TWI527626B - Showerhead device - Google Patents

Description

Sprinkler head device

This invention relates to a spray apparatus, and more particularly to a sprinkler apparatus.

With the development of the coating process, how to uniformly spray the gas into the coating chamber is an important technology. In this regard, gas distribution modules, especially gas showerheads, play an important role. However, the high temperature of the coating chamber may cause deformation of the gas shower head. For example, in a coating process for chemical weather deposition, the temperature of the coating chamber may be as high as 1050 ° C, which is easy to deform the metal or alloy gas nozzle. After a long period of use, the gas spray head may leak or leak unevenly.

The invention provides a sprinkler head device which has good heat dissipation properties and helps to improve the service life.

The sprinkler head device of the present invention comprises a perforated plate body having a first flow The track and a plurality of second flow paths. The first flow path is distributed along the porous plate body for a first fluid to circulate. The second flow passages respectively penetrate the porous plate body and are staggered in the first flow passage for a second fluid to flow, wherein the first flow passage and the second flow passage are not in communication with each other, and the first fluid contacts the side walls of each of the second flow passages.

Based on the above, the sprinkler apparatus of the embodiment of the present invention interleaves the second flow path to the first flow path such that the first fluid in the first flow path contacts the side wall of the second flow path. Meanwhile, the sprinkler head device of the embodiment of the present invention does not allow the first fluid and the second fluid to communicate with each other. As such, the flow of the first fluid can effectively cool the sidewalls of the second flow passage to reduce adverse effects of temperature on the showerhead assembly, such as thermal deformation. In some embodiments, the porous plate body defining the first flow path and the second flow path in the sprinkler head device may be an integrally formed device, thereby helping to avoid the first flow path and the second cause due to poor connection at the joint of the members. The communication between the flow channels.

In order to make the above-described features of the present invention more comprehensible, the following detailed description of the embodiments will be described in detail below.

10‧‧‧ sprinkler head device

12‧‧‧Upper cover

12A‧‧‧Fluid source connector

14‧‧‧Fixed frame

16‧‧‧Inner pipe fittings

100, 200, 300‧‧‧ porous plate

102‧‧‧First runner

104‧‧‧Second runner

104A‧‧‧ entrance end

104B‧‧‧export end

106, 206, 306‧‧

108‧‧‧ Third Runner

110, 410‧‧‧ first board face

112‧‧‧through holes

120‧‧‧Circular wall

130, 530, 630‧‧‧ spacer structure

140‧‧‧Tubular bulge

150, 350‧‧‧ second panel

152‧‧‧through holes

Sections 202A, 202B, 302A~302D‧‧

240‧‧‧ pipe fittings

420‧‧‧ grid structure

532‧‧‧First spacer structure

534‧‧‧Separate septum structure

A-A‧‧‧ cut line

A1, A2‧‧‧ enclosed area

D1, D2‧‧‧ distance

L‧‧‧Orientation

P1~P7‧‧‧ Flow Path

S1‧‧‧ first side

S2‧‧‧ second side

W‧‧‧Width

X, Y‧‧ ‧ pitch

Θ‧‧‧ angle

1 is a schematic view of a showerhead device in accordance with an embodiment of the present invention.

2A is a schematic view of a porous plate body 100 in the sprinkler head device of FIG. 1.

Figure 2B is a schematic illustration of a portion of the porous plate of Figure 2A after cross-section.

3 is a schematic cross-sectional view showing a first embodiment of the perforated plate of FIGS. 2A and 2B, wherein the cross section shown in FIG. 3 corresponds to the cross-sectional line A-A of FIG. 2A.

4 is a cross-sectional view showing a second embodiment of the perforated plate of FIGS. 2A and 2B, wherein the cross section shown in FIG. 4 corresponds to the cross-sectional line A-A of FIG. 2A.

