embodiment of the present invention. 図2は、図1に示すコイル部品の製造に用いられる基板を示した斜視図である。FIG. 2 is a perspective view showing a substrate used for manufacturing the coil component shown in FIG. 図3は、図2に示した基板のシードパターンを示した平面図である。FIG. 3 is a plan view showing a seed pattern of the substrate shown in FIG. 図4は、図1に示すコイル部品の製造方法の一工程を示した斜視図である。FIG. 4 is a perspective view showing one step of the method of manufacturing the coil component shown in FIG. 図5は、図4のV−V線断面図である。FIG. 5 is a cross-sectional view taken along line V-V of FIG. 図6は、樹脂壁と基板との接合面付近を示した要部拡大図である。FIG. 6 is an enlarged view of an essential part showing the vicinity of the bonding surface between the resin wall and the substrate. 図7は、コイルの巻回部上に設けられる絶縁体を示した断面図である。FIG. 7 is a cross-sectional view showing the insulator provided on the winding portion of the coil. 図8は、図1に示すコイル部品の製造方法の一工程を示した斜視図である。FIG. 8 is a perspective view showing one step of a method of manufacturing the coil component shown in FIG. 図9は、図1に示すコイル部品の製造方法の一工程を示した斜視図である。FIG. 9 is a perspective view showing one step of the method of manufacturing the coil component shown in FIG.

以下、添付図面を参照して、本発明の実施形態について詳細に説明する。なお、説明において、同一要素又は同一機能を有する要素には、同一符号を用いることとし、重複する説明は省略する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description, the same elements or elements having the same function will be denoted by the same reference symbols, without redundant description.

まず、本発明の実施形態に係るコイル部品の構造について、図1〜4を参照しつつ説明する。説明の便宜上、図示のようにXYZ座標を設定する。すなわち、平面コイル素子の厚さ方向をZ方向、外部端子電極の対面方向をY方向、Z方向とY方向とに直交する方向をX方向と設定する。   First, the structure of a coil component according to an embodiment of the present invention will be described with reference to FIGS. For convenience of explanation, XYZ coordinates are set as illustrated. That is, the thickness direction of the planar coil element is set as the Z direction, the facing direction of the external terminal electrode is set as the Y direction, and the direction orthogonal to the Z direction and the Y direction is set as the X direction.

コイル部品1は、略直方体形状を呈する本体部10と、本体部10の対向する一対の端面を覆うようにして設けられた一対の外部端子電極30A、30Bとによって構成されている。コイル部品1は、一例として、長辺2.0mm、短辺1.6mm、高さ0.9mmの寸法で設計される。   The coil component 1 is configured of a main body portion 10 having a substantially rectangular parallelepiped shape, and a pair of external terminal electrodes 30A and 30B provided so as to cover a pair of opposing end surfaces of the main body portion 10. The coil component 1 is, for example, designed to have dimensions of a long side of 2.0 mm, a short side of 1.6 mm, and a height of 0.9 mm.

以下では、本体部10を作製する手順を示しつつ、併せて、コイル部品1の構造についても説明する。   Below, the structure of the coil component 1 is also demonstrated, showing the procedure which produces the main-body part 10 collectively.

本体部10は、図2に示す基板11を含んでいる。基板11は、非磁性の絶縁材料で構成された平板矩形状の部材である。基板11の中央部分には、主面11a、11b間を繋ぐように貫通された略円形の開口12が設けられている。基板11としては、ガラスクロスにシアネート樹脂(BT(ビスマレイミド・トリアジン)レジン:登録商標)が含浸された基板で、板厚60μmのものを用いることができる。なお、BTレジンのほか、ポリイミド、アラミド等を用いることもできる。基板11の材料としては、セラミックやガラスを用いることもできる。基板11の材料としては、大量生産されているプリント基板材料が好ましく、特にBTプリント基板、FR4プリント基板、あるいはFR5プリント基板に用いられる樹脂材料が最も好ましい。   The main body 10 includes the substrate 11 shown in FIG. The substrate 11 is a flat rectangular member made of a nonmagnetic insulating material. In the central portion of the substrate 11, a substantially circular opening 12 is provided so as to connect the main surfaces 11a and 11b. The substrate 11 may be a substrate in which glass cloth is impregnated with cyanate resin (BT (bismaleimide triazine) resin: registered trademark), and the one having a plate thickness of 60 μm can be used. In addition to BT resin, polyimide, aramid or the like can also be used. Ceramic or glass can also be used as the material of the substrate 11. The material of the substrate 11 is preferably a mass-produced printed circuit board material, and most preferably a resin material used for a BT printed board, an FR4 printed board, or an FR5 printed board.

