TWI490077B - Calibration apparatus and a compensation controlling method for multi-axes machines using the same - Google Patents

Description

Calibration device and multi-axis mechanical compensation method

The disclosure relates to a calibration device and a multi-axis mechanical compensation method, and more particularly to a calibration device and a compensation method applied to multi-axis mechanical compensation measurement.

The coordinate system used in the multi-axis machining process is the organic mechanical coordinate system, the workpiece program coordinate system and the workpiece coordinate system. Before processing, the relationship between the three must be confirmed, and then the adjustment or compensation correction is performed to make the workpiece program. The coordinates are consistent with the workpiece coordinate system so that the correct machining results are obtained.

The existing non-contact compensation correction method can replace the traditional probe with a laser ranging sensor, so that the user can perform compensation control in a safer and faster manner. However, there are many types of laser ranging sensors, and the price difference is large, and the price is related to the measurement accuracy. The CCD (Charge Coupled Device) itself has no center point indication, and needs to be corrected when applied. Therefore, how to improve the cost performance of the measurement system is an urgent problem for people in the related art.

In one embodiment, the present disclosure provides a calibration apparatus including a body having a plurality of laser sensors, a reflector, a reference point structure, and a photosensitive element. The base body has a first surface, each of the laser sensors has a light emitting end for emitting a laser beam, the plurality of laser beams are parallel to each other, and the reflecting member is detachably disposed on the seat body, the reflection Package a reflective surface having a distance between the reflective surface and the first surface, each optical end is at the same distance from the reflective surface, and the plurality of laser beams are vertically projected on the reflective surface; the reference point structure has a reference point; And, the photosensitive element is used to detect the reference point.

In an embodiment, the present disclosure further provides a multi-axis mechanical compensation method, which is provided with a calibration device, the calibration device includes a body, and the base body is provided with a plurality of laser sensors, a reflector, and a reference. a dot structure and a photosensitive element, the base body has a first surface, each of the laser sensors has a light emitting end, and the laser sensor emits a laser beam from the light emitting end, the plurality of laser beams are parallel to each other The reflector comprises a reflecting surface, the reflecting surface has a distance from the first surface, and each of the light emitting ends is at the same distance from the reflecting surface. The plurality of laser beams are vertically projected on the reflecting surface, and the reference point structure has a reference point. The photosensitive element is used for detecting the reference point; the calibration device is mounted on one end surface of a movable multi-axis machine; each laser sensor is driven to emit a laser beam to measure the light end to the reflective surface The distance is a first distance; the first distance is recorded, and the reading value of each laser sensor is zeroed, and the first distance is used as a basis for the multi-axis mechanical compensation control; Piece removed and will The multi-axis machine moves to a working platform, and the working platform is provided with an object, and the distance between the working platform and each of the light-emitting surfaces is measured by the plurality of laser sensors, and the distance is a second distance, The second distance is greater than the first distance; the multi-axis machine is moved toward the working platform by a third distance, wherein the third distance is a difference between the first distance and the second distance; and, detected by the photosensitive element Whether the reference point is aligned with the target.

The technical means and functions used in the present disclosure for the purpose of the present invention will be described with reference to the accompanying drawings, and the embodiments illustrated in the following drawings are only for the purpose of explanation, and are to be understood by the reviewing members, but the technical means of the present disclosure are It is not limited to the illustrated figures.

The applicant of the present invention has proposed a "compensation control method for multi-axis machinery" (hereinafter referred to as the previous case) in the Patent Application No. 101134642 of the Republic of China. The prior art technique utilizes multiple sets of non-contact distance sensing. The measurement and compensation effect of the workpiece position and attitude is achieved by the technical means of the specific control program, so as to solve the interference collision in the process of confirming the relative spatial relationship between the workpiece and the machine equipment, the long calibration time and the high cost of the workpiece preparation. problem. In order to realize the prior art, three distance measuring devices are arranged on the end faces of the multi-axis machine, and the distance measuring devices are equal to the center distance of the end faces, and then the end faces are controlled to rotate with the center thereof as an axis, and Having the three distance measuring devices measure the distance of the workpiece surface until the distance measured by two of the three distance measuring devices is the same, and then the end surface is measured by the two distance measuring devices The line is flipped until the other distance measuring device other than the two distance measuring devices is the same as the distance measured by the two distance measuring devices, and finally the data generated by the control of the end face is recorded. The multi-axis machine is used as the basis for compensation control.

