TWI498587B - Sensing driver module including voice coil actuator - Google Patents

Description

Sensing drive module including voice coil actuator

The present invention relates to an actuator and a sensing drive module, and more particularly to a sensing drive module including a voice coil actuator.

According to the vibration isolation system, it is widely used in various mechanical equipments, and with the advancement of technology, the research scope is increasingly moving towards precision and small fields, in order to keep precision parts from being affected by vibration during production and processing. By reducing the precision, the vibration isolation system with better vibration isolation effect has been developed and manufactured with the production requirements of precision parts.

In addition, as the semiconductor process tends to the nanometer level, the requirements for instrument vibration isolation of the equipment are becoming more stringent, so that the traditional vibration isolation technology has gradually failed to meet the actual needs, so the international advanced vibration isolation manufacturers have invested in active vibration isolation control. The development of technology to assist in the development of high-tech nano-scale instruments and equipment. The active vibration isolation system captures the signal from the vibration sensor and feeds it back to the controller for calculation, and then outputs the control signal to the actuator to generate a control force for suppressing the vibration, thereby reducing the vibration amount and improving the process yield. purpose.

Because the voice coil actuator has the advantages of low rigidity, proportional output current and low price, it has become the product of the most manufacturers of active vibration isolation system actuation components. However, in a conventional voice coil actuator, the connection between the voice coil mover and the voice coil body is a flat elastic piece, and the rigidity of the flat elastic piece is increased, so that the overall rigidity of the active vibration isolation system is also increased. Therefore, when the voice coil actuator is subjected to too much external force (for example, the amount of vibration is too large), the coil is liable to be damaged by the flat elastic piece hitting the bottom of the voice coil.

Therefore, how to provide a sensing drive module including a voice coil actuator can avoid the problem of excessive coil damage and cause coil damage, which is an urgent task in the industry.

In view of the above problems, it is an object of the present invention to provide a sensing drive module including a voice coil actuator that can be applied to an active vibration isolation system. The sensing driving module comprising the voice coil actuator of the invention not only avoids the problem of coil damage caused by too large external force, but also reduces the cost of the active vibration isolation system and enhances the integration performance of the module system, thereby increasing the product Competitiveness.

To achieve the above object, a voice coil actuator according to the present invention includes a body base, a cover body, a magnetic member, a mover assembly, and a coil. The cover body is coupled to the body base to form an accommodation space. The magnetic component is disposed in the accommodating space. The mover assembly is disposed in the accommodating space, and has a mover, a first elastic component and a pressing component. The mover is opposite to the magnetic component, and has a through hole and a first side, and the pressing component is disposed on the through hole. The hole has a first end and a second end opposite to the first end, the first end is arc-shaped and protrudes from the through hole, and the first elastic element is disposed on the first side and has a third end and The third end is abutted against the magnetic element, and the fourth end is located in the through hole and abuts against the second end. The coil ring is disposed on the periphery of the magnetic element and connected to the mover.

To achieve the above object, a sensing drive module according to the present invention includes a voice coil actuator and an accelerometer. The voice coil actuator has a body seat, a cover body, a magnetic element, a mover assembly, and a coil. The cover body is coupled to the body base to form an accommodation space. The magnetic component is disposed in the accommodating space. The mover assembly is disposed in the accommodating space, and has a mover, a first elastic component and a pressing component. The mover is opposite to the magnetic component, and has a through hole and a first side, and the pressing component is disposed on the through hole. The hole has a first end and a second end opposite to the first end, the first end is arc-shaped and protrudes from the through hole, and the first elastic element is disposed on the first side and has a third end and The third end is opposite to the magnetic end, and the fourth end is located in the through hole and abuts against the second end of the pressing member. The coil ring is disposed on the periphery of the magnetic element and connected to the mover. The accelerometer is in close cooperation with the voice coil actuator; wherein the accelerometer is used to measure an axial vibration to output a vibration signal, and the voice coil actuator controls the movement of the mover assembly according to the vibration signal to generate the axial vibration. Control.

In an embodiment, the voice coil actuator further includes a yoke and a positioning frame. The yoke is disposed in the accommodating space and is disposed at a periphery of the magnetic component, and the coil is located between the magnetic component and the yoke. The positioning frame is connected to the cover body and the yoke, and the mover assembly is located inside the positioning frame.

In addition, the voice coil actuator further includes a support member and a pressing member. The support member ring is arranged on the periphery of the mover and is respectively connected with the mover and the positioning frame. The pressing element is disposed on the inner side of the positioning frame, and the supporting element is sandwiched between the positioning frame and the pressing element.

In one embodiment, the mover assembly further has a ball, a locking component and a second elastic component. The at least one side of the mover has a consistent perforation, and the ball is disposed in the through hole and is pressed against the top. One of the sides of the component is recessed, the locking component is disposed in the through hole and closely mates with the through hole, and the second elastic component is disposed between the ball and the locking component.

