TWI509372B - Chuck and processing apparatus - Google Patents

Description

Fixture and processing device

The present invention mainly relates to a jig for holding and fixing an elongated object to be processed.

Conventionally, it has been checked whether or not the circuit pattern of the integrated circuit or the circuit board has been completed as designed. This inspection is performed by moving the contact terminals for energization inspection along the surface of the integrated circuit or the like, or by electrically connecting a plurality of contact terminals corresponding to each of the plurality of inspection points set on the surface.

Preferably, the contact terminal for energization inspection has a spring structure to exhibit high elastic properties. Patent Document 1 discloses a method of manufacturing a contact terminal for energization inspection having a spring structure.

In Patent Document 1, a gold plating layer, a Ni electroformed layer, and a resist layer are formed on the outer periphery of an extremely fine core material. Then, the laser is irradiated in a spiral shape on the resist layer, thereby removing the resist layer of the irradiated portion. Etching is then performed to remove the Ni electroformed layer from the removed portion of the resist layer, and thereafter the core material is removed. According to this, a spring member made of a Ni electroformed layer and having a gold plating layer formed on the inner surface can be manufactured.

Patent Document 1 describes a method of rotating a workpiece object while moving the laser device up and down to form a spiral groove portion. However, Patent Document 1 does not describe how to fix an object during laser irradiation.

In addition, it is usually necessary to perform each of the laser irradiation of the object. Therefore, it is necessary to frequently perform the process of fixing the object to be processed and the process of releasing the fixation after the laser irradiation. Therefore, in order to improve work efficiency, an exposure apparatus which simply performs such processing is desired.

Further, these problems are not limited to the exposure apparatus, and are common to a processing apparatus for processing an elongated object.

Patent Document 1: Japanese Patent No. 4572303

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and its main object is to provide a jig and a processing apparatus which can easily fix an object and release it.

The problem to be solved by the present invention is as described above, and the means for solving the problem and the effects thereof will be described below.

According to a first aspect of the present invention, there is provided a jig in which an elongated member is used as a workpiece, and the workpiece is gripped and fixed, and the jig is configured as follows. That is, the jig has an elastic body, and is deformed by applying a force to the elastic body, so that the elastic force can be switched from the state in which the object is fixed to the state in which the elastic force is not applied to the object to be processed.

According to this, it is possible to realize a jig that can release the object to be processed and remove the processed object only by deforming the elastic body. As a result, by using the processing apparatus in which the jig is attached, the effort of the operator can be reduced, and work efficiency can be improved.

Preferably, the above jig has the following structure. That is, the clamp includes a first component and a second component. The cross section of the first component is approximately U-shaped. The second component is disposed between the first components. The object to be treated is fixed between the first portion and the second member by the elastic force of the elastic body.

According to this, only by pressing the first member, the fixation of the processed object can be released, and the processed object can be removed. That is, it is possible to work through simple and quick actions, thereby further improving work efficiency.

According to a second aspect of the present invention, the following processing apparatus is provided. That is, the processing apparatus includes a base portion, a jig mounting portion, and a jig. The jig mounting portion is provided on the base portion. Further, the jig mounting portion and the jig are fixed by magnetic force.

According to this, the jig can be replaced without using a tool. Therefore, the effort of the operator is reduced, thereby further improving work efficiency.

In the processing apparatus, one of the jig mounting portion and the jig has a magnet, and the other includes a fixing tool having magnetic properties.

According to this, the fixing tool not only has the function of the fixing member, but also has the function of mounting the jig, so that the number of parts can be reduced.

Preferably, the processing device has the following structure. That is, a resist layer is formed on the surface of the processed article. The processing apparatus includes an exposure unit that irradiates light to the processed object fixed to the jig.

According to this, the processed object fixed to the jig is exposed, so that the processed object can be made into a desired shape.

Preferably, the processing device has the following structure. That is, the jig can be rotated in the longitudinal direction of the object to be treated as the direction of the rotation axis. The jig or exposure portion is movable along the length of the object to be processed.

According to this, it is possible to move the jig or the exposed portion while rotating the object, and irradiate the light, so that a spiral groove can be formed.

Preferably, in the processing apparatus, the object to be processed is a member for forming a contact terminal for energization inspection having a spring structure.

According to this, a contact terminal for energization inspection can be manufactured by a high work efficiency method.

