TWI523270B - Electrode - free light - emitting diode and its manufacturing method - Google Patents
Electrode - free light - emitting diode and its manufacturing method Download PDFInfo
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本發明是有關於一種發光二極體,及其製作方法,特別是指一種無電極遮光的發光二極體及其製作方法。 The invention relates to a light-emitting diode, and a manufacturing method thereof, in particular to a light-emitting diode without electrode shading and a manufacturing method thereof.
發光二極體的光電效率是以外部量子效率表示,而外部量子效率又為內部量子效率與光取出率的乘積;其中,光取出率則為自發光層產生的光子與成功離開半導體光電元件內部之光子量的比值。 The photoelectric efficiency of the light-emitting diode is represented by external quantum efficiency, and the external quantum efficiency is the product of the internal quantum efficiency and the light extraction rate; wherein the light extraction rate is the photon generated by the self-luminous layer and successfully leaves the inside of the semiconductor photovoltaic element. The ratio of the amount of photons.
參閱圖1,圖1是一般發光二極體的結構,具有一個磊晶基板11、一個形成於該磊晶基板11表面的發光單元12、及一個用以提供電能製該發光單元12的電極單元13。該發光層具有一層與該基板的表面連接的第一型半導體層121、一與該第一型半導體層121的部分表面連接的多接面量子井層(MQW)122,及一層與該多接面量子井層122表面連接的第二型半導體層123,且該第二型半導體層123的表面為出光面,該電極單元13具有一個形成於該第一型半導體層121表面的底電極131,及一形成於該第二型半導體層123表面的頂電極132。 Referring to FIG. 1, FIG. 1 is a general LED structure having an epitaxial substrate 11, an illumination unit 12 formed on the surface of the epitaxial substrate 11, and an electrode unit for supplying electric energy to the illumination unit 12. 13. The light emitting layer has a first type semiconductor layer 121 connected to the surface of the substrate, a multi-junction quantum well layer (MQW) 122 connected to a part of the surface of the first type semiconductor layer 121, and a layer The surface of the second type semiconductor layer 123 is a light-emitting surface, and the electrode unit 13 has a bottom electrode 131 formed on a surface of the first-type semiconductor layer 121. And a top electrode 132 formed on a surface of the second type semiconductor layer 123.
目前常用來提升發光二極體光取出率的方法, 有利用改變發光單元的結構/組成以提升發光效率的化學方法、或是利用物理方法,在該發光單元12表面或是磊晶基板11的表面形成規則或不規則形狀的粗化結構14(參閱圖2,圖2中該粗化結構14為形成在該出光面),以減少光的全反射作用、或是利用減少該頂電極132對該出光面的遮覆,增加出光面積,以提升發光二極體的光取出效率;而如果該磊晶基板11為透光材料,則可進一步利用改變封裝方式,利用覆晶方式封裝LED,改變光的出射方向,以減低一般封裝時,因為該頂電極132的遮覆所造成的電極遮光的問題。 Currently used to improve the light extraction rate of light-emitting diodes, There is a chemical method of changing the structure/composition of the light-emitting unit to improve the luminous efficiency, or a physical method to form a rough or irregular shape of the roughened structure 14 on the surface of the light-emitting unit 12 or the surface of the epitaxial substrate 11 (see 2, in FIG. 2, the roughened structure 14 is formed on the light-emitting surface) to reduce the total reflection of light, or to reduce the coverage of the light-emitting surface by the top electrode 132, thereby increasing the light-emitting area to enhance the light emission. If the epitaxial substrate 11 is a light-transmitting material, if the epitaxial substrate 11 is a light-transmitting material, the LED can be further packaged by using a flip-chip method to change the direction of light emission to reduce the general package, because the top is The problem of shading of the electrode caused by the covering of the electrode 132.
然而,前述以覆晶封裝方式進行LED封裝時,雖然光會經由該磊晶基板11的方向發出,而可避免傳統封裝時該頂電極132會遮覆出光面的問題,但是利用覆晶封裝方式,因為要將該底、頂電極131、132與用於封裝的之基板的電路進行對位,而此,則會因為該底、頂電極131、132被壓覆在最底部而增加製程的困難。此外,一般用於覆晶封裝的封裝基板因為其正極與負極的電路會製作在同一平面,因此,封裝後製得的覆晶結構仍會面臨封裝基板因存在絕緣材料,而影響其散熱能力的問題。 However, when the LED package is performed in a flip chip package, the light is emitted through the direction of the epitaxial substrate 11 to avoid the problem that the top electrode 132 covers the light surface during the conventional package, but the flip chip package is used. Because the bottom and top electrodes 131, 132 are aligned with the circuit for the packaged substrate, the process is difficult because the bottom and top electrodes 131, 132 are pressed at the bottom. . In addition, the package substrate generally used for flip chip packaging is formed on the same plane because the circuits of the positive and negative electrodes are formed. Therefore, the flip chip structure obtained after packaging still faces the insulating material of the package substrate, which affects the heat dissipation capability. problem.
因此,如何降低該頂電極13對發光單元12的影響,減少該發光層12發光區域的浪費以有效提升該發光二極替的出光效率,則為本技術人員努力改善的方向。 Therefore, how to reduce the influence of the top electrode 13 on the light-emitting unit 12 and reduce the waste of the light-emitting area of the light-emitting layer 12 to effectively improve the light-emitting efficiency of the light-emitting diode is an improvement of the direction of the technician.
因此,本發明之目的,即在提供一種無電極遮 光的發光二極體的製作方法,此一做法不僅可製作出一種無電極遮光而具有高光取出率的發光二極體,且該發光二極體還可解決傳統覆晶製程對位之限制。 Accordingly, it is an object of the present invention to provide an electrodeless shield A method for fabricating a light-emitting diode, which not only produces a light-emitting diode having a high light extraction rate without electrode shading, and the light-emitting diode can also solve the limitation of the conventional flip chip process alignment.
於是本發明無電極遮光的發光二極體的製作方法,包含以下6個步驟。 Therefore, the method for producing the light-emitting diode without electrode shading of the present invention comprises the following six steps.
