TWI464055B - Method for manufacturing film - Google Patents

Method for manufacturing film Download PDF

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TWI464055B
TWI464055B TW100140535A TW100140535A TWI464055B TW I464055 B TWI464055 B TW I464055B TW 100140535 A TW100140535 A TW 100140535A TW 100140535 A TW100140535 A TW 100140535A TW I464055 B TWI464055 B TW I464055B
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film
producing
substrate
film according
liquid
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TW100140535A
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TW201318845A (en
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Yihming Shyu
Chunchia Yeh
Limin Wang
Jrwai Huang
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Creating Nano Technologies Inc
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薄膜之製造方法Film manufacturing method

本發明是有關於一種薄膜之製造方法,且特別是有關於一種在基材表面塗覆薄膜之方法。This invention relates to a method of making a film, and more particularly to a method of coating a film on the surface of a substrate.

隨著可攜式電子裝置的普及,為了維持其外觀,對於這類可攜式電子裝置之外層表面的保護要求也日益提高。目前,為了保護這些電子裝置的外層表面,通常會在電子裝置的外層表面上塗佈一層薄膜,例如抗汙薄膜。舉例而言,現在相當流行之觸控式電子裝置的觸控螢幕表面通常均設有一層抗汙薄膜,以使螢幕表面在歷經使用者的多次碰觸摩擦後,仍保有良好的顯示品質與操作敏感度。With the popularity of portable electronic devices, in order to maintain their appearance, the protection requirements for the surface of the outer layer of such portable electronic devices are also increasing. Currently, in order to protect the outer surface of these electronic devices, a thin film such as an anti-fouling film is usually applied on the outer surface of the electronic device. For example, the touch screen surface of a currently popular touch-sensitive electronic device is usually provided with a layer of anti-fouling film, so that the surface of the screen maintains good display quality after repeated rubbing by the user. Operational sensitivity.

一般而言,這類表面上所覆蓋的薄膜大都具有良好之抗汙性、可防止指紋沾黏、觸感平滑、可防水排油與透明等特性。此外,這類薄膜對其所覆蓋之裝置的外層表面需具有高附著力,以延長薄膜之使用壽命。In general, most of the films covered on such surfaces have good stain resistance, can prevent fingerprint sticking, smooth touch, waterproof and oil discharge and transparency. In addition, such films require high adhesion to the outer surface of the device to which they are coated to extend the useful life of the film.

目前,於待處理基材之表面塗佈薄膜之方式主要有四種。第一種方式係真空蒸鍍方式,其係在真空環境下,於基材之下方加熱薄膜塗料,使薄膜塗料氣化而上升附著在基材之下表面上,進而在基材之下表面上形成一層薄膜。此種方式之優點為可單面塗佈,避免塗料的浪費。然而,此種塗佈方式需對蒸鍍反應室抽真空,因此設備造價昂貴、製程時間增加,產能不佳。At present, there are mainly four ways of coating a film on the surface of a substrate to be treated. The first method is a vacuum evaporation method in which a film coating is heated under a substrate in a vacuum environment to vaporize the film coating and adhere to the lower surface of the substrate, thereby being on the lower surface of the substrate. A film is formed. The advantage of this method is that it can be coated on one side to avoid waste of paint. However, this coating method requires vacuuming of the evaporation reaction chamber, so the equipment is expensive, the processing time is increased, and the production capacity is poor.

第二種方式係浸潤塗佈(dipping coating)方式,其係將待處理基材浸入薄膜塗料溶液中,再將待處理基材自薄膜塗料溶液中取出,藉此使薄膜塗料塗覆在待處理基材之表面上。然而,此種塗佈方式之缺點係會對待處理基材進行多面塗佈,造成塗料的浪費。The second method is a dipping coating method in which a substrate to be treated is immersed in a film coating solution, and the substrate to be treated is taken out from the film coating solution, thereby applying the film coating to be treated. On the surface of the substrate. However, the disadvantage of this coating method is that the substrate to be treated is multi-faceted, resulting in waste of the coating.