基板11には、図3に示すように、それぞれの主面11a、11bに、後述するコイル13をめっき成長させるためのシードパターン13Aが形成されている。シードパターン13Aは、基板11の開口12の周りを回る螺旋パターン14Aと、基板11のY方向に関する端部に形成された端部パターン15Aとを有し、これらのパターン14A、15Aが連続的かつ一体的に形成されている。なお、一方の主面11a側に設けられるコイル13と他方の主面11b側に設けられるコイル13とでは電極引き出し方向が逆であり、そのため、一方の主面11a側の端部パターン15Aと他方の主面11b側の端部パターンとは、基板11のY方向に関する互いに異なる端部に形成されている。   As shown in FIG. 3, a seed pattern 13A for plating and growing a coil 13 described later is formed on the main surfaces 11a and 11b of the substrate 11. The seed pattern 13A has a spiral pattern 14A that turns around the opening 12 of the substrate 11 and an end pattern 15A formed at the end of the substrate 11 in the Y direction, and these patterns 14A and 15A are continuous and It is integrally formed. In addition, the electrode drawing direction is opposite between the coil 13 provided on the one main surface 11 a side and the coil 13 provided on the other main surface 11 b side, so the end pattern 15 A on the one main surface 11 a side and the other The end patterns on the main surface 11 b side of the substrate 11 are formed at different ends of the substrate 11 in the Y direction.

図2に戻って、基板11の各主面11a、11b上には、樹脂体17が設けられている。樹脂体17は、公知のフォトリソグラフィーによってパターニングされた厚膜レジストである。樹脂体17は、コイル13の巻回部14の成長領域を画定する樹脂壁18と、コイル13の引出電極部15の成長領域を画定する樹脂壁19とを有している。   Returning to FIG. 2, resin bodies 17 are provided on the main surfaces 11 a and 11 b of the substrate 11. The resin body 17 is a thick film resist patterned by known photolithography. The resin body 17 has a resin wall 18 which defines a growth region of the winding portion 14 of the coil 13 and a resin wall 19 which defines a growth region of the lead-out electrode portion 15 of the coil 13.

図4は、シードパターン13Aを用いてコイル13をめっき成長させたときの基板11の状態を示している。コイル13のめっき成長には、公知のめっき成長方法を採用することができる。   FIG. 4 shows the state of the substrate 11 when the coil 13 is grown by plating using the seed pattern 13A. A known plating growth method can be adopted for the plating growth of the coil 13.

コイル13は、銅で構成されており、シードパターン13Aの螺旋パターン14A上に形成された巻回部14と、シードパターン13Aの端部パターン15A上に形成された引出電極部15とを有している。コイル13は、平面視したときに、シードパターン13A同様、基板11の主面11a、11bに平行に延在する平面渦巻き状の空芯コイルの形状となっている。より詳しくは、基板上面11aの巻回部14は、上面側から見て外側に向かう方向に沿って左回転の渦巻きであり、基板下面11bの巻回部14は、下面側から見て、外側に向かう方向に沿って左回転の渦巻きである。基板上面11aおよび基板下面11bの両コイル13は、たとえば、開口12の近傍に別途設けられた貫通孔を介して端部同士が接続される。両コイル13に一方向に電流を流したときには、両コイル13の電流の流れる回転方向が同一となるため、コイル13で発生する磁束が重畳して強め合う。   The coil 13 is made of copper and has a winding portion 14 formed on the spiral pattern 14A of the seed pattern 13A and a lead electrode portion 15 formed on the end pattern 15A of the seed pattern 13A. ing. The coil 13 has a flat spiral spiral core shape extending parallel to the main surfaces 11 a and 11 b of the substrate 11 as seen from above, like the seed pattern 13 A, in plan view. More specifically, the winding portion 14 of the substrate upper surface 11a is a left-handed spiral along the direction toward the outer side when viewed from the upper surface side, and the winding portion 14 of the substrate lower surface 11b is the outer side when viewed from the lower surface It is a spiral of left rotation along the direction towards. The end portions of both the coils 13 of the substrate upper surface 11a and the substrate lower surface 11b are connected to each other through a through hole separately provided in the vicinity of the opening 12, for example. When current flows in one direction in both coils 13, the rotation direction of the current in both coils 13 is the same, so the magnetic fluxes generated in the coils 13 overlap and strengthen each other.

