TWI448380B - Optical element forming device - Google Patents

Description

Optical component forming device

The present invention relates to an optical element molding apparatus for molding an optical element by transfer of a shape of a molding die.

Patent Document 1 discloses a technique in which a detecting mechanism for maintaining parallelism is provided on a counter-arranged mold support.

However, the technique of Patent Document 1 requires a high degree of parallelism between the mold support and the mold, and when the parallelism is damaged, there is a problem that the desired detection accuracy cannot be obtained. Further, the technique of Patent Document 1 causes a problem that the eccentricity generated by the mold itself cannot be detected.

Therefore, in order to solve the above problem, Patent Document 2 discloses a technique of providing a mechanism for detecting an eccentricity between molds by reflected light reflected from a mold. Further, according to the technique of Patent Document 2, a flat portion is provided on the upper mold, and reflected light reflected from the flat portion is detected, thereby performing tilt adjustment of the upper mold (refer to the same document Fig. 3).

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Laid-Open Patent Publication No. JP-A-63-295450 (published on December 1, 1988)

[Patent Document 2] Japanese Laid-Open Patent Publication No. Hei 4-342429 (published on Nov. 27, 1992)

However, the technique of Patent Document 2 has a problem that it cannot be applied to a mold for molding an optical element array. Specifically, the technique of Patent Document 2 generates an optical element array (and each of the optical elements constituting the same) about the direction of rotation of the optical axis (the direction of rotation perpendicular to the optical axis) specific to the eccentricity of the mold for molding the optical element array. The degree of rotation of the component cannot be detected.

Further, the technique of Patent Document 2 has a problem that it cannot be applied to a mold in which a lens having a spherical surface on both sides is formed. Specifically, in the technique of Patent Document 2, when the lower mold is a mold for a spherical lens, the shape of the lens forming portion of the lower mold becomes a spherical surface, and even if the lower mold is inclined, the distribution of the reflected light from the molded portion of the lens is not Changes, so there is a problem that tilt detection cannot be performed.

As described above, in the technique of Patent Document 2, in the mold for molding the optical element array or the lens having the spherical surface on both sides, it is difficult to detect the eccentric core, and thus it is difficult to mold the optical element for suppressing the eccentricity.

The present invention has been made in view of the above problems, and an object thereof is to realize an optical element molding apparatus which can easily mold an optical element which suppresses eccentricity.

That is, the problem of the present invention is to adjust the inclination of the molds and the axial deviation of the molds on both sides of the transfer optical element. In particular, in the case of an optical element array (wafer level lens, etc.), adjustment of the eccentricity also requires adjustment of the direction of rotation about the optical axis of the mold. Therefore, as in each of the techniques of Patent Documents 1 and 2, the support of the outer diameter is not sufficient for the adjustment of the eccentricity of the mold, and when the meniscus lens having the steep structure is formed, the mold is eccentric due to the molding. Contact with each other and damage. Therefore, as an optical element molding apparatus, it is required to be able to easily and accurately align the mold.

In order to solve the above problems, an optical element molding apparatus according to the present invention is characterized in that it comprises a molding die which is disposed by a molding portion provided with an effective diameter of a molding optical element and a mold disposed at a flat portion around the molding portion. And a photodetector for detecting a parallel eccentricity between the molding portions of the opposed molds; and the optical element molding device includes: a flat portion reflecting mechanism for guiding the incident light beam to the opposite direction a flat portion of each of the molds, and directing a light beam reflected by the flat portions to the photodetector; and a molding portion reflecting mechanism for guiding the incident light beam to the molding portion of each of the opposing molds, and The light beam reflected by each of the molding portions is guided to the photodetector, and the photodetector detects the tilt angle of each of the opposing molds based on the light beam guided to the photodetector by the flat portion reflecting mechanism, and based on the utilization The molded portion reflecting mechanism is guided to a light beam of the photodetector to detect the parallel eccentricity.

According to the above configuration, the flat portion reflecting means detects the inclination angle of each of the opposed molds based on the reflected light beams from the flat portions. When tilting any of the opposed molds, whether or not the mold is a lens having two spherical surfaces, the light distribution of the reflected light beams from the flat portions changes, so that the change can be detected by the photodetector. The tilt angle is detected. Further, after the eccentricity of the tilt angle is adjusted, the parallel eccentricity between the molded portions of the opposing molds is detected by using the molding portion reflection mechanism, and the eccentricity of the mold having the spherical mirrors on both sides can be detected and adjusted. .

