TWI491553B - Reel device - Google Patents

Description

Reel device

The present invention relates to a reel device for coating a thin plastic sheet or film, a film-form electronic device (roll-to-roll method), or a sheet, a film, or the like.

For example, in Patent Documents 1 and 2, a reel device using a static pressure gas bearing in the radial direction and the thrust direction is proposed.

[Advanced technical literature]

[Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. Hei 11-190338

Patent Document 2: Japanese Patent Laid-Open Publication No. 2010-25208

In such a reel device, in order to use a static pressure gas bearing for both the radial direction and the thrust direction, it is necessary to manage the bearing gap (single side slit 10 to 15 μm) caused by the static pressure gas bearing; High-precision bearing gap management, static pressure gas bearings also require high prices, making it difficult to reduce the cost of the device. Further, in such a reel device, it is difficult to reduce the running cost of the device in order to consume air for the bearings in both the radial direction and the thrust direction.

In view of the above, the applicant of the present invention proposes a reel device according to Japanese Patent Application No. 2010-43375, which has a hollow reel body, and a shaft body which is slotted and inserted into the reel body. a hollow portion, and both end portions protrude from the reel body; a static pressure gas bearing is interposed between the reel body and the shaft body to support the reel body by static pressure gas in a radial direction; and a magnetic bearing The thrust direction is supported by the magnetic body by the magnetic force, and the magnetic bearing includes an annular outer magnetic body that is attached to one end of the rolled body via a bolt, and one of the annular inner magnetic bodies. a surface having a slit facing the inner peripheral surface of the outer magnetic body and mounted to the shaft body; and a permanent magnet interposed between the pair of inner magnetic bodies; and a magnetic force of the permanent magnet supporting the reel body based on the thrust direction a force that causes the outer magnetic body and the pair of inner magnetic bodies to pull each other; according to such a reel device, the reel can be supported by the static pressure gas bearing with respect to the radial direction, and on the other hand, by the magnetic bearing with respect to the thrust Directional support The roll body can reduce the cost of the device and reduce the amount of air consumption.

Further, it is preferable that the number of parts of the reel device can be reduced, the assembly man-hour can be reduced, and the eccentricity between the magnetic body and the reel body on the outer side of the reel device can be eliminated, and the adsorption by the magnetic force in the radial direction can be eliminated. The force becomes non-uniform, so that the load capacity in the radial direction drops.

The present invention has been made in view of the above-described points, and an object of the present invention is to provide a device capable of reducing the amount of air consumption and reducing the number of components, thereby reducing assembly time and eliminating radial direction. The reeling device in which the adsorption force generated by the magnetic force becomes uneven and the load capacity in the radial direction decreases.

The reel device of the present invention comprises: a hollow reel body; a shaft body that is slotted into a hollow portion of the reel body; and a static pressure gas bearing mechanism that is interposed between the reel body and the shaft Between the bodies, so as to support the reel body by static pressure gas with respect to the radial direction; and a magnetic bearing mechanism which supports the reel body by magnetic force about the thrust direction; and the reel system contains a magnetic body; and the magnetic bearing mechanism a pair of inner magnetic bodies having a slit surface facing the inner peripheral surface of the roll body and attached to the shaft body; and a permanent magnet interposed between the pair of inner magnetic bodies; The direction of the thrust should support the magnetic force of the permanent magnet of the reel body, so that the reel body and the pair of inner magnetic bodies exert a mutual pulling force.

According to the reel device of the present invention, in particular, the magnetic bearing mechanism is provided with a peripheral surface having a slit facing the inner peripheral surface of the reel body and being attached to one of the inner side magnetic bodies of the shaft body and magnetically interposed between the pair of inner sides. a permanent magnet between the bodies; and based on the magnetic force of the permanent magnet supporting the reel body in the direction of the thrust, the reeling force is generated by the reel body and the pair of inner magnetic bodies; The yoke supports the reel body, and the magnetic bearing mechanism supports the reel body in the thrust direction. Therefore, it is possible to reduce the cost of the device and reduce the amount of air consumption. Moreover, since the reel body itself has a surface as a face a magnetic body that functions as a magnetic body on the outer side of the inner magnetic body; therefore, it is not necessary to separately provide the outer magnetic body facing the inner magnetic body in the reel body, thereby reducing the number of parts and reducing the assembly man-hour of the reel device; For example, it is possible to avoid eccentricity of the outer magnetic body and the reel body during assembly, thereby eliminating the unevenness of the adsorption force generated by the magnetic force in the radial direction and the radial direction. The load capacity decreased risk.

