TWI519791B - Method of scanning sample for atom force microscope system and method of determining boundary point and device thereof - Google Patents

Description

Method and device for scanning samples for an optical assisted atomic force microscope system

The present invention relates to a scanning device and a scanning method thereof, and more particularly to a device for scanning a sample and a method of scanning the same.

The Atom Force Microscope (AFM) is a very practical measuring instrument that can be used to create a three-dimensional surface profile of a conductor or non-conductor sample with a resolution of nanometer resolution.

Please refer to the first figure, which is a conventional AFM system 10. A conventional AFM system includes a scanning platform 109, a detector 104, a laser source device 105, an optical sensor 106, an xy axis controller 107, and a z-axis controller 108. The scanning platform 109 includes an xy axis platform 101 and a z-axis platform 102. The detector 104 includes a cantilever 1041 and a probe 1042. The sample 103 to be scanned is placed on the scanning platform 109 by the detector 104. The xy axis controller 107 can be controlled by setting a scan trajectory to control the trajectory of the xy axis of the xy axis platform 101 during scanning, and the detector 104 can be moved according to the set scan trajectory during scanning. The platform 101 remains stationary or the xy-axis platform 101 is moved in accordance with the set scan trajectory while the detector 104 remains stationary. The detector 104 and the scanning platform 109 can be scanned in a contact or non-contact manner, and the probe 1042 of the detector 104 typically includes a piezoelectric element (not shown) when the non-contact side is used. When scanning the sample 103, due to the interaction between the detector 104 and the sample 103, the cantilever 1041 of the detector 104 will oscillate in the z-axis direction. Generally, the biological sample is not expected to be damaged, so it will be used as much as possible. Non-contact way to scan. Scanning in a non-contact manner can set a specific distance between the probe 1042 and the sample, but in this way, when the surface of the sample 103 is undulating, the probe 1042 or the sample 103 may be easily damaged. Therefore, in addition to setting the coordinates of the z-axis platform 102, the z-axis controller 108 controls the z-axis platform 102 according to the set feedback information FB2 to maintain the z-axis direction between the probe 1042 and the sample 103. The distance, in general, the distance between the probe 1042 and the sample 103 is typically about tens of nanometers.

In the first figure, the xy-axis controller 107 can control the movement trajectory of the xy-axis stage 101 on the horizontal plane of the xy-axis according to the set scan trajectory and the feedback information FB1. Please refer to the second figure (a) and (b). The second figure (a) is a schematic diagram of the barrier scanning track on the horizontal plane of the xy axis, the second figure (b) is a schematic diagram of the triangular wave scanning track, and P represents the fence spacing. , A1 represents the scanning amplitude on the horizontal plane of the xy axis, and T1 represents the scanning period on the horizontal plane of the xy axis. Conventionally, the scanning trajectory of the AFM on the horizontal plane of the xy axis is scanned using a non-smooth scanning trajectory such as a triangular wave type or a fence type. The unsmooth scanning trajectory easily causes the mechanical resonance frequency in the horizontal direction to become large, which will make The scanned AFM image is distorted. In order to avoid the above problem, the scanning rate must be lowered when scanning the sample 103.

In addition, the barrier scanning trajectory in the second diagram (a) passes through the sample 103 and the sample 110. When the two samples 103, 110 are far apart, the unnecessary scanning trajectory causes a waste of scanning time. The triangular wave scanning trajectory in the second figure (b) passes through the sample 111 and covers all areas of the sample 111. The scanning trajectory of the area outside the sample 111 is also superfluous, which also causes waste of scanning time.

In view of this, the present invention proposes a new method for scanning samples, which can eliminate unnecessary scanning trajectories, save scanning time and speed up scanning. The invention first uses an optical microscope to assist in the scanning of the AFM. Before the AFM scans the sample in detail, the optical microscope first collects the position information of the sample on the scanning platform to plan the path scan between the samples, and collects each single. Information on the range of samples to determine the scan start point and scan end point for each sample. After the scan path between the samples is drawn, each sample is further scanned. Prior to scanning, the details of the shape of the sample are not known. When further scanning for each sample, the scan center trajectory and amplitude can be adaptively changed according to the shape of the actually detected sample, which saves unnecessary The scanning trajectory improves the efficiency of scanning.

In accordance with the above concept, the present invention provides a scanning method for an optically assisted atomic force microscope system, the optical assisted atomic force microscope comprising a scanning platform and a detector, the method comprising the steps of: providing a first Ben and a second sample. Determining a first scan area of the first sample and a second scan area of the second sample, the first scan area having a first scan start point and a first scan end point, the second scan area There is a second scan start point and a second scan end point. Moving the detector to the first scan start point, or moving the scan platform to cause the first scan start point to reach a vertical projection position of the detector to scan the first sample, wherein the first sample The distance from the start of the scan to the detector is less than or equal to the distance from the second scan start point to the detector, and the detector is at a first distance from the first scan start point, and the first distance is The shortest distance between the detector and the first scanning area. After scanning the first sample, moving the detector from the first scanning end point to the second scanning starting point, or moving the scanning platform to make the second scanning The starting point reaches a vertical projection position of the detector to scan the second sample, wherein the first scanning end point is at a second distance from the second scanning starting point, and the second distance is the first scanning The shortest distance between the end point and the second scan area.

In accordance with the above concept, the present invention provides a scanning device comprising a scanning platform, an optical auxiliary microscope, and a detector. The scanning platform carries a first sample and a second sample. The optical auxiliary microscope collects information of a detection point, a first area of the first sample, and a second area of the second sample, wherein the first area has a first scan start point and a first At the scan end point, the second area has a second scan start point and a second scan end point. Moving the probe from the detection point to the first scan start point or moving the scan platform to cause the first scan start point to reach the probe point to scan the first sample, wherein the probe point is to the a first distance from the first scanning start point is a shortest distance between the detection point and the first area, and after scanning the first sample, the detector moves from the first scanning end point to the first Scanning the scanning platform or moving the scanning platform to cause the second scanning starting point to reach the detecting point to scan the second sample, wherein the first scanning end point to the second scanning starting point The two distances are the shortest distance between the first scanning end point and the second area.

According to the above concept, the present invention provides a scanning method for determining a boundary point, the method comprising the steps of: determining a first scanning track, the first scanning track comprising a first sampling point and a second sampling point. A first x-axis coordinate of the first sampling point and a first z-axis coordinate, and a second x-axis coordinate and a second z-axis coordinate of the second sampling point are captured. When the absolute value of the first slope is greater than or equal to a threshold, it is determined that a first boundary point on the first scan track exists between the first sampling point and the second sampling point.

According to the above concept, the present invention proposes a method of scanning the same, the method The method includes the steps of: scanning a first region of the sample with a first chord trajectory. A first region parameter is obtained by scanning the relationship between the actual path of the first region and the sample from the first sine wave trajectory. A second chord trajectory of one of the second regions of the sample is predicted by the first region parameter prediction. The second region is scanned with the second chord trajectory.

In accordance with the above teachings, the present invention provides a scanning device in which the sample contains N regions, the device comprising a detector, a controller, and a processing unit. The controller controls the detector to scan the N regions respectively with N chord trajectories, and obtain N-1 region parameters corresponding to a first region of the N regions respectively. The processing unit is electrically connected to the controller, and respectively determines N-1 sine wave trajectories according to the N-1 regional parameters to respectively scan the N-1 regions of the sample after the second region.

