TWI463237B - A mems display with touch control function - Google Patents

Description

Micro-electromechanical display with touch function

The present invention relates to a microelectromechanical display, and more particularly to a microelectromechanical display having a touch function.

Flat panel displays are advantageous in portable display devices and display markets for small space applications due to their small size and light weight. The mainstream flat display device currently on the market is a liquid crystal display (LCD). However, the conventional liquid crystal display needs to use a backlight, which not only consumes energy, but also the thickness of the overall display module cannot be reduced due to the relationship of the backlight. When used in a handheld device that requires light, thin, short, and small, it will become The bottleneck is there. Therefore, a new display manufactured by Micro-Electro-Mechanical Systems (MEMS) system has been developed. Microelectromechanics is an industrial technology that combines microelectronics and mechanical engineering with a range of operations in the micrometer range. The micro-electromechanical display is combined with micro-electromechanical system (MEMS) technology to produce a small and medium-sized display. The device can be very small in size. Since it can be used without a backlight, it is very power-saving and can have a reflective function. Suitable for use in handheld mobile devices, common MEMS displays such as Hand Mounted Display (HMD), optical interference displays for handheld devices, tablets, mobile phones, etc., or with a optomechanical engine The projection device is a digital micromirror array device (Micro-Mirror Array).

Wherein, each pixel of the optical interference display is a component manufactured by a microelectromechanical system (MEMS) process technology, and a fixed film and a reflection and interference resonance film capable of vibrating up and down are formed on the substrate of each pixel. Controlling the electric field of the film to attract or repel each other to a specific spacing, using interference resonance between different light waves to control the reflection of light in a specific wavelength band, or to penetrate light and dark, or to allow natural light to pass through different wavelength bands. Light, in a variety of different colors, to achieve the purpose of displaying different colors.

The micromirror array device is mainly used in the projection system. The micromirror array device mainly uses the micro-electromechanical system process technology to make millions of tiny mirrors on the surface of the germanium wafer, each of which is only tens in size. Micron or smaller, below the digital micromirror is a rotating shaft that can be rotated left and right or back and forth by voltage control. Each digital micromirror can individually control the left or right, or the front or back flip, or even rotate differently or specificly. The corner angle allows the light from the projection system to be reflected to different or specific locations. Each mirror corresponds to a pixel (Pixel) of the display. When these pixels are integrated, they form a complete picture. In other words, how many pixels are there in the resolution of the display, and how many digits there are. Micromirror array.

Therefore, how to make the application of MEMS display elements combined with touch functions become the goal of pursuit.

It is an object of the present invention to provide a microelectromechanical (MEMS) system display with touch functionality.

An aspect of the present invention provides a MEMS display including at least: a first substrate, wherein the first substrate has a control array; a touch unit; and a plurality of MEMS display units are disposed on the first substrate Wherein the control array controls the plurality of microelectromechanical display units. In one embodiment, each of the MEMS display units has motion, relative displacement, rotation, deformation, and vibration.

In one embodiment, each of the MEMS display units is an optical interferometric display unit, wherein the optical interferometric display unit has a single chamber or has a plurality of chambers.

In an embodiment, the optical interferometric display unit further includes: a first electrode formed on the first substrate; a second electrode disposed on the first electrode; and a support disposed on the first electrode and The second electrode is configured to support the second electrode to form a cavity between the first electrode and the second electrode.

In an embodiment, the plurality of chambers of the optical interferometric display unit may have different specific spacings.

In one embodiment, the plurality of chambers of the optical interferometric display unit have three specific spacings that reflect the color of the red, green, and blue light bands.

In one embodiment, a plurality of optical interferometric display units are combined with each other to form an optical interferometric display, which can reflect colored light of different wavelengths of cyan, magenta, yellow, and the like.

In an embodiment, the plurality of chambers of the optical interferometric display unit have different specific spacings, and the plurality of the plurality of chambers are combined with each other to form an optical interferometric display, which can reflect cyan, magenta, yellow, etc. The color of the different bands.

In one embodiment, the touch unit includes at least one set of multiple wires of the control array or a modified design from the set of plurality of wires.

In one embodiment, the touch unit includes: a sensor; a first selection unit coupled to the sensor; a second selection unit coupled to the sensor; the plurality of first wires are arranged in parallel In one direction, one of the first wires is coupled to the first selection unit; and the plurality of second wires are parallel arranged in a second direction, wherein one of the second wires is coupled to the second terminal Second selection unit.

In an embodiment, when the touch unit performs a capacitive, optical, ultrasonic, resistive, or pressure-sensitive touch application, the second operation method detects and senses the amount of charge of the touch. The capacitance sensing, or the signal of the voltage and current signals, is used to determine the position, distance, touch height and touch point of the induced change.

In one embodiment, the touch unit includes: a sensor; a first selection unit coupled to the sensor; a second selection unit coupled to the sensor; a first control unit coupled to the sensing a second control unit is coupled to the sensor; the plurality of first wires are arranged in parallel in a first direction, wherein one end of each of the first wires is coupled to the other end of the first control unit a first selection unit; and a plurality of second wires are arranged in parallel in a second direction and intersect with the first wires, wherein one end of each of the second wires is coupled to the other end of the second control unit The second selection unit.

In an embodiment, the first wire or the second wire comprises at least one wire improvement design or a scan line, a data line, an auxiliary line, a bias line or a power line, and a common electrode designed from the MEMS display array. Lines, signal lines, read lines, bias lines, control lines, or compensation circuits.

In one embodiment, the first wires and the second wires are formed of a metal, an alloy wire, a transparent conductive material, ITO, IZO, or a carbon nanotube CNT.

In an embodiment, when the touch control unit performs an electromagnetic touch application, the first control unit commonly connects one of the first wires to a first conductive line, and the first selection unit is in accordance with an order. And connecting, at a certain interval, the other ends of the plurality of first wires to form a plurality of loops in the first direction, and the second control unit commonly connecting one of the second wires to a second a second control unit, according to a sequence, sequentially connecting the other ends of the second wires at a certain interval to form a plurality of loops in the second direction, and detecting by a first operation method The magnetic flux, electromagnetic induction, or voltage, current, and frequency touch loop signals are sensed, and the position, distance, touch height, and touch point of the induced loop change are determined by numerical operations.

In an embodiment, the method further includes: dividing the plurality of first wires and the second wires into a plurality of groups, wherein each group includes at least two first wires, or at least two second wires; the first selecting unit is in accordance with an order Aligning the other ends of the first plurality of the plurality of groups in sequence according to a certain interval to form a plurality of complex group loops in the first direction; the second selecting unit sequentially according to a sequence according to a certain interval Connecting the other ends of the second wires of the plurality of groups to form a plurality of complex group circuits in the second direction; sequentially transmitting a detection signal to the plurality of group circuits, wherein the first of each complex group circuit The wire and the second wire receive or transmit the same detection loop signal and the inductive loop signal; and the first operation method is used to detect and sense the touch loop signal, and the position, distance, and touch of the inductive loop change are determined by numerical operations. Touch height and touch point.

In an embodiment, the first operation method may be configured to respectively transmit a detection signal of a specific frequency to the sequentially formed loops in the first and second directions to detect the first and second direction loops. a change in magnetic flux, electromagnetic induction, or voltage, current, or frequency, wherein the sensor transmits the detection signal to the first and second direction loops to detect magnetic flux, electromagnetic induction, or voltage of the respective circuits. , current, frequency touch sensing loop signal.

In an embodiment, when the touch unit performs an electromagnetic induction method, an optical induction method, an ultrasonic induction method, a capacitance sensing method, a resistance sensing method, a pressure sensing mode dual mode, and a multi-mode sensing touch application, The first control unit interrupts the coupling between the first wires and a first conductive line, and the second control unit interrupts the coupling between the second wires and a second conductive line, and is a second The operation method detects and senses the amount of charge of the touch, the capacitance sensing, or the signals of the voltage and current signals, and determines the position, distance, touch height, and touch point of the induced change by numerical operation.

In an embodiment, the method further includes: dividing the plurality of first wires and the second wires into a plurality of groups, wherein each group includes at least two first wires, or at least two second wires; and sequentially transmitting a detection signal to the a group, wherein the first wire and the second wire of each group receive or transmit the same detection signal and the sensing signal; and the second operation method detects and senses the signal of the touch, and determines the induced change by numerical operation. Position, distance, touch height, and touch point.

In an embodiment, the second operation method may be: the sensor transmits a detection signal to the first selection unit to the first wire in the first direction; and the detection signal is sent through the second selection unit. And a second wire in the second direction to detect a change in the amount of charge, capacitance sensing, or voltage and current signals generated by each wire.

