TWI492320B - Turret inspection machine and method of using the same - Google Patents

Description

Turret type testing machine and using method thereof

The invention relates to a turret type detecting machine and a using method thereof, in particular to a turret type detecting machine for detecting a plurality of electronic components in a fully automated manner and a using method thereof.

In the semiconductor process, fine particles or defects are often generated for some unavoidable reasons, and as the size of the components in the semiconductor process shrinks and the circuit density increases, these tiny defects or particle pairs The influence of circuit quality is also becoming more and more serious. Therefore, in order to maintain the stability of product quality, it is usually necessary to perform defect detection for the semiconductor components produced while performing various semiconductor processes, so as to analyze the root causes of these defects according to the test results. For the reason, the process parameters can be further adjusted to avoid or reduce the occurrence of defects, so as to improve the semiconductor process yield and reliability.

A defect detecting method has been disclosed in the prior art, which comprises the following steps: first, sampling, selecting a semiconductor die as a sample for subsequent defect detection and analysis, and then performing a defect detection, generally speaking, mostly utilizing Appropriate defect detection machine detects all defects on the semiconductor die by scanning in a wide range. Since the number of defects on a semiconductor die is quite large, it is impossible to practice artificially in practice. The method is to perform re-detection by scanning electron microscope. Therefore, for the sake of convenience, most of the manual defect classification will be carried out first. Among all the defects detected, some representative defect types will be sampled, and then the engineer will Manually performing defect re-detection on selected samples, in one step The defects are analyzed for the cause of the defects to find ways to suppress or reduce these defects.

The embodiment of the invention provides a turret type detecting machine and a using method thereof, which can detect a plurality of electronic components in a fully automated manner, so as to effectively solve the problem of the conventional "manually detecting".

A turret detecting machine provided by one embodiment of the present invention includes: a turret module, a feeding module, a first appearance detecting module, a 180 degree steering module, and an electrical The test module, a second appearance detection module and a discharge module. The turret module includes a rotatable mechanism and a plurality of liftable nozzle mechanisms arranged in sequence along the circumference of the rotatable mechanism. The feeding module is adjacent to the turret module, and the feeding module has a plurality of electronic components, wherein each of the electronic components has a package housing and a plurality of exposed housings Conductive pins, and each of the electronic components passes through the feed module to be transferred to a corresponding lower of the liftable nozzle mechanism for the corresponding liftable nozzle mechanism Draw. The first appearance detecting module is adjacent to the turret module and the feeding module for inspecting a first predetermined appearance of each of the electronic components. The 180 degree steering module is adjacent to the turret module and the first appearance detecting module for horizontally rotating the electronic component by 180 degrees. The electrical test module is adjacent to the turret module and the 180 degree steering module for detecting electrical performance of each of the electronic components. The second appearance detecting module is adjacent to the turret module and the electrical test module for inspecting a second predetermined appearance of each of the electronic components. The discharge module is adjacent to the turret module and the second appearance detection module for conveying each of the electronic components into a storage tape.

The turret detecting machine provided by the embodiment of the present invention can transmit the turret module, the feeding module, the first appearance detecting module, and the The 180 degree steering module, the electrical test module, the second appearance detecting module and the discharging module are designed to enable the invention to detect a plurality of electronic components in a fully automated manner .

For a better understanding of the features and technical aspects of the present invention, reference should be made to the accompanying drawings.

