CN102798973B - Micro-electromechanical display with touch control function - Google Patents
Micro-electromechanical display with touch control function Download PDFInfo
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Abstract
The invention discloses a micro-electromechanical display, at least comprising: a first substrate having a control array; a touch control unit; and a plurality of micro-electromechanical display units are arranged on the first substrate, wherein the control array controls the plurality of micro-electromechanical display units.
Description
Technical field
The invention relates to a kind of micro electronmechanical display, and relate to especially one and there is touch-control meritThe micro electronmechanical display of energy.
Background technology
Flat-panel screens is owing to having little, the lightweight characteristic of volume, at Portable display device, withAnd very advantageous in the monitor market of little space application. The flat display apparatus of existing market main flow isLiquid crystal display (LiquidCrystalDisplay, LCD). But traditional liquid crystal display need makeWith backlight, not only power consumption, and the thickness of overall display module cannot reduce the relation because of backlight,Require, in light, thin, short, little handheld apparatus, will become bottleneck place when being used in. Therefore,A kind of new showing with the manufacture of micro electronmechanical (Micro-Electro-MechanicalSystems, MEMS) systemShow that device is developed. Micro electronmechanical is a kind of work that microelectric technique and mechanical engineering are fused togetherIndustry technology, its opereating specification is in micrometer range. And micro electronmechanical display is in conjunction with MEMS(MEMS) technology, is made into the display of small-medium size, and device volume can be very little, due to canDo not need backlight, thus very power saving, and can there is reflective function, lower use out of doors,Be applicable to being applied in hand-held mobile device, common micro electronmechanical display, for example: head-mounted (HandMountedDisplay, HMD), optical interference display panel is used for handheld apparatus, flat board, mobile phone etc.,Or collocation optical machine engine projection arrangement, with digital micro-mirror array (: Micro-MirrorArray), doBecome digital micro-mirror projection arrangement etc.
Wherein, each pixel of optical interference display panel is MEMS (MEMS) process technique instituteThe assembly of making, above the substrate of each pixel the fixing film of production location with can up-down vibrationReflection, interfere resonance membrane, via controlling the electric field of this film, make it attract each other or repel intoOne specific distance, utilizes the interference covibration between Different lightwave to control the anti-of particular wavelength bandPenetrate bright secretly or penetrate bright secretly, or allow natural daylight through the light of reflection different-waveband, present variousSame color, reaches the object that shows different colours.
And micromirror array device is to be mainly used in optical projection system, micromirror array device be mainly utilize micro-The process technique of Mechatronic Systems, makes up to a million small speculums on silicon surface, each anti-The size of penetrating mirror only has tens of microns or less, the below of digital micro-mirror be can utilize Control of Voltage andThe rotating shaft of left and right or front and back upsets, each digital micro-mirror can be controlled separately and turn left or turn right or frontOr after upset, even rotate different or specific corner angle, therefore can be by the light of optical projection systemReflex to difference or specific position. Each speculum corresponds to a pixel (Pixel) of display,In the time that being integrated, these pixels just form a complete picture, in other words, and displayResolution ratio have how many pixels, just have how many digital micro mirror arrays.
Therefore, how to allow the application of micro electronmechanical display element combination of touch control function, become the target of pursuit.
Summary of the invention
An object of the present invention is to show at micro electronmechanical (MEMS) that a kind of tool touch controllable function is providedDevice.
An aspect of of the present present invention is providing a kind of micro electronmechanical display, at least comprises: a first substrate,Wherein this first substrate has a control array; One touch control unit; And multiple microelectromechanicdisplay display unitsBe disposed on this first substrate, wherein multiple microelectromechanicdisplay display units described in this control antenna array control. ?In one embodiment, microelectromechanicdisplay display unit has action, relative displacement, rotation, deformation or shakes described in eachMoving.
In one embodiment, described in each, microelectromechanicdisplay display unit is a light interference type display unit, itsIn this light interference type display unit there is a single chamber, or there is multi-chamber.
In one embodiment, this light interference type display unit also comprises: one first electrode be formed at thisOn one substrate; One second electrode is disposed on this first electrode; And one supporter be disposed at this firstBetween electrode and this second electrode, in order to support this second electrode with in this first electrode and this second electrodeBetween form a chamber (Cavity).
In one embodiment, wherein this multi-chamber (Cavity) of this light interference type display unit has notSame spacing.
In one embodiment, this multi-chamber of this light interference type display unit has three kinds of different spacing,Can reflect the coloured light of the wave band of ruddiness, green glow and blue light.
In one embodiment, wherein several light interference type display unit to be mutually combined into a light interference type aobviousShow device, can reflect the coloured light of the different-waveband of green light, purplish red light or gold-tinted.
In one embodiment, wherein this multi-chamber of this light interference type display unit has different specificSpacing, several these multi-chambers are combined into a light interference type display mutually, can reflect green light, purpleThe coloured light of the different-waveband of ruddiness or gold-tinted.
In one embodiment, this touch control unit comprises this control array wire more than at least one group or improvementDesign is from the many wires of this group.
In one embodiment, touch control unit comprises: a sensor; One first selected cell couples this senseSurvey device; One second selected cell couples this sensor; Many the first wire is parallel to a first partyUpwards, wherein one end of the first wire couples this first selected cell described in each; And many secondWire is parallel in a second direction, wherein described in each one end of the second wire couple this secondSelected cell.
In one embodiment, when this touch control unit carry out a condenser type, optical induction type, ultrasonic,When the application of resistance-type, pressure inductive touch-control, detect or respond to touch-control with one second method of operatingThe signal of the quantity of electric charge, capacitive sensing or voltage, current signal, responds to numerical operation judgementThe position, distance, touching height and the touch points that change.
In one embodiment, touch control unit comprises: a sensor; One first selected cell couples this senseSurvey device; One second selected cell couples this sensor; One first control module couples this sensor; OneThe second control module couples this sensor; Many the first wire is parallel on a first direction, itsIn described in each one end of the first wire couple this first control module other end couple this first select singleUnit; And many second wires are parallel in a second direction, and with described many first wiresIntersect, wherein described in each one end of the second wire couple this second control module other end couple thisTwo selected cells.
In one embodiment, described many first wires or the second wire at least comprise that a wire improvement establishesMeter or collocation design from the scanning linear of micro electronmechanical display array, data wire, boost line, bias line orIn power line, common-battery polar curve, holding wire, read line, bias line, control line or compensating circuitCircuit.
In one embodiment, described many first wires and described many second wires are by metal, closeGolden circuit, electrically conducting transparent material, ITO, IZO or CNT CNT form.
In one embodiment, in the time that this touch control unit carries out an electromagnetic touch-control application, this first controlOne end of described many first wires is jointly connected to one first conducting line by unit, and this first selection is singleUnit, according to one first order, with one first spacing, is sequentially connected in series the other end of described many first wiresTo form multiple loops on this first direction, and this second control module is led described many secondOne end of line is connected to one second conducting line jointly, and this second selection is single according to one second order, with oneThe second spacing, the other end that is sequentially connected in series described many second wires is many to form in this second directionIndividual loop, and with one first method of operating detect or sense magnetic flux, electromagnetic induction or voltage,The touch-control loop signal of electric current, frequency, the position changing with numerical operation judgement generation loop inductance,Distance, touching height and touch points.
In one embodiment, more comprise: described many first wires are divided into multiple the first wire groups,Wherein described in each, the first wire group comprises at least two the first wires, and described many second wires are dividedBecome multiple the second wire groups, wherein described in each, the second wire group comprises at least two the second wires; ShouldThe first selected cell is according to one the 3rd order, according to one the 3rd spacing, sequentially described in serial connection or conducting theOne wire group, to form multiple the first wire group conducting line loops on this first direction; This second choosingSelect unit according to one the 4th order, according to one the 4th spacing, sequentially the second wire described in serial connection or conductingGroup, to form multiple the second wire group conducting line loops in this second direction; Sequentially transmit a detectionSignal returns to described multiple the first wire group conducting line loops and described multiple the second wire group conducting lineRoad, wherein described in each in the first wire group conducting line loop, described the second wire group conducting line loopThe first wire, the second wire receive or launch identical detection loop signal or loop inductance signal;And detect or respond to the loop signal of touch-control with this first method of operating, and judge with numerical operationThere is position, distance, touching height and touch points that loop inductance changes.
In one embodiment, this first method of operating, is respectively in this first, second direction, instituteThe detection signal that a first frequency is transmitted in the loop sequentially forming, detects in this first, second directionThe variation of magnetic flux, electromagnetic induction or voltage that loop occurs, electric current, frequency is wherein by thisSensor transmits this detection signal to the loop in this first, second direction, to detect the magnetic in each loopThe touch-control sensing loop signal of flux, electromagnetic induction or voltage, electric current, frequency.
In one embodiment, when this touch control unit carry out a way of electromagnetic induction and optical sensor mode,Ultrasonic induction mode, capacitive sensing mode, resistance induction mode, pressure sensitive mode double mode,When the application of multimodal induction touch-control, this first control module interrupts described many bars of first wires and one theCoupling between one conducting line, and this second control module interrupts described many second wires and one secondCoupling between conducting line, and detect or respond to the quantity of electric charge, the electric capacity of touch-control with one second method of operatingThe signal of induction or voltage, current signal, the position changing with numerical operation judgement generation induction,Distance, touching height and touch points.