In one embodiment, the accelerometer has a base, a mass, at least three elastic element groups, a piezoelectric element and a first damping element, and the base is provided with a pressing portion in the axial direction, and the mass has a first side. And a second side of the first side, each of the elastic element groups includes a first elastic element, a second elastic element and a pre-stressing adjustment element, the first elastic element is disposed on the first side of the mass, and the second The elastic element is disposed on the second side of the mass, and the pre-stressing adjustment element is disposed through the first elastic element, the mass and the second elastic element. The piezoelectric element is disposed between the mass and the base and has a direction toward the pressing portion. a first side and a second side opposite to the first side, the first damping element is disposed on at least one side of the piezoelectric element, and when the mass is displaced in the axial direction, the pressing portion of the base makes the piezoelectric The component produces a deformation.

In one embodiment, one side of the body seat of the voice coil actuator has at least three protrusions and a recess, and the accelerometer is tightly coupled to the recess, and the protrusions are evenly disposed on the side.

As described above, in the sensing driving module including the voice coil actuator of the present invention, the accelerometer is closely matched with the voice coil actuator; in addition, the cover of the voice coil actuator is connected with the body base to form a receiving space, and the first end of the pressing member of the mover assembly has an arc shape and protrudes from the through hole, and the third end of the first elastic member abuts against the magnetic member, and the fourth end of the first elastic member Located in the through hole and abutting against the second end of the pressing member, and the coil ring is disposed at the periphery of the magnetic component and connected to the mover; in addition, the accelerometer is used for measuring an axial vibration signal and feeding back to the controller The calculation is performed, and the control signal is output to the voice coil actuator to generate a control force for suppressing the axial vibration. Through the above structural configuration, the sensing drive module including the voice coil actuator of the present invention can not only avoid the problem of coil damage caused by too large external force, but also reduce the cost of the active vibration isolation system and enhance the module. The system integrates performance, which in turn increases the competitiveness of the product.

Hereinafter, a sensing drive module including a voice coil actuator according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings, wherein like elements will be described with the same reference numerals.

Please refer to FIG. 1A to FIG. 1C , which are respectively a schematic diagram, an exploded schematic view and a cross-sectional view of a sensing driving module 1 according to a preferred embodiment of the present invention.

The sensing drive module 1 can be applied to an active vibration isolation system and includes an acceleration gauge 2 and a voice coil actuator 3. The acceleration gauge 2 can be used to measure the acceleration generated by the vibration of an axial direction and output a vibration signal, and feedback to the controller of the active vibration isolation system for calculation, and then output the control signal to the voice coil driver 3 to suppress the axis. The control force to the vibration. In some embodiments, the active vibration isolation system may include a plurality of array sensing drive modules 1 that are respectively mounted in the directions of the X-axis, the Y-axis, and the Z-axis, using at least three directions. The acceleration gauge 2 can respectively measure the acceleration of the three axes, and then output the three axial reverse forces by using the corresponding at least three voice coil actuators 3, respectively, to suppress the vibration of the three axial directions, respectively, to suppress the Measure the item or want to isolate the item to reduce vibration. The sensing driving module 1 proposed by the invention can also be applied to industrial production line monitoring, seismic monitoring, semiconductor and optoelectronic plant floor micro-vibration measurement, or other vibration suppression, and does not limit the application field.

The voice coil actuator 3 of the present embodiment has a body mount 30, and the accelerometer 2 and the voice coil actuator 3 are in close fitting. The side 30a of the body base 30 has at least three protrusions 301 and a recess 302, and the accelerometer 2 and the recess 302 are tightly coupled. Here, the close combination means that the accelerometer 2 is closely placed and coupled to the recess 302. In addition, in order to increase the connection strength, at least one connecting element S1 (for example, a screw) is inserted through the through hole of the body block 30 to be locked on the accelerometer 2 to strengthen the bonding strength. Further, the number of the protruding portions 301 of the present embodiment is three, and is evenly disposed on the side 30a of the body holder 30. By the provision of the protruding portion 301, the accelerometer 2 can be easily assembled in the recess 302 of the voice coil actuator 3, and the accelerometer 2 can be easily separated from the voice coil actuator 3.

Hereinafter, the structure of the accelerometer 2 and the voice coil actuator 3 will be described in detail with reference to the related drawings.

Please refer to FIG. 2A to FIG. 2C , which are respectively a perspective view, a cross-sectional view and an exploded view of an acceleration gauge 2 .

The design of the accelerometer 2 of the present embodiment is capable of measuring the vibration of a frequency of 1/3 or less of its own natural frequency, and the range which can be measured in the case where the rigid member 26 is a copper foil is preferably between 1 Hz and 40 Hz. .

The accelerometer 2 of the present embodiment can be used to measure an axial acceleration. In other words, the acceleration gauge 2 is a single-axis acceleration gauge, for example, an acceleration gauge disposed on the X-Y plane (horizontal plane) can specifically measure the acceleration motion in the Z direction (vertical direction). Of course, the accelerometer set in the X-Z plane can specifically measure the acceleration motion of the Y-axis, and so on.

The accelerometer 2 includes a base 20, a mass 21, at least three sets of elastic element groups 22, a piezoelectric element 23, and a first damping element 24.