1‧‧‧ turret module

10‧‧‧Rotatable mechanism

100‧‧‧Flexible components

101‧‧‧ Lower press

11‧‧‧ Lifting nozzle mechanism

110‧‧‧ nozzle

2‧‧‧Feed module

20‧‧‧Feed conveying mechanism

3A‧‧‧First Position Correction Module

30A‧‧‧First carrier

300A‧‧‧First cushion

31A‧‧‧First top block

4‧‧‧First appearance inspection module

40‧‧‧Rotary turntable

400‧‧‧ accommodating slots

41‧‧‧First image capture device

5‧‧‧180 degree steering module

50‧‧‧180 degree rotary table

51‧‧‧First holding tank

3B‧‧‧Second position correction module

30B‧‧‧Second carrier

300B‧‧‧Second cushion

31B‧‧‧Second top block

6‧‧‧Electrical test module

60‧‧‧Electrical test unit

7‧‧‧Second appearance inspection module

70‧‧‧Mirror

71‧‧‧Second image capture device

8‧‧90 degree steering module

80‧‧90 degree rotating table

81‧‧‧Second holding tank

3C‧‧‧3rd position correction module

30C‧‧‧ third carrier

300C‧‧‧ third cushion

31C‧‧‧ third top block

9‧‧‧Drawing module

90A‧‧‧Tubular storage belt

91A‧‧‧Second discharge conveyor

90B‧‧‧Reel storage belt

91B‧‧‧First discharge conveyor

90C‧‧‧NG storage belt

91C‧‧‧ Third discharge conveying mechanism

E‧‧‧Electronic components

E10‧‧‧ side

E11‧‧‧Product Marking

C‧‧‧Package housing

P‧‧‧conductive pin

E’‧‧‧Normal electronic components

E"‧‧‧Abnormal electronic components

1 is a top plan view of a turret type testing machine of the present invention.

2 is a front elevational view of the turret module of the turret type testing machine of the present invention.

Figure 3 is an enlarged schematic view of a portion A of Figure 2.

4 is a top view of the first, second, and third position correcting modules of the turret type testing machine of the present invention before and after positioning the electronic components.

FIG. 5 is a top view of the first appearance detecting module of the turret detecting machine of the present invention.

6 is a side elevational view of the first appearance detecting module of the turret detecting machine of the present invention.

7 is a top plan view of the 180 degree steering module of the turret type testing machine of the present invention after the electronic component is horizontally rotated 180 and rotated 180.

Figure 8 is a side elevational view of the second appearance detecting module of the turret type testing machine of the present invention.

9 is a top plan view of the 90 degree steering module of the turret type testing machine of the present invention after the electronic component is rotated 90 degrees and rotated 90 degrees.

1 is a schematic top view of the present invention, FIG. 2 is a front view of the turret module, FIG. 3 is an enlarged view of a portion A of FIG. 2, and FIG. FIG. 5 is a top view of the first appearance detecting module, and FIG. 6 is a side view of the first appearance detecting module, FIG. 6 is a top view of the first appearance detecting module, and FIG. 7 is a top view of the 180 degree steering module rotating the electronic components horizontally 180 degrees and 180 degrees after rotation, FIG. 8 is a side view of the second appearance detecting module, and FIG. 9 is a 90 degree steering module for electronic components. A top view of the front and rear 90 rotations 90 degrees. As can be seen from the above figures, the present invention provides a turret type detecting machine, which comprises: a turret module 1, a feeding module 2, a first position correcting module 3A, and a first appearance detecting module. 4. A 180 degree steering module 5, a second position correction module 3B, and an electrical test module 6. A second appearance detecting module 7, a 90 degree steering module 8, a third position correcting module 3C, and a discharging module 9.

First, as shown in FIG. 1 to FIG. 3, the turret module 1 includes a rotatable mechanism 10 and a plurality of liftable nozzle mechanisms 11 arranged in a ring shape along the circumference of the rotatable mechanism 10. Further, the liftable suction nozzle mechanism 11 includes a push-down movement of the lower pressing member 101 to contact the electronic component E (for example, a leadless QFN (Quad Flat No-lead) wafer or a leaded one. The suction nozzle 110 of the SOP (Small Outline Package) wafer, and the rotatable mechanism 10 includes a set of elastic members 100 provided on the suction nozzle 110 for pushing the suction nozzle 110 to be reset. For example, when each lower pressing member 101 pushes down the corresponding liftable suction nozzle mechanism 11, the liftable suction nozzle mechanism 11 can move downward and take advantage of the suction nozzle 110 to suck corresponding electronic components. E (when the elastic member 100 is in a compressed state), and then when the lower pressing member 101 is moved upward to be out of contact with the liftable suction nozzle mechanism 11, each of the liftable suction nozzle mechanisms 11 can pass the corresponding The elastic force pre-stored by the elastic member 100 is restored to the original position, which is the resetting action of the liftable suction nozzle mechanism 11. Furthermore, each of the pressing members 101 can contact a corresponding sensor (not shown), and the sensor can be used to sense and determine whether the lifting nozzle mechanism 11 has completed the resetting action.

