TWI472772B - Probe, probe card and manufacturing method thereof - Google Patents

Description

Probe, probe card and method of making probe

The present invention relates to a probe, and more particularly to a probe for a probe card.

With the rapid development of integrated circuits, integrated circuits with high-density components are a trend in the industry. In order to ensure the yield of the integrated circuit, testing the integrated circuit is an indispensable process. The device for testing the integrated circuit usually uses the probe to contact the components of the integrated circuit and transmits the electrical signal for testing, so the distance between the probes is bound to become smaller as the density of the components increases. However, in the case of a narrow stitch length, when the probes are all energized, there may be electrical contact between the probe and the probe, which may affect the detection result and may even damage the component to be tested.

Accordingly, one aspect of the present invention provides a probe having a metal oxide layer on one side of the body portion as an insulating layer to avoid electrical contact when the probe and the probe are in close proximity to each other. The probe includes a needle body section, a needle tip section and a metal oxide layer. The needle tip section connects the needle body section. Metal oxide layer is located on the needle On at least one side of the body.

Another aspect of the present invention provides a probe card comprising a printed circuit board, a plurality of probes, and a holder. Each probe comprises a needle tail section, a needle tip section, a needle body section and a metal oxide layer. The pin tail section is electrically connected to the printed circuit board. The needle body section is located between the needle tail section and the needle tip section. The metal oxide layer is on at least one side of the needle body section. The holder holds the probe so that the probes are aligned in one side of the needle body section.

Another aspect of the present invention provides a method of fabricating a probe, which comprises (it should be understood that the steps mentioned in the present embodiment can be adjusted according to actual needs, unless otherwise specified. Even simultaneously or partially simultaneously): providing a plating fixture; placing the probe on the plating fixture; plating a metal layer on at least one side of the needle body of the probe; and oxidizing the metal layer to form a metal oxide layer .

Accordingly, it is a primary object of the present invention to provide a probe having a metal oxide layer on at least one side of the needle body portion of the probe. Therefore, when the probe is in contact with the probe, electrical contact does not occur and the mutual interference does not occur.

It is still another object of the present invention to provide a probe having a metal oxide layer on at least one side of the needle body section of the probe. Therefore, it is only necessary to insulate the side of the probe between the needle body section and the needle body section of the probe, thereby saving cost and increasing aging.

It is still another object of the present invention to provide a probe having a metal oxide layer on at least one side of the needle body section of the probe. Therefore, the probe itself The performance impact is small.

Another object of the present invention is to provide a probe card in which the probe used in the probe card has a metal oxide layer on at least one side of the needle body portion of the probe. Therefore, when the probe is in contact with the probe, electrical contact does not occur and the mutual interference does not occur.

It is still another object of the present invention to provide a probe manufacturing method in which the probe produced by the method has a metal oxide layer on at least one side of the needle body portion of the probe. Therefore, when the probe is in contact with the probe, electrical contact does not occur and the mutual interference does not occur.

110‧‧‧Vertical needle

120, 220, 420‧‧‧ needle body

122‧‧‧First side surface

124‧‧‧Second side surface

130, 230, 430‧‧‧ needle tip

140, 240, 440‧‧‧ pin tail segments

150, 152, 250, 252, 450‧‧‧ metal oxide layers

160, 162, 260, 262‧‧‧ metal layers

210‧‧‧Cantilever needle

222‧‧‧ side surface

226, 236‧‧‧ axial

276‧‧‧Virtual surface

300‧‧‧Printed circuit board

400‧‧‧ probe

500‧‧‧ holding parts

600‧‧‧coating fixture

610‧‧‧ recess

700, 800‧‧ ‧ fixture cover

Fig. 1 is a schematic view showing a probe according to a first embodiment of the present invention.

Fig. 2 is a front elevational view showing the needle body section of the probe of Fig. 1.

Fig. 3 is a schematic view showing the probe of the second embodiment of the present invention.

Fig. 4 is a schematic view showing a probe of a third embodiment of the present invention.

Fig. 5 is a schematic view showing a probe according to a fourth embodiment of the present invention.