第三種方式為噴霧式塗佈(spray coating)方式,其係以噴霧裝置直接朝待處理基材之表面噴射,而將薄膜塗料噴塗在待處理基材之表面上,藉以在待處理基材之表面上形成一層薄膜。然而,噴霧裝置所噴出之塗料大都在尚未氣化前便已接觸到待處理基材之表面,因而噴霧裝置所噴出之霧滴會滴在基材之待塗佈之表面上。如此一來,將導致所形成之薄膜的均勻性不佳。The third way is a spray coating method in which a spray device directly sprays the surface of the substrate to be treated, and the film coating is sprayed on the surface of the substrate to be treated, thereby the substrate to be treated. A film is formed on the surface. However, most of the paint sprayed by the spray device has contacted the surface of the substrate to be treated before it has been vaporized, so that the spray droplets sprayed from the spray device will drip on the surface of the substrate to be coated. As a result, the uniformity of the formed film will be poor.

第四種方式為刷塗(brush coating)法,其係以刷子直接將薄膜塗料塗設在待處理基材之表面上。然而,這樣的塗佈方式常會在相鄰之二塗刷區域之間上產生重覆塗佈的現象,導致所形成之薄膜不均勻。The fourth method is a brush coating method in which a film coating is directly applied to the surface of a substrate to be treated with a brush. However, such a coating method often causes a phenomenon of repeated coating between adjacent two painted regions, resulting in uneven film formation.

因此,本發明之一態樣就是在提供一種薄膜之製造方法,其可有效、均勻且緻密地將薄膜塗料塗佈在待處理基材之表面上。Accordingly, it is an aspect of the present invention to provide a method of producing a film which can apply a film coating on the surface of a substrate to be treated efficiently, uniformly and densely.

本發明之另一態樣是在提供一種薄膜之製造方法,其可根據基材之待塗佈表面的尺寸來調整薄膜塗料的使用量,因此可大幅減少薄膜塗料的浪費。Another aspect of the present invention is to provide a method for producing a film which can adjust the amount of use of the film coating according to the size of the surface to be coated of the substrate, thereby greatly reducing the waste of the film coating.

根據本發明之上述目的,提出一種薄膜之製造方法,其包含下列步驟。提供一基材。對此基材之表面進行活化處理,以在基材之此表面上形成複數個官能基。形成一液膜覆蓋在基材之表面上。導入一薄膜塗料溶液於液膜之表面。其中,薄膜塗料溶液包含複數個薄膜塗料分子,且每一薄膜塗料分子與液膜反應後包含第一端與第二端,第一端溶於液膜之表面。揮發液膜,以使第一端下降至基材之表面。使前述之第一端分別與官能基鍵結,以在基材之表面上形成薄膜。According to the above object of the present invention, a method of producing a film comprising the following steps is proposed. A substrate is provided. The surface of the substrate is subjected to an activation treatment to form a plurality of functional groups on the surface of the substrate. A liquid film is formed to cover the surface of the substrate. A film coating solution is introduced onto the surface of the liquid film. Wherein, the thin film coating solution comprises a plurality of thin film coating molecules, and each of the thin film coating molecules comprises a first end and a second end after reacting with the liquid film, and the first end is dissolved in the surface of the liquid film. The liquid film is volatilized to lower the first end to the surface of the substrate. The first ends are each bonded to a functional group to form a film on the surface of the substrate.

依據本發明之一實施例,上述每一第一端包含一親水基,且每一第二端包含一疏水基。According to an embodiment of the invention, each of the first ends comprises a hydrophilic group, and each of the second ends comprises a hydrophobic group.

依據本發明之另一實施例,上述進行活化處理之步驟包含利用電漿。According to another embodiment of the invention, the step of performing the activation treatment comprises using a plasma.

依據本發明之又一實施例,上述進行活化處理之步驟包含利用化學藥劑。According to still another embodiment of the present invention, the step of performing the activation treatment comprises using a chemical agent.

依據本發明之再一實施例,上述液膜包含一溶液,且此溶液包含水、酒精類、酮類、極性分子液體或其混合。According to still another embodiment of the present invention, the liquid film comprises a solution, and the solution comprises water, alcohols, ketones, polar molecular liquids or a mixture thereof.

依據本發明之再一實施例,上述溶液更包含一非極性液體分子添加劑。According to still another embodiment of the present invention, the solution further comprises a non-polar liquid molecular additive.

依據本發明之再一實施例,上述形成液膜之步驟係利用浸潤法、噴塗法、噴霧法、蒸氣法或毛刷塗布法。According to still another embodiment of the present invention, the step of forming the liquid film is by a wetting method, a spraying method, a spraying method, a steam method or a brush coating method.