The above-mentioned compensation control method for multi-axis machine can solve the lack of the conventional contact measurement method for detecting the rod measurement, but the prior art technique requires the use of a plurality of non-contact distance measuring instruments, and the plurality of non-contacts The contact range finder must be perpendicular to the mounting surface, while at the same time having multiple non-contact rangefinders perpendicular to the horizontal plane is not easy to install. In addition, the non-contact range finder used in the prior art technology, if a laser range finder is used, the laser range finder with high linearity and high reproducibility is extremely expensive. In addition, the non-contact use of the prior case technology The range finder, if a low-cost CMOS (complementary oxidized metal semiconductor) laser range finder is used, can reduce the cost, but has the problem of low linearity. In addition, in the X- and Y-position measurement in the prior art, it is necessary to align the center point of the multi-axis machine with the target point. Although the CCD can be used for auxiliary confirmation, since the CCD has no center point, it is necessary to separately confirm the CCD and the multi-axis. The relationship between the mechanical center points can assist in the alignment procedure.

Accordingly, the present application provides a calibration device to improve the prior case.

Referring to the structure of the embodiment shown in FIG. 1 to FIG. 5 , the calibration apparatus 100 includes a body 10 , a plurality of laser sensors 20 , a reflector 30 , a reference point structure 40 , and a photosensitive element 50 (please Referring to the fourth figure, the photosensitive element 50 is a CCD (Charge Coupled Device).

The base 10 has a first surface 11 and a second surface 12. In this embodiment, the base 10 has a disk shape. The mounting body 13 is provided with a plurality of mounting slots 13 each for mounting a laser sensor 20, each mounting slot 13 including at least two opposite side walls 131, 132, and one of the side walls 131 is provided The arcuate groove 133 is provided with a positioning pin 134 at the arcuate groove 133. The positioning pin 134 has a first axial end 135. The first axial end 135 has a release position and a locking position. A first pivot hole 136 is disposed on one side of the arcuate groove 133. The bottom of the mounting slot 13 extends through the first surface 11 of the base 10. The laser sensor 20 is embedded in the mounting slot 13 by the first surface 11 (ie, the bottom of the base 10). Between the side walls 131 and 132, the laser sensor 20 is provided with a second pivot hole 22 corresponding to the first pivot hole, and is inserted through the plug body or the shaft body (not shown). A pivot hole 136 and a second pivot hole 22 rotatably mount the laser sensor 20 in the mounting groove 13. each A laser sensor 20 has a light-emitting end 21 for emitting a laser beam, and the laser sensor 20 is exposed on the first surface 11, that is, the laser sensor 20 is connected to the light-emitting end 21 The lower state is embedded in the mounting groove 13. In this embodiment, three mounting slots 13 are provided for mounting three laser sensors 20, which are arranged around the center periphery of the disc-shaped housing 10 at equal angles, three The light-emitting end 21 of the laser sensor 20 is directed toward the center of the disk-shaped base 10, and a first outlet hole 137 is provided at the top of the mounting groove 13 to provide a line connecting the laser sensor 20. use.

In an ideal situation, the laser sensor 20 and the mounting groove 13 are closely fitted to each other, and the laser beam generated by the laser sensor 20 is perpendicular to the first surface 11 to emit the housing 10, and Each of the laser beams is parallel to each other. However, due to various factors such as a dimensional error, the laser beam is often unable to be perpendicular to the first surface 11 to exit the base 10. Therefore, the arc 133 and the positioning pin 134 must be used for the sense of the laser. The detector 20 performs fine adjustment.