10‧‧‧Used AFM system

101‧‧‧xy axis platform

102‧‧‧z axis platform

103,110,111,25,27,29‧‧‧ samples

104‧‧‧ detector

1041‧‧‧cantilever

105‧‧‧Laser source device

1042‧‧‧Probe

106‧‧‧ Optical Sensor

107‧‧‧xy axis controller

108‧‧‧z axis controller

109, 21‧‧‧ scan platform

20‧‧‧AFM system of the invention

22‧‧‧Measurement system

23‧‧‧ Platform Control System

24‧‧‧Processing unit

211‧‧‧xy plane electromagnetic scanning platform

212‧‧‧xy plane piezoelectric scanning platform

213‧‧‧z-axis piezoelectric scanning platform

221‧‧‧Measurement unit

222‧‧‧Adjustment unit

231,232,233‧‧‧ platform controller

204‧‧‧Laser Interferometer

205‧‧‧ pressure gauge

203‧‧‧Detection Control Unit

206‧‧‧Lock control unit

201‧‧‧Optical auxiliary microscope

P‧‧‧Fence spacing

P1‧‧‧ first central point

P2‧‧‧ second central point

P3‧‧‧ third central point

D1‧‧‧first distance

26‧‧‧First area

D2‧‧‧Second distance

28‧‧‧Second area

260‧‧‧First rectangular scanning area

261‧‧‧ first edge

280‧‧‧Second rectangular scanning area

262‧‧‧ second edge

263‧‧‧ third edge

264‧‧‧ fourth edge

281‧‧‧ fifth edge

282‧‧‧ sixth edge

283‧‧‧ seventh edge

284‧‧‧ eighth edge

260W‧‧‧first rectangular width

280W‧‧‧second rectangular width

260L‧‧‧first rectangular length

280L‧‧‧second rectangular length

P1X1‧‧‧ first midpoint

P1Y1‧‧‧ first scan starting point

P1X1‧‧‧second scan starting point

P1Y2‧‧‧First scan end point

P2X2‧‧‧ second scan end point

31‧‧‧First scan track

33‧‧‧Second scan track

34‧‧‧ Third scan track

35‧‧‧ Fourth scan track

X1‧‧‧ first sampling point

X2‧‧‧Second sampling point

X3‧‧‧ third sampling point

X4‧‧‧ fourth sampling point

PB1‧‧‧ first boundary point

PB2‧‧‧ second boundary point

PB3‧‧‧ third boundary point

PB4‧‧‧ fourth boundary point

32‧‧‧z-axis scan track

PBC1‧‧‧ first central point

Sin1‧‧‧first chord trajectory

PBC2‧‧‧ second central point

Sin2‧‧‧Second chord trajectory

Pth1‧‧‧ first central path

Pth3‧‧‧ third central path

Pth2‧‧‧Second Central Path

Reg1‧‧‧ first area

Reg2‧‧‧Second area

End point of PT1‧‧‧ first chord trajectory

End point of PT2‧‧‧ second chord trajectory

OFS1‧‧‧ offset value

36, 37‧‧‧ scan track

Amp1‧‧‧ first amplitude

Amp2‧‧‧ second amplitude

First picture: A conventional AFM system.

Figure 2 (a): Schematic diagram of a fence-type scanning trajectory on the horizontal plane of the xy axis.

Figure 2 (b): Schematic diagram of the triangular wave scanning trajectory.

Third Figure: Schematic representation of the AFM system of the present invention.

Fourth Diagram (a): Schematic diagram of the scan path specification of the first preferred embodiment of the present invention.

Fourth Diagram (b): Schematic diagram of the scan path specification of the first preferred embodiment of the present invention.

Fifth Figure: A scanning method for an optically assisted AFM system in accordance with a first preferred embodiment of the present invention.

Figure 6: Schematic diagram of the boundary points of the detected samples.

Seventh Embodiment: A schematic diagram of a scanning method for determining a boundary point in a second preferred embodiment of the present invention.

Eighth: Schematic diagram of predicting a scan path and a scan amplitude in accordance with a third preferred embodiment of the present invention.

Figure 9 is a schematic view showing a method of scanning the same according to a third preferred embodiment of the present invention.

Please refer to the third figure, which is a schematic diagram of the AFM system 20 of the present invention. The AFM system 20 of the present invention comprises a scanning platform 21, a measuring system 22, a platform control system 23, a processing unit 24, an optical auxiliary microscope 201, a detector 202, a detection control unit 203, and a laser interferometer 204. A pressure gauge 205 and a lock control unit 206. The detector 202 includes a cantilever 2021 and a probe 2022. The lock control unit 206 is, for example, an amplifier that receives the feedback information FB6 of the measurement system 22 on the z-axis of the detector 202 to maintain the distance between the sample 25 and the probe 2022, and the detection control unit 203 can control the detection. The movement of the device returns the status of the detector 202 to the lock control unit 206. The scanning platform 21 includes an xy plane electromagnetic scanning platform 211, an xy plane piezoelectric scanning platform 212, and a z-axis piezoelectric scanning platform 213. The platform control system 23 includes a platform controller 231, 232, 233 for controlling the xy plane electromagnetic scanning platform 211, the xy plane piezoelectric scanning platform 212, and the z-axis piezoelectric scanning platform 213, respectively, for controlling the xy axis of the scanning platform 21. The movement direction of the plane direction and the z-axis direction. The measuring unit 221 is configured to measure the coordinate positions of the x-axis, the y-axis, and the z-axis of the detector 202, and the adjusting unit 222 can correct the measuring unit 221.

In the third figure, the processing unit 24 transmits control information Info3 to the platform controller 233 according to the reference amplitude information 241 and the feedback information FB4. The platform controller 233 receives the control information Info3 and issues a control signal CTRL3 to control the Z-axis piezoelectric scanning platform 213. The processing unit 24 transmits the control information Info2 to the platform controller 232 according to the sine wave trajectory information 242 and the feedback information FB3. The platform controller 232 receives the control information Info2 and sends a control signal CTRL2 to control the xy plane piezoelectric scan. Platform 212. The processing unit 24 according to the reference trajectory information 241 and the feedback information FB5 are sent to the control information Info1 to the platform controller 231. The platform controller 231 receives the control information Info1 and issues a control signal CTRL1 to control the xy plane electromagnetic scanning platform 211. The reference amplitude information 243 is related to the oscillation amplitude of the sample 25 in the z-axis direction, and the chord trajectory information 242 and the reference trajectory information 241 are trajectory information related to the sample 25 on the xy plane. The laser interferometer 204 and the pressure gauge 205 respectively generate feedback information FB5, FB3 in response to the feedback information FB7, FB8.

The first preferred embodiment of the present invention plans the scanning path of a plurality of samples 25, 27, 29 on the scanning platform 21 by the optical auxiliary microscope 201. Please refer to the fourth figures (a) and (b), which are schematic diagrams of the scanning path specification of the first preferred embodiment of the present invention. A first sample 25, a second sample 27, and a third sample 29 are included on the scanning platform 21. The first sample 25 and the second sample 27 have a first region 26 and a second region 28, respectively. The scanning platform 21 carries a first sample 25, a second sample 27, and a third sample 29, the optical auxiliary microscope 201 collecting a detection point PP, a first region 26 of the first sample 25, and the second sample The information of the second region 28 of 27, such as the coordinates of a first center point P1 of the first sample 25, the coordinates of a second center point P2 of the second sample 27, and the smallest first covering the first sample 25 The information of the area 26 and the information of the smallest second area 28 covering the second sample 27, and the position of the detection point PP is located at the intersection of the vertical projection of the detector 202 and the scanning platform 21, wherein the first The area 26 has a first scan start point P1Y1 and a first scan end point P1Y2, and the second area 28 has a second scan start point P2X1 and a second scan end point P2X2. The detector 202 moves from the probe point PP to the first scan start point P1Y1 or moves the scan platform 21 to cause the first scan start point P1Y1 to reach the probe point PP to scan the first sample 25 The first distance d1 of the probe point PP to the first scan start point P1Y1 is the shortest distance between the probe point PP and the first region 26. After scanning After the first sample 25, the detector 202 moves from the first scan end point P1Y2 to the second scan start point P2X1 or moves the scan platform 21 to cause the second scan start point P2X2 to reach the probe point. PP scans the second sample 27, wherein a second distance d2 from the first scan end point P1Y2 to the second scan start point P2X1 is between the first scan end point P1Y2 and the second area 28 The shortest distance.

