TWI492319B - A method and apparatus of wet processor with fragmental detection in a spin dryer - Google Patents

Description

Method and device for detecting fragmentation by wet process equipment rotary dryer

The invention relates to a method and a device for detecting a fragment of a wet processing device rotary dryer, in particular, the detection network detects the impact signal generated by the fragment, so that the rotary dryer stops rotating to avoid more fragmentation.

Generally, the wet process equipment rotary dryer is shown in Fig. 1. Fig. 1 is a perspective view of a conventional wet process equipment rotary dryer. The wet processing device spin dryer 100 enters the process chamber 101 after the wafer holder 102 enters the process chamber 101, and is rotated at a high speed to perform dehydration. The etching liquid or pure water is collected by the processing chamber 101 and discharged through the drain tank 103. If a fragment is generated, the wafer in the process chamber 101 or even the wafer holder 102 will be damaged, resulting in more fragments. U.S. Patent No. 6,073,361 to Doris Kramer et al. teaches a device for detecting the rotational speed of a rotary dryer externally, but does not detect fragmentation. U.S. Patent No. 6,286,524 to Okuchi et al. teaches a method and apparatus for removing the particles on the surface of a wafer by a spin dryer, and does not detect particles of the fragments.

Therefore, there is a need to detect the occurrence of fragments when the spin dryer rotates at a high speed.

The present invention addresses the need for this and proposes a method and apparatus for detecting fragments that can solve the above disadvantages.

The object of the present invention is to provide a method for detecting a fragment by a wet processing device rotary dryer, which detects the generation of fragments when the rotary dryer rotates at a high speed, and avoids more fragmentation to improve the yield.

A second object of the present invention is to provide a device for detecting a fragment of a wet process equipment rotary dryer, which can detect the generation of fragments by a simple and effective device, and reduce equipment costs.

In order to achieve the above and other objects, the first aspect of the present invention teaches a method for detecting a fragment by a wet process equipment spin dryer, which detects the generation of a fragment when the spin dryer rotates the wafer clip at a high speed, and stops rotating to avoid further A plurality of fragments are generated, including: adding a detection net around the outer periphery of the wafer holder, and transforming the deformation tension generated by the fragment collision detection net into an impact signal when the high-speed rotation generates the fragment; the impact signal is controlled by the control circuit to control the rotary dryer. Rotation; the control circuit sends a warning signal to prompt the operator to clear the fragment and repair the detection net; the maintenance is completed and then the spin-drying operation is continued.

Another aspect of the present invention teaches a device for detecting a fragment of a wet-process device rotary dryer, which is disposed on the periphery of the wafer holder and detects the generation of the fragment by using the detection net, and at least includes: a detection net holder, which is a cylinder The upper end and the lower ring are fixed by the struts to fit around the periphery of the wafer holder to enable the wafer holder to rotate therein; a set of detection nets consisting of a set of metal wires, each metal wire One end is fixed to the upper ring, and the other end is fixed to the lower ring, one end of which is connected to the detecting element, and the gap between the metal wires passes through the water or the etching liquid when the spin is dry. The metal wires are stainless steel or plastic, and the gap between the wires is 1 mm to 5 mm, preferably 3 mm, and the diameter is 0.2 mm to 1 mm, preferably 0.5 mm. When there is a fragment, the fragment hits the detection network, and the detecting component converts the deformation tension signal, the impedance change signal or the audio signal generated by the detection network into an impact signal; and a set of control circuit sends a warning signal when receiving the impact signal. And control the spin dryer to stop rotating.

The above and other objects and advantages of the present invention will be more fully understood from the description and appended claims appended claims.

Please refer to FIG. 2, which is a perspective view of a wet filming device for adding a fragment detecting device according to an embodiment of the present invention. The rotary dryer 200 with the fragment detecting device increases the fragment detecting net holder 202 between the processing chamber 101 and the wafer holder 102. The detecting net base 202 is cylindrical, and the upper end is the upper ring 204 and the lower ring. 206, fixed by four pillars 210 to fit around the periphery of the wafer holder to enable the wafer holder 102 to rotate therein; a set of detection nets 208 consisting of a set of metal wires, the metal wires being made of stainless steel or plastic material The gap between the wires is 1 mm to 5 mm, preferably 3 mm. The diameter is from 0.2 mm to 1 mm, preferably 0.5 mm. One end of each metal wire is fixed to the upper ring 204, and the other end is fixed to the lower ring 206, one end of which is connected to the detecting element (not shown), and the gap between the metal wires passes through the water or the etching liquid when the spin is dry, When the fragment is broken, the fragment hits the detection net 208, and the detecting component converts the deformation tension or impedance change generated by the detection net into an impact signal, and the control circuit (not shown) issues a warning signal when receiving the impact signal, and controls The spin dryer stops it from rotating.

