TWI486215B - Bubble generator for glass etching apparatus - Google Patents

Bubble generator for glass etching apparatus Download PDF

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TWI486215B
TWI486215B TW101122777A TW101122777A TWI486215B TW I486215 B TWI486215 B TW I486215B TW 101122777 A TW101122777 A TW 101122777A TW 101122777 A TW101122777 A TW 101122777A TW I486215 B TWI486215 B TW I486215B
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Taiwan
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glass
gas feed
bubble
gas
etching
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TW101122777A
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Chinese (zh)
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TW201400188A (en
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Kyu Yong Han
Dea Il You
Bong Seok Kang
Eun Su Jeon
Byung Seok Lim
Jin Kyu Choi
Do Hyoung Kim
Sang Woo Han
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Sti Co Ltd
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Description

用於玻璃蝕刻裝置之氣泡產生器Bubble generator for glass etching apparatus

本發明關於一種用於玻璃蝕刻裝置之氣泡產生器,且尤其關於一種用於玻璃蝕刻裝置之氣泡產生器,其係能產生用於蝕刻玻璃之細氣泡。The present invention relates to a bubble generator for a glass etching apparatus, and more particularly to a bubble generator for a glass etching apparatus which is capable of generating fine bubbles for etching glass.

目前,多種平板顯示器,例如液晶顯示器(LCD)、電漿顯示器面板(PDP)、電致發光顯示器(ELD)及真空螢光顯示器(VFD),已被研發。在該等顯示器中,雖然液晶顯示器存在多種缺點,但由於其良好的影像品質及低功率消耗,液晶顯示器仍最積極地被研發。Currently, a variety of flat panel displays, such as liquid crystal displays (LCDs), plasma display panels (PDPs), electroluminescent displays (ELDs), and vacuum fluorescent displays (VFDs), have been developed. Among these displays, although liquid crystal displays have various disadvantages, liquid crystal displays are still most actively developed due to their good image quality and low power consumption.

可攜式電視(TVs)及筆記型電腦,其所應用之液晶顯示器目前係於市面上流通,但仍具有諸多問題有待解決。尤其,由於可攜式電視及筆記型電腦經常為使用者所攜帶,對於液晶顯示器之尺寸或重量所減少的程度係被視為對於液晶顯示器發展之關鍵成功因素。為減少液晶顯示器之尺寸或重量,可採用多種方法。然而,由於結構或目前技術水平,對於減少液晶顯示器之必要元件的重量或尺寸存在限制。但是,隨著技術之進步,已有減少作為液晶顯示器最基礎元件的玻璃(玻璃基材)重量之空間。尤其,玻璃係為在構成液晶顯示器之元件中最重的元件。因此,對減少玻璃重量之研發正在進行中。Portable TVs (TVs) and notebook computers, which are currently used in the market, still have many problems to be solved. In particular, since portable televisions and notebook computers are often carried by users, the degree of reduction in the size or weight of liquid crystal displays is considered to be a key success factor for the development of liquid crystal displays. In order to reduce the size or weight of the liquid crystal display, various methods can be employed. However, due to the structure or state of the art, there is a limit to reducing the weight or size of the necessary components of the liquid crystal display. However, as technology advances, there has been room to reduce the weight of glass (glass substrate) which is the most basic component of liquid crystal displays. In particular, glass is the most important component among the components constituting the liquid crystal display. Therefore, research and development to reduce the weight of glass is underway.

減少玻璃之重量意即表示減少玻璃之厚度。當玻璃之 厚度減少時,玻璃係變得易脆。此外,當玻璃被粗糙地處理時,粗糙的玻璃係導致在液晶顯示器之影像品質上重大的缺陷。在此觀點下,使玻璃平滑化係非常困難且重要。Reducing the weight of the glass means reducing the thickness of the glass. When the glass When the thickness is reduced, the glass system becomes brittle. In addition, when the glass is roughened, the rough glass system causes a significant defect in the image quality of the liquid crystal display. From this point of view, it is very difficult and important to smooth the glass.

