TWI462317B - Structure and fabricating method of a light-concentraing film applied to a solar panel - Google Patents

Structure and fabricating method of a light-concentraing film applied to a solar panel Download PDF

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TWI462317B
TWI462317B TW101122391A TW101122391A TWI462317B TW I462317 B TWI462317 B TW I462317B TW 101122391 A TW101122391 A TW 101122391A TW 101122391 A TW101122391 A TW 101122391A TW I462317 B TWI462317 B TW I462317B
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light transmissive
transmissive material
light
material layer
cavity
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TW201401539A (en
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Tsung Hung Lin
Ching Kong Chao
Chien Hsien Liu
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Univ Nat Taiwan Science Tech
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Photovoltaic Devices (AREA)

Description

應用於太陽能板之聚光薄膜及其製造方法Concentrating film applied to solar panel and manufacturing method thereof

本發明係與一種聚光薄膜有關,特別是與一種適用於太陽能電池的聚光薄膜有關。The present invention relates to a concentrating film, and more particularly to a concentrating film suitable for use in a solar cell.

太陽能發電系統主要可區分為兩大種類,一種是利用光電轉換的聚光型太陽能發電系統(Concentrating Photovoltaic System;CPV),另一種是是利用光熱轉換的集光型太陽熱能發電系統(Concentrated Solar Thermal Power;CSP)。聚光型太陽能發電系統係由聚光型太陽能電池、光學模組與太陽光追蹤器的組合而成,其係利用透鏡或反射鏡把陽光聚集到太陽能電池上,因此可以減少太陽能電池的面積,進而減少其之材料成本,同時在聚光後的光電轉換效率將比一般太陽照射的轉換效率高。The solar power generation system can be mainly divided into two types, one is a Concentrating Photovoltaic System (CPV) using photoelectric conversion, and the other is a concentrated solar thermal power generation system (Concentrated Solar Thermal) using photothermal conversion. Power; CSP). The concentrating solar power generation system is a combination of a concentrating solar cell, an optical module, and a solar tracker, which uses a lens or a mirror to concentrate sunlight onto a solar cell, thereby reducing the area of the solar cell. In turn, the material cost is reduced, and the photoelectric conversion efficiency after concentrating will be higher than that of general solar irradiation.

近年來由於太陽能光電產業的興起,許多種不同型式的透鏡或反射鏡也被嘗試用於太陽能板上做為聚光元件,以增進太陽能電池的發電效能。例如,菲涅爾透鏡、拋物面鏡或半球面透鏡等等皆是常被運用之光學元件。In recent years, due to the rise of the solar photovoltaic industry, many different types of lenses or mirrors have also been tried on solar panels as concentrating elements to enhance the power generation efficiency of solar cells. For example, Fresnel lenses, parabolic mirrors or hemispherical lenses are all commonly used optical components.

目前有許多研究指出微透鏡陣列對於提升太陽能電池效率有正面的助益。例如圖1所示的具有微透鏡陣列的光學薄膜10,其係由包括複數個半球面透鏡12所組成的微透鏡陣列。此外,許多文獻也指出透鏡的外型結構也與效能之提升有關。所以常見之微透鏡的結構外型可以是四邊形或六邊形。There are many studies pointing out that microlens arrays have a positive impact on improving solar cell efficiency. For example, the optical film 10 having a microlens array shown in FIG. 1 is a microlens array comprising a plurality of hemispherical lenses 12. In addition, many documents also indicate that the appearance of the lens is also related to the improvement of performance. Therefore, the structural appearance of a common microlens may be a quadrangle or a hexagon.

由於太陽能電池的造價仍然難以降低,因此若能設計一種可以廣角地收集光線的光學元件,則將能提供太陽能電池 更高的光吸收率或光照值,以更進一步地減少太陽能電池的面積及其材料成本,或是增加其之光電轉換效率。若再配以太陽光追蹤器,則更可提高其之產電量。Since the cost of solar cells is still difficult to reduce, solar cells can be provided if an optical component that can collect light at a wide angle can be designed. Higher light absorption or illumination values to further reduce the area of solar cells and their material costs, or increase their photoelectric conversion efficiency. If equipped with a solar tracker, it can increase its electricity production.

本發明之一目的在於提供一種製程簡單、具有高聚光效率的高廣角聚光元件。An object of the present invention is to provide a high-wide-angle concentrating element which is simple in process and has high concentrating efficiency.

本發明的其他目的和優點可以從本發明所揭露的技術特徵中得到進一步的了解。Other objects and advantages of the present invention will become apparent from the technical features disclosed herein.