Fig. 5 is a schematic view showing a third embodiment of the perforated plate of Figs. 2A and 2B, wherein Fig. 5 shows a disassembled view of a partial portion of the perforated plate.

Figure 6 is a schematic view of a fourth embodiment of the perforated plate of Figures 2A and 2B, wherein Figure 6 shows a disassembled view of the perforated plate.

Fig. 7A is a schematic view of a porous plate body according to another embodiment of the present invention.

Fig. 7B is a disassembled view of the porous plate body of Fig. 7A.

Fig. 8A is a schematic view of a porous plate body according to still another embodiment of the present invention.

Fig. 8B is a disassembled view of the porous plate body of Fig. 8A.

Fig. 9 is a schematic view showing an inner tube member provided in a plate body device according to an embodiment of the present invention.

1 is a schematic view of a showerhead device in accordance with an embodiment of the present invention. Referring to FIG. 1, the sprinkler head device 10 includes an upper cover 12, a fixing frame 14 and a perforated plate body 100, wherein the perforated plate body 100 is sandwiched between the upper cover 12 and the fixing frame 14. The upper cover 12 is provided with a plurality of fluid source connectors 12A for connecting the fluid source to allow fluid to pass through the perforated plate 100. The fixing frame 14 is a ring-shaped structure that exposes the porous plate body 100 to allow fluid to pass through the porous plate body 100. The sprinkler head device 10 can be applied to a coating apparatus to uniformly supply fluid to the coating chamber. Because the coating chamber may need to be heated to a very high process temperature The sprinkler head device 10 needs to be made of a temperature resistant material as a whole. For example, the material of each member in the sprinkler head device 10 may be a temperature resistant material such as a metal, a metal alloy or a ceramic.

2A is a schematic view of the porous plate body 100 of the sprinkler head device of FIG. 1, and FIG. 2B is a schematic view of a portion of the perforated plate body of FIG. 2A after cross-section. Referring first to FIGS. 2A and 2B , the perforated plate body 100 has a first flow path 102 and a plurality of second flow paths 104 . The first flow path 102 is disposed inside the porous plate body 100 so that the actual contour of the first flow path 102 cannot be directly seen by the appearance, so that the outline of the first flow path 102 is shown by a broken line in FIG. 2A, and the first flow can be seen in FIG. 2B. Part of the outline of the track 102. Specifically, the first flow path 102 is distributed inside the porous plate body 100 along the plane of the plate of the porous plate body 100 for the first fluid to flow, wherein the first flow path 102 can define a single flow path P1. The second flow path 104 extends through the porous plate body 100 and is staggered to the first flow path 102 for a second fluid to circulate. In order to allow the first fluid to flow in and out of the first flow path 102, the porous plate body 100 further has a plurality of openings 106, and the openings 106 are located at the side of the porous plate body 100 and are disposed at the inlet end and the outlet end of the first flow path 102. .