Referring to the fourth figures (a) and (b), the optical auxiliary microscope 201 collects a first central position P1 of the first sample 25 on the scanning platform 21 and determines the second sample 27 on the scanning platform. a second central position P2 on the 21, the first central position P1 having a first x coordinate P1XC and a first y coordinate P1YC, the second central position P2 having a second x coordinate P2XC and a second y coordinate P2YC. The processing unit 24 sets the first scanning area 26 as a first rectangular scanning area 260, wherein the first rectangular scanning area 260 is a minimum area covering the first sample 25, and has a first parallel to the y-axis An edge 261 and a second edge 262, and a third edge 263 and a fourth edge 264 parallel to the x-axis, the length of the first edge 261 or the second edge 262 being the first rectangular scanning area 260 a first rectangular length 260L, the length of the third edge 263 or the fourth edge 264 is a first rectangular width 260W of the first rectangular scanning area 260, the first edge 261, the second edge 262, the first The third edge 263 and the fourth edge 264 respectively have a first midpoint P1X1, a second midpoint P1X2, a third midpoint P1Y1, and a fourth midpoint P1Y2, the first midpoint P1X1, the first The x coordinates of the second midpoint P1X2, the third midpoint P1Y1, and the fourth midpoint P1Y2 are respectively the first x coordinate P1XC minus half of the first rectangular width 260W, and the first x coordinate P1XC plus the One half of the first rectangular width 260W, the first x coordinate P1XC, and the first x coordinate P1XC The first midpoint P1X1, the second midpoint P1X2, the third midpoint P1Y1, P1Y2 and the fourth midpoint y coordinate, respectively, for a first y coordinate P1YC, The first y coordinate P1YC, the first y coordinate P1YC minus half of the first rectangular length 260L, and the first y coordinate P1YC plus half of the first rectangular length 260L, the first scan starting point is One of the first midpoint P1X1, the second midpoint P1X2, the third midpoint P1Y1, and the fourth midpoint P1Y4, when the first scan starting point is the first midpoint P1X1, The first scan end point is predetermined as the second midpoint P1X2, and when the first scan start point is the second midpoint P1X2, the first scan end point is predetermined as the first midpoint P1X1, when the first When a scan start point is the third midpoint P1Y1, the first scan end point is predetermined as the fourth midpoint P1Y2, and when the first scan start point is the fourth midpoint P1Y2, the first The scan end point is predetermined to be the third midpoint P1Y1.

Similarly, the processing unit 24 sets the second scan area 28 as a second rectangular scan area 280, wherein the second rectangular scan area 280 is the smallest area covering the second sample 27 and has a parallel to the y-axis. a fifth edge 281 and a sixth edge 282, and a seventh edge 283 and an eighth edge 284 parallel to the x-axis, the length of the fifth edge 281 or the sixth edge 282 being the second rectangular scanning area a second rectangular length 280L, the length of the seventh edge 283 or the eighth edge 284 is a second rectangular width 280W of the second rectangular scanning area 280, the fifth edge 281, the sixth edge 282, The seventh edge 283 and the eighth edge 284 respectively have a fifth midpoint P2X1, a sixth midpoint P2X2, a seventh midpoint P2Y1, and an eighth midpoint P2Y2, and the fifth midpoint P2X1. The x coordinates of the sixth midpoint P2X2, the seventh midpoint P2Y1, and the eighth midpoint P2Y2 are respectively the second x coordinate P2XC minus half of the second rectangular width 280W, and the second x coordinate P2XC plus One half of the second rectangular width 280W, the second x coordinate P2XC, and the second x a coordinate P2XC, the y coordinate of the fifth midpoint P2X1, the sixth midpoint P2X2, the seventh midpoint P2Y1, and the eighth midpoint P2Y2 are respectively a second y coordinate P2YC, the second y coordinate P2YC, the second y coordinate P2YC minus half of the second rectangular length 280L, and the second y coordinate P2YC plus half of the second rectangular length 280L, the second The scan start point is one of the fifth midpoint P2X1, the sixth midpoint P2X2, the seventh midpoint P2Y1, and the eighth midpoint P2Y2, when the second scan start point is the fifth At the midpoint P2X1, the second scan end point is predetermined as the sixth midpoint P2X2, and when the second scan start point is the sixth midpoint P2X2, the second scan end point is predetermined as the fifth midpoint P2X1, when the second scan start point is the seventh midpoint P2Y1, the second scan end point is predetermined as the eighth midpoint P2Y2, and when the second start point is the eighth midpoint P2Y2, The second end point is predetermined to be the seventh midpoint P2Y1.

Please refer to the fifth figure, which is a scanning method for an optical auxiliary AFM system according to a first preferred embodiment of the present invention. The AFM system 20 in the third diagram can be an optically assisted AFM system that includes an optical auxiliary microscope 201, a scanning platform 21, and a detector 202. Please refer to the third figure, the fourth figure (a)-(b), and the fifth figure at the same time. The method includes the following steps. In step S101, a first sample 25 and a first page are provided on the scanning platform 21. Two samples of 27. In step S102, a first scan area 26 of the first sample 25 and a second scan area 28 of the second sample 27 are determined. The first scan area 26 has a first scan start point P1Y1 and a The first scan end point P1Y2 has a second scan start point P2X1 and a second scan end point P2X2. In step S103, the detector 202 is moved to the first scan start point P1Y1, or the scan platform 21 is moved to make the first scan start point P1Y1 reach the vertical projection position of the detector 202 to The sample 25 is scanned, wherein the distance from the first scan start point P1Y1 to the detector 202 is less than or equal to the distance from the second scan start point P2X1 to the detector 202, and the detector 202 and the first scan The starting point P1Y1 is separated by a first distance d1, and the first distance d1 is the The shortest distance between the detector 202 and the first scanning region 26. In step S104, after scanning the first sample 25, the detector 202 is moved from the first scanning end point P1Y2 to the second scanning starting point P2X1, or the scanning platform 21 is moved to make the first The second scanning start point P2X1 reaches the vertical projection position of the detector 202 to scan the second 27 samples, wherein the first scanning end point P1Y2 is separated from the second scanning starting point P2X1 by a second distance d2, The second distance d2 is the shortest distance between the first scanning end point P1Y2 and the second scanning area 28.

In the first preferred embodiment, the path plan between the second sample 27 and the third sample 29 is also taken as the shortest path, and the shortest path plan method can be extended to n samples. Since the scanning trajectory between the first sample 25, the second sample 27, and the third sample is the shortest straight line between the samples, the scanning trajectory of any curve can be eliminated, so that the scanning speed can be increased. After the scan path plan number between the samples, the first sample 25, the second sample 27, and the third sample 29 can be further scanned in sequence. Before further scanning, the optical auxiliary microscope 201 only obtains the general information of the position information of the sample and the size of the area of the sample, and the details of the shape of the sample are not known, in order to adaptively adjust the scanning trajectory according to the shape of the sample. The center path and the amplitude of the scan trajectory, the method described below predicts the center path of the scan trajectory and the amplitude of the scan trajectory by detecting the shape or size of the sample.

Please refer to the sixth figure, which is a schematic diagram of detecting the boundary points of the sample. The scanning device that detects the boundary points of the sample also uses the AFM system 20 in the third figure. In the sixth figure, when a first scan trajectory 31 sweeps over the first sample 25, a z-axis direction scan trajectory 32 is formed in the z-axis direction, and the detector 202 senses the same on the scan platform 21. When the first sampling point X1 outside the first region 26 of the present 25 and the z-axis coordinate of the second sampling point X2 in the first region 26 of the first sample 25 on the scanning platform 21 are changed, the processing unit 24 Determining that the detector 202 has scanned the first sample 25 The boundary area is ready to scan the first area 26. For example, in the sixth figure, the coordinates of the first sampling point X1 in the x-axis and z-axis directions are (x[1], z[1]), and the coordinates of the second sampling point X2 in the x-axis and z-axis directions. For (x[2], z[2]), the slope of the line formed by the two points of the second sampling point X2 and the first sampling point X1 is m1=(z[2]-z[1])/(x[2 ]-x[1]), when the slope m1 is greater than or equal to a threshold, the processing unit 24 determines that there is a first boundary point PB1 between the first sampling point X2 and the second sampling point X1. Similarly, the coordinates of the third sampling point X3 and the fourth sampling point X4 are (x[k], z[k]), (x[k+1], z[k+1]), respectively, where k=1 , 2,...,n, the more the sampling points of the same segment are scanned, the larger the n is, the more precise the sampling is, and the more precise the position of the boundary points. The slope of the straight line formed by the third sampling point X3 and the fourth sampling point X4 m2=(z[k+1]-z[k])/(x[k+1]-x[k]) has an absolute value greater than Or equal to the threshold value, the processing unit 24 may also determine that there is a second boundary point PB2 between the fourth sampling point X4 and the third sampling point X3, and the coordinates of the first boundary point PB1 and the second boundary point PB2 Can be determined.

