TWI506848B - Method for manufacturing waveguide with high aspect ratio microchannel - Google Patents

Description

Method for manufacturing waveguide tube with high aspect ratio microgroove

The present invention relates to a method of fabricating a waveguide, and more particularly to a method of fabricating a waveguide having a high aspect ratio microchannel.

The waveguide is the main component of microwave conduction, and its uses include radar (Radar) detection and communication for military applications; microwave ovens (heating, drying, thawing) for industrial and residential applications, microwave extraction (extraction, purification, environmental decontamination), Microwave radar (such as: speed measurement, ranging, direction finding, height measurement, collision avoidance), communication (mobile communication, WLAN, satellite communication), can be applied to the rubber industry, food industry, kiln industry, ceramic industry, chemical industry, wood, Paper industry, fiber industry, printing and other industries; medically applied: high frequency to produce arthritis, as well as relieve headache, cancer and tumor pain. Microwave hyperthermia is used for prostate cancer; communication and GPS for scientific and space research applications.

A current waveguide manufacturing technique, as shown in FIG. 1, is disclosed in US Pat. No. 5,229,086 A, which discloses a waveguide 10 adapted to be mounted on a wall of a cooking chamber, and an opening in the antenna of the magnetron and the wall. And comprising a metal tube of a general tubular shape, comprising a cover body and a bottom portion, the cover body comprising: an upper long wall, the front region extending above the wall, the rear region extending above the magnetron; the second side wall And two lateral front and rear walls; the bottom portion includes a bottom wall through which a hole is passed for the antenna to pass; and an opening is opposite to the opening; the cover system can be obtained by swaging and bending a metal plate.

Chinese patent document CN200810024584.0 discloses a microwave oven waveguide The stamping forming method: firstly, the waveguide is drawn into a round shape, and on the mechanical press, the workpiece is drawn and deepened by shaping and correcting the primary forming mold.

The Republic of China patent M278076 composite material waveguide tube joint discloses a composite material waveguide tube joint method. After the complex mold, the composite initial embryo, and the metal plating complex program, the joint of the waveguide is completed, which can have a good guided wave. effect.

However, since the waveguide has a periodic tooth structure design to achieve the effect of the wave blocking, substantially the toothed periodic structure of the waveguide is proportional to its waveguide efficiency, and the above-mentioned prior art discloses The waveguide manufacturing method is incapable of making a complicated and precise tooth structure, and thus the waveguide efficiency cannot be improved.

It is an object of the present invention to provide a waveguide having a high aspect ratio microgroove by applying a 3D printing technique or a micromanufacturing technique in combination with electroforming.

In order to achieve the above object, the method for manufacturing a waveguide of the present invention comprises the steps of: fabricating a first electroforming mold having a plurality of three-dimensional tooth profiles having a high aspect ratio, wherein a through hole is formed in the center thereof. The first electroforming mold is sleeved to the second electroforming mold to be combined into a combined electroforming mold, the second electroforming mold comprising a shaft, the shaft surface corresponding to the shape of the through hole and Tightly joining; forming a waveguide assembly comprising a combined electroforming mold by electroforming a combined electroforming mold; and then removing the combined electroforming mold portion of the waveguide assembly to form a waveguide, and Corresponding to the structure at the second electroforming mold, forming a shaft hole of the waveguide, the structure at the three-dimensional tooth antenna corresponding to the high aspect ratio of the first electroforming mold forms a plurality of high depths of the opening facing the shaft hole Aspect ratio micro-groove.

In one embodiment, the first electroforming mold, the second electroforming mold, or the combined electroforming mold is electrically conductive or subject to the surface electroforming of the combined electroforming mold.

In one embodiment, the through hole of the first electroforming mold is flared.

In one embodiment, the first electroformed mold is made of 3D printing technology or made of a non-metallic material by micromanufacturing. The 3D printed molding material of the first electroforming mold is a composite material having a conductive metal polarity, the composite material comprising a conductive metal powder, a polymer material and an adhesive, and applying energy in the adhesive. Thereafter, the adhesive is reacted to cure the conductive metal powder and the polymer material.

In another implementation, the combination of the first electroforming mold and the second electroforming mold is a gluing method, and the step of removing the combined electroforming mold comprises: separating the first electroforming mold with a suitable solvent and a bonding material between the second electroforming molds; removing the second electroforming mold; and decomposing the first electroforming mold with a suitable solvent.

The invention has at least the following features: the forming method of the invention is suitable for the manufacture of a special and complicated structure of the waveguide, and when the 3D printing technique and the electroforming combination method are used, the 3D printing layer processing method can save the tradition. Molds and high processing costs reduce manufacturing costs. The 3D printing method using the laminated manufacturing method of the present invention can perform the micro size and shape which cannot be formed by the conventional processing method, and the structure design is relatively elastic (such as the difference between the micro-grooves and the micro-grooves with high aspect ratio) 3D high depth. The structure of the aspect ratio micro-trench improves the waveguide conduction efficiency.