步驟(a),準備一個基材,該基材具有一個磊晶用的磊晶基板及一發光單元,該發光單元具有一層與該磊晶基板的表面連接的第一型半導體層、一與該第一型半導體層的部分表面連接的多接面量子井層,及一層與該多接面量子井層表面連接的第二型半導體層。 Step (a), preparing a substrate having an epitaxial substrate for epitaxy and a light emitting unit, the light emitting unit having a first type semiconductor layer connected to a surface of the epitaxial substrate, and A multi-junction quantum well layer connected to a portion of the surface of the first type semiconductor layer and a second type semiconductor layer connected to the surface of the multi-junction quantum well layer.
步驟(b),於該第一型半導體層的表面形成至少一個與該多接面量子井層,及第二型半導體層成一間隙彼此間隔的第一電極。 In step (b), at least one first electrode spaced apart from the multi-junction quantum well layer and the second-type semiconductor layer is formed on the surface of the first-type semiconductor layer.
步驟(c),形成一層包覆該第一電極裸露之表面的第二絕緣膜。 In the step (c), a second insulating film covering the exposed surface of the first electrode is formed.
步驟(d),形成一層與該發光單元的頂面電連接的第二電極。 In step (d), a second electrode electrically connected to the top surface of the light emitting unit is formed.
步驟(e),移除該磊晶基板,令該第一型半導體層與該磊晶基板連接的表面裸露出。 In step (e), the epitaxial substrate is removed to expose a surface of the first type semiconductor layer and the epitaxial substrate.
步驟(f),自該第一型半導體層遠離該發光單元的表面朝向對應該第一電極的位置形成一個貫穿該第一型半導體層的第一穿孔,再形成一個與該第一電極電連接並經由該第一穿孔向外延伸的第一延伸電極。 Step (f), forming a first through hole penetrating the first type semiconductor layer from a surface of the first type semiconductor layer away from the light emitting unit toward a position corresponding to the first electrode, and forming a first electrical connection with the first electrode And a first extension electrode extending outward through the first perforation.
較佳地,其中,該步驟(b)是形成多個與該多 接面量子井層,及第二型半導體層成一間隙彼此間隔的第一電極,該步驟(c)是於該些間隙及該第一電極的頂面形成一絕緣層。 Preferably, wherein step (b) is forming a plurality of The junction quantum well layer, and the second type semiconductor layer form a first electrode spaced apart from each other, and the step (c) is to form an insulating layer on the gaps and the top surface of the first electrode.
較佳地,其中,該發光單元還具有一層形成於該第二型半導體層表面的反射層。 Preferably, the light emitting unit further has a reflective layer formed on a surface of the second type semiconductor layer.
較佳地,前述該高光取出率發光二極體的製作方法,還包含一實施於該步驟(c)之前的步驟(g),於該多接面量子井層與第二型半導體層遠離該第一電極的側面形成一層第一絕緣膜,再自該發光單元頂面沿著該第一絕緣膜的表面形成一連接導線,該步驟(f)則是自該背面朝向該第一電極與該連接導線的位置分別形成一個貫穿該第一型半導體層的第一、二穿孔,再分別形成與該第一電極及連接導線電連接,並經由該第一、二穿孔向外延伸的一第一延伸電極及一第二延伸電極。 Preferably, the method for fabricating the high light extraction rate light emitting diode further comprises a step (g) performed before the step (c), wherein the multi-junction quantum well layer and the second type semiconductor layer are away from the Forming a first insulating film on a side surface of the first electrode, and forming a connecting wire along a surface of the first insulating film from the top surface of the light emitting unit, the step (f) is from the back surface toward the first electrode and the Positioning the connecting wires respectively to form a first and second through holes penetrating the first type semiconductor layer, and respectively forming a first connection with the first electrode and the connecting wire, and extending first through the first and second through holes An extension electrode and a second extension electrode.
較佳地,其中,該步驟(e)是以雷射剝離、化學蝕刻或機械研磨方式移除該磊晶基板。 Preferably, in the step (e), the epitaxial substrate is removed by laser stripping, chemical etching or mechanical grinding.
較佳地,其中,該步驟(d)是先於該絕緣層及該發光單元的頂面形成一晶種層,再以電鍍方式自該晶種層表面增厚形成一金屬層,而得到該第二電極。 Preferably, in the step (d), a seed layer is formed on the top surface of the insulating layer and the light-emitting unit, and a metal layer is formed by thickening from the surface of the seed layer by electroplating. Second electrode.
較佳地,其中,該步驟(d)是先於該絕緣層及該發光單元的頂面形成一晶種層,再以晶圓鍵結方式於該晶種層表面貼合一層導電基板,而得到該第二電極 Preferably, in the step (d), a seed layer is formed on the top surface of the insulating layer and the light-emitting unit, and a conductive substrate is bonded to the surface of the seed layer by wafer bonding. Obtaining the second electrode
又,本發明之另一目的,即在提供一種無電極遮光的發光二極體。 Further, another object of the present invention is to provide a light-emitting diode which is provided without electrode shading.
於是本發明的發光二極體包含:一發光單元、一第一電極、一絕緣層、一延伸電極,及一第二電極。 Therefore, the light emitting diode of the present invention comprises: a light emitting unit, a first electrode, an insulating layer, an extending electrode, and a second electrode.
該發光單元具有一第一型半導體層、一層形成於該第一型半導體層的部分表面的多接面量子井層,及一層形成於該多接面量子井層表面的第二型半導體層,且該第一型半導體層具有至少一個穿孔。 The light emitting unit has a first type semiconductor layer, a multi-junction quantum well layer formed on a portion of the surface of the first type semiconductor layer, and a second type semiconductor layer formed on the surface of the multi-junction quantum well layer. And the first type semiconductor layer has at least one perforation.
該第一電極設置於該第一型半導體層的表面,與該多接面量子井層,及第二型半導體層呈一間隙彼此間隔設置,並蓋覆該穿孔位置。 The first electrode is disposed on the surface of the first type semiconductor layer, and is spaced apart from the multi-junction quantum well layer and the second type semiconductor layer with a gap therebetween, and covers the through-hole position.
該絕緣層覆蓋該發光單元與該第一電極的頂面。 The insulating layer covers the top surface of the light emitting unit and the first electrode.
該延伸電極穿過該穿孔與該第一電極電連接。 The extension electrode is electrically connected to the first electrode through the through hole.