Furthermore, as shown in FIG. 1 and FIG. 3, the feeding module 2 is adjacent to the turret module 1, and the feeding module 2 has a plurality of electronic components E, and each electronic component E can pass the feeding module. 2 is conveyed to the lower side of the corresponding liftable suction nozzle mechanism 11 for suction by the corresponding liftable suction nozzle mechanism 11. For example, the feeding module 2 includes a feeding conveying mechanism 20 for conveying a plurality of electronic components E, and has a plurality of nozzles for blowing the electronic components E on the feeding conveying mechanism 20 (not shown). In order to prevent the electronic component E from being caught on the feed conveying mechanism 20. In addition, when the electronic component E can be a leaded SOP wafer, each of the electronic components E has a package housing C and a plurality of conductive pins P exposed from the package housing C.

In addition, as shown in FIG. 1, FIG. 3 and FIG. 4, the first position correction module 3A is adjacent The turret module 1 is disposed between the feeding module 2 and the first appearance detecting module 4, wherein the first position correcting module 3A includes a first carrier 30A for carrying the electronic component E and at least two The first abutting blocks 31A are movably disposed on the first carrier 30A to respectively abut against the opposite side edges E10 of the electronic component E. Furthermore, the first carrier 30A has a first buffer pad 300A for contacting the electronic component E to provide the buffering function of the electronic component E. The first buffer pad 300A is disposed on the first carrier 30A for avoiding electronic components. The possibility that E will directly hit the first carrier 30A. For example, when the electronic component E is driven by the liftable nozzle mechanism 11 to the first carrier 30A of the first position correcting module 3A (as shown in step (a) of FIG. 4), the electronic component E will The first cushion 300A is directly contacted to prevent the electronic component E from directly hitting the first carrier 30A. After the two first abutting blocks 31A of the first position correcting module 3A respectively abut against the opposite sides E10 of the electronic component E (as shown in step (b) of FIG. 4), the electronic component E can be Adjusting to the correct position helps to correct the positional deflection that occurs when the electronic component E is sucked by the liftable suction nozzle mechanism 11.

In addition, as shown in FIG. 1 , FIG. 3 , FIG. 5 and FIG. 6 , the first appearance detecting module 4 is adjacent to the turret module 1 and the feeding module 2 and is located at the first position correcting module 3A and the 180 degree steering mode. Between groups 5 for checking the first predetermined appearance of each electronic component E. Furthermore, the first appearance detecting module 4 includes a rotary turntable 40 and a first image capturing device 41 located above the rotary turntable 40 for capturing a first predetermined appearance. The top end of the rotary turntable 40 has a plurality of receiving slots 400 that are radially arranged and used to receive the electronic component E, and the first predetermined appearance of the electronic component E is the first image capturing device 41 from the electronic component E. The product mark E11 (shown by the English letter "A") is taken from the top end of the package casing C. For example, the electronic component E can be driven by the liftable nozzle mechanism 11 to be transported to the top of the rotary turntable 40 and placed in the corresponding receiving slot 400, and then the electronic component E passes through the rotary turntable 40. Rotating to be transmitted to the lower side of the first image capturing device 41, and then the product mark E11 of the package housing C of the electronic component E can pass An image capturing device 41 performs the capturing to detect the image (for example, whether the electronic component E is the same series of products by reading the product mark E11, or directly determining whether the font of the product mark E11 is clear), and finally detecting The completed electronic component E is again sucked by the rotary dial 40 to be transferred to the liftable suction nozzle mechanism 11.

