TWI511447B - 改進的微機械共振器 - Google Patents

改進的微機械共振器 Download PDF

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Publication number
TWI511447B
TWI511447B TW100105580A TW100105580A TWI511447B TW I511447 B TWI511447 B TW I511447B TW 100105580 A TW100105580 A TW 100105580A TW 100105580 A TW100105580 A TW 100105580A TW I511447 B TWI511447 B TW I511447B
Authority
TW
Taiwan
Prior art keywords
resonator
resonator structure
frequency
given
dendrites
Prior art date
Application number
TW100105580A
Other languages
English (en)
Chinese (zh)
Other versions
TW201203856A (en
Inventor
Ville Kaajakari
Original Assignee
Murata Electronics Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Electronics Oy filed Critical Murata Electronics Oy
Publication of TW201203856A publication Critical patent/TW201203856A/zh
Application granted granted Critical
Publication of TWI511447B publication Critical patent/TWI511447B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2478—Single-Ended Tuning Fork resonators
    • H03H9/2484—Single-Ended Tuning Fork resonators with two fork tines, e.g. Y-beam cantilever
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2494—H-shaped, i.e. two tuning forks with common base
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H03H9/02275—Comb electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Gyroscopes (AREA)
TW100105580A 2010-02-22 2011-02-21 改進的微機械共振器 TWI511447B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20105168A FI124103B (fi) 2010-02-22 2010-02-22 Parannettu mikromekaaninen resonaattori

Publications (2)

Publication Number Publication Date
TW201203856A TW201203856A (en) 2012-01-16
TWI511447B true TWI511447B (zh) 2015-12-01

Family

ID=41727715

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100105580A TWI511447B (zh) 2010-02-22 2011-02-21 改進的微機械共振器

Country Status (8)

Country Link
US (1) US8723611B2 (enExample)
EP (1) EP2539999B1 (enExample)
JP (1) JP5873811B2 (enExample)
KR (1) KR101738869B1 (enExample)
CN (1) CN102762954B (enExample)
FI (1) FI124103B (enExample)
TW (1) TWI511447B (enExample)
WO (1) WO2011101547A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9300227B2 (en) * 2013-06-05 2016-03-29 Silicon Laboratories Inc. Monolithic body MEMS devices
CN104370272B (zh) * 2014-10-30 2016-07-06 无锡微奥科技有限公司 一种mems自对准高低梳齿及其制造方法
CN106932608B (zh) * 2015-12-25 2020-02-18 上海矽睿科技有限公司 加速度传感单元以及加速度计
US9966966B2 (en) 2016-01-20 2018-05-08 Uchicago Argonne, Llc Nonlinearity induced synchronization enhancement in mechanical oscillators
US10812046B2 (en) * 2018-02-07 2020-10-20 Murata Manufacturing Co., Ltd. Micromechanical resonator having reduced size

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6831531B1 (en) * 2000-12-21 2004-12-14 Eta Sa Manufacture Horlogere Suisse Time base comprising an integrated micromechanical tuning fork resonator
TW200711298A (en) * 2005-06-09 2007-03-16 Eta Sa Mft Horlogere Suisse Small-sized piezoelectric resonator
US20090160581A1 (en) * 2007-12-21 2009-06-25 Paul Merritt Hagelin Temperature Stable MEMS Resonator

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1009018A (en) * 1911-08-15 1911-11-14 Bancroft G Braine Game-board.
US3727151A (en) * 1972-04-17 1973-04-10 Bulova Watch Co Inc Integrated circuit for electronic timepieces
GB1441192A (en) * 1973-03-29 1976-06-30 Seiko Instr & Electronics Oscillator
FR2452714A1 (fr) 1979-03-30 1980-10-24 Thomson Csf Accelerometre a ondes elastiques
JPS6316170Y2 (enExample) * 1980-06-11 1988-05-09
JPH0540224A (ja) * 1990-07-26 1993-02-19 Fuji Photo Film Co Ltd 走査型顕微鏡
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5839062A (en) 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
JPH11271066A (ja) * 1998-01-21 1999-10-05 Denso Corp 角速度センサ
JP4219737B2 (ja) * 2003-05-30 2009-02-04 リバーエレテック株式会社 圧電振動子
US6874363B1 (en) * 2003-10-31 2005-04-05 Honeywell International, Inc. Trapped charge field bias vibrating beam accelerometer
US7043985B2 (en) * 2004-01-13 2006-05-16 Georgia Tech Research Corporation High-resolution in-plane tuning fork gyroscope and methods of fabrication
US7102467B2 (en) * 2004-04-28 2006-09-05 Robert Bosch Gmbh Method for adjusting the frequency of a MEMS resonator
EP1732217B1 (en) * 2005-06-09 2009-01-21 ETA SA Manufacture Horlogère Suisse Small-sized piezoelectric resonator
JP4538503B2 (ja) 2008-01-18 2010-09-08 Ｏｋｉセミコンダクタ株式会社 共振器
KR101694133B1 (ko) * 2008-01-24 2017-01-09 무라타 일렉트로닉스 오와이 마이크로기계식 공진기

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6831531B1 (en) * 2000-12-21 2004-12-14 Eta Sa Manufacture Horlogere Suisse Time base comprising an integrated micromechanical tuning fork resonator
TW200711298A (en) * 2005-06-09 2007-03-16 Eta Sa Mft Horlogere Suisse Small-sized piezoelectric resonator
US20090160581A1 (en) * 2007-12-21 2009-06-25 Paul Merritt Hagelin Temperature Stable MEMS Resonator

Also Published As

Publication number Publication date
EP2539999A4 (en) 2018-01-10
FI20105168L (fi) 2011-08-23
FI20105168A0 (fi) 2010-02-22
KR20130006629A (ko) 2013-01-17
CN102762954B (zh) 2015-11-25
US8723611B2 (en) 2014-05-13
CN102762954A (zh) 2012-10-31
KR101738869B1 (ko) 2017-05-23
EP2539999B1 (en) 2019-06-19
EP2539999A1 (en) 2013-01-02
TW201203856A (en) 2012-01-16
JP5873811B2 (ja) 2016-03-01
FI124103B (fi) 2014-03-14
JP2013520645A (ja) 2013-06-06
WO2011101547A1 (en) 2011-08-25
US20110210800A1 (en) 2011-09-01

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