Another aspect of the present invention relates to a reel device comprising: a hollow reel; a shaft body that is slotted into a hollow portion of the reel body; and a static pressure gas bearing mechanism Between the roll body and the shaft body, so as to support the roll body by static pressure gas with respect to the radial direction; and a magnetic bearing mechanism for supporting the roll body by magnetic force about the thrust direction; and the magnetic bearing mechanism has: outer side a magnetic body embedded in an inner circumferential surface of the roll body; a pair of inner magnetic bodies having a slit surface facing the inner peripheral surface of the outer magnetic body and attached to the shaft body; and a permanent magnet It is interposed between a pair of inner magnetic bodies; and based on the magnetic force of the permanent magnet supporting the reel body in the thrust direction, the outer magnetic body and the pair of inner magnetic bodies are mutually towed.

According to another aspect of the present invention, a reel device includes, in particular, a magnetic bearing mechanism having a magnetic body embedded in an outer peripheral surface of the reel body, and a peripheral surface having a slit facing the inner periphery of the outer magnetic body. And mounted on one of the inner side of the shaft body and the permanent magnet between the pair of inner magnetic bodies; and based on the magnetic force of the permanent magnet supporting the reel body in the thrust direction, the outer magnetic body and the pair of inner magnets The body generates a force for mutual traction; therefore, the reel body can support the reel body in the radial direction by the static pressure gas bearing mechanism, and on the other hand, the reel body can be supported by the magnetic bearing mechanism with respect to the thrust direction; thus, the device can be reduced in cost. In addition, since the outer magnetic body is embedded in the inner peripheral surface of the roll body, the outer magnetic body can be embedded in the roll body as a single body, thereby reducing the shaft body and the static body. The working time of the compressed gas bearing mechanism and the magnetic bearing mechanism for the reel body; in addition, the centering of the outer magnetic body and the reel body can be accurately performed in advance to avoid the outer magnetic body and the coil during assembly The eccentric bodies produced thereby eliminating the magnetic attraction force generated in the radial direction of the drop becomes uneven load capacity in the radial direction of the danger.

According to still another aspect of the present invention, a reel device includes: a hollow reel body; a shaft body that is slotted into a hollow portion of the reel body; and a static pressure gas bearing mechanism Between the reel body and the shaft body to support the reel body by static pressure gas in a radial direction; and a magnetic bearing mechanism for supporting the reel body by magnetic force about a thrust direction; and the magnetic bearing mechanism has: an outer side a magnetic body attached to an end portion of the roll body; a pair of inner magnetic bodies having a slit surface facing the inner peripheral surface of the outer magnetic body and attached to the shaft body; and a permanent magnet; Between a pair of inner magnetic bodies; and based on the magnetic force of the permanent magnet supporting the reel body in the thrust direction, the outer magnetic body and the pair of inner magnetic bodies are mutually towed; and the static pressure gas bearing mechanism has: a cylindrical bearing body having a radial bearing surface facing the inner circumferential surface of the reel body with a ring-shaped bearing gap and fixed to the shaft body; the air supply passage is provided for supply Supply from radial bearing surface to bearing gap The gas formed in the manner of the bearing body; and a supply passage, which is formed based on the shaft, and with a gas to be supplied to the embodiment of the air passage communicated with the air supply passage.

According to still another aspect of the present invention, a magnetic bearing mechanism includes a magnetic body attached to an outer side of an end portion of the roll body, and an outer peripheral surface having a slit surface facing the inner side of the outer magnetic body. And mounted on one of the inner side of the shaft body and the permanent magnet between the pair of inner magnetic bodies; and based on the magnetic force of the permanent magnet supporting the reel body in the thrust direction, the outer magnetic body and the pair of inner magnets The body generates a force for mutual traction; therefore, the reel body can support the reel body in the radial direction by the static pressure gas bearing mechanism, and on the other hand, the reel body can be supported by the magnetic bearing mechanism with respect to the thrust direction; thus, the device can be reduced in cost. And the reduction of the air consumption; and the static pressure gas bearing mechanism has a radial bearing surface having an annular bearing groove facing the inner circumferential surface of the reel body and fixed to the shaft body. The cylindrical bearing body is formed in the air supply passage of the bearing body in such a manner as to supply a gas supplied from the radial bearing surface to the bearing gap, and is formed on the shaft body to supply gas to the air supply passage The method is connected to the supply passage of the air supply passage; therefore, for example, compared with the case where the gas supply passage is provided to the bearing body in such a manner that the end face of one of the bearing bodies of the static pressure gas bearing mechanism is opened, the roll body can be A magnetic bearing mechanism is provided on both end faces to increase the load capacity in the thrust direction.

