TWI513392B - Manufacturing method for circuit structure embedded with electronic device - Google Patents

Manufacturing method for circuit structure embedded with electronic device Download PDF

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TWI513392B
TWI513392B TW103113699A TW103113699A TWI513392B TW I513392 B TWI513392 B TW I513392B TW 103113699 A TW103113699 A TW 103113699A TW 103113699 A TW103113699 A TW 103113699A TW I513392 B TWI513392 B TW I513392B
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dielectric material
electronic component
line
layer
dielectric
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TW103113699A
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TW201540151A (en
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I Ta Tsai
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Unimicron Technology Corp
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Description

內埋電子元件的線路結構的製作方法Circuit structure for embedded electronic components

本發明是有關於一種線路結構,且特別是有關於一種內埋電子元件的線路結構。The present invention relates to a wiring structure, and more particularly to a wiring structure for a buried electronic component.

近年來,為了增加印刷電路板(printed circuit board,PCB)的應用,現已有許多技術是將印刷電路路板製作成多層式線路結構。多層式線路結構的製作方式是將由銅箔(copper foil)與半固化片(prepreg,pp)所組成的增層結構反覆堆疊並壓合於核心板(core board)上,用以增加多層式線路結構的內部的佈線空間,並利用電鍍製程在盲孔中填充導電材料來導通各層。此外,許多適用的電子元件,例如是被動式電子元件,也可依據需求內埋於多層式線路結構中,以增加多層式線路結構的應用。In recent years, in order to increase the application of printed circuit boards (PCBs), many techniques have been made to fabricate printed circuit boards into a multilayer wiring structure. The multi-layer circuit structure is formed by repeatedly stacking and bonding a layered structure composed of a copper foil and a prepreg (pp) to a core board for adding a multilayer circuit structure. The internal wiring space is filled with a conductive material in the blind vias using an electroplating process to turn on the layers. In addition, many suitable electronic components, such as passive electronic components, can also be embedded in multi-layer wiring structures as needed to increase the application of multilayer wiring structures.

在習知技術的內埋電子元件的線路結構的製作方法中,在壓合銅箔與半固化片所組成的增層結構於核心板上之前,先在核心板上以雷射加工或機械鑽孔等方式設置用來容置電子元件的 凹槽。為了使電子元件能夠放置在所述凹槽中,凹槽的一側需事先配置膠帶或其他適用的固定構件來封閉凹槽。如此,電子元件可配置在凹槽內並藉由膠帶暫時固定在凹槽的一定位處。之後,電子元件可在其他半固化片壓合於核心板上之後內埋並固定於核心板內,而膠帶在電子元件固定於核心板內之後即可移除。在電子元件透過上述方式內埋於核心板內之後,更多的半固化片與銅箔所組成的增層結構可繼續壓合在核心板上,以完成內埋電子元件的多層式線路結構。然而,上述的製作流程較為複雜,例如是需藉由額外的加工製程在核心板上配置凹槽,且將電子元件配置在凹槽的步驟中還需使用額外的耗材(例如前述的膠帶)作為輔助,使得上述的製作方法產生較高的製作成本。In the manufacturing method of the wiring structure of the embedded electronic component of the prior art, before the laminated structure composed of the copper foil and the prepreg is pressed onto the core plate, the laser processing or mechanical drilling is performed on the core plate. Mode setting for accommodating electronic components Groove. In order to enable the electronic component to be placed in the recess, one side of the recess requires prior tape or other suitable securing member to close the recess. As such, the electronic component can be disposed within the recess and temporarily secured to a location of the recess by tape. Thereafter, the electronic component can be buried and fixed in the core board after the other prepregs are pressed onto the core board, and the tape can be removed after the electronic component is fixed in the core board. After the electronic component is buried in the core board through the above manner, the buildup structure composed of more prepreg and copper foil can continue to be pressed on the core board to complete the multilayer circuit structure of the embedded electronic component. However, the above manufacturing process is complicated, for example, it is necessary to arrange a groove on the core board by an additional processing process, and an additional consumable (for example, the aforementioned tape) is used as a step of disposing the electronic component in the groove. Auxiliary, the above production method produces higher production costs.

本發明提供一種內埋電子元件的線路結構的製作方法,具有簡易的製作流程,並能降低製作成本。The invention provides a method for manufacturing a line structure of a buried electronic component, which has a simple manufacturing process and can reduce the manufacturing cost.

本發明的內埋電子元件的線路結構的製作方法包括下列步驟‧‧‧提供一第一介電材。將至少一電子元件配置於第一介電材上。將一第二介電材壓合於第一介電材上,並將兩導電材分別配置於第一介電材與第二介電材上,以使電子元件內埋於第一介電材與第二介電材之間,第一介電材與第二介電材分別位在電子元件與對應的導電材之間,而第一介電材、第二介電材、電子元件與兩導電材形成一核心板。形成一內層線路於核心板上,且內層 線路連接電子元件。The method for fabricating the wiring structure of the embedded electronic component of the present invention comprises the following steps: providing a first dielectric material. Disposing at least one electronic component on the first dielectric material. Pressing a second dielectric material on the first dielectric material, and disposing the two conductive materials on the first dielectric material and the second dielectric material respectively, so that the electronic component is buried in the first dielectric material and the second dielectric material Between the dielectric materials, the first dielectric material and the second dielectric material are respectively located between the electronic component and the corresponding conductive material, and the first dielectric material, the second dielectric material, the electronic component and the two conductive materials form a core board. Forming an inner layer on the core board and the inner layer The line connects the electronic components.

在本發明的一實施例中,上述的在提供第一介電材的步驟中,第一介電材配置於一承載板上,且一離形層配置在第一介電材與承載板之間。在將電子元件配置於第一介電材上的步驟之後,離形層與承載板從第一介電材上移除。In an embodiment of the invention, in the step of providing the first dielectric material, the first dielectric material is disposed on a carrier board, and a release layer is disposed between the first dielectric material and the carrier board. After the step of disposing the electronic component on the first dielectric material, the release layer and the carrier plate are removed from the first dielectric material.

在本發明的一實施例中,上述的內埋電子元件的線路結構的製作方法更包括,在將電子元件配置於第一介電材上的步驟之前,在第一介電材上形成多個對位靶孔。In an embodiment of the invention, the method for fabricating the line structure of the embedded electronic component further includes forming a plurality of alignments on the first dielectric material before the step of disposing the electronic component on the first dielectric material Target hole.

