TWI489936B - Coating structure of thermal conductivity having direction - Google Patents

Coating structure of thermal conductivity having direction Download PDF

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TWI489936B
TWI489936B TW101145310A TW101145310A TWI489936B TW I489936 B TWI489936 B TW I489936B TW 101145310 A TW101145310 A TW 101145310A TW 101145310 A TW101145310 A TW 101145310A TW I489936 B TWI489936 B TW I489936B
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coating structure
conductive coating
crystal
heat
thermal conductive
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TW201424548A (en
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高國陞
程達隆
張瑋才
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樹德科技大學
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Description

具方向性導熱鍍膜結構 Directional thermal conductive coating structure

本發明係有關於一種具方向性導熱鍍膜結構,尤其是指一種藉由控制導熱鍍膜結構長晶方向而設計出與結晶面法線方向具有偏移角度之長柱晶體,以便熱源體之熱能可藉由具方向性的長柱晶體傳導至預定位置以進行散熱動作,使得電子裝置整體尺寸設計上具相當大之彈性,不僅大幅增進散熱效果,亦可達到電子裝置微小化目的者。 The invention relates to a directional thermal conductive coating structure, in particular to a long column crystal which is designed to have an offset angle from the normal direction of the crystal surface by controlling the crystal growth direction of the thermal conductive coating structure, so that the thermal energy of the heat source body can be The directional long column crystal is conducted to a predetermined position for heat dissipation operation, so that the overall size of the electronic device is designed to be relatively flexible, which not only greatly enhances the heat dissipation effect, but also achieves the purpose of miniaturization of the electronic device.

按,日常生活中,在許多電器電子裝置中,都會設置許多電子元件,諸如:發光二極體或中央處理單元(CPU)等等,這些電子元件在運作時,通常會持續釋放出熱能而形成熱源;而在許多狀況下,這些熱源都會產生許多不良的影響,例如:減少崩潰負載,縮短使用壽命,或減緩運作速度導致運作功效降低;因此,在 許多電器電子裝置中,會特別在鄰近熱源之位置,加裝至少一散熱模組來逸散熱源所釋放之熱能;目前的散熱模組中,其技術多半朝向材料與結構兩個方向來提升散熱效果;在材料上,多半傾向採用導熱係數高之材料,藉以提升熱傳導之效率;而在結構方面,則多半傾向增加散熱模組之表面積,藉以提升與外界環境之熱交換效率;因此,現有之散熱模組多半係由一散熱基座以及複數個自散熱本體延伸出之散熱鰭片所製成,藉以增加散熱模組之表面積,進而提升熱交換效率;如此,將導致電子裝置的大小尺寸無法微小化。 In daily life, in many electrical and electronic devices, many electronic components, such as light-emitting diodes or central processing units (CPUs), etc., are usually provided, and these electronic components usually continue to release heat energy during operation. Heat sources; in many cases, these heat sources can have many adverse effects, such as: reducing the load on the crash, shortening the service life, or slowing down the operation, resulting in reduced operational efficiency; therefore, In many electrical and electronic devices, at least one heat-dissipating module is added to the heat source to dissipate the heat energy released by the heat-dissipating source. In the current heat-dissipating module, most of the technologies are oriented toward materials and structures to improve heat dissipation. The effect is that materials tend to use materials with high thermal conductivity to improve the efficiency of heat conduction. In terms of structure, most of them tend to increase the surface area of the heat dissipation module, thereby improving the heat exchange efficiency with the external environment; therefore, the existing The heat dissipation module is mostly made up of a heat dissipation base and a plurality of heat dissipation fins extending from the heat dissipation body, thereby increasing the surface area of the heat dissipation module, thereby improving the heat exchange efficiency; thus, the size of the electronic device cannot be increased. Miniaturization.

