TWI487446B - A composite material having a composite structure - Google Patents

A composite material having a composite structure Download PDF

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TWI487446B
TWI487446B TW102122190A TW102122190A TWI487446B TW I487446 B TWI487446 B TW I487446B TW 102122190 A TW102122190 A TW 102122190A TW 102122190 A TW102122190 A TW 102122190A TW I487446 B TWI487446 B TW I487446B
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composite structure
bonding material
core
joint
nano particles
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TW102122190A
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TW201501595A (en
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Jenn Ming Song
Shao Ju Shih
I Chen Chien
Chia Hang Tsai
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Nat Univ Chung Hsing
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Description

具有複合結構的接合材料Bonding material with composite structure

本發明是有關於一種接合材料,特別是指一種具有複合結構的接合材料。The present invention relates to a joining material, and more particularly to a joining material having a composite structure.

半導體、電子電路、電子機械等一般皆是透過焊料熔融固定各種電子元件,以確保其導電性及產品可靠度。但以往的焊料主要為錫與鉛的合金,由於鉛為毒性重金屬,不僅會對環境造成汙染,更會對人體產生重大的危害。Semiconductors, electronic circuits, electronic machinery, etc. generally fuse various electronic components through solder to ensure their electrical conductivity and product reliability. However, the solder used in the past is mainly an alloy of tin and lead. Since lead is a toxic heavy metal, it not only causes environmental pollution, but also causes serious harm to the human body.

隨著半導體裝置及電子零件的微小化,以奈米材料進行接合應用的可能性也逐漸受到矚目,當物體尺寸進入奈米量級時,由於其本身具有之小尺寸效應、表面效應等,而展現出許多特有的性質,例如熔點下降,反應性能提高等等,近年來已成為研究開發的熱門方向。以目前流行的奈米銀粒子為例,因其燒結溫度低,又具有低電阻及低熔點的特性,只需簡單的熱處理便可應用在導電用途或電子元件接合的使用。因此,當使用奈米銀粒子作為半導體裝置或電子元件等的接合材料時,便可在無高熱破壞的情況下進行燒結接合,以降低對元件或基板的損害。With the miniaturization of semiconductor devices and electronic components, the possibility of bonding applications using nanomaterials has gradually attracted attention. When the size of an object enters the nanometer scale, it has its small size effect, surface effect, etc. It has shown many unique properties, such as a decrease in melting point, improved reaction performance, etc., which has become a hot trend in research and development in recent years. Taking the current popular nano silver particles as an example, because of its low sintering temperature, low electrical resistance and low melting point, it can be applied to conductive applications or electronic component bonding by simple heat treatment. Therefore, when a nano silver particle is used as a bonding material for a semiconductor device or an electronic component or the like, sintering bonding can be performed without high heat damage to reduce damage to an element or a substrate.

然而,以奈米材料進行接合應用雖具有許多的優點,但是,要讓奈米級尺寸的粉體能均勻且穩定地分散,一般都需要額外添加分散助劑,以穩定奈米粉體並避免奈米粉體的聚集,而附著於奈米粉體表面的分散助劑,於燒結的過程中容易殘存,而影響接合的強度。此外,奈米材料也不易進行大規模的量產,且同時具有生產成本過高的問題,因此仍然無法得到廣泛的應用。However, although the bonding application using nano materials has many advantages, in order to uniformly and stably disperse the nano-sized powder, it is generally necessary to additionally add a dispersing aid to stabilize the nano-powder and avoid the naphthalene. The aggregation of the rice flour and the dispersing aid attached to the surface of the nanopowder tend to remain during the sintering process, which affects the strength of the joint. In addition, nanomaterials are not easy to mass-produce, and at the same time have the problem of excessive production costs, so they still cannot be widely used.

基於上述接合材料的發展與應用,如何有效地提升接合強度,並以製程簡易且能降低生產成本的方法製作出以替代鉛金屬的接合材料,係為本發明研究改良的重要目標。Based on the development and application of the above-mentioned bonding materials, how to effectively improve the bonding strength, and to make a bonding material instead of lead metal in a simple process and a low production cost is an important goal of research and improvement of the present invention.

因此,本發明之目的,即在提供一種發展價值高且具有高接合強度之具有複合結構的接合材料。Accordingly, it is an object of the present invention to provide a joining material having a composite structure having high development value and high joint strength.