図5は、図4に示しためっき成長後の基板11の状態を示しており、図4のV−V線断面図である。   FIG. 5 shows the state of the substrate 11 after the plating growth shown in FIG. 4 and is a cross-sectional view taken along the line V-V in FIG.

図5に示すように、基板11上には、基板11の法線方向(Z方向)に沿って長く延びる四角形状断面(図5では矩形状断面)の樹脂壁18が形成されており、これらの樹脂壁18の間においてコイル13の巻回部14がZ方向に成長する。コイル13の巻回部14は、その成長領域が、めっき成長前に基板11上に形成された樹脂壁18によって予め画定されている。   As shown in FIG. 5, on the substrate 11, resin walls 18 having a rectangular cross section (a rectangular cross section in FIG. 5) extending along the normal direction (Z direction) of the substrate 11 are formed. The wound portion 14 of the coil 13 grows in the Z direction between the resin walls 18 of In the winding portion 14 of the coil 13, the growth region is previously defined by the resin wall 18 formed on the substrate 11 before plating growth.

コイル13の巻回部14は、螺旋パターン14Aの一部であるシード部14aと、シード部14a上にめっき成長させためっき部14bとで構成されており、シード部14a周りにめっき部14bが徐々に成長していくことにより形成される。このとき、コイル13の巻回部14は、隣り合う2つの樹脂壁18の間に画成された空間を充たすように成長して、樹脂壁18の間に画成された空間と同一の形状に形成され、その結果、コイル13の巻回部14は基板11の法線方向(Z方向)に沿って長く延びる四角形状断面(図5では矩形状断面)となる。すなわち、樹脂壁18の間に画成される空間の形状を調整することで、コイル13の巻回部14の形状が調整され、設計したとおりの形状にコイル13の巻回部14を形成することができる。   The winding portion 14 of the coil 13 includes a seed portion 14a which is a part of the spiral pattern 14A, and a plated portion 14b plated and grown on the seed portion 14a, and the plated portion 14b is formed around the seed portion 14a. It is formed by gradually growing. At this time, the winding portion 14 of the coil 13 grows so as to fill the space defined between two adjacent resin walls 18 and has the same shape as the space defined between the resin walls 18. As a result, the winding portion 14 of the coil 13 has a rectangular cross section (rectangular cross section in FIG. 5) extending long along the normal direction (Z direction) of the substrate 11. That is, the shape of the winding portion 14 of the coil 13 is adjusted by adjusting the shape of the space defined between the resin walls 18, and the winding portion 14 of the coil 13 is formed in the shape as designed. be able to.

コイル13の巻回部14は、隣り合う2つの樹脂壁18の間を成長する際、成長領域を画定する樹脂壁18の内側面に接しながら成長していく。このとき、コイル13の巻回部14と樹脂壁18との間には、機械的結合も化学的結合も生じない。すなわち、コイル13の巻回部14は、樹脂壁18と接着されないままめっき成長し、非接着状態で樹脂壁18の間に介在する。本明細書において「非接着状態」とは、アンカー効果等の機械的結合および共有結合等の化学的結合が生じていない状態をいう。   When the winding portion 14 of the coil 13 is grown between two adjacent resin walls 18, it grows in contact with the inner side surface of the resin wall 18 which defines the growth region. At this time, neither mechanical bonding nor chemical bonding occurs between the winding portion 14 of the coil 13 and the resin wall 18. That is, the winding portion 14 of the coil 13 is plated and grown without being bonded to the resin wall 18, and is interposed between the resin walls 18 in a non-bonded state. In the present specification, the “non-adhesive state” refers to a state in which mechanical bonding such as anchor effect and chemical bonding such as covalent bonding do not occur.

コイル13の巻回部14の断面寸法は、一例として、高さ80〜260μm、幅(厚さ)40〜260μm、下端部の幅(底辺)に対する高さの比(アスペクト比)1〜5である。コイル13の巻回部14のアスペクト比は2〜5であってもよい。   The cross-sectional dimension of the winding portion 14 of the coil 13 is, for example, a height 80 to 260 μm, a width (thickness) 40 to 260 μm, and a ratio (aspect ratio) 1 to 5 of the height to the width (bottom) of the lower end is there. The aspect ratio of the winding portion 14 of the coil 13 may be 2 to 5.

