TWI449222B - A light emitting diode chip package and packaging method thereof - Google Patents

A light emitting diode chip package and packaging method thereof Download PDF

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TWI449222B
TWI449222B TW099133955A TW99133955A TWI449222B TW I449222 B TWI449222 B TW I449222B TW 099133955 A TW099133955 A TW 099133955A TW 99133955 A TW99133955 A TW 99133955A TW I449222 B TWI449222 B TW I449222B
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conductor
insulating layer
forming
electrode
emitting diode
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TW099133955A
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TW201216531A (en
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Yu Nung Shen
Tsung Chi Wang
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Yu Nung Shen
Tsung Chi Wang
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Priority to US13/251,442 priority patent/US8669569B2/en
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Description

一種發光二極體晶片封裝體及其封裝方法Light-emitting diode chip package and packaging method thereof

本發明係有關於一種發光二極體晶片封裝體及其封裝方法。The invention relates to a light emitting diode chip package and a packaging method thereof.

近年來,以發光二極體作為發光源取代傳統發光源作為電子裝置、照明設備等等的發光源已越來越普及。然而,目前之發光二極體晶片封裝體主要仍是以打線方式形成,其製作時程偏長且導線散熱不良,以致於影響發光二極體晶片封裝體的亮度與壽命。In recent years, it has become more and more popular to replace conventional light sources with light-emitting diodes as light-emitting sources as light sources for electronic devices, lighting devices, and the like. However, the current LED package is mainly formed by wire bonding, which has a long manufacturing time and poor heat dissipation of the wires, so as to affect the brightness and life of the LED package.

有鑑於此,本案發明人遂以其從事該行業之多年經驗,並本著精益求精之精神,積極研究改良,遂有本發明『一種發光二極體晶片封裝體及其封裝方法』產生In view of this, the inventor of the present invention has been actively researching and improving with the spirit of excellence in the industry for many years of experience in the industry, and has produced the invention of a light-emitting diode chip package and its packaging method.

本發明之目的是為提供一種發光二極體晶片封裝體及其封裝方法。It is an object of the present invention to provide a light emitting diode chip package and a method of packaging the same.

根據本發明之一特徵,一種發光二極體晶片封裝體之封裝方法被提供,該方法包含如下之步驟:提供一個發光二極體晶圓,該晶圓具有數個發光二極體晶片,每個晶片包括一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;在該晶圓的電極安裝表面上形成一個透光絕緣層,該透光絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的曝露孔;於該透光絕緣層之位在對應於P型電極區域之位置的透光絕緣層部份上形成一個金屬反射層;於該透光絕緣層和反射金屬層上形成一個保護絕緣層,該保護絕緣層是經由曝光與顯影處理來留下覆蓋在金屬反射層上並延伸到電極安裝表面的保護絕緣層部份;形成一個覆蓋該透光絕緣層和該等保護絕緣層部份的導電體形成絕緣層,該導電體形成絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的導體形成孔;於每個導體形成孔內形成有一個與對應之電極電氣連接的導體單元;及把該晶圓切割成個別的發光二極體晶片封裝體。According to a feature of the present invention, a method of packaging a light emitting diode chip package is provided, the method comprising the steps of: providing a light emitting diode wafer having a plurality of light emitting diode chips, each The wafer includes a semiconductor substrate including a P-type electrode region and an N-type electrode region, and at least two electrodes disposed on the electrode mounting surface of the semiconductor substrate and electrically connected to the electrode regions, respectively; electrodes at the wafer Forming a light-transmissive insulating layer on the mounting surface, the light-transmissive insulating layer is formed by exposure and development processing to form a plurality of exposed holes each exposing a corresponding electrode; the position of the transparent insulating layer is corresponding to the P-type electrode region Forming a metal reflective layer on the transparent insulating layer portion; forming a protective insulating layer on the transparent insulating layer and the reflective metal layer, the protective insulating layer is left overlying the metal reflection through exposure and development processing a portion of the protective insulating layer on the layer and extending to the electrode mounting surface; forming an electrical conductor covering the transparent insulating layer and the portions of the protective insulating layer Forming an insulating layer, the conductive body forming the insulating layer is formed by exposing and developing a plurality of conductor forming holes each exposing a corresponding electrode; and forming a conductor unit electrically connected to the corresponding electrode in each of the conductor forming holes And cutting the wafer into individual light emitting diode package packages.

根據本發明之另一特徵,一種發光二極體晶片封裝體之封裝方法被提供,該方法包含如下之步驟:提供一個發光二極體晶圓,該晶圓具有數個發光二極體晶片,每個晶片包括一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;在該晶圓的電極安裝表面上形成一個透光絕緣層,該透光絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的曝露孔;於該透光絕緣層上形成一個金屬反射層;於該反射金屬層上形成一個保護絕緣層,該保護絕緣層是藉由曝光與顯影處理來形成用於曝露對應之與N型電極區域電氣連接之電極的曝露孔以及留下覆蓋在金屬層之位在對應於每個晶片之N型電極區域之位置之金屬反射層部份上的保護絕緣層部份;於該金屬反射層和餘留下來的保護絕緣層部份上形成一個導體形成絕緣層,該導體形成絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的導體形成孔;於每個導體形成孔內形成有一個與電極電氣連接的導體單元;及把該晶圓切割成個別的發光二極體晶片封裝體。According to another feature of the present invention, a method of packaging a light emitting diode chip package is provided, the method comprising the steps of: providing a light emitting diode wafer having a plurality of light emitting diode chips, Each of the wafers includes a semiconductor body including a P-type electrode region and an N-type electrode region, and at least two electrodes disposed on the electrode mounting surface of the semiconductor substrate and electrically connected to the electrode regions, respectively; Forming a light-transmissive insulating layer on the electrode mounting surface, the light-transmissive insulating layer is formed by exposing and developing to form a plurality of exposed holes each exposing a corresponding electrode; forming a metal reflective layer on the transparent insulating layer; Forming a protective insulating layer on the reflective metal layer, the protective insulating layer is formed by exposure and development processing to expose an exposed hole for exposing an electrode electrically connected to the N-type electrode region and leaving a layer covering the metal layer a portion of the protective insulating layer on the portion of the metal reflective layer corresponding to the position of the N-type electrode region of each wafer; the reflective layer and the remaining portion of the metal Forming a conductor on the protective insulating layer portion to form an insulating layer, the conductor forming the insulating layer is formed by exposing and developing a plurality of conductor forming holes each exposing a corresponding electrode; forming a hole in each of the conductor forming holes a conductor unit electrically connected to the electrode; and dicing the wafer into individual light emitting diode chip packages.