In an embodiment, the second operation method may be that the sensor sends a stimulation signal to the first wire in the first direction through the first selection unit, and then sequentially detects the second selection unit. On the second wire, each wire induces a signal change to detect the amount of charge generated by each wire, capacitance sensing, or voltage and current signal changes.

In an embodiment, the first control unit includes at least one control line and a plurality of switch switches or a plurality of serially connected switch switches respectively coupled to the plurality of first wires.

In an embodiment, the sensor can control the control line to turn on the switch switches to connect one of the first wires to the first conductive line, and control the control line to close the switch, interrupting And connecting a portion of the first wires to the first conductive lines.

In an embodiment, the second control unit includes at least one control line and a plurality of switch switches or a plurality of serially connected switch switches respectively coupled to the second wires.

In an embodiment, the sensor can control the control line conducting portion of the switch to connect one of the second wires to the second conductive line, or control the control line to close the switch, interrupting A portion of the connection between the second wires and the second conductive lines.

In one embodiment, the sensor performs a capacitive, resistive, pressure sensitive, or optical touch sensing detection.

In an embodiment, the MEMS display further includes an upper cover protection unit disposed above the plurality of optical interferometric display units, wherein the touch unit can be located inside or outside the inside of the upper cover protection unit or inside or at the Between the upper cover protection unit and the plurality of optical interference display units.

In an embodiment, the upper cover protection unit further includes a modeling unit, wherein the touch unit can be located inside or outside the interior of the modeling unit or inside.

In an embodiment, the MEMS display further includes a color filter disposed on the plurality of optical interferometric display units, and an upper cover protection unit disposed on the color filter, wherein the touch unit is located The upper cover protection unit is located inside or outside or inside thereof, between the upper cover protection unit and the color filter, or between the color filter and the optical interference display unit.

In one embodiment, the MEMS display further includes an optical diffusion film disposed over the plurality of optical interferometric display units.

In an embodiment, the MEMS display further includes a front light source disposed in front of the plurality of display units.

In an embodiment, the front light source further comprises: a light source, wherein the light source can be a white light source, or a monochromatic light source, or a plurality of color light sources.

In an embodiment, the front light source further includes: a light source; and a light guide plate, wherein the light source is disposed at a side of the light guide plate, the light source is incident on the side of the light guide plate, and the light guide plate faces the plurality of light guide plates One side of the display unit is emitted, and after being reflected by the display unit, the light guide plate of the front light source is penetrated.

In one embodiment, touch sensing is performed during the time period when the front light source is turned off or darkened.

In an embodiment, the touch unit is disposed above or inside the front light source.

In one embodiment, the touch unit uses an electromagnetic induction method, an optical sensing method, an ultrasonic sensing method, a capacitive sensing method, a resistance sensing method, or a dual mode or multi-mode sensing method.

In one embodiment, the first substrate is a semiconductor substrate, and each of the MEMS display units is a micro mirror array device.

In one embodiment, the micromirror array device includes a plurality of micromirrors arranged in a matrix arrangement on a surface of the semiconductor substrate, wherein each of the micromirrors comprises a mirror surface and corresponding two control electrodes or groups of control electrodes .

In an embodiment, the control array controls the mirror tilt angle and the tilt direction of the plurality of micromirrors.

In an embodiment, the angle of inclination angle ranges from -25 degrees to +25 degrees.

In one embodiment, when the micromirror array device displays an external light source or a light machine, the touch sensing is performed during the time period when the external light source or the light machine is turned off or darkened.

In an embodiment, the touch unit is disposed under the first substrate.

In an embodiment, the MEMS display further includes an upper cover protection unit disposed above the plurality of micro mirror array units, wherein the touch unit can be located inside or outside the inner cover protection unit or inside thereof, or on the upper cover Between the protection unit and the plurality of micromirror array units.

In one embodiment, the touch unit uses an electromagnetic induction method, an optical sensing method, an ultrasonic sensing method, a capacitive sensing method, a resistance sensing method, or a dual mode or multi-mode sensing method.

In summary, the present invention adds a touch element to a MEMS display, so that the touch function of the MEMS display device is more direct and convenient in use. Moreover, the touch sensing wire of the touch panel can be co-constructed with the control unit of the MEMS display or improved from the wire structure of the control unit, thereby reducing the process procedure.

In order to achieve a more user-friendly operation, many electronic products have been converted from input devices such as a conventional keyboard or mouse to using a touch panel as an input device. One of the main technical features of the present invention is that the touch function is integrated into the optical interference display system or integrated into the micro-mirror array display system, and becomes a device with a touch-enabled MEMS display.

According to the detection method, the touch panel has electromagnetic induction mode, optical sensing mode, ultrasonic sensing mode, capacitive sensing mode, resistance sensing mode, pressure sensing mode or the above multi-mode sensing combination mode. Among them, the resistance-inductive type, when pressed with a finger or other contact, generates a voltage change, and the touch position is distinguished by detecting a change in voltage. In the ultrasonic sensing mode, the entire surface is covered with sound waves or infrared rays, and the fingers or contacts block the standing wave patterns, and the touch position is distinguished by detecting the change of the standing wave pattern. The surface capacitive touch panel detects the coordinates of the induced current or voltage generated by the touch position by utilizing the capacitance change generated by the electrostatic combination between the electrode and the human body. The principle of induction is that voltage acts on the four corners of the screen sensing area and forms a fixed electric field. When the finger touches the screen, the electric field can induce current, which is determined by the controller, according to the ratio of the current to the four corners. The contact position can be calculated. The projected capacitor technology has a panel structure similar to a resistive touch panel. It has two layers of conductive plates in the X-axis and Y-axis directions, but it uses the same principle as the surface capacitive touch technology to measure the current flowing through the electrodes. The change is used to calculate the position of the touch point. Because of the two-layer structure, the touch of the X-axis and the Y-axis can be detected separately, so that the multi-touch function can be achieved. When the finger approaches the screen, the human finger is A good conductor will form a capacitive induction with the electric field of the panel. The static electricity on the finger will flow into the screen panel and pass through the electrodes of the X-axis and Y-axis panels to the sensor. The sensor measures the amount of capacitance change. The controller is based on the capacitance. The amount of change calculates the touch point coordinates. The electromagnetic touch panel mainly includes three major components, (1) digital sensor board (2) ASIC-containing circuit controller board (3) pressure sensitive electromagnetic pen, technically utilizing specific The coil on the electromagnetic pen senses a change in the magnetic field and magnetic flux of the antenna on the inductive digital antenna plate, and uses the weak current generated by the electromagnetic pen to calculate the contact coordinate.

The optical interference display system or the microelectromechanical display system of the present invention can be combined with any of the above sensing modes to have a touch function.

Micro-Electro-Mechanical Systems (MEMS) display system refers to a micro-electromechanical planar display, including an optical interferometric planar display mode and a Micro-Mirror Array system device. In either the optical interferometric display mode or the micromirror array device can be used in the present invention, the touch function is added in the manner of the present invention.

1 is a cross-sectional view showing a display unit in a monochromatic optical interference display system. Each of the monochromatic optical interferometric display units 100 includes a substrate 110 having a first electrode 102 and a second electrode 104 formed thereon. The first electrode 102 and the second electrode 104 are supported by the support 106 to form a substrate. Cavity 108. The distance between the first electrode 102 and the second electrode 104, that is, the gap of the chamber 108 is D. The second electrode 104 is an electrode in the direction of light incidence, and can be deformed by driving with an electric field. The first electrode 102 is an electrode of optical interference resonance. Generally, external light, sunlight, or white light is used as an incident light source of the optical interferometric display unit 100, and the white light system is mixed with light of various wavelengths (Wave Length, represented by λ) in the visible light spectrum range. When incident light passes through the second electrode 104 into the chamber 108, only the wavelength (λ) in accordance with Equation 1.1 can be constructively interfered in the chamber 108 to be reflected out. Where N is a natural number. in other words,

2D=Nλ (1.1)

The incident light wavelength λ is caused to cause constructive interference in the chamber 108, and the reflected light of the wavelength λ is output. At this time, the eyes of the observer 112 are observed along the direction of the incident light, and the reflected light having the wavelength λ can be seen. Therefore, the color-changing pixel unit 100 is in an "on" state, that is, a bright state. status.