為了達到上述之一或部份或全部目的或是其他目的,本發明之一實施例的一種聚光薄膜的製造方法,其包括:提供一基材;於基材之表面形成一光阻層;對光阻層施以一圖案化步驟以定義出一光阻圖案;對光阻圖案施以一熱熔步驟,以使光阻圖案形成一微結構陣列;在微結構陣列上形成一凹模,使凹模之表面形狀與微結構陣列之表面形狀能互相契合;將凹模從微結構陣列上剝離;形成一第一透光材料層於凹模上;將第一透光材料層從凹模上剝離,其中第一透光材料層具有一上表面、一下表面及兩相對邊,下表面位於上表面的相反側,其中上表面的結構係與微結構陣列相同;提供一腔體,腔體具有一容置空間,並將第一透光材料層的兩相對邊固定於腔體上,使下表面係面對容置空間,而上表面背對容置空間;將一第二透光材料注入容置空間中,直至第一透光材料層變形而隆起;以及將腔體及容置空間內的第二透光材料去除,則容置空間上方的第二透光材料與第一透光材料層形成一聚光薄膜。A method for fabricating a concentrating film according to an embodiment of the present invention, comprising: providing a substrate; forming a photoresist layer on the surface of the substrate; Applying a patterning step to the photoresist layer to define a photoresist pattern; applying a heat fusion step to the photoresist pattern to form the photoresist pattern to form a microstructure array; forming a concave mold on the microstructure array, The surface shape of the concave mold and the surface shape of the microstructure array can be matched; the concave mold is peeled off from the microstructure array; a first light transmissive material layer is formed on the concave mold; and the first light transmissive material layer is removed from the concave mold The upper light-transmissive material layer has an upper surface, a lower surface and two opposite sides, and the lower surface is located on the opposite side of the upper surface, wherein the structure of the upper surface is the same as the microstructure array; providing a cavity, the cavity Having an accommodating space, and fixing opposite sides of the first transparent material layer to the cavity, so that the lower surface faces the accommodating space, and the upper surface faces away from the accommodating space; and a second light transmissive material is Inject into the accommodating space until A light-transmitting material layer is deformed and lifted; and removing the second light transmissive material and the cavity accommodating space, the second light transmissive material accommodating space is formed above the first film and a converging light-transmitting material layer.

在一實施例中,上述光阻圖案包括複數個相互平行的長 條形圖案,複數長條形圖案經由熱熔步驟而轉變成複數半圓柱體,並且複數半圓柱體形成微結構陣列。在微結構陣列上形成凹模之步驟包括:將液態的聚雙甲基矽氧烷(Poly-dimethylsiloxane,PDMS)材料灌注於微結構陣列上,待其固化而形成凹模。此外,凹模亦可利用電鑄的方法形成於微結構陣列上。In an embodiment, the photoresist pattern includes a plurality of parallel lengths The strip pattern, the plurality of strip patterns are converted into a plurality of semi-cylinders via a hot melt step, and the plurality of semi-cylinders form a microstructure array. The step of forming a female mold on the microstructured array includes injecting a liquid poly-dimethylsiloxane (PDMS) material onto the microstructured array and curing it to form a female mold. In addition, the die can also be formed on the microstructure array by electroforming.

在一實施例中,上述形成第一透光材料層於凹模上之步驟包括:提供一透光率大於95%的液態材料,例如聚雙甲基矽氧烷;將液態材料澆鑄(casting)於凹模上;以及將凹模上的液態材料烘乾使其固化而形成第一透光材料層。In one embodiment, the step of forming the first light transmissive material layer on the concave mold comprises: providing a liquid material having a light transmittance greater than 95%, such as polybismethyl decane; casting the liquid material And forming a first light transmissive material layer by drying the liquid material on the die to cure it.

在一實施例中,提供腔體之步驟包括:使容置空間的寬度小於第一透光材料層之兩相對邊的距離;以及在容置空間之一側開設一流體注入管道,流體注入管道貫穿至腔體之外部。In an embodiment, the step of providing the cavity includes: making the width of the accommodating space smaller than the distance between the opposite sides of the first transparent material layer; and opening a fluid injection pipe on the side of the accommodating space, the fluid injection pipe Throughout the outside of the cavity.

在一實施例中,第二透光材料係為一透光率大於95%的液態材料,例如:聚雙甲基矽氧烷。In one embodiment, the second light transmissive material is a liquid material having a light transmittance greater than 95%, such as polydimethyloxane.

本發明之一實施例的一種聚光薄膜,係利用前述之方法製造而得,且適合設置在一太陽能板之上。聚光薄膜包括一第一透光材料層及一第二透光材料層。第一透光材料層具有一上表面與一下表面,下表面位於上表面的相反側。上表面具有複數個微結構,每一微結構具有一寬度,並且寬度係為微米級。第二透光材料層具有一平面及一弧面。平面係位於弧面的相反側,弧面具有兩相對的側邊,兩側邊分別與平面相交,並且弧面與平面之間具有一間距,間距係從兩側邊向中央逐漸增加。第一透光材料層之下表面係貼附於第二透光 材料層之弧面上,第二透光材料層之平面之尺寸係適合裝設於太陽能板上。A concentrating film according to an embodiment of the present invention is produced by the method described above and is suitably disposed on a solar panel. The concentrating film comprises a first light transmissive material layer and a second light transmissive material layer. The first light transmissive material layer has an upper surface and a lower surface, and the lower surface is on the opposite side of the upper surface. The upper surface has a plurality of microstructures, each microstructure having a width and a width on the order of microns. The second light transmissive material layer has a flat surface and a curved surface. The plane is located on the opposite side of the curved surface, and the curved surface has two opposite sides, and the two sides respectively intersect the plane, and the arc has a space between the plane and the plane, and the spacing gradually increases from the both sides toward the center. The lower surface of the first light transmissive material layer is attached to the second light transmissive layer On the arc surface of the material layer, the plane of the second light transmissive material layer is suitable for mounting on a solar panel.

在一實施例中,第一透光材料層與第二透光材料層係為一體成型。In an embodiment, the first light transmissive material layer and the second light transmissive material layer are integrally formed.

在一實施例中,第一透光材料層與第二透光材料層之材料不同,且兩者之透光率皆大於95%。In one embodiment, the first light transmissive material layer is different from the second light transmissive material layer, and both of the light transmittances are greater than 95%.

在一實施例中,上述的複數個微結構係為複數個平行排列的半圓柱體,並且第一透光材料層與第二透光材料層之材料皆包括聚雙甲基矽氧烷。In one embodiment, the plurality of microstructures are a plurality of semi-cylindrical bodies arranged in parallel, and the materials of the first light transmissive material layer and the second light transmissive material layer both comprise polydimethyloxane.