根據本發明之又另一特徵,一種發光二極體晶片封裝體之封裝方法被提供,該方法包含如下之步驟:提供一個發光二極體晶圓,該晶圓具有數個發光二極體晶片,每個晶片包括一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;在該晶圓的電極安裝表面上形成一個透光絕緣層,該透光絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的曝露孔;於該透光絕緣層上形成一個導體形成絕緣層,該導體形成絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的導體形成孔;於每個導體形成孔內形成一個與電極電氣連接的導體單元;及把該晶圓切割成個別的發光二極體晶片封裝體,其中,通達與P型電極區域電氣連接之電極的導體形成孔也曝露透光絕緣層之位在對應於P型電極區域之位置的透光絕緣層部份以致於形成於該導體形成孔的導體單元能夠作用如金屬反射層。According to still another feature of the present invention, a method of packaging a light emitting diode package is provided, the method comprising the steps of: providing a light emitting diode wafer having a plurality of light emitting diode chips Each of the wafers includes a semiconductor substrate including a P-type electrode region and an N-type electrode region, and at least two electrodes disposed on the electrode mounting surface of the semiconductor substrate and electrically connected to the electrode regions, respectively; Forming a light-transmissive insulating layer on the electrode mounting surface, the light-transmissive insulating layer is formed by exposure and development processing to form a plurality of exposed holes each exposing a corresponding electrode; forming a conductor on the transparent insulating layer to form an insulating layer The conductor forms an insulating layer by forming a plurality of conductor forming holes each exposing a corresponding electrode through exposure and development processing; forming a conductor unit electrically connected to the electrode in each of the conductor forming holes; and cutting the wafer Forming a separate LED package, wherein the conductor forming holes of the electrode electrically connected to the P-type electrode region are also exposed The metal reflective layer conductor insulating layer of the light-bit unit at a position corresponding to the P-type electrode is light transmissive area portion such that the insulating layer is formed on the conductor-forming openings capable of acting.

根據本發明之又再另一特徵,一種發光二極體晶片封裝體被提供,該封裝體包含:一個發光二極體晶片,其具有一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;一個形成於該電極安裝表面上且具有兩個曝露對應之電極之穿孔的透光絕緣層;一個形成於該透光絕緣層之位於P型電極區域之透光絕緣層部份上的金屬反射層;一個形成於該金屬反射層上且延伸到該電極安裝表面的保護絕緣層;具有兩個各通達一對應之電極之導體形成孔的導體形成絕緣層;及形成在該等導體形成孔內俾可與對應之電極電氣連接的導體單元。According to still another feature of the present invention, a light emitting diode chip package is provided, the package comprising: a light emitting diode chip having a semiconductor including a P-type electrode region and an N-type electrode region a substrate and at least two electrodes disposed on the electrode mounting surface of the semiconductor substrate and electrically connected to the electrode regions respectively; a light-transmissive insulating layer formed on the electrode mounting surface and having two perforations exposing the corresponding electrodes; a metal reflective layer formed on the transparent insulating layer portion of the P-type electrode region; a protective insulating layer formed on the metal reflective layer and extending to the electrode mounting surface; Each of the conductors that form a hole in the conductor of the corresponding electrode forms an insulating layer; and a conductor unit formed in the conductor forming hole and electrically connectable to the corresponding electrode.

根據本發明之再一特徵,一種發光二極體晶片封裝體被提供,該封裝體包含:一個發光二極體晶片,其具有一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;一個形成於該電極安裝表面上且具有兩個曝露對應之電極之穿孔的透光絕緣層;一個形成於該透光絕緣層上的金屬反射層;一個形成於該金屬反射層之位在N型電極區域上之反射層部份上且具有一用於曝露該N型電極區域之電極之曝露孔的保護絕緣層;具有兩個各通達一對應之電極之導體形成孔的導體形成絕緣層;及形成在該等導體形成孔內俾可與對應之電極電氣連接的導體單元。According to still another feature of the present invention, a light emitting diode chip package is provided, the package comprising: a light emitting diode chip having a semiconductor body including a P-type electrode region and an N-type electrode region; At least two electrodes disposed on the electrode mounting surface of the semiconductor substrate and electrically connected to the electrode regions respectively; a light-transmissive insulating layer formed on the electrode mounting surface and having two perforations for exposing the corresponding electrodes; a metal reflective layer on the light-transmissive insulating layer; a portion of the reflective layer formed on the N-type electrode region formed on the metal reflective layer and having an exposed hole for exposing the electrode of the N-type electrode region a protective insulating layer; a conductor having two conductor-forming holes each reaching a corresponding electrode forms an insulating layer; and a conductor unit formed in the conductor-forming holes and electrically connectable to the corresponding electrode.