図5に示すとおり、コイル13の巻回部14の高さhは、樹脂壁18の高さHよりも低いこと(h<H)が好ましい。すなわち、コイル13の巻回部14のめっき成長が樹脂壁18の高さHよりも低い位置で止まるように調整することが好ましい。コイル13の巻回部14の高さhが樹脂壁18の高さHよりも低いと、巻回部14は高さ方向にわたって設計寸法どおりの厚さとなる。また、コイル13の巻回部14の高さhが、樹脂壁18の高さHより高いと、隣り合う巻回部14同士が接触したり後述する絶縁体40や接合層41の厚さを十分に確保できなくなったりする事態が生じ、コイル13の耐圧抵抗が低下するためである。   As shown in FIG. 5, it is preferable that the height h of the winding portion 14 of the coil 13 be lower than the height H of the resin wall 18 (h <H). That is, it is preferable to adjust so that the plating growth of the winding part 14 of the coil 13 may stop at a position lower than the height H of the resin wall 18. When the height h of the winding portion 14 of the coil 13 is smaller than the height H of the resin wall 18, the winding portion 14 has a thickness as designed over the height direction. In addition, when the height h of the winding portion 14 of the coil 13 is higher than the height H of the resin wall 18, the adjacent winding portions 14 are in contact with each other, or the thickness of the insulator 40 or the bonding layer 41 described later This is because the pressure resistance of the coil 13 is lowered due to a situation where it can not be secured sufficiently.

また、コイル13の巻回部14の厚さDは、高さ方向にわたって均一になっている。これは、隣り合う樹脂壁18の間隔が高さ方向にわたって均一になっているためである。   Further, the thickness D of the winding portion 14 of the coil 13 is uniform in the height direction. This is because the spacing between adjacent resin walls 18 is uniform in the height direction.

さらに、図5に示すように、コイル13の巻回部14の上面14cは、上側に突き出た形状となっている。より詳しくは、コイル13の巻回部14の上面14cは、中央部では基板11の主面11aに対して略平行になっているが、樹脂壁18近傍の端部では曲線状に漸次下降している。そして、コイル13の巻回部14の上面14cにおいては、基板11の主面11aに対する相対位置に関し、上面14cの樹脂壁18と接する高さ位置が、上面14cの中央部に位置する最高の高さ位置よりも低くなっている。   Furthermore, as shown in FIG. 5, the upper surface 14 c of the winding portion 14 of the coil 13 has a shape protruding upward. More specifically, the upper surface 14c of the winding portion 14 of the coil 13 is substantially parallel to the main surface 11a of the substrate 11 at the central portion but gradually descends in a curved shape at the end portion near the resin wall 18 ing. Then, on the upper surface 14c of the winding portion 14 of the coil 13, the height position of the upper surface 14c in contact with the resin wall 18 is the highest height located at the central portion of the upper surface 14c with respect to the relative position of the substrate 11 to the major surface 11a. It is lower than the height position.

なお、図5に示した態様では、各樹脂壁18の厚さd1、d2も、コイル13の巻回部14同様、高さ方向にわたって均一となっている。その結果、隣り合うコイル13の巻回部14の間隔が、高さ方向にわたって均一になる。すなわち、コイル13の巻回部14は、高さ方向に関して局所的に薄くなっている箇所(つまり、局所的に耐圧抵抗が低下している箇所)が存在しない、または存在しにくい構造となっている。樹脂壁18の断面寸法は、一例として、高さ50〜300μm、幅(厚さ)5〜30μm、下端部の幅(底辺)に対する高さの比(アスペクト比)5〜30である。樹脂壁18の断面寸法は、高さ180〜300μm、幅(厚さ)5〜12μm、アスペクト比15〜30であってもよい。   In the embodiment shown in FIG. 5, the thicknesses d1 and d2 of the resin walls 18 are also uniform in the height direction, as in the winding portion 14 of the coil 13. As a result, the distance between the winding portions 14 of the adjacent coils 13 becomes uniform in the height direction. That is, the winding portion 14 of the coil 13 has a structure in which there is no or less likely to be a locally thin portion in the height direction (that is, a portion where the pressure resistance is locally reduced). There is. The cross-sectional dimensions of the resin wall 18 are, for example, a height of 50 to 300 μm, a width (thickness) of 5 to 30 μm, and a ratio (aspect ratio) of height to width (bottom side) of the lower end portion of 5 to 30. The cross-sectional dimensions of the resin wall 18 may be 180 to 300 μm in height, 5 to 12 μm in width (thickness), and 15 to 30 in aspect ratio.