The base 20 is provided with a pressing portion 202 in the axial direction (in the Z direction). Therefore, the direction in which the pressing portion 202 is disposed must be in the same direction as the acceleration direction to be measured by the acceleration gauge 2. Although the pressing portion 202 of the embodiment is locked to the base 20 (the pressing portion 202 can be a thimble or a screw), in different embodiments, the pressing portion 202 and the base 20 can be integrated into a single unit. The form of the member, and the shape of the pressing portion 202 only needs to protrude from the surface of the base 20 and can be pressed against the portion of the piezoelectric element 23. Further, the shape of the pressing portion 202 may be a cylindrical shape, a rectangular column, a six-legged column or the like, and the shape thereof is not limited by the shape and arrangement of the drawing of the present embodiment.

In order to define the position of each component in detail, the mass 21 disposed above the base 20 may have at least a first side 21a and a second side 21b, and the first side 21a and the second side 21b are opposite sides, and the mass 21 One side 21a is adjacent to the base 20.

Each of the elastic component groups 22 includes a first elastic component 221, a second elastic component 222, and a pre-stressing component 223. The first elastic member 221 has a first end 221a and a second end 221b, and the first end 221a and the second end 221b are opposite ends. The second elastic member 222 has a first end 222a and a second end 222b, and the first end 222a and the second end 222b are opposite ends. The first elastic element 221 is disposed on the first side 21a of the mass 21, and the second elastic element 222 is disposed on the second side 21b of the mass 21. In addition, the preload adjusting member 223 passes through the first elastic member 221, the mass 21, and the second elastic member 222. Each of the pre-stressing elements 223 is disposed corresponding to each of the elastic elements 221 and 222, and sequentially passes through the mass 21, the elastic elements 221 and 222, and the base 20. Through the arrangement of the first elastic element 221 and the second elastic element 222, the base 20 and the mass 21 can move simultaneously and coaxially and provide accurate vibration signals. The user can indirectly compress the elastic members 221 and 222 by adjusting the distance between the pre-pressure adjusting unit 223 and the base 20, so that the first elastic member 221 and the second elastic member 222 of the elastic member group 22 are pre-stressed. Thereby, the distance between the mass 21 and the base 20 is finely adjusted, and the pressing portion 202 is abutted to a preset position.

Further, the preload adjusting unit 223 can also pre-stress the piezoelectric element 23 by the pressing portion 202 of the base 20. When the piezoelectric element 23 is applied with a certain pre-pressure, it is ensured that the piezoelectric element 23 is always subjected to the force during the measurement (the piezoelectric element 23 is not separated from the pressing portion 202 and the vibration cannot be measured). Therefore, the measurement error can be reduced. It should be noted that the adjustment of the preload may be adjusted according to different materials and structures. If the preloading depth is too shallow, the pressing portion 202 may not be in contact with the piezoelectric element 23 during the measurement process, resulting in an amount. The measured data is incorrect; however, if the pre-pressing is too deep, the piezoelectric element 23 may be plastically deformed or broken. In the present embodiment, the pressing force of the piezoelectric element 23 by the pressing portion 202 is, for example, 0.75 mm.

It is to be noted that the three elastic element groups 22 of the present embodiment have the same height and are spaced apart and uniformly disposed, so that the elastic element group 22 can provide a force in the Z direction (vertical direction) of the mass 21 (inverse) The weights of the masses 21 of the elastic element groups 22 are also the same, and the masses 21 are arranged in parallel with the base 20. Therefore, if the number of the elastic element groups 22 of other embodiments is adjusted, the arrangement should also be such that the mass 21 can be uniformly applied and the mass 21 can be disposed in parallel with the base 20.

Except for the arrangement of the arrangement, both ends of the elastic element group 22 of the present embodiment are cut flat. In short, the first elastic element 221 and the second elastic element 222 are respectively leveled at both ends of the mass 21 and the base 20 so that the mass 21 can be disposed parallel to the base 20, and the overall measurement can be increased. Accuracy. In detail, the term "cut" herein means that the elastic members 221, 222 are leveled according to the surface of the mass 21 and the base 20 such that the elastic members 221, 222 are perpendicular to the cut. In addition, in an unstressed state, the first elastic member 221 will cause the mass 21 to assume a state in which the resultant force is zero (the mass 21 can be suspended). In addition, the first elastic element 221 and the second elastic element 222 of the embodiment are each a spring and are springs of the same length, but in other embodiments, they may be elastic pieces or other equivalent elastic elements, not The embodiment is a limitation.

In order to match the elastic component group 22 described above, the accelerometer 2 of the present embodiment may further include at least three fixing components 251, at least three first fixing seats 252, at least three second fixing seats 253, and at least three third fixings. A seat 254 is provided for the sets of elastic elements 22. Here, the three fixing members 251, the three first fixing seats 252, the three second fixing seats 253 and the three third fixing seats 254 are used together with the three elastic element groups 22 as an example.

The first fixing bases 252 are disposed on the second side 21b of the mass 21, the second fixing bases 253 are disposed on the first side 21a of the mass 21, and the third fixing bases 254 are disposed on the base 20 toward the mass One side of block 21. The first fixing seat 252, the second fixing seat 253 and the third fixing seat 254 of the embodiment may be integrated into the mass 21 or the base 20 into a single component, but may be independent of the mass 21 or in different implementations. It is in the form of the base 20 and is not limited to the drawing of the present case.