In one embodiment, also comprise: described many first wires are divided into multiple the first wire groups,Wherein described in each, the first wire group comprises at least two the first wires, and described many second wires are dividedBecome multiple the second wire groups, wherein described in each, the second wire group comprises at least two the second wires; Comply withOrder transmits a detection signal to described multiple the first wire groups and described multiple the second wire group, wherein everyThe first wire described in one in the first wire group, described the second wire group, the second wire receive or transmittingIdentical detection signal or induced signal; And detect or respond to touch-control with this second method of operating, there is with numerical operation judgement position, distance, touching height and the touch points that induction changes in signal.
In one embodiment, this second method of operating, is that sensor sees through respectively to this first selection listUnit sends a detection signal to the first wire on this first direction; Seeing through this second selected cell sendsOne detection signal is to the second wire in this second direction, the electricity being occurred to detect each wireThe variation of lotus amount, capacitive sensing or voltage, current signal.
In one embodiment, this second method of operating, is that this sensor is sent out through this first selected cellSend a stimulus signal to this first wire on this first direction; Sequentially see through again this second selected cellDetect on this second wire, each wire is responded to generation signal intensity, to enter to detect each wireThe quantity of electric charge, capacitive sensing or the voltage occurring, the variation of current signal.
In one embodiment, this first control module comprises at least one control line and multiple change-over switchOr the change-over switch of multiple serial connections couples respectively described many first wires.
In one embodiment, this sensor can be controlled change-over switch described in this control line conducting and make part instituteOne end of stating the first wire is connected to this first conducting line jointly, and controls described in this control line closesChange-over switch, being connected between the first wire and this first conducting line described in interrupt unit.
In one embodiment, this second control module comprises at least one control line and multiple change-over switchOr the change-over switch of multiple serial connections couples respectively described many second wires.
In one embodiment, this sensor can be controlled change-over switch described in this control line turning part and make instituteOne end of stating the second wire is connected to this second conducting line jointly, or controls this control line and cut described in closingChange switch, being connected between the second wire and this second conducting line described in interrupt unit.
In one embodiment, this sensor is carried out a condenser type, resistance-type, pressure-sensitive or optical profile typeTouch-control sensing detect.
In one embodiment, micro electronmechanical display, also comprises that a upper cover protected location is disposed at multiple lightInterfere type display unit top, wherein this touch control unit can be positioned at this upper cover protected location inner side or outsideOr therein or between this upper cover protected location and the plurality of light interference type display unit.
In one embodiment, this upper cover protected location also comprises a molding unit, wherein this touch control unitCan be positioned at this molding unit inner side or outside or therein.
In one embodiment, this micro electronmechanical display also comprises that a colored filter is disposed at multiple light and doesRelate to formula display unit top, and a upper cover protected location is disposed on this colored filter, wherein shouldTouch control unit can be positioned at this upper cover protected location inner side or outside or or be positioned at this upper cover and protect thereinProtect between unit and this colored filter or be positioned at this colored filter and this light interference type display unitBetween.
In one embodiment, this micro electronmechanical display also comprises that an optical diffusion is disposed at multiple light and doesRelate to formula display unit top.
In one embodiment, this micro electronmechanical display also comprises that a front light-source is disposed at the plurality of demonstration listThe front of unit.
In one embodiment, front light-source also comprises: a light source, wherein this light source be white light source orMonochromatic light light source or several coloured light light sources.
In one embodiment, front light-source also comprises: a light source; And LGP, wherein this light sourceBe arranged on the side of this LGP, this light source is injected light from LGP side, from this LGP towardsThe one side of the plurality of display unit penetrates, and after display unit reflection, penetrates this leaded light of front light-sourcePlate.
In one embodiment, utilizing this front light-source to close or put the dark time, carry out in this periodTouch-control sensing.
In one embodiment, this touch control unit is disposed at this front light-source top or inner side.
In one embodiment, touch control unit is to use way of electromagnetic induction, optical sensor mode, SupersonicRipple induction mode, capacitive sensing mode, resistance induction mode or above double mode, multimodal senseAnswer mode.
In one embodiment, first substrate is semiconductor substrate, each those microelectromechanicdisplay display unitFor micromirror array device.
In one embodiment, this micromirror array device comprises that the mode that multiple micro mirrors are arranged with matrix configuresOn the surface of this semiconductor substrate, wherein described in each, micro mirror comprises a minute surface and two corresponding controlsElectrode processed or organize control electrode more.
In one embodiment, control minute surface inclination corner angle or the inclination of the plurality of micro mirror of antenna array controlDirection.
In one embodiment, this inclination corner angular range is that-25 degree are to+25 degree.
In one embodiment, in the time of micromirror array device displaying appliance one external light source or ray machine, in profitWith this external light source or ray machine is closed or put the dark time, carry out touch-control sensing in this period.
In one embodiment, touch control unit is configured in below first substrate.
In one embodiment, micro electronmechanical display, also comprises that a upper cover protected location is disposed at the plurality ofMicro mirror array unit top, wherein this touch control unit can be positioned at this upper cover protected location inner side or outside orTherein or between this upper cover protected location and the plurality of micro mirror array unit.
In one embodiment, touch control unit is to use way of electromagnetic induction, optical sensor mode, SupersonicRipple induction mode, capacitive sensing mode, resistance induction mode or above double mode, multimodal senseAnswer mode.
In sum, the present invention adds touch control component in micro electronmechanical display, makes micro electronmechanical demonstrationUtensil touch controllable function, in the use will be more direct and convenient. And the touch-control sensing wire of contact panelMore can be total to structure or improve the conductor structure from this control module with the control module of micro electronmechanical display, andReduce processing procedure program.
Brief description of the drawings
For above and other object of the present invention, feature, advantage and embodiment can be become apparent,Appended the description of the drawings is as follows:
Fig. 1 is the generalized section that illustrates a display unit in interference of light display system;
Fig. 2 illustrates interference of light display unit to add the generalized section after voltage;
Fig. 3 illustrates the generalized section that interference of light display unit adds an over cap;
Fig. 4 illustrates the generalized section that interference of light display system adds a colored optical filtering substrates;
Fig. 5 A is depicted as an interference of light display unit and interelectrode the coupling of its control module is related to summaryDiagram;
The electrode structure enlarged outline map that Fig. 5 B is depicted as an interference of light display system touch control component shows;
Fig. 5 C is depicted as according to the summary of one embodiment of the invention one interference of light display system touch control componentStructure chart;
Fig. 5 D is depicted as according to the electrode of one embodiment of the invention one interference of light display system touch control componentStructure is amplified diagram;
Fig. 5 E is depicted as according to the electrode of another embodiment of the present invention one interference of light display system touch control componentStructure is amplified diagram;
Figure 6 shows that the schematic diagram of analysing and observe of interference of light display system, wherein only draw an interference of light aobviousShow unit;
The schematic diagram of analysing and observe that Figure 7 shows that an interference of light color display system, wherein only draws a lightInterfere display unit;
Figure 8 shows that the schematic diagram of analysing and observe of interference of light color display system, wherein only draw a light dryRelate to formula color display unit;
Figure 9 shows that a tool light source interference of light display system analyse and observe schematic diagram;
Figure 10 is the generalized section that illustrates a micromirror array device;
Figure 11 shows that the cross-section structure of a micro mirror array display system;
Figure 12 shows that a tool light source micro mirror array display system analyse and observe schematic diagram.
[primary clustering symbol description]
100,200: light interference type display unit
102 first electrodes
103,107 selected cells
104 second electrodes
105 sensors
106 supporters
108 chambers
110 base materials
112 observers
120 dull and stereotyped protection structures
122 sticky materials
130 filter sheet base plates
131 and 310 second substrates
132 diffusion barriers
140 and 340 front light-sources
140a and 340a light source
140b and 340b LGP
141 interference of light display modules
220 control lines
221 conducting lines
222 conducting lines
223 control modules
224 control modules
226 control lines
2231～223m change-over switch
2241～224n change-over switch
240 control lines
2411～241k conducting line
2421～242k conducting line
243 control modules
244 control modules
246 control lines
2431～243m change-over switch
2441～244n change-over switch
150 touch control units
300 micromirror array devices
301 micro mirrors
302 semiconductor substrates
303 minute surfaces
304CMOS memory circuit
305 and 306
307 aluminium sheets
308 support platforms
The flexible handle of 309 elasticity
400 source circuit
401 grid circuits
402 pixels
403 thin film transistor (TFT)s
D, d, d1, d2, d3: gap
Detailed description of the invention
In order to reach the more humane object of operation, many electronic products are by traditional keyboard or mouseDeng input unit, change into and use contact panel as input unit. And technical characteristics of the present inventionOne of be touch controllable function is integrated in interference of light display system or be integrated into micro mirror array show systemIn system, become in the device of the micro electronmechanical demonstration with touch controllable function.