依據本發明之再一實施例,上述導入薄膜塗料溶液之步驟係利用液滴法、液滴接近法、噴塗法、蒸氣法或噴霧法。According to still another embodiment of the present invention, the step of introducing the film coating solution is by a droplet method, a droplet approach method, a spray method, a vapor method or a spray method.

依據本發明之再一實施例,上述薄膜塗料分子包含複數個抗汙膜塗料分子,且每一抗汙膜塗料分子包含具有矽-烷(Si-R)官能基之氟碳化合物,矽-烷官能基與水反應生成矽-羥(Si-OH)官能基。According to still another embodiment of the present invention, the thin film coating molecule comprises a plurality of antifouling coating molecules, and each antifouling coating molecule comprises a fluorocarbon having a fluorene-alkyl (Si-R) functional group, 矽-alkane. The functional group reacts with water to form a hydrazine-hydroxy (Si-OH) functional group.

依據本發明之再一實施例,上述之薄膜塗料溶液更包含溶劑,且此溶劑包含氟化物成分、醇類、醇類化合物、酮類、酮類化合物、醚類或醚類化合物。According to still another embodiment of the present invention, the film coating solution further comprises a solvent, and the solvent comprises a fluoride component, an alcohol, an alcohol compound, a ketone, a ketone compound, an ether or an ether compound.

依據本發明之再一實施例,上述之薄膜塗料分子包含氟碳矽烴類化合物、全氟碳矽烴類化合物、氟碳矽烷烴類化合物、全氟矽烷烴類化合物、全氟矽烷烴醚類化合物、含氯基全氟矽烷烴醚類化合物、或含氯基全氟矽烷烴醚類化合物。According to still another embodiment of the present invention, the film coating molecule comprises a fluorocarbon hydrocarbon compound, a perfluorocarbon hydrocarbon compound, a fluorocarbon hydrocarbon compound, a perfluorodecane hydrocarbon compound, a perfluorodecane hydrocarbon compound. a compound, a chlorine-containing perfluorodecane hydrocarbon compound, or a chlorine-containing perfluorodecane hydrocarbon compound.

依據本發明之再一實施例,上述使液膜揮發之步驟包含進行一加熱處理,以加速液膜之揮發速率。According to still another embodiment of the present invention, the step of volatilizing the liquid film comprises performing a heat treatment to accelerate the evaporation rate of the liquid film.

依據本發明之再一實施例,上述使第一端分別與官能基鍵結之步驟包含進行一靜置處理。In accordance with still another embodiment of the present invention, the step of bonding the first end to the functional group, respectively, comprises performing a rest process.

依據本發明之再一實施例,上述使第一端分別與官能基鍵結之步驟包含進行一烘烤處理。According to still another embodiment of the present invention, the step of bonding the first end to the functional group, respectively, comprises performing a baking treatment.

依據本發明之再一實施例,上述之官能基包含複數個氫氧官能基、複數個氮氫官能基、含氫管能基、及/或複數個空懸鍵。In accordance with still another embodiment of the present invention, the functional group comprises a plurality of hydroxy functional groups, a plurality of nitrogen hydrogen functional groups, a hydrogen containing tubular group, and/or a plurality of vacant bonds.

請參照第1圖與第2A圖至第2D圖,其中第1圖係繪示依照本發明之一實施方式的一種薄膜之製造方法的流程圖,第2A圖至第2D圖係繪示依照本發明之一實施方式的一種薄膜之製造方法的製程剖面圖。本實施方式之薄膜的塗佈方法可例如應用在抗汙薄膜、或自我排列單分子層薄膜(SAM)的製作上。Please refer to FIG. 1 and FIG. 2A to FIG. 2D , wherein FIG. 1 is a flow chart showing a method for manufacturing a film according to an embodiment of the present invention, and FIGS. 2A to 2D are diagrams according to the present invention. A process sectional view of a method of producing a film according to an embodiment of the invention. The coating method of the film of the present embodiment can be applied, for example, to the production of an antifouling film or a self-aligned monolayer film (SAM).