本發明之實施例的特點在於聚光薄膜具有雙層結構,不僅能讓直射光吸收效率高,也能讓其他角度之側向光線打入此雙層聚光薄膜,進而折射傳遞到太陽能板上,使各角度菲涅爾損失減少,而擁有比習知技術更佳的吸光效果。The embodiment of the invention is characterized in that the concentrating film has a double-layer structure, which not only can make the direct light absorption efficiency high, but also can make the lateral light of other angles enter the double-layer concentrating film, and then the refracting is transmitted to the solar panel. It reduces the Fresnel loss at all angles and has a better light absorption effect than the prior art.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之一較佳實施例的詳細說明中,將可清楚的呈現。以下實施例中所提到的方向用語,例如:上、下、左、右、前或後等,僅是用於參照隨附圖式的方向。因此,該等方向用語僅是用於說明並非是用於限制本發明。The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments. The directional terms mentioned in the following embodiments, such as upper, lower, left, right, front or rear, etc., are only used to refer to the directions of the accompanying drawings. Therefore, the directional terms are used for illustration only and are not intended to limit the invention.

本發明是一種可應用於太陽能板上的高廣角聚光薄膜,特別是指在光線入射方向為85°~-85°時(以光線直射太陽能板時的方向為0°),仍具有高的光學吸收效率的聚光薄膜,以提升太陽能發電系統的聚光與追蹤光線的功能。The invention relates to a high-wide-angle concentrating film which can be applied to a solar panel, in particular, when the incident direction of the light is 85°--85° (the direction when the light is directly irradiated to the solar panel is 0°), and the height is still high. Optical absorption efficiency of the concentrating film to enhance the function of collecting and tracking light in the solar power system.

如圖2A所示,本實施例係為一種聚光薄膜20,其係適 合設置在一太陽能板40之上。聚光薄膜20包括一第一透光材料層22及一第二透光材料層24。第一透光材料層22係貼合於第二透光材料層24之上。As shown in FIG. 2A, this embodiment is a concentrating film 20, which is suitable for It is disposed above a solar panel 40. The concentrating film 20 includes a first light transmissive material layer 22 and a second light transmissive material layer 24. The first light transmissive material layer 22 is adhered to the second light transmissive material layer 24 .

如圖2B及圖2C所示,第一透光材料層22係具有一上表面221與一下表面223,下表面223係位於上表面221的相對側。上表面221具有複數個微結構222。在本實施例中,複數個微結構222係為複數個平行排列的半圓柱體,每一半圓柱體係具有一寬度W1 ,並且該寬度W1 係較佳地為微米級。每一半圓柱體至少具有一焦點,且各該焦點係位於太陽能板40之受光面的上方。半圓柱體可以接收來自多個不同方向的太陽光,無論是平行或垂直於太陽能板40之太陽光皆可被接收。As shown in FIG. 2B and FIG. 2C, the first light transmissive material layer 22 has an upper surface 221 and a lower surface 223, and the lower surface 223 is located on the opposite side of the upper surface 221. Upper surface 221 has a plurality of microstructures 222. In the present embodiment, the plurality of microstructures 222 are a plurality of parallel-arranged semi-cylinders, each semi-cylindrical system having a width W 1 , and the width W 1 is preferably on the order of micrometers. Each of the cylinders has at least one focus, and each of the focal points is located above the light receiving surface of the solar panel 40. The semi-cylinder can receive sunlight from a plurality of different directions, whether it is parallel or perpendicular to the solar panel 40.

第二透光材料層24具有一平面241及一弧面243。平面241係位於弧面243的相反側,弧面243具有兩相對的側邊242、244,兩側邊242、244係分別與平面241相交,並且弧面243與平面241之間具有一間距H1 ,間距H1 係從兩側邊242、244向中央逐漸增加。第一透光材料層22之下表面223係貼附於第二透光材料層24之弧面243上,第二透光材料層24之平面241的尺寸,係適合裝設於太陽能板40上。The second light transmissive material layer 24 has a flat surface 241 and a curved surface 243. The plane 241 is located on the opposite side of the curved surface 243. The curved surface 243 has two opposite side edges 242, 244. The two side edges 242, 244 are respectively intersected with the plane 241, and the arc surface 243 has a spacing H from the plane 241. 1. The pitch H 1 gradually increases from the both sides 242, 244 toward the center. The lower surface 223 of the first transparent material layer 22 is attached to the curved surface 243 of the second transparent material layer 24, and the plane 241 of the second transparent material layer 24 is suitable for being mounted on the solar panel 40. .

在一實施例中,第一透光材料層22與第二透光材料層24係為一體成型。第一透光材料層22與第二透光材料層24係以透光率大於95%之材料來製作,例如:聚雙甲基矽氧烷(Poly-dimethylsiloxane,PDMS)。第一透光材料層22與第二透光材料層24可以採用相同或不同的材料來製作,例如:兩者之透光率皆可大於95%,或兩者之材料皆包括聚雙甲基矽氧 烷。In an embodiment, the first light transmissive material layer 22 and the second light transmissive material layer 24 are integrally formed. The first light transmissive material layer 22 and the second light transmissive material layer 24 are made of a material having a light transmittance of more than 95%, for example, poly-dimethylsiloxane (PDMS). The first light transmissive material layer 22 and the second light transmissive material layer 24 may be made of the same or different materials, for example, the transmittance of both may be greater than 95%, or both materials include polydimethylene. Oxygen alkyl.