Therefore, the optical element molding apparatus of the present invention can prevent the eccentric optical element from being easily molded.

As described above, the optical element molding apparatus of the present invention includes a molding die which is disposed by a molding portion provided with an effective diameter of the molding optical element and a mold disposed at a flat portion around the molding portion, and a photodetector. Detecting a parallel eccentricity between the molded portions of the oppositely disposed molds; and the optical element molding device includes: a flat portion reflecting mechanism for guiding the incident light beam to the flat portion of each of the opposing molds, and The light beam reflected by the flat portions is guided to the photodetector; and the molding portion reflecting mechanism is configured to guide the incident light beam to the molding portion of each of the opposing molds, and to reflect through the molding portions. The light beam is guided to the photodetector; the photodetector detects the tilt angle of each of the opposing molds based on the light beam guided to the photodetector by the flat portion reflecting mechanism, and is guided based on the reflecting mechanism by the forming portion The light beam of the photodetector detects the parallel eccentricity.

Therefore, the optical element molding apparatus of the present invention works to suppress the effect that the optical element of the eccentric core is easily formed.

[Embodiment 1]

The optical element molding apparatus 100 shown in Fig. 1 includes a mold (forming mold) 1, a light source 2, beamsplitters 3 to 5, and a photodetector 6.

The mold 1 is formed by molding a molded object such as a resin into an optical element such as a lens, and includes two molds of a mold 11a and a mold lower 11b.

On the mold upper surface 11a, a molding portion 12a of a plurality of (four in FIG. 1) molding optical elements (effective caliber) is disposed on the surface of the molded object.

On the mold lower portion 11b, a molding portion lower portion 12b of a plurality of (four in FIG. 1) molding optical elements (effective caliber) is disposed on the surface of the molded object.

Further, the mold upper portion 11a and the mold lower portion 11b are disposed such that the surfaces of the molded object to be molded face each other. Specifically, the mold upper portion 11a and the mold lower portion 11b are disposed such that the respective molded portion upper portions 12a and the corresponding molded portion lower portions 12b face each other in the Z direction (upper and lower than the paper surface).

Hereinafter, the one molding portion 12a and the one molding portion lower portion 12b opposed thereto are collectively referred to as "combination of molding portions". Moreover, for convenience of explanation, in the drawings 1 to 4, the Z direction, the X (the left and right parallel to the paper surface) direction, and the Y (the direction perpendicular to the paper surface) are mutually defined.

On the mold upper portion 11a, a flat portion 13a is provided around each molding portion 12a. The flat portion 13a is provided in a planar region between the adjacent two molding portions 12a on the mold 11a.

On the mold lower portion 11b, a flat portion lower portion 13b is provided around each molding portion lower portion 12b. The flat portion lower portions 13b are respectively provided in planar regions between the adjacent two molding portion lower portions 12b on the lower mold 11b.

At the time of molding, the mold 1 presses the object to be molded between the mold upper 11a and the lower mold 11b by the mold upper 11a and the lower mold 11b.

The mold upper portion 11a is transferred to the molded object to be molded, and is transferred to a shape opposite to the molded portion 12a, thereby deforming the molded product to form a surface of each of the optical elements.

The mold lower portion 11b is transferred to the molded object to be molded, and is transferred to the opposite shape of each molded portion lower portion 12b, thereby deforming the molded product to form the other surface of each optical element.

Thereby, the molded object is molded into an optical element by the mold 1, and the opposite side of the molded object is transferred to the shape of the molded portion 12a as an effective diameter (lens surface), and the other side opposite to the transfer molding portion The opposite shape of 12b is taken as the effective aperture (lens surface). The optical element is formed by combining one of each molding portion.

Further, in the Z direction, when the flat portion 13a and the flat portion lower portion 13b are pressed by the mold upper 11a and the mold lower portion 11b, they are separated only to the extent that they do not contact each other. Therefore, the molded object is supplied to the separated space during the pressing. The planar shape is transferred by the flat portion 13a and the flat portion lower 13b. The transfer of the planar shape forms a flat portion on the object to be molded. Further, after molding, each of the formed optical elements is integrated via the flat portion. Further, the structure in which the optical elements are integrated by the planar portion corresponds to the optical element array (lens array) of the present invention.