Referring to the first and fifth figures, when the first axial end 135 of the positioning pin 134 is in the release position (as shown in the first figure), the laser sensor 20 can be the second pivot hole. 22 is centered in the mounting slot 13 for swinging. During the swinging of the laser sensor 20, the angle of the emitted laser beam can be changed. When the laser sensor 20 is swung to a desired position, the laser beam is irradiated to a desired position. L1 can reach the state of the vertical first face 11, that is, the positioning pin 134 can be locked into the arcuate groove 133, so that the first axial end 135 abuts against the laser sensor 20, that is, the first axial end 135 is located. In the locking position, the first axial end 135 abuts against the side of the laser sensor 20 and positions the laser sensor 20 in the mounting slot 13 to fix the position of the laser sensor 20 Can't swing anymore. Thus, each of the laser sensors 20 is fine-tuned in the above manner, so that the laser beam generated by the laser sensor 20 is perpendicular to the first surface 11 to emit the body. 10, and each of the laser beams is parallel to each other. The size of the laser sensor 20 interacting with the mounting groove 13 and the positioning pin 134 allows a certain error range value. For example, the positioning pin 134 abutting the laser sensor 20 may cause the laser sensor 20 to be The displacement error can be limited by the size of the laser sensor 20 in combination with the mounting groove 13 to achieve a tolerance.

Referring to the first to fourth and sixth figures, the reflector 30 is detachably disposed on the first surface 11 of the base 10. In the embodiment, the reflector 30 is a cylindrical structure. An axial end portion (the top of the illustrated reflecting member 30) is open, and a reflecting surface 31 is provided opposite to the other axial end portion (the bottom portion of the reflecting member 30 is illustrated), and the reflecting surface 31 has a reflective characteristic to enable the reflecting member The axial end portion of the reflecting surface 31 is provided with a closed state (as shown in the sixth figure). The reflecting surface 31 is parallel to the first surface 11 and has a distance between the reflecting surface 31 and the first surface 11. The light emitting end 21 of each laser sensor 20 has the same distance from the reflecting surface 31. The laser beam is the same. The L1 is vertically projected on the reflecting surface 31. A first quick release structure is disposed between the reflector member 30 and the base body 10. The first quick release structure is disposed on the first surface 11 of the base body 10 and is provided with a plurality of first engaging slots 14 for each first engaging slot. 14 has a curvature, and the plurality of first engaging grooves 14 are annularly disposed around a first center C1, and the first center C1 is the center of the disk-shaped housing 10. In addition, a plurality of first protrusions 32 are disposed on the periphery of the axial end of the reflection member 30 with respect to the reflection surface 31, and the plurality of first protrusions 32 are annularly disposed around the first center C1. The reflector member 30 is provided with one end of the first protrusion 32 and the first surface 11 of the base 10 is opposite to the rotating reflector 30 and the base 10, and each of the first protrusions 32 can be corresponding to and engaged with the first member 32. In the first engaging groove 14, the reflecting member 30 is coupled to the bottom surface of the base 10 (that is, the first surface 11). After the laser beam L1 emitted by the laser sensor 20 is projected onto the reflecting surface 31, it can be reflected back to the laser sensor 20. Thereby, the distance from the light end 21 to the reflecting surface 31 can be measured by the laser sensor 20. After the equivalent measurement is completed, the reflector 30 and the base 10 can be oppositely rotated, and the reflector 30 can be separated from the base 10.

Referring to the first to fourth figures, the second surface 12 of the base 10 is provided with a tubular member 15 having a longitudinal direction, and the tubular member 15 has a first end opposite to the longitudinal direction. 151 and a second end 152, the first end 151 is connected to the base 10, and the base 10 is provided with a first through portion 157. The first through portion 157 is located between the photosensitive element 50 and the reference point structure 40. The photosensitive member 50 is disposed in the tubular member 15. A second outlet opening 153 is defined in the barrel of the tubular member 15 for providing a line connecting the photosensitive member 50. The plurality of adjustment holes 154 are provided in the plurality of adjustment holes 154 in the plurality of rows in the longitudinal direction of the cylindrical member 15, and the plurality of adjustment holes 154 are equiangularly disposed on the cylindrical member 15, in this embodiment. The two adjusting holes 154 are arranged in a row, and the cylindrical member 15 is provided with three rows of adjusting holes 154. Each adjusting hole 154 is provided with an adjusting pin 155. Each adjusting pin 155 has a second axial end 156, which will be adjusted. The second axial end 156 has a release position and a locking position when the second axial end 156 is located. The second axial end 156 has a release position and a locking position. When the position is released (as shown in the fourth figure), the second axial end 156 is separated from the photosensitive element 50. When the second axial end 156 is in the locked position, the second axial end of the 156 can be offset. The outer surface of the photosensitive member 50. The verticality of the photosensitive member 50 can be finely adjusted by the adjustment pin 155 at a different position abutting against the photosensitive member 50.