Figure 2 is a schematic cross-sectional view showing a conventional display unit with a voltage applied thereto. Referring to FIG. 2, under the driving of the voltage, the second electrode 104 is deformed by the electrostatic attraction force and collapses in the direction of the first electrode 102. At this time, the distance between the first electrode 102 and the second electrode 104, that is, the gap of the chamber 108 is not zero, but d, d may be equal to zero. At this time, D in Equation 1.1 will be replaced by d. Among the wavelengths λ of all visible light spectrums of incident light, only visible wavelengths conforming to Equation 1.1 can produce constructive interference, and design d makes all incident light in the visible wavelength range. The visible light spectrum is destructively interfered. For the observer 112 looking in the direction of the incident light, it will be seen that the reflected light in the visible light spectrum is very weak, and is in a dark state or an off state. Therefore, The light interference display unit 100 is in an "off" state. The viewer 112 sees a black display unit. When the light interference display unit 100 is to be switched from the "off" state to the "on" state, the voltage for driving the deformation of the second electrode 104 must be removed first, and then another opposite voltage is applied, or The self-recovering force of the deformation itself, the second electrode 104 that loses the electrostatic attraction effect returns to the original state as in Fig. 1, so that the light interference display unit 100 assumes an "on" state. The material forming the substrate 110 may be made of glass. The material forming the electrodes 102, 104 may be indium tin oxide glass (ITO) or indium zinc oxide glass (IZO). The light interference electrode (first electrode 102) is a thin film layer (Membrane). Since the light is subjected to different degrees of interference in different gaps, and thus different colors of light, the color of the reflected light and the control of its brightness can be achieved by designing the distance between the chambers 108. By controlling the ratio of "on" and "off" time, gray scale and brightness are displayed.

In one embodiment, in order to protect the display unit 100, as shown in FIG. 3, a flat protection structure 120 is bonded to the substrate 110 by the adhesive material 122 to form a U-shaped protection structure. In addition, a second substrate 124 may be formed as an upper cover protection unit to be sealed with the first substrate 110, and an inert gas such as vacuum or nitrogen is applied to isolate the light interference display unit 100 from the external environment to avoid water in the air. Molecules, dust or oxygen invade and damage the light interference display unit 100. The upper cover protection unit (second substrate 124) may further include a modeling unit (not shown) to diversify the appearance of the system. In another embodiment, in order to realize full-color display, different chamber spacings can be formed, and the light is subjected to different degrees of interference in different gaps of the parallel plates to present different color lights to achieve full Color display. 4 is a cross-sectional view showing a display unit in a color light interference display system according to an embodiment of the invention. An optical interferometric color display unit 200 is composed of three monochromatic optical interference display units 100. Each monochromatic optical interference display unit 100 includes a substrate 110, a support layer 106, a plurality of first electrodes 102, and a plurality of The second electrodes 104 are formed. The substrate 110 is usually a glass substrate or a substrate of other materials; the support layer 106 is disposed on the substrate 110 for supporting the edge of the second electrode 104; the first electrode 102 is disposed on the substrate 110, and the first electrode 102 can be It is a transparent electrode; usually, an absorbing layer or an absorbing material may be placed under the first electrode or outside (below) the first substrate.

The second electrode 104 is disposed above the first electrode 102 and supported by the support layer 106. The second electrode 104 can be a transparent electrode, and the material thereof is, for example, Indium Tin Oxide (ITO) or It is an IZO, or a carbon nanotube material. In one implementation, the second electrode 104 can be disposed on a transparent substrate. As can be seen from FIG. 4, in order to achieve the purpose of color display, in each of the optical interferometric color display units 200, the chambers of the three monochromatic light interference display units 100 have gaps of different lengths, and the gaps thereof are respectively D1, d2, and d3, by which constructive interference is generated for light of different wavelengths to display different colors. Among them, the chamber having the gap d1 can display blue light, for example, the chamber having the gap d2 can display green light, for example, and the chamber having the gap d3 can display red light, for example. In other words, after the light penetrates the second electrode 104 from the outside, it enters the first electrode 102 through different gaps d1, d2, and d3, and then reflects the color of the partial band by resonance of the resonant cavity. The light is subject to varying degrees of resonance interference allowing the viewer 112 to see red, green, and blue light. On the other hand, the second electrode 104 can be deformed by the voltage attraction to be displaced in the direction of the first electrode 102 by the voltage driving, and the gap d1 and d2 between the second electrode 104 and the first electrode 102 can be made close. The d3 changes and destructively interferes with the incident light to destructively interfere with the visible light spectrum, leaving the viewer 112 with no visible light. In addition, in order to prevent water molecules in the air from entering the cavity of the light interference display unit 200 to affect the gap, an upper cover protection unit 124 may be formed as shown in FIG. 3, and the wire structure of the touch panel may be formed on the upper cover. The unit structure 124 is protected.

In order to control the "on" and "off" states of each of the light interference display unit 100 chambers, an active array formed by a plurality of control units is formed on the substrate 110 and thereon, and each of the optical interference display units 100 is controlled by at least one. The unit is controlled to form a pixel. Each control unit includes, for example, a thin film transistor, a CMOS, and a switching element coupled to the light interference display unit 100 to control the "on" and "off" states of the light interference display unit 100. When a control unit controls the corresponding light interference display unit 100 to form an "off" state, the control unit applies a voltage to the corresponding light interference display unit 100 such that the second electrode 104 approaches the first electrode 102, at this time, the incident All of the visible light spectrum of the light is destructive interference, and the observer 112 looking in the direction in which the incident light is incident on the first electrode 102 will not see any reflected light in the visible light spectrum, so that one is seen Black display unit. On the contrary, when a control unit controls the corresponding light interference display unit 100 to form an "on" state, the control unit does not apply a voltage to the corresponding light interference display unit 100, and the incident light is reflected by the first electrode 102. For the viewer 112 looking along the direction of the incident light, a bright display unit will be visible. Accordingly, when a color light interferes with the three chambers of the display unit 200 and is controlled by different control units, by changing the gaps d1, d2, and d3 of the three chambers respectively, different light colors can be mixed to achieve full color. The purpose. In other words, for the observer 112 looking in the direction in which the incident light is incident on the first electrode 110, it can be seen that the three chambers collectively reflect the mixed color. The optical interferometric display can be combined with a plurality of optical interferometric display units to reflect different colors of cyan, magenta, yellow, and the like.

In one embodiment, a touch wire structure can be co-constructed with a conductive line of a MEMS display, wherein the touch wire structure can use a scan line, a data line, an auxiliary line, a bias line or a power line of a display array. , common electrode lines or signal lines, or read lines, or bias lines, or control lines, or lines such as compensation circuits. The following is an example of a wire electrode structure using a scanning line and a data line of an optical interference display system as a touch element. It should be noted that the present invention is not limited to use only in an optical interference display system, and can also be applied to other MEMS display systems, such as a Micro-Mirror Array device, when applied to a micromirror. When the array device is mounted, the active electrode structure of the micromirror array device is used to form a wire electrode structure of a touch element.

Referring to FIG. 5A, a schematic diagram of the coupling relationship between an optical interference display unit and its control unit electrodes is shown. In this embodiment, the control unit electrodes are disposed on the first substrate 110 by using the active array, and are composed of the intersecting data lines D1 D Dm and the scan lines G1 G Gn , and each pair of data lines and scan lines can be Controlling a pixel area, for example, the data line D1 and the scan line G1 can be used to control one pixel. Each pixel, such as pixel 402, has the same structure, and includes a control film transistor 403 coupled to the corresponding light interference display unit 100 for controlling the "on" of each light interference display unit 100 chamber. And "off" status. In one embodiment, the first electrode 102 is coupled to a common electrode, and the second electrode 104 is coupled to the thin film transistor 403. When the scan line G1 is scanned by the scan signal, the thin film transistor 403 is turned on. The data line D1 controls the displacement of the second electrode 104 between the gaps d through the thin film transistor 403, and controls the "on" and "off" states of each of the light interference display unit 100 chambers. The corresponding sensor is also disposed on the first substrate 110. In the above embodiment, the first electrode 102 is coupled to a thin film transistor 403, and the second electrode 104 is coupled to the common electrode. The micromirror array display unit can also be constructed in such a way.