Preferably, in the processing apparatus, the jig is disposed at both ends of the object to be processed.

In the case where the ends of the article are fixed as described above, it is necessary to perform more fixing work for the object. On the other hand, the structure of the present invention can easily fix the object to be processed, so that the effects of the present invention can be exerted more effectively.

10‧‧‧Handling objects

11‧‧‧ core material

12‧‧‧ gold plating

13‧‧‧Ni electroformed layer

14‧‧‧Resistance

15‧‧‧Spring parts

16‧‧‧Electrical contact needle (plunger)

17‧‧‧Contact terminals

20‧‧‧Exposure device (processing device)

21‧‧‧Base section

22‧‧‧Clamp installation department

22a‧‧‧ Magnet

23‧‧‧Clamp

24‧‧‧Exposure Department

24a‧‧‧First housing

24b‧‧‧First Support

24c‧‧‧ second housing

24d‧‧‧second support

40‧‧‧ base end

41‧‧‧Cylinder parts

42‧‧‧Fixed tools

50‧‧‧ front end

51‧‧‧Insert hole

52‧‧‧ Capillary

53‧‧‧ Small Trails (second part)

53a‧‧‧Contact surface

54‧‧‧U-shaped parts (first part)

55‧‧‧Spring (elastomer)

Fig. 1 is a schematic view showing the first half of a process of manufacturing a contact terminal for energization inspection.

Fig. 2 is a schematic view showing the latter half of the process of manufacturing the contact terminal for energization inspection.

Fig. 3 is a perspective view schematically showing the structure of an exposure apparatus.

Figure 4 is a plan view and a front view of the jig.

Fig. 5 is a schematic view showing the state of the jig when the object is fixed.

Hereinafter, embodiments of the invention will be described with reference to the accompanying drawings.

First, a procedure for manufacturing a contact terminal for energization inspection will be briefly described with reference to FIGS. 1 and 2 . FIGS. 1 and 2 are schematic views showing a procedure of manufacturing a contact terminal for energization inspection. Further, the items that perform the respective steps will be collectively referred to as "processing object 10" hereinafter. Also, in order to improve visibility in the drawings of the present invention, the processed object 10 is coarser than actually illustrated.

In the present process, the treatment is performed on the basis of the core material 11. As the core material 11, an extremely thin metal wire or a resin wire of 5 μm or more can be used. Stainless steel or aluminum can be used for the metal wire, and a nylon resin or a polyethylene resin can be used for the resin wire.

First, a gold plating layer 12 is formed on the core material 11 by a general gold plating treatment (refer to Fig. 1, a gold plating layer forming process). Preferably, the thickness of the gold plating layer is from 0.2 μm to 1 μm.

Then, after the predetermined washing treatment, the electroforming process is performed to form a Ni electroformed layer 13 (Ni electroformed layer forming treatment) to cover the gold plating layer 12. Preferably, the thickness of the Ni electroformed layer 13 is 5 μm to 35 μm.

Then, the treated object 10 in which the Ni electroformed layer 13 is formed is immersed in the photoresist liquid for a certain period of time to form the resist layer 14 (resist layer formation treatment). Although a positive photoresist liquid is used in the description of the present invention, a negative photoresist liquid can also be used.

Then, the laser is irradiated in a spiral shape on the processed object 10. Specifically, in a state where the object 10 is rotated, the laser device (or the object object 10) is moved in the longitudinal direction of the workpiece 10 to irradiate the laser in a spiral shape. In addition, the exposure apparatus will be described in detail later.

Then, the resist layer 14 of the exposed portion (the spiral portion) is removed by immersing the workpiece 10 in the developer. Further, when a negative rather than a positive photoresist liquid is used, a portion other than the spiral may be exposed.

Then, by etching the processed object 10, the Ni electroformed layer 13 of the portion not covered by the resist layer 14 is removed to expose the gold plating layer 12 (refer to FIG. 2).

Then, after the object 10 is washed, the treated object 10 is immersed in the predetermined resist removal liquid to remove the resist layer 14 (resist layer removal treatment). Thereafter, the gold plating layer 12 in the spiral groove portion is removed by, for example, ultrasonic cleaning (gold plating layer removal treatment).

Then, the gold plating layer 12 located inside the Ni electroformed layer 13 is left to remove only the core material 11 (core material removal treatment). The removal of the core material 11 may be, for example, a method of removing the core material 11 after being deformed, or a method of dissolving the core material 11 by immersing the core material 11 in a predetermined solution. Thereby, a member having a spring structure (spring member 15) can be manufactured.