The molded portion upper portion 12a and the molded portion lower portion 12b are illustrated as being convenient for illustration, and only a plurality of them are arranged along the X direction. However, similarly, a plurality of them may be arranged along the Y direction. The mold upper portion 11a and the lower mold portion 11b are formed on the surface of the mold 11a on the surface of the molded object to be formed opposite to each other (in the X-direction and the Y-direction opposite to each other in Figs. 1 to 4). At least one molded portion upper portion 12a is provided with at least one molded portion lower portion 12b on the mold lower portion 11b.

Further, both the molded portion upper portion 12a and the molded portion lower portion 12b may have a spherical surface as shown in FIG. 1, and may have an aspherical surface.

Further, the molded portion upper portion 12a has a concave shape in Fig. 1, but may have a convex shape, and the molded portion lower portion 12b has a convex shape in Fig. 1, but may have a concave shape.

Further, the mold 1 is required to include a mold upper 11a having a molded portion upper portion 12a and a flat portion 13a, and a mold lower portion 11b having a molded portion lower portion 12b and a flat portion lower portion 13b. However, the number of combinations of the molded portions in the mold 1 is not limited to a plurality, and may be one.

Further, the mold 1 is not particularly limited as long as it can form a molded object into an optical element and can reflect light, and can be replaced with a molding die containing a material other than metal.

The mold 1 has the same configuration as that described above in the optical element molding apparatus 300 (described later in detail) shown in FIG.

The light source 2 is disposed in the transverse direction of the mold 1, in other words, in the direction in which the mold 1 is parallel to the respective faces of the molded object to be molded. The light source 2 is capable of emitting a fine and parallel beam toward the mold 1, for example using a well-known semiconductor laser. The light source 2 is one in FIG. 1, but may be plural.

The beamsplitters 3 to 5 respectively divide the incident one light beam into two or three or more separated light beams.

The spectroscope (beam splitting mechanism) 3 is disposed between the light source 2, the beamsplitters 4 and 5, and is disposed on the optical axis of the light beam emitted from the light source 2.

When the light beam emitted from the light source 2 is incident, the beam splitter 3 splits the light beam into at least two light beams and emits the light beam. Of the two beams that are emitted after the division, one direction of the photodetector 6 is emitted, and the other direction of the beam splitters 4 and 5 is emitted.

The beamsplitters 4 and 5 are disposed on the optical axis of the light beam emitted from the spectroscope 3 to the beamsplitters 4 and 5.

The spectroscope (molding portion reflecting means) 4 is disposed between the molding portion 12a and the molding portion lower portion 12b which constitute a combination of the one constituent portions. The spectroscope 14 is disposed between the apex 12ac corresponding to the apex of one of the optical elements, and the apex 12bc corresponding to the apex of the other surface of the optical element 12b in the molded portion 12a. By.

When the light beam emitted from the spectroscope 3 is incident, the spectroscope 4 reflects the beam forming portion 12a and the molding portion lower portion 12b in a combination corresponding to the constituent portion 1 of the configuration in which the spectroscope 4 is disposed. Introduced into the molded portion upper portion 12a and the molded portion lower portion 12b. Further, the light beam introduced into the molding portion 12a is reflected on the molding portion 12a, the reflected light beam is again incident on the spectroscope 4, and the light beam introduced into the molding portion lower portion 12b is reflected by the molding portion lower portion 12b, and the reflected light beam is incident on the spectroscope 4 again. .

The spectroscope 4 introduces the light beam into the spectroscope 3 when it is incident on a light beam that is reflected by both the molding portion 12a and the molding portion lower portion 12b. The light beam introduced from the spectroscope 4 to the spectroscope 3 passes through the spectroscope 3 and is emitted to the photodetector 6.

The spectroscope (flat portion reflecting means) 5 is disposed between the flat portion 13a and the flat portion 13b opposed thereto.

When the light beam emitted from the spectroscope 3 is incident, the spectroscope 5 introduces the light beam to the flat portion 13a corresponding to the position where the spectroscope 5 is disposed and the flat portion 13b opposite thereto. The upper portion 13a and the flat portion 13b. Further, the light beam introduced on the flat portion 13a is reflected on the flat portion 13a, the reflected light beam is again incident on the spectroscope 5, and the light beam introduced into the flat portion lower portion 13b is reflected at the flat portion lower portion 13b, and the reflected light beam is incident on the spectroscope 5 again. .

The beam splitter 5 introduces the light beam into the spectroscope 3 when it is incident on a light beam that is reflected by both the flat portion 13a and the flat portion 13b opposed thereto. The light beam introduced from the spectroscope 5 to the spectroscope 3 is emitted to the photodetector 6 through the spectroscope 3.

