TWI496896B - Recovery method of copper - free indium gallium selenium residue by heat treatment - Google Patents

Recovery method of copper - free indium gallium selenium residue by heat treatment Download PDF

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TWI496896B
TWI496896B TW103115158A TW103115158A TWI496896B TW I496896 B TWI496896 B TW I496896B TW 103115158 A TW103115158 A TW 103115158A TW 103115158 A TW103115158 A TW 103115158A TW I496896 B TWI496896 B TW I496896B
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indium gallium
copper indium
powder
gallium selenide
copper
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TW103115158A
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TW201540844A (en
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Hsing I Hsiang
Wei Hsiang Hsu
Chung Yen Chiang
Wei Sheng Chen
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Univ Nat Cheng Kung
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熱處理銅銦鎵硒殘餘靶材之回收方法Method for recovering heat-treated copper indium gallium selenide residual target

本發明係有關於一種熱處理銅銦鎵硒殘餘靶材之回收方法,特別係指一種經由破碎研磨、過篩、氧化焙燒與溶解等程序,於銅銦鎵硒(CIGS)氧化焙燒過程中通以氧化氣氛,使其黃銅礦結構部份分解為氧化金屬,蒸發之氧化硒蒸氣可藉由冷凝而富集,其餘之氧化銦、氧化鎵與硒酸銅可利用硫酸溶解回收富集,在溶蝕過程中不需使用加熱及大量氧化劑之添加即可完全溶解形成銅銦鎵離子水溶液,進而可再次製備CIGS粉末,藉此方式回收CIGS殘餘靶材,可達到資源永續之目的。The invention relates to a method for recovering a heat-treated copper indium gallium selenide residual target, in particular to a method for oxidizing roasting of copper indium gallium selenide (CIGS) through a process such as crushing, sieving, oxidizing roasting and dissolving. Oxidizing atmosphere, the chalcopyrite structure is partially decomposed into oxidized metal, and the evaporated oxidized selenium vapor can be enriched by condensation. The remaining indium oxide, gallium oxide and copper selenate can be recovered and concentrated by sulfuric acid, and dissolved. In the process, the copper indium gallium ion aqueous solution can be completely dissolved without using heating and a large amount of oxidizing agent, and the CIGS powder can be prepared again, thereby recovering the residual target of CIGS, thereby achieving the purpose of sustainable resources.

銅銦硒(CIS)與銅銦鎵硒(CIGS)均屬I-Ⅲ-Ⅵ2 族化合物半導體,由於其高光電效率及低成本材料,與非晶矽薄膜太陽能電池其光裂化的效應(Staebler-Wronski effect)相比,銅銦鎵硒(CIGS)光伏元件的穩定度與抗輻射特性備受青睞,若與碲化鎘(CdTe)太陽能電池比較,CIGS材料沒有鎘的劇毒污染問題,對於環境亦較為友善。Both copper indium selenide (CIS) and copper indium gallium selenide (CIGS) are I-III-VI 2 compound semiconductors, due to their high photoelectric efficiency and low cost materials, and the photocracking effect of amorphous germanium thin film solar cells (Staebler Compared with the -Wronski effect, the stability and radiation resistance of copper indium gallium selenide (CIGS) photovoltaic elements are favored. If compared with cadmium telluride (CdTe) solar cells, CIGS materials have no toxic pollution problem of cadmium. Also more friendly.