Thereafter, the conductive contact pin (plunger) 16 is inserted into the spring member 15 and fixed by welding or the like, thereby completing the contact check 17 for the energization inspection having the spring structure (needle mounting process). Then, the tapered portion of the tip end of the spring member 15 is brought into contact with an integrated circuit or the like.

Then, a laser device (processing device) 20 that irradiates the laser on the processed object 10 will be described. First, an outline of the exposure device 20 will be described with reference to FIG. FIG. 3 is a perspective view schematically showing the configuration of the exposure device 20.

As shown in FIG. 3, the exposure device 20 includes a base portion 21, a jig mounting portion 22, a jig 23, and an exposure portion 24. Further, in the present embodiment, in order to fix both ends of the object, the upper and lower portions each include a set of the base portion 21, the jig mounting portion 22, and the jig 23.

The base portion 21 is disposed at an upper end portion and a lower end portion of the exposure device 20. A jig attachment portion 22 is provided on each of the base portions 21. Specifically, the base portion 21 disposed at the upper end portion is provided with a jig attachment portion 22 on the lower surface thereof, and the base portion 21 disposed at the lower end portion is provided with a jig attachment portion 22 thereon.

The jig attachment portion 22 is a member for mounting a jig. The jig attachment portion 22 can be attached to the jig 23 that is rotatably mounted in the vertical direction (the longitudinal direction of the workpiece 10).

The jig 23 is detachably mounted to the jig mounting portion 22. The jig 23 is configured to be capable of holding the object 10 to be processed. In addition, the shape of the jig 23 will be described in detail later.

According to the above configuration, the jig attachment portion 22 rotates the jig 23, so that the object object 10 can be rotated in the direction of the rotation axis in the vertical direction.

The exposure portion 24 can generate a laser (light) and illuminate the processed object 10. If the resist layer 14 of the article 10 can be exposed, the type of laser can be arbitrary, for example, a semiconductor laser or a quasi-molecular laser can be used.

In addition, the exposure portion 24 includes a first housing 24a, a first support portion 24b, a second housing 24c, and a second support portion 24d.

The first housing 24a can generate a laser for illumination. Further, the first housing 24a is supported by the first support portion 24b, and is movable in the vertical direction (the longitudinal direction of the workpiece 10) under the control of a control portion not shown.

The second housing 24c receives the laser irradiated by the first housing 24a. Further, the second casing 24c is supported by the second support portion 24d, and can be simultaneously moved in the vertical direction together with the first casing 24a under the control of the control portion.

According to the above configuration, in a state where the jig mounting portion 22 rotates the jig 23 to rotate the object object 10, the first casing 24a and the first supporting portion 24b illuminate the laser while moving in the vertical direction, so that the object can be processed. A spiral groove portion is formed on 10. Further, when a negative rather than positive photoresist liquid is used, similarly, a portion other than the spiral groove portion may be exposed.

Next, the shape of the jig 23 will be described in detail with reference to FIGS. 4 and 5. Fig. 4 is a plan view and a front view of the jig 23. Fig. 5 is a schematic view showing the state of the jig 23 when the object 10 is fixed. In addition, in the following description, the side of the jig attachment part 22 in the jig 23 is called the base end side, and the opposite side is called the front end side.

As shown in FIG. 4, the jig 23 includes a base end portion 40 and a front end portion 50. The base end portion 40 is a portion on the side of the base end portion. The base end portion 40 includes a tubular member 41 and a fixing tool 42.

The tubular member 41 is a cylindrical member. The fixing tool 42 is inserted into the tubular member 41 and fixed. Also, at least the head of the fixing tool 42 has magnetic properties.

The jig 23 is attached to the jig mounting portion 22 using the head of the fixing tool 42. Specifically, the jig mounting portion 22 is configured to be insertable into the base end portion 40, and a magnet 22a is provided at a position in contact with the head portion of the fixing tool 42. According to this configuration, the jig attachment portion 22 can pass through the magnetic force holding jig 23.

Further, in the present embodiment, although the magnet is provided on the side of the jig mounting portion 22, the magnet may be provided on the side of the jig 23, and the magnet may be provided on both sides. In addition, the clamp 23 is only required It is only necessary to provide a member having magnetic properties at a position in contact with the magnet 22a. Therefore, the member may be attached to the jig attachment portion 22 through a member other than the fixing tool 42.