At the end of this embodiment, the first fluid flowing in the first flow path 102 may directly contact the side walls of each of the second flow paths 104 for heat exchange. In particular, when the first fluid is a heat dissipating fluid, the perforated plate body 100 can have a desired heat dissipating effect. Therefore, the porous plate body 100 can be applied to a high temperature environment without being easily deformed due to a high ambient temperature. For example, when the sprinkler head device 10 having the perforated plate body 100 is applied to a coating apparatus, the required process fluid can be supplied as a second fluid to the coating chamber from the second flow path 10, and the heat exchange fluid is used as First fluid and note The first flow path 102 is introduced to achieve a heat dissipation effect. Here, the first fluid and the second fluid may be in a gaseous state, a liquid state, or a gas-liquid mixed state, respectively. Additionally, the process fluid can include a reactive fluid, a carrier fluid, or a combination thereof, and the heat exchange fluid can be, for example, water, a refrigerant, or other fluid that can undergo heat exchange. When the temperature of the coating chamber is too high to cause the porous plate body 100 to deform, the heat exchange fluid in the first flow path 102 can carry away the heat of the porous plate body 100 to prevent the porous plate body 100 from being damaged by high temperature. Here, the heat exchange fluid in the first flow path 102 directly contacts the side wall of the second flow path 104, so the heat exchange fluid can effectively reduce the probability of deformation of the second flow path 104 or the porous plate body 100. Thereby, the distribution density of the second flow path 104 in the porous plate body 100 and the flow path width can be not limited. For example, the distribution density of the second flow path 104 may be, for example, two rows of second flow paths 104 may be disposed in the first flow path 102 having a width W of 6.8 mm. Meanwhile, when the pitch X of the second flow path 104 is measured along the arrangement direction L, the pitch X is 5 mm to 6 mm, wherein the arrangement direction L intersects with the main extension direction of the first flow path 102 by an angle θ, and the angle θ is 45 degree. In addition, the adjacent two rows of the second flow channels 104 may be parallel to the arrangement direction L and exhibit a staggered arrangement, so the pitch Y of the adjacent two columns of the second flow channels 104 in the arrangement direction L may be a section. Half the distance from X, that is, the pitch Y is 2.5 mm to 3 mm. The flow path width of the second flow path 104 may be, for example, 0.5 mm to 1.8 mm. More specifically, the inner diameter defining the tubular structure of the second flow path 104 may be, for example, 0.5 mm to 1.8 mm, and the outer diameter may be, for example, 1 mm to 2.3 mm. In the case where the plurality of second flow passages 104 are narrow and densely arranged, the first fluid in the first flow passage 102 can provide efficient heat exchange, so that the second flow passage 104 is incompatible. It is easy to be deformed by high temperature to achieve the effect of prolonging the service life.

The porous plate body 100 can be realized by various structures. Several embodiments will be described below, but the invention is not limited thereto. Any structural design in which the first flow path 102 and the second flow path 104 can be formed in the porous plate body 100 can be taken as an embodiment of the present invention.

3 is a schematic cross-sectional view showing a first embodiment of the perforated plate of FIGS. 2A and 2B, wherein the cross section shown in FIG. 3 corresponds to the cross-sectional line A-A of FIG. 2A. Referring to FIG. 2A, FIG. 2B and FIG. 3 simultaneously, the porous plate body 100 may include a first plate surface portion 110, an annular wall 120, a plurality of spacer structures 130, a plurality of tubular protrusions 140, and a second plate in this embodiment. Face 150. The first plate surface portion 110 has opposite first side S1 and second side S2, wherein the annular wall 120, the plurality of spacer structures 130, and the plurality of tubular protrusions 140 are disposed on the second side S2 of the first plate surface portion 110 and Between the second plate faces 150. The spacer structure 130 is disposed within an area enclosed by the annular wall 120 to define a first flow path 102 between the first plate surface portion 110 and the second plate surface portion 150. At the same time, the tubular projections 140 are located within the first flow passage 102. In addition, the first plate surface portion 110 is provided with a plurality of through holes 112 penetrating from the first side S1 to the second side S2. At the same time, the second panel portion 150 is also provided with a plurality of through holes 152 respectively corresponding to the through holes 112. Each of the tubular protrusions 140 protrudes from the second side S2 of the first plate surface portion 110 toward the second plate surface portion 150 and is located in the first flow path 102, and each of the tubular protrusions 140 communicates with one of the through holes 112 and one of the through holes 152 to define these second flow paths 104.

Here, the second flow path 104 is staggered to the first flow path 102, but the side wall of the second flow path 104 (ie, the tube wall of the tubular protrusion 140) is sealed, and thus the first flow path 102 It is not connected to the second flow path 104. However, when the first fluid flows through the first flow path 102, it contacts the side walls of each of the second flow paths 104. That is, there is a first fluid between any two tubular projections 140. Therefore, the first fluid can perform efficient heat exchange with the tubular protrusions 140, contributing to reducing the probability of high temperature deformation of the porous plate body 100.