為減少玻璃之厚度,意即重量,將玻璃浸入裝有蝕刻溶液之容器中並造成該玻璃之表面被該蝕刻溶液所蝕刻的方法係在目前最廣為使用。然而,此方法具有多個問題,其中玻璃之表面係未被均勻地蝕刻,且產生於蝕刻程序中之雜質係附著於玻璃之表面,導致玻璃之表面粗糙。In order to reduce the thickness of the glass, i.e., the weight, the method of immersing the glass in a container containing an etching solution and causing the surface of the glass to be etched by the etching solution is currently the most widely used. However, this method has a problem in that the surface of the glass is not uniformly etched, and the impurities generated in the etching process adhere to the surface of the glass, resulting in a rough surface of the glass.

為解決該等問題,故提出一種方法,其係垂直地排列玻璃於裝有蝕刻溶液(例如氫氟酸(HF))之蝕刻槽中且透過穿孔板送進氣泡以蝕刻玻璃之表面。In order to solve such problems, a method has been proposed in which glass is vertically arranged in an etching bath containing an etching solution (for example, hydrofluoric acid (HF)) and bubbles are blown through the perforated plate to etch the surface of the glass.

然而,利用氣泡之蝕刻方法存在一問題,即當移動至蝕刻槽之上端時,一氣泡係與其周圍之氣泡結合而增大,且因此在該蝕刻槽中引發一渦流而導致玻璃被扭曲。當玻璃被渦流所扭曲時,玻璃係有可能變得易脆,且難以均勻地蝕刻玻璃。However, there is a problem in the etching method using bubbles that when moving to the upper end of the etching bath, a bubble is increased in combination with the surrounding bubbles, and thus a vortex is induced in the etching groove to cause the glass to be twisted. When the glass is twisted by the eddy current, the glass system may become brittle and it is difficult to uniformly etch the glass.

有鑑於此,本發明係被提出以用於解決上述發生於先前技術之問題,且本發明提供一種用於玻璃蝕刻裝置之氣泡產生器,其包含一氣體進料管,其係安裝於一蝕刻槽之下部且在該氣體進料管的一外表面上具有複數孔洞以排放所送進之氣體;複數孔口座,其係固定地插入於該氣體進料管之孔洞中且各該孔口座具有連通於各該孔洞之細孔; 及複數氣泡產生濾器,其係耦合於各該孔口座之上表面且在該蝕刻槽中產生用於玻璃蝕刻之氣泡。In view of the above, the present invention has been proposed to solve the above problems occurring in the prior art, and the present invention provides a bubble generator for a glass etching apparatus comprising a gas feed tube mounted on an etching a plurality of holes on the outer surface of the gas feed pipe to discharge the fed gas; a plurality of orifices fixedly inserted into the holes of the gas feed pipe and each of the orifice seats has a fine hole connected to each of the holes; And a plurality of bubble generating filters coupled to the upper surface of each of the orifice holders and generating bubbles for glass etching in the etching grooves.

依據本發明一實施例,用於玻璃蝕刻裝置之氣泡產生器利用氣泡產生濾器在蝕刻槽中均勻地產生具有尺寸以微米為單位之微氣泡。因此,先前技術之問題(即由於氣泡結合而增加尺寸故在蝕刻槽中引發渦流及因為渦流而導致玻璃扭曲)可預先被避免。此外,玻璃藉由微氣泡而得以經過穩定均勻的蝕刻。According to an embodiment of the present invention, a bubble generator for a glass etching apparatus uniformly generates microbubbles having a size in micrometers in an etching bath by using a bubble generating filter. Therefore, the problems of the prior art (i.e., the increase in size due to bubble bonding, the initiation of eddy currents in the etching bath and the distortion of the glass due to eddy currents) can be avoided in advance. In addition, the glass is subjected to stable and uniform etching by microbubbles.

本發明之上述及其他目的、特徵及優點將藉由詳細描述其範例性實施例並參照所附圖式而使本發明所屬技術領域中具有通常知識者更明確知悉。The above and other objects, features and advantages of the present invention will become apparent to those skilled in the <RTI

參照所附之圖式,以下將詳細地描述本發明之範例性實施例。為幫助理解本發明,通篇圖式所描述之類似元件的類似編號及相同元件之描述將不再重述。Exemplary embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In order to facilitate the understanding of the present invention, the similar numbering of the similar elements and the description of the same elements will not be repeated.

第1圖依據本發明一實施例表示一種用於玻璃蝕刻裝置之氣泡產生器的結構。Fig. 1 shows the structure of a bubble generator for a glass etching apparatus according to an embodiment of the present invention.