目前薄膜太陽能電池多層膜組多以濺鍍方式製備而成,因此濺鍍靶材優劣直接影響了各膜層性質,故靶材製作研究與技術為最關鍵之製程,與蒸發法相比,濺鍍法具有許多優點,如(1)組成控制較容易;(2)薄膜之緻密性高,附著力是蒸發法製作薄膜之數倍;(3)原材料利用率高,不需要沉積薄膜的地方加以屏蔽,可減少對真空室之污染;(4)薄膜之均勻性 較好,適合大面積生產;然而,以濺鍍法製備銅銦鎵硒(CIGS)薄膜型太陽能電池之製造過程中所使用靶材使用率僅約30%,加上銦鎵金屬為稀有貴重金屬,因此殘餘約70%仍需回收再利用,因此,許多國內外上游至下游之靶材使用,並回收精煉再製,亦成為國內外永續發展技術關鍵之一。At present, the thin film solar cell multilayer film group is mostly prepared by sputtering, so the spoiling target quality directly affects the properties of each film layer, so the target production research and technology is the most critical process, compared with the evaporation method, the sputtering method The method has many advantages, such as (1) composition control is easy; (2) the film has high density, and the adhesion is several times that of the evaporation method; (3) the raw material utilization rate is high, and the film is not required to be shielded. , can reduce the pollution of the vacuum chamber; (4) uniformity of the film Good, suitable for large-area production; however, the use of target materials in the production of copper indium gallium selenide (CIGS) thin film solar cells by sputtering is only about 30%, plus indium gallium metal is a rare precious metal. Therefore, about 70% of the residuals still need to be recycled. Therefore, many domestic and foreign upstream and downstream targets are used and recycled and remanufactured, which has become one of the key technologies for sustainable development at home and abroad.

根據世界與美國專利顯示,少數已提出CIS/CIGS膜組回收專案,而在學術論文中並無CIS/CIGS回收之相關研究,現今已有許多學者對淋蝕黃銅礦結構CuFeS2 的相關研究,藉由添加氯化鐵來還原銅,也有其他學者以氯化鈉與硫酸來侵蝕銅,然而,欲破壞熱力學穩定相之黃銅礦結構,並使其溶解於溶液中,往往要在低pH環境與添加大量氧化劑,才能達到高回收率;除此之外,有人將Ag2 Se透過氣氛熱處理(300℃-650℃),此目的欲先使其結構變得較為鬆散,並可透過不同氧分壓藉以形成Ag金屬與SeO2 ;另有人以硝酸將CIS溶解後,先經電解分離出Cd、Cu與Se元素,再由氧化與蒸餾製成其氧化物,電解後ZnO/InO之溶解溶液經由蒸餾形成ZnO/InO混合粉末。According to the world and US patents, a few have proposed CIS/CIGS membrane group recycling projects, and there is no CIS/CIGS recycling related research in academic papers. Nowadays, many scholars have studied the corrosion of chalcopyrite structure CuFeS 2 . By adding ferric chloride to reduce copper, other scholars use sodium chloride and sulfuric acid to attack copper. However, to destroy the chalcopyrite structure of the thermodynamically stable phase and dissolve it in solution, it is often at low pH. In addition to the environment and the addition of a large amount of oxidant, high recovery rate can be achieved; in addition, Ag 2 Se is heat-treated through the atmosphere (300 ° C - 650 ° C) for the purpose of making the structure looser and transparent. Partial pressure is used to form Ag metal and SeO 2 ; otherwise, after dissolving CIS with nitric acid, the elements of Cd, Cu and Se are separated by electrolysis, and then the oxide is formed by oxidation and distillation, and the dissolved solution of ZnO/InO after electrolysis is completed. A ZnO/InO mixed powder was formed by distillation.

本發明之主要目的係在提供一種低成本、簡易以及高回收率之CIGS殘靶回收製程,直接將廢棄殘餘靶材轉換為高單價之CIGS奈米粉末之熱處理銅銦鎵硒殘餘靶材之回收方法。The main object of the present invention is to provide a low-cost, simple and high-recovery CIGS residual target recovery process for directly converting waste residual target into high-priced CIGS nano powder for heat treatment of copper indium gallium selenide residual target. method.

本發明為了使銅銦鎵硒殘餘靶材完全溶解於溶液中,進而獲得高回收率,先行透過於空氣中預熱處理使CIGS部分氧化,而後再利用硫酸將其溶解為金屬離子,可再將此濾液轉換為高單價之CIGS奈米粉末。In order to completely dissolve the copper indium gallium selenide residual target in the solution, thereby obtaining high recovery rate, the CIGS is partially oxidized by preheating in air, and then dissolved into metal ions by using sulfuric acid, which can be further This filtrate was converted to a high monovalent CIGS nanopowder.