如圖3A至圖3K所示,係為本發明之一實施例的聚光薄膜之製造方法示意圖,各步驟詳述如下:3A to 3K are schematic views showing a method of manufacturing a concentrating film according to an embodiment of the present invention, and the steps are as follows:

(一)塗佈(Coating)光阻:如圖3A所示,將一基材30放置於旋轉塗佈機(Spin-coater)上,滴上適量之光阻32,利用塗佈機旋轉後所產生的離心力,會使光阻32均勻的塗佈在基材30表面而形成一如圖3B所示的光阻層32A,而其厚度則由轉速來控制。本實施例係選用AZ4620正光阻,選用條件在於其係具有良好的硬度、抗拉強度等機械性質,且可做高厚度的結構。(1) Coating photoresist: As shown in FIG. 3A, a substrate 30 is placed on a spin-coater, and an appropriate amount of photoresist 32 is dropped thereon, and the coating machine is rotated. The resulting centrifugal force causes the photoresist 32 to be uniformly applied to the surface of the substrate 30 to form a photoresist layer 32A as shown in Fig. 3B, and the thickness thereof is controlled by the number of revolutions. In this embodiment, the AZ4620 positive photoresist is selected, and the selection condition is that the system has good mechanical properties such as hardness and tensile strength, and can be made into a high-thickness structure.

(二)曝光(Exposure):如圖3B所示,微影製程常用之曝光方式可分為接觸式、近接式及投影式等三種。而本實施例選用接觸式曝光法,並利用曝光機進行曝光,而以一具有複數個長方形圖案的光罩(Mask)34,來作為阻擋光照之用。(II) Exposure: As shown in Fig. 3B, the commonly used exposure modes of the lithography process can be divided into three types: contact type, proximity type and projection type. In this embodiment, the contact exposure method is selected, and exposure is performed by using an exposure machine, and a mask 34 having a plurality of rectangular patterns is used as a blocking light.

(三)顯影(Development):如圖3C所示,顯影主要目的是將曝光後所定義出的光阻圖案36,例如圖3C所示之複數個相互平行的長條形圖案32a所組成的陣列,顯示在基材30上。(3) Development: As shown in Fig. 3C, the main purpose of development is to form an array of photoresist patterns 36 defined after exposure, such as a plurality of mutually parallel strip patterns 32a as shown in Fig. 3C. , displayed on the substrate 30.

(四)熱熔(Thermal reflow):如圖3D所示,再經過高溫加熱進行熱熔作用,即可讓複數長條形圖案32a熔化變成複數個平行排列半圓柱體32b,其係形成一微結構陣列38。(4) Thermal reflow: as shown in Fig. 3D, after high-temperature heating for hot-melting, the plurality of elongated strip patterns 32a can be melted into a plurality of parallel-arranged semi-cylindrical bodies 32b, which form a micro Structure array 38.

(五)灌入PDMS及剝離(Lift off):如圖3E至圖3F所示,接著再將PDMS灌注於此微結構陣列38上,再使用丙酮將微結構陣列38剝離後便能做出凹模39。因此,凹模39之表面形狀係與微結構陣列38之表面形狀能互相契合。此外,凹 模39亦可利用電鑄的方法形成於微結構陣列38上。(5) Pour in PDMS and Lift off: As shown in FIG. 3E to FIG. 3F, PDMS is then poured onto the microstructure array 38, and the microstructure array 38 is peeled off using acetone to make a concave shape. Mold 39. Therefore, the surface shape of the female mold 39 and the surface shape of the microstructure array 38 can be matched to each other. In addition, concave The mold 39 can also be formed on the microstructure array 38 by electroforming.

(六)澆鑄液態聚雙甲基矽氧烷(Poly-dimethylsiloxane,PDMS):如圖3G所示,在做出凹模39後,先將第一透光材料,例如:PDMS,澆鑄於此凹模39上。由於PDMS在固化前為具有流動性之液態膠體,所以本實施例主要係以澆鑄(Casting)之方式,來形成如同第一透光材料層22之上表面221的微結構222。接著如圖3H所示,將澆鑄於凹模39上的液態PDMS烘乾固化並脫去凹模39後,即可形成一單層的薄膜透鏡22a。在本實施例中,凹模39及薄膜透鏡22a均係以PDMS製成。薄膜透鏡22a具有一上表面、一下表面及兩相對邊,下表面係位於上表面的相反側,其中上表面的結構係與微結構陣列38相同。(6) Casting liquid poly-dimethylsiloxane (PDMS): As shown in FIG. 3G, after the concave mold 39 is formed, the first light-transmitting material, for example, PDMS, is first cast into the concave mold. Mold 39. Since the PDMS is a liquid colloid having fluidity before curing, the present embodiment mainly forms a microstructure 222 like the upper surface 221 of the first light transmissive material layer 22 by casting. Next, as shown in Fig. 3H, after the liquid PDMS cast on the female mold 39 is dried and cured and the female mold 39 is removed, a single-layer thin film lens 22a is formed. In the present embodiment, both the female mold 39 and the thin film lens 22a are made of PDMS. The film lens 22a has an upper surface, a lower surface, and opposite sides, and the lower surface is on the opposite side of the upper surface, wherein the structure of the upper surface is the same as the microstructure array 38.