As described above, the structure in which the magnet mounting jig 23 is used in the present embodiment can remove the jig 23 more quickly and simply than the structure in which the jig is fixed by the rotation of the screw holes or the like. Therefore, the time and effort spent in replacing the jig 23 can be greatly reduced.

The front end portion 50 is located closer to the front end portion than the base end portion 40, and the front end portion 50 is a portion exposed to the outside of the jig attachment portion 22 when attached to the jig attachment portion 22. The front end portion 50 includes an insertion hole 51, a capillary tube 52, a small diameter portion (second member) 53, a U-shaped member (first member) 54, and a spring (elastic body) 55.

The insertion hole 51 is a hole formed from the front end portion side of the front end portion 50 toward the base end portion side. In the insertion hole 51, a capillary 52 is inserted. The capillary 52 may be, for example, a cylindrical member made of ceramic, and is configured to be insertable into the workpiece 10. For example, the capillary 52 can be replaced according to the diameter of the processed article 10.

The small diameter portion 53 is closer to the base end portion than the center of the front end portion 50. As shown in the cross-sectional view of Fig. 5, the small diameter portion 53 has a rectangular cross section. The small diameter portion 53 has a smaller cross section than the other portions of the front end portion 50, and causes the center axis of the jig 23 to pass through the upper side surface (contact surface 53a) in (b) of Fig. 4 . The U-shaped member 54 is attached to the small-diameter portion 53 to cover the small-diameter portion 53 (see a cross-sectional view of Fig. 5).

The U-shaped member 54 is a member having a U-shaped cross section. In other words, the U-shaped member 54 includes two portions that are disposed to be opposed and a portion that connects the ends of the two portions. The U-shaped member 54 sandwiches the small diameter portion 53 between the two portions that are disposed to face each other.

The spring 55 is disposed such that the small diameter portion 53 is connected to the U-shaped member 54. Specifically, the spring 55 pressurizes the U-shaped member 54 such that the U-shaped member 54 comes into contact with the contact surface 53a of the small diameter portion 53. Therefore, when no external force is applied, the U-shaped member 54 comes into contact with the contact surface 53a (refer to (a) of Fig. 5). In this state, a force is applied to the direction indicated by the arrow (a) in Fig. 5, so that the spring 55 contracts, and the surface on the opposite side of the contact surface 53a. It is in contact with the U-shaped member 54 (refer to (b) of Fig. 5). Further, only the U-shaped member 54 changes position based on the external force and the spring force of the spring, and the position of the small diameter portion 53 does not change.

Next, a method of fixing the object 10 to be fixed in the jig 23 and a method of releasing the fixing will be described.

First, the operator applies a force to the U-shaped member 54 to move the U-shaped member 54 away from the contact surface 53a. And, the processed object 10 is inserted into the insertion hole 51 (capillary 52). Thereafter, the operator releases the hand from the U-shaped member 54. Thereby, the object object 10 can be fixed by the contact surface 53a and the U-shaped member 54.

Further, in the present embodiment, since the both ends of the object 10 are fixed, the above-described processing is performed on both ends of the workpiece 10. Further, the configuration of the both ends of the fixed object 10 is not essential, and one of the jigs may be omitted depending on the size of the object 10 to be processed or the like.

On the other hand, when the workpiece 10 is released from being fixed, the operator applies a force to the U-shaped member 54 to separate the U-shaped member 54 from the contact surface 53a. Thereafter, after the operator takes out the processed object 10, the hand is released from the U-shaped member 54.

As described above, in the present embodiment, the operator can apply the force to the U-shaped member 54 with only one hand, and the workpiece 10 can be fixed and unfixed. In particular, since the U-shaped member 54 is provided on the surface of the jig 23, the operability is good.

As described above, in the present embodiment, the jig 23 takes the elongated member as the workpiece 10, holds the workpiece 10 and fixes it. Further, the jig 23 has a spring 55 which is deformed by applying a force to the spring 55, so that the elastic force can be switched from the state in which the object 10 can be fixed (Fig. 5 (a)) to the case where the object 10 is not applied. State ((b) of Fig. 5).

Thereby, it is possible to remove the exposure of the object object 10 by merely deforming the spring 55, and it is possible to remove the exposure device 20 that processes the object. As a result, the effort of the operator is reduced, so that work efficiency can be improved.