10‧‧‧wave tube

20‧‧‧guide tube

21‧‧‧Axis hole

22‧‧‧ micro-groove

221‧‧‧ openings

30‧‧‧First electroforming mould

31‧‧‧through hole

32‧‧‧Three-dimensional tooth type

40‧‧‧Second electroforming mould

41‧‧‧ shaft

50‧‧‧Combined electroforming mould

60‧‧‧guide tube assembly

S10~S40‧‧‧Producer flow of the waveguide

S41~S43‧‧‧Removal of the method steps of the combined electroforming mold part in the waveguide assembly

1 is a perspective view of a waveguide of a prior art formed by a stamping technique; FIG. 2 is a flow chart of a method for manufacturing a waveguide having a high aspect ratio microgroove according to an embodiment of the present invention; FIG. 3 to FIG. 2 is a flow chart of the structure of the embodiment of the present invention; and FIG. 7 is a flow chart of a method for removing the combined electroforming mold according to an embodiment of the present invention.

The embodiment of the present invention will be described with reference to the drawings.

FIG. 2 is a flow chart showing a method of manufacturing a waveguide having a high aspect ratio microgroove according to an embodiment of the present invention, and FIG. 3 to FIG. 6 is a structural flowchart of the embodiment of FIG. 2 of the present invention. The manufacturing method of the waveguide 20 in this embodiment includes the following steps: Step S10, firstly providing a first electroforming mold 30, a center of the first electroforming mold 30 forming a through hole 31, the first electroforming mold The surface of the 30 has a plurality of high aspect ratios of the three-dimensional tooth type 32.

Step S20, secondly, the first electroforming mold 30 is sleeved on a second electroforming mold 40, the second electroforming mold 40 includes a shaft 41, and the surface shape of the shaft 41 corresponds to the first electric The shape of the through hole 31 of the mold 30, and the through hole 31 of the first electroforming mold 30 and the shaft 41 of the second electroforming mold 40 are joined to each other (may be applied by a bonding method, but not limited to the joining method) A combined electroforming mold 50.

Step S30, and secondly, using the combined electroforming mold 50 as a substrate, applying the electroforming technology, placing the combined electroforming mold 50 into a container containing a suitable electroforming liquid (not shown in the drawing) Inside, a metal plating film is deposited on the surface of the combined electroforming mold 50 to form a waveguide assembly 60 including the combined electroforming mold 50.

Step S40, continuing to "remove" the portion of the combined electroforming mold 50 in the waveguide assembly 60 (how to remove the combined electroforming mold 50), so that the remaining portion forms the waveguide 20, and The position of the second electroforming mold 40 (which has been removed) of the waveguide 20 is corresponding to the formation of one of the shaft holes 21 of the waveguide 20, and the first electroforming of the waveguide 20 (removed) The high aspect ratio of the three-dimensional toothed 32-position structure of the mold 30 corresponds to a plurality of high-aspect ratio micro-grooves 22 forming the waveguide 20, and the openings 221 of the micro-grooves 22 face the shaft hole 21, And the space of the micro-grooves 22 is preferably between 16:1 and 1:1, and the pitch of the micro-grooves 22 is between 0.2 mm and 2.0 mm, but not limit.

In a further embodiment, the first electroforming mold 30 and the second electroforming mold 40 Or the combination of the electroforming mold 50 is electrically conductive, or the second electroforming mold 40 may be made of an electrical conductor metal material, or the first electroforming mold 30 and the second electroforming mold 40 may be After the electroforming mold 50 is combined, the surface metallization treatment is performed in advance on the combined electroforming mold 50 before the electroforming operation is performed to facilitate the electroforming operation.

Referring to FIG. 3, on the other hand, in order to facilitate the subsequent process, it is easier to remove (remove) the second electroforming mold 40 in the waveguide assembly 60, and the second electroforming mold 40 The shaft 41 (or the through hole 31 of the first electroforming mold 30) is flared to form a guiding angle.

It is worth mentioning that, in an embodiment, the first electroforming mold 30 is made by a 3D printing technology, and the molding material for forming the 3D printing may be a plastic material or may have A conductive metal polar composite material, which may include a conductive metal powder, a polymer material, and an adhesive, and cure the conductive metal powder and the polymer material after applying the adhesive energy.

On the other hand, the first electroforming mold 30 is made of a non-metallic material by micromanufacturing to form a micro-three-dimensional tooth type 32 and is subsequently facilitated by the waveguide assembly 60. The progress of the first electroforming mold 30 is removed.