Furthermore, as shown in FIG. 1 , FIG. 3 and FIG. 7 , the 180 degree steering module 5 is adjacent to the turret module 1 and the first appearance detecting module 4 and is located at the first appearance detecting module 4 and the second position correcting mode. Between the groups 3B for rotating the electronic component E horizontally by 180 degrees. Furthermore, the 180 degree steering module 5 is disposed below the corresponding liftable nozzle mechanism 11, and the 180 degree steering module 5 includes a 180 degree rotation for horizontally rotating the electronic component E by 180 degrees. The stage 50 and a first receiving groove 51 formed on the 180-degree rotating table 50 for accommodating the electronic component E. For example, when the electronic component E passes the detection of the first appearance detecting module 4 and finds that the position of the product mark E11 is reversed, the position of the electronic component E needs to be rotated by 180 degrees through the 180 degree steering module 5. (For example, step (a) to step (b) of Fig. 7), so that the arrangement direction of each electronic component E is uniform.

In addition, as shown in FIG. 1 , FIG. 3 and FIG. 4 , the second position correction module 3B is adjacent to the turret module 1 and disposed between the 180 degree steering module 5 and the electrical test module 6 , wherein the second position The calibration module 3B includes a second carrier 30B for carrying the electronic component E and at least two second movably disposed on the second carrier 30B to respectively abut against the opposite sides E10 of the electronic component E. The top block 31B. Furthermore, the second carrier 30B has a second buffer pad 300B for contacting the electronic component E to provide the buffering function of the electronic component E. The second buffer pad 300B is disposed on the second carrier 30B for avoiding the electronic component. The possibility that E will directly hit the second carrier 30B. For example, when the electronic component E is driven by the liftable nozzle mechanism 11 to the second carrier 30B of the second position correcting module 3B (as shown in step (a) of FIG. 4), the electronic component E will The second cushion 300B is directly contacted to prevent the electronic component E from directly hitting the second carrier 30B. When the two second top abutting blocks 31B of the second position correcting module 3B respectively abut against the opposite sides E10 of the electronic component E (steps of FIG. 4) (b) shows that the electronic component E can be adjusted to the correct position, which helps to correct the positional deviation caused when the electronic component E is sucked by the liftable suction nozzle mechanism 11. It is worth mentioning that if the electronic component E needs to be horizontally flipped by 180 degrees through the 180 degree steering module 5, the position correction needs to be performed by the second position correction module 3B.

In addition, as shown in FIG. 1 and FIG. 3 , the electrical test module 6 is adjacent to the turret module 1 and the 180 degree steering module 5 and located between the second position correction module 3B and the second appearance detection module 7 . The electrical properties of each of the electronic components E are detected by the conductive pins P for electrically contacting the electronic components E. For example, the electrical test module 6 includes a plurality of electrical test units 60 that are sequentially arranged from the second position correction module 3B toward the second appearance detection module 7, and the plurality of electrical test units 60 The electrical performance detection of the plurality of electronic components E can be performed synchronously by electrical contact of a detecting probe (not shown).

Furthermore, as shown in FIG. 1 , FIG. 3 and FIG. 8 , the second appearance detecting module 7 is adjacent to the turret module 1 and the electrical test module 6 and is located in the electrical test module 6 and the 90 degree steering module 8 . Between, for checking the second predetermined appearance of each electronic component E. Furthermore, the second appearance detecting module 7 includes a mirror 70 located below the corresponding liftable nozzle mechanism 11 and a second mirror adjacent to the mirror 70 for capturing a second predetermined appearance. The device 71 is taken, and the second predetermined appearance of the electronic component E is a plurality of conductive pins P drawn by the second image capturing device 71 through the mirror 70 from the electronic component E. For example, by detecting the second appearance detecting module 7, it can be determined whether the positions and sizes of the plurality of conductive pins P of the electronic component E are correct without defects.

In addition, as shown in FIG. 1 , FIG. 3 and FIG. 9 , the 90 degree steering module 8 is adjacent to the turret module 1 and the second appearance detecting module 7 and is located at the second appearance detecting module 7 and the third position correcting module. Between 3C for rotating the electronic component E horizontally by 90 degrees. Furthermore, the 90 degree steering module 8 is disposed below the corresponding liftable nozzle mechanism 11, and the 90 degree steering module 8 includes a water for the electronic component E. A 90-degree rotating table 80 rotated 90 degrees flat and a second receiving groove 81 formed on the 90-degree rotating table 80 for accommodating the electronic component E. For example, if the electronic component E is finally stored by the reel type storage tape 90B, the position of the electronic component E needs to be rotated by 90 degrees by the 90 degree steering module 8 in advance (for example, FIG. 9). Step (a) to step (b)).