根據本發明之再另一特徵,一種發光二極體晶片封裝體被提供,該封裝體包含:一個發光二極體晶片,其具有一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;一個形成於該電極安裝表面上且具有兩個曝露對應之電極之穿孔的透光絕緣層;一個形成於該透光絕緣層上的金屬反射層;一個形成於該金屬反射層之位在N型電極區域上之反射層部份上且具有一用於曝露該N型電極區域之電極之曝露孔的保護絕緣層;具有兩個各通達一對應之電極之導體形成孔的導體形成絕緣層;及形成在該等導體形成孔內俾可與對應之電極電氣連接的導體單元。According to still another feature of the present invention, a light emitting diode chip package is provided, the package comprising: a light emitting diode wafer having a semiconductor body including a P-type electrode region and an N-type electrode region And at least two electrodes disposed on the electrode mounting surface of the semiconductor substrate and electrically connected to the electrode regions respectively; a light-transmissive insulating layer formed on the electrode mounting surface and having two perforations for exposing the corresponding electrodes; a metal reflective layer formed on the light-transmissive insulating layer; a portion of the reflective layer formed on the N-type electrode region formed on the metal reflective layer and having an exposed hole for exposing the electrode of the N-type electrode region a protective insulating layer; a conductor having two conductor-forming holes each reaching a corresponding electrode forms an insulating layer; and a conductor unit formed in the conductor-forming holes and electrically connectable to the corresponding electrode.

在後面之本發明之較佳實施例的詳細說明中,相同或類似的元件是由相同的標號標示,而且它們的詳細描述將會被省略。此外,為了清楚揭示本發明的特徵,於圖式中之元件並非按實際比例描繪。In the detailed description of the preferred embodiments of the present invention, the same or similar elements are denoted by the same reference numerals, and their detailed description will be omitted. In addition, the elements of the drawings are not to be

第一至五圖是為顯示本發明之第一較佳實施例之一種發光二極體晶片封裝體之封裝方法的示意流程剖視圖。請參閱第一至五圖所示,一個發光二極體晶圓1是首先被提供(在圖式中該晶圓1僅部份被顯示)。該晶圓1具有數個發光二極體晶片10。每個晶片10包括一個包含一P型電極區域與一N型電極區域的半導體基體100和至少兩個配置在該半導體基體100之電極安裝表面101且分別與該等電極區域電氣連接的電極102。應要注意的是,在後續的說明中,該等發光二極體晶片10的電極安裝表面101相當於該該晶圓1的電極安裝表面。1 to 5 are schematic flow cross-sectional views showing a method of packaging a light emitting diode package of the first preferred embodiment of the present invention. Referring to Figures 1 to 5, a light-emitting diode wafer 1 is first provided (in the figure, the wafer 1 is only partially displayed). The wafer 1 has a plurality of light emitting diode wafers 10. Each of the wafers 10 includes a semiconductor substrate 100 including a P-type electrode region and an N-type electrode region, and at least two electrodes 102 disposed on the electrode mounting surface 101 of the semiconductor substrate 100 and electrically connected to the electrode regions, respectively. It should be noted that in the following description, the electrode mounting surface 101 of the light emitting diode wafer 10 corresponds to the electrode mounting surface of the wafer 1.

然後,一個透光絕緣層2是形成在該發光二極體晶圓1的電極安裝表面101上,而且是形成有數個各曝露一對應之電極102的曝露孔20。Then, a light-transmissive insulating layer 2 is formed on the electrode mounting surface 101 of the light-emitting diode wafer 1, and an exposure hole 20 is formed in which a plurality of electrodes 102 are exposed.

接著,如在第二圖中所示,一金屬反射層3是形成於該透光絕緣層2之位在對應於該P型電極區域之位置的透光絕緣層部份上。Next, as shown in the second figure, a metal reflective layer 3 is formed on the portion of the light-transmitting insulating layer where the light-transmitting insulating layer 2 is located at a position corresponding to the P-type electrode region.

請配合參閱第三圖所示,在形成金屬反射層3之後,一個保護絕緣層4是形成於該透光絕緣層2和該等反射金屬層3上。在本較佳實施例中,該保護絕緣層4是藉由曝光與顯影的處理來留下覆蓋在金屬反射層3上並延伸到電極安裝表面101的保護絕緣層部份。Referring to the third figure, after forming the metal reflective layer 3, a protective insulating layer 4 is formed on the transparent insulating layer 2 and the reflective metal layers 3. In the preferred embodiment, the protective insulating layer 4 is left by a process of exposure and development to leave a portion of the protective insulating layer overlying the metal reflective layer 3 and extending to the electrode mounting surface 101.

接著,一導體形成絕緣層5是形成在該透光絕緣層2以及餘留下來的保護絕緣層部份上。該導體形成絕緣層5是經由曝光和顯影處理來形成有數個各曝露一對應之電極102的導體形成孔50。然後,於每個導體形成孔50內是形成有一個與電極區域102電氣連接的導體單元6。Next, a conductor-forming insulating layer 5 is formed on the light-transmitting insulating layer 2 and the remaining portion of the protective insulating layer. The conductor forming insulating layer 5 is formed by exposing and developing a plurality of conductor forming holes 50 each exposing a corresponding electrode 102. Then, a conductor unit 6 electrically connected to the electrode region 102 is formed in each of the conductor forming holes 50.