請參閱中華民國發明專利公開第200632128號『散熱金屬表面鍍膜結構及其製程方法』所述,其係提供一種散熱金屬表面鍍膜結構及其製程方法,此散熱金屬表面鍍膜結構包含至少一散熱金屬及一架狀結構之碳元素所形成於散熱金屬表面之薄膜,且該散熱金屬可為銅質或鋁合金或熱傳導係數高之金屬;且該薄膜製程方法則可以化學氣相沈積、物理氣相沈積、或其他材料製備方法來完成;然,上述前案中,其散熱的鍍膜結構係屬發散式的散熱,意即為無方向性的全面散熱,不僅存在有散熱效果不佳之問題外,其應用上亦有所限制,故如何研發出一種能夠控制散熱方向,使其具多方散熱流向,進而大幅增進散熱效果之鍍膜結構,實有待相關業界再加以思索突破之目標及方向者。 Please refer to the Republic of China Invention Patent Publication No. 200632128 "heat-dissipating metal surface coating structure and its manufacturing method", which provides a heat-dissipating metal surface coating structure and a manufacturing method thereof, the heat-dissipating metal surface coating structure comprising at least one heat-dissipating metal and a carbon structure of a frame structure formed on a surface of a heat dissipating metal surface, and the heat dissipating metal may be a copper or aluminum alloy or a metal having a high thermal conductivity; and the film process method may be chemical vapor deposition or physical vapor deposition. Or other material preparation methods are completed; however, in the above case, the heat-dissipating coating structure is a divergent heat dissipation, which means that the non-directional comprehensive heat dissipation, not only has the problem of poor heat dissipation, the application thereof There are also restrictions on how to develop a coating structure that can control the direction of heat dissipation, so that it has multiple heat dissipation directions, and thus greatly improve the heat dissipation effect. It is waiting for the relevant industry to think about the goal and direction of breakthrough.

今,發明人即是鑑於上述現有適用於電子裝置之散熱結構於 實際實施使用時仍具有多處缺失,於是乃一本孜孜不倦之精神,並藉由其豐富專業知識及多年之實務經驗所輔佐,而加以改善,並據此研創出本發明。 Now, the inventor is in view of the above-mentioned existing heat dissipation structure suitable for an electronic device. There are still many defects in the actual implementation, so it is a tireless spirit, and it is improved by its rich professional knowledge and years of practical experience, and the invention is developed accordingly.

本發明主要目的為提供一種藉由控制導熱鍍膜結構長晶方向而設計出與結晶面法線方向具有偏移角度之長柱晶體,以便熱源體之熱能可藉由具方向性的長柱晶體傳導至預定位置以進行散熱動作,使得電子裝置整體尺寸設計上具相當大之彈性,不僅達到特定方向傳導熱流,亦能具有多方散熱流向,有效地將熱量傳導出來,進而大幅增進散熱效果,亦可節省傳統散熱器件於電子裝置中所佔據之空間,達到電子裝置微小化之目的者。 The main object of the present invention is to provide a long column crystal which has an offset angle from the normal direction of the crystal plane by controlling the crystal growth direction of the thermal conductive coating structure, so that the thermal energy of the heat source body can be conducted by the directional long column crystal conduction. The heat dissipation action is performed to the predetermined position, so that the overall size of the electronic device is designed to have a relatively large elasticity, not only to achieve a specific direction of conduction heat flow, but also to have a plurality of heat dissipation flow directions, effectively transferring heat, thereby greatly improving the heat dissipation effect, and The utility model saves the space occupied by the traditional heat sink device in the electronic device and achieves the purpose of miniaturization of the electronic device.