The photodetector 6 is configured using a well-known light position detecting element such as a photodetector.

As described above, the light detector 6 introduces a light beam split by the light splitter 3 from the light source of the light source 2, a light beam obtained by the spectroscope 4 passing through the spectroscope 3, and a light beam obtained by the spectroscope 5 passing through the spectroscope 3.

Each of the light beams introduced into the photodetector 6 is irradiated and collected on the surface of the photodetector 6, forming different spots (also called collecting points). The light spot is a region that appears in the irradiated portion when the fine light is irradiated on a certain surface, and means a region where the intensity of light is higher than other portions.

The photodetector 6 is configured to understand the positional deviation amount and/or the angular deviation amount of the mold 1 under the mold 11b on the mold 11a according to the positional deviation amount of each of the light spots formed on the surface thereof. . The positional deviation amount and/or the angular deviation amount of the lower mold 11b on the mold 11a corresponds to the eccentricity of the mold 1.

Fig. 2 is a schematic view showing the principle of operation of the optical element molding apparatus 100 shown in Fig. 1.

The parallel light beam 21 emitted from the light source 2 is incident on the beam splitter 3.

The spectroscope 3 divides the incident parallel beam 21 into a beam 22 that is emitted toward the photodetector 6, and a beam 23 that is emitted to the spectroscope 4 (5).

The light beam 22 emitted from the spectroscope 3 to the photodetector 6 is irradiated and collected on the surface of the photodetector 6, forming a spot S1.

The light beam 23 emitted from the spectroscope 3 to the spectroscope 4 (5) is incident on the spectroscope 4 (5).

The spectroscope 4 (5) reflects the incident light beam 23 and introduces it as a light beam 24 onto the mold 11a.

The light beam 24 introduced onto the mold 11a is reflected on the mold 11a, and the reflected light beam 25 is incident on the beam splitter 4 (5).

The spectroscope 4 (5) transmits the incident light beam 25 and introduces it as a light beam 26 toward the mold lower 11b.

The light beam 26 introduced under the mold 11b is reflected by the lower mold 11b, and the reflected light beam 27 is incident on the spectroscope 4 (5).

The spectroscope 4 (5) transmits the incident beam 27 and introduces it as a beam 28 onto the mold 11a.

The light beam 28 introduced onto the mold 11a is reflected on the mold 11a, and the reflected light beam 29 is incident on the beam splitter 4 (5).

The spectroscope 4 (5) reflects the incident light beam 29 and introduces it as a light beam 30 to the spectroscope 3.

The light beam 30 introduced from the spectroscope 4 (5) to the spectroscope 3 is incident on the spectroscope 3.

The spectroscope 3 reflects the incident light beam 30 and emits it as a light beam 31 to the photodetector 6.

The light beam 31 emitted from the spectroscope 3 to the photodetector 6 is irradiated and collected on the surface of the photodetector 6, forming a spot S2.

When the position where the light spot S1 is formed coincides with the position at which the light spot S2 is formed, the positional deviation and/or the angular deviation of the lower mold 11b on the mold 11a, that is, the eccentricity of the mold 1 can be regarded as not occurring. At this time, the mold upper 11a and the lower mold 11b have an ideal arrangement relationship without positional deviation or angular deviation therebetween, and the mold 1 can be molded to sufficiently suppress the eccentric optical element.

When the position where the light spot S1 is formed does not coincide with the position where the light spot S2 is formed, it may be regarded as the eccentricity of the mold 1, and the eccentricity (the eccentricity of the detected mold) depends on the spot S1 and the spot S2. The vector of the interval d.

For convenience, the light beam 23 incident on the spectroscope 4 (5) is reflected twice on the mold 11a, and once reflected by the mold 11b, and then emitted to the spectroscope 3. However, it is desirable to understand that the light beam 23 actually incident on the spectroscope 4 (5) is between the mold 11a and the lower mold 11b, repeats the number of times of reflection, and then exits toward the spectroscope 3.

In addition, the beam splitter 4 (5) can be assumed to be the beam splitter 4, and can also be assumed to be the beam splitter 5, meaning that the splitters 4 and 5 operate in the same principle.

That is, when the spectroscope 4 (5) is assumed to be the spectroscope 4, the beams 24 and 28 are reflected on the molded portion 12a (see Fig. 1) of the mold 11a, and the beam 26 is formed under the molded portion 11b under the mold 11b (refer to Fig. 1). )reflection.