該第二電極與該發光單元的頂面電連接。 The second electrode is electrically connected to a top surface of the light emitting unit.
較佳地,其中,該發光單元還具有一層形成於該第二型半導體層表面的反射層。 Preferably, the light emitting unit further has a reflective layer formed on a surface of the second type semiconductor layer.
此外,本發明之又一目的,即在提供一種無電極遮光的發光二極體。 Further, another object of the present invention is to provide a light-emitting diode which is provided without electrode shading.
於是本發明的發光二極體包含:一發光單元、一第一電極、一絕緣層、一連接導線、一延伸電極單元,及一第二電極。 Therefore, the light emitting diode of the present invention comprises: a light emitting unit, a first electrode, an insulating layer, a connecting wire, an extending electrode unit, and a second electrode.
該發光單元具有一第一型半導體層、一層多接面量子井層,及一層第二型半導體層,其中,該第一型半導體層具有一分割槽,及藉由該分割槽彼此隔離的一第一區及一第二區,該第一區具有一個第一穿孔,且該第二區 具有一鄰近該分割槽的第二穿孔,該多接面量子井層形成於該第一區鄰近該分割槽的表面,該第二型半導體層形成於該多接面量子井層表面。 The light emitting unit has a first type semiconductor layer, a multi-layer quantum well layer, and a second type semiconductor layer, wherein the first type semiconductor layer has a dividing groove, and one separated from each other by the dividing groove a first zone and a second zone, the first zone having a first perforation and the second zone And having a second via hole adjacent to the dividing trench, the multi-junction quantum well layer is formed on a surface of the first region adjacent to the dividing trench, and the second type semiconductor layer is formed on a surface of the multi-junction quantum well layer.
該第一電極,設置於該第一區的表面,與該多接面量子井層,及第二型半導體層呈一間隙彼此間隔設置,並蓋覆該第一區的第一穿孔位置。 The first electrode is disposed on the surface of the first region, and is spaced apart from the multi-junction quantum well layer and the second-type semiconductor layer by a gap, and covers the first perforation position of the first region.
該絕緣層,具有一包覆該多接面量子井層,及第二型半導體層鄰近該分割槽的側面的第一絕緣膜,及一包覆該第一電極的表面的第二絕緣膜。 The insulating layer has a first insulating film covering the multi-junction quantum well layer, a second type semiconductor layer adjacent to a side surface of the dividing trench, and a second insulating film covering a surface of the first electrode.
該連接導線自該第二型半導體層的頂面並沿該第一絕緣膜的表面延伸至該第二區,並覆蓋該第二區的第二穿孔位置。 The connecting wire extends from a top surface of the second type semiconductor layer and along a surface of the first insulating film to the second region, and covers a second through position of the second region.
該延伸電極單元具有一穿過該第一穿孔與該第一電極電連接的第一延伸電極,及一穿過該第二穿孔與該連接導線電連接的第二延伸電極。 The extension electrode unit has a first extension electrode electrically connected to the first electrode through the first through hole, and a second extension electrode electrically connected to the connection line through the second through hole.
該第二電極形成於該發光單元的頂面並與該發光單元及連接導線電連接。 The second electrode is formed on a top surface of the light emitting unit and is electrically connected to the light emitting unit and the connecting wire.
本發明之功效在於:利用將該第一電極製作於該發光單元的出光面之外,且事先製作出一形成於該第一型半導體層裸露之表面並與該第一電極電連接的延伸電極,不僅可解決習知LED結構電極遮光的問題,且可解決覆晶封裝時的電極對位問題。 The effect of the present invention is that the first electrode is formed outside the light-emitting surface of the light-emitting unit, and an extended electrode formed on the exposed surface of the first-type semiconductor layer and electrically connected to the first electrode is prepared in advance. It can not only solve the problem of conventional LED structure electrode shading, but also solve the electrode alignment problem in flip chip packaging.
100‧‧‧磊晶基板 100‧‧‧ epitaxial substrate
21‧‧‧發光單元 21‧‧‧Lighting unit
211‧‧‧第一型半導體層 211‧‧‧First type semiconductor layer
212‧‧‧多接面量子井層 212‧‧‧Multiple junction quantum well layers
213‧‧‧第二型半導體層 213‧‧‧Second type semiconductor layer
214‧‧‧反射層 214‧‧‧reflective layer
215‧‧‧穿孔 215‧‧‧Perforation
22‧‧‧第一電極 22‧‧‧First electrode
23‧‧‧絕緣層 23‧‧‧Insulation
24‧‧‧延伸電極 24‧‧‧Extended electrode
25‧‧‧第二電極 25‧‧‧second electrode
31‧‧‧步驟 31‧‧‧Steps
32‧‧‧步驟 32‧‧‧Steps
33‧‧‧步驟 33‧‧‧Steps
34‧‧‧步驟 34‧‧‧Steps
35‧‧‧步驟 35‧‧‧Steps
36‧‧‧步驟 36‧‧‧Steps
41‧‧‧發光單元 41‧‧‧Lighting unit
411‧‧‧第一型半導體層 411‧‧‧First type semiconductor layer
411a‧‧‧第一區 411a‧‧‧First District
411b‧‧‧第二區 411b‧‧‧Second District
412‧‧‧多接面量子井層 412‧‧‧Multiple junction quantum well layers
413‧‧‧第二型半導體層 413‧‧‧Second type semiconductor layer
414‧‧‧反射層 414‧‧‧reflective layer
415‧‧‧分割槽 415‧‧‧ split slot
416‧‧‧第一穿孔 416‧‧‧First perforation
417‧‧‧第二穿孔 417‧‧‧Second perforation
42‧‧‧第一電極 42‧‧‧First electrode
43‧‧‧絕緣層 43‧‧‧Insulation
431‧‧‧第一絕緣膜 431‧‧‧First insulating film
432‧‧‧第二絕緣膜 432‧‧‧Second insulation film
44‧‧‧連接導線 44‧‧‧Connecting wires
45‧‧‧延伸電極單元 45‧‧‧Extended electrode unit
451‧‧‧第一延伸電極 451‧‧‧First extended electrode
452‧‧‧第二延伸電極 452‧‧‧Second extension electrode
46‧‧‧第二電極 46‧‧‧second electrode
51‧‧‧步驟 51‧‧‧Steps
52‧‧‧步驟 52‧‧‧Steps
53‧‧‧步驟 53‧‧‧Steps
54‧‧‧步驟 54‧‧‧Steps
55‧‧‧步驟 55‧‧‧Steps
56‧‧‧步驟 56‧‧‧Steps
本發明之其他的特徵及功效,將於參照圖式的 較佳實施例詳細說明中清楚地呈現,其中:圖1是一示意圖,說明習知發光二極體;圖2是一示意圖,說明習知發光二極體的另一態樣;圖3是一示意圖,說明本發明發光二極體的第一較佳實施例;圖4是一流程圖,說明本發明該第一較佳實施例的製作方法;圖5是一流程示意圖,輔助說明圖3;圖6是一俯視示意圖,說明該第一較佳實施例之第一電極的另一種分布態樣;圖7是一示意圖,說明本發明發光二極體的第二較佳實施例;圖8是一流程圖,說明本發明該第二較佳實施例的製作方法;圖9是一流程示意圖,輔助說明圖8。 Other features and effects of the present invention will be described with reference to the drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the detailed description, FIG. 1 is a schematic view showing a conventional light-emitting diode; FIG. 2 is a schematic view showing another aspect of a conventional light-emitting diode; FIG. 1 is a flow chart illustrating a first preferred embodiment of the present invention; FIG. 4 is a flow chart illustrating a method of fabricating the first preferred embodiment of the present invention; FIG. Figure 6 is a top plan view showing another distribution of the first electrode of the first preferred embodiment; Figure 7 is a schematic view showing a second preferred embodiment of the light-emitting diode of the present invention; A flow chart illustrating a method of fabricating the second preferred embodiment of the present invention; and FIG. 9 is a schematic flow diagram of FIG.