After finding the coordinates of the first boundary point PB1 and the second boundary point PB2, the coordinates of the first center point PBC1 of the two boundary points can be known, and the distance DB1 of the two boundary points PB1, PB2 can also be known, and the distance DB1 is Half is the amplitude, so you can also know the scan amplitude that the first sample 25 should actually use. In order to predict the amplitude of the scan path of the next scan track and the next cycle, at least another actual Scan lines to detect the other two boundary points.

Please refer to a seventh figure, which is a schematic diagram of a method for determining a boundary point according to a second preferred embodiment of the present invention. The method includes the following steps. In step S201, a first scan track 31 is determined. The first scan track 31 includes a first sample point X1 and a second sample point X2. In step S202, a first x-axis coordinate x[1] of the first sampling point X1 and a first z-axis coordinate z[1], and a second x-axis coordinate of the second sampling point X2 are extracted. x[2] and a second z-axis coordinate z[2]. in In step S203, the first z-axis coordinate z[1] is subtracted from the second z-axis coordinate z[2] to obtain a first z-axis variation Δz, and the second x-axis coordinate x[2] is obtained. Subtracting the first x-axis coordinate x[1] to obtain a first x-axis variation Δx, and dividing the first z-axis variation Δz by the first x-axis variation Δx to obtain a first A slope m1. In step S204, when the absolute value of the first slope m1 is greater than or equal to a threshold, it is determined that there is a first trace on the first scan trace 31 between the first sample point X1 and the second sample point X2. A boundary point PB1.

Please refer to the eighth figure, which is a schematic diagram of predicting a scan path and a scan amplitude according to a third preferred embodiment of the present invention. In the eighth figure, the first scan track 31 is scanned from the first scan start point P1Y1, which passes through the boundary points PB1, PB2 of the first sample 25, and the first sine wave track Sin1 includes the first scan track 31, Two scan tracks 33, and a third scan track 34. When the second scan track 33 scans through the first sample 25, the detector 202 can detect the coordinates of a third boundary point PB3 and a fourth boundary point PB4. The processor 24 calculates a coordinate of the second center point PBC2 according to the coordinates of the third boundary point PB3 and the coordinates of the fourth boundary point PB4, the coordinates according to the third boundary point PB3, and the fourth boundary point PB4. The coordinates are used to calculate the coordinates of a second midpoint PBC2, and the scan trajectories 35, 36, 37 are predicted based on the coordinates of the first midpoint PBC1 and the coordinates of the second midpoint PBC2.

The scanning device used in the third preferred embodiment is identical to the AFM system of the first preferred embodiment, and includes a detector 202, a platform control system 23, and a processing unit 24. For example, platform control system 23 is a controller. In the eighth figure, the scan track formed by the first scan track 31 and the second scan track 33 is a half-wave track of the first sine wave track Sin1, and the area scanned by the first sample 25 is a first area. Reg1, the area formed by the dashed scan track 35, 36 through the first sample 25 is a second area Reg2, and so on, the first sample 25 can be divided into N regions. The controller controls the detector 202 to scan the N sine trajectories respectively The area is obtained, and N-1 area parameters corresponding to a first area Reg1 of the N areas are respectively obtained. The processing unit 24 is electrically connected to the controller, and respectively determines N-1 sine wave trajectories according to the N-1 regional parameters to respectively scan the N-1 regions of the sample including a second region Reg2 .

In the eighth figure, the coordinates of the first center point PBC1 and the coordinates of the second center point PBC1 can be obtained by the method of the second preferred embodiment, and the coordinates of the coordinates of the first center point PBC1 and the second center point PBC2 are After the actual scan, the coordinates of the detected boundary points PB1, PB2, PB3, and PB4 are calculated, and these coordinates can be referred to as the first region parameters. In a preferred embodiment, the x-axis coordinate of the first center point PBC1 and the x-axis coordinate of the second center point PBC2 are xc1[1] and xc2[1], respectively, which predict a second sine wave trajectory Sin2 The x coordinate Pxc[2]=xc2[1]+ρ1×(xc2[1]−xc1[1]) of the end point PT2, wherein the parameter ρ1 is related to the specifications of the AFM system 20 and the user requirements. The path of the straight line connecting the end point PT1 of the first sine wave track Sin1 and the first scan start point P1Y1 is a first central path Pth1 of the first sine wave track Sin1, wherein the first sine wave track Sin1 has The minimum amplitude of the largest region among the N regions of the first sample 25 is covered, which is a first amplitude Amp1, which can also be said that the first amplitude Amp1 is the largest of all amplitudes of the scanned sample 25, where N Is a natural number greater than 1. The path of the straight line connecting the end point PT2 of the second sine wave track Sin2 and the end point PT1 of the first sine wave track Sin1 is a second center path Pth2 of the second sine wave track Sin2, wherein the second chord track Sin2 has a minimum jitter covering the second region Reg2, which is a second amplitude Amp2.

As described above, the coordinate Pxc[2] of the end point PT2 of the second sine wave trajectory Sin2 can be estimated after obtaining the first region parameter, that is, the second central path Pth2 of the second sine wave trajectory Sin2 can be predicted. . Similarly, the prediction of the second amplitude Amp2 can also be derived from the first region parameter. The estimation obtains, for example, the length of a first intercept line segment of the first scan track 31 in the first region Reg1 according to the boundary points PB1, PB2 detected by the actual scan, and the boundary point PB3 detected according to the actual scan. , PB4 calculates a second intercept line segment length of the second scan track 33 in the first region Reg1, and then subtracts the length of the second intercept line segment from the first intercept line segment length to obtain a first intercept. The amount of change in line length. In the eighth figure, the center path of the actual sine wave should be a straight path formed by the first center point PBC1 and the second center point PBC2, which is called the third center path Pth3, instead of the first center path Pth1. To travel, that is, the first center point PBC1 should be the starting point of the sine wave scanning, and the half of the length of the first intercept line segment should be used as the amplitude to start scanning; or the second center point PBC2 is the sine wave. The starting point of the scanning starts scanning with half of the length of the second intercept line segment as the amplitude, so the first central path Pth1 must be corrected to become the second central path Pth2. Since the first central path Pth1 is offset from the third central path Pth3 to be traveled, after the first sine wave trajectory Sin1 is scanned to the end point PT1, the amplitude of the predetermined second sine wave trajectory Sin2 must be added with an offset value. OFS1 to fix. In a preferred embodiment, the offset value OFS1 is a vertical distance from the second center point PBC2 to the first center path Pth1, and the second amplitude Amp2=(1/2)×{the second intercept can be predicted after estimation. The line segment length + ρ2 × the first intercept line segment length variation + the absolute value of the offset value OFS1} + δ1, wherein the parameters ρ2, δ1 are related to the specifications of the AFM system 20 and the user requirements.

In the third preferred embodiment, the predicted scan center path and scan amplitude are organized as follows. When the x coordinate Pxc[1]=x0 of the first scan start point P1Y1, the AFM system 20 can predict the x coordinate Pxc[2]=xc2[1]+ρ1× of the end point PT2 of the second sine wave track Sin2. Xc2[1]-xc1[1]), and can generalize the x coordinate Pxc[n]=xc2[n-1]+ρ1×(xc2[n-1]- of the end point PTn of the nth sine wave track Sinn. Xc1[n-1]), where n is a natural number between 2 and N and containing 2 and N. When the first amplitude Amp1 of the first sine wave trajectory Sin1 in the x-axis direction is half of the first rectangular width 260W, the AFM system 20 can predict the second amplitude Amp2= of the second sine wave trajectory Sin2 in the x-axis direction=( 1/2)×{the length of the second intercept line segment +ρ2×the length of the first intercept line segment length +the absolute value of the offset value OFS1}+δ1, and can generalize the prediction of the nth sine wave trajectory Sinn on the x-axis n-amplitude Ampn direction = (1/2) × {n-1 first sinusoidal track section (n-1) ₂ + ρ2 × intercept length of the line of the intercept length of the line n-1 + offset variation the absolute value OFSN} + δn, wherein the first n-1 = the intercept of the line length variation (n-1) ₂ intercept length of the line segment sinusoidal track n-1 - a first sinusoidal track n-1 The length of the (n-1) ₁ intercept line segment. Therefore, the n-th trajectory equation of the x-axis direction of the first sample 25 is scanned by the sine wave in the x-axis direction as follows: x _N (t)=Pxc[n-1]+Vx[n](tt _{n- 1} ) +Ampn*sin(2πf(tt _n-1 )) The n-th trajectory equation of the y-axis direction is as follows: y _n (t)=y0+(P/T)*t where y0 represents the first scan start point y妯 coordinate of P1Y1, T represents the period of the nth sine wave trajectory, f represents the frequency of the nth sine wave trajectory, P represents the x-axis coordinate of the end point of the n-th sine wave trajectory and the end of the n-1th sine wave trajectory The offset of the x-axis coordinate of the point, Vx[n]=(Pxc[n]-Pxc[n-1])/T, where Vx[n] represents the central path of the N-th wave in the x-axis direction Offset rate. In the third preferred embodiment, the period T and the frequency f of the n sinusoidal trajectories are both fixed. If there is a need to improve the precision, the frequency f can be modulated at the same time to scan the first sample 25.