In addition, as shown in FIG. 1 , FIG. 3 and FIG. 4 , the third position correction module 3C is adjacent to the turret module 1 and disposed between the 90 degree steering module 8 and the discharge module 9 , wherein the third position correction is performed. The module 3C includes a third carrier 30C for carrying the electronic component E and at least two third tops movably disposed on the third carrier 30C to respectively abut against two opposite sides E10 of the electronic component E. Block block 31C. Furthermore, the third carrier 30C has a third buffer pad 300C for contacting the electronic component E to provide the buffering function of the electronic component E. The third buffer pad 300C is disposed on the third carrier 30C for avoiding electronic components. The possibility that E will directly hit the third carrier 30C. For example, when the electronic component E is driven by the liftable suction nozzle mechanism 11 to the third carrier 30C of the third position correcting module 3C (as shown in step (a) of FIG. 4), the electronic component E will The third cushion 300C is directly contacted to prevent the electronic component E from directly hitting the third carrier 30C. When the two third top abutting blocks 31C of the third position correcting module 3C respectively abut against the opposite sides E10 of the electronic component E (as shown in step (b) of FIG. 4), the electronic component E can be Adjusting to the correct position helps to correct the positional deflection that occurs when the electronic component E is sucked by the liftable suction nozzle mechanism 11. It is worth mentioning that if the electronic component E needs to be rotated 90 degrees by the 90 degree steering module 8, the position correction needs to be performed by the third position correction module 3C.

Furthermore, as shown in FIG. 1 and FIG. 3, the discharge module 9 is adjacent to the turret module 1 and the second appearance detection module 7 and located between the third position correction module 3C and the feed module 2, It is used to transfer each electronic component E into a storage tape. Furthermore, the storage tape of the discharge module 9 is a reel type storage tape for accommodating the electronic components E that must pass through the 90-degree steering module 8 and the third position correction module 3C in sequence. The 90B or one is used for accommodating the tubular storage tape 90A that does not pass through the 90-degree steering module 8 and the third position correction module 3C. For example, the discharge module 9 further includes a first discharge conveying mechanism 91B connected to the reel type storage tape 90B and a second discharge conveying mechanism 91A connected to the tubular storage tape 90A, wherein Each of the electronic components E' judged to be normal by the above inspection can be conveyed to the reel type storage tape 90B by the first discharge conveyance mechanism 91B, or each of the electronic components E' judged to be normal by the above inspection can be The second discharge conveyance mechanism 91A conveys the conveyance to the tubular storage tape 90A. Further, the discharging module 9 further includes a third discharging conveying mechanism 91C adjacent to the turret module 1 and the feeding module 2, which can be used to judge that the inspection cannot be performed abnormally by the above inspection (NG) The electronic component E" is transported to an NG storage tape 90C. Thereby, both the normal electronic component E' and the abnormal electronic component E" can be appropriately classified by the discharge module 9.

Still further, the present invention further includes a method of using one of the turret type testing machines, comprising the steps of: first, transmitting a plurality of electronic components E to the first appearance through the turret module 1 in sequence Detecting module 4 to inspect a first predetermined appearance of each electronic component E; and then, through the turret module 1, to sequentially transmit a plurality of electronic components E that have passed the visual inspection of the first appearance detecting module 4 To the discharge module 9; finally, each of the electronic components E is conveyed into the tubular storage tape 90A by the discharge module 9.

Furthermore, the present invention further includes a method of using another turret type detecting machine, which comprises the following steps: First, a plurality of electronic components E are sequentially transmitted to the electrical test through the turret module 1. The module 6 is configured to detect the electrical performance of each electronic component E; then, through the turret module 1, the plurality of electronic components E that have been electrically tested by the electrical test module 6 are sequentially transferred to the discharge. Module 9; Finally, each of the electronic components E is conveyed into the tubular storage tape 90A or the reel storage tape 90B by the discharge module 9.