In detail, the first end 222a of the second elastic member 222 is sleeved on the fixing member 251, and the first elastic member 221 is sandwiched between the second fixing base 253 and the third fixing seat 254. The component 222 is sandwiched between the fixing component 251 and the first fixing seat 252. In addition, the preload adjusting member 223 is provided with the fixing member 251, the second elastic member 222, the first fixing seat 252, the second fixing seat 253, the first elastic member 221, and the third fixing seat 254.

The fixing member 251, the first fixing seat 252, the second fixing seat 253 and the third fixing seat 254 are disposed in such a manner that the position where the elastic element group 22 is installed is not offset, and in the process of measuring acceleration, the elastic element Group 22 also does not create additional displacement or skew, and also reduces the oscillating effect of the measurement of the elastic component group 22 to ensure that the measured data is more accurate.

The piezoelectric element 23 is disposed between the mass 21 and the base 20. In detail, the piezoelectric element 23 has a first side 23a and a second side 23b opposite to the first side 23a, and the first side 23a of the piezoelectric element 23 is provided with respect to the pressing portion 202.

The following table shows the piezoelectric elements 23 and their material parameters that may be selected, but is not limited by the type of these piezoelectric elements. <TABLE style="BORDER-BOTTOM: medium none; BORDER-LEFT: medium none; BORDER-COLLAPSE: collapse; BORDER-TOP: medium none; BORDER-RIGHT: medium none; mso-border-alt: double windowtext 1.5pt; Mso-yfti-tbllook: 1184; mso-padding-alt: 0cm 5.4pt 0cm 5.4pt; mso-border-insideh: 1.5pt double windowtext; mso-border-insidev: 1.5pt double windowtext" class="MsoTableGrid" border= "1" cellSpacing="0" cellPadding="0"><TBODY><tr><td> </td><td> density (Kg/ m³) </td><td > Young's coefficient (N/ m²) </td><td> Pusong ratio</td></tr><tr><td> C3604 </td><td> 8500 < /td><td> 9.7 × 10¹⁰</td><td> 0.31 </td></tr><tr><td> PZT -5H </td><td> 7700 </td><td> 5.1×10¹⁰</td><td> 0.31 </td></tr><tr><td> PDMS4207 </td><td> 980 < /td><td> 0.4 × 10⁶</td><td> 0.5 </td></tr><tr><td> SUS304 </td><td> 8000 </ Td><td> 19 ×10¹⁰</td><td> 0.29 </td></tr><tr><td> SCM435 </td><td> 8000 </td ><td> 21 ×10¹⁰</td><td> 0.3 </td></tr></TBODY></TABLE>

Further, the accelerometer 2 of the present embodiment may further include a rigid member 26 (for example, a metal foil), and the rigid member 26 is disposed on the second side 23b of the piezoelectric member 23. The rigid element 26 is provided for the purpose of increasing the rigidity of the piezoelectric element 23. For example, the rigid member 26 can be attached to the opposite side of the piezoelectric element 23 to be pressed (the rigid member 26 can be attached to the negative end of the piezoelectric element 23 through an epoxy resin) to increase the rigidity of the piezoelectric element 23. The piezoelectric element 23 is prevented from being damaged. Another purpose of the rigid element 26 is to increase the rigidity of the mass 21 support. Therefore, when the supporting rigidity of the mass 21 is increased, the natural frequency of the acceleration gauge 2 as a whole is increased, so that the measurable bandwidth of the accelerometer 2 is also increased. In addition, the accelerometer 2 can adjust the natural frequency of the accelerometer 2 as a whole by increasing or decreasing the thickness or the number of the rigid members 26.

It is to be noted that although the piezoelectric element 23 and the rigid element 26 are exemplified in the embodiment, a piezoelectric element 23 and a different number of rigid elements 26 may be overlapped according to different requirements to achieve different Measurement purposes. The following table is a possible experimental example, and the "thickness" in the table is the thickness of the rigid member 26 and the piezoelectric element 23 after being superposed. Additionally, the rigid element 26 described in the table is a thin copper sheet. <TABLE style="BORDER-BOTTOM: medium none; BORDER-LEFT: medium none; BORDER-COLLAPSE: collapse; BORDER-TOP: medium none; BORDER-RIGHT: medium none; mso-border-alt: double windowtext 1.5pt; Mso-yfti-tbllook: 1184; mso-padding-alt: 0cm 5.4pt 0cm 5.4pt; mso-border-insideh: 1.5pt double windowtext; mso-border-insidev: 1.5pt double windowtext" class="MsoTableGrid" border= "1" cellSpacing="0" cellPadding="0"><TBODY><tr><td> </td><td> A rigid component with a piece of piezoelectric element</td><td> Two rigid components Piezoelectric element</td><td> three rigid elements with a piece of piezoelectric element</td></tr><tr><td> thickness</td><td> 0.43mm </td><td > 0.74mm </td><td> 0.95mm </td></tr><tr><td> natural frequency</td><td> 170.5Hz </td><td> 299.5Hz </td> <td> 385.5Hz </td></tr><tr><td> Sensitivity (±10%) </td><td> 82.5V/g </td><td> 56.5V/g </td ><td> 36.8V/g </td></tr><tr><td> Bandwidth (±10%) </td><td> 2～52Hz </td><td> 2～96Hz < /td><td> 1~153Hz </td></tr><tr><td> Bandwidth (±3dB) </td><td> 0.75-92Hz </td><td> 0.75-169Hz </td><td> 0.25-237Hz </td></tr></TBODY></TABLE>