Fig. 6 is a partial schematic view showing the probe of the fifth embodiment of the present invention.

Fig. 7 is a schematic view showing the cantilever needle of Fig. 6.

Figure 8 is a top view of the needle body section of the probe of Figure 6.

Fig. 9 is a schematic view showing the probe of the sixth embodiment of the present invention.

Fig. 10 is a schematic view showing a probe of a seventh embodiment of the present invention.

Figure 11 is a schematic view showing the probe of the eighth embodiment of the present invention.

Fig. 12 is a side view showing a probe card according to an embodiment of the present invention.

Fig. 13 is an enlarged perspective view showing a region P of Fig. 12.

14 to 19 are schematic views showing a manufacturing process of a method of manufacturing a probe according to a first embodiment of the present invention.

20 to 25 are schematic views showing a manufacturing process of a method of manufacturing a probe according to a third embodiment of the present invention.

The embodiments of the present invention are disclosed in the following drawings, and for the purpose of clarity However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the invention, these practical details are not necessary. In addition, some of the conventional structures and elements are shown in the drawings in a simplified schematic manner in order to simplify the drawings.

Fig. 1 is a schematic view showing a probe according to a first embodiment of the present invention. The probe includes a needle body section 120, a needle tip section 130, and a metal oxide layer 150. The tip section 130 is coupled to the needle section 120. A metal oxide layer 150 is located on at least one side of the needle body section 120. The metal oxide layer 150 can be used as an insulating layer. Therefore, when the probe is used as a probe card, the metal oxide layer 150 can block two even if the probe and the probe are in contact due to the needle pitch being too close. Let the two not make sexual contact, so they will not interfere with each other. In addition, it is only necessary to insulate on the side that the needle body segment 120 of the probe contacts with the needle body segment 120 of the probe, thereby saving cost and increasing aging. Moreover, since the needle body segment 120 of the probe has a metal oxide layer on at least one side thereof 150. Therefore, the performance of the probe itself is less affected.

The needle body segment 120 and the needle tip segment 130 described above may together form a forming needle which is a probe which has been previously produced. In the present embodiment, the probe may further include a needle tail segment 140 between the needle tip segment 130 and the needle tail segment 140 and together form a vertical probe 110. In detail, the needle body section 120 has opposite first side surfaces 122 and opposite second side surfaces 124. The area of each of the first side surfaces 122 is smaller than the area of each of the second side surfaces 124. Metal oxide layer 150 is located on one of first side surfaces 122. Thus, when the vertical pins 110 are close to each other, the metal oxide layer 150 at the body portion 120 prevents electrical contact between the probe and the probe.

Please refer to FIG. 2, which is a front elevational view of the needle body section 120 of FIG. In manufacturing, the manufacturer may first plate a layer of metal on one of the first side surfaces 122 of the body portion 120 and then oxidize the layer of metal to form the metal oxide layer 150. If this manufacturing method is employed, the metal oxide layer 150 will be securely attached to the needle body section 120 without being easily detached from the needle body section 120. Structurally, if this manufacturing method is employed, the thickness of the opposite end portions of the metal oxide layer 150 will be thinner than the thickness of the center.

In the above embodiment, the needle body section 120, the needle tip section 130 and the needle tail section 140 may be integrally formed metal. In addition, the material of the metal oxide layer 150 may be alumina, titania or any combination thereof. It should be understood that the above-mentioned materials are merely illustrative and not intended to limit the present invention. Those having ordinary knowledge in the technical field of the present invention should be considered as needed. To, elastically select the material of the relevant component.

Please refer to FIG. 3, which is a schematic view of a probe according to a second embodiment of the present invention. The difference between the second embodiment and the first embodiment lies in the number and location of the metal oxide layers 150. Although in the first embodiment, the metal oxide layer 150 is only located on one of the first side surfaces 122 of the needle body section 120. When a plurality of probes are arranged along the direction of the first side surface 122, the metal oxide layer 150 can achieve an insulating effect. In the second embodiment, however, metal oxide layer 150 may also be located on both first side surfaces 122 of needle body section 120 to enhance insulation between the probes. As for the other structures and process details, since they are the same as the first embodiment, the description will not be repeated.