在本發明被詳細描述之前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。 Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same reference numerals.
參閱圖3,圖3為本發明發光二極體之第一較佳實施例,其為水平式發光二極體結構。 Referring to FIG. 3, FIG. 3 is a first preferred embodiment of a light-emitting diode according to the present invention, which is a horizontal light-emitting diode structure.
該發光二極體包含:一發光單元21、一第一電極22、一絕緣層23、一延伸電極24、及一第二電極25。 The light emitting diode comprises: a light emitting unit 21, a first electrode 22, an insulating layer 23, an extended electrode 24, and a second electrode 25.
該發光單元21具有一第一型半導體層211、一層多接面量子井層212、一層第二型半導體層213,及反 射層214。其中,該第一型半導體層211具有一個與該多接面量子井層212及第二型半導體層213間隔設置的穿孔215,其中,要說明的是,該第一、二型半導體層211、213是指經由不同離子摻雜而具有相反電性的半導體膜層,例如當該第一型半導體層211為n型摻雜,則該第二型半導體層213為p型摻雜;當該第一型半導體層211為p型摻雜,則該第二型半導體層213為n型摻雜,由於該發光單元的相關材料為本技術領域所知悉,且非為本發明之重點因此不再多加說明,於本實施例中是以該第一、二型半導體層211、213分別為n型摻雜及p型摻雜的氮化鎵為例作說明。 The light emitting unit 21 has a first type semiconductor layer 211, a multi-layer quantum well layer 212, a second type semiconductor layer 213, and a reverse Shot layer 214. The first type semiconductor layer 211 has a through hole 215 spaced apart from the multi-junction quantum well layer 212 and the second type semiconductor layer 213. The first and second type semiconductor layers 211, 213 refers to a semiconductor film layer having opposite electrical conductivity via different ion doping. For example, when the first type semiconductor layer 211 is n-type doped, the second type semiconductor layer 213 is p-type doped; The first type semiconductor layer 211 is p-type doped, and the second type semiconductor layer 213 is n-type doped. Since the related materials of the light-emitting unit are known in the art, and are not the focus of the present invention, no more is added. In the present embodiment, the first and second semiconductor layers 211 and 213 are respectively n-doped and p-doped gallium nitride as an example.
該第一電極22設置於該第一型半導體層211的表面,與該多接面量子井層212,及第二型半導體層213呈一間隙彼此間隔設置,並蓋覆該第一穿孔215位置。 The first electrode 22 is disposed on the surface of the first type semiconductor layer 211, and is spaced apart from the multi-junction quantum well layer 212 and the second type semiconductor layer 213 by a gap, and covers the first through hole 215 .
該絕緣層23覆蓋該發光單元21與該第一電極22的頂面;該絕緣層23的目的是用來隔離該第一電極42與其它導電材料之間不須要的電接觸,因此,只要是絕緣材料均可適用,例如光阻、環氧樹脂等。 The insulating layer 23 covers the top surface of the light emitting unit 21 and the first electrode 22; the purpose of the insulating layer 23 is to isolate unnecessary electrical contact between the first electrode 42 and other conductive materials, so Insulation materials can be applied, such as photoresist, epoxy resin and the like.
該延伸電極24,穿過該穿孔215與該第一電極22電連接。 The extension electrode 24 is electrically connected to the first electrode 22 through the through hole 215.
該第二電極25,與該發光單元21的頂面電連接。其中,該第一電極22、延伸電極24,及第二電極25的目的均是做為電傳導,因此,只要是可導電的材料,例如金屬、合金,或金屬氧化物均可,並無特別限制。當利用該 第一、二電極22、25提供電能至該發光單元21時,該發光單元21即可於接收電能後將其轉換成光能向外發出,且該第一型半導體層211的表面即為該發光二極體的出光面。 The second electrode 25 is electrically connected to a top surface of the light emitting unit 21. The purpose of the first electrode 22, the extension electrode 24, and the second electrode 25 is to conduct electricity. Therefore, as long as it is an electrically conductive material, such as a metal, an alloy, or a metal oxide, there is no special limit. When using this When the first and second electrodes 22 and 25 supply electric energy to the light emitting unit 21, the light emitting unit 21 can convert the light into the light energy after receiving the electrical energy, and the surface of the first type semiconductor layer 211 is the same. The light-emitting surface of the light-emitting diode.