According to the method detecting, contact panel has way of electromagnetic induction, optical sensor mode, ultrasonic senseAnswer mode, capacitive sensing mode, resistance induction mode, pressure sensitive mode or the induction of above multi-modeCombination etc. Wherein resistance induction type, with finger or other contact flickings will produce voltage change,Differentiate its touch position by the change that detects voltage. Ultrasonic induction mode, be with sound wave orInfrared ray covers whole surface, and finger or contact can be blocked these standing wave patterns, by detecting standing waveIts touch position is differentiated in the change of pattern. Surface-capacitive touch panel be utilize electrode and human body itBetween the capacitance variations that produces of electrostatical binding, the induced current producing from position of touch or voltage becomeChange and detect its coordinate. Its principle of induction is four corners the shape that acts on screen induction zone with voltageBecome a stationary electric field, in the time that finger touches screen, can make electric field cause electric current, measure by controller,According to the difference of four corner ratios of current distance, can calculate contact position. Projecting type capacitor technology itsPanel construction is similar to electric resistance touch-control panel, has the two-layer conductive plate of X-axis and Y direction, butIt uses principle the same as surface capacitance type touch technology, via measurement flow through electrode curent change comeCalculate touch point position, because there being double-layer structure, can be respectively to the touch-control of X-axis and Y-axis for putting detecting,Therefore can reach the function of multi-point touch, in the time that finger approaches screen, because human finger is good conductor,The electric field of meeting and panel forms capacitive sensing, and the static on finger can flow in screen panel, through X-axisReach sensor with the electrode of Y-axis panel, sensor is measured capacitance change, and controller is according to electric capacityVariable quantity calculates touch point coordinate. And electromagnetic touch-control panel its mainly comprise three sport assemblies, (1) numberWord antenna plate (sensorboard) (2) is containing circuit control panel (controllerboard) (3) pressure sensitivity of ASICTime writer, technical is the coil utilizing on certain electric magnetic pen, to the antenna in induction digital antenna versionInduction produces the variation of magnetic field, magnetic flux, utilizes its weak current producing to calculate contact baseMark.
Interference of light display system of the present invention or micro electronmechanical display system, above-mentioned any induction of can arranging in pairs or groupsMode and there is touch controllable function.
Micro electronmechanical (Micro-Electro-MechanicalSystems, MEMS) display system, refers to micro-The flat-panel screens that electromechanical means forms, comprises plane display mode and the micro mirror array of light interference type(Micro-MirrorArray) system and device etc. Though be wherein with the display mode of light interference type or withMicromirror array device all can be used in the present invention, and adds touch controllable function in mode of the present invention.
Fig. 1 illustrates the generalized section that a monochromatic light is interfered a display unit in display system. EachIndividual monochromatic light interference type display unit 100 comprises a base material 110, on it, be formed with the first electrode 102 andBetween the second electrode 104, the first electrodes 102 and the second electrode 104, supported and shape by supporter 106Become a chamber (Cavity) 108. Distance between the first electrode 102 and the second electrode 104, namely chamber108 gap is D. The second electrode 104 is the electrode of a smooth incident direction, utilizes electric field driven passableMake it produce deformation. The first 102, electrode is the electrode of an interference of light resonance. Conventionally utilize ambient lightOr sunshine, white light be as the incident light source of light interference type display unit 100, white light be comprise visibleThe light of various different wave lengths in spectral range (WaveLength represents with λ) is blended together. When enteringPenetrate light and while entering in chamber 108, only have the wavelength (λ) of coincidence formula 1.1 through the second electrode 104Can in chamber 108, produce constructive interference and be reflected output. Wherein N is natural number. Change sentenceTalk about,
2D＝Nλ(1.1)
Can make this lambda1-wavelength λ produce constructive interference in this chamber 108, and export this rippleThe reverberation of long λ. Now, observer 112 eyes are observed along incident direction of light, can seeThe reverberation that is λ to wavelength, therefore, for color-variable pixel unit 100 in " opening "State, is a bright state state.
Fig. 2 illustrates known display unit to add the generalized section after voltage. Please refer to Fig. 2, at electricityUnder the driving of pressing, second electrode 104 generation type change because of electrostatic attraction, to the first electrode 102Direction sink. Now, the distance between the first electrode 102 and the second electrode 104, namely chamber108 gap is also non-vanishing, but is d, and d can equal zero. Now, the D in formula 1.1 willWith d displacement, in the wavelength X of all visible light spectrum of incident light, only there is the visible of coincidence formula 1.1Optical wavelength can produce constructive interference, and design d makes in visible wavelength range, incident light instituteSome visible light spectrum are all by destructive interference, to the observer 112 who observes along incident direction of light, it will be appreciated that the reverberation in visible light spectrum is very faint, be to be dark state or off status,Therefore be, in "off" state for interference of light display unit 100. Observer 112 seesThe display unit of a black. To be switched to by "off" state and work as interference of light display unit 100When "open" state, must first remove to drive the voltage of the second electrode 104 deformation, then,Impose another opposite voltage, or the own deformation restoring force that paddles one's own canoe, electrostatic attraction effect lostThe second electrode 104 can revert to the original state as Fig. 1, make this interference of light display unit 100Present a "open" state. Wherein, the material of formation base material 110 can be glass material. FormThe material of electrode 102,104 can be indium oxide tin glass (ITO) or indium zinc oxide glass (IZO). LightInterfering electrode (the first electrode 102) is a thin layer (Membrane). Because light is in different gapsCan be subject to interference (interference) in various degree, and then present different color light, therefore can be by establishingThe spacing size of meter chamber 108 reaches coloured light and its bright dark control of reflection. Via control " opening "," pass " time scale, presents GTG, bright dark degree.
In one embodiment, in order to protect display unit 100 as shown in Figure 3, a dull and stereotyped protection structure120 utilize sticky material 122 and substrate 110 bonding, and form one " ㄇ " font protection structure. ThisOutward, also can form a second substrate 124 and come and first substrate 110 sealing as upper cover protected location,And to vacuumize or to fill with the inert gases such as nitrogen, make interference of light display unit 100 and external environment everyDamage absolutely interference of light display unit 100 to avoid airborne hydrone, dust or oxygen to invade. AndUpper cover protected location (second substrate 124) more can comprise a molding unit (not drawing in figure), comesThe outward appearance of variation display system. In another embodiment, show in order to realize full color, can formDifferent chamber spacing sizes, can be subject in various degree in the different gap of parallel-plate by lightInterference (interference), present different color light to realize full-color demonstration. Fig. 4 illustrate into according to thisInvent an embodiment, colourama is interfered the generalized section of a display unit in display system. One light is dryRelate to formula color display unit 200 and formed by three monochromatic interference of light display units 100, eachIndividual monochromatic light interferes display unit 100 to comprise a substrate 110, a supporting layer 106, multiple the first electrode102 and multiple the second electrode 104 form. Wherein, normally glass substrate or other of substrate 110The substrate of material; Supporting layer 106 is disposed on substrate 110 in order to support the second electrode 104Edge; The first electrode 102 is disposed on substrate 110, and this first electrode 102 can be transparency electrode;Conventionally can be below the first electrode, or first substrate outside (below), place an absorbed layer or absorb material.
The second electrode 104 is disposed at the top of the first electrode 102, and by 106 of supporting layersProp up, this second electrode 104 can be transparency electrode, and its material is for example indium tin oxide matter (IndiumTinOxide, ITO) or IZO or CNT material, in an enforcement, the second electrode 104 canTo be arranged on a transparent base material. In Fig. 4, in order to reach the colored object showing, everyIn one light interference type color display unit 200, the chamber of its three monochromatic interference of light display units 100The gap of the equal tool different length in chamber, its gap is respectively d1, d2, d3, so as to the light to different wave lengthProduce constructive interference and show different colors. Wherein, the chamber that gap is d1 for example can showBlue light; Gap is that the chamber of d2 for example can show green glow; And the chamber that gap is d3 for example canShow ruddiness. In other words, when light penetrated by the external world the second electrode 104 after, can be through differentGap d 1, d2, d3 are incident on the first electrode 102, then go out by the resonant cavity back reflection that resonates againThe coloured light of subband, in this process, light can be subject to resonance interference method in various degree and allow observer 112See ruddiness, green glow and blue light. And also can drive and allow the second electrode 104 by voltage on the other handProduce deformation because of electrical field attraction, close to the direction displacement of the first electrode 102, allow the second electricityGap d 1, d2, d3 between the utmost point 104 and the first electrode 102 change, and incident light are formed to destructivenessInterfere visible light spectrum destructive interference, and allow observer 112 can't see any visible ray. In addition,Enter for fear of airborne hydrone in the chamber of interference of light display unit 200 and affect gap,Also can form as shown in Figure 3 a upper cover protected location 124, and the conductor structure of contact panel can be formed atIn this upper cover protected location structure 124.
In order to control " opening " and the "Off" state of each interference of light display unit 100 chamber, at basePlate 110 and above can form an active array being formed by multiple control modules, each interference of light shows singleUnit 100 forms a pixel by corresponding control of at least one control module. Each control module for example comprisesOne thin film transistor (TFT), CMOS, switch module, couple interference of light display unit 100 to control the interference of light" opening " and the "Off" state of display unit 100. The interference of light corresponding when a control module control showsShow when unit 100 forms "Off" state, control module applies voltage and shows single to the corresponding interference of lightUnit 100, while making the second electrode 104 level off to the first electrode 102, now, what incident light was all canSee that optical spectrum is destructive interference, the direction along incident light incident the first electrode 102 is observedObserver 112, by not seeing the reverberation in any visible light spectrum, therefore, see oneThe display unit of individual black. Otherwise, when interference of light display unit 100 corresponding to a control module controlWhile forming "On" state, control module does not apply voltage to corresponding interference of light display unit 100, entersPenetrating light reflects through the first electrode 102. For the observer 112 who observes along incident light direction,Can see a bright display unit. According to this, when a colourama is interfered display unit 200 3 chambers,During respectively by different control module control, by changing respectively gap d 1, d2, the d3 of three chambers,Can blend different light colors and reach full-color object. In other words, to along incident light incidentThe observer 112 that the direction of one electrode 110 is observed, can see that this three chamber reflects jointlyMixed color. Wherein this light interference type display can be by several light interference type display unit group mutuallyClose, can reflect the coloured light of the different-waveband of green light, purplish red light, gold-tinted etc.