Figure 3 shows a side perspective view of the detection net. Figure 3 (A) is a side perspective view of the detection net lying down. Figure 3 (B) is a side perspective view of the detection net upright. The two ends of the detection net base 202 are an upper ring 204 and a lower ring 206, and are fixed by four legs 210-1, 210-2, 210-3 and 210-4.

The features and spirit of the present invention are more clearly described in the detailed description of the preferred embodiments of the present invention, and are not intended to limit the scope of the invention. On the contrary, the intention is to cover various modifications and equivalent arrangements within the scope of the invention as claimed.

100. . . Wet process equipment rotary dryer

101. . . Process chamber

102. . . Wafer clip

103. . . Drainage channels

200. . . Rotary dryer with fragment detection device

202. . . Fragment detection net

204. . . Sheung Wan

206. . . Lower ring

208. . . Detection network

210. . . pillar

Figure 1 is a perspective view of a conventional wet process equipment spin dryer.

Fig. 2 is a perspective view showing the addition of the fragment detecting device of the wet processing apparatus rotary dryer according to the embodiment of the present invention.

Figure 3 shows a side perspective view of the detection net;

Figure 3 (A) is a side perspective view of the detection net lying down;

Figure 3 (B) is a side perspective view of the detection net upright.

101‧‧‧Processing cavity

102‧‧‧ wafer clip

103‧‧‧Drainage trough

200‧‧‧Rotary dryer with fragment detection device

202‧‧‧ Fragment detection network

204‧‧‧Sheung Wan

206‧‧‧The ring

208‧‧‧Detection Network

210‧‧‧ pillar

Claims (8)

A wet process device spin dryer detects a fragment, detects a fragment when the spin dryer rotates the wafer clip at a high speed, and stops rotating to avoid more fragmentation, at least: adding one outside the wafer holder a detection network consisting of a set of metal wires. When a high-speed rotation generates a fragment, the deformation tension generated by the fragment hitting the detection net is converted into an impact signal; the impact signal is controlled by the control circuit to stop the rotary dryer. Rotation; the control circuit sends a warning signal to prompt the operator to clear the fragment and repair the detection net; the maintenance is completed and then the spin-drying operation is continued. The utility model relates to a device for detecting a fragment of a wet processing device, which is arranged on the periphery of the wafer holder and detects the generation of the fragment by using the detection network, and at least comprises: a detection net seat, which is cylindrical and has an upper ring at both ends and a lower ring fixed by the struts to fit around the periphery of the wafer holder to enable the wafer holder to rotate therein; a set of detection nets, consisting of a set of metal wires, one end of each metal wire being fixed to the upper ring, The other end is fixed to the lower ring, one end of which is connected with the detecting component, and the gap between the metal wires causes the water or the etching liquid to pass through when the spin is dry, and the fragment hits the detecting net when the fragment is broken, and the detecting component generates the detecting net. The deformation tension is converted into an impact signal; a set of control circuits, when receiving the impact signal, issue a warning signal and control the rotary dryer to stop rotating. A method or apparatus for detecting a fragment by a wet process apparatus rotary dryer according to claim 1 or 2, wherein the gap between the wires is 1 mm to 5 mm, preferably 3 mm. A method or apparatus for detecting a fragment by a wet process apparatus rotary dryer according to claim 1 or 2, wherein the metal wire has a diameter of 0.2 mm to 1 mm, preferably 0.5 mm. A method or apparatus for detecting a fragment of a wet process apparatus rotary dryer according to claim 1 or 2, wherein the metal wire is stainless steel. The wet process equipment rotary dryer detects the fragment as described in claim 1 or 2 A method or apparatus wherein the wire is a plastic material. A method or apparatus for detecting a fragment by a wet process apparatus rotary dryer according to claim 1 or 2, wherein the impact signal is an impedance change signal. A method or apparatus for detecting a fragment by a wet process apparatus rotary dryer according to claim 1 or 2, wherein the impact signal is an audio signal.