在本發明的一實施例中,上述的內埋電子元件的線路結構的製作方法更包括,在將電子元件配置於第一介電材上的步驟之前,在第一介電材上配置至少一熱固化膠。In an embodiment of the invention, the method for fabricating the line structure of the embedded electronic component further includes: arranging at least one heat curing on the first dielectric material before the step of disposing the electronic component on the first dielectric material gum.

在本發明的一實施例中,上述的在將電子元件配置於第一介電材上的步驟中,電子元件配置在熱固化膠上,且熱固化膠透過一烘烤製程後固化,以將電子元件固定於第一介電材上。In an embodiment of the invention, in the step of disposing the electronic component on the first dielectric material, the electronic component is disposed on the thermosetting adhesive, and the thermosetting adhesive is cured after being subjected to a baking process to The component is attached to the first dielectric material.

在本發明的一實施例中,上述的形成內層線路於核心板上的步驟更包括下列步驟:形成至少一盲孔於第二介電材上,且盲孔連通電子元件。蝕刻兩導電材,並形成一導電層於盲孔內,以使兩導電材形成兩內層線路圖案,並使導電層透過盲孔連接位在第二介電材上的內層線路圖案與電子元件,而兩內層線路圖案與導電層形成內層線路。In an embodiment of the invention, the step of forming the inner layer line on the core board further comprises the steps of: forming at least one blind via on the second dielectric material, and the blind via is connected to the electronic component. Etching the two conductive materials and forming a conductive layer in the blind hole, so that the two conductive materials form two inner layer circuit patterns, and the conductive layer is connected to the inner layer circuit pattern and the electrons on the second dielectric material through the blind holes. The components, while the two inner layer patterns and the conductive layer form an inner layer line.

在本發明的一實施例中,上述的形成盲孔的步驟包括雷射製程,蝕刻兩導電材的步驟包括微影製程,而形成導電層於盲 孔內的步驟包括電鍍製程。In an embodiment of the invention, the step of forming a blind via includes a laser process, and the step of etching the two conductive materials includes a lithography process to form a conductive layer in a blind The steps within the well include an electroplating process.

在本發明的一實施例中,上述的內埋電子元件的線路結構的製作方法更包括形成至少一介電層與至少一增層線路於核心板上,其中介電層位在增層線路與內層線路之間,且增層線路連接內層線路。In an embodiment of the invention, the method for fabricating the wiring structure of the embedded electronic component further includes forming at least one dielectric layer and at least one build-up line on the core board, wherein the dielectric layer is on the build-up line and Between the inner layers, and the build-up lines connect the inner lines.

在本發明的一實施例中,上述的內埋電子元件的線路結構的製作方法更包括對增層線路進行表面處理(surface finish)。In an embodiment of the invention, the method for fabricating the line structure of the embedded electronic component further includes performing a surface finish on the build-up line.

在本發明的一實施例中,上述的第一介電材與第二介電材的材料包括摻雜玻璃纖維(glass fiber)的半固化片(prepreg,PP),而兩導電材的材料包括銅箔(copper foil)。In an embodiment of the invention, the material of the first dielectric material and the second dielectric material comprises a prepreg (PP) doped with glass fibers, and the material of the two conductive materials comprises copper foil ( Copper foil).

基於上述,在本發明的內埋電子元件的線路結構的製作方法中,電子元件配置在第一介電材,且第二介電材壓合於第一介電材上,以使電子元件內埋於第一介電材與第二介電材之間,而導電材配置在第一介電材與第二介電材上,以形成核心板。如此,電子元件在核心板的製作過程中一併內埋於其中,可省略習知技術中在核心板上設置用來容置電子元件的凹槽所需的加工步驟與相關耗材。據此,本發明的內埋電子元件的線路結構的製作方法具有簡易的製作流程,並能降低製作成本。Based on the above, in the method of fabricating the wiring structure of the embedded electronic component of the present invention, the electronic component is disposed on the first dielectric material, and the second dielectric material is pressed onto the first dielectric material to embed the electronic component in the electronic component. The first dielectric material and the second dielectric material are disposed on the first dielectric material and the second dielectric material to form a core plate. In this way, the electronic components are buried therein in the manufacturing process of the core board, and the processing steps and related consumables required for arranging the recesses for accommodating the electronic components on the core board in the prior art can be omitted. Accordingly, the method for fabricating the wiring structure of the embedded electronic component of the present invention has a simple manufacturing process and can reduce the manufacturing cost.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the invention will be apparent from the following description.

20‧‧‧承載板20‧‧‧Loading board

30‧‧‧離形層30‧‧‧Fractal layer

100‧‧‧內埋電子元件的線路結構100‧‧‧Line structure of embedded electronic components

102‧‧‧核心板102‧‧‧ core board

110‧‧‧第一介電材110‧‧‧First dielectric

112‧‧‧對位靶孔112‧‧‧ alignment target hole

114‧‧‧熱固化膠114‧‧‧Hot Curing Adhesive

120‧‧‧電子元件120‧‧‧Electronic components

122a、122b‧‧‧電極122a, 122b‧‧‧ electrodes

130‧‧‧第二介電材130‧‧‧Second dielectric

132、162‧‧‧盲孔132, 162‧‧ ‧ blind holes

134‧‧‧通孔134‧‧‧through hole

140a與140b‧‧‧導電材140a and 140b‧‧‧electric materials

150‧‧‧內層線路150‧‧‧ Inner line

152a、152b‧‧‧內層線路圖案152a, 152b‧‧‧ inner layer circuit pattern

154、174‧‧‧導電層154, 174‧‧‧ conductive layer

160‧‧‧介電層160‧‧‧ dielectric layer

170‧‧‧增層線路170‧‧‧Additional line

172‧‧‧增層線路圖案172‧‧‧Additional line pattern

180‧‧‧防焊層180‧‧‧ solder mask

182‧‧‧開口182‧‧‧ openings

190‧‧‧銲墊190‧‧‧ solder pads

圖1是本發明一實施例的內埋電子元件的線路結構的製作方法的流程圖。1 is a flow chart showing a method of fabricating a wiring structure of a buried electronic component according to an embodiment of the present invention.