The reference point structure 40 includes a slot 41 and a plate 42. The slot 41 is disposed on the first surface 11 of the base 10. The slot 41 has a second through portion 411, and the second through portion 411 is Corresponding to the first penetration 157. The plate body 42 is made of a transparent material, for example, glass or transparent acrylic, and the plate body 42 is provided with a cross-cut pattern which is perpendicular to one of the first lines 421 and a second. The line 422 is formed, and a point of intersection between the first line 421 and the second line 422 forms a reference point 423; the plate 42 is disposed in the slot 41, and the reference point 423 corresponds to the first through portion 157 and the second through portion The position of the part 411. The above-mentioned fine adjustment of the verticality of the photosensitive member 50 is such that the verticality of the fine adjustment photosensitive member 50 can be aligned with the reference point 423.

Referring to the first and sixth figures, the second end 152 of the tubular member 15 is coupled to one end surface 210 of a multi-axis machine 200, and the second end and one end surface of the multi-axis machine 200 A second quick release structure is disposed between the 210s. The second quick release structure is provided with a plurality of second engaging slots 220 on the end surface 210, each second engaging slot 220 has a curvature, and the second plurality of engaging slots The 220 series is disposed in a ring shape around a second center C2. In this embodiment, the second center C2 is coaxial with the first center C1. In addition, a plurality of second protrusions 158 are disposed on the periphery of the second end 152 of the tubular member 15, and the plurality of second engagement slots 220 are annularly disposed around the second center C2. One end of the second protruding member 158 is disposed on the tubular member 15 to abut the end surface 210 of the multi-axis machine 200, and the tubular member 15 is rotated, and each of the second protruding members 158 can be correspondingly engaged with the second engaging groove. In the case of 220, the tubular member 15 can be joined to the end face 210, whereby the seat body 10 can be coupled to the end face 210 of the multi-axis machine 200. As shown in the sixth figure, the end surface 210 of the multi-axis machine 200, the photosensitive element 50, and the reference point 423 of the plate body 42 are concentric, and the photosensitive element 50 can detect the plate body through the first through portion 157 and the second through portion 411. Reference point 423 on 42 (see the second figure).

Referring to the first to fourth figures, the calibration apparatus 100 is disclosed. The assembly procedure may be such that the verticality of the photosensitive element 50 is first adjusted by the adjusting pin 155 and fixed at the center position of the base 10; secondly, the laser sensor 20 is respectively placed in the mounting groove 13; secondly, the lightning is applied The sensor 20 is energized to adjust the laser beam angle, and the positioning pin 134 of the curved groove 133 can be finely adjusted. When the reading value of the laser sensor 20 is the minimum value, that is, the verticality correction is completed, the positioning pin is further 134 is locked in the mounting groove 13; secondly, the plate 42 having the cross-stitched pattern is inserted into the slot 41, and is slid to the position, the reference point 423 is the center reference position of the end face of the multi-axis machine; secondly, the reflecting member is The first protruding member 32 of the 30 is rotated into the first engaging groove 14 of the first surface 11 of the base 10, so that the assembly of the calibration device 100 can be completed, and the combined form is as shown in the first figure.