如第1圖所示,用於玻璃蝕刻裝置之氣泡產生器包含一氣體進料管100、複數孔口座200及複數氣泡產生濾器300。As shown in FIG. 1, the bubble generator for the glass etching apparatus includes a gas feed pipe 100, a plurality of orifice holders 200, and a plurality of bubble generation filters 300.

該氣體進料管100係被製成一中空圓柱管型,且該氣體進料管100係被安裝於裝有氫氟酸(HF)的一蝕刻槽(圖未示)之下部,且該氣體進料管100提供複數孔洞110於其上 表面以排放所送進之氣體。The gas feed pipe 100 is formed into a hollow cylindrical pipe type, and the gas feed pipe 100 is installed under an etching tank (not shown) containing hydrofluoric acid (HF), and the gas is Feed tube 100 provides a plurality of holes 110 thereon The surface is used to discharge the gas that is fed.

送進該氣體進料管100之氣體包含氮氣或乾淨乾燥空氣(CDA,clean dry air)。當堆疊複數玻璃的一收容盒(圖未示)被導入該蝕刻槽中時,該氣體藉由形成於該氣體進料管100之相對末端的氣體注入部120被送進該氣體進料管100中。對於此末端,各該氣體注入部120係連接於分離的一氣體進料管線500,其係自一氣體進料源(圖未示)送進氮氣或CDA。The gas fed into the gas feed pipe 100 contains nitrogen or clean dry air (CDA). When a storage box (not shown) for stacking a plurality of glasses is introduced into the etching bath, the gas is fed into the gas feed tube 100 by a gas injection portion 120 formed at an opposite end of the gas feed tube 100. in. For this end, each of the gas injection portions 120 is coupled to a separate gas feed line 500 that is fed with nitrogen or CDA from a gas feed source (not shown).

該氣體進料管100較佳係由一彈性材料所製成,舉例來說,以聚合物為基礎之材料,例如聚氯乙烯(PVC),以便該氣體進料管100不被外部衝擊或在安裝於該蝕刻槽之製程期間中所損壞。The gas feed tube 100 is preferably made of an elastomeric material, for example, a polymer based material such as polyvinyl chloride (PVC) so that the gas feed tube 100 is not impacted externally or Damaged during the manufacturing process of the etching bath.

此外,該氣體進料管100可依據蝕刻槽之尺寸而被調整尺寸,且該等孔洞110之數量及在該等孔洞110之間的間距亦可依據進料氣體之體積而被調整。In addition, the gas feed tube 100 can be sized according to the size of the etching bath, and the number of the holes 110 and the spacing between the holes 110 can also be adjusted according to the volume of the feed gas.

第2圖表示一結構,其中依據本發明一實施例之複數氣體進料管係被固定於一對框架。Figure 2 shows a structure in which a plurality of gas feed lines are secured to a pair of frames in accordance with an embodiment of the present invention.

至少二氣體進料管100可視需要而被安裝於該蝕刻槽之下部。在此態樣中,如第2圖所示,形成於各該氣體進料管100的相對末端之氣體注入部120較佳係被固定地連接於一對框架400。在此方式中,當各該氣體進料管100之氣體注入部120係被固定地連接於該對框架400時,該等氣體進料管100可被迅速地安裝於該蝕刻槽或自蝕刻槽分離。詳細而言,當該對框架400被安裝於該蝕刻槽中時, 所有的氣體進料管100可被迅速地安裝於該蝕刻槽中。相對的,當該對框架400係自該蝕刻槽分離時,所有的氣體進料管100可被迅速地自該蝕刻槽分離。At least two gas feed tubes 100 can be mounted below the etched tank as needed. In this aspect, as shown in FIG. 2, the gas injection portion 120 formed at the opposite ends of each of the gas feed pipes 100 is preferably fixedly coupled to the pair of frames 400. In this manner, when the gas injection portions 120 of the gas feed pipes 100 are fixedly coupled to the pair of frames 400, the gas feed pipes 100 can be quickly installed in the etching grooves or self-etching grooves. Separation. In detail, when the pair of frames 400 are mounted in the etching groove, All of the gas feed tubes 100 can be quickly installed in the etch bath. In contrast, when the pair of frames 400 are separated from the etching bath, all of the gas feed tubes 100 can be quickly separated from the etching bath.