In addition, the first damper element 24 is attached to the first side 23a of the piezoelectric element 23. In other words, the first damper element 24 of the present embodiment is disposed between the mass 21 and the base 20 and is disposed on the first side 23a of the piezoelectric element 23. In detail, the first damper element 24 is disposed between the piezoelectric element 23 and the pressing portion 202 of the base 20 . The material of the first damping element 24 may be composed of rubber, silicone, elastomeric polymer or a combination thereof, but is not limited by such materials. The actual material selection of the first damping element 24 will be adjusted according to different needs. In addition to adjusting the damping coefficient of the entire acceleration gauge 2, the first damping element 24 can also increase the overall damping coefficient, so that the frequency of response is more gradual, so the range of the measurable bandwidth becomes larger. In addition, the first damper element 24 can also directly contact the piezoelectric element 23 as the pressing portion 202 of the insulating base 20, thereby preventing the piezoelectric element 23 from being short-circuited or damaged.

In various embodiments, the first damping element 24 and the rigid element 26 can also be disposed on the second side 23b (not shown) of the piezoelectric element 23. Further, the first damper element 24 can be disposed over the rigid element 26 (corresponding to the rigid element 26 being disposed between the first damper element 24 and the piezoelectric element 23), which can suppress the resonance phenomenon of the rigid element 26. If the first damper element 24 is provided on the other side 23a of the piezoelectric element 23, the resonance phenomenon of the rigid element 26 can be suppressed. Although both of the above settings affect the overall sensitivity of the accelerometer, they can increase the bandwidth of the measurement. Therefore, preferably, it is necessary to select a suitable damping parameter (i.e., select the first damping element 24 of appropriate thickness or softness) to achieve the desired sensitivity and bandwidth.

In addition, the accelerometer 2 of the present embodiment may further include a second damper element 24a disposed on a side of the rigid element 26 with respect to the piezoelectric element 23. Here, the first damper element 24 is disposed between the piezoelectric element 23 and the abutting portion 202, and the second damper element 24a is disposed at the second side 26b of the rigid element 26. In other words, each of the rigid members 26 of the present embodiment is provided with a damping member (i.e., 24, 24a).

Therefore, with the configuration of the present embodiment, it is possible to provide a structure simplification (less components are employed) and assembly is easy, so that the cost of the acceleration gauge 2 of the present embodiment is relatively low. Further, when the accelerator 2 is actually operated, when the mass 21 has a displacement in the axial direction due to vibration, the pressing portion 202 of the base 20 causes a deformation of the piezoelectric element 23. Then, the acceleration gauge 2 can convert the deformation into a voltage signal (or a charge signal), and feed it back to a controller (not shown) for calculation, and then output a control signal to the voice coil actuator 3 to generate a suppression axial direction. The control of vibration.

In addition, please refer to FIG. 3A to FIG. 3C , which are respectively a perspective view, a cross-sectional view and an exploded view of a voice coil actuator 3 according to a preferred embodiment of the present invention.

As described above, the voice coil actuator 3 of the present embodiment has a body holder 30, and the accelerometer 2 and the voice coil actuator 3 are in close fitting. The side 30a of the body base 30 has at least three protrusions 301 and a recess 302, and the accelerometer 2 and the recess 302 are tightly coupled. In addition, in order to increase the connection strength, at least one connecting element S1 (for example, a screw) is inserted through the through hole of the body block 30 to be locked on the accelerometer 2 to strengthen the bonding strength. Further, the number of the protruding portions 301 of the present embodiment is three, and is evenly disposed on the side 30a of the body holder 30. By the provision of the protruding portion 301, the accelerometer 2 can be easily assembled in the recess 302 of the voice coil actuator 3, and the accelerometer 2 can be easily separated from the voice coil actuator 3.

In addition, the voice coil actuator 3 further includes a cover body 31, a magnetic member 32, a yoke 33, a positioning frame 34, a mover assembly 35 and a coil 36. In addition, the voice coil actuator 3 of the present embodiment further includes a supporting member 37 and a pressing member 38. The material of the body seat 30, the cover body 31, the positioning frame 34, the mover assembly 35 and the pressing element 38 may be metal (for example, aluminum or stainless steel) to improve the overall structural strength.

As shown in FIG. 3B, the cover body 31 is coupled to the body base 30 to form an accommodation space (not shown in FIG. 3B). The side faces of the cover body 31 and the body base 30 of the embodiment respectively have at least one through hole (not shown in FIG. 3B ), and are disposed through the through holes through at least one connecting component S2 (for example, a screw) to cover the cover body 31 and the body. The seat 30 is connected to the lock. The number of the connecting elements S2 of the present embodiment is two, which is of course limited to the extent that the cover 31 can be tightly connected to the body base 30.