在本較佳實施例中,每個導體單元6是由一個第一導體層60、一個第二導體層61、一個第三導體層62、和一個第四導體層63構成。當然,每個導體單元6也可以是由其他數目的導體層構成。In the preferred embodiment, each conductor unit 6 is comprised of a first conductor layer 60, a second conductor layer 61, a third conductor layer 62, and a fourth conductor layer 63. Of course, each conductor unit 6 can also be composed of a different number of conductor layers.

最後,沿著切割道CL切割該晶圓1即可得到如在第五圖中所示之個別的發光二極體晶片封裝體。Finally, the wafer 1 is diced along the scribe line CL to obtain individual light emitting diode package packages as shown in the fifth figure.

第六至九圖是為顯示本發明之第二較佳實施例之一種發光二極體晶片封裝體之封裝方法的示意流程剖視圖。請參閱第六至九圖所示,一個發光二極體晶圓1是首先被提供(在圖式中該晶圓1僅部份被顯示)。該晶圓1具有數個發光二極體晶片10。每個晶片10包括一個包含一P型電極區域與一N型電極區域的半導體基體100和至少兩個配置在該半導體基體100之電極安裝表面101且分別與該等電極區域電氣連接的電極102。應要注意的是,在後續的說明中,該等發光二極體晶片10的電極安裝表面101相當於該該晶圓1的電極安裝表面。6 to 9 are schematic flow cross-sectional views showing a method of packaging a light emitting diode package according to a second preferred embodiment of the present invention. Referring to Figures 6 to 9, a light-emitting diode wafer 1 is first provided (in the figure, the wafer 1 is only partially displayed). The wafer 1 has a plurality of light emitting diode wafers 10. Each of the wafers 10 includes a semiconductor substrate 100 including a P-type electrode region and an N-type electrode region, and at least two electrodes 102 disposed on the electrode mounting surface 101 of the semiconductor substrate 100 and electrically connected to the electrode regions, respectively. It should be noted that in the following description, the electrode mounting surface 101 of the light emitting diode wafer 10 corresponds to the electrode mounting surface of the wafer 1.

然後,一個透光絕緣層2是形成在該發光二極體晶圓1的電極區域表面101上,而且是形成有數個各曝露一對應之電極102的曝露孔20。接著,一金屬反射層3是形成於該絕緣層2上。Then, a light-transmissive insulating layer 2 is formed on the surface 101 of the electrode region of the light-emitting diode wafer 1, and an exposure hole 20 is formed in which a plurality of electrodes 102 are exposed. Next, a metal reflective layer 3 is formed on the insulating layer 2.

請配合參閱第七圖所示,在形成金屬反射層3之後,一個保護絕緣層4是形成於反射金屬層3上。該保護絕緣層4是藉 由曝光與顯影的處理來形成用於曝露對應之與N型電極區域電氣連接之電極102的曝露孔40以及留下覆蓋在金屬層3之位在對應於每個晶片10之N型電極區域102之位置之金屬反射層部份上的保護絕緣層部份。Referring to FIG. 7 , after forming the metal reflective layer 3 , a protective insulating layer 4 is formed on the reflective metal layer 3 . The protective insulating layer 4 is borrowed An exposure hole 40 for exposing the corresponding electrode 102 electrically connected to the N-type electrode region is formed by exposure and development processing, and an N-type electrode region 102 corresponding to each wafer 10 is left overlying the metal layer 3 The portion of the protective insulating layer on the portion of the metal reflective layer at the location.

接著,一導體形成絕緣層5是形成在該金屬反射層3和餘留下來的保護絕緣層部份上。該絕緣層5是經由曝光和顯影處理來形成有數個各曝露一對應之電極102的導體形成孔50。然後,於每個導體形成孔50內是形成有一個與電極102電氣連接的導體單元6。Next, a conductor-forming insulating layer 5 is formed on the metal reflective layer 3 and the remaining portion of the protective insulating layer. The insulating layer 5 is formed by a plurality of conductor forming holes 50 each exposing a corresponding electrode 102 via exposure and development processing. Then, in each of the conductor forming holes 50, a conductor unit 6 electrically connected to the electrode 102 is formed.

與第一較佳實施例相同,每個導體單元6可以是由一個第一導體層60、一個第二導體層61、一個第三導體層62、和一個第四導體層63構成。As in the first preferred embodiment, each conductor unit 6 may be composed of a first conductor layer 60, a second conductor layer 61, a third conductor layer 62, and a fourth conductor layer 63.

最後,沿著切割道CL切割該晶圓1即可得到如在第九圖中所示之個別的發光二極體晶片封裝體。Finally, the wafer 1 is diced along the scribe line CL to obtain individual illuminating diode package packages as shown in the ninth figure.

第十至十二圖是為顯示本發明之第三較佳實施例之一種發光二極體晶片封裝體之封裝方法的示意流程剖視圖。請參閱第十至十三圖所示,一個發光二極體晶圓1是首先被提供(在圖式中該晶圓1僅部份被顯示)。該晶圓1具有數個發光二極體晶片10。每個晶片10包括一個包含一P型電極區域與一N型電極區域的半導體基體100和至少兩個配置在該半導體基體100之電極安裝表面101且分別與該等電極區域電氣連接的電極102。應要注意的是,在後續的說明中,該等發光二極體晶片10的電極安裝表面101相當於該該晶圓1的電極安裝表面。10 to 12 are schematic flow cross-sectional views showing a method of packaging a light emitting diode package according to a third preferred embodiment of the present invention. Referring to the tenth to thirteenth drawings, a light-emitting diode wafer 1 is first provided (in the drawing, the wafer 1 is only partially displayed). The wafer 1 has a plurality of light emitting diode wafers 10. Each of the wafers 10 includes a semiconductor substrate 100 including a P-type electrode region and an N-type electrode region, and at least two electrodes 102 disposed on the electrode mounting surface 101 of the semiconductor substrate 100 and electrically connected to the electrode regions, respectively. It should be noted that in the following description, the electrode mounting surface 101 of the light emitting diode wafer 10 corresponds to the electrode mounting surface of the wafer 1.