Since the tip portion 130 of the probe is generally subjected to contact with the components of the integrated circuit when the integrated circuit is tested using the probe, the needle body segment 120 is deformed by buckling. However, since the ductility of the metal oxide layer 150 is generally much less than that of the needle body section 120, the metal oxide layer 150 sometimes breaks when the needle body section 120 is deformed by buckling.

In order to solve this problem, in the third embodiment, as shown in FIG. 4, the number of metal oxide layers 152 may be plural, and the metal oxide layer 152 may be spaced apart from the first side surface of the needle body segment 120. 122 one of them. As a result, since the metal oxide layer 152 is spaced apart from the first side surface 122 of the needle body section 120, the metal oxide layer 152 is not as large as the needle body section 120 when the needle body section 120 is deflected and deformed. The amount of deformation causes the metal oxide layer 152 to be broken. In addition, since the metal oxide layer 152 has a certain thickness, This still prevents the needle body segments 120 from contacting each other and causing electrical contact. As for the other structures and process details, since they are the same as the first embodiment, the description will not be repeated.

Please refer to FIG. 5, which is a schematic view of a probe according to a fourth embodiment of the present invention. The fourth embodiment differs from the third embodiment in the number and location of the metal oxide layers 152. Although in the third embodiment, the metal oxide layer 152 is only located on one of the first side surfaces 122 of the needle body section 120, in the fourth embodiment, the metal oxide layer 152 may also be located in the needle body section 220. The two first side surfaces 122 are reinforced to insulate between the probes. As for the other structures and process details, since they are the same as the third embodiment, the description will not be repeated.

Next, please refer to FIG. 6 and FIG. 7 , wherein FIG. 6 is a partial schematic view of the probe according to the fifth embodiment of the present invention, and FIG. 7 is a schematic view showing the cantilever needle of FIG. 6 . The fifth embodiment differs from the first embodiment in the shape of the probe. In detail, the probe of the fifth embodiment includes the needle body section 220, the needle tip section 230, and the metal oxide layer 250. The needle tip section 230 connects the needle body section 220. Metal oxide layer 250 is located on at least one side of needle body segment 220. The needle body section 220 and the needle tip section 230 together form a cantilever probe 210 in which the axial direction 236 of the needle tip section 230 is interleaved with the axial direction 226 of the needle body section 220, and the axial direction 236 of the needle tip section 230 and the axial direction of the needle body section 220. 226 are co-located on a virtual plane 276. The needle body section 220 has two side surfaces 222 that are opposite each other across the virtual plane 276 and that the metal oxide layer 250 is located on one of the side surfaces 222. It should be noted that, for the sake of clarity, the cantilever needle 210 and the virtual flat The junction of face 276 is indicated by a dashed line.

Referring to Figure 8, a front view of the needle body section 220 of the probe of Figure 6 is shown. In manufacturing, the manufacturer may first plate a layer of metal on one of the side surfaces 222 of the body portion 220 and then oxidize the layer of metal to form the metal oxide layer 250. If this manufacturing method is employed, the metal oxide layer 250 will be securely attached to the needle body section 220 without being easily detached from the needle body section 220. Structurally, if this manufacturing method is employed, the thickness of the opposite end portions of the metal oxide layer 250 will be thinner than the thickness at the center thereof. As for the other structures and process details, since they are the same as the first embodiment, the description will not be repeated.

Referring to FIG. 9, a schematic diagram of a probe according to a sixth embodiment of the present invention is shown. The sixth embodiment differs from the fifth embodiment in the number and location of the metal oxide layers 250. Although in the fifth embodiment, the metal oxide layer 250 is only located on one of the side surfaces 222 of the needle body section 220, in the sixth embodiment, the metal oxide layer 250 may also be located on both sides of the needle body section 220. Surface 222 is used to strengthen the insulation between the probes. As for the other structures and process details, since they are the same as the fifth embodiment, the description will not be repeated.