如上所述,當該等氣體進料管100係藉由該對框架400而被固定時,該等框架400係在其中提供複數腔室410,該等腔室410連接於該等氣體進料管100的相對末端之氣體注入部120,以便能夠將氣體送進該等氣體進料管100中,且各該框架400係於各該框架400的一外表面中提供至少一孔洞420,該外表面係被連接於一氣體進料管線500。因此,在該結構中,該等氣體進料管100係藉由該對框架400而被固定,儲存於氣體進料源之氣體係藉由該等氣體進料管線500及該等孔洞420而被送進該等形成於框架400中之腔室410。導入該等腔室410中之氣體係藉由該等氣體注入部120而被送進至該等氣體進料管100。As described above, when the gas feed tubes 100 are secured by the pair of frames 400, the frames 400 provide therein a plurality of chambers 410 that are coupled to the gas feed tubes. a gas injection portion 120 at the opposite end of 100 to enable gas to be fed into the gas feed tubes 100, and each of the frames 400 provides at least one hole 420 in an outer surface of each of the frames 400, the outer surface It is connected to a gas feed line 500. Thus, in this configuration, the gas feed tubes 100 are secured by the pair of frames 400, and the gas system stored in the gas feed source is passed through the gas feed lines 500 and the holes 420. The chambers 410 formed in the frame 400 are fed. The gas system introduced into the chambers 410 is fed to the gas feed pipes 100 by the gas injection portions 120.

該等孔口座200係被固定地插入至各該氣體進料管之孔洞110中。詳細而言,各該孔口座200係藉由插入並焊接其下部於該氣體進料管之一孔洞110中達約3 mm之深度而被固定。顯然,該孔口座200可被強制地放入或旋緊於該氣體進料管之孔洞110上。在此方式中,將該孔口座200耦合至該氣體進料管之孔洞110的方法可為多樣化的選擇。The orifice holders 200 are fixedly inserted into the holes 110 of each of the gas feed tubes. In detail, each of the orifice holders 200 is fixed by inserting and welding a lower portion thereof into a hole 110 of the gas feed tube to a depth of about 3 mm. Obviously, the orifice holder 200 can be forcibly placed or screwed onto the bore 110 of the gas feed tube. In this manner, the method of coupling the orifice mount 200 to the bore 110 of the gas feed tube can be a varied choice.

第3圖依據本發明一實施例表示一孔口座及一氣泡產生濾器之詳細結構。Fig. 3 shows the detailed structure of an orifice holder and a bubble generating filter in accordance with an embodiment of the present invention.

如第3圖所示,連接於該氣體進料管之孔洞110的一細孔210係被提供於該孔口座200中。因此,送進該氣體 進料管100之氮氣氣體或CDA係被導入該孔口座200之細孔210中。該細孔210較佳係被形成具有0.1 mm至10 mm之直徑。然而,該細孔之直徑可視需要而改變。As shown in FIG. 3, a fine hole 210 connected to the hole 110 of the gas feed pipe is provided in the orifice seat 200. Therefore, the gas is fed The nitrogen gas or CDA of the feed pipe 100 is introduced into the pores 210 of the orifice holder 200. The pores 210 are preferably formed to have a diameter of 0.1 mm to 10 mm. However, the diameter of the pores may vary as needed.

該氣泡產生濾器300係被耦合於該孔口座200之一上表面,且在該蝕刻槽中產生用於玻璃蝕刻之氣泡。尤其,該氣泡產生濾器300係由具有微米單位之孔尺寸的材料所製成,例如具有0.1 μm至100 μm之孔尺寸的聚乙烯(PE)。因此,當該氣泡產生濾器300係被耦合於該孔口座200之上表面時,導入該孔口座200的細孔210之氣體係通過具有0.1 μm至100 μm之孔尺寸的氣泡產生濾器300,且係被排放至裝有HF之蝕刻槽。藉此,無數的微氣泡係被產生於裝有HF之蝕刻槽中,且玻璃之表面係藉由該等微氣泡而被蝕刻。The bubble generating filter 300 is coupled to an upper surface of the orifice holder 200, and bubbles for glass etching are generated in the etching bath. In particular, the bubble generating filter 300 is made of a material having a pore size of a micro unit, such as polyethylene (PE) having a pore size of 0.1 μm to 100 μm. Therefore, when the bubble generating filter 300 is coupled to the upper surface of the orifice holder 200, the gas system introduced into the pores 210 of the orifice holder 200 passes through the bubble generating filter 300 having a pore size of 0.1 μm to 100 μm, and It is discharged to an etch bath containing HF. Thereby, countless microbubbles are generated in the etching bath containing HF, and the surface of the glass is etched by the microbubbles.