In the above-described reel device and other aspects of the reel device of the present invention, the hydrostatic gas bearing mechanism may include a cylindrical bearing body having an annular bearing groove facing the reel body. a radial bearing surface of the inner circumferential surface and fixed to the shaft body; the air supply passage is formed in the bearing body in such a manner as to supply a gas supplied from the radial bearing surface to the bearing gap; and the supply passage is formed The shaft is connected to the air supply passage in such a manner as to supply a gas to the air supply passage.

According to the present invention, it is possible to provide a reel device which can reduce the cost of the device, reduce the amount of air consumption, reduce the number of parts, reduce the number of assembly man-hours, and eliminate the occurrence of magnetic force in the radial direction. The adsorption force becomes uneven and the load capacity in the radial direction decreases.

Next, the present invention will be described in more detail based on the preferred embodiment shown in the drawings. In addition, the invention is not limited to the examples.

[Examples]

1 to 7, the reel device 1 of the present embodiment has a hollow reel body 2, a shaft body 4 which is inserted into the hollow portion of the reel body 2 with a slit, and a static pressure gas bearing mechanism 7 And 8, between the roll body 2 and the shaft body 4, so as to support the roll body 2 by static pressure gas in a radial direction; and the magnetic bearing mechanisms 9 and 10, which are supported by the magnetic force about the thrust direction Roll body 2.

The static pressure gas bearing mechanism 7 and the magnetic bearing mechanism 9 are disposed on one end portion 5 side of the roll body 2, and the static pressure gas bearing mechanism 8 and the magnetic bearing mechanism 10 are disposed on the other end portion 6 side of the roll body 2. Since the static pressure gas bearing mechanism 7 and the magnetic bearing mechanism 9 are formed in the same manner as the static pressure gas bearing mechanism 8 and the magnetic bearing mechanism 10, the static gas bearing mechanism 7 and the magnetic body disposed on the one end portion 5 side will be described in detail below. The bearing mechanism 9; the static gas bearing mechanism 8 and the magnetic bearing mechanism 10 disposed on the other end portion 6 side are denoted by the same reference numerals in FIG. 1 and the detailed description thereof will be omitted. Further, the magnetic bearing mechanism 9 is disposed on the one end portion 5 side with respect to the static pressure gas bearing mechanism 7 adjacent to the magnetic bearing mechanism 9; the magnetic bearing mechanism 10 is disposed relative to the static pressure gas bearing mechanism 8 adjacent to the magnetic bearing mechanism 10. On the other end 6 side.

The roll body 2 includes a cylindrical magnetic body, and an annular bearing gap 31 and an annular slit 64 on the inner peripheral surface 12 face the static gas bearing mechanisms 7 and 8 and the magnetic bearing mechanism 9 and 10.

The shaft body 4 has a cylindrical shape, and one end portion 21 thereof protrudes from one end portion 5 of the reel body 2, and is fixedly supported by the support frame 15 or the like at the one end portion 21. The other end portion 22 of the shaft body 4 protrudes from the other end portion 6 of the roll body 2, and is fixedly supported by the support frame 15 or the like at the other end portion 22. The shaft body 4 is supported by both sides of the support frame 15 or the like in this example, but may be supported on one side at the one end portion 21 or the other end portion 22, for example. The static pressure gas bearing mechanisms 7 and 8 and the magnetic bearing mechanisms 9 and 10 are attached to the shaft body 4. The outer peripheral surface 20 of the shaft body 4 has a slit 3 facing the inner peripheral surface of the roll body 2. The outer peripheral portion of the shaft body 4 located between the static pressure gas bearing mechanisms 7 and 8 is enlarged in diameter.

The static pressure gas bearing mechanism 7 includes a cylindrical bearing body 36 having a ring-shaped bearing groove 31 facing the radial bearing surface 32 of the inner peripheral surface 12 of the roll body 2, and is fixed to a shaft body 4; an air supply passage 44 formed in the bearing body 36 in such a manner as to supply a gas supplied from the radial bearing surface 32 to the bearing gap 31; and a supply passage 45 for supplying gas to the air supply The passage 44 is connected to the air supply passage 44 and formed in the shaft body 4.

The bearing body 36 includes a cylindrical body 55 fixed to the outer peripheral surface 20 of the shaft body 4 by the inner peripheral surface 51, and a cylindrical porous metal sintered as a porous body joined to the outer peripheral surface 52 of the body 55. Layer 56.