In one embodiment, a touch-control conductor structure can be total to structure with the transmission line of micro electronmechanical display,Wherein this touch-control conductor structure can use scanning linear, data wire, the boost line, inclined to one side of a display arrayLine ball or power line, common-battery polar curve or holding wire or read line or bias line or control line, or mendRepay the circuits such as circuit. Following is that the scanning linear that uses an interference of light display system, data wire are as touchingThe lead electrode structure of control assembly is that example describes. So it should be noted that the present invention does not limitOnly can be used in interference of light display system, also can be applicable to other micro electronmechanical display system, for example oneIn micro mirror array (Micro-MirrorArray) device, in the time being applied on micromirror array device, be to utilizeThe active array electrode structure of micromirror array device forms the lead electrode structure of a touch control component.
Consult Fig. 5 A and be depicted as an interference of light display unit and the interelectrode relation that couples of its control moduleSchematic diagram. In the present embodiment, control module electrode is use active array and be arranged at the first baseOn plate 110, be made up of the data wire D1～Dm intersecting and scanning linear G1～Gn, each is to dataLine and scanning linear can be controlled a pixel region, and for example, data wire D1 and scanning linear G1 can be in order to controlOne pixel. Each pixel, for example pixel 402, has identical structure, comprises the film of a control useTransistor 403 couples corresponding interference of light display unit 100, in order to control each interference of light display unit" opening " and the "Off" state of 100 chambers. In one embodiment, the first electrode 102 is coupled to altogetherSame electrode, the second electrode 104 is coupled to thin film transistor (TFT) 403, and when scan line, G1 is scanned letterAfter number scanning, thin film transistor (TFT) 403 can be switched on, and data wire D1 sees through thin film transistor (TFT) 403 and controlsMake the displacement situation of the second electrode 104 between gap d, control each interference of light display unit 100 chamber" opening " and the "Off" state of chamber. Wherein, corresponding sensor is also arranged on first substrate 110.In the above-described embodiments, be also that this first electrode 102 is coupled to a thin film transistor (TFT) 403, and the second electricity104 of the utmost points are coupled to common electrode. For micro mirror array display unit also framework so.
Fig. 5 B is depicted as the electrode knot according to one embodiment of the invention interference of light display system touch control componentThe schematic diagram of structure. The electrode structure of touch control component is to utilize data wire D1～Dm and scanning linear originallyG1～Gn is standard processing procedure on script array base palte, therefore can not change the active battle array on substrate 110Fabrication steps or the qualification rate of row. According to this, one group of data wire, for example data wire D1 and D2, andOne group of scanning linear, for example scanning linear G1 and G2, surrender an induction zone mutually. For avoiding the interference of light to showSweep signal and the data-signal of system in the time showing figure, and detection signal while carrying out touch control detectionClash, in one embodiment, can use selected cell 103 and 107 to control data wire D1～DmBetween and coupling between scanning linear G1～Gn, and also utilize the method for timesharing, show in two sequential chart fieldsIn time, insert position of touch and detect the period, avoid the demonstration of the single figure of image field. According to this, work as dataLine D1～Dm and scanning linear G1～Gn in the time transmitting data or sweep signal, selected cell 103 and 107Interrupt data wire D1～Dm to each other and scanning linear G1～Gn coupling to each other. The anti-sensing of working asWhen device 105 carries out sensing in the touch control detection period, selected cell 103 and 107 couples selectedData wire D1～Dm and scanning linear G1～Gn, so as to forming induction line, sensor 105 can be passedSend the touch-control sensing detection signal of a condenser type, resistance-type, pressure-sensitive or optical profile type to couple to theseData wire D1～Dm and scanning linear G1～Gn. Wherein, sensor 105 can carry out condenser type,The meter of the touch-control numerical value of the touch-control sensing of resistance-type, pressure-sensitive or optical profile type, position, height distanceCalculate. Wherein sensor 105 is in order to the partial data that stimulates, detects or induction selected cell 103 is selectedLine D1～Dm, and stimulate, detect or induction, part scanning linear G1～Gn that selected cell 107 is selectedIn signal.
For example, be sensed as example with capacitance touching control, in the time carrying out the detection of self-tolerant sensing, sensor 105Can control selected cell 103 and 107, to carry out data wire D1～Dm and scanning linear G1～GnSelect. Then the detection signal that sensor 105 sends is sent to the data wire D1～Dm of selection and sweepsTake aim at line G1～Gn upper, and according to the variation of electric capacity before and after touching, determine respectively horizontal coordinate and longitudinal seatMark, be then combined into the touch coordinate of plane. On the other hand, in the time holding mutually the detection of formula sensing,Can send successively stimulus signal from data wire D1～Dm, and sequentially be received by scanning linear G1～Gn simultaneouslySignal, that is the detection signal that sensor 105 sends is sequentially transferred to data via selected cell 103Line D1～Dm, and the detection signal on scanning linear G1～Gn is transmitted back to sensing by selected cell 107Device 105. Or send successively stimulus signal by scanning linear G1～Gn, and by data wire D1～Dm simultaneouslyReceive signal, that is the detection signal that sensor 105 sends is sequentially transferred to via selected cell 107Scanning linear G1～Gn, and the detection signal on data wire D1～Dm is passed back via selected cell 103To sensor 105. Can obtain like this capacitance size of all horizontal and vertical electrode crossings,The capacitance size of the two dimensional surface of whole Touch Screen. According to Touch Screen two dimension capacitance change data,Calculate the coordinate of thoughts and feelings, touch point. Merit attention to such an extent that be, above-mentioned selection data wire D1～Dm,Also can be applicable to resistance-type, pressure-sensitive, pressure sensing type or optical profile type with scanning linear G1～Gn mode.
In the time carrying out electromagnetic induction touch-control sensing, sensor 105 can be controlled selected cell 103 in numberAccording to forming loop between line D1～Dm, and transmit signals in loop through selected cell 103, for example, send outPenetrate the detection signal of a first frequency, judge whether loop is position of touch. Similar, sensor105 also can control selected cell 107 forms loop between scanning linear G1～Gn, and sees through selected cell107 transmit signals in loop, judge whether loop is position of touch. To examine in one embodimentSurvey this sensing signal whether change to confirm magnetic flux, electromagnetic induction or voltage in loop,Whether the touch-control sensing loop signal of electric current, frequency etc. changes. Wherein, the sensing signal sendingThe linear superposition combination of square wave, triangular wave, class triangular wave or multiple square waves, and the changing of sensing signalVariable can be wave distortion degree, signal average or peak value change, voltage or electric current change amount orThe relative value of above-mentioned physical parameter, integrated value, cumulative or accumulative total numerical value etc.
Fig. 5 C is depicted as according to the electrode of another embodiment of the present invention interference of light display system touch control componentThe schematic diagram of structure. Wherein this touch control component can carry out double mode touch-control. Interference of light display systemActive array is made up of the data wire D1～Dm intersecting and scanning linear G1～Gn, and each is relativeData wire and scanning linear can be controlled a pixel region, and for example, data wire D1 and scanning linear G1 can be in order toControl a pixel 402. Each pixel, for example pixel 402, has identical structure, comprises a controlWith thin film transistor (TFT) 403 couple corresponding interference of light display unit 100, in order to control each interference of light" opening " and the "Off" state of display unit 100 chambers. Wherein gate driver circuit 401 can be sequentiallySend sweep signal upper to scan line G1～Gn, after one scan line is wherein scanned signal scanning and arrives,The thin film transistor (TFT) that is connected in this scan line can be switched on, and the thin film transistor (TFT) not being scanned can quiltClose, after the thin film transistor (TFT) of this journey is switched on, source electrode drive circuit 400 can be sent signal of video signalTo data wire, D1～Dn is upper, and thin film transistor (TFT) 403 can be controlled corresponding interference of light display unit 100 chambeies" opening " and the "Off" state of chamber are carried out show image. When gate driver circuit 401 completes all scanningAfter the scanning of line, the demonstration of the figure field (frame) of a single image has accused, wherein scan lineScanning can repeat, and therefore follow-up image field can show continuously. And the data wire D1～Dm intersectingWith scanning linear G1～Gn, in the present embodiment, be into 90 degree angles, but this angle angle is not limitSystem must be 90 degree, for example, in other embodiments, this angle angle also can be 60 degree, 45 degree,36 degree or 30 degree etc. Wherein data wire D1～Dm and scanning linear G1～Gn refer to the line that electrically conducts,That metal, alloy circuit, conduction material are as ITO, IZO CNT etc.
Because the conductor structure of touch control component is to utilize data wire D1～Dm and scanning linear originallyG1～Gn is standard processing procedure on script array base palte, therefore can not change the active battle array on substrate 110Fabrication steps or the qualification rate of row. According to this, taking electromagnetic induction touch-control as example, can be by two groups of relative numbersAccording to line, for example data wire D1 and D20, cross an induction zone. For example scanning linear G1 and G20, encloseGo out an induction zone.