Please refer to the sixth to eighth figures for explaining the multi-axis mechanical compensation method using the calibration apparatus 100. The calibration device 100, which has been calibrated and assembled, is mounted on the end surface 210 of the multi-axis machine 200. As shown in the sixth figure, the laser sensor 20 is driven to emit a laser beam L1 to measure the sense of the laser. The distance between the light-emitting end 21 of the detector 20 (refer to the second figure) to the reflecting surface 31 is a first distance H1. Next, the first distance H1 is recorded, and the reading value of each of the laser sensors 20 is zeroed, and the first distance H1 is used as the basis for the multi-axis mechanical compensation control. Next, the reflector 30 is removed, and the multi-axis machine 200 is moved over a working platform 230. The target platform 240 is disposed on the working platform 230, and the working platform 230 is measured by the laser sensor 20 to each light-emitting end. a distance of 21, the distance is a second distance H2, the second distance H2 is greater than the first distance H1, as shown in the seventh figure; secondly, moving the multi-axis machine 200 toward the work platform 230 by a third distance H3, the The distance between the first distance H1 and the second distance H2 of the three-distance H3 system is as shown in the eighth figure. At this time, the distance between the laser sensor 20 and the working platform 230 is the first The distance H1, and secondly, whether the reference point is aligned with the target 240 by the photosensitive element 50, thus completing the compensation of the multi-axis machine 200.

Referring to the structure of another embodiment of the base body shown in the ninth and tenth diagrams, the base body 10A is derived from the structure of the seat body 10 of the first figure, and the seat body 10A has a flat disc shape, which has a The first surface 11A and the second surface 12A are provided with a slot 41A and a plurality of first engaging slots 14A on the first surface 11A, and a tubular member 15A is disposed on the second surface 12A, and an isometric surround around the tubular member 15A. There are three mounting slots 13A. The mounting slots 13A are formed by two opposite sidewalls 131A and 132A. One of the sidewalls 131A is provided with an arcuate slot 133A and a first pivoting hole 136A. The laser sensor (not shown) It is shown that it is sandwiched between the two side walls 131A, 132A, pivotally connected to the first pivot hole 136A, and the laser sensor can be finely adjusted and fixed by the curved groove 133A.

In another embodiment of the housing shown in FIG. 11 , the base 10B is derived from the structure of the ninth housing 10A, and the first surface 11B of the housing 10B is provided with one of the first sides. The reference line 421B and the second reference line 422B, the first reference line 421B and the second reference line 422B cross the first through portion 157B, and the intersection of the first reference line 421B and the second reference line 422B corresponds to the first The penetration portion 157B forms a reference point 423B at the intersection of the first reference line 421B and the second reference line 422B. The material or size of the first reference line 421B and the second reference line 422B are not limited, and can be matched with the specifications of the photosensitive element used, so that the photosensitive element can clearly detect the first reference line 421B and the second reference line 422B. The formed reference point 423B is sufficient.

However, the above description is only for the embodiments of the present disclosure, and the scope of the disclosure is not limited thereto. That is to say, the average changes and modifications made by the applicants in accordance with the scope of the application for patents should still fall within the scope of the disclosure of this patent. I would like to ask your review committee to give a clear understanding and pray for the best.