本發明利用將該第一電極22形成於該發光單元21的出光面外,不會覆蓋發光區之量子井,因此,可解決習知頂電極132遮覆出光面的問題,有效提升該發光二極體的出光效率;而藉由形成於該第一型半導體層211的穿孔215,令該第一電極22可經由該延伸電極24的延伸而外露於該第一型半導體層211,因此,當後續欲利用該發光二極體進行覆晶封裝時,即可藉由外露之延伸電極24進行打線,而可解決習知發光二極體於覆晶封裝時電路對位不易的問題。 The present invention utilizes the first electrode 22 formed outside the light-emitting surface of the light-emitting unit 21 and does not cover the quantum well of the light-emitting region. Therefore, the problem that the conventional top electrode 132 covers the light-emitting surface can be solved, and the light-emitting surface can be effectively improved. The light-emitting efficiency of the polar body is formed by the via 215 formed in the first-type semiconductor layer 211, so that the first electrode 22 can be exposed to the first-type semiconductor layer 211 via the extension of the extension electrode 24, so When the flip-chip package is to be used for the flip chip package, the exposed extension electrode 24 can be used for wire bonding, thereby solving the problem that the conventional light-emitting diode is difficult to align the circuit during the flip chip package.
參閱圖4、5本發明該發光二極體之第一較佳實施例的製作方法包含以下6個步驟。 Referring to Figures 4 and 5, the manufacturing method of the first preferred embodiment of the light-emitting diode of the present invention comprises the following six steps.
步驟31,準備一個基材,該基材具有一個磊晶用的磊晶基板100及一發光單元21,該發光單元21具有一層與該磊晶基板100的表面連接的第一型半導體層211、一與該第一型半導體層211的部分表面連接的多接面量子井層212、一層與該多接面量子井層212表面連接的第二型半導體層213,及一層形成於該第二型半導體層213表面的反射層214。要說明的是,該發光單元21可以是先於該磊晶基板100的表面依序磊晶形成該第一型半導體層211、多接面量子井層212、第二型半導體層213,及反射層214後,再利用蝕刻方式移除部分形成於該第一型半 導體層211上的多接面量子井層212、第二型半導體層213,及反射層214,令該第一型半導體層211的部份表面露出,即而得到該發光單元21;或是先於該基板100的表面先依序磊晶形成該第一型半導體層211、多接面量子井層212,及第二型半導體層213,之後利用蝕刻方式移除部分形成於該第一型半導體層211上的多接面量子井層212,及第二型半導體層213,令該第一型半導體層211的部份表面露出,再於該第二型半導體層213表面形成該反射層214,而得到該發光單元21。由於該發光單元21的製作及相關材料選擇為本技術領域所周知因此不再多加贅述。 Step 31, preparing a substrate having an epitaxial substrate 100 for epitaxy and a light emitting unit 21 having a first type semiconductor layer 211 connected to a surface of the epitaxial substrate 100, a multi-junction quantum well layer 212 connected to a portion of the surface of the first type semiconductor layer 211, a second type semiconductor layer 213 connected to the surface of the multi-junction quantum well layer 212, and a layer formed on the second type A reflective layer 214 on the surface of the semiconductor layer 213. It should be noted that the light emitting unit 21 may be formed by sequentially epitaxially forming the first type semiconductor layer 211, the multi-junction quantum well layer 212, the second type semiconductor layer 213, and the reflection before the surface of the epitaxial substrate 100. After the layer 214, an etch-removed portion is formed on the first half a plurality of junction quantum well layers 212, a second type semiconductor layer 213, and a reflective layer 214 on the conductor layer 211, such that a portion of the surface of the first type semiconductor layer 211 is exposed, that is, the light emitting unit 21 is obtained; or The first type semiconductor layer 211, the multi-junction quantum well layer 212, and the second type semiconductor layer 213 are sequentially epitaxially formed on the surface of the substrate 100, and then the etch-removed portion is formed on the first type semiconductor. a plurality of junction quantum well layers 212 on the layer 211, and a second type semiconductor layer 213, a portion of the surface of the first type semiconductor layer 211 is exposed, and the reflective layer 214 is formed on the surface of the second type semiconductor layer 213. The light-emitting unit 21 is obtained. Since the fabrication of the illumination unit 21 and the selection of related materials are well known in the art, no further details are provided.
步驟32,於該第一型半導體層211的表面沉積形成一個與該多接面量子井層212、第二型半導體層213,及該反射層214成一間隙彼此間隔的第一電極22。要說明的是,該第一電極22的目的是做為電傳導用,因此選自可導電的材料,例如金屬、合金,或金屬氧化物等即可,並無特別限制,較佳地,為了考量後續封裝的平整及穩定性,該第一電極22的高度與該反射層214的水平高度實質相當。 In step 32, a first electrode 22 is formed on the surface of the first type semiconductor layer 211 to form a gap with the multi-junction quantum well layer 212, the second type semiconductor layer 213, and the reflective layer 214. It is to be noted that the purpose of the first electrode 22 is to be used for electrical conduction, and therefore it is selected from electrically conductive materials such as metals, alloys, or metal oxides, and is not particularly limited. Preferably, Considering the flatness and stability of the subsequent package, the height of the first electrode 22 is substantially equivalent to the level of the reflective layer 214.
步驟33,以塗佈方式於該第一電極22的表面形成一絕緣層23,該絕緣層23的目的是用來隔離該第一電極22與其它導電材料、或是與該第一型半導體層211及多接面量子井層212之間不須要的電接觸,因此,只要是絕緣材料均可適用,而為了後續製程的需求,較佳地,該絕緣 層23為包覆該第一電極22裸露的表面並填滿該間隙。 Step 33, forming an insulating layer 23 on the surface of the first electrode 22 by coating, the purpose of the insulating layer 23 is to isolate the first electrode 22 from other conductive materials or the first type semiconductor layer The electrical contact between the 211 and the multi-junction quantum well layer 212 is not required, and therefore, as long as it is an insulating material, for the subsequent process requirements, preferably, the insulation Layer 23 covers the exposed surface of the first electrode 22 and fills the gap.