Similarly, when the spectroscope 4 (5) is assumed to be the spectroscope 5, the beams 24 and 28 are reflected on the flat portion 13a (see Fig. 1) of the mold 11a, and the beam 26 is below the flat portion 13b of the mold 11b (refer to Fig. 1). )reflection.

A method of correcting the eccentricity of the mold 1 (hereinafter, this behavior is referred to as aligning) will be described using the optical element molding apparatus 100 having the above configuration.

First, a parallel light beam is emitted from the light source 2, a light spot S1 is formed on the surface of the photodetector 6 (refer to FIG. 2), and a light spot S2 is formed on the surface of the photodetector 6 using the spectroscope 5 (refer to FIG. 2). . Then, the inclination angle of the mold upper 11a and/or the lower mold 11b is adjusted so that the position where the light spot S1 is formed coincides with the position where the light spot S2 is formed. When the positions are the same, the surface of the molded object 11a on the mold (the surface on which the molded portion 12a is provided) and the surface of the molded product under the molded mold 11b (the surface under the molded portion 12b are formed) are formed. Properly inclined angles and parallel to each other. In this way, the parallelism between the mold upper 11a and the lower mold 11b in the mold 1 is corrected, thereby eccentrically tilting the eccentric core.

Next, the light beam (i.e., the light beam 24 shown in FIG. 2) previously introduced from the spectroscope 4 on the mold 11a is adjusted to the apex 12ac in a combination of a certain constituent portion, and the spectroscope 4 or the mold 11a is adjusted. The position in the X direction and the Y direction. Thereafter, a parallel light beam is emitted from the light source 2, a light spot S1 is formed on the surface of the photodetector 6 (refer to FIG. 2), and a light spot S2 is formed on the surface of the photodetector 6 using the beam splitter 4 (refer to FIG. 2). ). Then, the positions of the X-direction and the Y-direction of the lower mold 11b are adjusted so that the position where the light spot S1 is formed coincides with the position at which the light spot S2 is formed. When the positions are identical, the apex 12ac and the apex 12bc of the combination of the first constituent portions are located on a straight line extending in the same Z direction (the direction perpendicular to the appropriate tilt angle). In this manner, the parallel eccentricity (the amount of positional deviation between the centers of the two surfaces of the optical element) between the molded portion 12a of the combination of the first constituent portions and the opposing molded portion lower portion 12b in the mold 1 is adjusted.

Next, regarding the combination of the other at least one constituent portions described above, the alignment of the parallel eccentric cores as described above is performed. In this case, the beam splitter 4 may be moved by introducing a light beam to the combination of the other molded portions, and the other beam splitters 4 may be newly provided (the molding portion is provided in each combination of the molded portions of the oppositely disposed molds) Reflection mechanism). As a result, the combination of at least two constituent portions can be aligned with the eccentric parallel core, so that the direction of rotation of the optical axis around each optical element (the direction of rotation perpendicular to the optical axis) can be performed, that is, along the X-containing The direction of the direction and the direction of the Y direction is opposite to the degree of rotation of the mold 11a and the lower 11b of the mold.

In addition, the splitters 4 and 5 need not be separately provided, and one same splitter that can be moved according to the alignment operation of the mold 1 can be shared.

Further, as a mechanism for adjusting the inclination angle and/or position of the mold upper 11a and the lower mold 11b, the mold upper 11a and the lower mold 11b are attached to the movable pedestal, and the pedestal is moved. Such a configuration can be easily realized by well-known conventional techniques, and thus detailed description thereof will be omitted.

[Embodiment 2]

The optical element molding apparatus 300 shown in Fig. 3 differs from the optical element molding apparatus 100 shown in Fig. 1 in the following points.

The light source 2 is changed from a light source to a light source having two light sources 2a and 2b.

The light sources 2a and 2b are respectively configured to be the same as the light source 2, and the relative positional relationship is known.

The beamsplitters 4 and 5 are changed to the mirrors 34 and 35.

The mirror (molding portion reflecting means) 34 is disposed at the same position as the spectroscope 4, and includes a mirror 34 upper 34a and a mirror 34 lower 34b.

When the light beam emitted from the light source 2a is split by the beam splitter 3 and the split light beam is incident on the mirror 34a, the mirror 34 reflects the divided light beam and is guided to the position corresponding to the position where the mirror 34 is disposed. 1 The molded portion 12a of the combination of the constituent parts. The light beam guided to the molding portion 12a is reflected on the molding portion 12a, and the reflected light beam is again reflected on the mirror 34a, and guided to the beam splitter 3. The light beam guided to the spectroscope 3 from the mirror 34 on the 34a is emitted through the spectroscope 3 to the photodetector 6.