如第1圖與第2A圖所示,在本實施方式之薄膜之製造方法100中,可先如步驟102所述,提供基材200。基材200可例如為保護玻璃、塑膠基材、強化玻璃或金屬基材。As shown in FIGS. 1 and 2A, in the method 100 for manufacturing a film of the present embodiment, the substrate 200 may be provided as described in step 102. The substrate 200 can be, for example, a protective glass, a plastic substrate, a tempered glass, or a metal substrate.

接著,如步驟104所述,利用例如電漿對基材200之表面202進行清潔與活化處理,藉以在基材200之表面202上形成數個官能基204。在一例子中,可利用氮氣、氬氣、氧氣或空氣等工作氣體,來產生電漿。經電漿處理後,基材200之表面202上所產生之官能基204係可與後續導入之薄膜塗料分子208形成鍵結之官能基。在一些實施例中,官能基204可包含氫氧官能基、氮氫官能基、含氫管能基及/或空懸鍵。Next, as described in step 104, the surface 202 of the substrate 200 is cleaned and activated using, for example, plasma to form a plurality of functional groups 204 on the surface 202 of the substrate 200. In one example, a working gas such as nitrogen, argon, oxygen, or air may be utilized to produce a plasma. After the plasma treatment, the functional group 204 produced on the surface 202 of the substrate 200 is a functional group capable of forming a bond with the subsequently introduced thin film coating molecule 208. In some embodiments, functional group 204 can comprise a hydroxyl functional group, a nitrogen hydrogen functional group, a hydrogen containing tubular energy group, and/or an empty dangling bond.

在一實施例中,可利用大氣電漿或低壓電漿來對基材200之表面202進行活化處理。其中,大氣電漿可例如為常壓噴射電漿(plasma jet或plasma torch)或寬幅常壓電漿(dielectric barrier discharge;DBD或atmospheric glow discharge)等。而低壓電漿則可例如為真空電漿。In one embodiment, the surface 202 of the substrate 200 can be activated using atmospheric plasma or low pressure plasma. The atmospheric plasma may be, for example, a plasma jet or a plasma torch or a dielectric barrier discharge (DBD or an atomic glow discharge). The low pressure plasma can be, for example, a vacuum plasma.

在另一實施例中,可利用化學藥劑來對基材200之表面202進行活化處理。其中,化學藥劑包含介面活性劑、酸液或鹼液等,或者包含有機溶劑、或其混合液等。In another embodiment, the surface 202 of the substrate 200 can be activated using a chemical. The chemical agent includes an interface agent, an acid solution, an alkali solution, or the like, or an organic solvent, a mixed solution thereof, or the like.

基材200之表面202經活化處理後,如步驟106所述,形成液膜206覆蓋在基材200之表面202上。在一些實施例中,可利用浸潤法、噴塗法、噴霧法、蒸氣法或毛刷塗布法,來覆蓋一層液膜206於基材200之表面202上。因此,液膜206也同時覆蓋住基材200之表面202上的官能基204。液膜206包含溶液。在一實施例中,此溶液選用與水可互溶的液體。在一些例子中,此溶液可例如包含水、酒精類、酮類、極性分子液體或其混合。在另一些實施例中,此溶液更可選擇性包含非極性液體分子添加劑。After the surface 202 of the substrate 200 is activated, the liquid film 206 is formed over the surface 202 of the substrate 200 as described in step 106. In some embodiments, a layer of liquid film 206 may be applied to surface 202 of substrate 200 by an infiltration process, a spray process, a spray process, a vapor process, or a brush coat process. Thus, the liquid film 206 also covers the functional groups 204 on the surface 202 of the substrate 200 at the same time. Liquid film 206 contains a solution. In one embodiment, the solution is selected from a water miscible liquid. In some examples, the solution can comprise, for example, water, alcohols, ketones, polar molecular liquids, or mixtures thereof. In other embodiments, the solution more selectively comprises a non-polar liquid molecular additive.