(七)將液態的PDMS注入腔體37:如圖3I所示,提供一腔體37,圖3I的C-C剖面係如圖3J所示,腔體37內部具有一容置空間371。在容置空間371之一側係開設有一流體注入管道372,而流體注入管道372係貫穿腔體37之一側壁。將完成的PDMS薄膜透鏡22a放置於腔體37上方之後,將薄膜透鏡22a的左右兩邊固定於腔體37的左右側邊緣,並在薄膜透鏡22a的前後兩側分別加上擋板35a及35b。接著,把第二透光材料24a,例如:PDMS材料,經由流體注入管道372注入至腔體37中,直到PDMS薄膜透鏡22a變形而隆起。(7) Injecting the liquid PDMS into the cavity 37: as shown in FIG. 3I, a cavity 37 is provided. The C-C cross-section of FIG. 3I is shown in FIG. 3J, and the cavity 37 has an accommodation space 371 therein. A fluid injection pipe 372 is formed on one side of the accommodating space 371, and the fluid injection pipe 372 is passed through one side wall of the cavity 37. After the completed PDMS film lens 22a is placed over the cavity 37, the left and right sides of the film lens 22a are fixed to the left and right side edges of the cavity 37, and baffles 35a and 35b are respectively attached to the front and rear sides of the film lens 22a. Next, a second light transmissive material 24a, such as a PDMS material, is injected into the cavity 37 via the fluid injection conduit 372 until the PDMS film lens 22a is deformed to swell.

在將薄膜透鏡22a放置於腔體37上方時,薄膜透鏡22a的下表面係面對該容置空間371,而其上表面背對該容置空間371。在本實施例中,容置空間371的寬度W2 係較佳地小 於薄膜透鏡22a之兩相對邊的距離D2 。流體注入管道372的開口可設在腔體37之一側壁的中央,這樣液態的第二透光材料24a才可均勻地分散在腔體37內。When the film lens 22a is placed over the cavity 37, the lower surface of the film lens 22a faces the accommodating space 371, and the upper surface thereof faces the accommodating space 371. In the present embodiment, the width W 2 of the accommodating space 371 is preferably smaller than the distance D 2 of the opposite sides of the film lens 22a. The opening of the fluid injection pipe 372 may be provided at the center of one of the side walls of the cavity 37 such that the liquid second light transmissive material 24a is uniformly dispersed in the cavity 37.

在本實施例中,擋板35a及35b面向腔體之一側的表面上各自設置有一阻擋塊352a及352b。阻擋塊352a及352b係為凸出於擋板35a及35b表面之彎曲條狀結構物。在薄膜透鏡22a變形而隆起的過程中,擋板35a及35b可防止液態的第二透光材料24a由腔體37的前後兩側溢出而無法持續將薄膜透鏡22a往上撐起。如圖3K所示,阻擋塊352a及352b除了可以防止第二透光材料24a溢出之外,亦可用以作為薄膜透鏡22a的變形停止位置,以防止薄膜透鏡22a的過度變形,進而定義出聚光薄膜20a的最後外型。例如,薄膜透鏡22a上的每個微結構頂點的連線大約會符合阻擋塊352a及352b的形狀。In the present embodiment, the surfaces of the shutters 35a and 35b facing one side of the cavity are each provided with a blocking block 352a and 352b. The blocking blocks 352a and 352b are curved strip structures projecting from the surfaces of the baffles 35a and 35b. During the deformation and bulging of the film lens 22a, the shutters 35a and 35b prevent the liquid second light-transmitting material 24a from overflowing from the front and rear sides of the cavity 37, and the film lens 22a cannot be continuously supported up. As shown in FIG. 3K, in addition to preventing the second light transmissive material 24a from overflowing, the blocking blocks 352a and 352b can also be used as a deformation stop position of the film lens 22a to prevent excessive deformation of the film lens 22a, thereby defining a condensed light. The final appearance of the film 20a. For example, the line connecting each of the microstructure vertices on the film lens 22a will approximately conform to the shape of the blocking blocks 352a and 352b.

PDMS薄膜透鏡22a變形後之結構將如同圖2A至2C所示的第一透光材料層22。最後,如圖3K所示,將腔體37及容置空間371內的第二透光材料24a,以及固定在腔體37邊緣的部份第一透光材料層22去除(虛線L以下的部分),則容置空間371上方(虛線L以上的部分)的第二透光材料24a與第一透光材料層22a,便會形成本發明之聚光薄膜20a。The deformed structure of the PDMS film lens 22a will be like the first light transmissive material layer 22 shown in Figs. 2A to 2C. Finally, as shown in FIG. 3K, the second light transmissive material 24a in the cavity 37 and the accommodating space 371, and a portion of the first light transmissive material layer 22 fixed to the edge of the cavity 37 are removed (the portion below the broken line L) The second light-transmitting material 24a and the first light-transmitting material layer 22a above the space 371 (the portion above the broken line L) form the light-concentrating film 20a of the present invention.

在圖2A至圖2C及圖3K所示的實施例中,聚光薄膜20及20a的第一透光材料層22及22a上表面的每個半圓柱體之間並無間距。然而,若對光阻圖案略作調整,使圖3C所示之每兩個長條形圖案32a形成一間距,則最後將會製得如圖4所示之聚光薄膜20b,其每個半圓柱體之間係具有一間距 D3In the embodiment shown in Figs. 2A to 2C and 3K, there is no space between each of the semi-cylindrical surfaces on the upper surfaces of the first light-transmitting material layers 22 and 22a of the light-concentrating films 20 and 20a. However, if the photoresist pattern is slightly adjusted so that each of the two elongated strip patterns 32a shown in FIG. 3C forms a pitch, the light-concentrating film 20b as shown in FIG. 4 will be finally produced, and each half thereof. The cylinders have a spacing D 3 between them .