The magnetic element 32 and the yoke 33 are both disposed in the accommodating space, and the coil 36 is located between the magnetic element 32 and the yoke 33 (not in direct contact with each other). Here, as shown in FIG. 3C, the magnetic member 32 is a cylindrical permanent magnet, and the yoke 33 is made of a magnetic conductive material, and the yoke 33 is annularly provided on the outer periphery of the magnetic member 32 (ie, the magnetic member 32 is located at the yoke). The inner ring of the iron 33) guides and changes the direction in which the coil 36 and the magnetic element 32 generate a magnetic field.

The positioning frame 34 is connected to the cover body 31 and the yoke 33, and the positioning frame 34 is located inside the cover body 31, and the mover assembly 35 is located inside the positioning frame 34. The yoke 33 and the magnetic element 32 are located in the accommodating space formed by the body base 30, the cover body 31 and the positioning frame 34, and the positioning of the coil 36 is provided by the positioning frame 34, so that the magnetic element 32 and the coil are provided. There is a gap between 36, and there is also a gap between the coil 36 and the yoke 33 to prevent the coil 36 from directly contacting the yoke 33 and the magnetic element 32.

The mover assembly 35 is disposed in the accommodating space. The mover assembly 35 of the present embodiment includes a mover 351, a first elastic member 352 and a pressing member 353. The mover 351, the first elastic member 352 and the pressing member 353 are located inside the positioning frame 34. In addition, the mover assembly 35 of the embodiment may further include a ball 354, a locking component 355 and a second elastic component 356.

The mover 351 is provided opposite to the magnetic element 32. Here, the relative design indicates that the shapes of the two are not only similar (both cylindrical) but also face-to-face corresponding. The mover 351 has a through hole H (not shown in FIGS. 3A and 3B), a first side 351a and a second side 351b. The first side 351a is the side of the mover 351 facing the magnetic element 32, and the second side 351b is the opposite side of the first side 351a.

The pressing member 353 is disposed on the through hole H and has a first end 353a and a second end 353b opposite to the first end 353a (not shown in FIGS. 3A and 3B). The first end 353a has an arc shape and protrudes from the through hole H. The pressing member 353 can be a ejector pin (or a thimble), and the first end 353a has an arc shape, so that the contact of the pressing member 353 with the object can be in point contact, and when the pressing member 353 is When the object is in contact, if the contact surface of the first end 353a and the object is not perpendicular to 90 degrees, the coil 36 can be prevented from being skewed (the direction away from the Z axis).

The first elastic member 352 is disposed on the first side 351a of the mover 351 and has a third end 352a and a fourth end 352b opposite to the third end 352a (not shown in FIGS. 3A and 3B). The third end 352a abuts against the magnetic element 32, and the fourth end 352b is located in the through hole H and abuts and connects the second end 353b of the pressing member 353. The purpose of the first elastic member 352 is to provide an elastic force of the pressing member 353 to the outer top when the vertical external force applied to the pressing member 353 disappears, so that the mover assembly 35 is restored to its original state.

The coil 36 is looped around the periphery of the magnetic member 32 and connected to the mover assembly 35. In the present embodiment, the coil 36 is wound around the periphery of a fixed ring 361 (for example, a copper ring) to be connected to the mover 351 through the fixed ring 361. In order to strengthen the strength of the connection between the coil 36 and the mover 351, the inner ring of the mover 351 and the fixed ring 361 of the present embodiment is glued and fixed by an adhesive. Therefore, when the mover 351 moves, the fixed ring 361 and the coil 36 can be moved. Conversely, when the fixed ring 361 and the coil 36 move, the mover 351 can also be moved.

In addition, at least one side of the mover 351 of the present embodiment has a continuous through hole h (not shown in FIGS. 3A and 3B), and the ball 354 is disposed in the through hole h and abuts against one of the sides of the pressing member 353. Groove (due to the complexity of the drawing, the groove of Figure 3B is not marked with a code). Here, the ball 354 is, for example, a steel ball, and the strength of the connection between the mover 351 and the pressing member 353 can be increased by being fitted into the groove on the side surface of the pressing member 353. In addition, the locking member 355 is also disposed in the through hole h and closely fits the through hole h. Here, the locking component 355 is a screw, and the corresponding hole is provided in the through hole h, so that the locking component 355 can be locked in the through hole h to be tightly coupled with the through hole h. Further, the second elastic member 356 is disposed between the ball 354 and the locking member 355. Here, one end of the second elastic member 356 abuts against the ball 354, and the other end thereof abuts against the locking member 355. Therefore, the relative force applied to the ball 354 by the locking member 355 and the second elastic member 356 can fix the relative positions of the mover 351 and the pressing member 353.

The support member 37 is, for example, a rubber ring having elasticity and is disposed around the periphery of the mover 351 and coupled to the mover 351 and the retainer 34, respectively, to provide support when the mover assembly 35 is moved. However, in order to strengthen the connection strength between the support member 37 and the mover 351, the present embodiment not only inserts the inner ring of the support member 37 into the outer ring of the mover 351, but also bonds the support member 37 to the mover 351 by means of an adhesive. The support member 37 can be secured between the mover 351 and the keeper 34 to provide a supporting force. In addition, the pressing member 38 is disposed on the inner side of the positioning frame 34, and the supporting member 37 is interposed between the positioning frame 34 and the pressing member 38. Here, the pressing member 38 is a pressing ring and is disposed on the inner side of the positioning frame 34 such that the pressing member 38 and the positioning frame 34 can clamp the outer ring of the supporting member 37 to fix the mover 351 through the support member 37 and The relative position of the coil 36 and the keeper 34.