為了達到上述實施目的,本發明人提出一種具方向性導熱鍍膜結構,係用以披覆於電子裝置(可例如為面板、發光二極體或中央處理單元等消費性電子產品)之熱源體表面,其中導熱鍍膜結構主要係以陶瓷材料以例如為化學氣相沈積或物理氣相沈積方式長晶形成之複數長柱晶體所構成,長柱晶體可為六方晶體、正方晶體或斜方晶體其中之一,且該等長柱晶體係呈奈米等級並具週期性排列,其中每一長柱晶體與其結晶面的法線方向具有一偏移角度,使熱源體之熱能可藉由長柱晶體傳導至預定位置以進行散熱動作;藉此,熱源體之熱能即可藉由具方向性的長柱晶體傳導至預定位置以進行散熱動作,不僅使得熱能可被聚集至特定處再加以排出或以散熱裝置(例如風扇)將熱能帶走,達到電子裝置微小化的目的,亦 可控制散熱方向,增加多方散熱流向,進而達到大幅增進散熱之功效。 In order to achieve the above-mentioned implementation object, the inventors propose a directional thermal conductive coating structure for coating a heat source surface of an electronic device (which may be, for example, a consumer electronic product such as a panel, a light emitting diode, or a central processing unit). The thermally conductive coating structure is mainly composed of a plurality of long column crystals formed by a ceramic material by, for example, chemical vapor deposition or physical vapor deposition, and the long column crystal may be a hexagonal crystal, a tetragonal crystal or an orthorhombic crystal. First, the long columnar crystal system has a nanometer scale and is periodically arranged, wherein each long column crystal has an offset angle from a normal direction of the crystal face thereof, so that the heat energy of the heat source body can be conducted by the long column crystal To the predetermined position for performing the heat dissipation operation; thereby, the heat energy of the heat source body can be conducted to the predetermined position by the directional long column crystal to perform the heat dissipation operation, so that the heat energy can be collected to a specific place and then discharged or dissipated. The device (such as a fan) takes away the heat to achieve the purpose of miniaturization of the electronic device. It can control the heat dissipation direction and increase the heat dissipation direction of multiple parties, thus achieving the effect of greatly improving heat dissipation.

在本發明的一實施例中,導熱鍍膜結構係具有不同偏移角度之長柱晶體,藉此達到多方散熱流向以增進散熱之功效。 In an embodiment of the invention, the thermally conductive coating structure has long column crystals with different offset angles, thereby achieving multi-side heat dissipation flow to enhance heat dissipation.

在本發明的一實施例中,偏移角度介於5°~50°範圍,較佳係介於15°~45°的範圍。 In an embodiment of the invention, the offset angle is in the range of 5° to 50°, preferably in the range of 15° to 45°.

在本發明的一實施例中,導熱鍍膜結構係具有透明性,使得導熱鍍膜可在不影響電子裝置之外觀下,達到具特定方向傳導熱流之功效,以增加電子裝置之美觀及商品效益。 In an embodiment of the invention, the thermal conductive coating structure has transparency, so that the thermal conductive coating can achieve the effect of conducting heat flow in a specific direction without affecting the appearance of the electronic device, thereby increasing the aesthetic and commercial benefits of the electronic device.

(1)‧‧‧導熱鍍膜結構 (1) ‧‧‧thermal coating structure

(11)‧‧‧長柱晶體 (11)‧‧‧Long column crystal

(12)‧‧‧結晶面 (12)‧‧‧ Crystallized surface

(2)‧‧‧熱源體 (2) ‧ ‧ heat source

第一圖:本發明較佳實施例之具方向性導熱鍍膜結構其結構剖面示意圖 First: a schematic cross-sectional view of a directional thermal conductive coating structure according to a preferred embodiment of the present invention

第二圖:本發明較佳實施例長柱晶體不具有偏移角度之導熱鍍膜結構的掃描式電子顯微鏡(SEM)截面圖 Second: Scanning electron microscope (SEM) cross-section of a thermally conductive coating structure having a long-column crystal without an offset angle in a preferred embodiment of the present invention

第三圖:本發明較佳實施例長柱晶體具有15°偏移角度之導熱鍍膜結構的掃描式電子顯微鏡(SEM)截面圖 Third: Scanning electron microscope (SEM) cross-section of a thermally conductive coating structure having a 15° offset angle of a long column crystal according to a preferred embodiment of the present invention