100‧‧‧ calibration device

10, 10A, 10B‧‧‧ body

11, 11A, 11B‧‧‧ first side

12, 12A‧‧‧ second side

13, 13A‧‧‧ mounting slots

131, 132, 131A, 132A‧‧‧ two side walls

133, 133A‧‧‧ arc groove

134‧‧‧ Positioning bolt

135‧‧‧First axial end

136, 136A‧‧‧ first pivot hole

137‧‧‧First outlet hole

14, 14A‧‧‧ first engagement slot

15, 15A‧‧‧Piece

151‧‧‧ first end

152‧‧‧ second end

153‧‧‧Second outlet

154‧‧‧Adjustment hole

155‧‧‧ adjustment bolt

156‧‧‧second axial end

157, 157B‧‧‧ first penetration

158‧‧‧second convex parts

20‧‧‧Laser sensor

21‧‧‧Lighting end

22‧‧‧Second pivot hole

30‧‧‧Reflecting parts

31‧‧‧reflecting surface

32‧‧‧First convex parts

40‧‧‧ reference point structure

41, 41A‧‧‧ slots

411‧‧‧Second penetration

42‧‧‧ board

421‧‧‧First grain

422‧‧‧Second lines

421B‧‧‧First baseline

422B‧‧‧second baseline

423, 423B‧‧ ‧ benchmark points

50‧‧‧Photosensitive elements

200‧‧‧Multi-axis machinery

210‧‧‧ end face

220‧‧‧Second engagement slot

230‧‧‧Working Platform

240‧‧‧ Targets

C1‧‧‧First Center

C2‧‧‧ Second Center

H1‧‧‧first distance

H2‧‧‧Second distance

H3‧‧‧ third distance

L1‧‧‧Laser beam

The first figure is a schematic diagram of the combined structure of one embodiment of the calibration apparatus.

The second drawing is a schematic exploded view of the first embodiment.

The third figure is a bottom view of the first figure embodiment.

The fourth figure is a schematic view of the A-A cross-sectional structure of the third figure.

The fifth figure is a schematic diagram of the action of fine-tuning the laser sensor.

The sixth figure is a schematic view of the structure of the B-B section of the third figure with the reflecting member.

The seventh and eighth figures are schematic views of the structure in which the present disclosure is implemented in multi-axis mechanical compensation control.

The ninth drawing is a top perspective view of another embodiment of the housing of the calibration device.

The tenth figure is a bottom view three-dimensional structure diagram of the ninth embodiment.

The eleventh figure is a schematic bottom perspective view of still another embodiment of the housing of the calibration device.

100‧‧‧ calibration device

10‧‧‧ body

11‧‧‧ first side

12‧‧‧ second side

13‧‧‧Installation slot

131, 132‧‧‧ two side walls

133‧‧‧ arc slot

134‧‧‧ Positioning bolt

135‧‧‧First axial end

136‧‧‧First pivot hole

137‧‧‧First outlet hole

15‧‧‧Clocks

151‧‧‧ first end

152‧‧‧ second end

153‧‧‧Second outlet

154‧‧‧Adjustment hole

158‧‧‧second convex parts

30‧‧‧Reflecting parts

Claims (12)