接著,如同步驟108所述,提供薄膜塗料溶液,並將薄膜塗料溶液導入液膜206之表面。在一些實施例中,可利用液滴法、液滴接近法、噴塗法、蒸氣法或噴霧法,來將薄膜塗料溶液導入液膜206之表面。如第2A圖所示,薄膜塗料溶液包含許多薄膜塗料分子208與溶劑。薄膜塗料溶液之溶劑較佳可例如包含高揮發性液體、水、或高揮發性液體與水所混合而成之液體。在一較佳實施例中,高揮發性液體在常溫下之蒸氣壓比水的蒸氣壓大,且此高揮發性液體可包含醇類、醚類、烷類、酮類、苯類、含氟基醇類、含氟基醚類、含氟基烷類、含氟基酮類或含氟基苯類。Next, as described in step 108, a film coating solution is provided and the film coating solution is introduced into the surface of the liquid film 206. In some embodiments, the thin film coating solution can be introduced into the surface of the liquid film 206 by a droplet method, a droplet approach method, a spray method, a vapor method, or a spray method. As shown in Figure 2A, the thin film coating solution contains a plurality of thin film coating molecules 208 and a solvent. The solvent of the film coating solution may preferably comprise, for example, a highly volatile liquid, water, or a liquid in which a highly volatile liquid and water are mixed. In a preferred embodiment, the vapor pressure of the high volatility liquid at normal temperature is greater than the vapor pressure of water, and the high volatility liquid may comprise alcohols, ethers, alkanes, ketones, benzenes, fluorine. Alkyl alcohols, fluorine-containing ethers, fluorine-containing alkanes, fluorine-containing ketones or fluorine-containing benzenes.

當這些薄膜塗料分子208導入液膜206之表面後,薄膜塗料分子208會與液膜206產生反應。與液膜206反應後之薄膜塗料分子208具有第一端210與第二端212。薄膜塗料分子208之第一端210可溶於液膜206之表面。在一實施例中,薄膜塗料分子208之第一端210包含親水基214,而薄膜塗料分子208之第二端212則包含疏水基(未繪示)。When the thin film coating molecules 208 are introduced into the surface of the liquid film 206, the thin film coating molecules 208 react with the liquid film 206. The thin film coating molecule 208 after reacting with the liquid film 206 has a first end 210 and a second end 212. The first end 210 of the thin film coating molecule 208 is soluble in the surface of the liquid film 206. In one embodiment, the first end 210 of the thin film coating molecule 208 comprises a hydrophilic group 214, and the second end 212 of the thin film coating molecule 208 comprises a hydrophobic group (not shown).

在製造抗汙薄膜的實施例中,這些薄膜塗料分子208包含複數個抗汙膜塗料分子。而且,這些抗汙膜塗料分子包含氟碳化合物,且此氟碳化合物具有矽-烷(Si-R)官能基。此氟碳化合物之化學式例如為F---Si-R。在此實施例中,薄膜塗料溶液之溶劑可包含氟化物成分、醇類、醇類化合物、酮類、酮類化合物、醚類或醚類化合物,以均勻溶解抗汙膜塗料。在一些例子中,這些抗汙膜塗料分子包含氟碳矽烴類化合物、全氟碳矽烴類化合物、氟碳矽烷烴類化合物、全氟矽烷烴類化合物、全氟矽烷烴醚類化合物、含氯基全氟矽烷烴醚類化合物、或含氯基全氟矽烷烴醚類化合物。In embodiments in which the antifouling film is made, the film coating molecules 208 comprise a plurality of antifouling coating molecules. Moreover, these antifouling film coating molecules contain fluorocarbons, and this fluorocarbon compound has a fluorene-alkene (Si-R) functional group. The chemical formula of this fluorocarbon is, for example, F---Si-R. In this embodiment, the solvent of the thin film coating solution may contain a fluoride component, an alcohol, an alcohol compound, a ketone, a ketone compound, an ether or an ether compound to uniformly dissolve the antifouling film coating. In some examples, the antifouling coating molecules comprise a fluorocarbon hydrocarbon compound, a perfluorocarbon hydrocarbon compound, a fluorocarbon hydrocarbon compound, a perfluorodecane hydrocarbon compound, a perfluorodecane hydrocarbon compound, A chloroperfluorofluoroalkane ether compound or a chlorine-containing perfluorodecane hydrocarbon compound.