第四圖:本發明較佳實施例長柱晶體具有30°偏移角度之導熱鍍膜結構的掃描式電子顯微鏡(SEM)截面圖 Fourth: Scanning electron microscope (SEM) cross-section of a thermally conductive coating structure having a 30° offset angle of a long column crystal according to a preferred embodiment of the present invention

本發明之目的及其結構功能上的優點,將依據以下圖面所示之結構,配合具體實施例予以說明,俾使審查委員能對本發明有更深入且具體之瞭解。 The object of the present invention and its structural and functional advantages will be explained in conjunction with the specific embodiments according to the structure shown in the following drawings, so that the reviewing committee can have a more in-depth and specific understanding of the present invention.

首先,請參閱第一圖所示,係本發明較佳實施例之具方向性導熱鍍膜結構其結構剖面示意圖;值得注意的是,本發明之具方向性導熱鍍膜結構(1)係用以披覆於電子裝置之熱源體(2)表面,其中電子裝置可例如為面板、發光二極體或中央處理單元等消費性電子產品;本發明之導熱鍍膜結構(1)主要係以陶瓷材料長晶形成之複數長柱晶體(11)所構成,該等長柱晶體(11)係呈奈米等級且具週期性排列,其中每一長柱晶體(11)與其結晶面(12)的法線方向具有一偏移角度θ,使熱源體(2)之熱能可藉由長柱晶體(11)傳導至預定位置以進行散熱動作;其中,上述之導熱鍍膜結構(1)可以一化學氣相沈積(例如蒸鍍或離子濺鍍等)亦或是以一物理氣相沈積(例如有機金屬化學氣相沉積(MOCVD)或微波電漿輔助化學氣相沉積(MPCVD)等)控制其長晶方向具體實施,而其他各種常見或創新的鍍膜方法亦可以用於實作本發明之導熱鍍膜結構(1);在此值得注意的,本發明的標的並不在於所採用的鍍膜製程方法,且許多相關的製程方法已經有大量的揭露於文獻或先前技術中,故對導熱鍍膜結構(1)之製程方式不再作贅述。 First, referring to the first figure, a schematic cross-sectional view of a directional thermal conductive coating structure according to a preferred embodiment of the present invention; it is noted that the directional thermal conductive coating structure (1) of the present invention is used for draping Covering the surface of the heat source body (2) of the electronic device, wherein the electronic device can be, for example, a consumer electronic product such as a panel, a light emitting diode or a central processing unit; the thermally conductive coating structure (1) of the present invention is mainly made of a ceramic material. Formed by a plurality of long column crystals (11) which are in a nanometer order and have a periodic arrangement in which the normal direction of each long column crystal (11) and its crystal plane (12) Having an offset angle θ, the thermal energy of the heat source body (2) can be conducted to a predetermined position by the long column crystal (11) for heat dissipation operation; wherein the heat conductive coating structure (1) can be deposited by chemical vapor deposition ( For example, vapor deposition or ion sputtering, etc., or a physical vapor deposition (such as organic metal chemical vapor deposition (MOCVD) or microwave plasma assisted chemical vapor deposition (MPCVD), etc.) And various other common or innovative coatings The method can also be used to implement the thermally conductive coating structure (1) of the present invention; it is noted here that the subject matter of the present invention is not in the coating process method employed, and many related process methods have been extensively disclosed in the literature. Or in the prior art, the process of the thermally conductive coating structure (1) will not be described again.