Furthermore, the present invention further includes another method of using a turret type detection machine, which comprises the following steps: First, through the turret module 1, Transmitting a plurality of electronic components E to the second appearance detecting module 7 to check a second predetermined appearance of each electronic component E; and then passing through the turret module 1 to pass through the second appearance detecting module 7 The plurality of electronic components E after the visual inspection are sequentially transferred to the discharging module 9; finally, the discharging module 9 is used to transfer each electronic component E to the tubular storage tape 90A or the reel storage tape. Within 90B.

Of course, the method for using the present invention is not limited to the above-mentioned examples. For example, the present invention can also pass the turret module 1 to sequentially pass the first position correction module 3A and the first appearance detection. Module 4, 180 degree steering module 5, second position correction module 3B, electrical test module 6, second appearance detection module 7 (and / or 90 degree steering module 8 and third position correction module 3C) Finally, the discharging operation is performed by the discharging module 9.

[Possible effects of the examples]

In summary, the turret detecting machine provided by the embodiment of the present invention can at least transmit the turret module 1, the feeding module 2, and the first appearance detecting module. 4. The design of the 180 degree steering module 5, the electrical test module 6, the second appearance detecting module 7 and the discharging module 9" (or the first position correcting module 3A and the second position correcting mode) The design of the group 3B, the third position correction module 3C and the 90 degree steering module 8 is such that the invention can detect a plurality of electronic components in a fully automated manner.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the invention, and the equivalents of the present invention are included in the scope of the invention.

1‧‧‧ turret module

10‧‧‧Rotatable mechanism

11‧‧‧ Lifting nozzle mechanism

2‧‧‧Feed module

20‧‧‧Feed conveying mechanism

3A‧‧‧First Position Correction Module

4‧‧‧First appearance inspection module

5‧‧‧180 degree steering module

3B‧‧‧Second position correction module

6‧‧‧Electrical test module

60‧‧‧Electrical test unit

7‧‧‧Second appearance inspection module

8‧‧90 degree steering module

3C‧‧‧3rd position correction module

9‧‧‧Drawing module

90A‧‧‧Reel storage belt

91A‧‧‧First discharge conveyor

90B‧‧‧Tubular storage belt

91B‧‧‧Second discharge conveying mechanism

90C‧‧‧NG storage belt

91C‧‧‧ Third discharge conveying mechanism

E‧‧‧Electronic components

E’‧‧‧Normal electronic components

E"‧‧‧Abnormal electronic components

Claims (13)