Similarly, in order to avoid the metal oxide layer 250 from being broken, in the seventh embodiment, as shown in FIG. 10, the number of metal oxide layers 252 may be plural, and the metal oxide layer 252 may be spaced apart from the needle. One of the side surfaces 222 of the body 220 is on. As a result, since the metal oxide layer 252 is spaced apart from the side surface 222 of the needle body section 220, the metal oxide layer 252 does not and the needle when the needle body section 220 is bent and deformed. The body 120 has the same large amount of deformation, which can reduce the occurrence of breakage of the metal oxide layer 252. In addition, since the metal oxide layer 252 has a certain thickness, it is still possible to prevent the needle body segments 220 from coming into contact with each other to cause electrical contact. As for the other structures and process details, since they are the same as the fifth embodiment, the description will not be repeated.

Referring to Figure 11, there is shown a schematic view of a probe according to an eighth embodiment of the present invention. The eighth embodiment differs from the seventh embodiment in the number and location of the metal oxide layers 252. Although in the seventh embodiment, the metal oxide layer 252 is only located on one of the side surfaces 222 of the needle body section 220, in the eighth embodiment, the metal oxide layer 252 may also be located on both sides of the needle body section 220. Surface 222 is used to strengthen the insulation between the probes. Since the other structures and process details are the same as those of the seventh embodiment, the description thereof will not be repeated.

The above probe can be applied to the probe card for the purpose of insulating each of the probes on the probe card. Next, please refer to FIG. 12 and FIG. 13 simultaneously. FIG. 12 is a side view of the probe card according to an embodiment of the present invention, and FIG. 13 is an enlarged perspective view of a region P of FIG. The probe card includes a printed circuit board 300, a plurality of probes 400, and a holder 500. Each probe 400 includes a needle body section 420, a needle tip section 430, a needle tail section 440, and a metal oxide layer 450. The pin tail section 440 is electrically connected to the printed circuit board 300. The needle body section 420 is located between the needle tail section 440 and the needle tip section 430. A metal oxide layer 450 is located on at least one side of the needle body section 420. The holder 500 holds the probe 400 such that the probes 400 are aligned in the side direction of the needle body section 420 such that between the needle body sections 420 of any two adjacent probes There is a metal oxide layer 450. In this way, even if the probe 400 and the probe 400 are in contact due to the needle pitch being too close, the metal oxide layer 450 can also block the two, so that the two do not make contact with each other.

In one or more embodiments, the material of the holder 500 may be black rubber. The black glue can coat the needle body section 420 of the probe 400 with the metal oxide layer 450. In other embodiments, the holding member can also be a probe head, and the probe head can hold the needle tail portion and the needle body portion of the probe. In this case, the probe refers to the probe of the first embodiment, that is, For a vertical pin, for example, reference is made to the contents of U.S. Patent No. 5,534,784, which is incorporated herein by reference.

It should be noted that although the patterns of the probe 400 are the cantilever needles in FIGS. 12 and 13, and the metal oxide layer 450 is only located on one side surface of the needle body section 420 of the cantilever needle, the present invention is not limited thereto. . The probes of the first to eighth embodiments described above can be applied to the probe card. In particular, when the pattern of the probe 400 is a cantilever needle, the metal oxide layer 450 may be located on one or both side surfaces of the needle body section 420, or a plurality of metal oxide layers may be spaced apart on the side surface. Similarly, when the pattern of the probe 400 is a vertical needle, the metal oxide layer 450 may be located on one or two first side surfaces of the needle body segment (as shown in FIG. 1), or a plurality of metal oxides may be selected. The layers are spaced apart on the first side surface. In addition, the metal oxide layer 450 can be limited to be formed in the holder 500. Referring to FIGS. 12 and 13, the probe is a cantilever needle, and the holder 500 is only the needle body portion 420 of the probe 400. Part, but the needle body section 420 is the widest The place is located within the holder 500, and therefore, it is most likely the position between the two adjacent probes which is most likely to cause electrical contact. Therefore, the metal oxide layer 450 is disposed in this section to achieve the barrier. Both effects.