In addition, in the present embodiment, the jig 23 includes a U-shaped member 54 and a small diameter portion 53. The cross section of the U-shaped member 54 is approximately U-shaped. The small diameter portion 53 is disposed between the opposing two members of the U-shaped member 54. The object object 10 is fixed between the U-shaped member 54 and the small-diameter portion 53 by the elastic force of the spring 55.

Thereby, the fixation of the object object 10 can be released by merely pressing the U-shaped member 54, and the processed object 10 can be removed. That is, work can be performed only through a simple and quick action, so that work efficiency can be further improved.

Further, in the present embodiment, for the exposure device 20, the jig mounting portion 22 and the jig 23 are fixed by magnetic force.

Thereby, the jig 23 can be replaced without using a tool. Therefore, the operator's effort is reduced, and work efficiency can be further improved.

Further, in the present embodiment, for the exposure device 20, one of the jig mounting portion 22 and the jig 23 (clamp mounting portion 22) has a magnet, and the other (clamp 23) includes a fixing tool 42 having magnetic properties.

Thereby, the fixing tool 42 is made not only to have the function of the fixing member but also to function as the mounting jig 23, so that the number of parts can be reduced.

Although the preferred embodiment of the present invention has been described above, the above configuration can be modified as follows.

The exposure device 20 described in the above embodiment is merely an example, and the shape and the like of the components can be appropriately changed. For example, as long as the structure of the object 10 is fixed by the elastic deformation spring 55, a member other than the U type can be used. In addition, the position of the spring 55 may be disposed between the contact surface 53a and the U-shaped member 54.

Although the structure in which the spring is used as the elastic body is described in the above embodiment, the workpiece 10 is not limited to the spring as long as it can be fixed by the elastic force, and for example, rubber can be used.

In the above embodiment, the contact terminal for energization inspection is used as the object to be processed 10. However, the present invention is also applicable to other processed articles as long as it is an elongated member.

Although the both ends of the spring member 15 are fixed by the jig 23 in the above embodiment, only one end of the spring member 15 (for example, the upper side in the vertical direction) may be fixed through the jig 23.

Although the exposure device 20 has been exemplified as the processing device having the jig 23 in the above embodiment, the jig 23 of the present invention can be applied in addition to the exposure device 20. For example, in each of the processes (for example, etching processing) of FIGS. 1 and 2, the jig 23 can be employed in a device that grips and moves the object 10 .

10‧‧‧Handling objects

22‧‧‧Clamp installation department

22a‧‧‧ Magnet

23‧‧‧Clamp

40‧‧‧ base end

41‧‧‧Cylinder parts

42‧‧‧Fixed tools

51‧‧‧Insert hole

52‧‧‧ Capillary

53‧‧‧ Small Trails (second part)

53a‧‧‧Contact surface

54‧‧‧U-shaped parts (first part)

55‧‧‧Spring (elastomer)

Claims (8)

A jig for treating an object with an elongated member, holding the workpiece and fixing the same, wherein the jig has an elastic body, and deforming by applying a force to the elastic body, thereby fixing the processed object by elastic force The state of the object is switched to a state in which no elastic force is applied to the processed object, and the jig includes: a first member including two portions disposed opposite each other; and a second member disposed opposite to the first member Between the two portions, the workpiece is fixed between the first member and the second member by the elastic force of the elastic member. The jig of claim 1, wherein the first member has a U-shaped cross section. A processing apparatus, comprising: a base portion; a clamp mounting portion provided in the base portion; and a clamp provided in the first or second aspect of the patent application scope of the clamp mounting portion, wherein the clamp The mounting portion and the clamp are fixed by magnetic force. The processing apparatus according to claim 3, wherein one of the jig mounting portion and the jig has a magnet, and the other includes a fixing tool having a magnetic property. The processing apparatus according to claim 3, wherein a resist layer is formed on a surface of the processed article, and the processing device has an exposure portion that irradiates light to the processed object fixed to the jig. The processing device of claim 5, wherein the jig is rotatable in a direction of a length of the object to be rotated, the jig or the exposure The light portion is movable along the length direction of the processed object. The processing apparatus according to claim 3, wherein the processed object is a member for forming a contact terminal for energization inspection having a spring structure. The processing apparatus according to claim 3, wherein the jig is disposed at both ends of the processed object.