於是,本發明具有複合結構的接合材料,經燒結後可用以進行二物件的接合,包含一核心,及多個環繞該核心的奈米粒子。該核心由金屬材料構成且平均粒徑不大於1000 nm;該等奈米粒子由金屬材料構成且可與該核心的金屬材料相同或不同。Thus, the present invention has a composite structure of a bonding material which, after sintering, can be used to bond two objects, comprising a core, and a plurality of nanoparticles surrounding the core. The core is composed of a metallic material and has an average particle diameter of not more than 1000 nm; the nanoparticles are composed of a metallic material and may be the same as or different from the metallic material of the core.

較佳地,前述具有複合結構的接合材料,其中,該等奈米粒子是均勻的散布於該核心的表面,且為了有足夠的表面讓該等奈米粒子分散,該核心的粒徑為該等奈米粒子的粒徑的10倍以上。Preferably, the foregoing bonding material having a composite structure in which the nano particles are uniformly dispersed on the surface of the core, and in order to have a sufficient surface for dispersing the nanoparticles, the particle diameter of the core is The particle diameter of the nanoparticles is 10 times or more.

較佳地,前述具有複合結構的接合材料,其中,該核心的平均粒徑不大於300 nm。Preferably, the foregoing bonding material having a composite structure, wherein the core has an average particle diameter of not more than 300 nm.

較佳地,前述具有複合結構的接合材料,其中,該等奈米粒子的平均粒徑不大於100 nm。Preferably, the foregoing bonding material having a composite structure, wherein the nano particles have an average particle diameter of not more than 100 nm.

更佳地,前述具有複合結構的接合材料,其中,該等奈米粒子的平均粒徑不大於20 nm。More preferably, the aforementioned bonding material having a composite structure in which the average particle diameter of the nanoparticles is not more than 20 nm.

較佳地,前述具有複合結構的接合材料,其中,該核心的構成材料選自金、銀、銅,及鋁。Preferably, the foregoing bonding material having a composite structure, wherein the core constituent material is selected from the group consisting of gold, silver, copper, and aluminum.

更佳地,前述具有複合結構的接合材料,其中,該核心的構成材料選自銀。More preferably, the aforementioned bonding material having a composite structure in which the constituent material of the core is selected from silver.

較佳地,前述具有複合結構的接合材料,其中,該等奈米粒子的構成材料選自金、銀、銅,及鋁。Preferably, the foregoing bonding material having a composite structure, wherein the constituent materials of the nano particles are selected from the group consisting of gold, silver, copper, and aluminum.

更佳地,前述具有複合結構的接合材料,其中,該等奈米粒子的構成材料選自銀。More preferably, the aforementioned bonding material having a composite structure in which the constituent materials of the nano particles are selected from silver.

較佳地,前述具有複合結構的接合材料,其中,該接合材料經過150℃至400℃燒結後,可用以接合二銅金屬,其接點的剪斷接合強度大於20 MPa。Preferably, the foregoing bonding material having a composite structure, wherein the bonding material is sintered after being sintered at 150 ° C to 400 ° C, may be used to bond the copper metal, and the joint shear strength of the joint is greater than 20 MPa.

2‧‧‧具有複合結構的接合材料2‧‧‧Material materials with composite structure

21‧‧‧核心21‧‧‧ core

22‧‧‧奈米粒子22‧‧‧Nano particles

3‧‧‧剪斷接合強度測試設備3‧‧‧Shut joint strength test equipment

31‧‧‧第一接合試料31‧‧‧First joint sample

32‧‧‧第二接合試料32‧‧‧Second joint sample

33‧‧‧推進器33‧‧‧ propeller

34‧‧‧接合部34‧‧‧ joints

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中:圖1是一示意圖,說明本發明具有複合結構的接合材料的一較佳實施例;圖2是一分佈圖,說明利用噴霧熱解法所得銀粉體材 料之平均粒徑分佈;圖3是一穿透式電子顯微鏡圖,說明本發明具有複合結構的接合材料的實際態樣;圖4是一示意圖,說明用以進行剪斷接合強度測試之設備;及圖5是一直方圖,說明以不同接合材料進行剪斷接合強度測試之測試結果。Other features and advantages of the present invention will be apparent from the embodiments of the present invention. FIG. 1 is a schematic view showing a preferred embodiment of the present invention having a composite structure; FIG. 2 is a Distribution map showing the silver powder obtained by spray pyrolysis The average particle size distribution of the material; FIG. 3 is a transmission electron microscope diagram illustrating the actual state of the bonding material having the composite structure of the present invention; FIG. 4 is a schematic view showing the apparatus for performing the shear joint strength test; And Figure 5 is a histogram showing the test results of the shear joint strength test with different joint materials.