When the light beam emitted from the light source 2b is divided by the beam splitter 3 and the split light beam is incident on the mirror 34 under 34b, the mirror 34bb reflects the divided light beam and is guided to a position corresponding to the position where the mirror 34 is disposed. 1 The molded part under the combination of the constitutive parts 12b. The light beam guided to the lower portion 12b of the molding portion is reflected by the lower portion 12b of the molding portion, and the reflected light beam is again reflected by the lower portion 34b of the mirror 34, and is guided to the spectroscope 3. The light beam guided to the spectroscope 3 from the lower surface 34b of the mirror 34 is emitted to the photodetector 6 through the spectroscope 3.

The mirror (flat portion reflecting means) 35 is disposed at the same position as the spectroscope 5, and includes a mirror 35 upper 35a and a mirror 35 lower 35b.

When the light beam emitted from the light source 2a is split by the spectroscope 3 and the split light beam is incident on the mirror 35 on the mirror 35a, the mirror 35 reflects the divided light beam on the mirror 35, and is guided to a flat position corresponding to the position where the mirror 35 is disposed. Part 13a. The light beam guided to the flat portion 13a is reflected on the flat portion 13a, and the reflected light beam is again reflected on the mirror 35 on the 35a, and is guided to the beam splitter 3. The light beam guided to the spectroscope 3 from the mirror 35 on the 35a is emitted through the spectroscope 3 to the photodetector 6.

When the light beam emitted from the light source 2b is divided by the beam splitter 3 and the split light beam is incident on the mirror 35bb, the mirror 35b reflects the divided light beam and is guided to a flat position corresponding to the position where the mirror 35 is disposed. Subordinate 13b. The light beam guided to the flat portion lower portion 13b is reflected by the flat portion lower portion 13b, and the reflected light beam is again reflected by the mirror 35 under the 35b, and is guided to the spectroscope 3. The light beam guided to the spectroscope 3 from the lower surface 35b of the mirror 35 is emitted to the photodetector 6 through the spectroscope 3.

The light detector 6 is introduced: a light beam split by the light splitter 3 from the light source 2a, a light beam split by the light splitter 3 from the light source 2b, and a light beam obtained from the mirror 34 on the 34a through the spectroscope 3. The light beam obtained from the spectroscope 3 under the mirror 34 34b, the light beam obtained from the mirror 35 on the 35a through the spectroscope 3, and the light beam obtained from the mirror 35 down 35b through the spectroscope 3.

Fig. 4 is a schematic view showing the principle of operation of the optical element molding apparatus 300 shown in Fig. 3.

The parallel light beam 41a emitted from the light source 2a is incident on the beam splitter 3.

The spectroscope 3 divides the incident parallel light beam 41a into a light beam 42a that is emitted to the photodetector 6, and a light beam 43a that is emitted toward the mirror 34a (35a).

The light beam 42a emitted from the spectroscope 3 to the photodetector 6 is irradiated and collected on the surface of the photodetector 6, forming a spot S1a.

The light beam 43a emitted from the spectroscope 3 toward the mirror 34a (35a) is reflected on the mirror 34a (35a).

The mirror 34a (35a) introduces the reflected light beam 43a as a light beam 44a onto the mold upper 11a.

The light beam 44a introduced onto the mold 11a is reflected on the mold 11a, and the reflected light beam 45a is reflected on the mirror 34a (35a).

The mirror 34a (35a) introduces the reflected light beam 45a as a light beam 46a to the beam splitter 3.

The light beam 46a introduced from the mirror 34a (35a) to the spectroscope 3 is incident on the spectroscope 3.

The spectroscope 3 reflects the incident light beam 46a and emits it as a light beam 47a to the photodetector 6.

The light beam 47a emitted from the spectroscope 3 to the photodetector 6 is irradiated and collected on the surface of the photodetector 6, forming a spot S2a.

The parallel light beam 41b emitted from the light source 2b is incident on the spectroscope 3.

The spectroscope 3 divides the incident parallel light beam 41b into a light beam 42b that is emitted to the photodetector 6, and a light beam 43b that is emitted toward the mirror 34b (35b).

The light beam 42b emitted from the spectroscope 3 to the photodetector 6 is irradiated and collected on the surface of the photodetector 6, forming a spot S1b.