步驟34,形成一層與該發光單元21的頂面電連接的第二電極25。詳細的說,該步驟34可以是先在該發光單元21、及該絕緣層23的頂面形成一層晶種層後,再以電鍍增厚方式於該晶種層上形成一層金屬層,而得到該第二電極25;或也可以利用晶圓鍵結(wafer bonding)方式,先在該發光單元21、及該絕緣層23的頂面形成一層晶種層後,再將一導電基板貼合於該晶種層上,而得到該第二電極25。 In step 34, a second electrode 25 electrically connected to the top surface of the light emitting unit 21 is formed. In detail, the step 34 may be that a layer of a seed layer is formed on the top surface of the light-emitting unit 21 and the insulating layer 23, and then a metal layer is formed on the seed layer by electroplating thickening. The second electrode 25; or a wafer bonding method, after forming a seed layer on the top surface of the light-emitting unit 21 and the insulating layer 23, and then bonding a conductive substrate to the conductive substrate The second electrode 25 is obtained on the seed layer.
步驟35,移除該磊晶基板100。該步驟35可以利用雷射剝離移除(laser lift off)、化學蝕刻、或是機械研磨方式將該磊晶基板100移除,令該第一型半導體層211與該磊晶基板100連接的表面裸露出。 In step 35, the epitaxial substrate 100 is removed. The step 35 can remove the epitaxial substrate 100 by laser lift off, chemical etching, or mechanical polishing, and connect the surface of the first type semiconductor layer 211 to the epitaxial substrate 100. Bare exposed.
步驟36,以蝕刻方式自該第一型半導體層211遠離該發光單元21的表面朝向對應該第一電極22的位置形成一個貫穿該第一型半導體層的穿孔215,再利用沉積方式形成一與該第一電極22電連接,並經由該穿孔215向外延伸的延伸電極24,即可製得本發明該發光二極體。 Step 36, forming a through hole 215 penetrating the first type semiconductor layer from the surface of the first type semiconductor layer 211 away from the light emitting unit 21 toward the position corresponding to the first electrode 22 by etching, and forming a The light-emitting diode of the present invention can be obtained by electrically connecting the first electrode 22 and extending the electrode 24 extending outward through the through hole 215.
此外,參閱圖6,圖6為自該發光二極體的頂面俯視的示意圖,該發光二極體也可具有多個第一電極22,該等第一電極22可以是環繞該發光單元21設置,且不會遮覆發光區之量子井,藉由該等第一電極22可增加該發光二極體對外的電連接點,而增加對外電連接的便利性。 In addition, referring to FIG. 6 , FIG. 6 is a schematic view of a top surface of the light emitting diode. The light emitting diode may also have a plurality of first electrodes 22 , and the first electrodes 22 may surround the light emitting unit 21 . The quantum wells are disposed so as not to cover the light-emitting area. The first electrodes 22 can increase the external electrical connection points of the light-emitting diodes, thereby increasing the convenience of external electrical connection.
利用將該第一電極22製作於該發光單元21的出 光面之外,並利用形成於該第一型半導體層211的2穿孔215,令該第一電極22可經由該延伸電極24而外露於該第一型半導體層211,因此,不僅可解決習知電極遮光的問題,且當欲利用該發光二極體進行覆晶封裝時,即可藉由外露之延伸電極24進行打線,還可進一步解決習知發光二極體於覆晶封裝時打線不易的問題。 The first electrode 22 is formed on the light emitting unit 21 The first electrode 22 can be exposed to the first type semiconductor layer 211 via the extension electrode 24, and the second electrode 211 is formed on the first semiconductor layer 211. Knowing the problem of shading of the electrode, and when the flip-chip package is to be used for the flip-chip package, the exposed extension electrode 24 can be used for wire bonding, and the conventional light-emitting diode can be further solved in the case of flip-chip packaging. The problem.
參閱圖7,圖7為本發明發光二極體之第二較佳實施例,其為垂直式發光二極體結構。 Referring to FIG. 7, FIG. 7 is a second preferred embodiment of a light-emitting diode according to the present invention, which is a vertical light-emitting diode structure.
該發光二極體包含:一發光單元41、一第一電極42、一絕緣層43、一連接導線44、一延伸電極單元45,及一第二電極46。 The light emitting diode comprises: a light emitting unit 41, a first electrode 42, an insulating layer 43, a connecting wire 44, an extending electrode unit 45, and a second electrode 46.
該發光單元41具有一第一型半導體層411、一層多接面量子井層412、一層第二型半導體層413,及一反射層414。其中,該第一型半導體層411具有一分割槽415,及藉由該分割槽415彼此隔離的一第一區411a及一第二區411b;該第一區411a具有一個遠離該分割槽415的第一穿孔416,且該第二區411b具有一鄰近該分割槽415的第二穿孔417,該多接面量子井層412形成於該第一區411a鄰近該分割槽415的表面,且該第二型半導體層413形成於該多接面量子井層412表面。其中,該第一、二型半導體層411、413與該第一較佳實施例相同,因此不再多加說明。 The light emitting unit 41 has a first type semiconductor layer 411, a multi-layer quantum well layer 412, a second type semiconductor layer 413, and a reflective layer 414. The first type semiconductor layer 411 has a dividing groove 415, and a first area 411a and a second area 411b separated from each other by the dividing groove 415; the first area 411a has a distance away from the dividing groove 415. a first via 416, and the second region 411b has a second via 417 adjacent to the dividing trench 415. The multi-junction quantum well layer 412 is formed on the surface of the first region 411a adjacent to the dividing trench 415, and the first region A two-type semiconductor layer 413 is formed on the surface of the multi-junction quantum well layer 412. The first and second semiconductor layers 411 and 413 are the same as the first preferred embodiment, and therefore will not be further described.
該第一電極42設置於該第一區411a的表面,與該多接面量子井層412,及第二型半導體層413呈一間隙 彼此間隔設置,並蓋覆該第一區411a的第一穿孔416位置。 The first electrode 42 is disposed on the surface of the first region 411a, and has a gap with the multi-junction quantum well layer 412 and the second-type semiconductor layer 413. They are spaced apart from each other and cover the position of the first perforations 416 of the first zone 411a.