Another aspect of the invention provides a method of making a probe. Please refer to FIGS. 14 to 19, which are schematic diagrams showing the manufacturing process of the method for manufacturing a probe according to the first embodiment of the present invention. Please refer to Figure 14 first. First, the manufacturer may first provide a plating fixture 600 for carrying a probe to be coated with a metal oxide layer, and the plating fixture 600 may have a recess 610.

Please refer to Figure 15 below. The author can now place the probe on the plating fixture 600, where the probe can be a forming needle, such as a vertical needle 110 or a cantilever needle 210. In particular, both the vertical needle 110 and the cantilever needle 210 can be placed on the plating fixture 600 and traverse the recess 610 of the plating fixture 600 such that the needle body 120 of the vertical needle 110 and the needle body section 220 of the cantilever needle 210 are both Placed above the recess 610, the needle tip section 130 and the needle tail section 140 of the vertical needle 110, and the needle tip section 230 and the needle tail section 240 of the cantilever needle 210 can be fixed to the plating fixture 600.

Please refer to Figure 16 below. At this point, the author places a ruler cover 700 to cover the needle tip section 130 and the needle tail section 140 of the vertical needle 110, as well as the needle tip section 230 and the needle tail section 240 of the cantilever needle 210 (all as shown in Fig. 15). Since the tip segments 130 and 230 are used to contact the components of the integrated circuit, the pintail segments 140 and 240 are used to electrically connect the printed circuit board. Thus, in one or more embodiments, the tip segments 130, 230 and the tail segments 140 , 240 may not need to make a metal oxide layer to have better conductive properties. Moreover, the impact on the performance of the probe itself is also small.

Please refer to Figure 17 below. At this point, the author can plate a metal layer on a first side surface 122 of the needle body 120 of the vertical needle, and a side surface 222 of the needle body 220 of the cantilever needle, respectively, with the needle body section 120 of the vertical needle. The needle body section 220 of the cantilever needle forms metal layers 160 and 260. The metal layer may be plated or vapor-deposited on the first side surface 122 and the side surface 222, which is not limited thereto. On the other hand, due to the presence of the jig cover 700, the metal layer is not plated on the needle tip segment 130 and the needle tail segment 140 of the vertical needle 110, and the needle tip segment 230 and the needle tip segment 240 of the cantilever needle 210 (all as 15th) The figure is shown). The material of the above metal layer may be, for example, aluminum, titanium or any combination thereof, and the invention is not limited thereto.

Please refer to Figure 18 below. The author can now oxidize metal layers 160 and 260 (all as depicted in FIG. 17) to form metal oxide layers 150 and 250. The method of oxidation includes high temperature oxidation, acidic oxidation or chemical oxidation, and the invention is not limited thereto.

In this step, since the outer sides of the metal layers 160 and 260 are relatively easily oxidized to the metal oxide, the metal oxide is less likely to form on the side where the metal layers 160 and 260 contact the needle body segments 120 and 220. Thus, in general, there may be some metal between the formed metal oxide layers 150 and 250 and the body segments 120 and 220. This portion of the metal may strengthen the metal oxide layers 150 and 250 and the body segments 120 and 220. Adhesion.

Please refer to Figure 19 below. At this time, the creator can remove the jig cover 700 (as shown in FIG. 16), and remove the vertical pin 110 and the cantilever pin 210 that have formed the metal oxide layers 150 and 250 from the plating jig 600 (eg, Figure 14 shows). In this way, the probes that have been fabricated are the probes of the first embodiment described above and the probes of the fifth embodiment. However, although the jig cover 700 of the present embodiment is detached from the plating jig 600 after the metal oxide layers 150 and 250 are completed, in other embodiments, the jig cover 700 may be after the metal layer is plated. It can be removed, and the invention is not limited thereto. As a result, the probe body has a metal oxide layer 150 and 250 on one side of the body segments 120 and 220, so that when the plurality of probes of the probe card are plated with each other, the metal oxide layers 150 and 250 are plated. When the directions are arranged, the probes are close to each other and do not cause electrical contact due to energization, and the stitch length can be further reduced.