本發明藉由於空氣中熱處理可使銅銦鎵硒殘餘靶材氧化,並 在此階段中產生硒氣揮發物,氣體再予以分離至常溫管壁後冷凝成固態硒,而後以稀硫酸溶液將剩餘金屬氧化物溶解為金屬陽離子溶液,其溶解回收率可達99%,所獲得銅銦鎵離子水溶液仍可作為製備CIGS奈米粉末之前驅溶液,藉由熱升溫(Heating up)法可轉換為CIGS奈米粉末。The invention can oxidize copper indium gallium selenide residual target by heat treatment in air, and At this stage, the volatile matter of selenium is generated, and the gas is separated into the wall of the normal temperature and condensed into solid selenium, and then the remaining metal oxide is dissolved into the metal cation solution by the dilute sulfuric acid solution, and the dissolution recovery rate is up to 99%. The obtained copper indium gallium ion aqueous solution can still be used as a pre-displacement solution for preparing CIGS nano powder, and can be converted into CIGS nano powder by a thermal heating up method.

本發明僅需於400-600℃空氣中焙燒熱處理進行除硒,再以硫酸進行酸蝕,由於製程簡易且回收率可達99%,因而可大幅降低成本、提高回收產品之價值,可達到資源永續利用之目的。The invention only needs to be calcined and heat-treated in air at 400-600 ° C for selenium removal, and then acid etching with sulfuric acid. Since the process is simple and the recovery rate is up to 99%, the cost can be greatly reduced, the value of the recovered product can be increased, and the resource can be achieved. The purpose of sustainable use.

本發明熱處理銅銦鎵硒殘餘靶材之回收方法,其步驟如下:將銅銦鎵硒殘餘靶材經研磨過篩,將研磨過篩後之金屬粉體置於爐中加熱,於400-600℃空氣中焙燒熱處理進行除硒,將四元靶材銅銦鎵硒轉變為銅銦鎵粉末與硒氣體,而硒氣體經由反應器通入還原液中進行分離得到元素硒;再將焙燒後之粉末加入硫酸進行酸蝕溶解,使得銅銦鎵粉末完全溶解於硫酸溶液中,形成銅銦鎵離子水溶液;該銅銦鎵離子水溶液可作為製備銅銦鎵硒奈米粉末之前驅溶液,再藉由熱升溫法將銅銦鎵離子水溶液轉換為銅銦鎵硒奈米粉末。The method for recovering the heat-treated copper indium gallium selenide residual target is as follows: the copper indium gallium selenide residual target is ground and sieved, and the ground metal powder after grinding is placed in a furnace for heating at 400-600 °C air calcination heat treatment to remove selenium, the quaternary target copper indium gallium selenide is converted into copper indium gallium powder and selenium gas, and the selenium gas is separated into the reducing liquid through the reactor to obtain elemental selenium; The powder is added with sulfuric acid for acid etching, so that the copper indium gallium powder is completely dissolved in the sulfuric acid solution to form an aqueous solution of copper indium gallium ion; the copper indium gallium ion aqueous solution can be used as a precursor solution for preparing copper indium gallium selenide powder, and then The thermal heating method converts the aqueous solution of copper indium gallium ions into copper indium gallium selenide nano powder.

本發明熱處理銅銦鎵硒殘餘靶材之回收方法,其中,該硫酸之濃度為1M。The method for recovering a heat-treated copper indium gallium selenide residual target according to the present invention, wherein the concentration of the sulfuric acid is 1M.

本發明熱處理銅銦鎵硒殘餘靶材之回收方法,其中,該焙燒之溫度範圍係為400℃、500℃與600℃,並持溫一至三小時。The method for recovering the heat-treated copper indium gallium selenide residual target of the present invention, wherein the baking temperature ranges from 400 ° C, 500 ° C and 600 ° C, and the temperature is maintained for one to three hours.