The porous metal sintered layer 56 is opened at a position where a large portion of the entire surface is disordered, and has a plurality of pores which are interconnected in an orderly manner. The radial bearing surface 32 includes an outer peripheral surface 12 that faces the inner peripheral surface 12 of the roll body 2 to be supported by the porous metal sintered layer 56.

The porous metal sintered layer 56 may contain 4% or more and 10% or less of tin, 10% or more and 40% or less of nickel, 0.1% or more and 0.5% of less than ruthenium, 2% or more and 10% or less of inorganic particles, and the balance of copper (the rest). All are weight ratio). The inorganic particles dispersed in the porous metal sintered layer may further contain at least one of graphite, boron nitride, graphite fluoride, calcium fluoride, aluminum oxide, cerium oxide, and cerium carbide.

The air supply passage 44 includes a plurality of annular passages 71 and 72 formed on the outer circumferential surface 52 of the body 55 of the bearing body 36, and a communication passage 76 extending in the axial direction to be formed in the body 55. The annular passages 71 and 72 are connected to the supply passage 45. The supply passage 45 is formed in the shaft body 4 so as to extend in the axial direction, and is open at one end portion 21 and communicates with the communication passage 76. In such an air supply passage 44, a gas (compressed gas) supplied from the one end portion 21 via the supply passage 45 is supplied to the communication passage 76, and the gas supplied to the communication passage 76 flows into the annular passages 71 and 72. The inflowing gas is supplied to the porous metal sintered layer 56 to supply the bearing gap 31 gas. Further, the supply passage 45 of the static pressure gas bearing mechanism 7 provided on the one end portion 5 side of the roll body 2 and the supply passage of the static pressure gas bearing mechanism 8 provided on the other end portion 6 side of the roll body 2 (not The illustrations are connected to each other.

The reel device 1 of the present embodiment includes the hydrostatic gas bearing mechanisms 7 and 8 each having the porous metal sintered layers 56 and 56a. Alternatively, it may be provided with a self-forming throttling type static pressure gas bearing. The mechanism supplies static pressure gas to the bearing gap 31 via self-forming throttle passages formed in the bearing bodies 36 and 36a to support the drum body 2 in a non-contact manner with respect to the radial direction.

The magnetic bearing mechanism 9 includes an annular pair of inner magnetic bodies 65 and 66, and an annular groove 64 on the outer peripheral surface 62 faces the inner peripheral surface 12 of the roll body 2 and is attached to the shaft body. 4; and a permanent magnet interposed between a pair of inner magnetic bodies 65 and 66, in this case a hollow disc-shaped permanent magnet 67; and based on the permanent magnet 67 supporting the reel body 2 with respect to the thrust direction The magnetic force causes the reel body 2 and the pair of inner magnetic bodies 65 and 66 to exert a mutual pulling force. The slit 64 is disposed adjacent to the bearing slit 31.

The roll body 2 is formed with an annular convex portion 82 which is formed on the inner peripheral surface 12 of the roll body 2 and protrudes toward the inner peripheral surface 12 of the roll body 2 at the one end portion 5 side thereof, and an inner side magnetic body at the one end portion 5 side. An annular convex portion 83 formed on the inner circumferential surface 12 of the roll body 2 is protruded.

The annular convex portions 82 and 83 have the same shape, and the annular convex portion 82 is located on the one end portion 5 side with respect to the annular convex portion 83. Between the annular convex portions 82 and 83 and the annular convex portion 83 and the bearing body 36, annular grooves 84 and 85 are formed, respectively. The groove 84 faces the permanent magnet 67; the groove 85 faces the annular spacer 80 which will be described later. For example, the annular projections 82 and 83 of this example may be subjected to, for example, a chamfer. The surfaces of the outer peripheral surfaces 62 of the inner magnetic bodies 65 and 66 of the rectangular annular projections 82 and 83 may also include a flat surface.

The inner magnetic body 65 is located on the one end portion 5 side with respect to the inner magnetic body 66; the outer peripheral surface 62 of the inner magnetic body 65 and the outer peripheral surface 62 of the inner magnetic body 66 have annular slits 64 facing the annular convex portion, respectively. The portion 82 and the annular convex portion 83.

Each of the inner magnetic bodies 65 and 66 has a hollow disk shape, and is fixed to the shaft body 4 in the hollow portion. It is also possible to perform chamfering on the outer peripheral surface 62 of each of the inner magnetic bodies 65 and 66. The outer peripheral surface 62 of each of the inner magnetic bodies 65 and 66 may include a flat surface in which the slit 64 faces each of the annular convex portions 82 and 83. Further, the inner magnetic body 66 is attached to the bearing body 36 via the annular spacer 80.