然後,一個透光絕緣層2是形成在該發光二極體晶圓1的電極安裝表面101上,而且是形成有數個各曝露一對應之電極102的曝露孔20。Then, a light-transmissive insulating layer 2 is formed on the electrode mounting surface 101 of the light-emitting diode wafer 1, and an exposure hole 20 is formed in which a plurality of electrodes 102 are exposed.

請配合參閱第十一圖所示,一個導體形成絕緣層5是形成在該透光絕緣層2上。該絕緣層5是經由曝光和顯影處理來形成有數個各曝露一對應之電極102的導體形成孔50。然後, 於每個導體形成孔50內是形成有一個與電極102電氣連接的導體單元6。應要注意的是,在本較佳實施例中,通達與P型電極區域電氣連接之電極102的導體形成孔50也曝露透光絕緣層2之位在對應於P型電極區域之位置的透光絕緣層部份以致於形成於該導體形成孔50的導體單元6能夠作用如金屬反射層。Referring to FIG. 11 together, a conductor-forming insulating layer 5 is formed on the light-transmitting insulating layer 2. The insulating layer 5 is formed by a plurality of conductor forming holes 50 each exposing a corresponding electrode 102 via exposure and development processing. then, A conductor unit 6 electrically connected to the electrode 102 is formed in each of the conductor forming holes 50. It should be noted that in the preferred embodiment, the conductor forming hole 50 of the electrode 102 electrically connected to the P-type electrode region is also exposed to the position of the transparent insulating layer 2 at a position corresponding to the P-type electrode region. The light insulating layer portion is such that the conductor unit 6 formed in the conductor forming hole 50 can function as a metal reflective layer.

與前面的較佳實施例相同,每個導體單元6可以是由一個第一導體層60、一個第二導體層61、一個第三導體層62、和一個第四導體層63構成。As with the previous preferred embodiment, each conductor unit 6 may be composed of a first conductor layer 60, a second conductor layer 61, a third conductor layer 62, and a fourth conductor layer 63.

最後,沿著切割道CL切割該晶圓1即可得到如在第九圖中所示之個別的發光二極體晶片封裝體。Finally, the wafer 1 is diced along the scribe line CL to obtain individual illuminating diode package packages as shown in the ninth figure.

綜上所述,本發明之『一種發光二極體晶片封裝體及其封裝方法』,確能藉上述所揭露之構造、裝置,達到預期之目的與功效,且申請前未見於刊物亦未公開使用,符合發明專利之新穎、進步等要件。In summary, the "light-emitting diode chip package and its packaging method" of the present invention can achieve the intended purpose and efficacy by the above-mentioned disclosed structure and device, and is not disclosed in the publication before application. Use, in line with the novelty, progress and other requirements of the invention patent.

惟,上述所揭之圖式及說明,僅為本發明之實施例而已,非為限定本發明之實施例;大凡熟悉該項技藝之人仕,其所依本發明之特徵範疇,所作之其他等效變化或修飾,皆應涵蓋在以下本案之申請專利範圍內。The drawings and descriptions of the present invention are merely illustrative of the embodiments of the present invention, and are not intended to limit the embodiments of the present invention; Equivalent changes or modifications should be covered in the scope of the patent application in this case below.

1‧‧‧發光二極體晶圓1‧‧‧Light Emitting Diode Wafer

10‧‧‧發光二極體晶片10‧‧‧Light Emitter Wafer

100‧‧‧半導體基體100‧‧‧Semiconductor substrate

101...電極安裝表面101. . . Electrode mounting surface

102...電極102. . . electrode

2...透光絕緣層2. . . Light transmissive insulation

20...曝露孔20. . . Exposure hole

3...金屬反射層3. . . Metal reflective layer

4...保護絕緣層4. . . Protective insulation

5...導體形成絕緣層5. . . Conductor forming an insulating layer

50...導體形成孔50. . . Conductor forming hole

6...導體單元6. . . Conductor unit

60...第一導體層60. . . First conductor layer

61...第二導體層61. . . Second conductor layer

62...第三導體層62. . . Third conductor layer

63...第四導體層63. . . Fourth conductor layer

CL...切割線CL. . . Cutting line

第一至五圖是為用於顯示本發明之第一較佳實施例之一種發光二極體晶片封裝體之封裝方法的示意流程剖視圖;第六至九圖是為用於顯示本發明之第二較佳實施例之一種發光二極體晶片封裝體之封裝方法的示意流程剖視圖;及第十至十二圖是為用於顯示本發明之第三較佳實施例之一種發光二極體晶片封裝體之封裝方法的示意流程剖視圖。1 to 5 are schematic flow cross-sectional views showing a packaging method for a light emitting diode package according to a first preferred embodiment of the present invention; and sixth to ninth drawings are for showing the present invention A schematic cross-sectional view of a method of packaging a light emitting diode package of a preferred embodiment; and tenth to twelfth drawings are a light emitting diode chip for showing a third preferred embodiment of the present invention A schematic cross-sectional view of a package method of a package.