図6に示すように、樹脂壁18は、基板11とは別体に設けられており、その下端面18aは基板11の主面11aと接して接合面Sを形成している。接合面S付近には、空隙Gが形成されており、巻回部14が接合面Sおよび樹脂壁18の下端部から離間している。換言すると、巻回部14は、巻回部14と接合面Sとの間に存在する空隙Gを介して、接合面Sから離間している。   As shown in FIG. 6, the resin wall 18 is provided separately from the substrate 11, and the lower end surface 18 a is in contact with the major surface 11 a of the substrate 11 to form a bonding surface S. A gap G is formed in the vicinity of the bonding surface S, and the winding portion 14 is separated from the bonding surface S and the lower end portion of the resin wall 18. In other words, the winding portion 14 is separated from the bonding surface S via the gap G existing between the winding portion 14 and the bonding surface S.

空隙Gの断面形状は、図6に示したように、基板11の主面11aに沿って巻回部14の下に入り込むように延び、かつ、樹脂壁18の側面に沿って上方に延びた形状とすることができる。この場合、空隙Gは、巻回部14の下に入り込むくさび部gを含む断面形状を有する。空隙Gの断面形状は、接合面Sに対応する角が直角である直角三角形に近い形状とすることができる。空隙Gは、巻回部14をめっき成長により形成する際のめっき条件やめっき液の組成等を調整し、たとえば幅方向への成長を抑制することで容易に得ることができる。   The cross-sectional shape of the air gap G extends along the major surface 11 a of the substrate 11 so as to enter under the winding portion 14 and extends upward along the side surface of the resin wall 18 as shown in FIG. It can be shaped. In this case, the air gap G has a cross-sectional shape including the wedge portion g which gets under the winding portion 14. The cross-sectional shape of the air gap G can be a shape close to a right triangle whose angle corresponding to the joint surface S is a right angle. The gap G can be easily obtained by adjusting the plating conditions at the time of forming the winding portion 14 by plating growth, the composition of the plating solution, and the like, and suppressing the growth in the width direction, for example.

また、樹脂壁18によって画成された空間は、上端が開放されており、樹脂壁18の上端部が巻回部14の上側を覆うように回り込んでいないため、巻回部14の上側の設計自由度が高い。すなわち、巻回部14の上に任意の層を形成する態様も何の層も形成しない態様も選択し得る。   The space defined by the resin wall 18 is open at the upper end, and the upper end of the resin wall 18 does not wrap around so as to cover the upper side of the winding portion 14. Design freedom is high. That is, an embodiment in which an arbitrary layer is formed on the winding portion 14 and an embodiment in which no layer is formed may be selected.

巻回部14の上に層を形成する場合には、各種の層形態や層材料を選択し得る。たとえば、図7に示すように、巻回部14の上に、後述する被覆樹脂21に含まれる金属磁性粉と巻回部14との間の絶縁性を高めるために、絶縁体40を設けることができる。絶縁体40は、絶縁樹脂または絶縁磁性材料で構成することができる。また、絶縁体40は、巻回部14の上面14cに直接的または間接的に接するとともに、巻回部14と樹脂壁18とを一体的に覆っている。なお、絶縁体40は、巻回部14のみを選択的に覆う構成にすることもできる。また、巻回部14と絶縁体40との間の接合性を高めるために、所定の接合層(たとえば、酸化による銅めっきの黒化層)41を設けることができる。   When forming a layer on the winding part 14, various layer forms and layer materials can be selected. For example, as shown in FIG. 7, an insulator 40 is provided on the winding portion 14 in order to enhance the insulation between the metal magnetic powder contained in the coating resin 21 described later and the winding portion 14. Can. The insulator 40 can be made of an insulating resin or an insulating magnetic material. The insulator 40 is in direct or indirect contact with the upper surface 14 c of the winding portion 14 and integrally covers the winding portion 14 and the resin wall 18. The insulator 40 may be configured to selectively cover only the winding portion 14. Moreover, in order to improve the bondability between the winding portion 14 and the insulator 40, a predetermined bonding layer (for example, a blackened layer of copper plating by oxidation) can be provided.

さらに、図5に示すとおり、複数の樹脂壁18のうち、最外に位置する樹脂壁18の厚さd1が内側に位置する樹脂壁18の厚さd2より厚いこと(d1>d2)が好ましい。この場合、コイル部品1の作製時や使用時に受けるZ方向の圧力に対して剛性が付与される。厚さが厚い樹脂壁18を最外位置に配置することで、この部分において主に上記圧力を受け止める。剛性の観点からは、両端に位置する樹脂壁18の両方が、内側に位置する樹脂壁18の厚さより厚いことが好ましい。   Furthermore, as shown in FIG. 5, it is preferable that the thickness d1 of the resin wall 18 located at the outermost position among the plurality of resin walls 18 be thicker than the thickness d2 of the resin wall 18 located inside (d1> d2) . In this case, rigidity is imparted to the pressure in the Z direction received when the coil component 1 is manufactured or used. By disposing the thick resin wall 18 at the outermost position, the portion mainly receives the pressure in this portion. From the viewpoint of rigidity, it is preferable that both resin walls 18 located at both ends be thicker than the thickness of the resin wall 18 located inside.