In addition, in the present embodiment, the inlet end 104A of the second flow path 104 is disposed on the first plate surface portion 110, and the outlet end 104B is disposed on the second plate surface portion 150. When actually applied to the coating chamber, the inlet end 104A is relatively remote from the coating chamber to receive fluid from the fluid supply source, and the outlet end 104B is relatively close to the coating chamber to direct process fluid into the coating chamber. As a result, the high temperature effect of the outlet end 104B is more significant, and it is relatively easy to deform. Therefore, in the present embodiment, the distance D1 between the first flow path 102 and the inlet end 104A of the second flow path 104 is greater than the distance D2 between the first flow path 102 and the outlet end 104B of the second flow path 104 to The outlet end 104B provides better heat exchange efficiency. Of course, the distance D1 can also be equal to the distance D2 or less than the distance D2 in other embodiments.

As can be seen from FIG. 3, the porous plate body 100 composed of the first plate surface portion 110, the annular wall 120, the spacer structure 130, the tubular projection 140, and the second plate surface portion 150 may be integrally formed of a plurality of plates made of the same material. body. In the actual manufacturing method, the porous plate body 100 can be produced by, for example, lamination manufacturing. However, the porous plate body 100 may be constructed by combining a plurality of components. For example, FIG. 4 is a schematic cross-sectional view of a second embodiment of the perforated plate of FIGS. 2A and 2B, wherein the cross-section shown in FIG. 4 corresponds to the cross-sectional line A-A of FIG. 2A. Please also refer to Figure 2A, 2B and FIG. 4, the porous plate body 100 includes a first plate surface portion 110, an annular wall 120, a plurality of spacer structures 130, a plurality of tube members 240, and a second plate surface portion 150, wherein the first plate surface portion The structural design of the annular wall 120, the spacer structure 130, and the second plate surface portion 150 is the same as that of the embodiment of FIG. 3, and therefore will not be further described. In this embodiment, the first plate surface portion 110, the annular wall 120, the spacer structure 130, and the second plate surface portion 150 may be integrally formed structures, and the tube member 240 is independent of the first plate surface portion 110, the annular wall 120, and the partition. The sheet structure 130 and the second plate surface portion 150. At the same time, each of the tubular members 240 is inserted into one of the through holes 112 and the corresponding one of the through holes 152 to define the second flow path 104. In order to prevent the first fluid in the first flow path 102 from oozing from the gap between the tubular member 240 and the through hole 112 or from the gap between the tubular member 240 and the through hole 152, the tubular member 240 can be joined to the first plate by a bonding medium. The face 110 and the second panel face 150, wherein the bonding medium can be solder or other material that can provide bonding and can withstand high temperatures.

Fig. 5 is a schematic view showing a third embodiment of the perforated plate of Figs. 2A and 2B, wherein Fig. 5 shows a disassembled view of a partial portion of the perforated plate. Referring to FIG. 2A, FIG. 2B and FIG. 5 simultaneously, the porous plate body 100 may be composed of a first plate surface portion 110, an annular wall 120, a plurality of spacer structures 130, a plurality of tube members 240, and a second plate portion 350 in this embodiment. The structural design of the first plate surface portion 110, the annular wall 120, and the spacer structure 130 is the same as that of the embodiment of FIG. 3 and the structural design of the tubular member 240 is the same as that of the embodiment of FIG. 4, and thus will not be further described. In the present embodiment, the first plate surface portion 110, the annular wall 120, and the spacer structure 130 are integrally formed structures, and the second plate surface portion 350 is independent of the first plate surface portion 110, the annular wall 120, and the spacer structure 130. the whole frame. Thus, the annular wall 120 and the spacer structure 130 can be joined to the second panel portion 350 by a bonding medium, wherein the bonding medium can be solder or other material that can provide bonding and withstand high temperatures.