In this embodiment, as shown in FIG. 3B, the relative positions of the mover 351 and the pressing member 353 can be fixed by the lateral force applied by the locking member 355, the second elastic member 356, and the ball 354. When the external force of the pressing member 351 due to the vertical direction (Z-axis direction) is too large to exceed the critical force that the voice coil actuator 3 can withstand, the mover assembly 35 can be moved to the magnetic member by the first elastic member 352. The direction of 32 is retracted to prevent the coil 36 from being damaged by the magnetic element 32 or the yoke 33 when the coil 36 is moved by the mover 351 to retract, thereby achieving the effect of safety protection.

Further, when the acceleration gauge 2 measures the vibration of the axial direction and feeds it back to the controller for calculation, a control signal is output to the voice coil actuator 3 to generate a control force for suppressing the axial vibration. Here, when the voice coil actuator 3 needs to output a reverse force according to the vibration signal (control signal) to suppress the vibration in the axial direction (for example, the Z-axis direction), the magnetic member 32 and the coil 36 are magnetically affected. The interaction causes relative movement. Since the magnetic member 32 is fixed to the yoke 33, the coil 36 (and the fixed ring 361) generates upper and lower displacements (balance the vibration of the Z-axis), thereby causing the mover 351 to move up and down. To suppress the vibration in the axial direction.

It is worth mentioning that when the voice coil actuator 3 is used to suppress the vibration of the Z-axis, since the mover 351 is placed in the horizontal direction (for example, the X-Y plane), the mover 351 does not have a problem of lateral tilt. However, when the vibration in the horizontal direction is to be balanced, the direction in which the mover 351 is placed is upright. Therefore, the mover 351 cannot be tilted when it is not stressed, otherwise there is a problem of lateral tilt, causing the mover 351 to move. When the external force vibration is suppressed, an error occurs, which affects the accuracy of the active vibration isolation system. Therefore, in the present embodiment, the center of gravity distribution of the mover 351 is designed and controlled through accurate simulation calculation, whereby the problem of lateral tilt of the mover 351 can be solved.

In summary, in the sensing driving module including the voice coil actuator of the present invention, the accelerometer is closely matched with the voice coil actuator; in addition, the cover of the voice coil actuator is connected with the body base to form a receiving space, and the first end of the pressing member of the mover assembly has an arc shape and protrudes from the through hole, and the third end of the first elastic member abuts against the magnetic member, and the fourth end of the first elastic member Located in the through hole and abutting against the second end of the pressing member, and the coil ring is disposed at the periphery of the magnetic component and connected to the mover; in addition, the accelerometer is used for measuring an axial vibration signal and feeding back to the controller The calculation is performed, and the control signal is output to the voice coil actuator to generate a control force for suppressing the axial vibration. Through the above structural configuration, the sensing drive module including the voice coil actuator of the present invention can not only avoid the problem of coil damage caused by too large external force, but also reduce the cost of the active vibration isolation system and enhance the module. The system integrates performance, which in turn increases the competitiveness of the product.

The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

1‧‧‧Sensing drive module
2‧‧ ‧ Acceleration regulations
20‧‧‧Base
202‧‧‧Resistance Department
21‧‧‧ quality block
21a, 23a, 351a‧‧‧ first side
21b, 23b, 26b, 351b‧‧‧ second side
22‧‧‧Flexible component group
221, 352‧‧‧ first elastic element
221a, 222a, 353a‧‧‧ first end
221b, 222b, 353b‧‧‧ second end
222, 356‧‧‧Second elastic element
223‧‧‧Preloading adjustment components
23‧‧‧Piezoelectric components
24‧‧‧First damping element
24a‧‧‧second damping element
251‧‧‧Fixed components
252‧‧‧First mount
253‧‧‧Second mount
254‧‧‧ third mount
26‧‧‧Rigid components
3‧‧‧ voice coil actuator
30‧‧‧ body seat
301‧‧‧ protruding parts
30a‧‧‧ side
302‧‧‧ recess
31‧‧‧ Cover
32‧‧‧Magnetic components
33‧‧‧ yoke
34‧‧‧ Positioning frame
35‧‧‧Moving subassembly
351‧‧‧ mover
352a‧‧‧ third end
352b‧‧‧ fourth end
353‧‧‧Resisting components
354‧‧‧Beads
355‧‧‧Locking components
36‧‧‧ coil
361‧‧‧Fixed ring
37‧‧‧Support elements
38‧‧‧Forcing components
H‧‧‧through hole
H‧‧‧through hole
S1, S2‧‧‧ connecting elements

1A to 1C are respectively a schematic, exploded, and cross-sectional view of a sensing driving module according to a preferred embodiment of the present invention. 2A to 2C are respectively a perspective view, a cross-sectional view and an exploded view of an acceleration gauge. 3A to 3C are respectively a perspective view, a cross-sectional view, and an exploded perspective view of a voice coil actuator according to a preferred embodiment of the present invention.

