TWI452339B - Beam expander positioning mechanism and the optical system using the same - Google Patents

Description

Beam expander positioning mechanism and optical system using the same

The present invention relates to a beam expander positioning mechanism and an optical system using the same.

With the rapid development of technology, laser application technology has been greatly developed. Various laser application equipment (marking, welding, punching, cutting, etc.) have entered the industrial fields such as electronics, machinery manufacturing, steel, metallurgy, petroleum, etc., providing advanced technical equipment for technological transformation and manufacturing of traditional industries.

In laser applications, light stability and the size of the focus have a decisive influence on the effect of use. A beam expander is a lens element that changes the diameter and divergence of the laser beam. The laser beam emitted from the laser source has a divergence angle, and the divergence angle of the beam expander can compress the divergence angle to make the laser beam into a parallel beam, and then obtain a high-power, high-density fine spot through the focusing mirror. In order to ensure that the light exit of the laser is aligned with the entrance of the beam expander, a positioning mechanism is generally installed on the beam expander. However, the conventional positioning mechanism can only adjust the plane position of the beam expander and is difficult at the same time. Adjust the angle of the beam expander relative to the laser.

In view of the above, it is necessary to provide a beam expander positioning mechanism that can adjust the plane position and the rotation angle of the beam expander and an optical system using the same.

A beam expander positioning mechanism, comprising a fixing plate, a positioning plate and a fixing plate and positioning a connecting sleeve connected between the plates and the beam expanding mirror, a positioning sleeve sleeved on the connecting sleeve and fixedly connected with the positioning plate, a support member and a second adjusting member. The positioning sleeve is provided with a first adjusting member for adjusting the relative position of the connecting sleeve and the positioning sleeve. The two ends of the support member are partially spherical, and the fixing plate and the positioning plate are respectively formed with a part of spherical recesses which are opposite to the two ends of the support member, and the support member is disposed at a corner between the fixed plate and the positioning plate. The second adjusting member is disposed between the fixing plate and the positioning plate, and the angle formed by the plane of the fixing plate and the plane of the positioning plate is changed by adjusting the position of the second adjusting member relative to the fixing plate and the positioning plate.

An optical system includes a base, a laser disposed on the base, a beam expander, a focusing mirror, and a beam expander positioning mechanism between the laser and the beam expander. The beam expander positioning mechanism comprises a fixing plate, a positioning plate, a connecting sleeve disposed between the fixing plate and the positioning plate and connected to the beam expanding mirror, and a positioning sleeve sleeved on the connecting sleeve and fixedly connected with the positioning plate . The positioning sleeve is provided with a first adjusting member for adjusting the relative position of the connecting sleeve and the positioning sleeve. The beam expander positioning mechanism further includes a support member and a second adjustment member. The support member is disposed at a corner between the fixed plate and the positioning plate. The second adjusting member is disposed between the fixing plate and the positioning plate. The angle formed by the plane of the fixing plate and the plane of the positioning plate is changed by adjusting the position of the second adjusting member relative to the fixing plate and the positioning plate.

By adjusting the first adjusting member and the second adjusting member of the beam expanding mirror positioning mechanism, the plane position and the rotation angle of the connecting sleeve and the beam expanding mirror connected to the connecting sleeve can be simultaneously adjusted, which is convenient to use.

100‧‧‧Optical system

10‧‧‧ fixed board

20‧‧‧ Positioning board

11‧‧‧ first through hole

25‧‧‧Second through hole

41‧‧‧ third through hole

13‧‧‧ first pit

28‧‧‧Second pit

15‧‧‧First threaded hole

27‧‧‧Second threaded hole

17‧‧‧Resistance slot

21, 31‧‧‧ mounting holes

23‧‧‧four-hole

29‧‧‧ Screw

30‧‧‧Connecting sleeve

33‧‧‧ accommodating slots

35‧‧‧ sealing ring

40‧‧‧ positioning sleeve

43‧‧‧ Third threaded hole

45‧‧‧Threaded through hole

50‧‧‧First adjustment piece

51‧‧‧Rotation

53. 73‧‧‧Responsible Department

60‧‧‧Support

70‧‧‧Second adjustment

71‧‧‧First threaded part

81‧‧‧Second thread

80‧‧‧Clamping parts

83‧‧‧stops

90‧‧‧Flexible parts

101‧‧‧Base

102‧‧‧Laser

103‧‧‧beam expander

104‧‧‧ Focusing mirror

200‧‧‧beam expander positioning mechanism

411‧‧‧Steps

1 is a perspective view of an optical system according to an embodiment of the present invention, the optical system including a beam expander positioning mechanism.