在本發明被詳細描述之前,應該注意在以下的說明內容中,類似的元件是以相同的編號來表示。Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same reference numerals.

參閱圖1,本發明具有複合結構的接合材料2的一較佳實施例,包含一核心21,及多個環繞該核心的奈米粒子22,該具有複合結構的接合材料2經燒結後可用以進行二物件的接合。Referring to FIG. 1, a preferred embodiment of a bonding material 2 having a composite structure comprises a core 21 and a plurality of nanoparticles 22 surrounding the core. The bonding material 2 having a composite structure can be used after sintering. Engage the two objects.

該核心21由金屬材料構成且平均粒徑不大於1000 nm,較佳地,該核心21的平均粒徑不大於300 nm。The core 21 is composed of a metal material and has an average particle diameter of not more than 1000 nm. Preferably, the core 21 has an average particle diameter of not more than 300 nm.

該等奈米粒子22是均勻的散布於該核心21的表面且由金屬材料構成,該等奈米粒子22的平均粒徑不大於100 nm,較佳地,該等奈米粒子22的平均粒徑不大於20 nm。其中,該核心21的粒徑為該等奈米粒子22的粒徑的10倍以上,以使該等奈米粒子22能充分地包覆且覆蓋於該核心21的表面。此外,要說明的是,該等奈米粒子22可以單層或多層的形式均勻地散布於該核心21的表面。利 用該核心21提供該等奈米粒子22分散的表面,因此不需再額外添加分散助劑,且於後續燒結的過程中,不會因該分散助劑的殘留而影響接合的強度。The nanoparticles 22 are uniformly dispersed on the surface of the core 21 and are composed of a metal material. The average particle diameter of the nano particles 22 is not more than 100 nm, preferably, the average particle size of the nano particles 22. The diameter is no more than 20 nm. The particle diameter of the core 21 is 10 times or more the particle diameter of the nanoparticles 22 so that the nanoparticles 22 can be sufficiently coated and covered on the surface of the core 21. Further, it is to be noted that the nanoparticles 22 may be uniformly dispersed on the surface of the core 21 in the form of a single layer or a plurality of layers. Profit The core 21 is used to provide the surface in which the nanoparticles 22 are dispersed, so that no additional dispersing aid is required, and the strength of the joint is not affected by the residual of the dispersing aid during the subsequent sintering.

該核心21及該等奈米粒子22的構成材料可選自金、銀、銅,及鋁,且可為相同或不同,由於銀為導電率最高的金屬,價格又比金便宜,且相較於銅及鋁,銀在高溫時也不易在表面形成氧化物,因此,於本較佳實施例中,是以該核心21及該等奈米粒子22的構成材料皆選自銀為例來作說明。The core 21 and the constituent materials of the nano particles 22 may be selected from the group consisting of gold, silver, copper, and aluminum, and may be the same or different. Since silver is the metal with the highest conductivity, the price is cheaper than gold, and compared. In copper and aluminum, silver does not easily form an oxide on the surface at a high temperature. Therefore, in the preferred embodiment, the core 21 and the constituent materials of the nano particles 22 are selected from silver. Description.

詳細的說,本發明該具有複合結構的接合材料2可使用例如化學還原法(Chemical reduction)、沉澱法(Precipitation)、溶膠凝膠法(Sol-gel),或噴霧熱解法(Spray pyrolysis)等不同的製作方法製得,其中,噴霧熱解法因其為快速、連續性的製程,且不需使用有機溶劑還兼具有低成本及可量產的優勢,故選用噴霧熱解法作為本發明具有複合結構的接合材料2的製備方法。In detail, the bonding material 2 having the composite structure of the present invention may be, for example, a chemical reduction method, a precipitation method, a Sol-gel method, or a spray pyrolysis method. Different production methods are prepared, wherein the spray pyrolysis method has the advantages of low cost and mass production because it is a rapid and continuous process, and does not require the use of an organic solvent, so the spray pyrolysis method is selected as the present invention. A method of preparing a bonding material 2 of a composite structure.