FIG. 5B is a schematic diagram showing the electrode structure of the touch element of the optical interference display system according to an embodiment of the invention. The electrode structure of the touch component utilizes the original data lines D1 DDm and the scan lines G1 G Gn as standard processes on the original array substrate, so that the process steps or yield of the active array on the substrate 110 can be omitted. Accordingly, a set of data lines, such as data lines D1 and D2, and a set of scan lines, such as scan lines G1 and G2, intersect a sensing area. In order to avoid the interference between the scanning signal and the data signal of the optical interference display system when displaying the field, and the detection signal when performing the touch detection, in an embodiment, the selection units 103 and 107 can be used to control the data line between D1 and Dm. And the connection between the scan lines G1~Gn, and also uses the time-sharing method to insert the touch position detection period in the display time of the two consecutive fields to avoid the display of the single image field of the image. Accordingly, when the data lines D1 to Dm and the scan lines G1 to Gn are transmitting data or scanning signals, the selection units 103 and 107 interrupt the coupling between the data lines D1 to Dm and the scanning lines G1 to Gn. On the other hand, when the sensor 105 senses in the touch detection period, the selection units 103 and 107 are coupled to the selected data lines D1 D Dm and the scan lines G1 G Gn to form an inductive line, so that the sensor 105 can be Transmitting a capacitive, resistive, pressure sensitive, or optical touch sensing detection signal to the coupled data lines D1 to Dm and the scanning lines G1 to Gn. The sensor 105 can perform calculation of touch values, positions, and height distances of capacitive, resistive, pressure sensitive, or optical touch sensing. The sensor 105 is used to stimulate, detect or sense part of the data lines D1 D Dm selected by the selection unit 103, and to stimulate, detect or sense, and select the signals in the partial scanning lines G1 G Gn selected by the unit 107.

For example, in the case of capacitive touch sensing, when performing self-capacitance sensing detection, the sensor 105 controls the selecting units 103 and 107 to select the data lines D1 to Dm and the scanning lines G1 to Gn. Then, the detection signal sent by the sensor 105 is transmitted to the selected data lines D1~Dm and the scan lines G1~Gn, and the lateral coordinates and the longitudinal coordinates are respectively determined according to the change of the capacitance before and after the touch, and then combined into a planar touch coordinate. . On the other hand, in the mutual capacitance sensing detection, the stimulation signals can be sequentially sent from the data lines D1 to Dm, and the signals are simultaneously received by the scanning lines G1 to Gn, that is, the detection signals sent by the sensor 105. The data lines D1 to Dm are sequentially transmitted to the data lines D1 to Dm via the selection unit 103, and the detection signals on the scan lines G1 to Gn are transmitted back to the sensor 105 by the selection unit 107. Or the stimulation signals are sequentially sent from the scan lines G1 to Gn, and the signals are simultaneously received by the data lines D1 to Dm, that is, the detection signals from the sensor 105 are sequentially transmitted to the scan lines G1 to Gn via the selection unit 107, and The detection signals on the data lines D1 to Dm are transmitted back to the sensor 105 via the selection unit 103. This gives the capacitance of all horizontal and vertical electrode intersections, ie the capacitance of the two-dimensional plane of the entire touch screen. According to the two-dimensional capacitance change data of the touch screen, the coordinates of the touch and touch points are calculated. It is worth noting that the above selected data lines D1~Dm and the scanning lines G1~Gn can also be applied to resistive, pressure sensitive, pressure sensitive or optical.

When the electromagnetic induction touch sensing is performed, the sensor 105 controls the selection unit 103 to form a loop between the data lines D1 to Dm, and transmits a signal to the loop through the selection unit 103 to determine whether the loop is a touch position. Similarly, the sensor 105 also controls the selection unit 107 to form a loop between the scan lines G1 G Gn, and transmits a signal to the loop through the selection unit 107 to determine whether the loop is a touch position. In one embodiment, it is determined whether the magnetic flux, electromagnetic induction, or voltage, current, frequency, touch sensing loop signal, etc. in the loop change, whether the sensing signal changes. The sensed signal may be a linear superposition combination of a square wave, a triangular wave, a triangular wave or a plurality of square waves, and the amount of change of the sensing signal may be a waveform distortion degree, a signal mean value or a peak value change, a voltage or a current. The amount of change or the relative value of the above physical parameters, the integral value, the accumulated or accumulated value, and the like.

FIG. 5C is a schematic diagram showing an electrode structure of a touch element of an optical interference display system according to another embodiment of the present invention. The touch component can perform dual mode touch. The active array of the optical interference display system is composed of the intersecting data lines D1~Dm and the scanning lines G1~Gn, and each of the opposite data lines and the scanning lines can control a pixel area, for example, the data line D1 and the scan. The aim line G1 can be used to control a pixel 402. Each pixel, such as pixel 402, has the same structure, and includes a control film transistor 403 coupled to the corresponding light interference display unit 100 for controlling the "on" of each light interference display unit 100 chamber. And "off" status. The gate driving circuit 401 sequentially sends the scanning signals to the scanning lines G1 G Gn. When one of the scanning lines is scanned by the scanning signals, the thin film transistor connected to the scanning lines is turned on, but not scanned. The thin film transistor is turned off. When the thin film transistor of the column is turned on, the source driving circuit 400 sends the image signal to the data lines D1~Dn, and the thin film transistor 403 can control the corresponding optical interference display unit 100. The "on" and "off" states of the chamber are used to display images. When the gate driving circuit 401 completes scanning of all the scanning lines, the display of a single image frame is completed, wherein the scanning of the scanning lines is repeated, so that the subsequent image fields are continuously displayed. The intersecting data lines D1~Dm and the scanning lines G1~Gn are at an angle of 90 degrees in this embodiment. However, the angle of the angle is not limited to 90 degrees. For example, in other embodiments, the angle is The angle can also be 60 degrees, 45 degrees, 36 degrees or 30 degrees. The data lines D1~Dm and the scanning lines G1~Gn refer to electrical conduction lines, which may be metal, alloy lines, conductive materials such as ITO, IZO carbon nanotubes, and the like.

Since the wire structure of the touch component utilizes the original data lines D1 DDm and the scan lines G1 G Gn as standard processes on the original array substrate, the process steps or yield of the active array on the substrate 110 may not be changed. Accordingly, taking the electromagnetic induction touch as an example, a sensing area can be enclosed by two sets of opposite data lines, such as data lines D1 and D20. For example, the scanning lines G1 and G20 enclose a sensing area.

In addition, taking capacitive sensing touch as an example, a set of data lines, such as data lines D1...D10, and a set of scanning lines G1...G10, may correspond to an overlapping sensing area. In order to avoid the interference between the scanning signal and the data signal of the optical interference display system when displaying the field, and the detection signal when performing the touch detection, in an embodiment, the selection units 103 and 107 and the control units 123 and 124 can be used to control. The data line D1~Dm and the scan line G1~Gn are coupled, and the time-sharing method is also used to insert the touch position detection period in the display time of the two consecutive fields to avoid affecting the display of the single field. Accordingly, when the data lines D1 to Dm and the scan lines G1 to Gn are transmitting data or scanning signals, the selection units 103 and 107 interrupt the coupling between the data lines D1 to Dm and the scanning lines G1 to Gn. On the other hand, when the sensor 105 senses in the touch detection period, the selection units 103 and 107 are coupled to the selected data lines D1 D Dm and the scan lines G1 G Gn to form a loop, so that the sensor 105 can transmit A capacitive, resistive, pressure sensitive, or optical touch sensing detection signal is coupled to the coupled data lines D1 to Dm and the scanning lines G1 to Gn.

In other words, the process of development and detection can be divided into three time periods in which the display displays the scanned picture area, and the selection units 103 and 107 and the sensor 105 do not function. In the second time period, the electromagnetic touch detection is performed. At this time, the selection unit 103 forms a loop between the data lines D1 to Dm, for example, and the sensor 105 performs the detection of the magnetic flux change. Next, the selection unit 107, for example, forms a loop between the scan lines G1 to Gn, and the sensor 105 detects the change in the magnetic flux. Finally, the capacitive touch detection is performed after the third time period. At this time, the sensor 105, for example, sequentially scans the data lines D1 D Dm and the scan lines G1 G Gn to detect the data lines D1 D Dm and scan. The capacitance value of the jump between the lines G1 to Gn changes to determine the touch position. The sensor 105 can perform calculation of touch values, positions, and height distances of capacitive, resistive, pressure sensitive, or optical touch sensing. The sensor 105 is used to stimulate, detect or sense part of the data lines D1 D Dm selected by the selection unit 103, and to stimulate, detect or sense, and select the signals in the partial scanning lines G1 G Gn selected by the unit 107.