100‧‧‧半導體基體100‧‧‧Semiconductor substrate

2‧‧‧透光絕緣層2‧‧‧Transparent insulation

3‧‧‧金屬反射層3‧‧‧Metal reflector

5‧‧‧導體形成絕緣層5‧‧‧Conductor forming insulation

6‧‧‧導體單元6‧‧‧Conductor unit

60‧‧‧第一導體層60‧‧‧First conductor layer

61‧‧‧第二導體層61‧‧‧Second conductor layer

62‧‧‧第三導體層62‧‧‧3rd conductor layer

63‧‧‧第四導體層63‧‧‧4th conductor layer

Claims (12)

一種發光二極體晶片封裝體之封裝方法,包含如下之步驟:提供一個發光二極體晶圓,該晶圓具有數個發光二極體晶片,每個晶片包括一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;在該晶圓的電極安裝表面上形成一個透光絕緣層,該透光絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的曝露孔;於該透光絕緣層之位在對應於P型電極區域之位置的透光絕緣層部份上形成一個金屬反射層;於該透光絕緣層和反射金屬層上形成一個保護絕緣層,該保護絕緣層是經由曝光與顯影處理來留下覆蓋在金屬反射層上並延伸到電極安裝表面的保護絕緣層部份;形成一個覆蓋該透光絕緣層和該等保護絕緣層部份的導電體形成絕緣層,該導電體形成絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的導體形成孔;於每個導體形成孔內形成有一個與對應之電極電氣連接的導體單元;及把該晶圓切割成個別的發光二極體晶片封裝體。A method for packaging a light emitting diode package includes the steps of: providing a light emitting diode wafer having a plurality of light emitting diode chips, each of the wafers including a P-type electrode region and a semiconductor substrate of an N-type electrode region and at least two electrodes disposed on the electrode mounting surface of the semiconductor substrate and electrically connected to the electrode regions respectively; forming a light-transmitting insulating layer on the electrode mounting surface of the wafer, The transparent insulating layer is formed by exposing and developing a plurality of exposed holes each exposing a corresponding electrode; and the position of the transparent insulating layer is formed on a portion of the transparent insulating layer corresponding to the position of the P-type electrode region a metal reflective layer; forming a protective insulating layer on the transparent insulating layer and the reflective metal layer, the protective insulating layer leaving a protective insulating layer covering the metal reflective layer and extending to the electrode mounting surface via exposure and development processing a layer portion; forming an insulating layer covering the transparent insulating layer and the portions of the protective insulating layer to form an insulating layer, the conductive body forming the insulating layer is Forming a plurality of conductor forming holes each exposing a corresponding electrode by exposure and development processing; forming a conductor unit electrically connected to the corresponding electrode in each of the conductor forming holes; and cutting the wafer into individual illuminating Diode chip package. 如申請專利範圍第1項所述之封裝方法,在形成導體單元的步驟中,每個導體單元是由一個由銀、鋁、與它們之合金中之一者形成的第一導體層、一個由鉻、鈦、銅、或它們之合金中之一者形成的第二導體層、一個由鎳、銅、鉻、或它們之合金中之一者形成的第三導體層、與一個由鎳、金、或它們之合金中之一者形成的第四導體層構成。The encapsulation method according to claim 1, wherein in the step of forming the conductor unit, each conductor unit is a first conductor layer formed of one of silver, aluminum, and an alloy thereof, and one a second conductor layer formed of one of chromium, titanium, copper, or an alloy thereof, a third conductor layer formed of one of nickel, copper, chromium, or an alloy thereof, and one consisting of nickel and gold Or a fourth conductor layer formed by one of the alloys thereof. 一種發光二極體晶片封裝體之封裝方法,包含如下之步驟:提供一個發光二極體晶圓,該晶圓具有數個發光二極體晶片,每個晶片包括一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;在該晶圓的電極安裝表面上形成一個透光絕緣層,該透光絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的曝露孔;於該透光絕緣層上形成一個金屬反射層;於該反射金屬層上形成一個保護絕緣層,該保護絕緣層是藉由曝光與顯影處理來形成用於曝露對應之與N型電極區域電氣連接之電極的曝露孔以及留下覆蓋在金屬層之位在對應於每個晶片之N型電極區域之位置之金屬反射層部份上的保護絕緣層部份;於該金屬反射層和餘留下來的保護絕緣層部份上形成一個導體形成絕緣層,該導體形成絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的導體形成孔;於每個導體形成孔內形成有一個與電極電氣連接的導體單元;及把該晶圓切割成個別的發光二極體晶片封裝體。A method for packaging a light emitting diode package includes the steps of: providing a light emitting diode wafer having a plurality of light emitting diode chips, each of the wafers including a P-type electrode region and a semiconductor substrate of an N-type electrode region and at least two electrodes disposed on the electrode mounting surface of the semiconductor substrate and electrically connected to the electrode regions respectively; forming a light-transmitting insulating layer on the electrode mounting surface of the wafer, The transparent insulating layer is formed by exposing and developing a plurality of exposed holes each exposing a corresponding electrode; forming a metal reflective layer on the transparent insulating layer; forming a protective insulating layer on the reflective metal layer, The protective insulating layer is formed by exposure and development processing to form an exposure hole for exposing an electrode electrically connected to the N-type electrode region and leaving an area covering the metal layer at an N-type electrode region corresponding to each of the wafers. a portion of the protective insulating layer on the portion of the metal reflective layer of the location; forming a conductor on the portion of the metallic reflective layer and the remaining protective insulating layer Forming an insulating layer, the conductor forming the insulating layer is formed by exposing and developing a plurality of conductor forming holes each exposing a corresponding electrode; forming a conductor unit electrically connected to the electrode in each of the conductor forming holes; The wafer is diced into individual light emitting diode package packages. 