在一實施例中,擋板35a及35b具有預定要成型的聚光薄膜20、20a或20b之側剖面形狀。在圖3I至圖3K所示的步驟中,當第一透光材料層22或薄膜透鏡22a被第二透光材料24a由下而上持續地撐起至符合預定的聚光薄膜側剖面形狀時,即可停止灌注第二透光材料24a。In an embodiment, the baffles 35a and 35b have a side cross-sectional shape of the light-concentrating film 20, 20a or 20b to be formed. In the steps shown in FIGS. 3I to 3K, when the first light transmissive material layer 22 or the film lens 22a is continuously supported from the bottom to the top by the second light transmissive material 24a until the predetermined light collecting film side sectional shape is satisfied Then, the second light transmissive material 24a can be stopped.

如圖5所示,其係為將本實施例的聚光薄膜應用於太陽能板上時,陽光在不同入射角下之平均光照值之光學模擬結果。圖5的橫軸為入射角,單位為「度」,且定義太陽於直射時的入射角為0度;縱軸為平均光照值,單位為「W/m2 」。藉由光學軟體,在相同的設定參數及條件下,針對相當於習知技術之單一層平行長柱狀微透鏡(如圖3H所示),與雙層微透鏡結構的聚光薄膜進行模擬(如圖2A所示),可以得到如圖5所示之結果,從圖中發現本發明的聚光薄膜在0°至85°之平均光照值皆比單一層平行長柱狀微透鏡有顯著增加,因此可知本發明之實施例的聚光薄膜不僅在直射光下光吸收率較高,並且也可提升太陽能板40對於側向光的吸收效率。As shown in FIG. 5, it is an optical simulation result of the average illumination value of sunlight at different incident angles when the concentrating film of the present embodiment is applied to a solar panel. The horizontal axis of Fig. 5 is the incident angle, the unit is "degree", and the incident angle when the sun is directly defined is 0 degrees; the vertical axis is the average illumination value, and the unit is "W/m 2 ". Simulating with a two-layer microlens structured concentrating film by an optical software under the same set parameters and conditions for a single layer parallel long cylindrical microlens (as shown in Fig. 3H) equivalent to the conventional technique ( As shown in FIG. 2A, the results shown in FIG. 5 can be obtained. It is found from the figure that the average illuminating value of the concentrating film of the present invention at 0° to 85° is significantly higher than that of the single layer parallel long columnar microlens. Therefore, it is understood that the light-concentrating film of the embodiment of the present invention not only has a high light absorption rate under direct light, but also enhances the absorption efficiency of the solar panel 40 for lateral light.

綜上所述,本發明提出新的製程方法,其所製造的聚光薄膜係適合裝設於太陽能板之(Solar panel)受光面,而可在光線85°至-85°(以0°為光線直射太陽能板之方向)時,達到高的光學吸收效率。本發明之特點在於雙層聚光薄膜不僅能讓直射光吸收效率高,也能讓其他角度之側向光線打入此雙層聚光薄膜內,進而折射傳遞到太陽能板上,使各角度之菲涅爾損失減少,而擁有比一般設計更佳的吸光效果。要進一步說明的是,在上述之具體實施例中雖以底面241為矩形之雙層 透鏡來加以例示說明,然而習於此藝者可以了解,第一透光材料層與第二透光材料層之尺寸與外形,係可以依據實際需求而進行變化與設計,因此本發明所保護之範圍並不局限於上述之特定具體例。In summary, the present invention proposes a new process method, which is made of a concentrating film which is suitable for being mounted on a solar panel (light panel), and can be lighted at 85° to -85° (at 0°). High light absorption efficiency is achieved when light is directed at the direction of the solar panel. The invention is characterized in that the double-layer concentrating film not only can make the direct light absorption efficiency high, but also can make the lateral light of other angles enter the double-layer concentrating film, and then the refracting is transmitted to the solar panel, so that the angles are Fresnel's loss is reduced, and it has better light absorption than the general design. It should be further noted that in the above specific embodiment, the bottom surface 241 is a double layer of a rectangle. The lens is exemplified, but it can be understood by those skilled in the art that the size and shape of the first light transmissive material layer and the second light transmissive material layer can be changed and designed according to actual needs, and thus the present invention protects The scope is not limited to the specific examples described above.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。另外本發明的任一實施例或申請專利範圍不須達成本發明所揭露之全部目的或優點或特點。此外,摘要部分和標題僅是用來輔助專利文件搜尋之用,並非用來限制本發明之權利範圍。The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent. In addition, any of the objects or advantages or features of the present invention are not required to be achieved by any embodiment or application of the invention. In addition, the abstract sections and headings are only used to assist in the search of patent documents and are not intended to limit the scope of the invention.

10‧‧‧習知的光學薄膜10‧‧‧Preventional optical film

12‧‧‧半球面透鏡12‧‧‧hemispherical lens

20、20a、20b‧‧‧聚光薄膜20, 20a, 20b‧‧‧ concentrating film

D3 ‧‧‧聚光薄膜20b的半圓柱體之間的間距D 3 ‧‧‧The spacing between the semi-cylindrical bodies of the concentrating film 20b

22‧‧‧第一透光材料層22‧‧‧First light transmissive material layer

22a‧‧‧薄膜透鏡22a‧‧‧film lens

D2 ‧‧‧薄膜透鏡之兩相對邊的距離D 2 ‧‧‧Distance of the opposite sides of the film lens

221‧‧‧第一透光材料層的上表面221‧‧‧The upper surface of the first light transmissive material layer

222‧‧‧第一透光材料層的微結構222‧‧‧Microstructure of the first light transmissive material layer