The permanent magnet 67 has an end face 86 which is an N pole and the other end face 88 is an S pole. The inner magnetic bodies 65 and 66 are magnetized by the magnetic force of the permanent magnet 67, whereby the outer peripheral surface 62 of the inner magnetic body 65 becomes the N pole, and the outer peripheral surface 62 of the inner magnetic body 66 becomes the S pole. One end portion 5 of the roll body 2 is magnetized by the magnetic force of the plurality of permanent magnets 67, whereby the annular convex portion 82 becomes the S pole, and the annular convex portion 83 becomes the N pole. Therefore, the magnetic bearing 68 is generated in the magnetic bearing mechanism 9, for example, as shown in FIG. 7, and a traction force is generated between the annular convex portion 82 and the outer peripheral surface 62 of the inner magnetic body 65, and the annular convex portion 83 and the inner magnetic body 66 are formed. Traction is generated between the outer peripheral faces 62. Since such traction force increases as the roll body 2 is displaced with respect to the thrust direction of the shaft body 4, the roll body 2 becomes supported by the magnetic force with respect to the thrust direction. In this manner, the magnetic bearing mechanism 9 causes the end portion 5 of the reel body 2 and the pair of inner magnetic bodies 65 and 66 to exert a mutual pulling force based on the magnetic force of the permanent magnet 67 that supports the reel body 2 with respect to the thrust direction. Further, similarly to the magnetic bearing mechanism 9, the magnetic bearing mechanism 10 generates a traction force based on the magnetic force of the permanent magnet 67a of the reel body 2 to be supported in the thrust direction.

Each of the magnetic bearing mechanisms 9 and 10 includes one hollow disk-shaped permanent magnets 67 and 67a, but may be provided with, for example, a plurality of permanent magnets arranged in the circumferential direction.

In such a reel device 1, gas is supplied from the radial bearing faces 32 and 32a to the bearing slits 31 and 31a by supplying gas from the respective air supply passages 44 to the porous metal sintered layers 56 and 56a, and thus, The roll body 2 is supported by the static pressure gas bearing mechanisms 7 and 8 so as to be non-contact and free to rotate in the R direction. Further, the roll body 2 is supported by the magnetic force of the magnetic bearing mechanisms 9 and 10 so as to be non-contacting in the lateral direction and freely rotatable in the R direction as described above, whereby the roll body 2 is prohibited from being opposed to the shaft body 4 The lateral position is offset. In the reel device 1, since air consumption does not occur in the support of the reel body 2 in the radial direction, the amount of air consumption when the reel body 2 is supported can be suppressed.

According to the reel device 1 of the present embodiment, since the hollow reel body 2 is provided, the shaft body 4 having the slit 3 inserted into the hollow portion of the reel body 2 is interposed between the reel body 2 and the shaft body 4 so as to be The static pressure gas bearing mechanisms 7 and 8 for supporting the roll body 2 by the static pressure gas in the radial direction, and the magnetic bearing mechanisms 9 and 10 for supporting the roll body 2 by the magnetic force with respect to the thrust direction; and the roll body 2 includes The magnetic body; the magnetic bearing mechanism 9 includes an outer circumferential surface 62 having an annular slit 64 facing the inner circumferential surface 12 of the roll body 2 and being attached to one of the inner magnetic bodies 65 and 66 of the shaft body 4, And a permanent magnet 67 interposed between the pair of inner magnetic bodies 65 and 66; and the magnetic force of the permanent magnet 67 supporting the reel body 2 with respect to the thrust direction causes the reel body 2 and the pair of inner magnetic bodies 65 and 66 to mutually The force of traction; the magnetic bearing mechanism 10 includes an outer peripheral surface 62 having a slit 3 facing the inner peripheral surface 12 of the roll body 2 and being attached to one of the inner side magnetic bodies 65a and 66a of the shaft body 4, and a medium a permanent magnet 67a between the inner magnetic bodies 65a and 66a; and based on the permanent magnet 67a which should support the roll body 2 with respect to the thrust direction The magnetic force causes the reel body 2 and the pair of inner magnetic bodies 65a and 66a to exert a mutual pulling force; therefore, the hydrostatic gas bearing mechanisms 7 and 8 can support the reel body 2 in the radial direction, and on the other hand, The magnetic bearing mechanisms 9 and 10 support the reel body 2 with respect to the thrust direction; thus, it is possible to reduce the cost of the device and reduce the amount of air consumption; and since the reel body 2 itself has the surface magnetic bodies 65 and 66 as facing faces Since the magnetic body functions as the magnetic body on the outer side of the inner magnetic bodies 65a and 66a, it is possible to reduce the amount of the outer magnetic body facing the inner magnetic bodies 65 and 66 and the inner magnetic bodies 65a and 66a. The number of parts can reduce the assembly man-hour of the reel device 1; furthermore, the eccentricity of the outer magnetic body and the reel body 2 during assembly can be avoided, thereby eliminating the adsorption force generated by the magnetic force in the radial direction. Uniform and radial load capacity declines.