圖2A至圖2J是圖1的內埋電子元件的線路結構的製作流程示意圖。2A to 2J are schematic diagrams showing a manufacturing process of a wiring structure of the embedded electronic component of FIG. 1.

圖1是本發明一實施例的內埋電子元件的線路結構的製作方法的流程圖。圖2A至圖2J是圖1的內埋電子元件的線路結構的製作流程示意圖。請參考圖1與圖2A至圖2J,在本實施例中,內埋電子元件的線路結構的製作方法包括下列步驟:在步驟S110中,提供第一介電材110。在步驟S120中,將至少一電子元件120配置於第一介電材110上。在步驟S130中,將第二介電材130壓合於第一介電材110上,並將兩導電材140a與140b分別配置於第一介電材110與第二介電材130上,以使電子元件120內埋於第一介電材110與第二介電材130之間,第一介電材110與第二介電材130分別位在電子元件120與對應的導電材140a與140b之間,而第一介電材110、第二介電材130、電子元件120與兩導電材140a與140b形成核心板102。在步驟S140中,形成內層線路150於核心板102上,且內層線路150連接電子元件120。在步驟S150中,形成至少一介電層160與至少一增層線路170於核心板102上,其中介電層160位在增層線路170與內層線路150 之間,且增層線路170連接內層線路150。在步驟S160中,對增層線路170進行表面處理。以下將以文字搭配圖2A至圖2J依序說明本實施例的內埋電子元件的線路結構的製作方法。1 is a flow chart showing a method of fabricating a wiring structure of a buried electronic component according to an embodiment of the present invention. 2A to 2J are schematic diagrams showing a manufacturing process of a wiring structure of the embedded electronic component of FIG. 1. Referring to FIG. 1 and FIG. 2A to FIG. 2J, in the embodiment, the manufacturing method of the wiring structure of the embedded electronic component includes the following steps: In step S110, the first dielectric material 110 is provided. In step S120, at least one electronic component 120 is disposed on the first dielectric material 110. In step S130, the second dielectric material 130 is pressed onto the first dielectric material 110, and the two conductive materials 140a and 140b are respectively disposed on the first dielectric material 110 and the second dielectric material 130 to make the electrons. The component 120 is embedded between the first dielectric material 110 and the second dielectric material 130. The first dielectric material 110 and the second dielectric material 130 are respectively located between the electronic component 120 and the corresponding conductive materials 140a and 140b. The first dielectric material 110, the second dielectric material 130, the electronic component 120, and the two conductive materials 140a and 140b form a core board 102. In step S140, the inner layer line 150 is formed on the core board 102, and the inner layer line 150 is connected to the electronic component 120. In step S150, at least one dielectric layer 160 and at least one build-up line 170 are formed on the core board 102, wherein the dielectric layer 160 is located on the build-up line 170 and the inner layer line 150. Between, and the build-up line 170 is connected to the inner layer line 150. In step S160, the build-up line 170 is subjected to surface treatment. Hereinafter, a method of fabricating the wiring structure of the embedded electronic component of the present embodiment will be sequentially described with reference to FIGS. 2A to 2J.

首先,在步驟S110中,提供第一介電材110。請參考圖1與2A,在本實施例中,在提供第一介電材110的步驟中,第一介電材110配置於承載板20上,且離形層30配置在第一介電材110與承載板20之間。本實施例的第一介電材110的材料例如是摻雜玻璃纖維(glass fiber)的半固化片(prepreg,PP),以使第一介電材110具有良好的強度,但本發明並不限制第一介電材110的材料。再者,將第一介電材110配置在具有良好強度的承載板20上,有助於後續對第一介電材110進行加工,例如在第一介電材110上配置盲孔或者配置膠體(如後續說明)。此外,在第一介電材110與承載板20之間配置離形層30,有助於在加工第一介電材110之後分離第一介電材110與承載板20。然而,本發明並不限制離形層30與承載板20的配置與否,其可依據需求作選擇。First, in step S110, a first dielectric material 110 is provided. Referring to FIGS. 1 and 2A, in the embodiment, in the step of providing the first dielectric material 110, the first dielectric material 110 is disposed on the carrier board 20, and the release layer 30 is disposed on the first dielectric material 110 and the carrier. Between the boards 20. The material of the first dielectric material 110 of the present embodiment is, for example, a glass fiber prepreg (PP), so that the first dielectric material 110 has good strength, but the invention is not limited to the first medium. The material of the electrical material 110. Furthermore, the first dielectric material 110 is disposed on the carrier 20 having good strength, which facilitates subsequent processing of the first dielectric material 110, for example, configuring a blind hole or arranging a colloid on the first dielectric material 110 (eg, subsequent Description). Furthermore, the release layer 30 is disposed between the first dielectric material 110 and the carrier plate 20 to facilitate separation of the first dielectric material 110 from the carrier plate 20 after processing the first dielectric material 110. However, the present invention does not limit the configuration of the release layer 30 and the carrier plate 20, which may be selected as needed.

接著,在步驟S120中,將至少一電子元件120配置於第一介電材110上。請先參考圖1與圖2B,在本實施例中,在將電子元件120配置於第一介電材110上的步驟之前,更包括先在第一介電材110上形成多個對位靶孔112。對位靶孔112透過雷射製程(laser process)形成於第一介電材110上,並且貫穿第一介電材110與離形層30,但本發明並不限制對位靶孔112的形成方式,其可依據需求作選擇。對位靶孔112可在第一介電材110上定義 出預定放置電子元件120的區域。舉例而言,對位靶孔112可配置在第一介電材110上預定設置電子元件120的區域的周邊,而在後續配置電子元件120的步驟中,電子元件120可依據對位靶孔112的位置來調整其配置在第一介電材110上的位置。Next, in step S120, at least one electronic component 120 is disposed on the first dielectric material 110. Referring to FIG. 1 and FIG. 2B , in the embodiment, before the step of disposing the electronic component 120 on the first dielectric material 110 , the method further includes forming a plurality of alignment target holes 112 on the first dielectric material 110 . . The alignment target hole 112 is formed on the first dielectric material 110 through a laser process, and penetrates the first dielectric material 110 and the release layer 30, but the present invention does not limit the formation manner of the alignment target hole 112, It can be selected according to needs. The alignment target hole 112 can be defined on the first dielectric material 110 The area where the electronic component 120 is placed is placed. For example, the alignment target hole 112 may be disposed on the periphery of the first dielectric material 110 where the electronic component 120 is disposed, and in the subsequent step of configuring the electronic component 120, the electronic component 120 may be in accordance with the alignment target hole 112. The position is adjusted to adjust its position on the first dielectric member 110.