具體的說,利用噴霧熱解法製備本發明該具有複合結構的接合材料2,是先利用含有銀離子的前驅物溶液溶於去離子水中形成水溶液,接著以超音波造霧機將水溶液分散成微小液滴,再將液滴與載流氣體送入一管狀加熱爐中,通過該管狀加熱爐後經過溶劑蒸發、溶質過飽和析出、熱解與氧化反應後,即可以靜電集塵技術收集而得銀粉體材料。噴霧熱解法因可由載流氣體的流速來控制熱處 理的時間,因此在短時間內即可去除液相而得到乾淨粉體,且因使用去離子水當作溶劑,而不會對環境造成汙染,噴霧熱解法不需特殊的設備也不需昂貴的原料即能產生高純度的潔淨粉體。Specifically, the bonding material 2 having the composite structure of the present invention is prepared by a spray pyrolysis method by first dissolving a precursor solution containing silver ions in deionized water to form an aqueous solution, and then dispersing the aqueous solution into a fine mist by an ultrasonic fogger. The droplets are sent to a tubular heating furnace, and after passing through the tubular heating furnace, after solvent evaporation, solute supersaturation precipitation, pyrolysis and oxidation reaction, the particles can be collected by electrostatic dust collection technology. Powder material. Spray pyrolysis is controlled by the flow rate of the carrier gas Reasonable time, so the liquid phase can be removed in a short time to get a clean powder, and because deionized water is used as a solvent without polluting the environment, the spray pyrolysis method does not require special equipment and is expensive. The raw materials produce high purity clean powder.

參閱圖2,圖2為利用噴霧熱解法所得該銀粉體材料之平均粒徑分佈圖,可知該銀粉體材料主要分為粒徑約為20 nm及粒徑介於100 nm至300 nm此二個群組,該粒徑約為20 nm的粉體即為本發明該等奈米粒子22,而粒徑介於100 nm至300 nm的粉體即為本發明該核心21,接著,將該等銀粉體材料加入溶劑經過混合攪拌後,該等粒徑較小的奈米粒子22即會散布於該核心21的表面,而可製得如圖3所示之本發明該具有複合結構的接合材料2。而於實際進行接合應用時,可先將該等銀粉體材料加入溶劑混合攪拌,令該等粒徑較小的奈米粒子22散布於該核心21的表面,形成複合結構的接合材料後,再將該接合材料塗佈於待接合面上即可。Referring to FIG. 2, FIG. 2 is a graph showing the average particle size distribution of the silver powder material obtained by spray pyrolysis. The silver powder material is mainly divided into a particle size of about 20 nm and a particle diameter of 100 nm to 300 nm. In two groups, the powder having a particle diameter of about 20 nm is the nanoparticle 22 of the present invention, and the powder having a particle diameter of 100 nm to 300 nm is the core 21 of the present invention, and then, After the silver powder material is added to the solvent and mixed and stirred, the smaller particle diameters of the nano particles 22 are dispersed on the surface of the core 21, and the composite structure of the present invention as shown in FIG. 3 can be obtained. Bonding material 2. When the bonding application is actually performed, the silver powder materials may be firstly added to the solvent to be mixed and stirred, so that the nano particles 22 having a smaller particle diameter are dispersed on the surface of the core 21 to form a bonding material of the composite structure. The bonding material may be applied to the surface to be joined.

利用該等奈米粒子22熔點較低的特性,因此,於較低的燒結溫度條件下,即可使該等奈米粒子22熔融,而使該核心21、該等奈米粒子22,及待接合物融接在一起。再者,由於該等奈米粒子22的粒徑尺度屬奈米尺寸,更可提高與待接合物表面間的接觸面積,有助於增加結合性以提升接合強度。By utilizing the low melting point characteristics of the nanoparticles 22, the nanoparticles 22 can be melted at a lower sintering temperature, and the core 21, the nanoparticles 22, and The conjugates are fused together. Furthermore, since the particle size scale of the nanoparticles 22 is in the nanometer size, the contact area with the surface of the object to be joined can be increased, which contributes to an increase in bonding to improve the bonding strength.