本發明熱處理銅銦鎵硒殘餘靶材之回收方法,其中,該爐中通以空氣流量為50ml至1000ml。The method for recovering a heat-treated copper indium gallium selenide residual target according to the present invention, wherein the furnace has an air flow rate of 50 ml to 1000 ml.

本發明熱處理銅銦鎵硒殘餘靶材之回收方法,其中,該酸蝕溫度為80℃-160℃,時間為一小時至四小時。The method for recovering a heat-treated copper indium gallium selenide residual target according to the present invention, wherein the etching temperature is from 80 ° C to 160 ° C for a period of from one hour to four hours.

本發明熱處理銅銦鎵硒殘餘靶材之回收方法,其優點係在:利用回收分離技術,其相對於傳統轉換CIGS為一元金屬之回收製程具有製程簡化,回收成本低,且轉換為CIGS奈米粉末之資源化產品附加價值高,可達到資源永續利用之目的。The method for recovering the heat-treated copper indium gallium selenide residual target of the invention has the advantages that the recycling process is simplified, the process is simplified compared with the traditional conversion CIGS for the one-metal metal, the recycling cost is low, and the conversion is CIGS nanometer. The resource-added products of powder have high added value and can achieve the purpose of sustainable use of resources.

第一圖所示係為本發明實施例直接經1M硫酸酸蝕之金屬回收率。The first figure shows the metal recovery rate directly by 1M sulfuric acid etching in the embodiment of the present invention.

第二圖所示係為本發明實施例回收方法之流程圖。The second figure is a flow chart of the recycling method of the embodiment of the present invention.

第三圖所示係為本發明實施例CIGS殘餘靶材之熱重-熱差分析圖。The third figure shows the thermogravimetric-thermal difference analysis of the CIGS residual target of the embodiment of the present invention.

第四圖所示係為本發明實施例經過400℃焙燒後之X光繞射圖。The fourth figure shows the X-ray diffraction pattern after baking at 400 ° C in the embodiment of the present invention.

第五圖所示係為本發明實施例經過500℃焙燒後之X光繞射圖。The fifth figure shows the X-ray diffraction pattern after baking at 500 ° C in the embodiment of the present invention.

第六圖所示係為本發明實施例經過600℃焙燒後之X光繞射圖。The sixth figure shows the X-ray diffraction pattern after baking at 600 ° C in the embodiment of the present invention.

第七圖所示係為本發明實施例經過400℃焙燒後,再由1M硫酸酸蝕之金屬回收率。The seventh figure shows the metal recovery rate of 1 M sulfuric acid after roasting at 400 ° C in the embodiment of the present invention.

第八圖所示係為本發明實施例經過500℃焙燒後,再由1M硫酸酸蝕之金屬回收率。The eighth figure shows the metal recovery rate after 1500 sulfuric acid etching after baking at 500 ° C in the embodiment of the present invention.

第九圖所示係為本發明實施例經過600℃焙燒後,再由1M硫酸酸蝕之金屬回收率。The ninth graph shows the metal recovery rate after 1600 sulfuric acid etching after being calcined at 600 ° C in the examples of the present invention.

第十圖所示係為本發明實施例之產物經熱處理後所得之單一奈米粉末結晶相分析圖與元素分析圖。The tenth figure shows the crystal phase analysis chart and elemental analysis chart of the single nano powder obtained after heat treatment of the product of the embodiment of the present invention.