接著,請參考圖1與圖2C,在本實施例中,在將電子元件120配置於第一介電材110上的步驟之前,更包括先在第一介電材110上配置至少一熱固化膠114。熱固化膠114透過噴塗製程(spray process)形成於第一介電材110上,但本發明並不限制熱固化膠11的形成方式,其可依據需求作選擇。在配置熱固化膠114的步驟中,熱固化膠114可依據對位靶孔112的位置而配置在第一介電材110上的預定處,例如是配置在對位靶孔112之間的區域而位在第一介電材110上的預定處,以使電子元件120可透過熱固化膠114而配置在第一介電材110上的預定處。Then, referring to FIG. 1 and FIG. 2C , in the embodiment, before the step of disposing the electronic component 120 on the first dielectric material 110 , the method further includes disposing at least one heat curing adhesive 114 on the first dielectric material 110 . . The heat curing adhesive 114 is formed on the first dielectric material 110 through a spray process. However, the present invention does not limit the formation manner of the heat curing adhesive 11, which can be selected according to requirements. In the step of disposing the thermosetting adhesive 114, the thermosetting adhesive 114 may be disposed at a predetermined portion on the first dielectric material 110 according to the position of the alignment target hole 112, for example, a region disposed between the alignment target holes 112. The predetermined position on the first dielectric material 110 is such that the electronic component 120 can be disposed through the heat curing adhesive 114 at a predetermined place on the first dielectric material 110.

接著,請參考圖1與圖2D,在本實施例中,在將電子元件120配置於第一介電材110上的步驟中,電子元件120配置於熱固化膠114上。具體而言,本實施例的電子元件120繪示為四個,但電子元件120的數量可依據需求作調整,而熱固化膠114的數量與位置對應於電子元件120的數量與位置。此外,電子元件120可採用薄型的被動式電子元件,例如是厚度約為35微米(micrometer,μm)的矽基(Si-base)薄膜式電容,但本發明不以此為限制。由於本實施例在將電子元件120配置於第一介電材110上的步驟之前已先在第一介電材110上形成對位靶孔112,並 依據對位靶孔112的位置而在第一介電材110上的預定處配置熱固化膠114,故在將電子元件120配置於第一介電材110上的步驟中,電子元件120可依據對位靶孔112的位置而透過對應的熱固化膠114配置在第一介電材110上的預定處。在電子元件120配置在熱固化膠114上之後,熱固化膠114透過烘烤製程後固化,以將電子元件120固定於第一介電材110上。其中,熱固化膠114的材料可選用固化時間較短的材料。如此,熱固化膠114僅需經由短時間的烘烤即可固化,而烘烤熱固化膠114的溫度與時間不至於使第一介電材110產生變化(例如是受熱熔化)。透過熱固化膠114,電子元件120可固定在第一介電材110上。然而,在其他實施例中,電子元件120可直接配置在第一介電材110上,或透過其他種類的膠體配置在第一介電材110上,本發明不限制熱固化膠114的配置與否與電子元件120的配置方式。Next, referring to FIG. 1 and FIG. 2D , in the embodiment, in the step of disposing the electronic component 120 on the first dielectric material 110 , the electronic component 120 is disposed on the thermosetting adhesive 114 . Specifically, the electronic component 120 of the embodiment is illustrated as four, but the number of the electronic components 120 can be adjusted according to requirements, and the number and position of the thermosetting adhesives 114 correspond to the number and position of the electronic components 120. In addition, the electronic component 120 may be a thin passive electronic component such as a Si-base film capacitor having a thickness of about 35 micrometers (μm), but the invention is not limited thereto. Since the embodiment first forms the alignment target hole 112 on the first dielectric material 110 before the step of disposing the electronic component 120 on the first dielectric material 110, The thermosetting adhesive 114 is disposed at a predetermined position on the first dielectric material 110 according to the position of the alignment target hole 112. Therefore, in the step of disposing the electronic component 120 on the first dielectric material 110, the electronic component 120 can be aligned according to the alignment. The position of the target hole 112 is disposed at a predetermined place on the first dielectric material 110 through the corresponding heat curing adhesive 114. After the electronic component 120 is disposed on the thermosetting adhesive 114, the thermosetting adhesive 114 is cured by the baking process to fix the electronic component 120 to the first dielectric material 110. Among them, the material of the thermosetting adhesive 114 may be selected from materials having a shorter curing time. As such, the thermosetting adhesive 114 only needs to be cured by baking for a short period of time, and the temperature and time of baking the thermosetting adhesive 114 does not cause the first dielectric material 110 to change (for example, is melted by heat). The electronic component 120 can be fixed to the first dielectric material 110 through the heat curing adhesive 114. However, in other embodiments, the electronic component 120 can be directly disposed on the first dielectric material 110 or disposed on the first dielectric material 110 through other kinds of colloids. The present invention does not limit the configuration of the thermal curing adhesive 114. The arrangement of the electronic components 120.

接著,請參考圖1與圖2E,在本實施例中,由於第一介電材110配置在承載板20與離形層30上,故在完成上述將電子元件120配置於第一介電材110上的步驟之後,將離形層30與承載板20從第一介電材110上移除。由於第一介電材110與承載板20之間配置有離形層30,故承載板20與離形層30可輕易地從第一介電材110上移除。然而,在未配置有承載板20與離形層30的實施例中,此移除承載板20與離形層30的步驟即可省略。Then, referring to FIG. 1 and FIG. 2E , in the embodiment, since the first dielectric material 110 is disposed on the carrier layer 20 and the release layer 30 , the electronic component 120 is disposed on the first dielectric material 110 after the completion of the foregoing. After the step, the release layer 30 and the carrier sheet 20 are removed from the first dielectric material 110. Since the release layer 30 is disposed between the first dielectric material 110 and the carrier plate 20, the carrier layer 20 and the release layer 30 can be easily removed from the first dielectric material 110. However, in the embodiment in which the carrier 20 and the release layer 30 are not disposed, the step of removing the carrier 20 and the release layer 30 may be omitted.