此外,於本實施例中,導熱鍍膜結構(1)可具有不同偏移角度θ之長柱晶體(11),例如第一圖之右半部其長柱晶體(11)係朝右偏移,而左半部之長柱晶體(11)係朝左偏移,其中長柱晶體(11)與結晶面(12)法線方向之偏移角度θ可介於5°~50°,較佳係介於15°~45°的範圍;再者,長柱晶體(11)根據陶瓷材料種類的不同,其晶格可為六方晶體、正方晶體或斜方晶體其中之一,在此並不限定。 In addition, in the present embodiment, the thermally conductive coating structure (1) may have long column crystals (11) having different offset angles θ, for example, the right half of the first figure, the long column crystals (11) are shifted to the right, The long column crystal (11) in the left half is shifted to the left, wherein the angle θ of the long column crystal (11) and the normal direction of the crystal face (12) may be between 5° and 50°, preferably Further, the long column crystal (11) may be one of a hexagonal crystal, a tetragonal crystal or an orthorhombic crystal depending on the type of the ceramic material, and is not limited thereto.

根據上述較佳實施例之具方向性導熱鍍膜結構(1)於實際實施使用時,請再參閱第一圖所示,當電子裝置之熱源體(2)(例如面板)表面披覆有本發明之導熱鍍膜結構(1)時,熱源體(2)之熱能即可藉由具方向性的長柱晶體(11)傳導至預定位置以進行散熱動作,其熱能擴散方式如第一圖中之箭號所示,使得熱能可被聚集至特定處再加以排出或以風扇將熱能帶走;其中,本發明之導熱鍍膜結構(1)可具有透明性,使其不影響電子裝置之外觀,以增加美觀及商品效益。 When the directional thermal conductive coating structure (1) according to the above preferred embodiment is used in practice, please refer to the first figure, when the surface of the heat source body (2) (for example, the panel) of the electronic device is covered with the present invention. In the thermal conductive coating structure (1), the thermal energy of the heat source body (2) can be conducted to a predetermined position by the directional long column crystal (11) for heat dissipation, and the thermal energy diffusion mode is as shown in the first figure. No. so that the heat energy can be collected to a specific place and then discharged or taken away by a fan; wherein the heat conductive coating structure (1) of the present invention can have transparency so that it does not affect the appearance of the electronic device, thereby increasing Aesthetic and commodity benefits.

請參閱第二圖所示,為本發明較佳實施例導熱鍍膜結構之1μm解析的掃描式電子顯微鏡(SEM)截面圖,其中長柱晶體(11)不具有偏移角度,意即導熱鍍膜結構(1)其長柱晶體(11)與結晶面(12)的法線方向不具有偏移角度θ,因此無法達到特定方向傳導熱流的目的;請再參閱第三、四圖所示,分別為長柱晶體具有15°以及30°偏移角度之導熱鍍膜結構的掃描式電子顯微 鏡(SEM)截面圖;藉此,電子裝置設計時,可將熱源體(2)放置於最佳結構之位置,再控制導熱鍍膜結構(1)長晶方向設計出所需之偏移角度θ,不僅可控制散熱方向,增加多方散熱流向,進而達到大幅增進散熱之功效外,亦能符合散熱裝置(例如風扇等)之最佳化位置設計,以達到電子裝置微小化的目的。 Please refer to the second figure, which is a 1 μm analytical scanning electron microscope (SEM) cross-sectional view of a thermally conductive coating structure according to a preferred embodiment of the present invention, wherein the long column crystal (11) does not have an offset angle, that is, a thermally conductive coating structure. (1) The long column crystal (11) does not have an offset angle θ with the normal direction of the crystal plane (12), so the purpose of conducting heat flow in a specific direction cannot be achieved; please refer to the third and fourth figures, respectively. Scanning electron microscopy of a thermally conductive coating structure with long column crystals at 15° and 30° offset angles SEM (cross-sectional view); thereby, in the design of the electronic device, the heat source body (2) can be placed at the position of the optimal structure, and then the thermal conductive coating structure (1) the crystal growth direction is designed to design the required offset angle θ It not only controls the heat dissipation direction, but also increases the heat dissipation direction of multiple parties, thereby achieving the effect of greatly improving heat dissipation, and also conforming to the optimal position design of the heat sink (such as a fan) to achieve the purpose of miniaturization of the electronic device.