薄膜塗料分子208之Si-R官能基可與空氣中或液膜206中之水反應反應,而生成矽-羥(Si-OH)官能基。舉例而言,氟碳化合物F---Si-R與水反應生成F---Si-OH。由於薄膜塗料分子208之第一端210的親水基214,例如OH基,與液膜206中的水等極性分子液體具有較佳之親合力,因此薄膜塗料分子208之第一端210漸漸溶於液膜206之表面。另一方面,薄膜塗料分子208之第二端212的疏水基與水等極性分子液體會互相排斥,因此薄膜塗料分子208無法完全溶解於液膜206中。如此一來,在液膜206之表面張力的支撐下,薄膜塗料分子208可浮在液膜206上。再加上,薄膜塗料分子208間之凡得瓦力的作用,這些薄膜塗料分子208可規則且緊密地排列在液膜206之表面上,如第2A圖所示。The Si-R functional group of the thin film coating molecule 208 can react with water in the air or in the liquid film 206 to form a ruthenium-hydroxy (Si-OH) functional group. For example, the fluorocarbon F---Si-R reacts with water to form F---Si-OH. Since the hydrophilic group 214 of the first end 210 of the thin film coating molecule 208, such as an OH group, has a better affinity with a polar molecular liquid such as water in the liquid film 206, the first end 210 of the thin film coating molecule 208 gradually dissolves in the liquid. The surface of the membrane 206. On the other hand, the hydrophobic group of the second end 212 of the thin film coating molecule 208 and the polar molecular liquid such as water repel each other, and thus the thin film coating molecule 208 cannot be completely dissolved in the liquid film 206. As a result, the thin film coating molecules 208 can float on the liquid film 206 under the support of the surface tension of the liquid film 206. In addition, the film coating molecules 208 can be regularly and closely arranged on the surface of the liquid film 206 as shown in FIG. 2A.

完成薄膜塗料溶液的導入後,如第1圖之步驟110所述,使液膜206揮發,藉以使液膜206表面上之薄膜塗料分子208下降至基材200之表面202。揮發液膜206時,可藉由使液膜206自然揮發的方式。或者,在揮發液膜206時,同時進行加熱處理,藉以加速液膜206之揮發速率。Upon completion of the introduction of the film coating solution, the liquid film 206 is volatilized as described in step 110 of FIG. 1 whereby the film coating molecules 208 on the surface of the liquid film 206 are lowered to the surface 202 of the substrate 200. When the liquid film 206 is volatilized, the liquid film 206 can be naturally volatilized. Alternatively, when the liquid film 206 is volatilized, heat treatment is simultaneously performed to accelerate the evaporation rate of the liquid film 206.

液膜206揮發後,薄膜塗料分子208會下降,而附著在基材200之表面202上。而且,薄膜塗料分子208之第一端210分別與基材200之表面202上的官能基204接合。接下來,如步驟112所述,使薄膜塗料分子208之第一端210分別與基材200之表面202上的官能基204鍵結。如此可在基材200之表面202上形成薄膜216。After the liquid film 206 is volatilized, the film coating molecules 208 are lowered and adhere to the surface 202 of the substrate 200. Moreover, the first end 210 of the thin film coating molecule 208 is bonded to the functional group 204 on the surface 202 of the substrate 200, respectively. Next, as described in step 112, the first end 210 of the thin film coating molecule 208 is bonded to the functional group 204 on the surface 202 of the substrate 200, respectively. Thus, a film 216 can be formed on the surface 202 of the substrate 200.

在一些實施例中,使薄膜塗料分子208之第一端210分別與官能基204鍵結時,可藉由對基材200進行靜置處理或烘烤處理的方式,來使薄膜塗料分子208與基材200表面202上之官能基204產生縮合反應(Condensation Reaction)而脫水,藉此完成薄膜塗料分子208與基材200之間的鍵結。因此,所形成之薄膜216對基材200之表面202具有極強之附著力。In some embodiments, when the first end 210 of the thin film coating molecule 208 is bonded to the functional group 204, respectively, the thin film coating molecule 208 can be made by subjecting the substrate 200 to a static treatment or a baking treatment. The functional group 204 on the surface 202 of the substrate 200 undergoes a condensation reaction to dehydrate, thereby completing the bond between the thin film coating molecules 208 and the substrate 200. Thus, the formed film 216 has a very strong adhesion to the surface 202 of the substrate 200.

由上述之實施方式可知,本發明之一優點為本發明之薄膜製造方法可有效、均勻且緻密地將薄膜塗料塗佈在待處理基材之表面上。It is apparent from the above-described embodiments that the film manufacturing method of the present invention can effectively, uniformly and densely coat a film coating on the surface of a substrate to be treated.