有關本發明為達上述之使用目的與功效,所採用之技術手段,茲舉出較佳可行之實施例,並配合圖式所示,詳述如下:本發明在回收高緻密性銅銦鎵硒殘餘靶材的製程中,首先,將塊材研磨成粉末,經過200目篩分後獲得較為均一的粉徑,並置入管型爐中,於氧化氣氛400℃-600℃焙燒一至四小時,在不同焙燒條件下獲得不同硒去除量,再將焙燒後之粉末以1M稀硫酸進行溶解,其中粉與硫酸之比例約為1g:0.2L,於適當溫度下(25-100℃)反應,可獲得CIG離子澄清濾液,作為合成CIGS奈米粉末之前驅溶液,再藉由熱升溫法可得CIGS奈米粉末。The present invention is directed to a preferred and practical embodiment for the purpose of the above-mentioned purposes and functions, and is illustrated in the following drawings. The present invention details the following: The present invention recovers high-density copper-indium gallium selenide. In the process of residual target, firstly, the block is ground into a powder, and after 200 mesh screening, a relatively uniform powder diameter is obtained, and placed in a tubular furnace, and baked in an oxidizing atmosphere at 400 ° C - 600 ° C for one to four hours, in different The amount of selenium removed is obtained under calcination conditions, and the calcined powder is dissolved in 1 M dilute sulfuric acid, wherein the ratio of powder to sulfuric acid is about 1 g: 0.2 L, and the reaction is carried out at a suitable temperature (25-100 ° C) to obtain CIG. The ion clarified filtrate is used as a precursor solution for synthesizing CIGS nanopowder, and then CIGS nanopowder powder can be obtained by a thermal heating method.

說明案例及實施成效Explain the case and implementation effectiveness

根據本發明所運用之技術且可達之成效,茲舉出實施參數說明如下:According to the technology applied by the present invention and the effect of the reachability, the implementation parameters are as follows:

案例一:本實施例將回收高緻密性銅銦鎵硒殘餘靶材之製程中,將塊材研磨成粉,經過200目篩分後獲得較為均一的粉徑,直接置入1M濃度之硫酸中,其中粉與硫酸之比例約為1g:0.2L,於60-100℃溫度下反應一至四小時,反應後濾液之回收率變化量如第一圖所示,分析結果指出銅銦鎵個別回收率會隨溫度及時間增加而有上升的現象,然而在100℃更長酸蝕時間後卻無法使其達到完全回收,可發現經由一般酸蝕法對硒化物並非為高效率處理技術。Case 1: In the process of recovering high-density copper-indium gallium selenide residual target, the block is ground into powder, and after 200 mesh screening, a relatively uniform powder diameter is obtained, which is directly placed in a sulfuric acid concentration of 1 M. The ratio of powder to sulfuric acid is about 1g: 0.2L, and the reaction is carried out at a temperature of 60-100 ° C for one to four hours. The recovery of the filtrate after the reaction is as shown in the first figure, and the analysis results indicate the individual recovery rate of copper indium gallium. It will increase with the increase of temperature and time. However, after 100 °C longer etching time, it can not be completely recovered. It can be found that selenide is not a highly efficient treatment technology through general acid etching.