In another aspect of the present embodiment, the reel device 101 shown in Fig. 8 is formed in the same manner as the reel device 1 except for the reel body 2, and includes a hollow reel 102 including a non-magnetic body. The magnetic bearing mechanism 9 of the reel device 101 further includes a magnetic body 103 that is embedded in a portion of the inner peripheral surface 12 of the end portion 5 of the reel body 102; a magnetic bearing mechanism 10 of the reel device 101, and the above-described roll Similarly, the magnetic bearing mechanism 9 of the cartridge device 101 further includes a magnetic body (not shown) that is fitted to the outer peripheral surface 12 of the other end portion 6 of the roll body 102.

The inner peripheral surface 12 of the roll body 102 has a diameter enlarged at one end portion 5 and the other end portion 6; the outer magnetic body 103 is attached to one end portion 5 of the enlarged diameter, and the outer side of the magnetic bearing mechanism 10 of the reel device 101 is magnetic The system is embedded in the other end portion 6 of the enlarged diameter.

The above-described annular convex portions 82 and 83 and the concave grooves 84 and 85 are formed in the outer magnetic body 103. The magnetic system on the outer side of the magnetic bearing mechanism 10 of the reel device 101 is formed in the same manner as the outer magnetic body 103.

The magnetic bearing mechanisms 9 and 10 of the reel device 101 are based on the magnetic forces of the permanent magnets 67 and 67a that support the reel body 102 in the thrust direction, and the outer magnetic body 103 and the magnetic body and the outer side of the magnetic bearing mechanism 10 are externally The magnetic bodies 65 and 66 and 65a and 66a generate a mutual pulling force.

According to the reel device 101, similarly to the reel device 1, the reel body can be supported by the hydrostatic gas bearing mechanisms 7 and 8 in the radial direction, and on the other hand, the magnetic bearing mechanisms 9 and 10 can be used in the thrust direction. By supporting the reel body 102, it is possible to reduce the cost of the device and reduce the amount of air consumption. Further, since the magnetic body of the outer magnetic body 103 and the magnetic bearing mechanism 10 of the reel device 101 is embedded in the reel body 102, Since the inner peripheral surface 12 is formed, the outer magnetic body 103 and the magnetic bearing mechanism 10 of the reel device 101 can be fitted in advance to the reel body 102 as an integral body, whereby the shaft body 4 and the static pressure gas bearing mechanisms 7 and 8 can be reduced. And the assembly time of the magnetic bearing mechanisms 9 and 10 with respect to the reel body 102; further, the outer magnetic body of the magnetic bearing mechanism 10 of the reel body 102 and the outer magnetic body 103 and the reel device 101 can be easily and accurately performed in advance. The centering is to avoid the occurrence of eccentricity of the outer magnetic body and the reel body during assembly, thereby eliminating the problem that the adsorption force generated by the magnetic force in the radial direction becomes uneven and the load capacity in the radial direction decreases.

In another aspect of the present invention, a reel device (not shown) is provided with an outer magnetic body attached to both end portions of a reel body including a non-magnetic body, and the reel device 1 and 101 are provided in addition to the above. Also formed. According to the reel device and the reel devices 1 and 101, in particular, the hydrostatic gas bearing mechanisms 7 and 8 are provided with bearing rings 31 and 31a having an annular shape facing the reel 2 (102). The radial bearing faces 32 and 32a of the inner peripheral surface 12 and the cylindrical bearing bodies 36 and 36a fixed to the shaft body 4 are supplied to the bearing slots 31 and 31a from the radial bearing faces 32 and 32a. The gas is formed in the air supply passage 44 of the bearing bodies 36 and 36a (the air supply passage of the static pressure gas bearing mechanism 8 is not shown), and the manner in which the shaft body 4 is formed and the gas can be supplied to the air supply passage 44. a supply passage 45 that communicates with the air supply passage 44 (a supply passage of the static pressure gas bearing mechanism 8 is not shown); therefore, a gas is provided to any one of the bearing bodies 36 and 36a of the static gas bearing mechanisms 7 and 8, for example. In addition to the case of the supply passage, the magnetic bearing mechanism 10 is provided in the same manner as the magnetic bearing mechanism 9 except for the magnetic bearing mechanism 9 provided on the one end surface 5 side of the static pressure gas bearing mechanism 7, and is formed in the same manner as the magnetic bearing mechanism 9. The other end portion 6 side of the bearing mechanism 8 is adjacent to each other.