為了使本發明具有複合結構的接合材料2的功 效更為清楚,以本發明與單純為次微米級及奈米級尺寸的接合材料進行二銅金屬的接合,並比較其接點的剪斷接合強度,加以說明本發明具有複合結構的接合材料2於實際應用上的優勢。In order to make the work of the joint material 2 having the composite structure of the present invention It is more clear that the bonding material of the present invention is bonded to the bonding material of the sub-micron and nano-sized dimensions, and the shear joint strength of the joint is compared, and the bonding material having the composite structure of the present invention is explained. 2 advantages in practical applications.

參閱圖4,圖4為進行剪斷接合強度測試之設備示意圖,該剪斷接合強度測試設備3包含一第一接合試料31、一相對於該第一接合試料31設置的第二接合試料32,及一用以推動該第一接合試料31的推進器33,於本次剪斷接合強度測試中,該第一、二接合試料31、32皆選自銅金屬。Referring to FIG. 4, FIG. 4 is a schematic diagram of an apparatus for performing a shear joint strength test. The shear joint strength testing apparatus 3 includes a first joint sample 31 and a second joint sample 32 disposed relative to the first joint sample 31. And a pusher 33 for pushing the first joint sample 31. In the shear strength test, the first and second joint samples 31 and 32 are all selected from copper metal.

於測試進行時,首先將待測試之接合材料與該第一、二接合試料31、32接觸並夾設於該第一、二接合試料31、32間,並控制燒結溫度為250℃、壓合壓力為10 MPa,經過30分鐘的加溫加壓熔化該待測試之接合材料,以形成一接合部34,再進行冷卻以凝固該接合部34,即完成該第一、二接合試料31、32的接合。接著,以該推進器33於該第一接合試料31之邊界處進行加壓推動,直到該接合部34無法承受該推動之壓力而使該第一、二接合試料31、32分離。When the test is performed, the bonding material to be tested is first contacted with the first and second bonding samples 31, 32 and interposed between the first and second bonding samples 31, 32, and the sintering temperature is controlled to 250 ° C, and the bonding is performed. The pressure is 10 MPa, and the bonding material to be tested is melted by heating and pressing for 30 minutes to form a joint portion 34, and then cooled to solidify the joint portion 34, that is, the first and second joint samples 31, 32 are completed. Engagement. Next, the pusher 33 pushes the pusher at the boundary of the first joined sample 31 until the joint portion 34 cannot withstand the pushing pressure, and the first and second joined samples 31, 32 are separated.

參閱圖5,圖5為本發明與單純為次微米級及奈米級尺寸的接合材料進行二銅金屬的接合,其接點的剪斷接合強度測試之結果,由圖5可知本發明具有複合結構的接合材料2之剪斷接合強度為29 MPa,而次微米級及奈米 級尺寸的接合材料之剪斷接合強度分別為16 MPa及26 MPa,均低於本發明之剪斷接合強度,雖奈米級尺寸接合材料的剪斷接合強度與本發明該具有複合結構的接合材料2相近,但全為奈米級尺寸的接合材料不易進行大規模的生產,且生產成本高,相較於本發明該具有複合結構的接合材料2約需增加30%的生產成本。Referring to FIG. 5, FIG. 5 is a result of the shear joint strength test of the joint of the present invention and the joint material of the submicron and nanometer size, and the joint of the shear joint strength test. The joint strength of the joint material 2 of the structure is 29 MPa, while the sub-micron and nano The shear joint strength of the graded joint material is 16 MPa and 26 MPa, respectively, which are lower than the shear joint strength of the present invention, although the shear joint strength of the nano-sized joint material is bonded to the composite structure of the present invention. The material 2 is similar, but the bonding material of the nano-size is not easy to be produced on a large scale, and the production cost is high, and the production cost of the bonding material 2 having the composite structure of the present invention is about 30% higher.

再者,由於奈米級尺寸的金屬粉體的表面大多會附著一層一分散助劑,於燒結的過程中容易殘存而影響接合的強度,且本發明該具有複合結構的接合材料2與奈米級尺寸的接合材料相較,經燒結後晶粒間產生孔隙的機率較低,因此在受外力推動時較不易引發破壞而影響接合強度。Furthermore, since the surface of the nano-sized metal powder is mostly adhered with a layer of a dispersing aid, it tends to remain in the process of sintering to affect the strength of the joint, and the joint material 2 and the nanostructure of the present invention have a composite structure. Compared with the joint material of the grade size, the probability of generating voids between the grains after sintering is low, so that it is less likely to cause damage and affect the joint strength when pushed by an external force.