Figure 6 is a schematic view of a fourth embodiment of the perforated plate of Figures 2A and 2B, wherein Figure 6 shows a disassembled view of the perforated plate. Referring to FIG. 2A, FIG. 2B and FIG. 6 simultaneously, the porous plate body 100 may be composed of a first plate surface portion 410, an annular wall 120, a plurality of spacer structures 130, a plurality of tube members 240, and a second plate portion 350 in this embodiment. The structural design and connection relationship of the annular wall 120, the spacer structure 130, the tube member 240, and the second plate surface portion 350 can be referred to the embodiment of FIG. 5 without further elaboration. In the present embodiment, the annular wall 120 and the spacer structure 130 are integrally connected to each other to form a grid structure 420, and the first plate surface portion 410, the second panel portion 350, and the grid structure 420 are independent of each other. In addition, the first plate surface portion 410 may be coupled to one side of the grid structure 420 through a bonding medium, and the second plate surface portion 350 may be coupled to the other side of the grid structure 420 through a bonding medium to form the first flow path 102. Of course, the tube 240 is also connected to the first plate portion 410 and the second plate portion 350 through the bonding medium.

The porous plate body 100 of FIGS. 2A and 2B can be used in combination with the above-described various designs in addition to the structural design of FIGS. 3 to 6 described above. For example, the second panel face 350 of FIG. 5 can be applied to the design of FIG. 3 or FIG. 4 to be stacked on the outside of the original second panel face 150. Alternatively, the first panel portion 410 of FIG. 6 can be applied to the design of FIG. 3, FIG. 4 or FIG. 5 to be stacked on the outside of the original first panel portion 110. In addition, the design in which the tubular projection 140 is disposed to protrude from the second side S2 of the first plate surface portion 110 toward the second plate surface portion 150 in FIG. 3 can be applied to the embodiment of FIGS. 5 and 6. The embodiment of Figures 5 and 6 may eliminate the need to use the tubular member 240 to define the second flow passage 104.

The first flow path 102 defined by the spacer structure 130 in the porous plate body 100 of the above embodiment has only a single flow path P, but the invention is not limited thereto. For example, FIG. 7A is a schematic view of a porous plate body according to another embodiment of the present invention, and FIG. 7B is a disassembled view of the porous plate body of FIG. 7A. Referring to FIG. 7 , the porous plate body 200 has a first flow channel 202 , a plurality of second flow channels 204 , and a plurality of openings 206 . The first flow channel 202 has a plurality of segments 202A and 202B, and these second flow channels 204 are interleaved with the segments 202A and 202B, respectively. Segments 202A and 202B are independent of each other such that segments 202A and 202B define flow path P2 and flow path P3, respectively. The flow path P2 and the flow path P3 respectively have an inlet end and an outlet end, and the opening 206 is disposed at the inlet end and the outlet end of the flow paths P2 and P3 to communicate with the first flow path 202.

In the present embodiment, the first flow path 202 is defined by the spacer structure 530, wherein the spacer structure 530 is different from the spacer structure 130 of the previous embodiment in that the spacer structure 530 includes a first spacer structure. 532 and a plurality of second spacer structures 534. Both ends of the first spacer structure 532 are connected to the annular wall 120 to enclose the plurality of closed areas A1 and A2 and divide the first flow path 202 into segments 202A and 202B, wherein the segment 202A is located in the closed area A1 and segmented 202B is located in the enclosed area A2. In addition, each of the second spacer structures 534 has only one end connected to the annular wall 130 and the other end being disposed as an open end to determine the flow of the first fluid in the corresponding segment 202A or 202B in the corresponding closed area A1 or A2. Road P2 or P3. The design of this embodiment divides the first flow channel 202 into two segments 202A and 202B, and each The flow path length of segment 202A or 202B is shorter than that of the design of Figure 2A, which helps to increase the heat exchange efficiency of the first fluid. At this time, the distribution density of the second flow path 204 can be denser and the flow path width can be narrower, and it is still not easily deformed and damaged due to the high temperature of the environment.