In addition taking capacitive sensing touch-control as example, can for example, by one group of data wire, data wire D1 ... D10,And one group of scanning linear G1 ... G10, correspondence goes out an overlapping induction zone. For avoiding the interference of light to show systemSweep signal and the data-signal of system in the time showing figure, and detection signal while carrying out touch control detection is sent outRaw conflict, in one embodiment, can be used selected cell 103 and 107 and control module 123 Hes124 control between data wire D1～Dm and coupling between scanning linear G1～Gn, and also utilize timesharingMethod is inserted position of touch and is detected the period in two sequential chart field displaying times, avoids affecting single figureThe demonstration of field. According to this, when data wire D1～Dm and scanning linear G1～Gn are transmitting data or scanning letterNumber time, selected cell 103 and 107 interrupts data wire D1～Dm to each other and scanning linear G1～GnCoupling to each other. Otherwise in the time that sensor 105 carries out sensing in the touch control detection period, select singleUnit 103 and 107 couples selected data wire D1～Dm and scanning linear G1～Gn so as to forming backRoad, allows sensor 105 can transmit the touch-control sense of a condenser type, resistance-type, pressure-sensitive or optical profile typeAnswer detection signal to these data wire D1～Dm coupling and scanning linear G1～Gn.
In other words, the flow process of its video picture and detection can be divided into three periods, in the first period, showsDevice reading scan picture area, and selected cell 103 and 107, sensor 105 all do not act on. ?In two periods, carry out electromagnetic touch-control detection, now selected cell 103, for example, at data wire D1～DmBetween form loop, and carry out the detection of magnetic flux change by sensor 105. Then selected cell 107,For example, can between scanning linear G1～Gn, form loop, and carry out magnetic flux change by sensor 105Detect. Finally after the 3rd period, carry out again capacitance touching control detection, now, sensor 105, for exampleSequentially scan-data line D1～Dm and scanning linear G1～Gn, detects data wire D1～Dm and scansBetween line G1～Gn, the capacitance of which cross-over connection place changes and judges according to this touch-control place. Wherein, sensingDevice 105 can carry out the touch-control sensing of condenser type, resistance-type, pressure-sensitive or optical profile type touch-control numerical value,The calculating of position, height distance. Wherein sensor 105 is in order to stimulate, to detect or induction selected cellThe 103 segment data line D1～Dm that select, and stimulate, detect or induction, selected cell 107 selectsSignal in the part scanning linear G1～Gn selecting.
In one embodiment, as shown in Figure 5 D, selected cell 103 and 107, for example, comprise at least oneSelect line and at least one transmission line, wherein corresponding thin film transistor (TFT) (change-over switch) be formed at select line andCross-over connection place of transmission line, sees through these thin film transistor (TFT)s, data wire D1～Dm and scanning linear G1～GnCan be coupled to transmission line. For example, and in another embodiment, selected cell 103 and 107, comprises multipleChange-over switch, carrys out coupling part data wire D1～Dm by these change-over switches of direct switching, and portionDivide scanning linear G1～Gn to carry out the touch-control sensing of a condenser type, resistance-type, pressure-sensitive or optical profile typeDetect. In addition, for avoiding sweep signal and the data-signal of liquid crystal display when the demonstration figure field, andDetection signal while carrying out touch control detection clashes, and therefore a control module 223 is formed on data wireBetween D1～Dm and conducting line 221, in order to control coupling of data wire D1～Dm and conducting line 221,And also utilize the method for timesharing, in two sequential chart field displaying times, insert position of touch and detect the period,Avoid the demonstration of the single figure of image field. Wherein control module 223 has a control line 220, multiple switchingSwitch 2231～223m and conducting line 221, control line 220 can be controlled change-over switch 2231～223mOpen and close, and data wire D1～Dm see through these change-over switches 2231～223m and conducting line221 couple. Wherein change-over switch 2231～223m is for example thin film transistor (TFT). According to this, work as data wireD1～Dm is in the time of data signal, that is while showing, control line 220 is controlled these switchings and openedWhen pass 2231～223m closes, interrupt coupling of data wire D1～Dm and conducting line 221. Anti-works asWhen sensor 105 carries out sensing in the electromagnetic detection period, control line 220 is controlled these change-over switches2231～223m opens, and allows data wire D1～Dm be coupled to conducting line 221 so as to forming loop to carry outThe sensing of position.
On the other hand, a control module 224 is formed between scanning linear G1～Gn and conducting line 222, usesTo control coupling of scanning linear G1～Gn and conducting line 222. Wherein control module 224 has a controlLine 226, multiple change-over switch 2241～224n and conducting line 222, control line 226 can be controlled switchingThe open and close of switch 2241～224n, and scanning linear G1～Gn sees through these change-over switches2241～224n and conducting line 222 couple. Wherein change-over switch 2241～224n is for example film crystalPipe. According to this, when scanning linear G1～Gn during in data signal when showing, control line 226When controlling these change-over switches 2241～224n and closing, interrupt scanning linear G1～Gn and conducting line 222Couple. Anti-in the time that sensor carries out electromagnetic induction sensing in the detection period, control line 226 is controlledThese change-over switches 2241～224n opens, and allows scanning linear G1～Gn be coupled to conducting line 222 so as to shapeBecome loop to carry out the sensing of position.
In the time that sensor carries out capacitance touching control sensing in the detection period, sensor 105 can be controlledThe connection that unit 223 interrupts between these data wires D1～Dm, and control control module 224 interrupts thisBetween a little scanning linear G1～Gn, connect. Then, according to the capacitance type sensing mode adopting, self-tolerant sensingMode or hold mutually formula sensing mode, scans. For example,, in the time adopting self-tolerant sensing mode,Between data wire D1～Dm and scanning linear G1～Gn, form electric capacity with ground respectively, that is self-capacitance, alsoBe exactly electrode electric capacity over the ground. In the time that finger approaches or touches Touch Screen, the electric capacity of finger willInduction is superimposed on the electric capacity that data wire D1～Dm or scanning linear G1～Gn form with ground respectively, causesElectric charge, capacitance change, and so as to detecting position of touch. According to this, carrying out the detection of self-tolerant sensingTime, sensor 105 can be controlled selected cell 103 and 107, to carry out data wire D1～Dm and to sweepTake aim at the selection of line G1～Gn. Then the detection signal that sensor 105 sends is sent to the data wire of selectionD1～Dm and scanning linear G1～Gn are upper, and according to the variation of electric capacity before and after touching, determine respectively horizontalTo coordinate and longitudinal coordinate, be then combined into the touch coordinate of plane.
On the other hand, if adopt mutual appearance formula sensing mode, the difference that it and self-tolerant sensing detect is,The place of data wire D1～Dm and the upper intersection of scanning linear G1～Gn will form inductance capacitance, that isThe two poles of the earth of inductance capacitance on data wire D1～Dm and scanning linear G1～Gn, are formed respectively. Work as fingerWhile touching Touch Screen, affect the coupling between near two electrodes of touch point, thereby changedElectric charge, capacitance between these two electrodes distribute, and detect position of touch. Therefore, carrying outWhen appearance formula sensing detects mutually, can send successively stimulus signal from data wire D1～Dm, and by scanning linearG1～Gn sequentially receives signal simultaneously, that is the detection signal that sensor 105 sends is via selected cell103 are sequentially transferred to data wire D1～Dm, and by the detection signal on scanning linear G1～Gn by selecting listUnit 107 is transmitted back to sensor 105. Or send successively stimulus signal by scanning linear G1～Gn, and by countingReceive signal according to line D1～Dm, that is the detection signal that sensor 105 sends is via selected cell simultaneously107 are sequentially transferred to scanning linear G1～Gn, and by the detection signal on data wire D1～Dm via selectionUnit 103 is transmitted back to sensor 105. Can obtain like this electricity of all horizontal and vertical electrode crossingsCapacitance size, the i.e. capacitance size of the two dimensional surface of whole Touch Screen. According to Touch Screen two dimension electricityHold variable quantity data, calculate the coordinate of thoughts and feelings, touch point. Merit attention to such an extent that be, above-mentioned selectionData wire D1～Dm, and scanning linear G1～Gn mode also can be applicable to resistance-type, pressure-sensitive, pressure-sensitiveFormula or optical profile type.
In the time carrying out electromagnetic induction touch-control sensing, sensor 105 can be controlled control module 223 and 224,Connect respectively those data wires D1～Dm, and scanning linear G1～Gn, sensor 105 is also controlled choosing simultaneouslySelect unit 103 and form loop between the data wire D1～Dm of two groups, and see through 103 of selected cellsPenetrate signal in loop, judge whether loop is position of touch.
Similar, sensor 105 also can be controlled selected cell 107 between the scanning linear G1～Gn of two groupsForm loop, and transmit signals in loop through selected cell 107, judge whether loop is tactileControlled position. Whether change to confirm in loop to detect this sensing signal in one embodimentWhether the touch-control sensing loop signal of magnetic flux, electromagnetic induction or voltage, electric current, frequency etc. occursChange. Wherein, the sensing signal sending is the line of square wave, triangular wave, class triangular wave or multiple square wavesProperty superposition combination, and the change amount of sensing signal can be wave distortion degree, signal average or peak valueThe change amount of change, voltage or electric current or the relative value of above-mentioned physical parameter, integrated value, cumulative or tiredCount value etc.
