CN219417835U - Beam expanding device for optical equipment - Google Patents
Beam expanding device for optical equipment Download PDFInfo
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- CN219417835U CN219417835U CN202320186981.8U CN202320186981U CN219417835U CN 219417835 U CN219417835 U CN 219417835U CN 202320186981 U CN202320186981 U CN 202320186981U CN 219417835 U CN219417835 U CN 219417835U
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- small hole
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- reference block
- emergent
- aperture
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Abstract
An object of an embodiment of the present application is to provide a beam expanding device for an optical apparatus. The beam expanding device of the embodiment of the application comprises: the device comprises an incidence mirror mounting frame, an assembly plate, a small hole seat, a small hole adjusting seat, an adjusting seat mounting frame, an emergent fixing plate, an emergent adjusting plate, a movable reference block, a Y-direction reference block, a plurality of ball head jackscrews and a primary support; wherein the incident mirror mounting frame is fixed on the assembly plate; wherein the exit adjustment plate is fixed on the exit fixing plate; the emergent fixing plate, the movable reference block and the Y-direction reference block are fixed on the primary support; wherein, stick on the fixed plate of the said outgoing and have flat gasket, awl gasket and V type gasket. The embodiment of the application has the following advantages: the structure is firm and reliable, and the position of the incident lens, the small hole and the emergent lens, which are caused by the spring structure, can be prevented from being changed after transportation or vibration; the multi-degree-of-freedom posture adjustment can be performed on the incident lens, the small hole and the emergent lens.
Description
Technical Field
The utility model relates to the field of optical equipment, in particular to a beam expanding device for optical equipment.
Background
Ellipsometers are widely used for measuring the thickness of semiconductor films, and the core component of the ellipsometer comprises a beam expanding device. The beam expander includes incident lens, small hole and emergent lens, and the incident lens, small hole and emergent lens need high optical alignment precision and alignment between the three in compact space.
However, the adjusting mechanism of the beam expander according to the prior art is generally provided with a spring, and the positions of the incident lens, the aperture and the exit lens are easy to change and the stability is poor when the beam expander is transported or vibrated.
Disclosure of Invention
An object of an embodiment of the present application is to provide a beam expanding device for an optical apparatus.
An embodiment of the present application provides a beam expanding device for an optical apparatus, including:
the device comprises an incidence mirror mounting frame, an assembly plate, a small hole seat, a small hole adjusting seat, an adjusting seat mounting frame, an emergent fixing plate, an emergent adjusting plate, a movable reference block, a Y-direction reference block, a plurality of ball head jackscrews and a primary support;
wherein the incident mirror mounting frame is fixed on the assembly plate;
wherein the exit adjustment plate is fixed on the exit fixing plate;
the emergent fixing plate, the movable reference block and the Y-direction reference block are fixed on the primary support;
wherein, stick on the fixed plate of the said outgoing and have flat gasket, awl gasket and V type gasket.
According to one embodiment, the exit adjustment plate is used for installing the exit lens and adjusting the position of the exit lens.
According to one embodiment, the movable reference block is provided with at least one ball-head jackscrew. The Y-direction reference block is provided with a screw, so that the light-emitting fixing plate is movable.
According to one embodiment, the small hole seat is used for placing small holes, and the small holes are glued on the small hole seat; the small hole adjusting seat is used for adjusting the position of the small hole, the small hole adjusting seat is fixed through a plurality of ball head jackscrews, and the position of the small hole seat can be moved through the plurality of ball head jackscrews
According to one embodiment, the adjusting seat mounting frame is used for mounting the small hole adjusting seat, and the position of the small hole is moved through sliding fit of the small hole adjusting seat and the shaft hole of the adjusting seat mounting frame.
According to one embodiment, the adjusting seat mounting frame is used for mounting the small hole adjusting seat, and the small hole is moved by guiding the small hole adjusting seat in a matched manner with the shaft hole of the adjusting seat mounting frame.
Compared with the prior art, the embodiment of the application has the following advantages: the beam expanding device has a firm and reliable structure, and can avoid the change of the positions of the incident lens, the small hole and the emergent lens caused by the spring structure after transportation or vibration; according to the beam expander, the multiple degrees of freedom of the attitude of the incident lens, the aperture and the emergent lens can be adjusted, and the incident lens, the aperture and the emergent lens are locked and fixed after the attitude adjustment is finished, so that the stability of the structure of the beam expander is further improved; the beam expanding device is compact in structure and saves the occupied space of equipment.
Drawings
Other features, objects and advantages of the present utility model will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the accompanying drawings in which:
FIG. 1 illustrates a schematic diagram of an exemplary beam expanding device according to an embodiment of the present application;
fig. 2 shows a schematic structural diagram of an exemplary beam expanding device according to an embodiment of the present application.