2 is an enlarged perspective view showing the positioning mechanism of the beam expanding mirror shown in FIG. 1.

3 is a perspective exploded view of the beam expander positioning mechanism shown in FIG. 2.

Figure 4 is a schematic cross-sectional view taken along line IV-IV of Figure 2.

Figure 5 is a schematic cross-sectional view taken along line V-V of Figure 2.

The beam expander positioning mechanism and optical system of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

Referring to FIG. 1 , an optical system 100 according to an embodiment of the present invention includes a susceptor 101 and a laser 102 , a beam expander 103 , and a focusing mirror 104 disposed on the susceptor 101 . In use, the diameter of the laser beam emitted by the laser 102 is expanded by the beam expander 103, and then concentrated by the focusing mirror 104 to form a spot having a relatively small diameter and relatively concentrated energy to achieve welding and cutting. , marking, punching, etc. In order to adjust the position of the beam expander 103 relative to the laser 102 so that the light entrance port is aligned with the light exit port of the laser device 102, the optical system 100 further includes an extension between the laser device 102 and the beam expander 103. Beam mirror positioning mechanism 200.

Referring to FIG. 2 and FIG. 3 , the beam expander positioning mechanism 200 includes a fixing plate 10 , a positioning plate 20 , a connecting sleeve 30 , a positioning sleeve 40 , four first adjusting members 50 , a supporting member 60 , and Three second adjustment members 70. The connecting sleeve 30, the positioning sleeve 40, the first adjusting member 50, the supporting member 60 and the second adjusting member 70 are located between the fixing plate 10 and the positioning plate 20.

The fixing plate 10 is substantially a square plate which can be fixedly connected to the laser 102 by screws (not shown). A circular first through hole 11 is defined in the fixing plate 10. A first recess 13 is defined in the end of the fixing plate 10 near the leftmost corner of the four corners. The shape of the first pit 13 is substantially partial spherical (see also FIG. 5). Fixing plate 10 close to other triangles A first threaded hole 15 is defined in each end portion. A circular abutting groove 17 is also formed beside each of the first threaded holes 15.

The shape of the positioning plate 20 is substantially the same as that of the fixed plate 10. A mounting hole 21 for mounting the beam expander 103 is opened on the positioning plate 20. To facilitate the mounting of the beam expander 103, the mounting aperture 21 has a generally inverted cross-section (see Figure 4). A four-way hole 23 is defined in the positioning plate 20 around the mounting hole 21. Three second through holes 25 are defined in the portion of the positioning plate 20 corresponding to the first threaded holes 15 of the fixing plate 10, and three second threaded holes 27 are defined in the portions corresponding to the three resisting grooves 17 of the fixing plate 10. A portion of the bottom surface of the positioning plate 20 corresponding to the first recess 13 of the fixing plate 10 is further provided with a substantially partially spherical second recess 28 (see also FIG. 5).

The connecting sleeve 30 is substantially a hollow cylinder having a mounting hole 31 that cooperates with the beam expander 103. An annular receiving groove 33 is further formed on the top surface of the connecting sleeve 30 near the edge thereof. In order to prevent dust from entering the lens of the beam expander 103, the beam expander positioning mechanism 200 further includes a seal ring 35 between the connection sleeve 30 and the positioning plate 20. The sealing ring 35 can be received in the accommodating groove 33. In the present embodiment, the seal ring 35 is an O-ring. In order to facilitate the movement of the beam expander 103, the connecting sleeve 30 is made of a light-weight aluminum alloy material. In order to reduce the leakage of the laser radiation, the connecting sleeve 30 is anodized and the color is black.