In addition, because data wire D1～Dm and scanning linear G1～Gn wiring is quite intensive, as in order to work asMake contact panel electrode, in the time of user's contact surface plate, can cause simultaneously many data wires D1～Dm andCross-over connection electric shock capacitance between scanning linear G1～Gn changes, and signal change numerical value is too low, is difficult for detecting.Therefore for solving the above problems, several data wires that can be adjacent are several of one group and a determining deviationData wire is another group, sees through change-over switch and carrys out two groups of sensor wires of conducting to form loop inductance. WithSeveral adjacent scanning linears are that several scan lines of a group and a determining deviation are another group, see through to switch to openClose two groups of sensor wires of conducting to form loop inductance.
As shown in Figure 5A, taking capacitive induction as example, using 90 adjacent data wires as sameGroup, for example: D1～D90 is that one group, D91～D180 are one group, and the rest may be inferred, simultaneously with adjacentArticle 30, scanning linear for example, as same group: G1～G30 is that one group, G31～G60 are one group, complies withThis analogizes. The data wire of identical group and scanning linear are considered as to same, and input identical sensing signalTo detect. In one embodiment, the mode of above-mentioned grouping, can also corresponding general finger width1/2～1/3, approximately 2～5mm size is for dividing into groups on basis.
Moreover, in the time carrying out induction touch control detection respectively between data wire D1～Dm and sweepTake aim between line G1～Gn and form loop, selected cell 103 and 107 also can be formed on liquid crystal display faceOn plate. Wherein selected cell 103 is connected in series segment data line D1～Dm and forms a loop. And selected cell107 are also connected in series part scanning linear G1～Gn forms a loop. Same, between data wire D1～Dm andThe loop forming between scanning linear G1～Gn can by two of an adjacent determining deviation group data wire or adjacent certain betweenTwo groups of scanning linears of distance form, or form in the mode of a determining deviation jumping group. As sensor 105 sees throughThe group that the group that selected cell 103 forms data wire D1～D30 and data wire D61～D90 formCouple the loop that forms together a large region. In the time carrying out electromagnetic induction touch-control, sensor 105Can launch sensing signal through selected cell 103 detects to loop. And can between the loop formingOverlap each other, avoid detecting " dead angle ". For example: two loops that sequentially form, A loop and B returnRoad, wherein A loop is to be a branch line by data wire D1～D10,100, interval line, then with dataLine D111～D220 is the loop that another branch line forms. And B loop is by data wire D100～D110Be a branch line, 100, interval line, then formed by another branch line with data wire D211～D220. Comply withThis, have the crossover region of D100～D220 between A loop and B loop, avoid detecting " dead angle ".
Wherein between data wire D1～Dm and between scanning linear G1～Gn couple can be by thin film transistor (TFT) (orTFD, NMOS, PMOS, CMOS .... wait switch module) complete or the assembly of other tool identical functions,And if formed by thin film transistor (TFT), those thin film transistor (TFT)s can be formed at interference of light display system masterOn the periphery of moving array, and form with together with thin film transistor (TFT) in interference of light display system active array.In addition, in another embodiment, selected cell 103 can directly build in source electrode drive circuit 400,And selected cell 107 also can directly build in gate driver circuit 401.
As Fig. 5 E is depicted as the electricity of another preferred embodiment interference of light display system touch control component of basic inventionElectrode structure schematic diagram, the present embodiment is in in the present embodiment from the different of last embodiment maximum,Control module 243 has a control line 240, multiple change-over switch 2431～243m and many conductingsLine 2411～241k. Sensor 105 connects those conducting lines 2411～241k. Data wire D1～Dm is saturatingCross change-over switch and couple with corresponding conducting line 2411～241k, and see through corresponding conducting line2411～241k connects sensor 105. In the present embodiment, data wire D1, D2 sees through change-over switch2431 and 2432 and conducting line 2411 couple, and see through conducting line 2411 connect sensor 105. NumberCouple with corresponding conducting line 2422 through change-over switch 2433 and 2434 according to line D3 and D4, andSee through corresponding conducting line 2422 and connect sensor 105. It should be noted that and couple each conducting lineThe first wire number or order not limit by the present embodiment.
Sensor 105 is controlled control line 240 and controls the open and close of change-over switch 2431～243m,Making data wire D1～Dm see through these change-over switches 2431～243m couples with corresponding conducting line.Wherein change-over switch 2431～243m, for example, be thin film transistor (TFT), the grid coupling of these thin film transistor (TFT)sConnect this control line 240, in the time that control line 240 these thin film transistor (TFT)s of control cut out, interrupt data wireCoupling between D1～Dm and conducting line 2411～241k. Otherwise when control line 220 is controlled these film crystalline substancesWhen body pipe is opened, sensor 105 also can be controlled selected cell 103 and select data wire corresponding to conductingD1～Dm forms a loop.
On the other hand, control module 244 has a control line 246, multiple change-over switch 2441～244nAnd many conducting line 2421～242k. Sensor 106 connects these conducting lines 2421～242k. ScanLine G1～Gn sees through change-over switch and couples with corresponding conducting line 2421～242k, and sees through corresponding leadingLogical line 2421～242k connects sensor 106. In the present embodiment, scanning linear G1 and G2 see through and cutChange switch 2441 and 2442 and conducting line 2421 couple, and see through conducting line 2421 connect sensor105. Scanning linear G3 and G4 see through change-over switch 2443 and 2444 and corresponding conducting line 2422 couplingsConnect, and connect sensor 105 through corresponding conducting line 2422. It should be noted that and couple eachThe first wire number of conducting line or order are not limit by the present embodiment.
Sensor 105 is controlled control line 246 and controls the open and close of change-over switch 2441～244n,Making scanning linear G1～Gn see through these change-over switches 2441～244n couples with corresponding conducting line. WhereinChange-over switch 2441～244n, for example, be thin film transistor (TFT), and the grid of these thin film transistor (TFT)s couples this controlLine 246 processed, in the time that control line 246 these thin film transistor (TFT)s of control cut out, interrupts scanning linear G1～GnAnd coupling between conducting line 2421～242k. Otherwise controlling those thin film transistor (TFT)s when control line 246 opensQi Shi, sensor 105 also can be controlled selected cell 107 and select scanning linear corresponding to conducting to form oneLoop, to carry out electromagnetic induction detection.
And in the time that sensor carries out capacitance touching control sensing, sensor 105 can be controlled in control module 243Connection between disconnected these data wires D1～Dm, and control control module 244 these scanning linears of interruptionBetween G1～Gn, connect. Then, according to the capacitance type sensing mode adopting, self-tolerant sensing mode or mutualAppearance formula sensing mode, scans.
According to the present invention, touch-control sensing assembly except can with the electrode of interference of light display system active arrayStructure is total to outside structure, more can be formed on the diverse location of an interference of light display unit. Consult shown in Fig. 6For the schematic diagram of analysing and observe of interference of light display system, wherein only draw an interference of light display unit 100. ThisThe cross-section structure of interference of light display system at least comprises: a first substrate 110, a second substrate 131,And one interference of light display unit 100 be positioned between this first substrate 110 and this second substrate 131. ShouldSecond substrate can be a upper cover cover glass, in another embodiment, and more can be on second substrate 131Form separately a upper cover molding unit. Wherein, upper cover molding unit can be a transparent protective glass.
In this embodiment, a touch-control sensing panel 150 can be attached to the top of second substrate 131,Or be attached to the below of second substrate 131, or between second substrate and interference of light display unit 100,Or be attached to the below of first substrate 110, that is be attached to first substrate 110 and do not have an active arrayAnother side on. In addition in order the spot light reflecting to be scattered in to uniform face light, therefore separatelyIn one embodiment, can on second substrate 131, form a diffusion barrier 132, reach light and evenly spreadEffect, according to this, a touch-control sensing panel 150 also can be attached to the top of diffusion barrier 132. In addition,If be formed with separately a upper cover molding unit on second substrate 131 time, in this embodiment, one touchesControl induction panel 150 can be attached to the top of upper cover molding unit 131, or is attached to upper cover mouldingThe below of unit.
In another embodiment, if wish forms the interference of light display system of a colour, can be in the interference of lightOn display unit 100, form again a colored filter 130 on second substrate 131, consult Fig. 7 instituteBe shown the schematic diagram of analysing and observe of an interference of light color display system, wherein only draw an interference of light and show singleUnit 100. The cross-section structure of this interference of light color display system at least comprises: a first substrate 110,The second base version 131, a colored filter 130 and an interference of light display unit 100 are positioned at this first baseBetween plate 110 and this colored filter 130,130 of this colored filters are at second substrate 131. SeparatelyIn one embodiment, more can on second substrate 131, form separately a upper cover molding unit. Wherein, onLid molding unit is a transparent protective glass.