案例二:本實施例將濺鍍後之CIGS殘餘靶材進行酸蝕溶解,經過粉碎過篩後,經不同焙燒溫度(400℃、500℃與600℃)熱處理,並將焙燒後之粉末量測之成分分析如表一所示,第二圖所示係為整體CIGS殘餘靶材回收方法之流程圖,第三圖所示係為CIGS粉末經過熱重-熱差分析 (TG-DTA)之結果,於350℃放熱峰為CIGS相變為CIS,且過程中不斷有失重現象(~5%),當溫度升至500℃時,其失重明顯增加至15%,顯示其CIGS中Se持續氧化為SeO2 所導致之失重,第四圖所示係為經過400℃焙燒後粉末之X光繞射圖,經過氧化熱處理後獲得CuInSe2 、In2 O3 、Cu9 Ga4 與CuIn3 Se5 等相,第五圖所示係為經過500℃焙燒處理後之X光繞射圖,經較高溫處理後獲得相成分為Cu2 SeO4 、In2 O3 、CuInSe2 、CuSe與Ga2 O3 ,第六圖所示係為經過600℃高溫下所獲得之X光繞射圖,其獲得Cu2 SeO4 、In2 O3 、與Ga2 O3 ,顯示在經過不同溫度焙燒後,其銅銦鎵分別會發生不同程度的氧化。Case 2: In this embodiment, the CIGS residual target after sputtering is subjected to acid etching, after being pulverized and sieved, heat-treated at different baking temperatures (400 ° C, 500 ° C and 600 ° C), and the calcined powder is measured. The composition analysis is shown in Table 1. The second figure shows the flow chart of the overall CIGS residual target recovery method. The third figure shows the result of the thermogravimetry-thermal difference analysis (TG-DTA) of the CIGS powder. At 350 °C, the exothermic peak is CIGS phase change to CIS, and there is constant weight loss (~5%). When the temperature rises to 500 °C, the weight loss increases significantly to 15%, indicating that Se is continuously oxidized in CIGS. The weight loss caused by SeO 2 is shown in the fourth figure as the X-ray diffraction pattern of the powder after calcination at 400 ° C. After oxidation heat treatment, CuInSe 2 , In 2 O 3 , Cu 9 Ga 4 and CuIn 3 Se 5 are obtained . The fifth phase shows the X-ray diffraction pattern after calcination at 500 ° C. After higher temperature treatment, the phase components are Cu 2 SeO 4 , In 2 O 3 , CuInSe 2 , CuSe and Ga 2 O 3 . , as shown in FIG sixth through X-ray diffraction lines of FIG. 600 ℃ high temperature of the obtained, which is obtained Cu 2 SeO 4, In 2 O 3, and Ga 2 O 3 Displayed after calcined at different temperatures, copper indium gallium which are varying degrees of oxidation.

當在不同溫度焙燒過後之粉末,將其置入1M的稀硫酸中進行酸蝕,其回收率變化量如第七、八、九圖所示,可知經500℃焙燒後以1M硫酸酸蝕一至二小時可達最大之銅銦鎵回收率。When the powder is calcined at different temperatures, it is placed in 1M of dilute sulfuric acid for acid etching. The recovery rate is shown in the seventh, eighth and ninth diagrams. It can be seen that after calcination at 500 °C, it is etched with 1M sulfuric acid. The maximum copper indium gallium recovery rate can be achieved in two hours.

案例三:本實施例將案例二所獲得之硫酸鹽(硫酸銅、硫酸銦與硫酸鎵水溶液)作為起始原料,於製備金屬錯合物之前,以150℃下乾燥形成硫酸化金屬鹽,接著添加十八烷基胺至金屬鹽中,以150℃下持溫1小時進行溶解,以十八烷基胺與硒粉(4.2mmol)至於三頸燒瓶當中,並將金屬錯合物加入至此混合溶液後,將反應升溫至130℃持溫一小時,而後並將此反應升溫至250℃反應一小時,反應完成後將溫度降至80℃,並加入25ml 乙醇終止反應,而後以離心機於6000rpm離心5分鐘獲得其粉末,隨後利用乙醇與正己烷反覆將副產物清洗及去除,最終將此粉末分散於正己烷當中,再以6000rpm離心20分鐘,藉以分離出分散性良好之奈米粉末。Case 3: In this example, the sulfate (copper sulfate, indium sulfate and aqueous solution of gallium sulfate) obtained in the second case is used as a starting material, and dried at 150 ° C to form a sulfated metal salt before the preparation of the metal complex, followed by Add octadecylamine to the metal salt, dissolve at 150 ° C for 1 hour, add octadecylamine and selenium powder (4.2 mmol) to a three-necked flask, and add the metal complex to this mixture. After the solution, the reaction was heated to 130 ° C for one hour, and then the reaction was heated to 250 ° C for one hour. After the reaction was completed, the temperature was lowered to 80 ° C, and 25 ml was added. The reaction was terminated by ethanol, and then the powder was obtained by centrifugation at 6000 rpm for 5 minutes in a centrifuge, and then the by-product was washed and removed by using ethanol and n-hexane repeatedly, and finally the powder was dispersed in n-hexane and centrifuged at 6000 rpm for 20 minutes to separate. A nano powder with good dispersibility.