接著,在步驟S130中,將第二介電材130壓合於第一介電材110上,並將兩導電材140a與140b分別配置於第一介電材 110與第二介電材130上,以使電子元件120內埋於第一介電材110與第二介電材130之間,第一介電材110與第二介電材130分別位在電子元件120與對應的導電材140a與140b之間,而第一介電材110、第二介電材130、電子元件120與兩導電材140a與140b形成核心板102。請參考圖1與圖2F,在本實施例中,第二介電材130壓合於第一介電材110上,其中第二介電材130的材料例如是摻雜玻璃纖維的半固化片,以使第二介電材130具有良好的強度,但本發明並不限制第二介電材130的材料。第二介電材130壓合於第一介電材110之後,第二介電材130內的半固化片會包覆電子元件120,並且填入第一介電材110上的對位靶孔112內。如此,電子元件120內埋於第一介電材110與第二介電材130之間。由於本實施例的電子元件120為薄型的被動式電子元件,故薄型的電子元件120可輕易地被第一介電材110與第二介電材130包覆。此外,導電材140a與140b的材料例如銅箔(copper foil)或其他適用的導電材料,本發明不以此為限制。在此步驟中,兩導電材140a與140b分別配置在第一介電材110與第二介電材130的外表面,其中第二介電材130與配置於其上的導電材140b可依序藉由不同製程配置在第一介電材110與電子元件120上,也可以事先製作成一個複合板材,並透過同一製程壓合在第一介電材110與電子元件120上。至此,第一介電材110、第二介電材130、電子元件120與兩導電材140a與140b形成核心板102,而電子元件120內埋在核心板102內。Next, in step S130, the second dielectric material 130 is pressed onto the first dielectric material 110, and the two conductive materials 140a and 140b are respectively disposed on the first dielectric material. 110 and the second dielectric material 130, so that the electronic component 120 is buried between the first dielectric material 110 and the second dielectric material 130, and the first dielectric material 110 and the second dielectric material 130 are respectively located in the electronic component 120 and the corresponding conductive materials 140a and 140b, and the first dielectric material 110, the second dielectric material 130, the electronic component 120 and the two conductive materials 140a and 140b form the core board 102. Referring to FIG. 1 and FIG. 2F , in the embodiment, the second dielectric material 130 is pressed onto the first dielectric material 110 , wherein the material of the second dielectric material 130 is, for example, a prepreg doped with glass fibers, so that The second dielectric material 130 has good strength, but the invention does not limit the material of the second dielectric material 130. After the second dielectric material 130 is pressed against the first dielectric material 110, the prepreg in the second dielectric material 130 covers the electronic component 120 and is filled into the alignment target hole 112 on the first dielectric material 110. As such, the electronic component 120 is buried between the first dielectric material 110 and the second dielectric material 130. Since the electronic component 120 of the present embodiment is a thin passive electronic component, the thin electronic component 120 can be easily covered by the first dielectric material 110 and the second dielectric material 130. In addition, the material of the conductive materials 140a and 140b, such as a copper foil or other suitable conductive material, is not limited by the present invention. In this step, the two conductive materials 140a and 140b are respectively disposed on the outer surfaces of the first dielectric material 110 and the second dielectric material 130, wherein the second dielectric material 130 and the conductive material 140b disposed thereon can be sequentially borrowed The first dielectric material 110 and the electronic component 120 are disposed on the first dielectric material 110 and the electronic component 120 by different processes, and may be fabricated into a composite material plate in advance and pressed onto the first dielectric material 110 and the electronic component 120 through the same process. So far, the first dielectric material 110, the second dielectric material 130, the electronic component 120 and the two conductive materials 140a and 140b form the core board 102, and the electronic component 120 is buried in the core board 102.

接著,在步驟S140中,形成內層線路150於核心板102上,且內層線路150連接電子元件120。在本實施例中,形成內層線路150於核心板102上的步驟(步驟S140)更包括下列步驟:形成至少一盲孔132於第二介電材130上,且盲孔132連通電子元件120。蝕刻兩導電材140a與140b,並形成導電層154於盲孔132內,以使兩導電材140a與140b形成兩內層線路圖案152a與152b,並使導電層154透過盲孔132連接位在第二介電材130上的內層線路圖案152b與電子元件120,而兩內層線路圖案152a與152b與導電層154形成內層線路150。再者,形成內層線路150於核心板102上的步驟(步驟S140)還可包括下列步驟:形成至少一通孔134於核心板102上,且通孔134貫穿核心板102。形成導電層154於通孔134內,以使內層線路圖案152a與152b透過位在通孔134內的導電層154彼此電性連接。Next, in step S140, the inner layer line 150 is formed on the core board 102, and the inner layer line 150 is connected to the electronic component 120. In this embodiment, the step of forming the inner layer line 150 on the core board 102 (step S140) further comprises the steps of: forming at least one blind hole 132 on the second dielectric material 130, and the blind hole 132 is connected to the electronic component 120. . The two conductive materials 140a and 140b are etched, and the conductive layer 154 is formed in the blind hole 132, so that the two conductive materials 140a and 140b form two inner layer wiring patterns 152a and 152b, and the conductive layer 154 is connected through the blind hole 132. The inner layer wiring pattern 152b on the second dielectric material 130 and the electronic component 120, and the two inner layer wiring patterns 152a and 152b and the conductive layer 154 form the inner layer wiring 150. Furthermore, the step of forming the inner layer line 150 on the core board 102 (step S140) may further include the steps of: forming at least one through hole 134 on the core board 102, and the through hole 134 penetrating the core board 102. The conductive layer 154 is formed in the via 134 such that the inner layer trace patterns 152a and 152b are electrically connected to each other through the conductive layer 154 located in the via 134.