由於產生於該蝕刻槽中之氣泡係藉由具有微米單位之孔尺寸的氣泡產生濾器300而被產生,各該氣泡以微米為單位係具有極小的尺寸。因此,先前技術之問題(即由於氣泡結合而增加尺寸故在蝕刻槽中引發渦流及因為渦流而導致玻璃扭曲)可預先被避免。此外,玻璃藉由微氣泡而得以經過穩定均勻的蝕刻。Since the bubbles generated in the etching bath are generated by the bubble generating filter 300 having a pore size of a micro unit, each of the bubbles has an extremely small size in units of micrometers. Therefore, the problems of the prior art (i.e., the increase in size due to bubble bonding, the initiation of eddy currents in the etching bath and the distortion of the glass due to eddy currents) can be avoided in advance. In addition, the glass is subjected to stable and uniform etching by microbubbles.

第4圖表示多種空腔,其係被形成於依據本發明一實施例之孔口座的上部中。Fig. 4 shows a plurality of cavities formed in an upper portion of an orifice holder in accordance with an embodiment of the present invention.

如第4圖所示,一空腔220係被形成於該孔口座200之上部中以擴散被導入通過各該細孔210之氣體。該空腔220係空間地連接於該細孔210。當該氣泡產生濾器300係 被耦合於該孔口座200時,該空腔220之上表面係被該氣泡產生濾器300所覆蓋。As shown in Fig. 4, a cavity 220 is formed in the upper portion of the orifice holder 200 to diffuse the gas introduced through each of the pores 210. The cavity 220 is spatially connected to the pore 210. When the bubble generation filter 300 is When coupled to the orifice holder 200, the upper surface of the cavity 220 is covered by the bubble generating filter 300.

因此,通過狹窄的細孔210並被導入相對寬敞之空腔220的氣體係在該空腔220中被擴散,且接著通過該氣泡產生濾器300之上表面,使得微氣泡可連續地且遍佈該氣泡產生濾器300之上表面地被產生。換言之,該空腔220增加氣體與該氣泡產生濾器300之接觸面積以促使微氣泡藉由該氣泡產生濾器300被更有效率地產生。Therefore, the gas system passing through the narrow pores 210 and introduced into the relatively spacious cavity 220 is diffused in the cavity 220, and then the upper surface of the filter 300 is generated by the bubbles, so that the microbubbles can be continuously and throughout the The bubble generating filter 300 is surface-generated. In other words, the cavity 220 increases the contact area of the gas with the bubble generating filter 300 to cause the microbubbles to be more efficiently generated by the bubble generating filter 300.

該空腔220可由多種形狀而形成,例如第4圖(a)之漏斗型、第4圖(b)之圓柱型及第4圖(c)具有寬截面積於細孔之漏斗與圓柱的結合型。The cavity 220 can be formed by various shapes, such as the funnel type of FIG. 4(a), the cylindrical type of FIG. 4(b), and the fourth (c) combination of a funnel and a cylinder having a wide cross-sectional area in the fine hole. type.

當本發明係參照其特定之範例性實施例而被表示且描述時,本發明所屬技術領域中具有通常知識者應了解的是,多種形式上或細節上之變換可在未背離由下附之申請專利範圍所界定的本發明之範疇下被實施。While the present invention has been shown and described with respect to the specific exemplary embodiments thereof, it should be understood by those of ordinary skill in the art It is implemented within the scope of the invention as defined by the scope of the patent application.

100‧‧‧氣體進料管100‧‧‧ gas feed pipe

110‧‧‧孔洞110‧‧‧ hole

120‧‧‧氣體注入部120‧‧‧ gas injection department

200‧‧‧孔口座200‧‧‧ hole mouth

210‧‧‧細孔210‧‧‧Pore

220‧‧‧空腔220‧‧‧ Cavity

300‧‧‧氣泡產生濾器300‧‧‧ bubble generation filter

400‧‧‧框架400‧‧‧Frame

410‧‧‧腔室410‧‧‧ chamber

420‧‧‧孔洞420‧‧‧ holes

500‧‧‧氣體進料管線500‧‧‧ gas feed line

第1圖依據本發明一實施例表示一種用於玻璃蝕刻裝置之氣泡產生器的結構。Fig. 1 shows the structure of a bubble generator for a glass etching apparatus according to an embodiment of the present invention.