The positioning sleeve 40 is substantially a hollow cylinder having a diameter smaller than the diameter of the first through hole 11 of the fixing plate 10 and thus partially accommodated in the first through hole 11. The positioning sleeve 40 is provided with a third through hole 41 for receiving the connecting sleeve 30. The diameter of the third through hole 41 is larger than the diameter of the connecting sleeve 30 so that the connecting sleeve 30 can move radially within the third through hole 41. A step portion 411 through which the connection sleeve 30 passes is further provided on the side wall of the third through hole 41. A third threaded hole 43 is defined in a portion of the top surface of the positioning sleeve 40 corresponding to the four through holes 23 of the positioning plate 20. The beam expander positioning mechanism 200 also includes four screws 29. Four screws 29 can be used The four through holes 23 of the positioning plate 20 are passed through the four through holes 23 of the positioning plate 20 to fix the positioning sleeve 40 to the positioning plate 20. Two opposite threaded through holes 45 are also formed in the side wall of the positioning sleeve 40. The connecting line of the two opposite threaded through holes 45 is parallel to the X-axis direction of the drawing, and the connecting line of the other two threaded through holes 45 is parallel to the Y-axis direction of the drawing.

The first adjusting member 50 includes a disk-shaped rotating portion 51 and a threaded abutting portion 53 connected to the rotating portion 51. The abutting portion 53 can pass through the threaded through hole 45 into the third through hole 41.

The support member 60 is substantially cylindrical, and its both ends are substantially spherical in shape to facilitate the swinging. Referring to FIG. 5 together, the supporting member 60 is disposed between the fixing plate 10 and the positioning plate 20, and the two ends thereof respectively abut against the first recess 13 of the fixing plate 10 and the second recess 28 of the positioning plate 20.

The second adjusting member 70 is substantially in the shape of a rod and includes a first threaded portion 71 and a resisting portion 73 connected to the first threaded portion 71. The first threaded portion 71 is rotatable about the second threaded hole 27 of the positioning plate 20. The abutting portion 73 can abut against the abutting groove 17 of the fixing plate 10. When the resisting portion 73 abuts against the resisting groove 17 , the second adjusting member 70 is rotated to adjust the depth of the first threaded portion 71 in the second threaded hole 27 , thereby adjusting the second adjusting member 70 to be located on the fixing plate 10 and the positioning plate 20 . The height between them adjusts the angle formed between the plane of the fixing plate 10 and the plane of the positioning plate 20.

To enhance the adjustment stability between the fixed plate 10 and the positioning plate 20, the beam expander positioning mechanism 200 further includes three clamping members 80 and three elastic members 90. The holding member 80 includes a rod-shaped second threaded portion 81 and a cylindrical stopper portion 83 at one end of the second threaded portion 81. The diameter of the stopper portion 83 is larger than the diameter of the second thread portion 81. The second threaded portion 81 of the clamping member 80 can pass through the second through hole 25 of the positioning plate 20 and be screwed with the first threaded hole 15 of the fixing plate 10. The elastic member 90 can be sleeved on the second threaded portion 81 and abuts against the stopper portion 83.

Referring to FIG. 3 to FIG. 5 together, when assembling, the connecting sleeve 30 first enters the third through hole 41 of the positioning sleeve 40 and abuts against the step portion 411 in the third through hole 41. The abutting portions 53 of the four first adjusting members 50 respectively enter the four-threaded through holes 45 from the four directions to abut against the side walls of the connecting sleeve 30. Thereby, the connecting sleeve 30 is fixed relative to the positioning sleeve 40. After the sealing ring 35 enters the receiving groove 33 of the connecting sleeve 30, the positioning sleeve 40 is fixed to the positioning plate 20 together with the connecting sleeve 30 by the four screws 29. The first threaded portions 71 of the third second adjusting members 70 respectively enter the third threaded holes 27 of the positioning plate 20. The positioning plate 20 is placed above the fixing plate 10, and the two ends of the supporting member 60 are respectively abutted against the first recess 13 of the fixing plate 10 and the second recess 28 of the positioning plate 20, and the three second adjusting members 70 are abutted. The holding portions 73 respectively abut against the three resisting grooves 17 of the fixing plate 10. At this time, the support member 60 and the three second adjustment members 70 are respectively located at the four corners of the fixed plate 10. The second threaded portion 81 of the last clamping member 80 passes through the elastic member 90 and the second through hole 25 of the positioning plate 20 in sequence, and is screwed with the first threaded hole 15 of the fixing plate 10. At this time, the one end of the elastic member 90 is abutted against the positioning plate 20, and the other end is abutted against the stopper portion 83. The beam expander positioning mechanism 200 is assembled.