將添加十八烯烷(ODE)藉以取代油胺溶劑體積,並藉由添加過量硒含量Se/(Cu+In+Ga)=4,並於250℃之反應溫度下持溫一小時後,經過6000rpm離心5分鐘獲得其粉末,隨後利用乙醇與正己烷反覆將副產物清洗及去除,最終將此粉末分散於正己烷當中,並於室溫下乾燥至隔夜,而所產出之奈米級硒化銅銦鎵粉末分析結果如第十圖所示。The octadecene (ODE) is added to replace the volume of the oleylamine solvent, and by adding an excess selenium content Se/(Cu+In+Ga)=4, and holding the temperature at a reaction temperature of 250 ° C for one hour, The powder was obtained by centrifugation at 6000 rpm for 5 minutes, and then the by-product was washed and removed by using ethanol and n-hexane repeatedly. The powder was finally dispersed in n-hexane and dried at room temperature until overnight, and the produced nano-selenium was produced. The results of the analysis of copper indium gallium powder are shown in the tenth figure.

綜上所述,本發明確實已達到所預期之使用目的與功效,且更較習知者為之理想、實用,惟,上述實施例僅係針對本發明之較佳實施例進行具體說明而已,該實施例並非用以限定本發明之申請專利範圍,舉凡其它未脫離本發明所揭示之技術手段下所完成之均等變化與修飾,均應包含於本發明所涵蓋之申請專利範圍中。In view of the above, the present invention has achieved the intended use and efficacy, and is more desirable and practical than the prior art, but the above embodiments are only specifically described for the preferred embodiment of the present invention. The present invention is not intended to limit the scope of the invention, and all other equivalents and modifications may be included in the scope of the invention covered by the invention.

Claims (1)

一種熱處理銅銦鎵硒殘餘靶材之回收方法,其步驟如下:將銅銦鎵硒殘餘靶材經研磨過篩,該過篩之篩網為200目,將研磨過篩後之金屬粉體置於爐中加熱,於400-600℃空氣中焙燒熱處理進行除硒,該爐中通以空氣流量為50ml至1000ml,而該焙燒之最佳溫度係為500℃,並持溫一至三小時,將四元靶材銅銦鎵硒轉變為銅銦鎵粉末與硒氣體,而硒氣體經由反應器通入還原液中進行分離得到元素硒;再將焙燒後之粉末加入硫酸進行酸蝕溶解,該硫酸之濃度為1M,而該酸蝕溫度為80℃-160℃,時間為一小時至四小時,使得銅銦鎵粉末完全溶解於硫酸溶液中,形成銅銦鎵離子水溶液;該銅銦鎵離子水溶液可作為製備銅銦鎵硒奈米粉末之前驅溶液,再藉由熱升溫法將銅銦鎵離子水溶液轉換為銅銦鎵硒奈米粉末。A method for recovering a heat-treated copper indium gallium selenide residual target, the steps of which are as follows: the copper indium gallium selenide residual target is ground and sieved, the sieved sieve is 200 mesh, and the sieved metal powder is placed Heating in a furnace, heat-treating at 400-600 ° C in air for selenium removal, the furnace is passed through an air flow of 50 ml to 1000 ml, and the optimum temperature for the calcination is 500 ° C, and the temperature is maintained for one to three hours, The quaternary target copper indium gallium selenide is converted into copper indium gallium powder and selenium gas, and the selenium gas is separated into the reducing liquid through the reactor to obtain elemental selenium; and the calcined powder is added to sulfuric acid for acid etching and dissolution. The concentration is 1M, and the etching temperature is 80° C.-160° C. for one hour to four hours, so that the copper indium gallium powder is completely dissolved in the sulfuric acid solution to form an aqueous solution of copper indium gallium ion; the aqueous solution of copper indium gallium ion It can be used as a precursor solution for preparing copper indium gallium selenide nano powder, and then convert the copper indium gallium ion aqueous solution into copper indium gallium selenide nano powder by a thermal heating method.
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