A calibration device comprising: a body having a first surface; a plurality of laser sensors disposed on the body, each of the laser sensors having a light emitting end to emit a laser beam, the plurality The laser beams are parallel to each other; a reflective member is detachably disposed on the base, the reflective member includes a reflective surface having a reflective characteristic, the reflective surface having a distance from the first surface, each of the The light emitting end is at the same distance from the reflecting surface, and the plurality of laser beams are vertically projected on the reflecting surface; a reference point structure is disposed on the base body, the reference point structure has a reference point; and a photosensitive element is The photo sensor is configured to detect the reference point. The calibration device of claim 1, wherein the base has a plurality of mounting slots, each of the mounting slots for arranging a laser sensor, each of the mounting slots including at least two opposite sidewalls An arcuate slot is disposed on one of the side walls, and a positioning pin is disposed on the arcuate slot, the positioning pin has a first axial end, and the laser sensor is disposed and pivotally connected between the two sidewalls. The light-emitting end is exposed on the first surface, the positioning bolt is disposed in the arc-shaped groove, the first axial end is facing one side of the laser sensor, and the first axial end has a release position And a locking position, the laser sensor is oscillating about the pivoting position when the first axial end is in the releasing position, and the first axial end is located at the locking position, the first The axial end is attached to the side of the laser sensor and the mine is The sensor is positioned in the mounting slot. The calibration device of claim 1, wherein the plurality of laser sensors are centered around the photosensitive element and are disposed around the photosensitive element. The calibration device of claim 3, wherein the plurality of laser sensors are equiangularly disposed around the photosensitive element. The calibration device of claim 1, wherein the first quick release structure is disposed between the reflector and the base body, and the first quick release structure comprises: a plurality of first engagement slots, each of the first a plurality of first engaging grooves are annularly disposed around a first center; and a plurality of first protruding members are annularly disposed around the first center. Each of the first protruding members is correspondingly engaged with a first engaging groove, and the first surface of the seat body and the reflecting member are disposed with respect to one of the reflective surfaces to provide the plurality of first engaging grooves. The other is to set the plurality of first convex members. The calibration device of claim 1, wherein the seat body has a second surface opposite to the first surface, and the second surface is provided with a cylindrical member having a length direction, the tube The piece has a first end and a second end along the length direction, and the photosensitive element is disposed in the barrel, and the tube is provided with a plurality of adjusting bolts, each of the adjusting bolts having a second axis The adjusting pin is disposed at the end of the tubular member, the second axial end is facing the outer surface of the photosensitive element, and the second axial end has a releasing position and a locking position, the second axial direction When the end is in the release position, the second axial end is separated from the photosensitive element, and when the second axial end is in the locking position, the second axial end is slid against the photosensitive element The outer surface of the piece. The calibration device of claim 6, wherein the plurality of adjustment tethers are in a plurality of arrays in the longitudinal direction of the tubular member, and the plurality of adjustment tethers are equiangularly disposed on the tubular member. The calibration device of claim 6, wherein the first end of the tubular member is coupled to the base body, and the base body is provided with a first through portion, the first through portion being located at the photosensitive member Between this reference point structure. The calibration device of claim 8, wherein the reference point structure comprises: a slot disposed on the first surface, the slot having a second through portion, the second through portion corresponding to And the first through portion; and a plate body, which is made of a material of a transparent material, wherein the plate body is provided with a cross engraving, and the cross engraving is formed by one of the first lines and a second line that are perpendicular to each other. The intersection of the first line and the second line forms the reference point, and the plate system is disposed in the slot, and the reference point corresponds to the position of the first through portion and the second through portion. The calibration device of claim 8, wherein the reference point structure comprises a first reference line and a second reference line perpendicular to each other, the first reference line and the second reference line spanning the first In a penetrating portion, an intersection point of the first reference line and the second reference line corresponds to the first penetrating portion, and an intersection point of the first reference line and the second reference line forms the reference point. The calibration device of claim 6, wherein the second end of the tubular member is coupled to one end surface of a multi-axis machine, and the second end is disposed between one end surface of the multi-axis machine There is a second quick release structure, the The second quick release structure includes: a plurality of second engaging grooves, each of the second engaging grooves has a curvature, the plurality of second engaging grooves are annularly disposed around a second center; and the plurality of second protruding members The plurality of second protruding members are annularly disposed around the second center, and each of the second protruding members is correspondingly engaged in a second engaging groove, the second end of the tubular member and the multi-axis mechanical mechanism One of the end faces is provided with the plurality of second engaging grooves, and the other is provided with the plurality of second protruding members. A multi-axis mechanical compensation method, comprising: preparing a calibration device, the calibration device comprising a body, wherein the base body is provided with a plurality of laser sensors, a reflector, a reference point structure and a photosensitive element, the seat The body has a first surface, each of the laser sensors has a light emitting end, and the laser sensor emits a laser beam from the light emitting end, the plurality of laser beams are parallel to each other, and the reflecting member comprises a a reflecting surface having a distance from the first surface, each of the light emitting ends being at the same distance from the reflecting surface, the plurality of laser beams being vertically projected on the reflecting surface, the reference point structure having a reference Point, the photosensitive element is used for detecting the reference point; the calibration device is mounted on one end surface of a movable multi-axis machine; each of the laser sensors is driven to emit a laser beam to measure the a distance from the light exit end to the reflective surface, the distance being a first distance; recording the first distance, and zeroing the reading value of each of the laser sensors, the first distance being used as the multi-axis mechanical compensation Basis of control; the reflector And moving the multi-axis machine to a working platform, wherein the working platform is provided with a target, and the distance between the working platform and each of the light-emitting surfaces is measured by the plurality of laser sensors, the distance is one a second distance, the second distance being greater than the first distance; Moving the multi-axis machine toward the working platform by a third distance, the third distance being a difference between the first distance and the second distance; and detecting, by the photosensitive element, whether the reference point is aligned with the target.