The same or similar reference numbers in the drawings refer to the same or similar parts.
Detailed Description
The beam expanding device for the optical equipment comprises an incidence mirror mounting frame, an assembly plate, a small hole seat, a small hole adjusting seat, an adjusting seat mounting frame, an emergent fixing plate, an emergent adjusting plate, a movable reference block, a Y-direction reference block, a plurality of ball head jackscrews, a primary support and a flat gasket.
Wherein the optical device includes, but is not limited to, an ellipsometer.
The incidence lens mounting rack is used for mounting an incidence lens.
The incident mirror mounting frame is fixed on the assembly plate. Preferably, the mirror mount is screwed to the assembly plate.
The emergent adjusting plate is used for installing the emergent lens and adjusting the position of the emergent lens. The outgoing lens can be adjusted in multiple degrees of freedom through the outgoing adjusting plate.
Wherein the exit adjustment plate is fixed on the exit fixing plate.
The emergent fixing plate is used for fixing the emergent lens.
Wherein, stick on the fixed plate of the said outgoing and have flat gasket, awl gasket and V type gasket.
The emergent fixing plate, the movable reference block and the Y-direction reference block are fixed on the primary support. Wherein the Y direction is a translation direction.
Preferably, the outgoing fixing plate, the movable reference block and the Y-direction reference block are fixed on the primary support through screws.
Wherein, be equipped with at least one bulb jackscrew on the removal reference piece. The Y-direction reference block is provided with a screw, so that the light-emitting fixing plate is movable.
Wherein, the aperture seat is used for placing the aperture, and the aperture is glued on the aperture seat.
Wherein, the aperture adjusting seat is used for adjusting the position of the aperture. The small hole adjusting seat is fixed through a plurality of ball head jackscrews, and the position of the small hole seat can be moved through the plurality of ball head jackscrews.
The adjusting seat mounting frame is used for mounting the small hole adjusting seat, and the position of the small hole is moved through sliding fit of the small hole adjusting seat and a shaft hole of the adjusting seat mounting frame.
According to one embodiment, screws are arranged on two sides of the adjusting seat mounting frame, and after the small holes are moved to the preset positions, the screws on two sides of the adjusting seat mounting frame are used for fixing the small holes.
The beam expanding device has a firm and reliable structure, and can avoid the mutual position change of the incident lens, the small hole and the emergent lens after transportation or vibration; according to the beam expander, the multiple degrees of freedom of the attitude adjustment of the incident lens, the small hole and the emergent lens can be carried out, and the stability of the structure of the beam expander is further improved when the multiple degrees of freedom of the attitude adjustment of the incident lens, the small hole and the emergent lens are carried out; the beam expanding device is compact in structure and saves the occupied space of equipment.
The utility model is described in further detail below with reference to the accompanying drawings.
Fig. 1 and 2 show a schematic structural diagram of an exemplary beam expanding device according to an embodiment of the present application.
The respective reference numerals of fig. 1 and 2 and their corresponding components are represented as follows:
11: an incident lens;
12: an incident mirror mounting rack;
13: an assembly plate;
14: a small hole seat;
15: a small hole adjusting seat;
16: an adjusting seat mounting frame;
17: an exit fixing plate;
18: an emission adjustment plate;
19: moving the reference block;
20: a Y-direction reference plate;
21: ball head jackscrew;
22: a first-stage support;
23: a flat gasket;
24: a conical gasket;
25: a V-shaped gasket;
26: and an exit lens.
Referring to fig. 1 and 2, the beam expanding device according to the present embodiment includes an incident mirror mounting frame 12, an assembly plate 13, a small hole seat 14, a small hole adjusting seat 15, an adjusting seat mounting frame 16, an exit fixing plate 17, an exit adjusting plate 18, a moving reference block 19, a Y-direction reference block 20, a ball head jackscrew 21, a primary support 22, a flat gasket 23, a cone gasket 24, and a V-shaped gasket 25.
Wherein, the beam expanding device according to the embodiment is used for an ellipsometer.
Wherein the incidence lens mounting frame 12 is used for mounting the incidence lens 11. In use, the entrance lens 11 is screwed into the entrance mirror mount 12. The mirror mount 12 is screwed to the assembly plate 13.
The exit lens 26 is screwed onto the exit adjusting plate 18, and the exit adjusting plate 18 is fixed on the exit fixing plate 17 by a three-top-one-pull structure. The three-top one-pull structure comprises two jackscrews and one screw which are positioned at the top, and jackscrews which are respectively positioned at two side surfaces.
Wherein, the emergent fixed plate 17 is stuck with a flat gasket 23, a cone gasket 24 and a V-shaped gasket 25.
The outgoing fixing plate 17, the moving reference block 19, and the Y-direction reference block 20 are fixed to the primary support 22 by screws.