由上述之實施方式可知,本發明之另一優點為本發明之薄膜製造方法可根據基材之待塗佈表面的尺寸來調整薄膜塗料的使用量,因此可大幅減少薄膜塗料的浪費。According to the above embodiments, another advantage of the present invention is that the film manufacturing method of the present invention can adjust the amount of the film coating to be used according to the size of the surface to be coated of the substrate, thereby greatly reducing the waste of the film coating.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何在此技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。While the present invention has been described above by way of example, it is not intended to be construed as a limitation of the scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100...方法100. . . method

102...步驟102. . . step

104...步驟104. . . step

106...步驟106. . . step

108...步驟108. . . step

110...步驟110. . . step

112...步驟112. . . step

200...基材200. . . Substrate

202...表面202. . . surface

204...官能基204. . . Functional group

206...液膜206. . . Liquid film

208...薄膜塗料分子208. . . Film coating molecule

210...第一端210. . . First end

212...第二端212. . . Second end

214...親水基214. . . Hydrophilic group

216...薄膜216. . . film

為讓本發明之上述和其他目的、特徵、優點與實施例能更明顯易懂,所附圖式之說明如下:The above and other objects, features, advantages and embodiments of the present invention will become more apparent and understood.

第1圖係繪示依照本發明之一實施方式的一種薄膜之製造方法之流程圖。1 is a flow chart showing a method of manufacturing a film according to an embodiment of the present invention.

第2A圖至第2D圖係繪示依照本發明之一實施方式的一種薄膜之製造方法之製程剖面圖。2A to 2D are cross-sectional views showing a process of manufacturing a film according to an embodiment of the present invention.

100...方法100. . . method

102...步驟102. . . step

104...步驟104. . . step

106...步驟106. . . step

108...步驟108. . . step

110...步驟110. . . step

112...步驟112. . . step

Claims (15)