如申請專利範圍第3項所述之封裝方法,在形成導體單元的步驟中,每個導體單元是由一個由銀、鋁、與它們之合金中之一者形成的第一導體層、一個由鉻、鈦、銅、或它們之合金中之一者形成的第二導體層、一個由鎳、銅、鉻、或它們之合金中之一者形成的第三導體層、與一個由鎳、金、或它們之合金中之一者形成的第四導體層構成。In the encapsulation method of claim 3, in the step of forming the conductor unit, each conductor unit is a first conductor layer formed of one of silver, aluminum, and an alloy thereof, and one a second conductor layer formed of one of chromium, titanium, copper, or an alloy thereof, a third conductor layer formed of one of nickel, copper, chromium, or an alloy thereof, and one consisting of nickel and gold Or a fourth conductor layer formed by one of the alloys thereof. 一種發光二極體晶片封裝體之封裝方法,包含如下之步驟:提供一個發光二極體晶圓,該晶圓具有數個發光二極體晶片,每個晶片包括一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;在該晶圓的電極安裝表面上形成一個透光絕緣層,該透光絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的曝露孔;於該透光絕緣層上形成一個導體形成絕緣層,該導體形成絕緣層是經由曝光和顯影處理來形成有數個各曝露一對應之電極的導體形成孔;於每個導體形成孔內形成一個與電極電氣連接的導體單元;及把該晶圓切割成個別的發光二極體晶片封裝體,其中,通達與P型電極區域電氣連接之電極的導體形成孔也曝露透光絕緣層之位在對應於P型電極區域之位置的透光絕緣層部份以致於形成於該導體形成孔的導體單元能夠作用如金屬反射層。A method for packaging a light emitting diode package includes the steps of: providing a light emitting diode wafer having a plurality of light emitting diode chips, each of the wafers including a P-type electrode region and a semiconductor substrate of an N-type electrode region and at least two electrodes disposed on the electrode mounting surface of the semiconductor substrate and electrically connected to the electrode regions respectively; forming a light-transmitting insulating layer on the electrode mounting surface of the wafer, The light-transmissive insulating layer is formed by exposing and developing a plurality of exposure holes each exposing a corresponding electrode; forming a conductor on the light-transmissive insulating layer to form an insulating layer, the conductor forming the insulating layer is processed through exposure and development Forming a plurality of conductor forming holes each exposing a corresponding electrode; forming a conductor unit electrically connected to the electrode in each of the conductor forming holes; and cutting the wafer into individual light emitting diode chip packages, wherein The conductor forming hole of the electrode electrically connected to the P-type electrode region is also exposed to the position of the transparent insulating layer at a position corresponding to the P-type electrode region The light-transmissive insulating layer portion is disposed such that the conductor unit formed in the conductor forming hole can function as a metal reflective layer. 如申請專利範圍第5項所述之封裝方法,在形成導體單元的步驟中,每個導體單元是由一個由銀、鋁、與它們之合金中之一者形成的第一導體層、一個由鉻、鈦、銅、或它們之合金中之一者形成的第二導體層、一個由鎳、銅、鉻、或它們之合金中之一者形成的第三導體層、與一個由鎳、金、或它們之合金中之一者形成的第四導體層構成。The encapsulation method of claim 5, wherein in the step of forming the conductor unit, each conductor unit is a first conductor layer formed of one of silver, aluminum, and an alloy thereof, and one a second conductor layer formed of one of chromium, titanium, copper, or an alloy thereof, a third conductor layer formed of one of nickel, copper, chromium, or an alloy thereof, and one consisting of nickel and gold Or a fourth conductor layer formed by one of the alloys thereof. 一種發光二極體晶片封裝體,包含:一個發光二極體晶片,其具有一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;一個形成於該電極安裝表面上且具有兩個曝露對應之電極之穿孔的透光絕緣層;一個形成於該透光絕緣層之位於P型電極區域之透光絕緣層部份上的金屬反射層;一個形成於該金屬反射層上且延伸到該電極安裝表面的保護絕緣層;具有兩個各通達一對應之電極之導體形成孔的導體形成絕緣層;及形成在該等導體形成孔內俾可與對應之電極電氣連接的導體單元。A light emitting diode chip package comprising: a light emitting diode chip having a semiconductor substrate including a P-type electrode region and an N-type electrode region; and at least two electrode mounting surfaces disposed on the semiconductor substrate and An electrode electrically connected to the electrode regions; a light-transmissive insulating layer formed on the electrode mounting surface and having two perforations corresponding to the exposed electrodes; and a transparent insulating layer formed on the P-type electrode region a metal reflective layer on the portion of the light-transmissive insulating layer; a protective insulating layer formed on the metal reflective layer and extending to the electrode mounting surface; and a conductor having two conductor-forming holes each reaching a corresponding electrode to form an insulating layer And a conductor unit formed in the conductor-forming holes and electrically connectable to the corresponding electrode. 