該絕緣層43具有一包覆該多接面量子井層412,及第二型半導體層413鄰近該分割槽415的側面的第一絕緣膜431,及一包覆該第一電極42的表面的第二絕緣膜432,該絕緣層43的目的是用來隔離該第一電極42與其它導電材料、或是該連接導線44與該第一型半導體層411及多接面量子井層412之間不必要的電接觸,因此,只要是絕緣材料均可適用,例如光阻、環氧樹脂等。 The insulating layer 43 has a first insulating film 431 covering the multi-junction quantum well layer 412, and a side surface of the second-type semiconductor layer 413 adjacent to the dividing trench 415, and a surface covering the first electrode 42. The second insulating film 432 is used to isolate the first electrode 42 from other conductive materials or between the connecting wires 44 and the first type semiconductor layer 411 and the multi-junction quantum well layer 412. Unnecessary electrical contact, therefore, as long as it is an insulating material, such as photoresist, epoxy resin, etc.
該連接導線44自該發光單元41的頂面沿該第一絕緣膜431的表面延伸至該第二區411b,並覆蓋該第二區411b的第二穿孔417位置。 The connecting wire 44 extends from the top surface of the light emitting unit 41 along the surface of the first insulating film 431 to the second region 411b and covers the second through hole 417 of the second region 411b.
該延伸電極單元45具有一穿過該第一穿孔416與該第一電極42電連接的第一延伸電極451,及一穿過該第二穿孔417與該連接導線44電連接的第二延伸電極452。 The extension electrode unit 45 has a first extension electrode 451 electrically connected to the first electrode 42 through the first through hole 416, and a second extension electrode electrically connected to the connection wire 44 through the second through hole 417. 452.
該第二電極46形成於該發光單元41的頂面並與該發光單元41及該連接導線44電連接。當利用該第一、二電極42、46提供電能至該發光單元41時,該發光單元41即可於接收電能後將其轉換成光能向外發出,且該第一型半導體層411的第一區411a即為該發光二極體的出光面。 The second electrode 46 is formed on the top surface of the light emitting unit 41 and is electrically connected to the light emitting unit 41 and the connecting wire 44. When the first and second electrodes 42 and 46 are used to supply electric energy to the light emitting unit 41, the light emitting unit 41 can convert the light into a light energy after receiving the electrical energy, and the first semiconductor layer 411 is A zone 411a is the light exiting surface of the light emitting diode.
本發明利用將該第一電極42製作於該發光單元41的出光面之外,不會遮蔽發光區之量子井區域,因此,可解決習知LED結構頂電極遮光的問題;並藉由形成於該 第一型半導體層411的第一、二穿孔416、417,令該第一、二電極42、46可分別經由該第一二延伸電極451、452的延伸而外露於該第一型半導體層411,因此,當利用本發明該發光二極體進行覆晶封裝時,可藉由外露之第一、二延伸電極451、452進行打線,而可解決習知發光二極體於覆晶封裝時電路對位不易的問題。 The first electrode 42 is formed outside the light-emitting surface of the light-emitting unit 41, and does not block the quantum well region of the light-emitting region. Therefore, the problem of the light-shielding of the top electrode of the conventional LED structure can be solved; The The first and second vias 416 and 417 of the first type semiconductor layer 411 are exposed to the first type semiconductor layer 411 via the extension of the first and second electrodes 451 and 452, respectively. Therefore, when the flip-chip package is performed by using the light-emitting diode of the present invention, the exposed first and second extension electrodes 451 and 452 can be used for wire bonding, thereby solving the circuit of the conventional light-emitting diode in flip chip packaging. The problem of difficulty in alignment.
參閱圖8、圖9,茲將本發明該第二較佳實施例的製作方法說明如下。 Referring to Figures 8 and 9, the manufacturing method of the second preferred embodiment of the present invention will be described below.
本發明該發光二極體之第二較佳實施例的製作方法包含以下6個步驟。 The manufacturing method of the second preferred embodiment of the light-emitting diode of the present invention comprises the following six steps.
步驟51,準備一個基材,該基材具有一個磊晶用的磊晶基板100及一發光單元41,該發光單元41具有一層與該磊晶基板100的表面連接的第一型半導體層411、一與該第一型半導體層411的部分表面連接的多接面量子井層412、一層與該多接面量子井層412表面連接的第二型半導體層413,及一層形成於該第二型半導體層413表面的反射層414。由於該發光單元41的製作方式與該第一較佳實施例相同,因此不再多加贅述。 Step 51, preparing a substrate having an epitaxial substrate 100 for epitaxy and a light emitting unit 41 having a first type semiconductor layer 411 connected to a surface of the epitaxial substrate 100, a multi-junction quantum well layer 412 connected to a portion of the surface of the first type semiconductor layer 411, a second type semiconductor layer 413 connected to the surface of the multi-junction quantum well layer 412, and a layer formed on the second type A reflective layer 414 on the surface of the semiconductor layer 413. Since the manufacturing method of the light emitting unit 41 is the same as that of the first preferred embodiment, no further details are provided.
步驟52,於該第一型半導體層411的表面沉積形成一個與該多接面量子井層412、第二型半導體層413,及該反射層414呈一間隙彼此間隔的第一電極42。要說明的是,該第一電極42是做為電傳導用,因此選自可導電的材料,例如金屬、合金,或金屬氧化物即可,並無特別限制;較佳地,為了考量後續封裝的平整及穩定性,該第 一電極42的高度與該反射層414的水平高度相當實質。 Step 52, depositing a first electrode 42 on the surface of the first type semiconductor layer 411 to form a gap with the multi-junction quantum well layer 412, the second type semiconductor layer 413, and the reflective layer 414. It should be noted that the first electrode 42 is used for electrical conduction, and thus is selected from a conductive material such as a metal, an alloy, or a metal oxide, and is not particularly limited; preferably, in order to consider the subsequent package Leveling and stability, the first The height of one of the electrodes 42 is substantially equivalent to the level of the reflective layer 414.
步驟53,以塗佈方式於該多接面量子井層412、第二型半導體層413,及該414反射層遠離該第一電極42的側面形成一第一絕緣膜431,並於該第一電極42的表面形成一第二絕緣膜432。要說明的是,該第一、二絕緣膜431、432的目的是用來隔離該第一電極42與其它導電材料、或是該連接導線44與該第一型半導體層411及多接面量子井層412之間不須要的電接觸,因此,只要是絕緣材料均可適用,而為了後續製程的需求,較佳地,該第二絕緣膜432為包覆該第一電極42裸露的表面並填滿該間隙,且該第一、二絕緣膜431、432的高度實質會在同一水平位置。 Step 53: forming a first insulating film 431 on the multi-junction quantum well layer 412, the second-type semiconductor layer 413, and the side surface of the 414-reflecting layer away from the first electrode 42 by coating, and in the first A second insulating film 432 is formed on the surface of the electrode 42. It is to be noted that the first and second insulating films 431 and 432 are used for isolating the first electrode 42 from other conductive materials, or the connecting wires 44 and the first type semiconductor layer 411 and the multi-junction quantum. The electrical contact between the well layers 412 is not required. Therefore, as long as it is an insulating material, the second insulating film 432 preferably covers the exposed surface of the first electrode 42 for the subsequent process. The gap is filled, and the heights of the first and second insulating films 431, 432 are substantially at the same horizontal position.