Please refer to FIG. 7 for a flow chart of a method for removing the electroforming mold according to an embodiment of the invention. In a further embodiment, the step of removing the combined electroforming mold 50 includes: in step S41, selecting a suitable solvent to separate the first electroforming mold according to the bonding material of the first electroforming mold 30 and the second electroforming mold 40. 30 and the second electroforming mold 40.

In step S42, the second electroforming mold 40 is removed from the waveguide assembly 60.

Step S43, selecting a suitable solvent according to the material of the first electroforming mold 30 to decompose the first electroforming mold 30. One of the specific methods is to remove the curing effect of the first electroforming mold 30. The first electroforming mold 30 is formed into a powder or a fluid, and the removed The second electroforming mold 40 is discharged at a position.

In view of the above, the advantages of the present invention are at least: the present invention is compatible with the 3D printing technology and the electroforming forming method, and is very suitable for the manufacture of a waveguide tube of a special and complicated structure, and the 3D printing method for applying the laminated layer of the present invention. The micro-size and shape that can not be formed by the conventional processing method are relatively elastic in the structural design, for example, the difference between the micro-groove and the micro-groove having a high aspect ratio can be made, and the stereoscopic high aspect ratio microgroove can be formed. The structure of the groove can improve the waveguide conduction efficiency. In addition, the use of 3D printing lamination processing can save traditional molds and high processing costs, and reduce manufacturing costs.

The embodiments or examples of the technical means adopted by the present invention are not intended to limit the scope of implementation of the present patent. That is, the equivalent changes and modifications made in accordance with the scope of the patent application of the present invention or the scope of the invention are covered by the scope of the invention.

S10~S40‧‧‧Producer flow of the waveguide

Claims (12)

A method for manufacturing a waveguide having a high aspect ratio microgroove, the method comprising: providing a first electroforming mold having a plurality of three-dimensional tooth profiles having a high aspect ratio, wherein a center of the first electroforming mold forms a through hole; The first electroforming mold is sleeved on a second electroforming mold, and the second electroforming mold comprises a shaft surface corresponding to the shape of the through hole and joined thereto to form a combined electroforming mold Forming a waveguide assembly comprising the combined electroforming mold by electroforming the combined electroforming mold; and removing the combined electroforming mold portion of the waveguide assembly to form the waveguide, and Corresponding to the structure at the second electroforming mold, forming a shaft hole of the waveguide, and a structure corresponding to the high aspect ratio of the first electroforming mold, forming a plurality of high depths of the waveguide The aspect ratio micro-grooves, the openings of the micro-grooves face the shaft holes and their spaces communicate with each other. The method for manufacturing a waveguide having a high aspect ratio microgroove according to the first aspect of the invention, wherein the first electroforming mold, the second electroforming mold or the combined electroforming mold has conductivity . A method of manufacturing a waveguide having a high aspect ratio microgroove according to the first aspect of the invention, wherein the combined electroforming mold is subjected to surface metallization treatment before performing an electroforming operation. The method for manufacturing a waveguide having a high aspect ratio microgroove according to the first aspect of the invention, wherein the through hole of the first electroforming mold and the shaft of the second electroforming mold are horns Shaped shape. The method for manufacturing a waveguide having a high aspect ratio microgroove according to claim 1, wherein the microchannels have a high aspect ratio of between 16:1 and 1:1. The method for manufacturing a waveguide having a high aspect ratio microgroove according to the first aspect of the invention, wherein the microgrooves have a pitch of between 0.2 mm and 2.0 mm. A method of manufacturing a waveguide having a high aspect ratio microgroove as described in claim 1, wherein the first electroforming mold is made by a 3D printing technique. The method for manufacturing a waveguide having a high aspect ratio microgroove according to claim 7, wherein the 3D printed molding material of the first electroforming mold is a plastic material. The method for manufacturing a waveguide having a high aspect ratio microgroove according to claim 7, wherein the 3D printed molding material of the first electroforming mold is a composite having a conductive metal polarity. material. The method for manufacturing a waveguide having a high aspect ratio microgroove according to claim 9, wherein the composite further comprises a conductive metal powder, a polymer material, and an adhesive, and is applied to the adhesive. The agent energy post-cures the conductive metal powder and the polymer material. A method of manufacturing a waveguide having a high aspect ratio microgroove as described in claim 1, wherein the first electroforming mold is made of a non-metallic material by micromanufacturing. The method for manufacturing a waveguide having a high aspect ratio microgroove according to the first aspect of the invention, wherein the combination of the first electroforming mold and the second electroforming mold is a gluing method, and the removing The step of combining the electroforming mold includes: applying a suitable solvent to the bonding material of the first electroforming mold and the second electroforming mold to separate the first electroforming mold from the second electroforming mold; In addition to the second electroforming mold; and decomposing the first electroforming mold with a suitable solvent.