In the eighth figure, the sine wave is scanned back and forth in the x-axis direction, and the center path of the sine wave is gradually corrected in the y-axis direction, and the amplitude of the sine wave is gradually corrected in the x-axis direction. The shape of the actual first sample 25 in the x-axis direction is met. On the other hand, on the other hand, the sine wave can also be scanned up and down in the y-axis direction, and the center path of the sine wave is in the x-axis direction. The stepwise correction is performed, and the amplitude of the sine wave is gradually corrected in the y-axis direction to conform to the shape of the actual first sample 25 in the y-axis direction.

Please refer to the ninth figure, which is a schematic diagram of a method for scanning the same according to a third preferred embodiment of the present invention, the method comprising the following steps. In step S301, one of the first regions Reg1 of the sample 25 is scanned with a first sine wave trajectory Sin1. In step S302, a relationship between the actual path 31, 33 of the first region Reg1 and the sample 25 is scanned from the first sine wave track Sin1 to obtain a first region parameter. In step S303, a second sine wave trajectory Sin2 of one of the second regions Reg2 of the sample 25 is scanned with the first region parameter prediction. In step S304, the second region Reg2 is scanned with the second sine wave trajectory Sin2.

Example

CLAIMS 1. A scanning method for an optically assisted atomic force microscope system, the optical assisted atomic force microscope comprising a scanning platform and a detector, the method comprising the steps of: providing a first sample and a second on the scanning platform sample. Determining a first scan area of the first sample and a second scan area of the second sample, the first scan area having a first scan start point and a first scan end point, the second scan area There is a second scan start point and a second scan end point. Moving the detector to the first scan start point, or moving the scan platform to cause the first scan start point to reach a vertical projection position of the detector to scan the first sample, wherein the first sample The distance from the start of the scan to the detector is less than or equal to the distance from the second scan start point to the detector, and the detector is at a first distance from the first scan start point, and the first distance is The shortest distance between the detector and the first scanning area. After scanning the first sample, moving the detector from the first scanning end point to the second scanning starting point, or moving the scanning platform to cause the second scanning starting point to reach the detector Vertically projecting position to scan the second sample, wherein the first scanning end point is separated from the second scanning starting point by a second distance, the second distance is the first scanning end point and the second scanning The shortest distance between the areas.

2. The method of embodiment 1, further comprising the steps of: determining a first center position of the first sample on the scanning platform and determining a second center position of the second sample on the scanning platform The first center position has a first x coordinate and a first y coordinate, and the second center position has a second x coordinate and a second y coordinate. Setting the first scan area as a first rectangular scan area, wherein the first rectangular scan area is a minimum area covering the first sample, and has a first edge and a second edge parallel to the x-axis, And a third edge and a fourth edge parallel to the y-axis, the length of the first edge or the second edge being a first rectangular length of the first rectangular scanning area, the third edge or the fourth edge The length of the first rectangular scan area is a first rectangular width, and the first edge, the second edge, the third edge, and the fourth edge respectively have a first midpoint and a second midpoint. a third midpoint, and a fourth midpoint, wherein the first midpoint, the second midpoint, the third midpoint, and the x coordinate of the fourth midpoint are respectively the first x coordinate minus the One half of the width of the first rectangle, the first x coordinate plus half of the width of the first rectangle, the first x coordinate, and the first x coordinate, the first midpoint, the second midpoint, the third The midpoint and the y coordinate of the fourth midpoint are respectively the first y coordinate, the first y coordinate, The first y coordinate minus half of the length of the first rectangle, and the first y coordinate plus half of the length of the first rectangle, the first scan starting point being the first midpoint and the second midpoint One of the third midpoint and the fourth midpoint, when the first scan start point is the first midpoint, the first scan end point is predetermined as the second midpoint, when When the first scan start point is the second midpoint, the first scan end point is predetermined as the first midpoint, and when the first scan start point is At the third midpoint, the first scan end point is predetermined as the fourth midpoint, and when the first scan start point is the fourth midpoint, the first scan end point is predetermined to be the third middle point point. Setting the second scan area as a second rectangular scan area, wherein the second rectangular scan area is a minimum area covering the second sample, and has a fifth edge and a sixth edge parallel to the x-axis, and a seventh edge parallel to the y-axis and an eighth edge, the length of the fifth edge or the sixth edge being a second rectangular length of the second rectangular scanning area, the seventh edge or the eighth edge The length is a second rectangular width of the second rectangular scanning area, and the fifth edge, the sixth edge, the seventh edge, and the eighth edge respectively have a fifth midpoint, a sixth midpoint, and a a seventh midpoint, and an eighth midpoint, wherein the fifth midpoint, the sixth midpoint, the seventh midpoint, and the xth coordinate of the eighth midpoint are respectively the second x coordinate minus the first One half of the width of the rectangle, the second x coordinate plus half of the width of the second rectangle, the second x coordinate, and the second x coordinate, the fifth midpoint, the sixth midpoint, the seventh middle The point and the y coordinate of the eighth midpoint are the second y coordinate and the second y coordinate, respectively. The second y coordinate minus half of the length of the second rectangle, and the second y coordinate plus half of the length of the second rectangle, the second scan starting point being the fifth midpoint, the sixth midpoint One of the seventh midpoint and the eighth midpoint, when the second scan start point is the fifth midpoint, the second scan end point is predetermined as the sixth midpoint, when When the second scan start point is the sixth midpoint, the second scan end point is predetermined as the fifth midpoint, and when the second scan start point is the seventh midpoint, the second scan end point The eighth midpoint is predetermined, and when the second starting point is the eighth midpoint, the second ending point is predetermined as the seventh midpoint.

3. A scanning device comprising a scanning platform, an optical auxiliary microscope, and a detector. The scanning platform carries a first sample and a second sample. The optical auxiliary microscope collects a detection point, a first area of the first sample, and a first part of the second sample The information of the two areas, wherein the first area has a first scan start point and a first scan end point, and the second area has a second scan start point and a second scan end point. Moving the probe from the detection point to the first scan start point or moving the scan platform to cause the first scan start point to reach the probe point to scan the first sample, wherein the probe point is to the a first distance from the first scanning start point is a shortest distance between the detection point and the first area, and after scanning the first sample, the detector moves from the first scanning end point to the first Scanning the scanning platform or moving the scanning platform to cause the second scanning starting point to reach the detecting point to scan the second sample, wherein the first scanning end point to the second scanning starting point The two distances are the shortest distance between the first scanning end point and the second area.