如申請專利範圍第7項所述之發光二極體晶片封裝體,在形成導體單元的步驟中,每個導體單元是由一個由銀、鋁、與它們之合金中之一者形成的第一導體層、一個由鉻、鈦、銅、或它們之合金中之一者形成的第二導體層、一個由鎳、銅、鉻、或它們之合金中之一者形成的第三導體層、與一個由鎳、金、或它們之合金中之一者形成的第四導體層構成。The light-emitting diode package according to claim 7, wherein in the step of forming the conductor unit, each conductor unit is formed by a first one of silver, aluminum, and an alloy thereof. a conductor layer, a second conductor layer formed of one of chromium, titanium, copper, or an alloy thereof, a third conductor layer formed of one of nickel, copper, chromium, or an alloy thereof, and A fourth conductor layer formed of one of nickel, gold, or an alloy thereof. 一種發光二極體晶片封裝體,包含:一個發光二極體晶片,其具有一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;一個形成於該電極安裝表面上且具有兩個曝露對應之電極之穿孔的透光絕緣層;一個形成於該透光絕緣層上的金屬反射層;一個形成於該金屬反射層之位在N型電極區域上之反射層部份上且具有一用於曝露該N型電極區域之電極之曝露孔的保護絕緣層;具有兩個各通達一對應之電極之導體形成孔的導體形成絕緣層;及形成在該等導體形成孔內俾可與對應之電極電氣連接的導體單元。A light emitting diode chip package comprising: a light emitting diode chip having a semiconductor substrate including a P-type electrode region and an N-type electrode region; and at least two electrode mounting surfaces disposed on the semiconductor substrate and An electrode electrically connected to the electrode regions; a light-transmissive insulating layer formed on the electrode mounting surface and having two perforations corresponding to the exposed electrodes; a metal reflective layer formed on the light-transmissive insulating layer; Forming a protective insulating layer on the reflective layer portion of the metal reflective layer on the N-type electrode region and having an exposure hole for exposing the electrode of the N-type electrode region; having two electrodes each corresponding to a corresponding one The conductor forming the hole of the conductor forms an insulating layer; and a conductor unit formed in the conductor forming hole and electrically connectable to the corresponding electrode. 如申請專利範圍第9項所述之發光二極體晶片封裝體,在形成導體單元的步驟中,每個導體單元是由一個由銀、鋁、與它們之合金中之一者形成的第一導體層、一個由鉻、鈦、銅、或它們之合金中之一者形成的第二導體層、一個由鎳、銅、鉻、或它們之合金中之一者形成的第三導體層、與一個由鎳、金、或它們之合金中之一者形成的第四導體層構成。The light-emitting diode package according to claim 9, wherein in the step of forming the conductor unit, each conductor unit is formed by a first one of silver, aluminum, and an alloy thereof. a conductor layer, a second conductor layer formed of one of chromium, titanium, copper, or an alloy thereof, a third conductor layer formed of one of nickel, copper, chromium, or an alloy thereof, and A fourth conductor layer formed of one of nickel, gold, or an alloy thereof. 一種發光二極體晶片封裝體,包含:一個發光二極體晶片,其具有一個包含一P型電極區域與一N型電極區域的半導體基體和至少兩個配置在該半導體基體之電極安裝表面且分別與該等電極區域電氣連接的電極;一個形成於該電極安裝表面上且具有兩個曝露對應之電極之穿孔的透光絕緣層;一個形成於該透光絕緣層上的導體形成絕緣層,該導體形成絕緣層形成有數個各曝露一對應之電極的導體形成孔;及形成在該等導體形成孔內俾可與對應之電極電氣連接的導體單元。 A light emitting diode chip package comprising: a light emitting diode chip having a semiconductor substrate including a P-type electrode region and an N-type electrode region; and at least two electrode mounting surfaces disposed on the semiconductor substrate and An electrode electrically connected to the electrode regions; a light-transmissive insulating layer formed on the electrode mounting surface and having two perforations of exposed electrodes; and a conductor formed on the light-transmissive insulating layer forms an insulating layer, The conductor forming the insulating layer is formed with a plurality of conductor forming holes each exposing a corresponding electrode; and a conductor unit formed in the conductor forming holes and electrically connectable to the corresponding electrode. 如申請專利範圍第11項所述之發光二極體晶片封裝體,在形成導體單元的步驟中,每個導體單元是由一個由銀、鋁、與它們之合金中之一者形成的第一導體層、一個由鉻、鈦、銅、或它們之合金中之一者形成的第二導體層、一個由鎳、銅、鉻、或它們之合金中之一者形成的第三導體層、與一個由鎳、金、或它們之合金中之一者形成的第四導體層構成。 The illuminating diode package according to claim 11, wherein in the step of forming the conductor unit, each conductor unit is formed by a first one of silver, aluminum, and an alloy thereof. a conductor layer, a second conductor layer formed of one of chromium, titanium, copper, or an alloy thereof, a third conductor layer formed of one of nickel, copper, chromium, or an alloy thereof, and A fourth conductor layer formed of one of nickel, gold, or an alloy thereof.
TW099133955A 2010-02-04 2010-10-05 A light emitting diode chip package and packaging method thereof TWI449222B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1399352A (en) * 2001-07-23 2003-02-26 连勇科技股份有限公司 Light-emitting semiconductor device capable of being surface mounted and with composite packing structure
TW201029230A (en) * 2009-01-23 2010-08-01 Everlight Electronics Co Ltd Light emitting diode package

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1399352A (en) * 2001-07-23 2003-02-26 连勇科技股份有限公司 Light-emitting semiconductor device capable of being surface mounted and with composite packing structure
TW201029230A (en) * 2009-01-23 2010-08-01 Everlight Electronics Co Ltd Light emitting diode package

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