Fig. 8A is a schematic view of a porous plate body according to still another embodiment of the present invention, and Fig. 8B is a disassembled view of the porous plate body of Fig. 8A. Referring to FIG. 8 , the porous plate body 300 has a first flow path 302 , a plurality of second flow paths 304 , and a plurality of openings 306 . The first flow path 302 has a plurality of segments 302A, 302B, 302C, and 302D, and these second flow paths 304 extend through the segments 302A, 302B, 302C, and 302D, respectively. The segments 302A, 302B, 302C, and 302D are independent of each other such that the segments 302A, 302B, 302C, and 302D define a flow path P4, a flow path P5, a flow path P6, and a flow path P7, respectively. The flow path P4, the flow path P5, the flow path P6 and the flow path P7 respectively have an inlet end and an outlet end, and the openings 306 are respectively disposed at the inlet end and the outlet end of the flow paths P4 P P7 and the first flow path 302. Connected.

In the present embodiment, the first flow path 302 is defined by a spacer structure 630, wherein the spacer structure 630 is different from the spacer structures 130 and 530 of the previous embodiment in that the spacer structure 630 includes a plurality of first The spacer structure 632 and the plurality of second spacer structures 634. The first spacer structure 632 encloses a plurality of enclosed regions within the annular wall 130 to divide the first flow channel 302 into a plurality of segments 302A, 302B, 302C, and 302D. In addition, the segments 302A, 302B, 302C, and 302D are each located in a closed region, wherein each of the second spacer structures 634 has only one end connected to the annular wall 130 and the other end being disposed as an open end to determine in the corresponding closed region. The first fluid is Flow paths P4 to P7 in the corresponding segments 302A, 302B, 302C, and 302D. The design of this embodiment divides the first flow channel 302 into four segments 302A, 302B, 302C, and 302D, and the flow path length of each segment 302A, 302B, 302C, and 302D is shorter than that of the design of FIG. 2A. This helps to increase the heat exchange efficiency of the first fluid. Therefore, the second flow path 304 of the porous plate body 300 can be set to be denser and narrower.

Fig. 9 is a schematic view showing the provision of an inner tubular member in a perforated plate body according to an embodiment of the present invention. Referring to FIG. 9, in the present embodiment, a plurality of inner tubular members 16 are disposed in the perforated plate body 100 of FIGS. 2A and 2B to define a third flow path 108. The inner tubular members 16 are respectively disposed in the second flow passage 104, and each of the inner tubular members 16 is parallel with the corresponding one of the second flow passages 104 for a third fluid to circulate. That is, the third flow path 108 is wrapped in the second flow path 104. For example, the tube wall of the third flow path 108 and the tube wall of the second flow path 104 form two annular structures having the same center. At this time, a second fluid flow is provided between the tube wall of the third flow path 108 and the tube wall of the second flow path 104. . In this way, the third flow channel 108 and the second flow channel 104 can allow different fluids to circulate to meet different application requirements.

In summary, the sprinkler apparatus of the embodiment of the present invention interleaves the second flow path to the first flow path such that the first fluid in the first flow path contacts the side wall of the second flow path. Meanwhile, the sprinkler head device of the embodiment of the present invention does not allow the first fluid and the second fluid to communicate with each other. As such, the flow of the first fluid can effectively cool the sidewalls of the second flow passage to reduce adverse effects of temperature on the showerhead assembly, such as thermal deformation. In some embodiments, the porous plate body defining the first flow path and the second flow path in the sprinkler head device may be integrally formed integrally or partially formed integrally, which helps to avoid poor connection due to the connection of the members. Leading to the communication between the first flow path and the second flow path.