The light beam 43b emitted from the spectroscope 3 to the mirror under 34b (35b) is reflected by the mirror 34b (35b).

The mirror 34b (35b) introduces the reflected light beam 43b as a light beam 44b into the mold lower 11b.

The light beam 44b introduced under the mold 11b is reflected by the lower mold 11b, and the reflected light beam 45b is reflected by the mirror 34b (35b).

The mirror 34b (35b) introduces the reflected light beam 45b as a light beam 46b to the spectroscope 3.

The light beam 46b introduced from the mirror 34b (35b) to the spectroscope 3 is incident on the spectroscope 3.

The spectroscope 3 reflects the incident light beam 46b and emits it as a light beam 47b to the photodetector 6.

The light beam 47b emitted from the spectroscope 3 to the photodetector 6 is irradiated and collected on the surface of the photodetector 6, forming a spot S2b.

The position where the light spot S1a is formed coincides with the position where the light spot S2a is formed, and the position where the light spot S1b is formed coincides with the position where the light spot S2b is formed, and the position deviation of the lower mold 11b on the mold 11a is // Or the angular deviation, that is, the eccentricity of the mold 1 can be regarded as not generated. At this time, the mold upper 11a and the lower mold 11b have an ideal arrangement relationship without positional deviation or angular deviation therebetween, and the mold 1 can be molded to sufficiently suppress the eccentric optical element.

The case where the position where the light spot S1a is formed does not coincide with the position where the light spot S2a is formed, and/or the position where the light spot S1b is formed does not coincide with the position where the light spot S2b is formed, can be regarded as the eccentricity of the mold 1 The eccentricity (the eccentricity of the detected mold) depends on the vector of the interval da between the spot S1a and the spot S2a, and the vector of the interval db between the spot S1b and the spot S2b.

Alternatively, the mirror 34a (35a) means that it can be assumed to be 34a on the mirror 34, and can also be assumed to be 35a on the mirror 35, meaning that the mirror 34 is 34a and the mirror 35 is 35a, and the principle of operation is the same.

That is, assuming that the mirror 34a (35a) is the mirror 34a, the light beam 44a is reflected on the molded portion 12a (see Fig. 3) of the mold upper 11a.

Similarly, assuming that the mirror 34a (35a) is 35a on the mirror 35, the light beam 44a is reflected on the flat portion 13a (see Fig. 3) of the mold 11a.

Further, the mirror 34b (35b) means that the assumption is that the mirror 34 is 34b or the mirror 35 is 35b, that is, the mirror 34 is 34b and the mirror 35 is 35b, and the operation principle is the same.

That is, assuming that the mirror 34b (35b) is the mirror 34 down 34b, the light beam 44b is reflected by the molded portion lower portion 12b (see Fig. 3) of the mold lower portion 11b.

Similarly, assuming that the mirror 34b (35b) is the 35b under the mirror 35, the light beam 44b is reflected under the flat portion 13b (see Fig. 3) of the lower portion 11b of the mold.

The method of aligning the mold 1 will be described using the optical element molding apparatus 300 having the above configuration.

First, parallel light beams are emitted from the light sources 2a and 2b, and spots S1a and S1b are formed on the surface of the photodetector 6 (refer to FIG. 4), and a spot S2a is formed on the surface of the photodetector 6 using the mirror 35 on 35a ( Referring to Fig. 4), a spot S2b (see Fig. 4) is formed on the surface of the photodetector 6 using the mirror 35 under 35b. Then, the inclination angle of the mold upper 11a and/or the lower mold 11b is adjusted so that the position where the light spot S1a is formed coincides with the position where the light spot S2a is formed, and the position where the light spot S1b is formed and the spot S2b formed are formed. The position is the same. When the positions are the same, the surface of the molded article 11a where the molded article is to be formed (the surface of the molded portion 12a is provided), and the surface of the molded article 11b where the molded article is to be formed (the surface of the molded portion 12b is provided) Become appropriate angles and parallel to each other. In this way, the parallelism between the mold upper 11a and the lower mold 11b in the mold 1 can be corrected, and the alignment of the inclined eccentric core can be performed.