3‧‧‧ voice coil actuator

30‧‧‧ body seat

301‧‧‧ protruding parts

30a‧‧‧ side

31‧‧‧ Cover

32‧‧‧Magnetic components

33‧‧‧ yoke

34‧‧‧ Positioning frame

35‧‧‧Moving subassembly

351‧‧‧ mover

351a‧‧‧ first side

351b‧‧‧ second side

352‧‧‧First elastic element

353‧‧‧Resisting components

354‧‧‧Beads

355‧‧‧Locking components

356‧‧‧Second elastic element

36‧‧‧ coil

361‧‧‧Fixed ring

37‧‧‧Support elements

38‧‧‧Forcing components

S1, S2‧‧‧ connecting elements

Claims (10)

A voice coil actuator includes: a body seat; a cover body coupled to the body base to form an accommodation space; a magnetic component disposed in the accommodation space; a moving subassembly disposed in the accommodation space And having a mover, a first elastic element and a pressing element, the mover is opposite to the magnetic element, and has a through hole and a first side, the pressing element is disposed in the through hole, and has a first end and a second end opposite to the first end, the first end is arc-shaped and protrudes from the through hole, the first elastic element is disposed on the first side, and has a third end And a third end opposite to the third end, the third end abuts against the magnetic component, the fourth end is located in the through hole and abuts the second end; and a coil is disposed on the magnetic component The periphery is connected to the mover. The voice coil actuator of claim 1, further comprising: a yoke disposed in the accommodating space and disposed around the periphery of the magnetic element, wherein the coil is located at the magnetic element and the yoke Between the irons; and a positioning frame connected to the cover body and the yoke, and the mover assembly is located inside the positioning frame. The voice coil actuator of claim 2, further comprising: a support member, the ring is disposed at a periphery of the mover, and is respectively connected to the mover and the positioning frame; and a pressing element is disposed The support member is disposed on the inner side of the positioning frame, and the supporting member is sandwiched between the positioning frame and the pressing member. The voice coil actuator of claim 3, wherein the mover assembly further has a ball, a locking component and a second elastic component, the movable body having a consistent perforation on at least one side thereof. The ball is disposed in the through hole and abuts against a recess of one side of the pressing member, the locking component is disposed in the through hole and closely mates with the through hole, and the second elastic component is disposed on the circle Between the bead and the locking element. A sensing drive module includes: a voice coil actuator having: a body seat; a cover body coupled to the body base to form an accommodation space; a magnetic component disposed in the accommodation space; The subassembly is disposed in the accommodating space and has a mover, a first elastic component and a pressing component, the mover is opposite to the magnetic component, and has a through hole and a first side, the pressing The component is disposed on the through hole, and has a first end and a second end opposite to the first end, the first end is arc-shaped and protrudes from the through hole, and the first elastic component is disposed on the first end a third end and a fourth end opposite to the third end, the third end abuts against the magnetic element, the fourth end is located in the through hole and abuts the second end; a coil disposed at a periphery of the magnetic element and coupled to the mover; and an accelerometer configured to closely cooperate with the voice coil actuator for measuring an axial vibration to output a vibration signal The voice coil actuator controls the mover component according to the vibration signal To suppress vibration in the axial direction. The sensing drive module of claim 5, wherein the acceleration gauge has a base, a mass, at least three elastic component groups, a piezoelectric component and a first damping component, the base being on the axis An upward pressing portion has a pressing portion, the mass has a first side and a second side opposite to the first side, and each of the elastic element groups comprises a first elastic element, a second elastic element and a pre-pressure adjustment An element, the first elastic element is disposed on the first side of the mass, the second elastic element is disposed on the second side of the mass, and the pre-stressing element passes the first elastic element, the quality And a second elastic element disposed between the mass and the base, and having a first side facing the pressing portion and a second side opposite to the first side, the first The damping element is disposed on at least one side of the piezoelectric element, and the pressing portion of the base causes a deformation of the piezoelectric element when the mass is displaced in the axial direction. The sensing drive module of claim 5, wherein the voice coil actuator further has a yoke and a positioning frame, the yoke is disposed in the accommodating space, and is disposed on the magnetic component The periphery of the coil is located between the magnetic element and the yoke, the positioning frame is coupled to the cover body and the yoke, and the mover assembly is located inside the positioning frame. The sensing drive module of claim 7, wherein the voice coil actuator further has a supporting member and a pressing member, and the supporting member is disposed on a periphery of the mover and respectively movable The positioning member is connected to the positioning frame, and the pressing member is disposed on the inner side of the positioning frame, and the supporting member is sandwiched between the positioning frame and the pressing member. The sensing drive module of claim 8, wherein the mover assembly further has a ball, a locking component and a second elastic component, the movable body having a consistent perforation on at least one side thereof. The ball is disposed in the through hole and abuts against a recess of one side of the pressing member, the locking component is disposed in the through hole and closely mates with the through hole, and the second elastic component is disposed on the circle Between the bead and the locking element. The sensing drive module of claim 6, wherein one side of the body base has at least three protrusions and a recess, the acceleration gauge is tightly coupled with the recess, and the protrusions are evenly disposed on The side.