100‧‧‧Porous plate

102‧‧‧First runner

104‧‧‧Second runner

106‧‧‧ openings

A-A‧‧‧ cut line

L‧‧‧Orientation

P1‧‧‧ Flow Path

W‧‧‧Width

X, Y‧‧ ‧ pitch

Θ‧‧‧ angle

Claims (16)

A sprinkler head device comprising: a perforated plate body having a first flow channel and a plurality of second flow channels, the first flow channel being distributed along the porous plate body for a first fluid to circulate, the first Two flow passages respectively extend through the porous plate body and are staggered in the first flow passage for a second fluid to flow, wherein the second flow passage is perpendicular to the porous plate body, and the first flow passage and the second flow passage are not connected to each other And the first fluid contacts the sidewalls of each of the second flow channels, wherein the porous plate body comprises: a first plate surface having a plurality of first through holes extending from a first side to a second side, and The first side is opposite to the second side; an annular wall is disposed on the second side; a plurality of spacer structures are located within the area enclosed by the annular wall, and the spacer structures are spaced apart from the first board The second side of the face forms the first flow path on the second side, and the first through holes are respectively located between adjacent two of the spacer structures; and a second plate surface, the annular wall And the spacer structure is located between the first board surface and the second board surface, and the A second plate portion having a plurality of through holes, the plurality of second through holes respectively corresponding to the plurality of first through holes. The sprinkler head device of claim 1, wherein the perforated plate body further comprises a plurality of tubular protrusions, and the second side of the first plate surface portion protrudes toward the second plate surface portion and is located at the first In the first-class track, each of the tubular protrusions is connected to one of the first through holes and the corresponding one of the second through holes to form one of the second flows. Road. The sprinkler head device of claim 1, further comprising a plurality of tubular members, each of the tubular members being inserted in one of the first through holes and the corresponding one of the second through holes to be inside the tubular members The second flow paths are formed. The sprinkler head device of claim 3, wherein each of the tubes is joined to the first panel portion and the second panel portion by a bonding medium. The sprinkler head device of claim 1, wherein the annular wall and the spacer structures are joined to the second panel face by a bonding medium. The sprinkler head device of claim 1, wherein the annular wall and the spacer structures are joined to the first panel face by a bonding medium. The sprinkler head device of claim 1, wherein the annular wall has a plurality of openings that communicate with the first flow passage, respectively. The sprinkler head device of claim 1, wherein the spacer structures comprise at least a first spacer structure and a plurality of second spacer structures, the at least one first spacer structure being coupled to the annular wall The first flow channel is divided into a plurality of segments by enclosing a plurality of closed regions, each of the segments being located in one of the closed regions, and each of the second spacer structures has one end connected to the annular wall and the other end The flow path of the first fluid in the corresponding segment is determined for the open end in one of the enclosed regions. The sprinkler head device of claim 8, wherein the annular wall has a plurality of openings that communicate with the inlet end and the outlet end of the flow path, respectively. The sprinkler head device of claim 1, wherein a distance between the first flow passage and an outlet end of each of the second flow passages is smaller than the first flow passage and each of the The distance between the inlet ends of the second flow channel. The sprinkler head device of claim 1, wherein the first flow passage is divided into a plurality of segments independent of each other, each segment having an inlet end and an outlet end, and the first fluid is in each There is a single flow path in the segment. The sprinkler head device of claim 1, wherein the first fluid is a heat exchange fluid and the second fluid is a process fluid. The sprinkler head device of claim 12, wherein the process fluid comprises a reactive fluid, a carrier fluid, or a combination thereof. The sprinkler head device of claim 12, wherein the heat exchange fluid comprises a coolant. The sprinkler head device of claim 1, further comprising a plurality of inner tubular members disposed in the second flow passages, each inner tubular member being parallel with a corresponding one of the second flow passages for a third Fluid circulation. The sprinkler head device of claim 1, further comprising an upper cover and a fixing frame, the porous plate body being sandwiched between the upper cover and the fixing frame.