具體而言,請參考圖1與圖2G,在本實施例中,在經由上述步驟完成核心板102,並將電子元件120內埋於核心板102之後,首先形成盲孔132於第二介電材130上,且盲孔132連通電子元件120。此外,通孔134亦可於此步驟中形成於核心板102上,且通孔134貫穿核心板102。在本實施例中,形成盲孔132與通孔134的步驟例如是雷射製程,而使盲孔132與通孔134成為雷射盲孔(laser via),但本發明不以此為限制。此外,在本實施例中,每一電子元件120具有兩電極122a與122b,而每兩個盲孔132對應地連接一個電子元件120中的兩電極122a與122b。如 此,後續所形成的內層線路150即可透過盲孔132連接電子元件120,但在此電極數量並不作限制,亦可為兩個以上。Specifically, referring to FIG. 1 and FIG. 2G, in the embodiment, after the core board 102 is completed through the above steps, and the electronic component 120 is buried in the core board 102, the blind hole 132 is first formed on the second dielectric. On the material 130, the blind holes 132 communicate with the electronic component 120. In addition, the through hole 134 may be formed on the core board 102 in this step, and the through hole 134 penetrates the core board 102. In the present embodiment, the step of forming the blind via 132 and the via 134 is, for example, a laser process, and the blind via 132 and the via 134 are laser vias, but the invention is not limited thereto. In addition, in the present embodiment, each of the electronic components 120 has two electrodes 122a and 122b, and each of the two blind vias 132 correspondingly connects the two electrodes 122a and 122b of one electronic component 120. Such as Therefore, the subsequently formed inner layer line 150 can be connected to the electronic component 120 through the blind via 132. However, the number of electrodes is not limited, and may be two or more.

接著,請參考圖1與圖2H,在本實施例中,蝕刻兩導電材140a與140b,並形成導電層154於盲孔132內。蝕刻兩導電材140a與140b的步驟例如是微影製程,以依據所需的線路佈局蝕刻兩導電材140a與140b,而形成兩內層線路圖案152a與152b。此外,形成導電層152於盲孔132內的步驟包括電鍍製程,以在盲孔132內填入導電層154,而導電層154透過盲孔132連接位在第二介電材130上的內層線路圖案152b與電子元件120的電極122a與122b。再者,本實施例的導電層154亦形成於通孔134內,以使前述藉由導電材140a與140b所形成的內層線路圖案152a與152b透過位在通孔134內的導電層154彼此電性連接。如此,兩內層線路圖案152a與152b以及位在盲孔132與通孔134內的導電層154形成內層線路150,且內層線路150連接電子元件120。至此,已初步完成本實施例的內埋電子元件120的線路結構100,其具有核心板102、內埋於核心板102內的電子元件120與連接電子元件120的內層線路150。然而,除了內層線路150之外,本實施例的內埋電子元件120的線路結構100還可以配置額外的增層線路170(繪示於圖2I),已使內埋電子元件120的線路結構100成為多層式的線路結構100。Next, referring to FIG. 1 and FIG. 2H, in the embodiment, the two conductive materials 140a and 140b are etched, and the conductive layer 154 is formed in the blind via 132. The step of etching the two conductive materials 140a and 140b is, for example, a lithography process to etch the two conductive materials 140a and 140b in accordance with the desired line layout to form two inner layer wiring patterns 152a and 152b. In addition, the step of forming the conductive layer 152 in the blind via 132 includes an electroplating process to fill the conductive via 154 in the blind via 132, and the conductive layer 154 is connected to the inner via on the second dielectric 130 through the blind via 132. The line pattern 152b and the electrodes 122a and 122b of the electronic component 120. Furthermore, the conductive layer 154 of the present embodiment is also formed in the through hole 134, so that the inner layer wiring patterns 152a and 152b formed by the conductive materials 140a and 140b pass through the conductive layer 154 located in the through hole 134. Electrical connection. As such, the inner layer lines 152a and 152b and the conductive layer 154 located in the blind via 132 and the via 134 form the inner layer line 150, and the inner layer line 150 connects the electronic component 120. So far, the wiring structure 100 of the embedded electronic component 120 of the present embodiment has been initially completed, and has a core board 102, an electronic component 120 embedded in the core board 102, and an inner layer line 150 connecting the electronic component 120. However, in addition to the inner layer line 150, the line structure 100 of the buried electronic component 120 of the present embodiment can also be configured with an additional build-up line 170 (shown in FIG. 2I) that has the wiring structure of the embedded electronic component 120. 100 becomes a multi-layered line structure 100.

在步驟S150中,形成至少一介電層160與至少一增層線路170於核心板102上,其中介電層160位在增層線路170與內 層線路150之間,且增層線路170連接內層線路150。具體而言,請參可圖1與圖2I,在本實施例中,介電層160與增層線路170的數量分別為兩個,但本發明不以此為限制。其中一個介電層160對應其中一個增層線路170,並壓合在第一介電材110上。介電層160覆蓋第一介電材110與位在第一介電材110上的內層線路圖案152a,並且位在內層線路150與增層線路170之間。位在介電層160上的增層線路170的製作方式可以透過例如前述的內層線路150的製作方法,先在介電層160上配置導電材(未繪示),其中介電層160與導電材可藉由不同製程依序壓合在第一介電材110上,也可以是先製作成一個複合板材後藉由同一製程壓合在第一介電材110上。之後,藉由雷射製程在介電層160上配置盲孔162,藉由微影製程蝕刻導電材而形成增層線路圖案172,並藉由電鍍製程在盲孔162內形成連接增層線路圖案172與內層線路圖案152a的導電層174,而增層線路圖案172與導電層174形成增層線路170。類似地,另一介電層160對應另一增層線路170,並壓合在第二介電材130上。介電層160覆蓋第二介電材130與位在第二介電材130上的內層線路圖案152b,並且位在內層線路150與增層線路170之間。此外,增層線路170藉由前述的方式形成在介電層160上,其中增層線路170的增層線路圖案172與導電層174連接至內層線路150的內層線路圖案152b。由此可知,透過類似的方式,更多的介電層160與增層線路170可以配置在核心板102上,或者配置在已形成於核心板102上的增層線路170上,而增 層線路170可透過上述的製作方式連接至內層線路150或者連接至較為內層的前一增層線路170,而其中部分內層線路150還連接至電子元件120。如此,內埋電子元件的線路結構100可依據需求配置更多的介電層160與增層線路170,而形成多層式的線路結構100,且其內層線路150與增層線路170彼此聯通。In step S150, at least one dielectric layer 160 and at least one build-up line 170 are formed on the core board 102, wherein the dielectric layer 160 is located in the build-up line 170 and Between the layer lines 150, and the build-up line 170 is connected to the inner layer line 150. Specifically, please refer to FIG. 1 and FIG. 2I. In the embodiment, the number of the dielectric layer 160 and the build-up line 170 are respectively two, but the invention is not limited thereto. One of the dielectric layers 160 corresponds to one of the build-up lines 170 and is pressed against the first dielectric material 110. The dielectric layer 160 covers the first dielectric material 110 and the inner layer wiring pattern 152a located on the first dielectric material 110, and is located between the inner layer wiring 150 and the build-up wiring 170. The build-up layer 170 disposed on the dielectric layer 160 can be formed by, for example, the method of fabricating the inner layer line 150 described above. First, a conductive material (not shown) is disposed on the dielectric layer 160, wherein the dielectric layer 160 is The conductive material may be sequentially pressed onto the first dielectric material 110 by different processes, or may be first formed into a composite material and then pressed onto the first dielectric material 110 by the same process. Thereafter, a blind via 162 is disposed on the dielectric layer 160 by a laser process, and the build-up wiring pattern 172 is formed by etching the conductive material by a lithography process, and a connection build-up line pattern is formed in the blind via 162 by an electroplating process. 172 and conductive layer 174 of inner layer pattern 152a, and build-up line pattern 172 and conductive layer 174 form build-up line 170. Similarly, another dielectric layer 160 corresponds to another build-up line 170 and is laminated to the second dielectric material 130. The dielectric layer 160 covers the second dielectric material 130 and the inner layer wiring pattern 152b located on the second dielectric material 130, and is located between the inner layer wiring 150 and the build-up wiring 170. In addition, the build-up line 170 is formed on the dielectric layer 160 by the foregoing manner, wherein the build-up line pattern 172 of the build-up line 170 and the conductive layer 174 are connected to the inner layer trace pattern 152b of the inner layer line 150. Therefore, in a similar manner, more dielectric layers 160 and build-up lines 170 may be disposed on the core board 102 or on the build-up line 170 that has been formed on the core board 102. The layer line 170 can be connected to the inner layer line 150 or to the more inner layer of the previous layer line 170 through the above-described fabrication manner, and a portion of the inner layer line 150 is also connected to the electronic component 120. As such, the wiring structure 100 for embedding electronic components can be configured with more dielectric layers 160 and build-up lines 170 as needed to form a multi-layered line structure 100, and the inner layer lines 150 and the build-up lines 170 are in communication with each other.