第2圖表示一結構,其中依據本發明一實施例之複數氣體進料管係被固定於一對框架。Figure 2 shows a structure in which a plurality of gas feed lines are secured to a pair of frames in accordance with an embodiment of the present invention.

第3圖依據本發明一實施例表示一孔口座及一氣泡產生濾器之詳細結構。Fig. 3 shows the detailed structure of an orifice holder and a bubble generating filter in accordance with an embodiment of the present invention.

第4圖表示多種空腔,其係形成於依據本發明一實施例之 孔口座的上部中。Figure 4 illustrates a plurality of cavities formed in accordance with an embodiment of the present invention. In the upper part of the socket.

100‧‧‧氣體進料管100‧‧‧ gas feed pipe

110‧‧‧孔洞110‧‧‧ hole

120‧‧‧氣體注入部120‧‧‧ gas injection department

200‧‧‧孔口座200‧‧‧ hole mouth

300‧‧‧氣泡產生濾器300‧‧‧ bubble generation filter

500‧‧‧氣體進料管線500‧‧‧ gas feed line

Claims (4)

一種用於玻璃蝕刻裝置之氣泡產生器,包含:一氣體進料管,其係安裝於一蝕刻槽之下部且在該氣體進料管的一外表面上具有複數孔洞以排放所送進之氣體;複數孔口座,其係固定地插入於該氣體進料管之孔洞中且各該孔口座具有連通於各該孔洞之細孔;及複數氣泡產生濾器,其係耦合於各該孔口座之上表面且在該蝕刻槽中產生用於玻璃蝕刻之氣泡;其中各該孔口座包含一空腔於各該孔口座的一上部中以擴散被導入通過各該細孔之氣體。 A bubble generator for a glass etching apparatus, comprising: a gas feed pipe installed under an etching groove and having a plurality of holes on an outer surface of the gas feed pipe to discharge the fed gas a plurality of orifice holders fixedly inserted into the holes of the gas feed tube and each of the orifice holders having pores communicating with the respective holes; and a plurality of bubble generating filters coupled to the respective orifice holders A bubble for glass etching is generated on the surface and in the etching bath; wherein each of the orifice holders includes a cavity in an upper portion of each of the orifice holders to diffuse a gas introduced through each of the pores. 如申請專利範圍第1項所述之氣泡產生器,其中形成於各該孔口座之細孔具有0.1mm至10mm之直徑。 The bubble generator according to claim 1, wherein the pores formed in each of the orifice holders have a diameter of 0.1 mm to 10 mm. 如申請專利範圍第1項所述之氣泡產生器,其中各該氣泡產生濾器係由具有0.1μm至100μm之孔尺寸的聚乙烯(PE)所製成。 The bubble generator according to claim 1, wherein each of the bubble generating filters is made of polyethylene (PE) having a pore size of 0.1 μm to 100 μm. 如申請專利範圍第1項所述之氣泡產生器,其中該空腔與各該細孔連通,且當該等氣泡產生濾器係耦合於各孔口座時,該空腔之一上表面被各該氣泡產生濾器所覆蓋。The bubble generator of claim 1, wherein the cavity is in communication with each of the pores, and when the bubble generating filter is coupled to each of the orifice holders, one of the upper surfaces of the cavity is each The bubble generation filter is covered.
TW101122777A 2012-06-26 2012-06-26 Bubble generator for glass etching apparatus TWI486215B (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005211718A (en) * 2004-01-27 2005-08-11 Dainippon Screen Mfg Co Ltd Substrate treatment apparatus
TWM399609U (en) * 2010-10-22 2011-03-11 Shin-Yi Lin bubbles generating device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005211718A (en) * 2004-01-27 2005-08-11 Dainippon Screen Mfg Co Ltd Substrate treatment apparatus
TWM399609U (en) * 2010-10-22 2011-03-11 Shin-Yi Lin bubbles generating device

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