なお、上述したコイル13のめっき成長は、基板11の両主面11a、11bにおいておこなわれる。両主面11a、11bのコイル13同士は、基板11の開口においてそれぞれの端部同士が接続されて導通される。   The plating growth of the coil 13 described above is performed on both main surfaces 11 a and 11 b of the substrate 11. The respective end portions of the coils 13 of the main surfaces 11 a and 11 b are connected to each other at the opening of the substrate 11 and are conducted.

基板11上にコイル13をめっき成長させた後、図8に示すように、基板11は被覆樹脂21で全体的に覆われる。すなわち、被覆樹脂21が、基板11の主面11a、11bのコイル13と樹脂体17とを一体的に覆う。樹脂体17は、被覆樹脂21内に残ったままコイル部品1の一部を構成する。被覆樹脂21は、金属磁性粉含有樹脂からなり、ウエハ状態の基板11の上に形成され、その後、硬化されることにより形成される。   After plating and growing the coil 13 on the substrate 11, the substrate 11 is entirely covered with the covering resin 21, as shown in FIG. That is, the covering resin 21 integrally covers the coil 13 and the resin body 17 on the main surfaces 11 a and 11 b of the substrate 11. The resin body 17 constitutes a part of the coil component 1 while remaining in the coating resin 21. The covering resin 21 is made of a metal magnetic powder-containing resin, and is formed on the wafer-like substrate 11 and then cured.

被覆樹脂21を構成する金属磁性粉含有樹脂は、金属磁性粉が分散された樹脂で構成されている。金属磁性粉は、たとえば鉄ニッケル合金(パーマロイ合金)、カルボニル鉄、アモルファス、非晶質または結晶質のFeSiCr系合金、センダスト等で構成され得る。金属磁性粉含有樹脂に用いられる樹脂は、たとえば熱硬化性のエポキシ樹脂である。金属磁性粉含有樹脂に含まれる金属磁性粉の含有量は、一例として、90〜99wt%である。   The metal magnetic powder-containing resin constituting the covering resin 21 is made of a resin in which metal magnetic powder is dispersed. The metallic magnetic powder may be composed of, for example, iron-nickel alloy (permalloy), carbonyl iron, amorphous, amorphous or crystalline FeSiCr-based alloy, sendust, and the like. The resin used for the metal magnetic powder-containing resin is, for example, a thermosetting epoxy resin. Content of the metal magnetic powder contained in metal magnetic powder containing resin is 90-99 wt% as an example.

さらに、ダイシングしてチップ化することで、図9に示す本体部10が得られる。チップ化した後、必要に応じてバレル研磨等によりエッジの面取りをおこなってもよい。   Furthermore, by dicing into chips, the main body 10 shown in FIG. 9 is obtained. After forming the chip, the edge may be chamfered by barrel polishing or the like, if necessary.

最後に、本体部10の端部パターン15Aが露出した端面(Y方向において対向する端面)に、端部パターン15Aと電気的に接続されるように外部端子電極30A、30Bを設けることで、コイル部品1が完成する。外部端子電極30A、30Bは、コイル部品を搭載する基板の回路に接続するための電極であり、複数層構造とすることができる。たとえば、外部端子電極30A、30Bは、端面に樹脂電極材料を塗布した後、その樹脂電極材料に金属めっきを施すことにより形成することができる。外部端子電極30A、30Bの金属めっきには、Cr、Cu、Ni、Sn、Au、はんだ等を用いることができる。   Finally, the external terminal electrodes 30A and 30B are provided on the end surface (the end surface facing in the Y direction) where the end portion pattern 15A of the main body portion 10 is exposed so as to electrically connect to the end portion pattern 15A. Part 1 is completed. The external terminal electrodes 30A and 30B are electrodes for connecting to the circuit of the substrate on which the coil component is mounted, and can have a multi-layer structure. For example, the external terminal electrodes 30A and 30B can be formed by applying a resin electrode material to the end face and then metal plating the resin electrode material. For metal plating of the external terminal electrodes 30A, 30B, Cr, Cu, Ni, Sn, Au, solder or the like can be used.