Wherein, the movable reference block 19 is provided with a ball head jackscrew. The Y-direction reference block 20 is provided with screws so that the light-exiting fixing plate 17 is movable.
The small hole is glued to the small hole seat 14, the small hole adjusting seat 15 is fixed by three ball head jackscrews, and the position of the small hole seat 15 can be moved by the 3 ball head jackscrews. Through the sliding fit of aperture adjustment seat 15 and the shaft hole of adjustment seat mounting bracket 16, remove the aperture to the focus position of incident lens 11, later fix through the screw of both sides through aperture adjustment seat 15 and adjustment seat mounting bracket 16 for aperture and incident lens's position satisfies the optics demand.
The process of using the beam expanding device of the embodiment comprises the following steps:
screwing the incidence lens 11 onto the incidence lens mounting plate 12;
screwing the exit lens 26 into the exit adjustment plate 18;
the distance and the inclination angle of the exit lens 26 relative to the incident lens 11 are adjusted by the exit adjusting plate 18;
the small Kong Nian is arranged on the small hole seat 14 by using glue, and the small hole is moved to the focus position of the incident lens 11 by the small hole adjusting seat and 15 adjusting seat mounting frame 16, so that the positions of the small hole and the incident lens 11 meet the preset optical requirement;
after the positions of the incident lens 11, the emergent lens 26 and the small holes are adjusted, the incident lens 11, the small holes and the emergent lens 26 are locked and fixed.
It should be noted that the foregoing examples are only for better illustrating the technical solution of the present utility model, and not for limiting the present utility model, and those skilled in the art should understand that any implementation of the five-dimensional adjustment device according to the embodiments of the present application should be included in the scope of the present utility model.
The beam expanding device has a firm and reliable structure, and can avoid the change of the positions of the incident lens, the small hole and the emergent lens caused by the spring structure after transportation or vibration; according to the beam expander, the multiple degrees of freedom of the attitude of the incident lens, the aperture and the emergent lens can be adjusted, and the incident lens, the aperture and the emergent lens are locked and fixed after the attitude adjustment is finished, so that the stability of the structure of the beam expander is further improved; the beam expanding device is compact in structure and saves the occupied space of equipment.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned. Furthermore, it is evident that the word "comprising" does not exclude other elements or steps, and that the singular does not exclude a plurality. A plurality of units or means recited in the system claims can also be implemented by means of software or hardware by means of one unit or means. The terms first, second, etc. are used to denote a name, but not any particular order.
Claims (6)
1. A beam expanding device for an optical apparatus, comprising:
the device comprises an incidence mirror mounting frame, an assembly plate, a small hole seat, a small hole adjusting seat, an adjusting seat mounting frame, an emergent fixing plate, an emergent adjusting plate, a movable reference block, a Y-direction reference block, a plurality of ball head jackscrews and a primary support;
wherein the incident mirror mounting frame is fixed on the assembly plate;
wherein the exit adjustment plate is fixed on the exit fixing plate;
the emergent fixing plate, the movable reference block and the Y-direction reference block are fixed on the primary support;
wherein, stick on the fixed plate of the said outgoing and have flat gasket, awl gasket and V type gasket.
2. The beam expander of claim 1, wherein the exit adjustment plate is configured to mount an exit lens and adjust a position of the exit lens.
3. The beam expander of claim 1 or 2, wherein the movable reference block is provided with at least one ball head jackscrew, and the Y-direction reference block is provided with a screw, so that the light-emitting fixing plate is movable.
4. The beam expander of claim 1 or 2, wherein the aperture mount is configured to receive an aperture, the aperture being glued to the aperture mount;
the small hole adjusting seat is used for adjusting the position of the small hole, the small hole adjusting seat is fixed through a plurality of ball head jackscrews, and the position of the small hole seat can be moved through the plurality of ball head jackscrews.
5. The beam expander of claim 1 or 2, wherein the adjustment base mounting bracket is configured to mount the aperture adjustment base for moving the aperture by sliding engagement of the aperture adjustment base with the shaft aperture of the adjustment base mounting bracket.
6. The beam expander of claim 1 or 2, wherein screws are provided on both sides of the adjustment base mounting frame, and the screws on both sides of the adjustment base mounting frame are used to fix the small hole after the small hole is moved to a predetermined position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320186981.8U CN219417835U (en) | 2023-02-06 | 2023-02-06 | Beam expanding device for optical equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320186981.8U CN219417835U (en) | 2023-02-06 | 2023-02-06 | Beam expanding device for optical equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219417835U true CN219417835U (en) | 2023-07-25 |
Family
ID=87241749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320186981.8U Active CN219417835U (en) | 2023-02-06 | 2023-02-06 | Beam expanding device for optical equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219417835U (en) |
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2023
- 2023-02-06 CN CN202320186981.8U patent/CN219417835U/en active Active
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