The present invention further provides a method of fabricating a probe of the second embodiment. The method of fabricating the probe of the second embodiment differs from the method of fabricating the probe of the first embodiment in the number and position of the metal oxide layers 150 and 250. Although in the method of fabricating the probe of the first embodiment, the metal oxide layers 150 and 250 are located only on one of the side surfaces 222 of the body segments 120 and 220, the method of fabricating the probe in the second embodiment The metal oxide layers 150 and 250 may also be located on both side surfaces 222 of the body segments 120 and 220 to enhance insulation between the probes. Therefore, when the two side surfaces 222 of the needle body sections 120 and 220 are formed, the metal surface layers of the needle body sections 120 and 220 can be simultaneously plated with metal to perform metal oxidation; of course, the needle body section 120 can also be first made. After one of the side surfaces 222 of 220 is plated with a metal layer for metal oxidation, the other side surface 222 is completed, depending on actual needs. As for other structure and process details, since they are the same as the method of fabricating the probe of the first embodiment, The details will not be repeated.

Next, please refer to FIGS. 20 to 25, which are schematic diagrams showing the manufacturing process of the method for fabricating the probe according to the third embodiment of the present invention. Please refer to Figure 20 first. First, the manufacturer may first provide a plating fixture 600 for carrying a probe to be coated with a metal oxide layer, and the plating fixture 600 may have a recess 610.

Please refer to Figure 21 below. The author can now place the probe on the plating fixture 600, where the probe can be a forming needle, such as a vertical needle 110 or a cantilever needle 210. In particular, both the vertical needle 110 and the cantilever needle 210 can be placed on the plating fixture 600 and traverse the recess 610 of the plating fixture 600 such that the needle body 120 of the vertical needle 110 and the needle body section 220 of the cantilever needle 210 are both Placed above the recess 610, the needle tip section 130 and the needle tail section 140 of the vertical needle 110, and the needle tip section 230 and the needle tail section 240 of the cantilever needle 210 can be fixed to the plating fixture 600.

Please refer to Figure 22 below. The author then places a jig cover 800 to cover the needle tip segment 130 of the vertical needle 110, the needle tail segment 140 and a partial region of the first side surface 122 of the needle body segment 120, and the needle tip segment 230 and the needle tail segment of the cantilever needle 210. 240 and a partial area of the side surface 222 of the needle body section 220 (all as shown in Fig. 21). Since the tip segments 130 and 230 are used to contact the components of the integrated circuit, the pintail segments 140 and 240 are used to electrically connect the printed circuit board. Thus, in one or more embodiments, the tip segments 130, 230 and the tail segments 140 , 240 may not need to make a metal oxide layer to have better conductive properties.

Please refer to Figure 23 below. The author can now plate a metal layer A first side surface 122 of the needle body 120 of the vertical needle and a side surface 222 of the needle body 220 of the cantilever needle form a plurality of metal layers respectively on the needle body 120 of the vertical needle and the needle body section 220 of the cantilever needle. 162 and 262. The manufacturer may choose to plate the metal layer on the first side surface 122 and the side surface 222 by sputtering or evaporation, which is not limited thereto. On the other hand, due to the presence of the jig cover 800, the metal layer is not plated on the needle tip segment 130 of the vertical needle 110, the needle tail segment 140 and the partial regions of the first side surface 122 of the needle body segment 120, and the cantilever The needle tip section 230, the needle tail section 240 of the needle 210 and the partial areas 222 of the side surface 222 of the needle body section 220 (both as shown in Fig. 21). The material of the above metal layer may be, for example, aluminum, titanium or any combination thereof, and the invention is not limited thereto.

Please refer to Figure 24 below. The author can now oxidize the metal layer 162 and the metal layer 262 (both as shown in FIG. 23) to form a plurality of metal oxide layers 152 and 252. The method of oxidation includes high temperature oxidation, acidic oxidation or chemical oxidation, and the invention is not limited thereto.