In an embodiment, as shown in FIG. 5D, the selection units 103 and 107 include, for example, at least one selection line and at least one transmission line, wherein a corresponding thin film transistor (switching switch) is formed at the junction of the selection line and the transmission line. Through the thin film transistors, the data lines D1~Dm and the scan lines G1~Gn can be coupled to the transmission line. In another embodiment, the selecting units 103 and 107 include, for example, a plurality of switching switches, and the partial data lines D1 D Dm and the partial scanning lines G1 G Gn are connected to perform a capacitor by directly switching the switching switches. Type, resistive, pressure sensitive, or optical touch sensing. In addition, a control unit 223 is formed between the data lines D1 D Dm and the conduction line 221 to prevent the scanning signal and the data signal of the liquid crystal display from colliding with the detection signal when the field is displayed. The control data lines D1~Dm are coupled to the conduction line 221, and the touch position detection period is inserted in the display time of the two consecutive fields by using the time division method to avoid the display of the single image field of the image. The control unit 223 has a control line 220, a plurality of switch switches 2231 to 223m, and a conduction line 221. The control line 220 can control the opening and closing of the switch 2231~223m, and the data lines D1~Dm pass through the switch 2231. ~223m is coupled to the conduction line 221. The changeover switches 2231 to 223m are, for example, thin film transistors. Accordingly, when the data lines D1 to Dm are displayed when the data signals are transmitted, the control line 220 controls the switching of the data lines D1 to Dm and the conduction lines 221 when the switching switches 2231 to 223m are turned off. On the other hand, when the sensor 105 senses in the electromagnetic detection period, the control line 220 controls the switch switches 2231 to 223m to be turned on, and the data lines D1 to Dm are coupled to the conduction line 221 to form a loop for position sensing. .

On the other hand, a control unit 224 is formed between the scan lines G1 G Gn and the conduction line 222 for controlling the coupling of the scan lines G1 G Gn and the conduction line 222 . The control unit 224 has a control line 226, a plurality of switch switches 2241~224n and a conduction line 222. The control line 226 can control the opening and closing of the switch 2241~224n, and the scan lines G1~Gn pass through the switch. 2241~224n are coupled to the conduction line 222. The switching switches 2241 to 224n are, for example, thin film transistors. Accordingly, when the scan lines G1 to Gn are displayed for transmitting the data signal, the control line 226 controls the coupling of the scan lines 24-1 to 224n to be closed, and the connection of the scan lines G1 to Gn and the conduction line 222 is interrupted. On the other hand, when the sensor performs electromagnetic induction sensing in the detection period, the control line 226 controls the switching switches 2241 to 224n to be turned on, and the scanning lines G1 G Gn are coupled to the conduction line 222 to form a loop for position sensing. Measurement.

When the sensor performs capacitive touch sensing in the detecting period, the sensor 105 controls the control unit 223 to interrupt the connection between the data lines D1 D Dm, and the control control unit 224 interrupts the scanning lines G1~ Gn connection. Then, according to the capacitive sensing method adopted, the self-capacitive sensing method or the mutual capacitive sensing method is used for scanning. For example, when the self-capacitance sensing method is adopted, the data lines D1 to Dm and the scanning lines G1 to Gn respectively form a capacitance with the ground, that is, a self-capacitance, that is, a capacitance of the electrode to the ground. When the finger approaches or touches the touch screen, the capacitance of the finger will be superimposed on the capacitance formed by the data line D1~Dm or the scan line G1~Gn and the ground respectively, causing the charge and capacitance to change, thereby detecting Touch location. Accordingly, when self-capacitive sensing detection is performed, the sensor 105 controls the selection units 103 and 107 to select the data lines D1 to Dm and the scanning lines G1 to Gn. Then, the detection signal sent by the sensor 105 is transmitted to the selected data lines D1~Dm and the scan lines G1~Gn, and the lateral coordinates and the longitudinal coordinates are respectively determined according to the change of the capacitance before and after the touch, and then combined into a planar touch coordinate. .

On the other hand, if the mutual capacitance sensing method is adopted, the difference between it and the self-capacitance sensing detection is that the sensing capacitors, that is, the data, are formed at the intersections of the data lines D1 to Dm and the scanning lines G1 to Gn. The lines D1 to Dm and the scanning lines G1 to Gn respectively constitute the two poles of the sensing capacitor. When the finger touches the touch screen, the coupling between the two electrodes near the touch point is affected, thereby changing the charge and capacitance distribution between the two electrodes, and detecting the touch position. Therefore, in the mutual capacitance sensing detection, the stimulation signals can be sequentially sent from the data lines D1 to Dm, and the signals are simultaneously received by the scanning lines G1 G Gn, that is, the detection signals sent by the sensor 105 are selected. The unit 103 is sequentially transmitted to the data lines D1 to Dm, and the detection signals on the scan lines G1 to Gn are transmitted back to the sensor 105 by the selection unit 107. Or the stimulation signals are sequentially sent from the scan lines G1 to Gn, and the signals are simultaneously received by the data lines D1 to Dm, that is, the detection signals from the sensor 105 are sequentially transmitted to the scan lines G1 to Gn via the selection unit 107, and The detection signals on the data lines D1 to Dm are transmitted back to the sensor 105 via the selection unit 103. This gives the capacitance of all horizontal and vertical electrode intersections, ie the capacitance of the two-dimensional plane of the entire touch screen. According to the two-dimensional capacitance change data of the touch screen, the coordinates of the touch and touch points are calculated. It is worth noting that the above selected data lines D1~Dm and the scanning lines G1~Gn can also be applied to resistive, pressure sensitive, pressure sensitive or optical.

When performing electromagnetic induction touch sensing, the sensor 105 controls the control units 223 and 224 to connect the data lines D1 D Dm and the scan lines G1 G Gn respectively, and the sensor 105 also controls the selection unit 103. A loop is formed between the data lines D1 to Dm of the two groups, and a signal is sent to the loop through the selection unit 103 to determine whether the loop is a touch position.

Similarly, the sensor 105 also controls the selection unit 107 to form a loop between the two sets of scan lines G1 to Gn, and transmits a signal to the loop through the selection unit 107 to determine whether the loop is a touch position. In one embodiment, it is determined whether the magnetic flux, electromagnetic induction, or voltage, current, frequency, touch sensing loop signal, etc. in the loop change, whether the sensing signal changes. The sensed signal may be a linear superposition combination of a square wave, a triangular wave, a triangular wave or a plurality of square waves, and the amount of change of the sensing signal may be a waveform distortion degree, a signal mean value or a peak value change, a voltage or a current. The amount of change or the relative value of the above physical parameters, the integral value, the accumulated or accumulated value, and the like.

In addition, since the data lines D1~Dm and the scanning lines G1~Gn are densely arranged, if used as a touch panel electrode, when a user touches the panel, multiple data lines D1~Dm and scanning are simultaneously generated. The value of the cross-contact capacitance between the lines G1 to Gn changes, and the signal change value is too low to be easily detected. Therefore, in order to solve the above problem, a plurality of data lines adjacent to each other and a plurality of data lines with a certain interval may be used as another group, and two sets of induction wires are turned on through the switch to form an inductive loop. The adjacent scanning lines are grouped and the plurality of scanning lines are separated into another group, and the two sets of sensing wires are turned on through the switch to form an inductive loop.

As shown in Figure 5A, taking capacitive sensing as an example, the ninety adjacent data lines are used as the same group, for example, D1~D90 are a group, D91~D180 are a group, and so on. The neighboring 30 scan lines are the same group, for example, G1~G30 is a group, G31~G60 is a group, and so on. The data lines and scan lines of the same group are treated as the same line, and the same sensing signal is input for detection. In an embodiment, the grouping manner may be grouped according to a general finger width of 1/2 to 1/3 and a size of about 2 to 5 mm.

Furthermore, in order to form a loop between the data lines D1 to Dm and the scan lines G1 to Gn for the electromagnetic inductive touch detection, the selection units 103 and 107 are also formed on the liquid crystal display panel. The selection unit 103 is connected in series to the partial data lines D1 to Dm to form a loop. The selection unit 107 also connects a part of the scanning lines G1 to Gn in series to form a loop. Similarly, the loop formed between the data lines D1~Dm and the scan lines G1~Gn may be composed of two sets of data lines adjacent to a certain distance or two sets of scan lines adjacent to each other, or may be hopped at a certain interval. The way is formed. For example, the sensor 105 couples the group formed by the data lines D1 to D30 and the group formed by the data lines D61 to D90 through the selection unit 103 to form a loop of a large area. When the electromagnetic induction touch is performed, the sensor 105 can transmit the sensing signal to the loop through the selection unit 103 for detection. And the loops formed can overlap each other to avoid detecting "dead angles". For example, the two loops formed in sequence, the A loop and the B loop, wherein the A loop is a line from the data lines D1~D10, separated by 100 lines, and then one of the data lines D111~D220 is formed as one loop. The B loop is formed by the data line D100~D110 as a line, separated by 100 lines, and then formed by the data line D211~D220 as another branch line. Accordingly, the overlap between the A loop and the B loop has D100~D220 to avoid detecting the "dead angle".