上述したコイル部品1によれば、樹脂壁18の下端部と基板11の主面11aとの接合面Sから巻回部14が離間しているために、樹脂壁18を介して隣り合う巻回部14同士が接合面S付近において遠ざかっている。これは、接合面Sを介して短絡するモードを考えたときに、隣り合う巻回部14同士の距離(すなわち、沿面距離)は、巻回部14同士が接合面S付近において遠ざかっていない(すなわち、空隙Gが存在しない)場合に比べて、延長されていることを意味している。それにより、接合面Sを介しての短絡が抑制され、その結果、巻回部14の間の耐圧向上が実現されている。   According to the coil component 1 described above, since the winding portion 14 is separated from the joint surface S between the lower end portion of the resin wall 18 and the main surface 11 a of the substrate 11, winding adjacent to each other via the resin wall 18 The portions 14 are far apart in the vicinity of the bonding surface S. This is because the distance between adjacent winding portions 14 (that is, the creeping distance) is not separated in the vicinity of the bonding surface S when considering a mode in which short circuiting is performed via the bonding surface S (i.e., creeping distance) That is, it means that it is extended compared with the case where the air gap G does not exist. Thereby, the short circuit via the bonding surface S is suppressed, and as a result, the withstand voltage improvement between the winding portions 14 is realized.

その上、巻回部14が接合面Sから離間していることで、接合面Sの間にめっきが浸入して、耐圧が低下してしまう事態も生じにくくなっている。   Moreover, since the winding portion 14 is separated from the bonding surface S, it is less likely that plating will intrude between the bonding surfaces S and the withstand voltage decreases.

特に、空隙Gが、巻回部14の下に入り込むくさび部gを含む断面形状を有する場合には、隣り合う巻回部14同士の距離がさらに延長されるため、さらなる耐圧向上が実現される。   In particular, when the air gap G has a cross-sectional shape including the wedge portion g which enters under the winding portion 14, the distance between the adjacent winding portions 14 is further extended, so that the withstand voltage can be further improved. .

また、コイル部品1によれば、コイル13の巻回部14の上面14cが樹脂壁18と接する高さ位置が、上面14cにおける最高の高さ位置よりも低くなっている。そのため、巻回部14から、樹脂壁18を介して隣り合う巻回部14までの沿面距離の延長が図られており、隣り合う巻回部14の間において耐圧が向上している。   Further, according to the coil component 1, the height position at which the upper surface 14 c of the winding portion 14 of the coil 13 contacts the resin wall 18 is lower than the highest height position on the upper surface 14 c. Therefore, the creeping distance from the winding portion 14 to the winding portion 14 adjacent to the winding portion 14 via the resin wall 18 is extended, and the withstand voltage is improved between the winding portions 14 adjacent to each other.

さらに、コイル部品1によれば、複数の樹脂壁18の間にコイル13の巻回部14が非接着状態で介在するため、コイル13の巻回部14と樹脂壁18とが互いに対して変位可能である。そのため、コイル部品1の使用環境が高温になったときなどの周辺温度に変化があり、コイル13の巻回部14と樹脂壁18との間の熱膨張係数の差に起因する応力が生じた場合であっても、コイル13の巻回部14と樹脂壁18とが相対移動することでその応力が緩和される。   Furthermore, according to the coil component 1, since the winding portion 14 of the coil 13 is interposed between the plurality of resin walls 18 in a non-adhesive state, the winding portion 14 of the coil 13 and the resin wall 18 are displaced relative to each other It is possible. Therefore, there is a change in the ambient temperature such as when the use environment of the coil component 1 becomes high, and a stress occurs due to the difference in the thermal expansion coefficient between the winding portion 14 of the coil 13 and the resin wall 18 Even in this case, the stress is relaxed by relative movement of the winding portion 14 of the coil 13 and the resin wall 18.

また、コイル部品1の製造方法によれば、樹脂体17の樹脂壁18の間に介在するように、コイル13の巻回部14がめっき成長されている。すなわち、被覆樹脂21でコイル13を覆う前に、コイル13の巻回部14間にはすでに樹脂壁18が介在している。そのため、コイル13の巻回部14間に樹脂を別途に充填する必要はなく、樹脂壁18によりコイル13の巻回部14間の樹脂の寸法精度の安定化が図られる。   Further, according to the method of manufacturing the coil component 1, the winding portion 14 of the coil 13 is plated and grown so as to be interposed between the resin walls 18 of the resin body 17. That is, before covering the coil 13 with the coating resin 21, the resin wall 18 is already interposed between the winding portions 14 of the coil 13. Therefore, it is not necessary to separately fill the resin between the wound portions 14 of the coil 13, and the resin wall 18 stabilizes the dimensional accuracy of the resin between the wound portions 14 of the coil 13.