步驟54,形成一層與該發光單元41的頂面電連接的第二電極46。詳細的說,該步驟54是先在該發光單元41、及該第一、二絕緣膜431、432的頂面形成一層晶種層後,再以電鍍增厚方式於該晶種層上形成一層金屬層,而得到該第二電極46;或也可以利用晶圓鍵結(wafer bonding)方式,先在該發光單元41、及該絕緣層43的頂面形成一層晶種層後,再將一導電基板貼合於該晶種層上,而得到該第二電極46,由於利用電鍍或是晶圓鍵結方式為本技術領域常用之技術手段,因此不再多加說明。 In step 54, a second electrode 46 electrically connected to the top surface of the light emitting unit 41 is formed. Specifically, in the step 54, a seed layer is formed on the top surface of the light-emitting unit 41 and the first and second insulating films 431 and 432, and then a layer is formed on the seed layer by electroplating thickening. The metal layer is used to obtain the second electrode 46; or a wafer bonding method may be used to form a seed layer on the top surface of the light-emitting unit 41 and the insulating layer 43 and then The conductive substrate is bonded to the seed layer to obtain the second electrode 46. Since the plating or wafer bonding method is a technical means commonly used in the technical field, it will not be further explained.
步驟55,移除該磊晶基板100。該步驟55可以利用雷射剝離移除(laser lift off)、化學蝕刻、或是機械研磨方式將該磊晶基板100移除,而令該第一型半導體層 411與該磊晶基板100連接的表面裸露出。 In step 55, the epitaxial substrate 100 is removed. The step 55 can remove the epitaxial substrate 100 by laser lift off, chemical etching, or mechanical polishing, and the first type semiconductor layer is removed. The surface of the 411 connected to the epitaxial substrate 100 is exposed.
接著進行步驟56,以蝕刻方式自該第一型半導體層411遠離該發光單元41的表面朝向對應該第一絕緣膜431的位置形成一分割槽415,並於對應該第一電極42與該連接導線44的位置分別形成一個貫穿該第一型半導體層的第一、二穿孔416、417,再利用沉積方式分別形成與該第一電極42及連接導線44電連接,並經由該第一、二穿孔416、417向外延伸的一第一延伸電極451及一第二延伸電極452,即可製得該本發明該發光二極體。 Then, in step 56, a dividing groove 415 is formed in an etching manner from a surface of the first type semiconductor layer 411 away from the surface of the light emitting unit 41 toward the first insulating film 431, and corresponds to the first electrode 42 and the connection. The positions of the wires 44 respectively form a first and second through holes 416 and 417 penetrating the first type semiconductor layer, and are electrically connected to the first electrode 42 and the connecting wire 44 by using a deposition method, respectively, and through the first and second The light-emitting diode of the present invention can be obtained by a first extension electrode 451 and a second extension electrode 452 extending outwardly from the through holes 416 and 417.
此外,要說明的是,該發光二極體也可具有多個第一電極42,該等第一電極42是環繞該發光單元21設置,不會遮蔽發光區之量子井,藉由該等第一電極42可增加該發光二極體對外的電連接點,更易於後續打線連接,增加對外電連接的便利性。 In addition, it should be noted that the light emitting diode may also have a plurality of first electrodes 42 which are quantum wells disposed around the light emitting unit 21 and do not block the light emitting region. An electrode 42 can increase the external electrical connection point of the LED, and is easier for subsequent wire bonding to increase the convenience of external electrical connection.
綜上所述,本發明利用將該第一電極22、42製作於該發光單元21的出光面外,並事先製作出一形成於該第一型半導體層211、411裸露之表面的延伸電極24、45,製得無電極遮光的發光二極體,因此,可解決習知LED頂電極132遮覆出光面的問題,而可有效提升該發光二極體的出光效率;此外,當後續欲利用本發明該無電極遮光的發光二極體進行覆晶封裝時,還可藉由外露之延伸電極24、45進行打線,而可解決習知發光二極體於覆晶封裝時對位不易的問題,惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本 發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 In summary, the present invention utilizes the first electrodes 22 and 42 to be formed outside the light-emitting surface of the light-emitting unit 21, and previously forms an extended electrode 24 formed on the exposed surface of the first-type semiconductor layers 211 and 411. 45, the light-emitting diode of the electrodeless light-shielding is obtained, so that the problem that the conventional LED top electrode 132 covers the light-emitting surface can be solved, and the light-emitting efficiency of the light-emitting diode can be effectively improved; When the electrodeless light-shielding light-emitting diode of the present invention is subjected to flip-chip packaging, the exposed extension electrodes 24 and 45 can be used for wire bonding, thereby solving the problem that the conventional light-emitting diode is difficult to align in the flip chip package. However, the above is only the preferred embodiment of the present invention, and the scope of the present invention cannot be limited thereto. The simple equivalent changes and modifications made by the scope of the invention and the content of the patent specification are still within the scope of the invention.
21‧‧‧發光單元 21‧‧‧Lighting unit
211‧‧‧第一型半導體層 211‧‧‧First type semiconductor layer
212‧‧‧多接面量子井層 212‧‧‧Multiple junction quantum well layers
213‧‧‧第二型半導體層 213‧‧‧Second type semiconductor layer
214‧‧‧反射層 214‧‧‧reflective layer
215‧‧‧穿孔 215‧‧‧Perforation
22‧‧‧第一電極 22‧‧‧First electrode
23‧‧‧絕緣層 23‧‧‧Insulation
24‧‧‧延伸電極 24‧‧‧Extended electrode
25‧‧‧第二電極 25‧‧‧second electrode
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