The coupling between the data lines D1 to Dm and the scanning lines G1 to Gn may be performed by a thin film transistor (or TFD, NMOS, PMOS, CMOS, ..., etc.) or other components having the same function. If formed of thin film transistors, the thin film transistors can be formed on the periphery of the active array of the optical interference display system and formed together with the thin film transistors in the active array of the optical interference display system. In addition, in another embodiment, the selection unit 103 can be directly built in the source driving circuit 400, and the selection unit 107 can also be directly built in the gate driving circuit 401.

FIG. 5E is a schematic diagram showing the electrode structure of the touch component of the optical interference display system according to another preferred embodiment of the present invention. The biggest difference between this embodiment and the previous embodiment is that in the embodiment, the control unit The 243 has a control line 240, a plurality of switching switches 2431 to 243m, and a plurality of conduction lines 2411 to 241k. The sensor 105 connects the conduction lines 2411 to 241k. The data lines D1~Dm are coupled to the corresponding conductive lines 2411~241k through the switch, and connected to the sensor 105 through the corresponding conductive lines 2411~241k. In the present embodiment, the data lines D1 and D2 are coupled to the conduction line 2411 through the changeover switches 2431 and 2432, and are connected to the sensor 105 through the conduction line 2411. The data lines D3 and D4 are coupled to the corresponding conductive lines 2422 through the changeover switches 2433 and 2434, and connected to the sensor 105 through the corresponding conductive lines 2422. It should be noted that the number or order of the first wires coupling each of the conduction lines is not limited by this embodiment.

The sensor 105 controls the control line 240 to control the opening and closing of the changeover switches 2431 to 243m, so that the data lines D1 to Dm are coupled to the corresponding conduction lines through the plurality of switch switches 2431 to 243m. The switch 2431~243m is, for example, a thin film transistor, and the gates of the thin film transistors are coupled to the control line 240. When the control line 240 controls the thin film transistors to be turned off, the data lines D1 to Dm and the conductive lines are interrupted. Coupling between lines 2411~241k. Conversely, when the control line 220 controls the thin film transistors to be turned on, the sensor 105 also controls the selection unit 103 to select and turn on the corresponding data lines D1 to Dm to form a loop.

On the other hand, the control unit 244 has a control line 246, a plurality of switching switches 2441 to 244n, and a plurality of conduction lines 2421 to 242k. The sensor 106 connects the conduction lines 2421 to 242k. The scan lines G1~Gn are coupled to the corresponding conductive lines 2421~242k through the switch, and connected to the sensor 106 through the corresponding conductive lines 2421~242k. In the present embodiment, the scan lines G1 and G2 are coupled to the conduction line 2421 through the changeover switches 2441 and 2442, and are connected to the sensor 105 through the conduction line 2421. The scan lines G3 and G4 are coupled to the corresponding conductive lines 2422 through the switch 2443 and 2444, and connected to the sensor 105 through the corresponding conductive lines 2422. It should be noted that the number or order of the first wires coupling each of the conduction lines is not limited by this embodiment.

The sensor 105 controls the control line 246 to control the opening and closing of the changeover switches 2441 to 244n, so that the scan lines G1 to Gn are coupled to the corresponding conduction lines through the plurality of switch switches 2441 to 244n. The switching switches 2441~244n are, for example, thin film transistors, and the gates of the thin film transistors are coupled to the control line 246. When the control line 246 controls the thin film transistors to be turned off, the scanning lines G1 to Gn are interrupted. The coupling between the conduction lines 2421~242k. Conversely, when the control line 246 controls the thin film transistors to be turned on, the sensor 105 also controls the selection unit 107 to select and turn on the corresponding scan lines to form a loop for electromagnetic induction detection.

When the sensor performs capacitive touch sensing, the sensor 105 controls the control unit 243 to interrupt the connection between the data lines D1 to Dm, and the control unit 244 interrupts the connection between the scan lines G1 to Gn. . Then, according to the capacitive sensing method adopted, the self-capacitive sensing method or the mutual capacitive sensing method is used for scanning.

According to the present invention, in addition to being co-constructed with the electrode structure of the active array of the optical interference display system, the touch sensing elements can be formed at different positions of an optical interference display unit. Referring to Fig. 6, there is shown a schematic cross-sectional view of an optical interference display system in which only one optical interference display unit 100 is shown. The cross-sectional structure of the optical interference display system includes at least a first substrate 110, a second substrate 131, and an optical interference display unit 100 between the first substrate 110 and the second substrate 131. The second substrate may be an upper cover protection glass. In another embodiment, an upper cover molding unit may be separately formed on the second substrate 131. The upper cover modeling unit can be a transparent protective glass.

In this embodiment, a touch sensing panel 150 can be attached to the second substrate 131, or attached under the second substrate 131, or between the second substrate and the optical interference display unit 100, or Attached to the first substrate 110, that is, attached to the other surface of the first substrate 110 without the active array. In addition, in order to distribute the reflected point source into a uniform surface light, in another embodiment, a diffusion film 132 may be formed on the second substrate 131 to achieve uniform light diffusion. The sensing panel 150 can also be attached over the diffusion film 132. In addition, if an upper cover molding unit is separately formed on the second substrate 131, in this embodiment, a touch sensing panel 150 may be attached to the upper cover molding unit 131 or attached to the upper cover molding unit. .

In another embodiment, if a color light interference display system is to be formed, a color filter 130 may be further formed on the second substrate 131 on the optical interference display unit 100, as shown in FIG. A schematic cross-sectional view of an optical interference color display system in which only one optical interference display unit 100 is shown. The cross-sectional structure of the optical interference color display system includes at least a first substrate 110, a second substrate 131, a color filter 130, and an optical interference display unit 100 on the first substrate 110 and the color filter. 130, the color filter 130 is located on the second substrate 131. In another embodiment, an upper cover molding unit may be separately formed on the second substrate 131. The upper cover molding unit is a transparent protective glass.

In this embodiment, a touch sensing panel 150 can be attached to the second substrate 131 or attached under the second substrate 131, that is, attached to the second substrate 131 and the color filter 130. Between the color filter 130 and the optical interference display unit 100, or attached to the lower side of the first substrate 110, that is, attached Attached to the first substrate 110 does not have the other side of the active array. In addition, in order to distribute the reflected point source into a uniform surface light, in another embodiment, a diffusion film 132 may be formed on the second substrate 131 to achieve uniform light diffusion. The sensing panel 150 can also be attached over the diffusion film 132. The second substrate 131 can be an upper cover protection unit or an upper cover molding unit. In addition, if an upper cover molding unit is separately formed on the second substrate 131, in this embodiment, a touch sensing panel 150 may be attached to the upper cover molding unit or attached under the upper cover molding unit.

Referring to Fig. 8, there is shown a schematic cross-sectional view of an optical interference color display system in which only one optical interference type color display unit 200 is shown. The cross-sectional structure of the optical interference color display system includes at least a first substrate 110, a second substrate 131, and an optical interferometric color display unit 200 between the first substrate 110 and the second substrate 131. In another embodiment, an upper cover molding unit may be separately formed on the second substrate 131. The upper cover molding unit is a transparent protective glass.

In this embodiment, a touch sensing panel 150 can be attached to the second substrate 131 or attached under the second substrate 130, that is, attached to the second substrate 131 and the optical interference color display unit. Between 200, or attached under the first substrate 110, that is, attached to the other surface of the first substrate 110 without the active array. In addition, in order to distribute the reflected point source into a uniform surface light, in another embodiment, a diffusion film 132 may be formed on the second substrate 131 to achieve uniform light diffusion. The sensing panel 150 can also be attached over the diffusion film 132. In addition, if an upper cover molding unit is separately formed on the second substrate 131, in this embodiment, a touch sensing panel 150 may be attached to the upper cover molding unit or attached under the upper cover molding unit.

In addition, since neither the color light interference display system nor the monochromatic light interference display system can emit light by itself, in a dark environment, reflected light cannot be generated to display an image. Therefore, in order to solve this problem, the present invention provides a front light source in the optical interference display system as a source of reflected light, and its structure is as shown in FIG. Figure 9 is a schematic cross-sectional view of a light interference display system with a light source, including an optical interference display element 141, a front light source 140 disposed above the light interference display element 141, and/or a top cover The unit or protection unit 131 is disposed above the front light source 140. The upper cover molding unit or the protection unit 131 may be a transparent cover glass. The front light source 140 is configured to provide front illumination or night vision reading illumination required by the light interference display element 141, and includes a light source 140a and a light guide plate 140b for guiding the light direction to control the brightness uniform. The light source 140a is disposed on the side of the light guide plate 140b. The light source 140a emits light from the side of the light guide plate 140b, and the light entering the light guide plate 140b is emitted from one side of the light guide plate facing the light interference display element 141 to provide optical interference display. Element 141 is a uniform, efficient front light source. In this embodiment, a touch sensing panel 150 can be attached to the upper cover molding unit or the protection unit 131 or attached under the upper cover molding unit or the protection unit 131, that is, attached to the upper cover molding unit 131. Between the front substrate 141 and the front substrate 110, or attached to the first substrate 110, that is, attached to the other surface of the first substrate 110 without the active array. The light source can be a white light source or a plurality of color light sources that are presented in time series. The sensor of the touch sensing panel 150 can be disposed under the front light source 141 or under the protection unit 131, and the external switch and the sensor are shared and can be disposed at the periphery.