In this step, since the outer sides of the metal layers 162 and 262 are more easily oxidized to the metal oxide, the metal oxide is less likely to form on the side where the metal layers 162 and 262 contact the needle body segments 120 and 220. Thus, in general, there may be some metal between the formed metal oxide layers 152 and 252 and the body segments 120 and 220. This portion of the metal may strengthen the metal oxide layers 152 and 252 between the needle segments 120 and 220. Adhesion.

Please refer to Figure 25 below. At this time, the creator can remove the jig cover 800 (as shown in FIG. 22), and remove the vertical pin 110 and the cantilever pin 210 of the metal oxide layers 152 and 252 from the plating jig 600 (eg, Figure 20 shows). In this way, the probes that have been fabricated are the probes of the third embodiment described above and the probes of the seventh embodiment. However, although the jig cover 800 of the present embodiment is detached from the plating jig 600 after the metal oxide layers 152 and 252 are completed, in other embodiments, the jig cover 800 may be after the metal layer is plated. It can be removed, and the invention is not limited thereto. As a result, the probe body has a metal oxide layer 152 and 252 on one side of the body segments 120 and 220, so that when the plurality of probes of the probe card are plated with each other, the metal oxide layers 152 and 252 are plated. When the directions are arranged, the probes are close to each other and do not cause electrical contact due to energization, and the stitch length between the probes can be further reduced.

The present invention further provides a method of fabricating a probe of the fourth embodiment. The method of fabricating the probe of the fourth embodiment differs from the method of fabricating the probe of the third embodiment by the number and position of the metal oxide layers 150 and 250. Although in the method of fabricating the probe of the third embodiment, the metal oxide layers 150 and 250 are located only on one of the side surfaces 222 of the body segments 120 and 220, the method of fabricating the probe in the fourth embodiment The metal oxide layers 150 and 250 may also be located on both side surfaces 222 of the body segments 120 and 220 to enhance insulation between the probes. Therefore, when the two side surfaces 222 of the needle body sections 120 and 220 are formed, the metal surface layers of the needle body sections 120 and 220 can be simultaneously plated with metal to perform metal oxidation; of course, the needle body section 120 can also be first made. After one of the side surfaces 222 of 220 is plated with a metal layer for metal oxidation, the other side surface 222 is completed, depending on actual needs. As for other structure and process details, since they are the same as the method of fabricating the probe of the third embodiment, The details will not be repeated.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and the present invention can be modified and modified without departing from the spirit and scope of the present invention. The scope is subject to the definition of the scope of the patent application attached.

110‧‧‧Vertical needle

120‧‧‧ needle body

122‧‧‧First side surface

124‧‧‧Second side surface

130‧‧‧needle section

140‧‧‧needle section

150‧‧‧metal oxide layer

Claims (20)