W1 ‧‧‧第一透光材料層的半圓柱體之寬度W 1 ‧‧‧The width of the semi-cylindrical layer of the first light transmissive material layer

223‧‧‧第一透光材料層的下表面223‧‧‧The lower surface of the first light transmissive material layer

24‧‧‧第二透光材料層24‧‧‧Second light transmissive material layer

24a‧‧‧第二透光材料24a‧‧‧Second light-transmitting material

241‧‧‧第二透光材料層的平面241‧‧‧The plane of the second layer of light transmissive material

243‧‧‧第二透光材料層的弧面243‧‧‧The curved surface of the second layer of light transmissive material

242、244‧‧‧弧面的側邊242, 244‧‧‧ sides of the curved surface

H1 ‧‧‧弧面與平面之間的間距H 1 ‧‧‧ spacing between the curved surface and the plane

30‧‧‧基材30‧‧‧Substrate

32‧‧‧光阻32‧‧‧Light resistance

32A‧‧‧光阻層32A‧‧‧ photoresist layer

32a‧‧‧長條形圖案32a‧‧‧ long strip pattern

32b‧‧‧光阻材料形成的半圓柱體32b‧‧‧Semi-cylinder formed by photoresist material

34‧‧‧光罩34‧‧‧Photomask

35a、35b‧‧‧擋板35a, 35b‧‧ ‧ baffle

36‧‧‧光阻圖案36‧‧‧resist pattern

37‧‧‧腔體37‧‧‧ cavity

371‧‧‧腔體的容置空間371‧‧‧ accommodating space of the cavity

372‧‧‧流體注入管道372‧‧‧ fluid injection pipeline

W2 ‧‧‧容置空間的寬度W 2 ‧‧‧ Width of the accommodation space

38‧‧‧微結構陣列38‧‧‧Microstructure Array

39‧‧‧凹模39‧‧‧ concave die

40‧‧‧太陽能板40‧‧‧ solar panels

圖1係為習知具有微透鏡陣列的光學薄膜示意圖。1 is a schematic view of an optical film having a microlens array.

圖2A至圖2C本發明之一實施例的聚光薄膜示意圖。2A to 2C are schematic views of a light collecting film according to an embodiment of the present invention.

圖3A至圖3K本發明之一實施例的聚光薄膜之製造方法示意圖。3A to 3K are schematic views showing a method of manufacturing a light-concentrating film according to an embodiment of the present invention.

圖4本發明之另一實施例的聚光薄膜示意圖。4 is a schematic view of a light collecting film according to another embodiment of the present invention.

圖5本發明之一實施例的聚光薄膜在不同光入射角下之平均光照值之光學模擬結果。Figure 5 is an optical simulation result of the average illumination value of the concentrating film of an embodiment of the present invention at different light incident angles.

20‧‧‧聚光薄膜20‧‧‧Concentrating film

22‧‧‧第一透光材料層22‧‧‧First light transmissive material layer

221‧‧‧第一透光材料層的上表面221‧‧‧The upper surface of the first light transmissive material layer

222‧‧‧第一透光材料層的微結構222‧‧‧Microstructure of the first light transmissive material layer

223‧‧‧第一透光材料層的下表面223‧‧‧The lower surface of the first light transmissive material layer

24‧‧‧第二透光材料層24‧‧‧Second light transmissive material layer

241‧‧‧第二透光材料層的平面241‧‧‧The plane of the second layer of light transmissive material

243‧‧‧第二透光材料層的弧面243‧‧‧The curved surface of the second layer of light transmissive material

242、244‧‧‧弧面的兩側邊242, 244‧‧‧ sides of the curved surface

40‧‧‧太陽能板40‧‧‧ solar panels

Claims (8)