Figure 10 is a cross-sectional view showing a micromirror array device. A micromirror array device 300 includes a plurality of micromirrors 301 arranged in a matrix arrangement on the surface of the semiconductor substrate 302. Each micro mirror 301 includes a mirror surface 303 and corresponding two control electrodes 305 and 306. Each mirror 303 is generally square in shape and has a length ranging from about 5 to 30 microns. The mirror surface 303 includes an (aluminum plate) reflecting surface 307, a support platform 308, and an elastic flexible handle 309. The mirror 303 can be tilted according to the tilt axis at an angle of up to about ±15 degrees (typically less than ±7 to ±15 degrees), i.e., in the +-X, +-Y directions. The resiliently flexible handle 309 should be hingedly mounted to the base of the micromirror array device with a hinged handle. Wherein, the (aluminum plate) reflecting surface 307 defines an upper reflecting surface of the mirror surface 303. The elastic flexible handle 309 can drive the aluminum plate 307 to move. The two control electrodes 305 and 306 are respectively located on the two sides of the flexible handle 309, and can be individually addressed to the control electrodes 305 and 306 via electronic circuits in the substrate 302, and the mirror can be oriented toward the mirror by an electrostatic force. The control electrode 305 or the control electrode 306 is tilted. The shank 309 may be in the form of a support post that is coupled to the mirror 303. Alternatively, the handle 309 can extend at least partially along the tilt axis. The shank 309 is typically in the form of a support wall extending along the axis of inclination and coextensive with the mirror 303. The control circuit unit is made by using a CMOS SRAM memory cell. In other words, when the process is started, the CMOS memory circuit 304 is first disposed on the surface of the semiconductor substrate 302, and the control electrodes 305 and 306 are remanufactured. .

In this architecture, the touch sensing component can be co-constructed with the electrode structure of the CMOS memory circuit. It is worth noting that the driving method for the optical interference display unit described above can be applied to the micromirror array device. Detectors, driver ICs, etc., can be used in MEMS substrates, Wafer, area, volume can be smaller. It can be formed at different positions of the display system formed by the micromirror array device 300. Referring to FIG. 11, a cross-sectional structure of a micromirror array display system includes at least a micromirror array device 300 and a second substrate 310 as an upper cover protection unit. In another embodiment, the upper cover protection unit is a transparent cover glass, and the upper cover protection unit may further include an upper cover molding unit. In this embodiment, a touch sensing panel 150 can be attached to the second substrate 131 or attached under the second substrate 1310, that is, attached to the second substrate 131 and the micro mirror array device 300. Between or attached to the micromirror array device 300.

The micromirror array device can also be combined with a front light source as shown in FIG. Figure 22 is a schematic cross-sectional view of a micromirror array device having a light source, including a micromirror array device 300, a front light source 340 disposed above the micromirror array device 300, and/or a top cover The unit or protection unit 310 is disposed above the front light source 340. The upper cover molding unit or the protection unit 310 may be a transparent protective glass. The front light source 340 is configured to provide front illumination or night vision reading illumination required by the micromirror array device 300, and includes a light source 340a and a light guide plate 340b for guiding the light direction and controlling the brightness to be uniform. The light source 340a is disposed on a side of the light guide plate 340b. The light source 340a emits light from a side of the light guide plate 340b, and the light entering the light guide plate 340b is emitted from a side of the light guide plate facing the micromirror array device 300 to provide a micro mirror array. The device 300 has a uniform, efficient front light source. In this embodiment, a touch sensing panel 150 can be attached to the upper cover molding unit or the protection unit 310 or attached under the upper cover molding unit or the protection unit 310, that is, attached to the upper cover molding unit 310. Between and the front light source 340. The light source can be a white light source or a plurality of color light sources that are presented in time series.

When used in projection or HMD or micro-projection pico-Display, there may be a light machine system with an external light source to match it. When the MEMS display device is an external light source or a light machine, the touch sensing is performed during the period when the external light source or the external light source or the light machine is turned off or darkened by the front light source.

In summary, the present invention adds a touch panel to a MEMS display, so that the touch function of the MEMS display device is more direct and convenient in use. Moreover, the wire structure of the touch panel can be co-constructed with the control electrode of the MEMS display, and the process procedure is reduced.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and the present invention can be modified and modified without departing from the spirit and scope of the present invention. The scope is subject to the definition of the scope of the patent application attached.

100, 200. . . Optical interferometric display unit

102. . . First electrode

103, 107. . . Selection unit

104. . . Second electrode

105. . . Sensor

106. . . Support

108. . . Chamber

110. . . Substrate

112. . . Observer

120. . . Flat protection structure

122. . . Adhesive material

130. . . Filter substrate

131 and 310. . . Second substrate

132. . . Diffusion film

140 and 340. . . Front light source

140a and 340a. . . light source

140b and 340b. . . Light guide

141. . . Optical interference display element

220. . . Control line

221. . . Conduction line

222. . . Conduction line

223. . . control unit

224. . . control unit

226. . . Control line

2231~223m. . . Toggle switch

2241~224n. . . Toggle switch

240. . . Control line

2411~241k. . . Conduction line

2421~242k. . . Conduction line

243. . . control unit

244. . . control unit

246. . . Control line

2431~243m. . . Toggle switch

2441~244n. . . Toggle switch

150. . . Touch unit

300. . . Micromirror array device

301. . . Micromirror

302. . . Semiconductor substrate

303. . . Mirror

304. . . CMOS memory circuit

305 and 306

307. . . Aluminum plate

308. . . Support platform

309. . . Elastic flexible handle

400. . . Source circuit

401. . . Gate circuit

402. . . Pixel

403. . . Thin film transistor

D, d, d1, d2, d3. . . gap

The above and other objects, features, advantages and embodiments of the present invention will become more apparent and understood.

Figure 1 is a schematic cross-sectional view showing a display unit in an optical interference display system.

Figure 2 is a schematic cross-sectional view showing the light interference display unit after voltage is applied.

Figure 3 is a schematic cross-sectional view showing the addition of a protective cover to the optical interference display unit.

Figure 4 is a schematic cross-sectional view showing the addition of a color interference display system to a color filter substrate.

Fig. 5A is a schematic diagram showing the coupling relationship between an optical interference display unit and its control unit electrodes.

FIG. 5B is an enlarged schematic diagram showing the electrode structure of the touch element of an optical interference display system.

FIG. 5C is a schematic block diagram showing a touch element of an optical interference display system according to an embodiment of the invention.

FIG. 5D is an enlarged view showing an electrode structure of a touch element of an optical interference display system according to an embodiment of the invention.

FIG. 5E is an enlarged view showing an electrode structure of a touch element of an optical interference display system according to another embodiment of the present invention.

Figure 6 is a schematic cross-sectional view of an optical interference display system in which only one optical interference display unit is shown.

Figure 7 is a schematic cross-sectional view of an optical interference color display system in which only one optical interference display unit is shown.

Figure 8 is a schematic cross-sectional view of an optical interference color display system in which only one optical interferometric color display unit is shown.

Figure 9 is a schematic cross-sectional view of a light interference display system with a light source.

Figure 10 is a cross-sectional view showing a micromirror array device.

Figure 11 shows the cross-sectional structure of a micromirror array display system.

Figure 12 is a schematic cross-sectional view of a micromirror array display system with a light source.