Further, the reel devices 1 and 101 and the reel device according to still another aspect of the present embodiment may further include: adjacent to one end portion 5 side of the hydrostatic gas bearing mechanism 7 The magnetic bearing mechanism 9 is formed in the same manner, and another magnetic bearing mechanism (not shown) provided adjacent to the other end side of the static pressure gas bearing mechanism 7; and one end portion 6 of the static pressure gas bearing mechanism 8 The magnetic bearing mechanism 10 provided adjacent to the side is formed in the same manner, and another magnetic bearing mechanism (not shown) is provided adjacent to the other end side of the static-pressure gas bearing mechanism 8; in this case, the thrust can be made. The load capacity of the direction is further increased.

1. . . Reel device

2. . . Roll body

4. . . Axle body

7. . . Static pressure gas bearing mechanism

8. . . Static pressure gas bearing mechanism

9. . . Magnetic bearing mechanism

10. . . Magnetic bearing mechanism

31. . . Bearing gap

31a. . . Bearing gap

32. . . Radial bearing surface

32a. . . Radial bearing surface

44. . . Gas passage

45. . . Supply channel

64. . . Gap

65. . . Inner magnetic body

65a. . . Inner magnetic body

66. . . Inner magnetic body

66a. . . Inner magnetic body

67. . . permanent magnet

67a. . . permanent magnet

101. . . Reel device

102. . . Roll body

103. . . Outer magnetic body

Fig. 1 is a front elevational view, partly in section, of an embodiment of the present invention.

Fig. 2 is a partial cross-sectional explanatory view showing an example shown in Fig. 1.

Fig. 3 is an explanatory view showing an arrow angle of a section III-III of the example shown in Fig. 1.

Fig. 4 is an explanatory view showing an arrow angle of a cross section taken along line IV-IV of the example shown in Fig. 1.

Fig. 5 is an explanatory diagram of an arrow angle of a V-V line cross section of the example shown in Fig. 1.

Fig. 6 is an explanatory diagram of an arrow angle of a cross section taken along line VI-VI of the example shown in Fig. 1.

Fig. 7 is an enlarged explanatory view showing a main magnetic bearing mechanism of the example shown in Fig. 1.

Fig. 8 is a cross-sectional explanatory view showing another example of the embodiment of the present invention.

1. . . Reel device

2. . . Roll body

3. . . Gap

4. . . Axle body

5. . . One end of the roll body

6. . . The other end of the drum

7. . . Static pressure gas bearing mechanism

8. . . Static pressure gas bearing mechanism

9. . . Magnetic bearing mechanism

10. . . Magnetic bearing mechanism

12. . . Inner circumference of the drum

15. . . Support frame

20. . . Outside the shaft

twenty one. . . One end of the shaft

twenty two. . . The other end of the shaft

31. . . Bearing gap

31a. . . Bearing gap

32. . . Radial bearing surface

32a. . . Radial bearing surface

36. . . Bearing body

36a. . . Bearing body

56. . . Porous metal sintered layer

56a. . . Porous metal sintered layer

65. . . Inner magnetic body

65a. . . Inner magnetic body

66. . . Inner magnetic body

66a. . . Inner magnetic body

67. . . permanent magnet

67a. . . permanent magnet

80. . . Annular septum

80a. . . Annular septum

84. . . Groove

84a. . . Groove

85. . . Groove

85a. . . Groove

R. . . direction

Claims (3)