In this embodiment, a touch-control sensing panel 150 can be attached to the top of second substrate 131,Or be attached to the below of second substrate 131, that is be attached to second substrate 131 and colored filterBetween 130, or be attached to the below of colored filter 130, that is be attached to colored filter 130And between interference of light display unit 100, also or be attached to the below of first substrate 110, that is pasteBeing attached to first substrate 110 does not have on the another side of active array. In addition for will be by the some light reflectingSource distribution becomes uniform face light, therefore in another embodiment, can on second substrate 131, form oneDiffusion barrier 132, reaches the evenly effect of diffusion of light, and according to this, a touch-control sensing panel 150 also can pasteBe attached to the top of diffusion barrier 132. A this second substrate 131 especially upper cover protected location or upper cover is madeType unit. In addition, if be formed with separately a upper cover molding unit on second substrate 131 time, at thisIn embodiment, a touch-control sensing panel 150 can be attached to the top of upper cover molding unit, or attachesBelow upper cover molding unit.
Consult the schematic diagram of analysing and observe that Figure 8 shows that interference of light color display system, wherein only draw oneLight interference type color display unit 200. The cross-section structure of this interference of light color display system at least comprises:One first substrate 110, a second substrate 131 and a light interference type color display unit 200 are positioned at thisBetween first substrate 110 and this second substrate 131. In another embodiment, more can be in second substrate 131On form separately a upper cover molding unit. Wherein, upper cover molding unit is a transparent protective glass.
In this embodiment, a touch-control sensing panel 150 can be attached to the top of second substrate 131,Or be attached to the below of second substrate 130, that is be attached to second substrate 131 and light interference type coloured silkBetween look display unit 200, or be attached to the below of first substrate 110, that is be attached to firstSubstrate 110 is not had on the another side of active array. In addition for the spot light reflecting being scattered inFace light therefore in another embodiment, can form a diffusion barrier 132 on second substrate 131 uniformly,Reach the evenly effect of diffusion of light, according to this, a touch-control sensing panel 150 also can be attached to diffusion barrier132 top. In addition, if be formed with separately a upper cover molding unit on second substrate 131 time,In this embodiment, a touch-control sensing panel 150 can be attached to the top of upper cover molding unit, or pastesBe attached to the below of upper cover molding unit.
In addition, no matter owing to being that colourama interferes display system or monochromatic light to interfere display system all can notSelf-luminescence, causes in dark environment, cannot produce reverberation and carry out show image. Therefore originallyInvention is head it off, sets up a front light-source in interference of light display system, as catoptrical nextSource, its structure as shown in Figure 9. Figure 9 shows that a tool light source interference of light display system analyse and observe generalSlightly diagram, is arranged at the interference of light comprising interference of light display module 141, one front light-sources 140 and showsThe top of assembly 141, and/or a upper cover molding unit or protected location 131 are arranged at front light-source 140Upper. Upper cover molding unit or protected location 131 can be a transparent protective glass. Front light-source 140, usesTo provide interference of light display module 141 required front illumination or night vision reading lighting, comprise a light source140a and LGP 140b, LGP 140b, in order to directing light direction, controls brightness even. LightSource 140a is arranged on the side of LGP 140b, and light source 140a injects light from LGP 140b side,And the light that enters LGP 140b can be penetrated towards the one side of interference of light display module 141 from LGPGo out, in order to provide interference of light display module 141 even, efficient front light-source. In this embodiment,One touch-control sensing panel 150 can be attached to the top of upper cover molding unit or protected location 131, orBe attached to the below of upper cover molding unit or protected location 131, that is be attached to upper cover molding unit 131And between front light-source 141, or be attached to the below of first substrate 110, that is be attached to the first basePlate 110 is not had on the another side of active array. This light source is white light source, or the number that presents of point sequentialPlant coloured light light source. And the sensor of a touch-control sensing panel 150 can be arranged on front light-source 141 belows,Or be arranged on protected location 131 belows, and outside change-over switch, and sensor, be all shared,Can be arranged on periphery.
Figure 10 is the generalized section that illustrates a micromirror array device. One micromirror array device 300 comprisesThe mode that multiple micro mirrors 301 are arranged with matrix is configured on the surface of semiconductor substrate 302. Each is micro-Mirror 301 comprises a minute surface 303 and two corresponding control electrodes 305 and 306. Each minute surface 303 is logicalBe often foursquare, and there is scope greatly about the length of 5 to 30 microns. Minute surface 303 comprises (an aluminiumPlate) reflecting surface 307, a support platform 308 and the flexible handle 309 of an elasticity. Minute surface 303 can be at heightReach and under the angle of about ± 15 degree (being generally be less than ± 7 to ± 15 degree), complying with this sloping shaft and tilt, that is+-X ,+-Y-direction is rotated. The flexible handle 309 of elasticity should with firm handle is arranged on hingeThe base portion of micromirror array device. Wherein, should define one of minute surface 303 by (aluminium sheet) reflecting surface 307Upper reflecting surface. The flexible handle 309 of elasticity can drive aluminium sheet 307 to move. And two control electrode 305 Hes306 lay respectively on the dual-side of flexible handle 309, can be via the electronic circuit in base material 302 differenceBe addressed to control electrode 305 and 306, can make this mirror towards this control electrode 305 by an electrostatic forceOr control electrode 306 tilts. The form of handle 309 is support columns that are connected to minute surface 303. OrPerson, handle 309 can extend along this sloping shaft at least in part. The form of handle 309 be generally alongThis sloping shaft extend and with an abutment wall of minute surface 303 coextensives. Wherein its control circuit unit is profitMade with CMOSSRAM memory cell, in other words, in the time of processing procedure, first can be from a CMOSMemory circuit 304 is configured on the surface of semiconductor substrate 302 and starts, then production control electrode 305With 306.
Under this framework, touch-control sensing assembly can be total to structure with the electrode structure of CMOS memory circuit,It should be noted that the above-mentioned driving method using for interference of light display unit of this case, all can applyAt micromirror array device, and wherein sensor, drive IC etc., more can be made in the base material of MEMS,Wafer is upper, and area, volume can littleization. More can be formed on micromirror array device 300 and be formedThe diverse location of display system on. Consult the section knot that Figure 11 shows that a micro mirror array display systemStructure, at least comprises: a micromirror array device 300 and one second base version 310 are protected as a upper coverUnit. In another embodiment, upper cover protected location is a transparent protective glass, and this upper cover protection is singleUnit can more comprise a upper cover molding unit. In this embodiment, a touch-control sensing panel 150 can pasteBe attached to the top of second substrate 131, or be attached to the below of second substrate 1310, that is be attached toBetween second substrate 131 and micromirror array device 300, or be attached to micromirror array device 300Below.
Micromirror array device also can be arranged in pairs or groups a front light-source as shown in figure 12. Figure 12 shows that a tool lightThe micromirror array device in source analyse and observe schematic diagram, comprising the front light of a micromirror array device 300,Source 340 is arranged at the top of micromirror array device 300, and/or a upper cover molding unit or protection listUnit 310 is arranged at the upper of front light-source 340. It is one transparent that upper cover molding unit or protected location 310 can beCover glass. Front light-source 340, in order to provide micromirror array device 300 required front illumination or night visionReading lighting, comprises a light source 340a and LGP 340b, and LGP 340b is in order to directing light sideTo, control brightness even. Light source 340a is arranged on the side of LGP 340b, and light source 340a is from leadingTabula rasa 340b side is injected light, can be from LGP towards micro mirror and enter the light of LGP 340bThe one side of array apparatus 300 penetrates, in order to provide micromirror array device 300 even, efficiently front lightSource. In this embodiment, a touch-control sensing panel 150 can be attached to upper cover molding unit or protection listUnit 310 top, or be attached to the below of upper cover molding unit or protected location 310, that is pasteBe attached between upper cover molding unit 310 and front light-source 340. This light source is white light source, or point sequentialSeveral coloured light light sources that present.
In the time being used in projection or when HMD or micro-projection pico-Display, can there is optical-mechanical system, haveExternal light source and collocation. In the time of this micro electronmechanical displaying appliance one external light source or ray machine, should in utilizationFront light-source, external light source or ray machine are closed or are put the dark time, carry out touch-control sensing in this period.
Comprehensive above-mentioned saying, the present invention adds a contact panel in micro electronmechanical display, makes microcomputerElectricity displaying appliance touch controllable function, in the use will be more direct and convenient. And the wire of contact panel knotStructure more can be total to structure with the control electrode of micro electronmechanical display, and reduces processing procedure program.
Although the present invention discloses as above with embodiment, so it is not in order to limit the present invention, anyBe familiar with this skill person, without departing from the spirit and scope of the present invention, when making various changes and profitDecorations, the scope that therefore protection scope of the present invention ought define depending on appending claims is as the criterion.
Claims (18)
1. a micro electronmechanical display, is characterized in that, at least comprises:
One first substrate;
One touch control unit is in order to detect a touch position; And
Multiple microelectromechanicdisplay display units, are disposed on this first substrate, wherein many described in this touch control unit controlIndividual microelectromechanicdisplay display unit, this touch control unit comprises:
One sensor;
One first selected cell couples this sensor;
One second selected cell couples this sensor;
One first control module couples this sensor;
One second control module couples this sensor;
Many the first wire is parallel on a first direction, wherein described in each one of the first wireEnd couples this first selected cell, and the other end couples this first control module;
Many the second wire is parallel in a second direction, wherein described in each one of the second wireEnd couples this second selected cell, and the other end couples this second control module; And
Multiple thin film transistor (TFT)s are formed at respectively described many first described many second of wires leaps and leadOn the position of line;
Described in each, microelectromechanicdisplay display unit is a light interference type display unit, light interference type described in eachDisplay unit also comprises that one first electrode is formed on this first substrate and one second electrode is disposed at thisOn the first electrode,
Described in each, the first electrode couples community electrode, and described in each, the second electrode couples respectively that these are manyIndividual thin film transistor (TFT), the signal on described many first wires is via described in the plurality of thin film transistor (TFT) controlThe second electrode deformation or vibration.