The beam expander positioning mechanism 200 can be mounted on the laser 102 by the fixing plate 10 and connected to the beam expanding mirror 103 through the mounting hole 21, and the axis of the connecting sleeve 30 coincides with the axis of the beam expanding mirror 103. . During use, when the beam emitted by the laser 102 is parallel to the axis of the beam expander 103 but does not coincide, the four first adjusting members 50 can be rotated to adjust the connecting sleeve 30 relative to the positioning sleeve in the XY coordinate plane. The position of the barrel 40 is such that the axis of the beam expander 103 translates to coincide with the laser beam. When the beam emitted by the laser 102 intersects the axis of the beam expander 103 and is at an angle, the third adjusting member 70 can be rotated to adjust the angle between the plane of the positioning plate 20 and the plane of the fixing plate 10. Further, the axis of the beam expander 103 is rotated by a certain angle and then coincides with the laser beam. When the beam emitted by the laser 102 is not parallel to the axis of the beam expander 103 and is not coplanar, the first adjusting member 50 and the second adjusting member 70 can be simultaneously adjusted to make the beam expanding mirror 103 The axis coincides with the laser beam.

The beam expander positioning mechanism 200 of the embodiment of the present invention has a simple structure and is easy to install, and can simultaneously adjust the plane position and the rotation angle of the beam expander 103, and is convenient to use. If the first adjustment member 50 and the second adjustment member 70 are driven by a servo motor, it is also possible to automatically adjust the focus.

It can be understood that the sealing ring 35, the clamping member 80, and the elastic member 90 can also be omitted. The number of the first adjusting members 50 may also be one. In this case, a spring opposite to the position of the first adjusting member 50 may be added between the connecting sleeve 30 and the positioning sleeve 40. Of course, the number of the first adjusting members 50 may also be two, three or more. The shape of the support member 60 may be a prism or a pyramid, and the first recess 13 and the second recess 28 may be omitted.

The second threaded hole 27 can also be disposed on the fixing plate 10, and the abutting portion 73 of the second adjusting member 70 will abut against the positioning plate 20. If the fixing plate 10 and the positioning plate 20 are simultaneously provided with the screw holes with opposite rotation directions, and the abutting portion 73 of the second adjusting member 70 is also provided with the same thread as the first thread portion 71, then the second rotation is performed at this time. The adjustment member 70 can also change its height between the fixed plate 10 and the positioning plate 20. If the second adjusting member 70 is an element whose height can be changed by a cylinder or the like, the second threaded hole 27 may be omitted. If the height of the second adjusting member 70 is fixed, the angle formed by the plane of the positioning plate 20 and the plane of the fixing plate 10 can be changed by adjusting the distance between the second adjusting member 70 and the supporting member 60.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

10‧‧‧ fixed board

20‧‧‧ Positioning board

29‧‧‧ Screw

50‧‧‧First adjustment piece

60‧‧‧Support

70‧‧‧Second adjustment

80‧‧‧Clamping parts

90‧‧‧Flexible parts

200‧‧‧beam expander positioning mechanism

Claims (17)