最後,在步驟S160中,對增層線路170進行表面處理。請參考圖1與圖2J,在本實施例中,在完成核心板102、內層線路150與增層線路170的製作之後,對增層線路170進行表面處理。本實施例的表面處理例如是在增層線路170形成防焊層180與多個銲墊190。由於本實施例的內埋電子元件120的線路結構100的相對兩側都配置有增層線路170,故本實施例在兩增層線路170上分別形成防焊層180。防焊層180覆蓋對應的介電層160與增層線路170,並且藉由多個開口182暴露出增層線路170的增層線路圖案172的局部。之後,銲墊190配置在開口182內並連接增層線路圖案172。如此,內埋電子元件120的線路結構100可以透過銲墊190電性連接其他電子元件(未繪示),而其餘被防焊層180覆蓋的部位則與其他電子元件電性絕緣。Finally, in step S160, the build-up line 170 is subjected to surface treatment. Referring to FIG. 1 and FIG. 2J, in the present embodiment, after the core board 102, the inner layer line 150, and the build-up line 170 are completed, the build-up line 170 is surface-treated. The surface treatment of this embodiment is, for example, forming the solder resist layer 180 and the plurality of pads 190 on the build-up line 170. Since the build-up electronic component 120 of the present embodiment has the build-up line 170 disposed on opposite sides of the line structure 100, the solder resist layer 180 is formed on each of the two build-up lines 170. The solder resist layer 180 covers the corresponding dielectric layer 160 and the build-up wiring 170, and a portion of the build-up wiring pattern 172 of the build-up wiring 170 is exposed by the plurality of openings 182. Thereafter, the pad 190 is disposed in the opening 182 and connected to the build-up wiring pattern 172. As such, the wiring structure 100 of the embedded electronic component 120 can be electrically connected to other electronic components (not shown) through the bonding pad 190, and the remaining portions covered by the solder resist layer 180 are electrically insulated from other electronic components.

綜上所述,在本發明的內埋電子元件的線路結構的製作方法中,電子元件在第二介電材壓合於第一介電材上的同時即內埋於第一介電材與第二介電材之間,而導電材配置在第一介電材與第二介電材上,以形成核心板。如此,電子元件在由第一介電材、第二介電材與導電材形成核心板的製作過程中一併內埋於其 中,且薄型的電子元件可輕易地被第一介電材與第二介電材包覆。相較於習知技術在核心板上製作凹槽來容置電子元件,本發明的製作方法可省略在核心板上設置凹槽所需的加工步驟與相關耗材。據此,本發明的內埋電子元件的線路結構的製作方法具有簡易的製作流程,並能降低製作成本。In summary, in the method of fabricating the wiring structure of the embedded electronic component of the present invention, the electronic component is buried in the first dielectric material and the second while the second dielectric material is pressed onto the first dielectric material. Between the dielectric materials, the conductive material is disposed on the first dielectric material and the second dielectric material to form a core plate. In this way, the electronic component is buried in the manufacturing process of the core plate formed by the first dielectric material, the second dielectric material and the conductive material. The thin electronic component can be easily covered by the first dielectric material and the second dielectric material. The fabrication method of the present invention can omit the processing steps and associated consumables required to place the recesses on the core panel, as compared to conventional techniques for making recesses in the core board to accommodate electronic components. Accordingly, the method for fabricating the wiring structure of the embedded electronic component of the present invention has a simple manufacturing process and can reduce the manufacturing cost.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

100‧‧‧內埋電子元件的線路結構100‧‧‧Line structure of embedded electronic components

102‧‧‧核心板102‧‧‧ core board

110‧‧‧第一介電材110‧‧‧First dielectric

120‧‧‧電子元件120‧‧‧Electronic components

122a、122b‧‧‧電極122a, 122b‧‧‧ electrodes

130‧‧‧第二介電材130‧‧‧Second dielectric

132‧‧‧盲孔132‧‧‧Blind holes

134‧‧‧通孔134‧‧‧through hole

150‧‧‧內層線路150‧‧‧ Inner line

152a、152b‧‧‧內層線路圖案152a, 152b‧‧‧ inner layer circuit pattern

154‧‧‧導電層154‧‧‧ Conductive layer

Claims (9)