一種聚光薄膜的製造方法,其包括:提供一基材;於該基材之表面形成一光阻層;對該光阻層施以一圖案化步驟以定義出一光阻圖案;對該光阻圖案施以一熱熔步驟,以使該光阻圖案形成一微結構陣列;在該微結構陣列上形成一凹模,使該凹模之表面形狀與該微結構陣列之表面形狀能互相契合;將該凹模從該微結構陣列上剝離;形成一第一透光材料層於該凹模上;將該第一透光材料層從該凹模上剝離,其中該第一透光材料層具有一上表面、一下表面及兩相對邊,該下表面位於該上表面的相反側,其中該上表面的結構係與該微結構陣列相同;提供一腔體,該腔體具有一容置空間,並將該第一透光材料層的該兩相對邊固定於該腔體上,使該下表面係面對該容置空間,而該上表面背對該容置空間;將一第二透光材料注入該容置空間中,直至該第一透光材料層變形而隆起;以及將該腔體及該容置空間內的該第二透光材料去除,則該容置空間上方的該第二透光材料與該第一透光材料層形成一聚光薄膜。 A method for fabricating a concentrating film, comprising: providing a substrate; forming a photoresist layer on a surface of the substrate; applying a patterning step to the photoresist layer to define a photoresist pattern; The resist pattern is subjected to a hot melting step to form the photoresist pattern into a microstructure array; a concave mold is formed on the microstructure array, so that the surface shape of the concave mold and the surface shape of the microstructure array can match each other Stripping the die from the microstructure array; forming a first light transmissive material layer on the die; peeling the first light transmissive material layer from the die, wherein the first light transmissive material layer Having an upper surface, a lower surface and opposite sides, the lower surface is located on the opposite side of the upper surface, wherein the upper surface has the same structure as the microstructure array; and a cavity is provided, the cavity has a receiving space And fixing the opposite sides of the first light transmissive material layer to the cavity such that the lower surface faces the accommodating space, and the upper surface faces away from the accommodating space; Injecting the light material into the accommodating space until the first light transmissive material The layer is deformed and embossed; and the second light transmissive material in the accommodating space is removed, and the second light transmissive material above the accommodating space forms a condensed light with the first light transmissive material layer film. 如申請專利範圍第1項所述之聚光薄膜的製造方法,其中該光阻圖案包括複數個相互平行的長條形圖案,並且該複數長條形圖案經由該熱熔步驟而轉變成複數半圓柱體,該複數半圓柱體形成該微結構陣列,並且,在該微結構陣列上形成該凹模之步驟包括:將液態的聚雙甲基矽氧烷(Poly-dimethylsiloxane,PDMS)材料灌注於該微結構陣列上,待其固化而形成該凹模。 The method of manufacturing a concentrating film according to claim 1, wherein the photoresist pattern comprises a plurality of mutually parallel strip-shaped patterns, and the plurality of strip-shaped patterns are converted into a plurality of half by the hot-melting step. a cylinder, the plurality of semi-cylinders forming the microstructure array, and the step of forming the die on the microstructure array comprises: pouring a liquid poly-dimethylsiloxane (PDMS) material into the liquid The microstructure is formed on the microstructure array to be cured. 如申請專利範圍第1項所述之聚光薄膜的製造方法,其中形成該第一透光材料層於該凹模上之步驟包括:提供一透光率大於95%的液態材料;將該液態材料澆鑄(casting)於該凹模上;以及將該凹模上的該液態材料烘乾使其固化而形成該第一透光材料層。 The method for producing a concentrating film according to claim 1, wherein the step of forming the first light transmissive material layer on the concave mold comprises: providing a liquid material having a light transmittance greater than 95%; A material is cast on the die; and the liquid material on the die is dried to cure to form the first layer of light transmissive material. 如申請專利範圍第1項所述之聚光薄膜的製造方法,其中形成該第一透光材料層於該凹模上之步驟包括:提供一液態的聚雙甲基矽氧烷材料;將該聚雙甲基矽氧烷材料澆鑄(casting)於該凹模上;以及將該凹模上的該聚雙甲基矽氧烷材料烘乾使其固化而形成該第一透光材料層。 The method for producing a concentrating film according to claim 1, wherein the step of forming the first light transmissive material layer on the concave mold comprises: providing a liquid polydimethyl methoxy siloxane material; A polybismethyl siloxane material is cast on the die; and the polybismethyl siloxane material on the die is dried to cure to form the first light transmissive material layer. 如申請專利範圍第1項所述之聚光薄膜的製造方法,其中提供該腔體之步驟包括:使該容置空間的寬度小於該第一透光材料層之該兩相對邊的距離;以及 在該容置空間之一側開設一流體注入管道,該流體注入管道貫穿至該腔體之外部。 The method for manufacturing a concentrating film according to claim 1, wherein the step of providing the cavity comprises: making a width of the accommodating space smaller than a distance between the opposite sides of the first transparent material layer; A fluid injection pipe is opened on one side of the accommodating space, and the fluid injection pipe penetrates to the outside of the cavity. 如申請專利範圍第5項所述之聚光薄膜的製造方法,其中該第二透光材料係為一液態的聚雙甲基矽氧烷材料。 The method for producing a light-concentrating film according to claim 5, wherein the second light-transmitting material is a liquid polydimethylsiloxane. 如申請專利範圍第1項所述之聚光薄膜的製造方法,其中提供該腔體之步驟包括:提供兩擋板,並將該兩擋板分別設置在該腔體之兩相對側壁的上緣,並使其分別對應該第一透光材料層的另兩相對邊。 The method for manufacturing a concentrating film according to claim 1, wherein the step of providing the cavity comprises: providing two baffles, and respectively arranging the baffles on upper edges of opposite sidewalls of the cavity And corresponding to the other two opposite sides of the first light transmissive material layer. 如申請專利範圍第7項所述之聚光薄膜的製造方法,其中提供該腔體之步驟包括:在每一該擋板面向該腔體之一側表面上設置一阻擋塊,並利用該阻擋塊的形狀來定義該聚光薄膜的外型。The method of manufacturing a concentrating film according to claim 7, wherein the step of providing the cavity comprises: providing a blocking block on a side surface of each of the baffles facing the cavity, and using the blocking The shape of the block defines the appearance of the concentrating film.
TW101122391A 2012-06-22 2012-06-22 Structure and fabricating method of a light-concentraing film applied to a solar panel TWI462317B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110226433A (en) * 2019-07-12 2019-09-13 苏州洛瑞卡新材料科技有限公司 A kind of optically focused film

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM343170U (en) * 2008-02-29 2008-10-21 Prodisc Technology Inc Fresnel lens light gathering structure
TWM410863U (en) * 2011-02-01 2011-09-01 Simple Energy Corp Precision type micro-optical device and solar panel structure thereof
TWM416734U (en) * 2011-06-13 2011-11-21 Simple Energy Corp Light reception film and photoelectric conversion device and lighting module thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM343170U (en) * 2008-02-29 2008-10-21 Prodisc Technology Inc Fresnel lens light gathering structure
TWM410863U (en) * 2011-02-01 2011-09-01 Simple Energy Corp Precision type micro-optical device and solar panel structure thereof
TWM416734U (en) * 2011-06-13 2011-11-21 Simple Energy Corp Light reception film and photoelectric conversion device and lighting module thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110226433A (en) * 2019-07-12 2019-09-13 苏州洛瑞卡新材料科技有限公司 A kind of optically focused film

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