A beam expander positioning mechanism includes a fixing plate, a positioning plate, and a connecting sleeve disposed between the fixing plate and the positioning plate and connected to the beam expanding mirror. The improvement is that the beam expanding mirror positioning mechanism further comprises a sleeve a positioning sleeve fixed on the connecting sleeve and connected to the positioning plate, the positioning sleeve is provided with a first adjusting member for adjusting a position of the connecting sleeve and the positioning sleeve, the beam expanding mirror positioning mechanism further The support member and the second adjusting member are partially spherical in shape, and the fixing plate and the positioning plate are respectively formed with a partial spherical recess corresponding to the two ends of the supporting member, and the supporting member is disposed on the fixing An angle between the plate and the positioning plate, the second adjusting member is disposed between the fixing plate and the positioning plate, and the fixing plate is changed by adjusting a position of the second adjusting member relative to the fixing plate and the positioning plate. The angle between the plane and the plane where the positioning plate is located. The beam expander positioning mechanism of claim 1, wherein the second adjusting member has a threaded portion, and at least one of the fixing plate and the positioning plate is provided with a threaded hole, and the threaded portion cooperates with the threaded hole. To change the height of the second adjusting member between the fixing plate and the positioning plate. The beam expander positioning mechanism of claim 2, wherein the second adjusting member and the supporting member are respectively located at two ends of the fixing plate. The beam expander positioning mechanism of claim 1, wherein the positioning sleeve is provided with a threaded through hole, and the first adjusting member comprises a threaded abutting portion, and the resisting portion passes through the threaded passage. The hole is in contact with the connecting sleeve. The beam expander positioning mechanism of claim 4, wherein the number of the threaded through holes and the first adjusting member is four, and the four threaded through holes are opposite to each other and between the opposite two through holes. The lines are perpendicular to each other. The beam expander positioning mechanism according to claim 1, wherein the beam expander positioning mechanism further The pressing member and the elastic member are respectively fixed through the elastic member and the positioning plate opposite to the elastic member, and are fixed to the fixing plate, and the other end of the pressing member is abutted against the elastic member. The beam expander positioning mechanism of claim 1, wherein the connecting sleeve and the positioning plate are further provided with a receiving groove, and the beam expanding mirror positioning mechanism further comprises a receiving groove. And a sealing ring between the connecting sleeve and the positioning plate. The beam expander positioning mechanism according to claim 1, wherein the connecting sleeve is made of an aluminum alloy material, and the connecting sleeve is black in color. An optical system comprising a base, a laser, a beam expander, a focusing mirror and a beam expander positioning mechanism between the laser and the beam expander, wherein the improvement is: The beam expander positioning mechanism includes a fixing plate fixedly connected to the laser, a positioning plate, a connecting sleeve disposed between the fixing plate and the positioning plate and connected to the beam expanding mirror, and sleeved on the connecting sleeve a positioning sleeve fixedly connected to the positioning plate, the positioning sleeve is provided with a first adjusting member for adjusting a position of the connecting sleeve and the positioning sleeve, the beam expanding mirror positioning mechanism further comprises a supporting member and a first The adjusting member is disposed at a corner between the fixing plate and the positioning plate, and the second adjusting member is movably disposed between the fixing plate and the positioning plate, by adjusting the second adjusting member relative to the fixing The position of the plate and the positioning plate changes the angle formed by the plane of the fixing plate and the plane of the positioning plate. The optical system of claim 9, wherein the second adjusting member has a threaded portion, and at least one of the fixing plate and the positioning plate is provided with a threaded hole, and the threaded portion cooperates with the threaded hole to change the The second adjusting member is located at a height between the fixing plate and the positioning plate. The optical system of claim 10, wherein the second adjusting member and the supporting member are respectively located at opposite ends of the fixing plate. The optical system of claim 9, wherein the two ends of the support member are partially spherical, and the fixing plate and the positioning plate are respectively formed with a partial spherical recess that abuts against both ends of the support member. The optical system of claim 9, wherein the positioning sleeve is provided with a threaded through hole, the first adjusting member comprises a threaded abutting portion, the abutting portion passes through the threaded through hole and The connecting sleeve is offset. The optical system of claim 13, wherein the number of the threaded through holes and the first adjusting member is four, and the four threaded through holes are opposite to each other and the connecting lines between the opposite two through holes are mutually vertical. The optical system of claim 9, wherein the beam expander positioning mechanism further comprises a pressing member and an elastic member, the pressing member sequentially passing through the elastic member and the positioning plate opposite to the elastic member. Thereafter, it is fixed to the fixing plate, and the other end of the pressing member is abutted against the elastic member. The optical system of claim 9, wherein the connecting sleeve and the positioning plate are further provided with a receiving groove, wherein the beam expanding mirror positioning mechanism further comprises a receiving slot disposed in the receiving slot. A sealing ring connecting the sleeve and the positioning plate. The optical system of claim 9, wherein the connecting sleeve is made of an aluminum alloy material, and the connecting sleeve is black in color.