4. The scanning device of embodiment 3, wherein the scanning device is configured to plan a path between the first scanning end point and the second scanning starting point. The optical auxiliary microscope collects a first central position of the first sample on the scanning platform and determines a second central position of the second sample on the scanning platform, the first central position having a first x coordinate And a first y coordinate having a second x coordinate and a second y coordinate. The scanning device further includes a processing unit, the processing unit sets the first scanning area as a first rectangular scanning area, wherein the first rectangular scanning area is a minimum area covering the first sample, and has a parallel to y a first edge and a second edge of the shaft, and a third edge and a fourth edge parallel to the x-axis, the length of the first edge or the second edge being a first of the first rectangular scanning area a length of the rectangle, the length of the third edge or the fourth edge is a first rectangular width of the first rectangular scanning area, and the first edge, the second edge, the third edge, and the fourth edge respectively have a first midpoint, a second midpoint, a third midpoint, and a fourth midpoint, the first midpoint, the second midpoint, the third midpoint, and the fourth midpoint The x coordinates are the first x seat Subtracting half of the width of the first rectangle, the first x coordinate plus half of the width of the first rectangle, the first x coordinate, and the first x coordinate, the first midpoint, the second midpoint The third midpoint, and the y coordinate of the fourth midpoint are respectively the first y coordinate, the first y coordinate, the first y coordinate minus half of the length of the first rectangle, and the first y The coordinate is added to one half of the length of the first rectangle, and the first scan starting point is one of the first midpoint, the second midpoint, the third midpoint, and the fourth midpoint. When the first scan start point is the first midpoint, the first scan end point is predetermined as the second midpoint, and when the first scan start point is the second midpoint, the first scan end point Predetermined as the first midpoint, when the first scan start point is the third midpoint, the first scan end point is predetermined as the fourth midpoint, and when the first scan start point is the first At the four midpoints, the first scan end point is predetermined to be the third midpoint. The processing unit sets the second scan area as a second rectangular scan area, wherein the second rectangular scan area is a minimum area covering the second sample, and has a fifth edge and a sixth parallel to the y-axis An edge, and a seventh edge and an eighth edge parallel to the x-axis, the length of the fifth edge or the sixth edge being a second rectangular length of the second rectangular scanning area, the seventh edge or the first The length of the eight edges is a second rectangular width of the second rectangular scanning area, and the fifth edge, the sixth edge, the seventh edge, and the eighth edge respectively have a fifth midpoint and a sixth middle a point, a seventh midpoint, and an eighth midpoint, wherein the fifth midpoint, the sixth midpoint, the seventh midpoint, and the x coordinate of the eighth midpoint are respectively the second x coordinate minus Going to half of the width of the second rectangle, the second x coordinate plus half of the width of the second rectangle, the second x coordinate, and the second x coordinate, the fifth midpoint, the sixth midpoint, the The seventh midpoint and the y coordinate of the eighth midpoint are respectively the second y coordinate, and the a second y coordinate, the second y coordinate minus half of the length of the second rectangle, and the second y coordinate plus half of the length of the second rectangle, the second scan starting point being the fifth midpoint, the Sixth a point, the seventh midpoint, and one of the eighth midpoints, when the second scan start point is the fifth midpoint, the second scan end point is predetermined to be the sixth midpoint, when When the second scan start point is the sixth midpoint, the second scan end point is predetermined as the fifth midpoint, and when the second scan start point is the seventh midpoint, the second scan ends. The point is predetermined as the eighth midpoint, and when the second starting point is the eighth midpoint, the second ending point is predetermined as the seventh midpoint.

5. A scanning method for determining a boundary point, the method comprising the steps of: determining a first scanning trajectory comprising a first sampling point and a second sampling point. A first x-axis coordinate of the first sampling point and a first z-axis coordinate, and a second x-axis coordinate and a second z-axis coordinate of the second sampling point are captured. When the absolute value of the first slope is greater than or equal to a threshold, it is determined that a first boundary point on the first scan track exists between the first sampling point and the second sampling point.

6. The method of embodiment 5, further comprising the steps of: capturing a third x-axis coordinate of a third sampling point and a third z-axis coordinate, and a fourth x-axis of a fourth sampling point The coordinate and a fourth z-axis coordinate, wherein the first scan track includes the third sampling point and the fourth sampling point. Subtracting the third z-axis coordinate from the fourth z-axis coordinate to obtain a second z-axis variation, subtracting the third x-axis coordinate from the fourth x-axis coordinate to obtain a second x-axis variation, And dividing the second z-axis variation by the second x-axis variation to obtain a second slope. Determining, between the fourth sampling point and the third sampling point, a second boundary point on the first scanning track, where the absolute value of the second slope is greater than or equal to the threshold value, wherein the first boundary The point is the same as the second boundary point at the boundary point of the first scanning track. A first midpoint coordinate is calculated according to the first x-axis coordinate of the first boundary point and the fourth x-axis coordinate of the second boundary point. A second scan trajectory is determined to detect coordinates of a third boundary point and a fourth boundary point. According to the coordinates of the third boundary point The coordinates of the fourth boundary point are used to calculate a second midpoint coordinate. A third scan trajectory is predicted according to the first midpoint coordinate and the second midpoint coordinate.

7. A method of scanning the same, the method comprising the steps of scanning a first region of the sample with a first chord trace. A first region parameter is obtained by scanning the relationship between the actual path of the first region and the sample from the first sine wave trajectory. A second chord trajectory of one of the second regions of the sample is predicted by the first region parameter prediction. The second region is scanned with the second chord trajectory.

8. The method of embodiment 7, wherein the first chord trajectory has a first amplitude and a first central path. The relationship of the actual path to the sample includes the relationship of the actual path to the complex boundary points formed by the intersection of the samples. The method further includes: sequentially detecting a first boundary point, a second boundary point, a third boundary point, and a fourth boundary point of the first area. Calculating a first center point coordinate and a first intercept line length according to the coordinates of the first boundary point and the coordinates of the second boundary point, and according to the coordinates of the third boundary point and the coordinates of the fourth boundary point To calculate a second center point coordinate and a second intercept line length. Estimating a second central path of the second chord trajectory according to the first center point coordinate and the second center point coordinate, and according to the first intercept length, the second intercept length, and the second middle A vertical distance of the point coordinate and the first central path is used to estimate a second vibration of the second chord trajectory to scan a second region of the sample and correct the first central path to the second central path. The first region parameter includes a coordinate of the complex boundary point, the first center point coordinate, the second center point coordinate, a vertical distance between the second center point coordinate and the first center path, and a length of the first intercept line segment The length of the second intercept line segment and the first amplitude. The first amplitude is the smallest amplitude that covers the largest region of all regions of the sample. The first central path is from a starting point of the first sine wave trajectory to a first straight path of the end point of the first sine wave trajectory, the second central path being a second straight path from a starting point of the second sine wave trajectory to an ending point of the second sine wave trajectory. The first central path is a first straight path from a starting point of the first sine wave trajectory to an ending point of the first sine wave trajectory, and the second central path is a starting point from the second sine wave trajectory a second straight path to the end point of the second chord trajectory.

9. A device for scanning a plasma, wherein the sample comprises N regions, the device comprising a detector, a controller, and a processing unit. The controller controls the detector to scan the N regions respectively with N chord trajectories, and obtain N-1 region parameters corresponding to a first region of the N regions respectively. The processing unit is electrically connected to the controller, and respectively determines N-1 sine wave trajectories according to the N-1 regional parameters to respectively scan the N-1 regions of the sample after the second region.

10. The apparatus of embodiment 9, wherein the processing unit determines an amplitude and/or frequency of the N-1 chord trajectories, wherein N is a natural number greater than one. An n-th chord trajectory of the N chord trajectories is predicted by an n-1th region parameter of the N regions, where n is a natural number between 2 and N and containing 2 and N. The processing unit determines a complex boundary point of the n-1th region, and predicts a nth sine wave trajectory of the N sine wave trajectories according to coordinates of the complex boundary point to scan the N regions of the sample An nth area. The first sine wave trajectory has a first amplitude and a first central path, the second sine wave trajectory having a second amplitude and a second central path. The complex boundary point includes a first boundary point, a second boundary point, a third boundary point, and a fourth boundary point, the first sine wave trajectory intersecting the first boundary point and the second boundary point Forming a first intercept line segment, the second sine wave trajectory intersecting the third boundary point and the fourth boundary point to form a second intercept line segment. The coordinates of the first boundary point and the coordinates of the second boundary point are used to calculate a first center point coordinate, and the coordinates of the third boundary point and the coordinates of the fourth boundary point are used to calculate a second center point coordinate. The first center point coordinate and the second center point coordinate are used to estimate the second center path of the second chord track, the length of the first intercept line segment, the length of the second intercept line segment, and the first The vertical distance between the two center point coordinates and the first center path is used to estimate the second amplitude of the second chord trajectory to correct the first center path to the second center path. The first amplitude is the smallest amplitude that covers the largest region of all regions of the sample. The first central path is a first straight path from a starting point of the first sine wave trajectory to an ending point of the first sine wave trajectory, and the second central path is a starting point from the second sine wave trajectory a second straight path to the end point of the second chord trajectory. The x coordinate of the end point of the nth chord trajectory is equal to the product of an xth nth coordinate plus an n-1th intercept variation and a first estimated parameter, wherein the n-1th intercept length the amount of change is equal to n-1 in a second sinusoidal track (n-1) ₂ with an intercept length of (n-1) ₁ intercept length variation amount. An nth amplitude of the nth sine wave trajectory is equal to (1/2)×{the second intercept line segment length of the n-1th chord trajectory+ρ2×the n-1th intercept line length change amount+one bias The absolute value of the shift value}+δn, ρ2 and δn are a second estimation parameter and a third estimation parameter, respectively.