A turret type detecting machine comprises: a turret module, the turret module comprising a rotatable mechanism and a plurality of liftable suctions arranged along the circumference of the rotatable mechanism a nozzle module, the feeding module is adjacent to the turret module, and the feeding module has a plurality of electronic components, wherein each of the electronic components has a package housing and a plurality of conductive pins exposed to the package housing, and each of the electronic components is transmitted through the feeding module to a corresponding lower portion of the liftable nozzle mechanism for corresponding The liftable suction nozzle mechanism performs suction; a first appearance detection module, the first appearance detection module is adjacent to the turret module and the feeding module for inspecting each a first predetermined appearance of the electronic component; a 180 degree steering module adjacent to the turret module and the first appearance detection module for horizontally positioning the electronic component Rotating 180 degrees; an electrical test module, the electrical test module adjacent to the a tower module and the 180 degree steering module for detecting electrical performance of each of the electronic components; a second appearance detecting module, the second appearance detecting module adjacent to the turret module and The electrical test module for inspecting a second predetermined appearance of each of the electronic components; and a discharge module adjacent to the turret module and the second appearance The detection module is configured to transfer each of the electronic components into a storage tape. The turret type detecting machine according to claim 1, wherein the liftable suction nozzle mechanism comprises a pusher that is moved downward by a push of the lower press member. a nozzle of the electronic component, and the rotatable mechanism includes a set of elastic members disposed on the nozzle for pushing the nozzle to reset. The turret detecting machine of claim 1, further comprising: a first position correcting module, the first position correcting module being adjacent to the turret module and disposed in the Between the material module and the first appearance detecting module, wherein the first position correcting module includes a first carrier for carrying the electronic component and at least two are movably disposed at the first a first top abutting block on a carrier to respectively abut against opposite sides of the electronic component, and the first carrier has a first contact with the electronic component to provide a buffering function of the electronic component a cushion. The turret detecting machine of claim 1, wherein the first appearance detecting module comprises a rotary turntable and a top of the rotary turntable for capturing the first predetermined a first image capturing device having an appearance, the top end of the rotary dial having a plurality of receiving slots arranged to be radially arranged for receiving the electronic component, and the first predetermined appearance of the electronic component is a product mark drawn by the first image capturing device from a top end of the package housing of the electronic component. The turret type detecting machine according to claim 1, wherein the 180 degree steering module is disposed under the corresponding liftable suction nozzle mechanism, and the 180 degree steering module comprises A 180 degree rotating table for horizontally rotating the electronic component by 180 degrees and a first receiving groove formed on the 180 degree rotating table for accommodating the electronic component. The turret detecting machine of claim 1, further comprising: a second position correcting module, the second position correcting module being adjacent to the turret module and disposed at the 180 Between the steering module and the electrical test module, wherein the second position correction module includes a second carrier for carrying the electronic component and at least two are movably disposed at the a second top abutting block on the two carriers for respectively abutting against opposite sides of the electronic component, and The second carrier has a second cushion that contacts the electronic component to provide buffering of the electronic component. The turret detecting machine of claim 1, wherein the second appearance detecting module comprises a mirror located below the corresponding liftable nozzle mechanism and an adjacent the reflection a second image capture device for capturing the second predetermined appearance, and the second predetermined appearance of the electronic component is the second image capture device passing the mirror to A plurality of said conductive pins drawn on the electronic component. The turret detecting machine of claim 7, further comprising: a 90 degree steering module adjacent to the turret module and the second appearance detecting module a set for rotating the electronic component horizontally by 90 degrees, wherein the 90 degree steering module is disposed under the corresponding liftable suction nozzle mechanism, and the 90 degree steering module includes a A 90-degree rotating table for horizontally rotating the electronic component by 90 degrees and a second receiving groove formed on the 90-degree rotating table for accommodating the electronic component. The turret detecting machine of claim 8, further comprising: a third position correcting module, the third position correcting module being adjacent to the turret module and disposed at the 90 Between the steering module and the discharge module, wherein the third position correction module includes a third carrier for carrying the electronic component and at least two are movably disposed at the third a third top abutting block on the carrier to respectively abut against opposite sides of the electronic component, and the third carrier has a third contact with the electronic component to provide buffering of the electronic component Cushion. The turret type detecting machine according to claim 9, wherein the accommodating tape of the discharging module is used for accommodating through the 90 degree steering module and the first A reel-type storage tape of the electronic component of the three-position correction module or a tubular storage tape for storing the 90-degree steering module and the third position correction module. A method of using a turret detecting machine according to claim 1, comprising the steps of: sequentially transmitting a plurality of said electronic components to said first through said turret module An appearance detecting module for inspecting the first predetermined appearance of each of the electronic components; passing the turret module to pass a plurality of the electronic components after inspection by the first appearance detecting module And sequentially transmitting to the discharge module; and passing the discharge module to transfer each of the electronic components into the storage tape. A method of using a turret detecting machine according to claim 1, comprising the steps of: sequentially transmitting a plurality of said electronic components to said electrical property through said turret module Testing the module to detect the electrical performance of each of the electronic components; and passing the turret module to sequentially transmit the plurality of the electronic components that have passed the detection of the electrical test module to And the discharging module; and passing the discharging module to transfer each of the electronic components into the receiving tape. A method of using a turret detecting machine according to claim 1, comprising the steps of: sequentially transmitting a plurality of said electronic components to said second through said turret module An appearance detecting module for inspecting the second predetermined appearance of each of the electronic components; passing the turret module to pass a plurality of the electronic components after inspection by the second appearance detecting module And sequentially transmitting to the discharge module; and passing the discharge module to transfer each of the electronic components into the storage tape.