1…コイル部品、11…基板、13…コイル、14…巻回部、14a…シード部、14b…めっき部、14c…上面、17…樹脂体、18…樹脂壁、18a…下端面、21…被覆樹脂、30A、30B…外部端子電極、40…絶縁体、G…空隙、g…くさび部、S…接合面。   DESCRIPTION OF SYMBOLS 1 ... Coil part, 11 ... Board | substrate, 13 ... Coil, 14 ... Winding part, 14a ... Seed part, 14b ... Plating part, 14c ... Upper surface, 17 ... Resin body, 18 ... Resin wall, 18a ... Lower end surface, 21 ... Coating resin, 30A, 30B: external terminal electrode, 40: insulator, G: air gap, g: wedge portion, S: bonding surface.

Claims (10)

基板と、
前記基板の主面上にめっき成長で設けられたコイルと、
前記基板の主面上に設けられ、前記コイルの巻回部が間に延びる複数の樹脂壁を有する樹脂体と、
磁性粉含有樹脂からなり、前記基板の主面の前記コイルと前記樹脂体とを一体的に覆う被覆樹脂と
を備え、
前記巻回部が、前記樹脂壁の下端部が前記基板の主面と接合される接合面から離間している、コイル部品。
A substrate,
A coil provided by plating growth on the main surface of the substrate;
A resin body having a plurality of resin walls provided on the main surface of the substrate and in which the winding portion of the coil extends therebetween;
And a covering resin made of a magnetic powder-containing resin and integrally covering the coil on the main surface of the substrate and the resin body,
The coil component, wherein the winding portion is separated from a joint surface where the lower end of the resin wall is joined to the main surface of the substrate.
前記巻回部と前記接合面との間に空隙が存在し、該空隙を介して、前記巻回部が前記接合面から離間している、請求項1に記載のコイル部品。   The coil component according to claim 1, wherein an air gap exists between the winding portion and the joint surface, and the winding portion is separated from the joint surface via the air gap. 前記空隙は、前記巻回部の下に入り込むくさび部を含む断面形状を有している、請求項2に記載のコイル部品。   The coil component according to claim 2, wherein the air gap has a cross-sectional shape including a wedge portion which gets under the winding portion. 前記コイルの巻回部の断面形状が四角形状である、請求項1または2に記載のコイル部品。The coil component according to claim 1, wherein a cross-sectional shape of a winding portion of the coil is a square shape. 前記樹脂体の樹脂壁の断面形状が四角形状である、請求項1〜のいずれか一項に記載のコイル部品。 The coil component according to any one of claims 1 to 4 , wherein a cross-sectional shape of a resin wall of the resin body is a square shape. 前記樹脂体の樹脂壁の断面は底辺の長さに対する高さの比が1より大きく、該樹脂壁が前記基板の主面の法線方向に沿って長く延びている、請求項に記載のコイル部品。 The section of the resin wall of the resin body is greater than 1 the ratio of the height to the length of the base, the resin wall is elongated along a normal direction of a principal face of the substrate, according to claim 5 Coil parts. 前記コイルの巻回部の断面は底辺の長さに対する高さの比が1より大きく、該巻回部の断面が前記基板の主面の法線方向に沿って長く延びている、請求項6に記載のコイル部品。   7. The coil according to claim 6, wherein a cross section of the winding portion has a height to bottom length ratio of greater than 1, and a cross section of the winding portion extends in a direction normal to the main surface of the substrate. Coil parts described in. 前記樹脂体の樹脂壁の高さが前記コイルの巻回部の高さより高い、請求項1〜7のいずれか一項に記載のコイル部品。   The coil component according to any one of claims 1 to 7, wherein a height of a resin wall of the resin body is higher than a height of a winding portion of the coil. 記コイルの巻回部は、前記樹脂体の樹脂壁に接着されていない、請求項1〜8のいずれか一項に記載のコイル部品。 Windings of pre Symbol coils are not bonded to the resin wall of the resin body, a coil component according to any one of claims 1-8. 前記基板の主面上に複数並んだ樹脂壁のうち、最外に位置する樹脂壁の厚さが内側に位置する樹脂壁の厚さより厚い、請求項1〜9のいずれか一項に記載のコイル部品。   The resin wall according to any one of claims 1 to 9, wherein among the plurality of resin walls arranged on the main surface of the substrate, the thickness of the resin wall located at the outermost side is thicker than the thickness of the resin wall located inside. Coil parts.
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