A probe comprising: a needle body segment; a needle tip segment connecting the needle body segment; and a metal oxide layer on at least one side of the needle body segment, wherein the metal oxide layer is made of aluminum oxide, titanium dioxide or Any combination of the above. The probe of claim 1, wherein the number of the metal oxide layers is plural, and the metal oxide layers are spaced apart on the one side of the needle body segment. The probe according to claim 1, wherein the thickness of the opposite ends of the metal oxide layer is thinner than the thickness of the center. The probe of claim 1, further comprising: a needle tail segment, wherein the needle body segment is between the needle tip segment and the needle tail segment, and together constitute a vertical needle, the needle body segment having opposite first side surfaces and The area of each of the first side surfaces is smaller than the area of each of the second side surfaces, and the metal oxide layer is located on one of the first side surfaces. The probe of claim 1, further comprising: a needle tail segment, wherein the needle body segment is between the needle tip segment and the needle tail segment And a plurality of first side surfaces and opposite second side surfaces, each of the first side surfaces having an area smaller than an area of each of the second side surfaces, The metal oxide layer is on the two first side surfaces. The probe of claim 1, wherein the needle body segment and the needle tip segment together form a cantilever needle, the axial direction of the needle tip segment is interdigitated with the axial direction of the needle body segment, and the axial direction of the needle tip segment and the needle body segment The axial axes are co-located on a virtual plane, the needle body segments having two side surfaces opposite the virtual plane, the metal oxide layer being located on one of the side surfaces. The probe of claim 1, wherein the needle body segment and the needle tip segment together form a cantilever needle, the axial direction of the needle tip segment is interdigitated with the axial direction of the needle body segment, and the axial direction of the needle tip segment and the needle body segment The axial directions are co-located on a virtual plane, and the needle body has two side surfaces opposite to each other across the virtual plane, and the metal oxide layer is located on the two side surfaces. The probe of claim 1, wherein the needle body segment and the needle tip segment together form a forming needle. A probe card comprising: a printed circuit board; a plurality of probes, each of the probes comprising: a pin tail segment electrically connected to the printed circuit board; a needle tip segment; a needle body segment between the needle tail segment and the needle tip segment; and a metal oxide layer on at least one side of the needle body segment, wherein the needle pin segment The metal oxide layer is made of aluminum oxide, titanium dioxide or any combination thereof; and a holding member that holds the probes such that the probes are aligned in the one side direction of the needle body segment. The probe card of claim 9, wherein the holding member is a black rubber, and the holding member covers the needle body segments of the probes and the metal oxide layers. The probe card of claim 9, wherein the holding member is a probe head, and the holding member holds the needle tail segments of the probes and the needle body segments. The probe card of claim 9, wherein the needle body segment, the needle tip segment and the needle tail segment together form a vertical needle, the needle body segment having opposite first side surfaces and opposite second side surfaces, each of the The area of the first side surface is smaller than the area of each of the second side surfaces, and the metal oxide layer is located on one of the first side surfaces, and the probes are the first part of the needle body segment The side surfaces are arranged in the direction. The probe card of claim 9, wherein the needle body segment, the needle tip segment and the needle tail segment together form a vertical needle, the needle body segment having opposite first side surfaces and opposite second side surfaces, each of the The area of the first side surface is smaller than the area of each of the second side surfaces, the metal oxide layer is located on the two first side surfaces, and the probes are arranged in the direction of the first side surface of the needle body segment . The probe card of claim 9, wherein the needle body segment and the needle tip segment together form a cantilever needle, the axial direction of the needle tip segment is interlaced with the axial direction of the needle body segment, and the axial direction of the needle tip segment is opposite to the needle The axial direction of the body portion is co-located on a virtual plane, the needle body segment has two side surfaces, the two side surfaces are opposite to each other across the virtual plane, and the metal oxide layer is located on one of the side surfaces, the probes Arranged in the direction of the two side surfaces of the needle body segment. The probe card of claim 9, wherein the needle body segment and the needle tip segment together form a cantilever needle, the axial direction of the needle tip segment is interlaced with the axial direction of the needle body segment, and the axial direction of the needle tip segment is opposite to the needle The axial direction of the body portion is co-located on a virtual plane, the needle body segment has two side surfaces, the two side surfaces are opposite to each other across the virtual plane, the metal oxide layer is located on the two side surfaces, and the probes are in the needle body segment The sides of the two sides are aligned in the direction. A method of making a probe, comprising: providing a plating fixture; placing a probe on the plating fixture; Plating a metal layer on at least one side of one of the needle segments of the probe; and oxidizing the metal layer to form a metal oxide layer. The method of making a probe of claim 16, wherein the step of plating the metal layer comprises sputtering or vapor depositing the metal layer on the side of the needle body segment of the probe. The method for manufacturing a probe according to claim 16, before the step of plating the metal layer, further comprising: placing a jig cover to cover a needle tip segment and a needle tail segment of the probe when the metal is plated The layer is such that the metal layer is not plated on the tip portion of the probe and the tail portion. The method for manufacturing a probe according to claim 16, before the step of plating the metal layer, further comprising: placing a jig cover to cover a partial area of the side of the needle body portion of the probe, when When the metal layer is plated, the metal layer is plated on the side of the needle body portion of the probe, and the metal layers are spaced apart on the one side of the needle body portion of the probe. The method of making a probe according to claim 16, wherein the step of plating the metal layer further comprises: plating the metal layer on opposite side surfaces of the needle body portion of the probe.