100. . . Optical interferometric display unit

102. . . First electrode

104. . . Second electrode

106. . . Support

110. . . Substrate

131. . . Upper cover molding unit

132. . . Diffusion film

150. . . Touch unit

Claims (32)

A MEMS display includes at least: a first substrate, wherein the first substrate has a control array; a touch unit; and a plurality of MEMS display units are disposed on the first substrate, wherein the control array controls the The MEMS device includes: a sensor; a first selection unit coupled to the sensor; a second selection unit coupled to the sensor; a first control unit coupled to the a second control unit coupled to the sensor; the plurality of first wires are arranged in parallel in a first direction, wherein each of the first wires has a first end and a second end, wherein The first end of each of the first wires is coupled to the first control unit, the second end of each of the first wires is coupled to the first selection unit, and the plurality of second wires are parallel arranged in a second In the direction, each of the second wires has a first end and a second end, wherein a first end of each of the second wires is coupled to the second control unit, and each of the second wires The second end is coupled to the second selection unit; The first wire or the second wire is a scan line, a data line, an auxiliary line, a bias line, a power line, a common electrode line, a signal line, a read line, a bias line, a control line, or a compensation of the control array. Circuits, etc. The touch control unit performs a touch position detection period during the first touch field and the second image field, and the touch unit performs touch position detection in the touch position detection period. The touch position detection is stopped during the time period and the second field time period. The MEMS display of claim 1, wherein each of the MEMS display units is an optical interferometric display unit, wherein the optical interferometric display unit has a single chamber or a plurality of chambers. The MEMS display of claim 2, wherein the MEMS display further comprises an upper cover protection unit disposed above the plurality of optical interferometric display units, wherein the touch unit is located inside the upper cover protection unit Or between the outside or inside, or between the upper cover protection unit and the plurality of optical interferometric display units. The MEMS display device of claim 2, wherein the optical interferometric display unit further comprises: a first electrode formed on the first substrate; a second electrode disposed on the first electrode; a support is disposed between the first electrode and the second electrode for supporting the second electrode to form a cavity between the first electrode and the second electrode; and the control array drives the first The two electrodes correspond to the first electrode for relative displacement, action, deformation, and vibration. The MEMS display of claim 2, wherein the plurality of chambers of the optical interferometric display unit may have different specific spacings. The MEMS display of claim 5, wherein the plurality of chambers of the optical interferometric display unit have three specific spacings for reflecting color light of a red, green, and blue light band. The MEMS display of claim 5, wherein the plurality of optical interferometric display units are combined with each other to form an optical interferometric display, and the color light of different wavelengths such as cyan, magenta, and yellow light can be reflected. The MEMS display of claim 1, wherein the first substrate is a semiconductor substrate, and each of the MEMS display units is a micro mirror array device. The MEMS display device of claim 8, wherein the micromirror array device comprises a plurality of micromirrors arranged in a matrix arrangement on a surface of the semiconductor substrate, wherein each of the micromirrors comprises a mirror surface and a corresponding Two control electrodes or multiple sets of control electrodes. The MEMS display of claim 8, wherein the control array controls a mirror tilt angle and an oblique direction of the plurality of micromirrors. The MEMS display of claim 10, wherein the tilt angle angle ranges from -25 degrees to +25 degrees. The MEMS display of claim 8, wherein when the micromirror array device displays an external light source or a light machine, the time period during which the external light source or the light machine is turned off or darkened is used during the time period. Perform touch sensing. The MEMS display of claim 8, wherein the MEMS display further comprises an upper cover protection unit disposed above the micromirror array device, wherein the touch unit can be located inside or outside the cover protection unit or Inside or between the upper cover protection unit and the plurality of micromirror array devices. The MEMS display device of claim 3, wherein the upper cover protection unit further comprises a styling unit, wherein the touch unit can be located inside or outside or inside the styling unit. The MEMS display of claim 1, wherein the MEMS display further comprises a color filter disposed above the plurality of MEMS display units, and an upper cover protection unit disposed in the color On the filter, the touch unit may be located inside or outside the inner cover protection unit or inside thereof, or between the upper cover protection unit and the color filter, or on the color filter and the micro-electromechanical Between the display units. The MEMS display of claim 1, wherein the touch unit is disposed below the first substrate. The MEMS device of claim 1, wherein the touch unit uses an electromagnetic induction method, an optical sensing method, an ultrasonic sensing method, a capacitive sensing method, a resistance sensing method, a pressure sensing method, or The above dual mode, multi mode sensing mode. The MEMS display of claim 1, wherein the MEMS device further comprises a front light source disposed in front of the plurality of MEMS display units, wherein the front light source further comprises: a light source, wherein The light source can be a white light source, or a monochromatic light source, or a plurality of color light sources. The MEMS display of claim 18, wherein the touch sensing is performed during the time period when the front light source is turned off or darkened. The MEMS display of claim 18, wherein the touch unit is disposed above or inside the front light source. The MEMS display of claim 1, wherein the touch unit comprises at least one set of plurality of wires of the control array. The MEMS display of claim 1, wherein when the touch unit performs an electromagnetic touch application, the first control unit electrically connects or connects one of the first wires to one a first conducting unit, the first selecting unit sequentially connecting a portion of the other ends of the plurality of first wires in a sequence according to an order to form a plurality of loops in the first direction, and the second control unit One of the second wires is connected in common or connected to a second conductive line, and the second selecting unit sequentially connects the other ends of the second wires in sequence according to an order. a plurality of loops are formed in the second direction, and a first operation method is used to detect and sense a magnetic flux, an electromagnetic induction, or a touch loop signal of a voltage, a current, or a frequency, and determine a position of the inductive loop change by a numerical operation. Distance, touch height and touch point. The MEMS display of claim 22, further comprising: dividing the plurality of first wires and the second wires into a plurality of groups, wherein each group comprises at least two first wires, or at least two second wires; The first selection unit sequentially or in series connects the plurality of first conductor complex groups according to a sequence according to a sequence to form a plurality of complex group conduction line loops in the first direction; the second selection unit according to an order And according to a certain interval, serially connecting or connecting the plurality of second conductor complex groups to form a plurality of complex group conduction line loops in the second direction; sequentially transmitting a detection signal to the plurality of group conduction line loops, among them The first wire and the second wire in each of the plurality of group conduction line circuits receive or transmit the same detection circuit signal and the induction circuit signal; and the first operation method detects and senses the touch circuit signal, and performs numerical operation Determine the position, distance, touch height, and touch point at which the inductive loop changes. The MEMS display according to claim 23, wherein the first operation method may be: detecting a specific frequency detection signal in the sequentially formed loops in the first and second directions, respectively, to detect a change in magnetic flux, electromagnetic induction or voltage, current, and frequency generated in the first and second directions, wherein the sensor transmits the detection signal to the first and second direction loops to detect the respective The magnetic flux of the loop, electromagnetic induction, or voltage, current, and frequency touch sensing loop signals. The MEMS display of claim 1, wherein the touch unit performs a capacitive, resistive, pressure sensitive, or optical touch application, and is detected by a second operation method. The amount of charge inductive touch, capacitive sensing, or voltage and current signals are used to determine the position, distance, touch height, and touch point of the induced change. The MEMS display of claim 1, wherein the first control unit interrupts the touch control unit when the touch control unit performs a capacitive, resistive, pressure sensitive, or optical touch application. a coupling between a wire and a first conductive line, and the second control unit interrupting the coupling between the second wire and a second conductive line, and detecting by a second operation method Measure, sense the amount of charge of the touch, capacitive sensing, or the signal of the voltage and current signals, and judge the position, distance, touch height and touch point of the induced change by numerical operation. The MEMS display of claim 25 or 26, further comprising: dividing the plurality of first and second wires into a plurality of groups, wherein each group comprises at least two first wires, or at least two second wires And sequentially transmitting a detection signal to the groups, wherein the first wire and the second wire in each group receive or transmit the same detection signal and the sensing signal; and the second operation method detects and senses the touch The signal is judged by numerical operation to determine the position, distance, touch height and touch point of the induced change. The MEMS display of claim 27, wherein the second operation method is that the sensor transmits a detection signal to the first selection unit to the first plurality of groups in the first direction by separately transmitting the detection signal to the first selection unit. And transmitting, by the second selecting unit, a detection signal to the second plurality of wires in the second direction to detect a change in the amount of charge, capacitance sensing, or voltage and current signals generated by each of the plurality of wires. The MEMS display of claim 27, wherein the second operation method is that the sensor sends a stimulation signal to the first plurality of first conductors in the first direction through the first selection unit; And detecting, by the second selecting unit, the second plurality of wires on the plurality of groups, each A signal change is induced by a plurality of groups of wires to detect changes in the amount of charge, capacitance sensing, or voltage and current signals generated by each of the plurality of groups of wires. The MEMS display of claim 1, wherein the first control unit and the second control unit of the touch sensing unit comprise at least one control line and a plurality of switch switches or a plurality of series switch switches A portion of the plurality of first wires and a portion of the second wires are respectively coupled. The MEMS display of claim 30, wherein the sensor can control the control line to turn on the switch switches to turn on some of the first wires, or control the control line to turn off the switch switches, interrupting Turning on the first wires, or/and controlling the control lines to turn on the switch switches to turn on some of the second wires, or controlling the control wires to turn off the switch switches to interrupt the conduction of the second wires. The MEMS display of claim 1, wherein the control array controls each of the MEMS display units to have an action, a relative displacement, a deformation, a vibration, and a rotation.