2. micro electronmechanical display according to claim 1, is characterized in that, wherein this light interference type is aobviousShow that unit has a single chamber, or there is multi-chamber.
3. micro electronmechanical display according to claim 1 and 2, is characterized in that, this micro electronmechanical demonstrationDevice, also comprises that a upper cover protected location is disposed at multiple these light interference type display unit tops.
4. micro electronmechanical display according to claim 2, is characterized in that, this light interference type shows singleUnit also comprises:
One supporter is disposed between this first electrode and this second electrode, in order to support this second electrode with in thisBetween the first electrode and this second electrode, form a chamber; And
This touch control unit can order about this second electrode and do relative deformation or vibration corresponding to the first electrode.
5. micro electronmechanical display according to claim 2, is characterized in that, this light interference type shows singleThis multi-chamber of unit has different spacing.
6. micro electronmechanical display according to claim 5, is characterized in that, this light interference type shows singleThis multi-chamber of unit has three kinds of different spacing, can reflect the look of the wave band of ruddiness, green glow and blue lightLight.
7. micro electronmechanical display according to claim 5, is characterized in that, several light interference types showUnit is combined into a light interference type display mutually, can reflect the different ripples of green light, purplish red light or gold-tintedThe coloured light of section.
8. according to the micro electronmechanical display described in claim 1,2,4,6 or 7, it is characterized in that, shouldMicro electronmechanical display also comprises that a colored filter is disposed at the plurality of microelectromechanicdisplay display unit top, Yi JiyiUpper cover protected location is disposed on this colored filter, and wherein this touch control unit can be positioned at this upper cover protected locationInner side or outside or therein or between this upper cover protected location and this colored filter or be positioned atBetween this colored filter and this microelectromechanicdisplay display unit.
9. according to the micro electronmechanical display described in claim 1,2,4,6 or 7, it is characterized in that, shouldTouch control unit is to use way of electromagnetic induction, optical sensor mode, ultrasonic induction mode, capacitive sensing sideFormula, resistance induction mode, pressure sensitive mode or above double mode, multimodal induction mode.
10. according to the micro electronmechanical display described in claim 1,2,4,6 or 7, it is characterized in that, shouldMicro electronmechanical display also comprises that a front light-source is disposed at the plurality of microelectromechanicdisplay display unit front, wherein this front lightSource also comprises:
One light source, wherein this light source is white light source or monochromatic light light source or several coloured light light sources.
11. micro electronmechanical displays according to claim 10, is characterized in that, it is utilizing this front lightSource is closed or is put the dark time, carries out touch-control sensing in this period, and wherein this touch control unit is disposed at before thisLight source top or inner side.
12. micro electronmechanical displays according to claim 1, is characterized in that, when this touch control unit entersWhen row one electromagnetic touch-control application, this first control module connects one end of described part the first wire jointlyConducting or be connected to one first conducting line, this first selected cell is according to one first order, with one first spacing,Sequentially be connected in series the other end of the first wire described in this part to form multiple loops on this first direction, andThis second control module jointly connects one end of described part the second wire conducting or is connected to one second conductingLine, this second selected cell is according to one second order, with one second spacing, is sequentially connected in series described in this part theThe other end of two wires to be to form multiple loops in this second direction, and detects with one first method of operatingOr sense the touch-control loop signal of magnetic flux, electromagnetic induction or voltage, electric current, frequency, transport with numerical valueCalculate judgement position, distance, touching height and the touch points that loop inductance changes occurs.
13. micro electronmechanical displays according to claim 12, is characterized in that, also comprise:
Described many first wires are divided into multiple the first wire groups, and wherein described in each, the first wire group comprisesArticle at least two, the first wire, is divided into multiple the second wire groups by described many second wires, wherein described in eachThe second wire group comprises at least two the second wires;
This first selected cell is according to one the 3rd order, according to one the 3rd spacing, sequentially described in serial connection or conductingThe first wire group, to form multiple the first wire group conducting line loops on this first direction;
This second selected cell is according to one the 4th order, according to one the 4th spacing, sequentially described in serial connection or conductingThe second wire group, to form multiple the second wire group conducting line loops in this second direction;
Sequentially transmitting a detection signal leads to described multiple the first wire group conducting line loops and described multiple secondLine-group conducting line loop, wherein the first wire group conducting line loop, described the second wire group conducting described in eachThe first wire in line loop, the second wire receive or launch identical detection loop signal or loop inductance letterNumber; And
Detect or respond to the loop signal of touch-control with this first method of operating, and occur with numerical operation judgementPosition, distance, touching height and touch points that loop inductance changes.
14. micro electronmechanical displays according to claim 13, is characterized in that, this first method of operating,Be respectively in this first, second direction, the detection signal of a first frequency is transmitted in the loop sequentially forming,Detect magnetic flux, electromagnetic induction or voltage that the loop in this first, second direction occurs, electric current,The variation of frequency, is wherein to transmit this detection signal to the loop in this first, second direction by this sensor,To detect magnetic flux, electromagnetic induction or voltage, the electric current in each loop, the touch-control sensing loop signal of frequency.
15. micro electronmechanical displays according to claim 1, is characterized in that, when this touch control unit entersWhen the touch-control of row one condenser type, resistance-type, pressure-sensitive or optical profile type is applied, this first control module interruptsCoupling between described many first wires and one first conducting line, and this second control module interrupts described manyCoupling between bar the second wire and one second conducting line, and detect or respond to touch-control with one second method of operatingThe quantity of electric charge, capacitive sensing or voltage, the signal of current signal, there is induction with numerical operation judgement and becomePosition, distance, touching height and the touch points changed.
16. micro electronmechanical displays according to claim 15, is characterized in that, also comprise:
Described many first wires are divided into multiple the first wire groups, and wherein described in each, the first wire group comprisesArticle at least two, the first wire, is divided into multiple the second wire groups by described many second wires, wherein described in eachThe second wire group comprises at least two the second wires;
Sequentially transmit a detection signal to described multiple the first wire groups and described multiple the second wire group, whereinThe first wire described in each in the first wire group, described the second wire group, the second wire receive or transmitting phaseSame detection signal or induced signal; And
Detect or respond to the signal of touch-control with this second method of operating, with numerical operation judgement, induction occurs and becomePosition, distance, touching height and the touch points changed.
17. micro electronmechanical displays according to claim 16, is characterized in that, this touch-control sensing unitThis first control module and this second control module comprise that respectively at least one control line and multiple switching openThe change-over switch of pass or multiple serial connections, the wherein the plurality of change-over switch of this first control module or the plurality of stringMany the first wires described in the change-over switch coupling connecing, and the plurality of switching of this second control moduleMany the second wires described in the change-over switch coupling of switch or the plurality of serial connection.
18. micro electronmechanical displays according to claim 17, is characterized in that, this sensor can be controlledDescribed in this control line conducting, change-over switch makes described the first wire conducting of part, or controls this control line and close instituteState change-over switch, interrupt the conducting of described the first wire, or/and control change-over switch described in this control line conductingMake described the second wire conducting of part, or control this control line and close described change-over switch, interrupt described secondThe conducting of wire.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| TW100117825A TWI463237B (en) | 2011-05-20 | 2011-05-20 | A mems display with touch control function |
| TW100117825 | 2011-05-20 |
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| CN102798973A CN102798973A (en) | 2012-11-28 |
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| CN103870089B (en) * | 2012-12-10 | 2017-08-01 | 航天信息股份有限公司 | One kind input shows system and method |
| TWI622837B (en) * | 2013-10-24 | 2018-05-01 | 元太科技工業股份有限公司 | Display apparatus |
| CN103927044B (en) * | 2013-12-30 | 2017-05-03 | 上海天马微电子有限公司 | Touch display panel and touch display device |
| CN104883521B (en) * | 2014-02-28 | 2018-01-02 | 光宝科技股份有限公司 | Projection arrangement and projecting method |
| TWI574028B (en) * | 2015-06-22 | 2017-03-11 | 李美燕 | Integrated oscillating wave emitting and sensing member, sensing array and electronic apparatus using such member and method of manufacturing such member |
| TWI601045B (en) * | 2015-08-07 | 2017-10-01 | 瑞鼎科技股份有限公司 | Panel display driving circuit and touch time arranging method |
| JP6605292B2 (en) * | 2015-10-16 | 2019-11-13 | 株式会社ジャパンディスプレイ | Display device |
| CN106066732B (en) * | 2016-05-30 | 2019-01-25 | 京东方科技集团股份有限公司 | Touch screen and touch display unit |
| TWI712935B (en) * | 2016-06-27 | 2020-12-11 | 仟融科技股份有限公司 | Capacitive sensing device and driving method thereof |
| TWI677820B (en) * | 2018-12-11 | 2019-11-21 | 友達光電股份有限公司 | Display device |
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| TW201248289A (en) | 2012-12-01 |
| CN102798973A (en) | 2012-11-28 |
| TWI463237B (en) | 2014-12-01 |
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