PB1‧‧‧ first boundary point

PB2‧‧‧ second boundary point

PB3‧‧‧ third boundary point

PB4‧‧‧ fourth boundary point

P1Y1‧‧‧ first scan starting point

PBC1‧‧‧ first central point

Sin1‧‧‧first chord trajectory

PBC2‧‧‧ second central point

Sin2‧‧‧Second chord trajectory

Pth1‧‧‧ first central path

Pth3‧‧‧ third central path

Pth2‧‧‧Second Central Path

Reg1‧‧‧ first area

Reg2‧‧‧Second area

End point of PT1‧‧‧ first chord trajectory

End point of PT2‧‧‧ second chord trajectory

OFS1‧‧‧ offset value

36, 37‧‧‧ scan track

Amp1‧‧‧ first amplitude

Amp2‧‧‧ second amplitude

31‧‧‧First scan track

33‧‧‧Second scan track

34‧‧‧ Third scan track

35‧‧‧ Fourth scan track

Claims (10)

A method for scanning a sample of an optically assisted atomic force microscope system, the optical assisted atomic force microscope comprising a scanning platform and a detector, the method comprising the steps of: providing a first sample and a second on the scanning platform Determining a first scan area of the first sample and a second scan area of the second sample, the first scan area having a first scan start point and a first scan end point, the second The scan area has a second scan start point and a second scan end point; moving the detector to the first scan start point, or moving the scan platform to cause the first scan start point to reach the detector a vertical projection position to scan the first sample, wherein a distance from the first scan start point to the detector is less than or equal to a distance from the second scan start point to the detector, the detector The first scanning starting point is separated by a first distance, the first distance is a shortest distance between the detector and the first scanning area; and after scanning the first sample, the detecting Moving from the first scanning end point to the second scanning starting point, or moving the scanning platform to cause the second scanning starting point to reach the vertical projection position of the detector to scan the second sample, The first scanning end point is spaced apart from the second scanning starting point by a second distance, and the second distance is a shortest distance between the first scanning end point and the second scanning area. The method of claim 1, further comprising the steps of: determining a first center position of the first sample on the scanning platform and determining a second center of the second sample on the scanning platform; a first central position having a first x coordinate and a first y coordinate, the second central position having a second x coordinate and a second y coordinate; setting the first scanning area to a first rectangle Scanning area, where the first rectangular sweep The drawing area is a smallest area covering the first sample, and has a first edge and a second edge parallel to the x-axis, and a third edge and a fourth edge parallel to the y-axis, the first edge Or the length of the second edge is a first rectangular length of the first rectangular scanning area, and the length of the third edge or the fourth edge is a first rectangular width of the first rectangular scanning area, the first edge The second edge, the third edge, and the fourth edge respectively have a first midpoint, a second midpoint, a third midpoint, and a fourth midpoint, the first midpoint, the first The second midpoint, the third midpoint, and the x coordinate of the fourth midpoint are respectively the first x coordinate minus half of the first rectangle width, and the first x coordinate plus the first rectangle width Half, the first x coordinate, and the first x coordinate, the first midpoint, the second midpoint, the third midpoint, and the y coordinate of the fourth midpoint are respectively the first y coordinate, The first y coordinate, the first y coordinate minus half of the length of the first rectangle, and the first y coordinate plus the a half of a length of the rectangle, the first scan start point being one of the first midpoint, the second midpoint, the third midpoint, and the fourth midpoint, when the first scan start When the point is the first midpoint, the first scan end point is predetermined as the second midpoint, and when the first scan start point is the second midpoint, the first scan end point is predetermined as the first a midpoint, when the first scan start point is the third midpoint, the first scan end point is predetermined as the fourth midpoint, and when the first scan start point is the fourth midpoint, The first scan end point is predetermined as the third midpoint; and the second scan area is set as a second rectangular scan area, wherein the second rectangular scan area is a minimum area covering the second sample, and has parallel a fifth edge and a sixth edge on the x-axis, and a seventh edge and an eighth edge parallel to the y-axis, the length of the fifth edge or the sixth edge being one of the second rectangular scanning regions a second rectangular length, the length of the seventh edge or the eighth edge being one of the second rectangular scanning areas Second rectangle width, the fifth edge, The sixth edge, the seventh edge, and the eighth edge respectively have a fifth midpoint, a sixth midpoint, a seventh midpoint, and an eighth midpoint, the fifth midpoint, the first The sixth midpoint, the seventh midpoint, and the x coordinate of the eighth midpoint are respectively the second x coordinate minus half of the width of the second rectangle, and the second x coordinate plus half of the width of the second rectangle The second x coordinate, and the second x coordinate, the fifth midpoint, the sixth midpoint, the seventh midpoint, and the y coordinate of the eighth midpoint are respectively the second y coordinate, the a second y coordinate, the second y coordinate minus half of the length of the second rectangle, and the second y coordinate plus half of the length of the second rectangle, the second scan starting point being the fifth midpoint, One of the sixth midpoint, the seventh midpoint, and the eighth midpoint, when the second scan start point is the fifth midpoint, the second scan end point is predetermined to be the sixth a midpoint, when the second scan start point is the sixth midpoint, the second scan end point is predetermined as the fifth midpoint, and when the second scan start point is At the seventh midpoint, the second scan end point is predetermined to be the eighth midpoint, and when the second start point is the eighth midpoint, the second end point is predetermined to be the seventh midpoint. The method of claim 2, further comprising the steps of: determining a scanning step of the sample boundary point; determining a first scanning track, the first scanning track comprising a first sampling point and a second sampling point; Extracting a first x-axis coordinate of the first sampling point and a first z-axis coordinate, and a second x-axis coordinate of the second sampling point and a second z-axis coordinate; the second z-axis coordinate Subtracting the first z-axis coordinate to obtain a first z-axis variation, subtracting the first x-axis coordinate from the second x-axis coordinate to obtain a first x-axis variation, and the first z-axis And dividing a first change amount by the first x-axis to obtain a first slope; and when the absolute value of the first slope is greater than or equal to a threshold, determining to include the first sampling point and the second sampling point There is a first boundary point on the first scan track. The method of claim 3, further comprising the steps of: capturing a third x-axis coordinate of a third sampling point and a third z-axis coordinate, and a fourth x of the fourth sampling point. a shaft coordinate and a fourth z-axis coordinate, wherein the first scan track includes the third sampling point and the fourth sampling point; subtracting the third z-axis coordinate from the fourth z-axis coordinate to obtain a second z Amount of the axis change, subtracting the third x-axis coordinate from the fourth x-axis coordinate to obtain a second x-axis change amount, and dividing the second z-axis change amount by the second x-axis change amount to obtain a a second slope; when the absolute value of the second slope is greater than or equal to the threshold value, determining that a second boundary point on the first scanning track is included between the fourth sampling point and the third sampling point, wherein The first boundary point is the same as the second boundary point and is at a boundary point of the first scan track; the first x-axis coordinate according to the first boundary point and the fourth x-axis coordinate of the second boundary point Calculating a first midpoint coordinate; determining a second scan trajectory to detect a third boundary point and a fourth side a coordinate of the point; calculating a second midpoint coordinate according to the coordinate of the third boundary point and the coordinate of the fourth boundary point; and predicting a third scan according to the first midpoint coordinate and the second midpoint coordinate Track. The method of claim 4, further comprising the steps of: scanning a first region of the sample with a first sine wave trajectory; Scanning a relationship between the actual path of the first region and the sample from the first sine wave trajectory to obtain a first region parameter; and scanning, by using the first region parameter, one of the second regions of the second region of the sample a wave trajectory; and scanning the second region with the second chord trajectory. The method of claim 5, wherein: the first sine wave trajectory has a first amplitude and a first central path; the relationship between the actual path and the sample comprises the intersection of the actual path and the sample intersection The method further includes: sequentially detecting a first boundary point, a second boundary point, a third boundary point, and a fourth boundary point of the first area; a coordinate of the boundary point and a coordinate of the second boundary point to calculate a first center point coordinate and a first intercept line length, and calculate a first according to a coordinate of the third boundary point and a coordinate of the fourth boundary point a second center point coordinate and a second intercept line segment length; and a second center path for estimating a second chord wave trajectory according to the first center point coordinate and the second center point coordinate, and according to the first intercept Length, the second