綜上所述,本發明具有複合結構的接合材料2,以該等奈米粒子22環繞於該核心21的表面,利用該等奈米粒子22屬奈米尺寸的粒徑,兼具低熔點及提高接觸面積的特性,而有助於降低燒結的溫度並提升接合的強度,可廣泛應用於不同的產業與領域,發展價值高且市場應用範圍廣,故確實能達成本發明之目的。In summary, the present invention has a composite structure of the bonding material 2, and the nanoparticles 22 surround the surface of the core 21, and the nanoparticles 22 have a nanometer size and a low melting point. The characteristics of the contact area are improved, and the sintering temperature is lowered and the strength of the joint is improved. The invention can be widely applied to different industries and fields, and has high development value and wide application range in the market, so that the object of the present invention can be achieved.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications made by the patent application scope and patent specification content of the present invention, All remain within the scope of the invention patent.

2‧‧‧具有複合結構的接合材料2‧‧‧Material materials with composite structure

21‧‧‧核心21‧‧‧ core

22‧‧‧奈米粒子22‧‧‧Nano particles

Claims (10)

一種具有複合結構的接合材料,經燒結後可用以進行二物件的接合,包含:一核心,由金屬材料構成且平均粒徑不大於1000 nm;及多個環繞該核心的奈米粒子,由金屬材料構成且可與該核心的金屬材料相同或不同。A bonding material having a composite structure, which can be used for joining two objects after sintering, comprising: a core composed of a metal material and having an average particle diameter of not more than 1000 nm; and a plurality of nano particles surrounding the core, made of metal The material is constructed and may be the same or different from the metal material of the core. 如請求項1所述的具有複合結構的接合材料,其中,該等奈米粒子是均勻的散布於該核心的表面,且為了有足夠的表面讓該等奈米粒子分散,該核心的粒徑為該等奈米粒子的10倍以上。The bonding material having a composite structure according to claim 1, wherein the nano particles are uniformly dispersed on a surface of the core, and in order to have a sufficient surface for dispersing the nanoparticles, the particle diameter of the core It is 10 times or more of these nano particles. 如請求項1所述的具有複合結構的接合材料,其中,該核心的平均粒徑不大於300 nm。The bonding material having a composite structure according to claim 1, wherein the core has an average particle diameter of not more than 300 nm. 如請求項1所述的具有複合結構的接合材料,其中,該等奈米粒子的平均粒徑不大於100 nm。The bonding material having a composite structure according to claim 1, wherein the nano particles have an average particle diameter of not more than 100 nm. 如請求項4所述的具有複合結構的接合材料,其中,該等奈米粒子的平均粒徑不大於20 nm。The bonding material having a composite structure according to claim 4, wherein the nano particles have an average particle diameter of not more than 20 nm. 如請求項1所述的具有複合結構的接合材料,其中,該核心的構成材料選自金、銀、銅,及鋁。The bonding material having a composite structure according to claim 1, wherein the core constituent material is selected from the group consisting of gold, silver, copper, and aluminum. 如請求項6所述的具有複合結構的接合材料,其中,該核心的構成材料選自銀。The bonding material having a composite structure according to claim 6, wherein the constituent material of the core is selected from silver. 如請求項1所述的具有複合結構的接合材料,其中,該等奈米粒子的構成材料選自金、銀、銅,及鋁。The bonding material having a composite structure according to claim 1, wherein the constituent materials of the nano particles are selected from the group consisting of gold, silver, copper, and aluminum. 如請求項8所述的具有複合結構的接合材料,其中,該等奈米粒子的構成材料選自銀。The bonding material having a composite structure according to claim 8, wherein the constituent material of the nano particles is selected from silver. 如請求項1所述的具有複合結構的接合材料,其中,該接合材料經過150℃至400℃燒結後,可用以接合二銅金屬,其接點的剪斷接合強度大於20 MPa。The bonding material having a composite structure according to claim 1, wherein the bonding material is used to bond a copper metal after sintering at 150 ° C to 400 ° C, and the joint has a shear joint strength of more than 20 MPa.
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