A reel device comprising: a hollow reel body; a shaft body inserted through a slit into a hollow portion of the reel body; and a first static pressure gas bearing mechanism disposed on the reel body One end side of the one side, and interposed between the reel body and the shaft body via the first slit so as to support the reel body by static pressure gas in the radial direction; the second static pressure gas bearing mechanism is set on the roll The other end side of the cylinder is interposed between the reel body and the shaft body via the second slit so as to support the reel body by static pressure gas in the radial direction; the first magnetic bearing mechanism is related to The thrust direction is supported by the magnetic body by the magnetic force, and is disposed on the end side of one side of the reel body with respect to the thrust direction; and the second magnetic bearing mechanism supports the reel body by the magnetic force with respect to the thrust direction, and regarding the thrust direction The first magnetic bearing mechanism includes a first one pair of inner magnetic bodies, and the outer peripheral surface is disposed on the outer diameter of the outer surface of the roll body. Facing the inner circumference of the reel in the direction and juxtaposed The first permanent magnet is interposed between the first pair of inner magnetic bodies in the thrust direction, and the second magnetic bearing mechanism includes a second one pair of inner magnetic bodies. The outer peripheral surface faces the inner circumferential surface of the roll body in the radial direction via the fourth slit, and is attached to the shaft body in the thrust direction; and the second permanent magnet is introduced in the thrust direction. 2 between the pair of inner magnetic bodies; and based on the magnetic force of the first permanent magnet supporting the reel body in the thrust direction, the reeling force is generated between the reel body and the first one pair of inner magnetic bodies; Should support the magnetic force of the second permanent magnet of the reel, The first and second static pressure gas bearing mechanisms are located between the first and second magnetic bearing mechanisms in the thrust direction, and the first and second static pressure gas bearing mechanisms are interposed between the first and second magnetic bearing mechanisms in the thrust direction. 1 and the second magnetic bearing mechanism are clamped, and the first and second slits are communicated to the outside through the third and fourth slits. A reel device comprising: a hollow reel body; a shaft body inserted through a slit into a hollow portion of the reel body; and a first static pressure gas bearing mechanism disposed on the reel body One end side of the one side, and interposed between the reel body and the shaft body via the first slit so as to support the reel body by static pressure gas in the radial direction; the second static pressure gas bearing mechanism is set on the roll The other end side of the cylinder is interposed between the reel body and the shaft body via the second slit so as to support the reel body by static pressure gas in the radial direction; the first magnetic bearing mechanism is related to The thrust direction is supported by the magnetic body by the magnetic force, and is disposed on the end side of one side of the reel body with respect to the thrust direction; and the second magnetic bearing mechanism supports the reel body by the magnetic force with respect to the thrust direction, and regarding the thrust direction The first magnetic bearing mechanism includes a first outer magnetic body that is fitted to an inner circumferential surface of one end side of the reel body, and the first magnetic bearing mechanism is provided on the other end side of the reel body; a pair of inner magnetic bodies, the outer peripheral surface of which is radially interposed by a third slit The direction faces the inner peripheral surface of the first outer magnetic body, and is attached to the shaft body in the thrust direction; and the first permanent magnet is interposed between the first pair of inner magnetic bodies in the thrust direction; 2. The magnetic bearing mechanism includes: a second outer magnetic body embedded in an inner circumferential surface of the other end side of the reel body; and a second one pair inner magnetic body having a fourth slit interposed therebetween Facing the inner circumference of the second outer magnetic body in the radial direction And the second permanent magnet is interposed between the second pair of inner magnetic bodies in the thrust direction; and the first support of the roll body is based on the thrust direction. The magnetic force of the permanent magnet causes the first outer magnetic body and the first one pair inner magnetic body to mutually pull the force; and the second outer magnetic body is supported by the magnetic force of the second permanent magnet that supports the reel body in the thrust direction. The second one exerts a mutual pulling force on the inner magnetic body; the inner peripheral surface facing the one end side of the one side of the first inner pair magnetic body and the second one facing the inner side magnetic The inner peripheral surface of the other end side of the body of the roll body is the inner circumference of the roll body with respect to the inner peripheral surface of the one end side and the inner peripheral surface of the other end side The surface is enlarged in diameter; the first outer magnetic system is embedded in the inner peripheral surface of the diameter-expanded end portion on one end side of the reel; and the second outer magnetic system is embedded in the other end side of the reel body. The inner circumferential surface of the enlarged diameter; the first and second static pressure gas bearing mechanisms are in the thrust side Located on the first and second magnetic bearing means between the clamped first and second magnetic bearing mechanism 2 in the thrust direction, the first and second slits to the exterior through the third and fourth slot. The reel device of claim 1 or 2, wherein each of the first and second hydrostatic gas bearing mechanisms comprises: a cylindrical bearing body having a bearing gap facing the reel body via an annular bearing gap a radial bearing surface of the inner circumferential surface and fixed to the shaft body; the air supply passage is formed in the bearing body in such a manner as to supply a gas supplied from the radial bearing surface to the bearing gap; and the supply passage is formed The shaft is connected to the air supply passage in such a manner as to supply a gas to the air supply passage.