intercept length, and a vertical distance between the second midpoint coordinate and the first central path to estimate a second vibration of the second chord trajectory to scan a second region of the sample, And amend the first center a path to the second central path; The first region parameter includes a coordinate of the complex boundary point, the first center point coordinate, the second center point coordinate, a vertical distance between the second center point coordinate and the first center path, and a length of the first intercept line segment a length of the second intercept line segment, and the first amplitude; the first amplitude is a minimum amplitude of a largest region of all regions covering the sample; the first central path is a starting point from the first chord trajectory a first straight path to an end point of the first sine wave trajectory, the second central path being a second straight path from a starting point of the second sine wave trajectory to an ending point of the second sine wave trajectory; The first central path is a first straight path from a starting point of the first sine wave trajectory to an ending point of the first sine wave trajectory, and the second central path is a starting point from the second sine wave trajectory a second straight path to the end point of the second chord trajectory. An apparatus for optically assisting scanning a sample, comprising: a scanning platform carrying a first sample and a second sample; an optical auxiliary microscope, collecting a detecting point, a first area of the first sample, and the first Information of a second region of the second sample, wherein the first region has a first scan start point and a first scan end point, the second region having a second scan start point and a second scan end point And a detector moving from the probe point to the first scan start point or moving the scan platform to cause the first scan start point to reach the probe point to scan the first sample, wherein the probe a first distance from the first scanning start point is a shortest distance between the detection point and the first area, and after scanning the first sample, the detector moves from the first scanning end point Up to the second scan start point or moving the scan platform to cause the second scan start point to reach the probe point to scan the second sample, wherein the first scan end point to the second scan start point one of The second distance is the shortest distance between the first scan end point and the second area. The device of claim 7, wherein: the scanning device is configured to plan a path between the first scanning end point and the second scanning starting point; the optical auxiliary microscope collects the first sample a first central location on the scanning platform and a second central location on the scanning platform, the first central location having a first x coordinate and a first y coordinate, the second center The position has a second x coordinate and a second y coordinate; the scanning device further includes a processing unit, the processing unit sets the first scanning area as a first rectangular scanning area, wherein the first rectangular scanning area is covered a minimum area of the first sample, and having a first edge and a second edge parallel to the y-axis, and a third edge and a fourth edge parallel to the x-axis, the first edge or the second The length of the edge is a first rectangular length of the first rectangular scanning area, and the length of the third edge or the fourth edge is a first rectangular width of the first rectangular scanning area, the first edge, the second Edge, the first The three edges, and the fourth edge respectively have a first midpoint, a second midpoint, a third midpoint, and a fourth midpoint, the first midpoint, the second midpoint, and the third The midpoint, and the x coordinate of the fourth midpoint are respectively the first x coordinate minus half of the width of the first rectangle, the first x coordinate plus half of the width of the first rectangle, the first x coordinate, And the first x coordinate, the first midpoint, the second midpoint, the third midpoint, and the y coordinate of the fourth midpoint are respectively the first y coordinate, the first y coordinate, the first One y coordinate minus half of the length of the first rectangle, and the first y coordinate plus half of the length of the first rectangle, the first scan starting point being the first midpoint, the second midpoint, the a third midpoint, and one of the fourth midpoints, when the first scan start point is At the first midpoint, the first scan end point is predetermined as the second midpoint, and when the first scan start point is the second midpoint, the first scan end point is predetermined as the first midpoint, When the first scan start point is the third midpoint, the first scan end point is predetermined as the fourth midpoint, and when the first scan start point is the fourth midpoint, the first The scan end point is predetermined as the third midpoint; and the processing unit sets the second scan area as a second rectangular scan area, wherein the second rectangular scan area is the smallest area covering the second sample and has parallel a fifth edge and a sixth edge on the y-axis, and a seventh edge and an eighth edge parallel to the x-axis, the length of the fifth edge or the sixth edge being one of the second rectangular scanning regions a second rectangular length, the length of the seventh edge or the eighth edge being a second rectangular width of the second rectangular scanning area, the fifth edge, the sixth edge, the seventh edge, and the eighth edge Have a fifth midpoint, a sixth midpoint, a seventh midpoint, respectively An eighth midpoint, the fifth midpoint, the seventh midpoint, and the x coordinate of the eighth midpoint are respectively the second x coordinate minus half of the width of the second rectangle, The second x coordinate plus half of the width of the second rectangle, the second x coordinate, and the second x coordinate, the fifth midpoint, the sixth midpoint, the seventh midpoint, and the eighth The y coordinate of the midpoint is the second y coordinate, the second y coordinate, the second y coordinate minus half of the length of the second rectangle, and the second y coordinate plus half of the length of the second rectangle. The second scan start point is one of the fifth midpoint, the sixth midpoint, the seventh midpoint, and the eighth midpoint, and the second scan start point is the fifth middle When the point is, the second scan end point is predetermined as the sixth midpoint, and when the second scan start point is the sixth midpoint, the second scan end point is predetermined as the fifth midpoint, when the first When the second scan start point is the seventh midpoint, the second scan end point is predetermined as the eighth midpoint, and when the second start point is the eighth midpoint, the second knot Point scheduled for the seventh midpoint. The device of claim 8, wherein: the controller controls the detector to scan the N regions by N chord trajectories respectively, and obtains corresponding to a first region of the N regions respectively. N-1 regional parameters; and a processing unit electrically connected to the controller, and respectively determining N-1 sine wave trajectories according to the N-1 regional parameters to respectively scan a second region of the sample The N-1 areas. The apparatus of claim 9, wherein: the processing unit determines an amplitude and/or a frequency of the N-1 sine wave trajectories, wherein N is a natural number greater than 1; and the N sine wave trajectories An nth-wave trajectory is predicted by an n-1th region parameter of the N regions, where n is a natural number between 2 and N and containing 2 and N; the processing unit determines the n-th a complex boundary point of the region, and predicting a nth sine wave trajectory of the N chord trajectories according to coordinates of the complex boundary point to scan an nth region of the N regions of the sample; The chord trajectory has a first amplitude and a first central path, the second sine wave trajectory has a second amplitude and a second central path; the complex boundary point includes a first boundary point and a second boundary point a third boundary point, and a fourth boundary point, the first sine wave trajectory intersecting the first boundary point and the second boundary point to form a first intercept line segment, the second sine wave trajectory and the The third boundary point intersects the fourth boundary point to form a second intercept line segment; the first boundary point seat The coordinates of the second boundary point are used to calculate a first center point coordinate, and the coordinates of the third boundary point and the coordinates of the fourth boundary point are used to calculate a second center point coordinate; the first center point coordinate And the second center point coordinate is used to estimate the second center path of the second chord trajectory, the length of the first intercept line segment, the length of the second intercept line segment, and the second center point coordinate and the The vertical distance of the first central path is used to estimate the second amplitude of the second chord trajectory to correct the first central path to the second central path; the first amplitude is the largest of all regions covering the sample a minimum amplitude; the first central path is a first straight path from a starting point of the first sine wave trajectory to an ending point of the first sine wave trajectory, and the second central path is from the second sine wave trajectory a second straight path from the starting point to the end point of the second sine wave trajectory; the x coordinate of the end point of the nth sine wave trajectory is equal to an xth xth coordinate plus an n-1th a product of the amount of change from a first estimated parameter, wherein the n-1th From a length change amount is equal to n-1 of the first sinusoidal trajectory (n-1) ₂ with a length of the intercept of the amount of change _{(n-1). 1} intercept length; and the n-th track a sinusoidal The nth amplitude is equal to (1/2) × {the length of the second intercept line segment of the n-1th chord trajectory + ρ2 × the length change of the n-1th intercept line segment + the absolute value of an offset value} + δn , ρ2 and δn are a second estimation parameter and a third estimation parameter, respectively.