值得注意的,本發明之導熱鍍膜結構(1)其長柱晶體(11)與結晶面(12)法線方向的偏移角度θ可依實際需要藉由控制長晶方向而設計,因此不管有偏移角度θ多大均為本發明所保護的精神範圍,且所產生之功效與技術上之優點皆相同,應視為本發明之等效變化或修飾。 It should be noted that the thermal conductive coating structure (1) of the present invention has an offset angle θ between the long column crystal (11) and the normal direction of the crystal plane (12), which can be designed by controlling the crystal growth direction according to actual needs, so The extent of the offset angle θ is the spirit of the invention, and the resulting effects are the same as the technical advantages, and should be considered as equivalent variations or modifications of the present invention.

由上述之實施說明可知,本發明與現有技術相較之下,本發明具有以下優點: It can be seen from the above description that the present invention has the following advantages compared with the prior art:

1.本發明藉由控制導熱鍍膜結構長晶方向而設計出與結晶面法線方向具有偏移角度之長柱晶體,使得熱源體之熱能可藉由具方向性的長柱晶體傳導至預定位置以進行散熱動作,不僅可達到特定方向傳導熱流,亦能具有多方散熱流向,有效地將熱量傳導出來,進而大幅增進散熱效果,對保護電子裝置的使用壽命,實有莫大的助益。 1. The present invention designs a long column crystal having an offset angle from the normal direction of the crystal plane by controlling the crystal growth direction of the thermally conductive coating structure, so that the thermal energy of the heat source body can be conducted to a predetermined position by the directional long column crystal. In order to dissipate heat, not only can the heat flow be transmitted in a specific direction, but also the heat dissipation direction can be effectively transmitted, thereby effectively transferring heat, thereby greatly improving the heat dissipation effect, which is of great benefit to protecting the service life of the electronic device.

2.本發明之長柱晶體將熱源體的熱能依所需路徑排出,可配合散熱裝置之最佳化位置設計,使得整個電子裝置節省不少傳統散熱器件所佔據之空間,不僅兼顧了散熱的效率,也同時達到電子裝 置微小化的目的。 2. The long column crystal of the invention discharges the heat energy of the heat source body according to the required path, and can be designed with the optimized position of the heat sink device, so that the entire electronic device saves a lot of space occupied by the conventional heat sink device, not only taking into consideration the heat dissipation. Efficiency, and at the same time reach electronic equipment Set the purpose of miniaturization.

綜上所述,本發明之具方向性導熱鍍膜結構,的確能藉由上述所揭露之實施例,達到所預期之使用功效,且本發明亦未曾公開於申請前,誠已完全符合專利法之規定與要求。爰依法提出發明專利之申請,懇請惠予審查,並賜准專利,則實感德便。 In summary, the directional thermal conductive coating structure of the present invention can achieve the intended use efficiency by the above-disclosed embodiments, and the present invention has not been disclosed before the application, and has completely complied with the patent law. Regulations and requirements.爰Issuing an application for a patent for invention in accordance with the law, and asking for a review, and granting a patent, is truly sensible.

惟,上述所揭之圖示及說明,僅為本發明之較佳實施例,非為限定本發明之保護範圍;大凡熟悉該項技藝之人士,其所依本發明之特徵範疇,所作之其它等效變化或修飾,皆應視為不脫離本發明之設計範疇。 The illustrations and descriptions of the present invention are merely preferred embodiments of the present invention, and are not intended to limit the scope of the present invention; those skilled in the art, which are characterized by the scope of the present invention, Equivalent variations or modifications are considered to be within the scope of the design of the invention.