一種薄膜之製造方法,包含:提供一基材;對該基材之一表面進行一活化處理,以在該基材之該表面上形成複數個官能基;形成一液膜覆蓋在該基材之該表面上;導入一薄膜塗料溶液於該液膜之一表面,其中該薄膜塗料溶液包含複數個薄膜塗料分子,且每一該些薄膜塗料分子與該液膜反應後包含一第一端與一第二端,該些第一端溶於該液膜之該表面;揮發該液膜,以使該些第一端下降至該基材之該表面;以及使該些第一端分別與該些官能基鍵結,以在該基材之該表面上形成該薄膜。A method for manufacturing a film, comprising: providing a substrate; performing an activation treatment on a surface of the substrate to form a plurality of functional groups on the surface of the substrate; forming a liquid film covering the substrate Forming a film coating solution on a surface of the liquid film, wherein the film coating solution comprises a plurality of film coating molecules, and each of the film coating molecules comprises a first end and a reaction with the liquid film a second end, the first ends are dissolved in the surface of the liquid film; the liquid film is volatilized to lower the first ends to the surface of the substrate; and the first ends are respectively associated with the A functional group is bonded to form the film on the surface of the substrate. 如請求項1所述之薄膜之製造方法,其中每一該些第一端包含一親水基,且每一該些第二端包含一疏水基。The method of producing a film according to claim 1, wherein each of the first ends comprises a hydrophilic group, and each of the second ends comprises a hydrophobic group. 如請求項1所述之薄膜之製造方法,其中進行該活化處理之步驟包含利用一電漿。The method of producing a film according to claim 1, wherein the step of performing the activation treatment comprises using a plasma. 如請求項1所述之薄膜之製造方法,其中進行該活化處理之步驟包含利用一化學藥劑。The method of producing a film according to claim 1, wherein the step of performing the activation treatment comprises using a chemical agent. 如請求項1所述之薄膜之製造方法,其中該液膜包含一溶液,且該溶液包含水、酒精類、酮類、極性分子液體或其混合。The method for producing a film according to claim 1, wherein the liquid film comprises a solution, and the solution comprises water, alcohols, ketones, polar molecular liquids or a mixture thereof. 如請求項5所述之薄膜之製造方法,其中該溶液更包含一非極性液體分子添加劑。The method of producing a film according to claim 5, wherein the solution further comprises a non-polar liquid molecular additive. 如請求項1所述之薄膜之製造方法,其中形成該液膜之步驟係利用一浸潤法、一噴塗法、一噴霧法、一蒸氣法或一毛刷塗布法。The method for producing a film according to claim 1, wherein the step of forming the liquid film is performed by a wetting method, a spray coating method, a spray method, a vapor method or a brush coating method. 如請求項1所述之薄膜之製造方法,其中導入該薄膜塗料溶液之步驟係利用一液滴法、一液滴接近法、一噴塗法、一蒸氣法或一噴霧法。The method for producing a film according to claim 1, wherein the step of introducing the film coating solution is a droplet method, a droplet approach method, a spray method, a vapor method or a spray method. 如請求項1所述之薄膜之製造方法,其中該些薄膜塗料分子包含複數個抗汙膜塗料分子,且每一該些抗汙膜塗料分子包含具有一矽-烷(Si-R)官能基之一氟碳化合物,該矽-烷官能基與水反應生成一矽-羥(Si-OH)官能基。The method for producing a film according to claim 1, wherein the thin film coating molecules comprise a plurality of antifouling coating molecules, and each of the antifouling coating molecules comprises a mono-alkane (Si-R) functional group. A fluorocarbon that reacts with water to form a hydrazine-hydroxy (Si-OH) functional group. 如請求項9所述之薄膜之製造方法,其中該薄膜塗料溶液更包含一溶劑,且該溶劑包含氟化物成分、醇類、醇類化合物、酮類、酮類化合物、醚類、醚類化合物。The method for producing a film according to claim 9, wherein the film coating solution further comprises a solvent, and the solvent comprises a fluoride component, an alcohol, an alcohol compound, a ketone, a ketone compound, an ether, and an ether compound. . 如請求項9所述之薄膜之製造方法,其中該些薄膜塗料分子包含氟碳矽烴類化合物、全氟碳矽烴類化合物、氟碳矽烷烴類化合物、全氟矽烷烴類化合物、全氟矽烷烴醚類化合物、含氯基全氟矽烷烴醚類化合物、或含氯基全氟矽烷烴醚類化合物。The method for producing a film according to claim 9, wherein the film coating molecules comprise a fluorocarbon hydrocarbon compound, a perfluorocarbon hydrocarbon compound, a fluorocarbon hydrocarbon compound, a perfluorodecane hydrocarbon compound, and a perfluorocarbon. A decane hydrocarbon compound, a chlorine-containing perfluorodecane hydrocarbon compound, or a chlorine-containing perfluorodecane hydrocarbon compound. 如請求項1所述之薄膜之製造方法,其中使該液膜揮發之步驟包含進行一加熱處理,以加速該液膜之揮發速率。The method for producing a film according to claim 1, wherein the step of volatilizing the liquid film comprises performing a heat treatment to accelerate a volatilization rate of the liquid film. 如請求項1所述之薄膜之製造方法,其中使該些第一端分別與該些官能基鍵結之步驟包含進行一靜置處理。The method for producing a film according to claim 1, wherein the step of bonding the first ends to the functional groups separately comprises performing a standing treatment. 如請求項1所述之薄膜之製造方法,其中使該些第一端分別與該些官能基鍵結之步驟包含進行一烘烤處理。The method for producing a film according to claim 1, wherein the step of bonding the first ends to the functional groups separately comprises performing a baking treatment. 如請求項1所述之薄膜之製造方法,其中該些官能基包含複數個氫氧官能基、複數個氮氫官能基、含氫管能基、及/或複數個空懸鍵。The method of producing a film according to claim 1, wherein the functional groups comprise a plurality of hydrogenoxy functional groups, a plurality of nitrogen hydrogen functional groups, a hydrogen containing tubular group, and/or a plurality of floating bonds.
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TW200844117A (en) * 2007-01-09 2008-11-16 Dow Corning Process for forming films and films formed by the process
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TW402625B (en) * 1994-10-04 2000-08-21 Valspar Corp Aqueous coating composition
TWI301798B (en) * 2000-05-19 2008-10-11 Tdk Corp Functional film having functional layer and article provided with the functinal layer
TW200603903A (en) * 2004-07-16 2006-02-01 Fuji Photo Film Co Ltd Method and apparatus for producing film from polymer solution, and optical polymer film
TW200844117A (en) * 2007-01-09 2008-11-16 Dow Corning Process for forming films and films formed by the process
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