一種內埋電子元件的線路結構的製作方法,包括:提供一第一介電材;將至少一電子元件配置於該第一介電材上;將一第二介電材壓合於該第一介電材上,並將兩導電材分別配置於該第一介電材與該第二介電材上,以使該電子元件內埋於該第一介電材與該第二介電材之間,該第一介電材與該第二介電材分別位在該電子元件與對應的該導電材之間,而該第一介電材、該第二介電材、該電子元件與該兩導電材形成一核心板;以及形成一內層線路於該核心板上,且該內層線路連接該電子元件,其中形成該內層線路於該核心板上的步驟更包括:形成至少一盲孔於該第二介電材上,並形成至少一通孔於該核心板上,其中該盲孔連通該電子元件,且該通孔貫穿該核心板;以及蝕刻該兩導電材,並形成一導電層於該盲孔以及該通孔內,以使該兩導電材形成兩內層線路圖案,並使該導電層透過該盲孔與該通孔連接位在該第二介電材上的該內層線路圖案與該電子元件,使該兩內層線路圖案與該些導電層形成該內層線路。 A method for fabricating a wiring structure of an embedded electronic component, comprising: providing a first dielectric material; disposing at least one electronic component on the first dielectric material; and pressing a second dielectric material on the first dielectric material And disposing the two conductive materials on the first dielectric material and the second dielectric material respectively, so that the electronic component is buried between the first dielectric material and the second dielectric material, the first The dielectric material and the second dielectric material are respectively located between the electronic component and the corresponding conductive material, and the first dielectric material, the second dielectric material, the electronic component and the two conductive materials form a core board And forming an inner layer on the core board, and the inner layer is connected to the electronic component, wherein the step of forming the inner layer on the core board further comprises: forming at least one blind via to the second dielectric And forming at least one through hole on the core plate, wherein the blind hole communicates with the electronic component, and the through hole penetrates the core plate; and etches the two conductive materials, and forms a conductive layer in the blind hole and the Inside the through hole, so that the two conductive materials form two inner layers a circuit pattern, and the conductive layer is connected to the via hole through the blind via and the via layer on the second dielectric material and the electronic component, so that the two inner layer trace patterns and the conductive layers are formed The inner layer line. 如申請專利範圍第1項所述的內埋電子元件的線路結構的製作方法,其中在提供該第一介電材的步驟中,該第一介電材配 置於一承載板上,且一離形層配置在該第一介電材與該承載板之間,在將該電子元件配置於該第一介電材上的步驟之後,該離形層與該承載板從該第一介電材上移除。 The method for fabricating a line structure of a buried electronic component according to claim 1, wherein in the step of providing the first dielectric material, the first dielectric material is provided And disposed on a carrier board, and a release layer is disposed between the first dielectric material and the carrier board, after the step of disposing the electronic component on the first dielectric material, the release layer and the carrier The board is removed from the first dielectric. 如申請專利範圍第1項所述的內埋電子元件的線路結構的製作方法,更包括:在將該電子元件配置於該第一介電材上的步驟之前,在該第一介電材上形成多個對位靶孔。 The method for fabricating a line structure of a buried electronic component according to claim 1, further comprising: forming a plurality of the first dielectric material before the step of disposing the electronic component on the first dielectric material Counter target holes. 如申請專利範圍第1項所述的內埋電子元件的線路結構的製作方法,更包括:在將該電子元件配置於該第一介電材上的步驟之前,在該第一介電材上配置至少一熱固化膠。 The method for fabricating a line structure of a buried electronic component according to claim 1, further comprising: arranging at least the first dielectric material on the first dielectric material before the step of disposing the electronic component on the first dielectric material A heat curing adhesive. 如申請專利範圍第4項所述的內埋電子元件的線路結構的製作方法,其中在將該電子元件配置於該第一介電材上的步驟中,該電子元件配置在該熱固化膠上,且該熱固化膠透過一烘烤製程後固化,以將該電子元件固定於該第一介電材上。 The method of fabricating a wiring structure for a buried electronic component according to claim 4, wherein in the step of disposing the electronic component on the first dielectric material, the electronic component is disposed on the thermosetting adhesive. And the thermosetting adhesive is cured after being subjected to a baking process to fix the electronic component on the first dielectric material. 如申請專利範圍第1項所述的內埋電子元件的線路結構的製作方法,其中形成該盲孔的步驟包括雷射製程,蝕刻該兩導電材的步驟包括微影製程,而形成該導電層於該盲孔內的步驟包括電鍍製程。 The method for fabricating a line structure of a buried electronic component according to claim 1, wherein the step of forming the blind hole comprises a laser process, and the step of etching the two conductive materials comprises a lithography process to form the conductive layer The steps within the blind via include an electroplating process. 如申請專利範圍第1項所述的內埋電子元件的線路結構的製作方法,更包括:形成至少一介電層與至少一增層線路於該核心板上,其中該 介電層位在該增層線路與該內層線路之間,且該增層線路連接該內層線路。 The method for fabricating a line structure of a buried electronic component according to claim 1, further comprising: forming at least one dielectric layer and at least one build-up line on the core board, wherein the A dielectric layer is between the build-up line and the inner layer line, and the build-up line connects the inner layer line. 如申請專利範圍第7項所述的內埋電子元件的線路結構的製作方法,更包括:對該增層線路進行表面處理。 The method for fabricating a line structure of a buried electronic component according to claim 7, further comprising: surface treating the build-up line. 如申請專利範圍第1項所述的內埋電子元件的線路結構的製作方法,其中該第一介電材與該第二介電材的材料包括摻雜玻璃纖維的半固化片,而該兩導電材的材料包括銅箔。 The method for fabricating a line structure of a buried electronic component according to claim 1, wherein the material of the first dielectric material and the second dielectric material comprises a prepreg doped with glass fibers, and the two conductive materials are Materials include copper foil.
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TW200847880A (en) * 2007-05-21 2008-12-01 Unimicron Technology Corp Optical-electro circuit board and method of fabricating the same
TW201220457A (en) * 2010-11-12 2012-05-16 Unimicron Technology Corp Package structure having embedded semiconductor component and fabrication method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200847880A (en) * 2007-05-21 2008-12-01 Unimicron Technology Corp Optical-electro circuit board and method of fabricating the same
TW201220457A (en) * 2010-11-12 2012-05-16 Unimicron Technology Corp Package structure having embedded semiconductor component and fabrication method thereof

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