(1)‧‧‧導熱鍍膜結構 (1) ‧‧‧thermal coating structure

(11)‧‧‧長柱晶體 (11)‧‧‧Long column crystal

(12)‧‧‧結晶面 (12)‧‧‧ Crystallized surface

(2)‧‧‧熱源體 (2) ‧ ‧ heat source

Claims (8)

一種具方向性導熱鍍膜結構,係披覆於電子裝置之熱源體表面,導熱鍍膜結構主要係以陶瓷材料長晶形成之複數長柱晶體所構成,該等長柱晶體係呈奈米等級且具週期性排列,其中每一長柱晶體與其結晶面的法線方向具有一偏移角度,使該熱源體之熱能藉由該等長柱晶體傳導至預定位置以進行散熱,其中該偏移角度介於5°~50°範圍。 A directional thermal conductive coating structure is coated on the surface of a heat source body of an electronic device, and the heat conductive coating structure is mainly composed of a plurality of long column crystals formed by the growth of a ceramic material, and the long columnar crystal system has a nanometer scale and has Periodically arranged, wherein each long column crystal has an offset angle from a normal direction of the crystal face thereof, so that the heat energy of the heat source body is conducted to the predetermined position by the elongated column crystal to perform heat dissipation, wherein the offset angle is In the range of 5 ° ~ 50 °. 如申請專利範圍第1項所述之具方向性導熱鍍膜結構,其中該導熱鍍膜結構係具有不同偏移角度之長柱晶體。 The directional thermal conductive coating structure according to claim 1, wherein the thermally conductive coating structure is a long column crystal having different offset angles. 如申請專利範圍第1項所述之具方向性導熱鍍膜結構,其中該偏移角度介於15°~45°範圍。 The directional thermal conductive coating structure according to claim 1, wherein the offset angle is in the range of 15° to 45°. 如申請專利範圍第1項所述之具方向性導熱鍍膜結構,其中該長柱晶體係為六方晶體、正方晶體或斜方晶體其中之一。 The directional thermal conductive coating structure according to claim 1, wherein the long columnar crystal system is one of a hexagonal crystal, a tetragonal crystal or an orthorhombic crystal. 如申請專利範圍第1項所述之具方向性導熱鍍膜結構,其中該電子裝置係為一消費性電子產品。 The directional thermal conductive coating structure according to claim 1, wherein the electronic device is a consumer electronic product. 如申請專利範圍第1項所述之具方向性導熱鍍膜結構,其中該導熱鍍膜結構係具有透明性。 The directional thermal conductive coating structure according to claim 1, wherein the thermally conductive coating structure has transparency. 如申請專利範圍第1項所述之具方向性導熱鍍膜結構,其中該 導熱鍍膜結構係以一化學氣相沈積而形成。 The directional thermal conductive coating structure as described in claim 1 of the patent application, wherein the The thermally conductive coating structure is formed by a chemical vapor deposition. 如申請專利範圍第1項所述之具方向性導熱鍍膜結構,其中該導熱鍍膜結構係以一物理氣相沈積而形成。 The directional thermal conductive coating structure according to claim 1, wherein the thermally conductive coating structure is formed by a physical vapor deposition.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201121878A (en) * 2009-12-30 2011-07-01 Hsi-Lien Hsiao Vertically oriented nanowires array structure and method thereof
TW201139721A (en) * 2009-12-11 2011-11-16 Ulvac Inc Thin film manufacturing apparatus, thin film manufacturing method, and method for manufacturing semiconductor device
TWM439842U (en) * 2012-04-19 2012-10-21 Jia-Ming Dong Heat dissipating apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201139721A (en) * 2009-12-11 2011-11-16 Ulvac Inc Thin film manufacturing apparatus, thin film manufacturing method, and method for manufacturing semiconductor device
TW201121878A (en) * 2009-12-30 2011-07-01 Hsi-Lien Hsiao Vertically oriented nanowires array structure and method thereof
TWM439842U (en) * 2012-04-19 2012-10-21 Jia-Ming Dong Heat dissipating apparatus

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