Next, the position of the mirror 34 or the upper portion 11a of the mold 11 in the X direction and the Y direction is adjusted in advance so that the light beam guided from the mirror 34 34a to the mold 11a (i.e., the light beam 44a shown in Fig. 4) is directed to a certain constituent portion. The apex of the combination is 12ac. Thereafter, parallel light beams are emitted from the light sources 2a and 2b, and spots S1a and S1b are formed on the surface of the photodetector 6 (refer to FIG. 4), and a spot S2a is formed on the surface of the photodetector 6 using the mirror 34 on 34a. (Refer to Fig. 4), a spot S2b is formed on the surface of the photodetector 6 using the mirror 34 under 34b (see Fig. 4). Then, the position of the mold 11b in the X direction and the Y direction is adjusted so that the position where the spot S1a is formed coincides with the position at which the spot S2a is formed, and the position where the spot S1b is formed and the position where the spot S2b is formed are formed. Consistent. When the positions are identical, the apex 12ac and the apex 12bc of the combination of the first constituting portions are located on a straight line extending in the same Z direction (the direction perpendicular to the appropriate tilt angle). As described above, in the combination of the above-described one-component portions in the mold 1, the alignment of the parallel eccentricity between the molded portion 12a and the molded portion lower portion 12b opposed thereto can be performed.

Next, for the combination of at least one of the other constituent portions different from the above, the alignment of the parallel eccentric cores as described above is performed. In this case, the mirror 34 may be moved by introducing a light beam to the combination of the molded portions different from the above, or another mirror 34 may be newly provided (in each combination of the molded portions of the opposite configurations, Molding part reflection mechanism). As a result, the combination of at least two constituent parts is aligned with the eccentric parallel core, so that the direction of rotation of the optical axis around each optical element (the direction of rotation perpendicular to the optical axis) can be performed, that is, along the The surface of the X direction and the Y direction is adjusted with respect to the degree of rotation of the mold 11b under the mold 11a.

Further, the mirrors 34 and 35 need not be separately provided, and one mirror (specifically, a combination of upper and lower mirrors) that can move in accordance with the correction operation of the eccentricity of the mold 1 can be shared.

Moreover, the optical element molding apparatus of the present invention is characterized in that it includes a light source for causing a light beam to enter the flat portion reflection mechanism and the molding portion reflection mechanism, and the flat portion reflection mechanism and the molding portion reflection mechanism are beamsplitters.

Moreover, the optical element molding apparatus of the present invention is characterized in that it includes two light sources for causing a light beam to enter the flat portion reflection mechanism and the molding portion reflection mechanism, and the flat portion reflection mechanism and the molding portion reflection mechanism are each light source. A mirror that is configured to correspond to each mold of the configuration.

According to the above configuration, the deviation of the mold can be easily detected by the mirror obtained by the reflection of the mold.

Moreover, the optical element molding apparatus of the present invention includes a dividing mechanism that divides a light beam incident from the light source into at least two light beams, emits one of the divided light beams, and emits the other of the divided light beams. The flat portion reflecting mechanism and the forming portion reflecting mechanism are emitted in the direction.

According to the above configuration, the inclination of the light beam passing through the beam splitting means from the light source element and the position of the light beam passing through the beam splitting means from the flat portion reflecting means and the forming portion reflecting means can detect the tilt angle and the parallel eccentricity, thereby making it possible to Easy to detect.

Further, in the optical element molding apparatus of the present invention, the molding portion of each of the opposed molds is provided with a plurality of arrays in the molding die, and the molding portion reflection mechanism is used for forming portions of the respective molds disposed opposite each other. At least two groups of the above-mentioned parallel eccentrics are detected. Moreover, the optical element molding apparatus of the present invention is characterized in that the molding portion reflecting means is provided in each combination of the molding portions of the respective molds disposed opposite to each other.

According to the above configuration, the mold having the combination of the molding portions of the respective molds disposed in the opposite direction of the plurality of arrays, in other words, the mold of the molding optical element array, is adjusted by the combination of the molding portions of at least two groups. The core is formed by aligning the degree of rotation of each of the optical elements formed in the forming mold around the direction of rotation of the optical axis (the direction of rotation of the plane perpendicular to the optical axis). The realization of the alignment is also convenient when performing the general adjustment of the forming mold.

The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims. The embodiments obtained by appropriately combining the technical means disclosed in the different embodiments are also included in the technical scope of the present invention.

[Industrial availability]

The present invention can be utilized in an optical element molding apparatus for molding an optical element by transfer of a shape of a molding die.

1. . . Mold (forming die)

2, 2a, 2b. . . light source

3. . . Beam splitter (beam splitting mechanism)

4. . . Beam splitter (shaping unit reflection mechanism)

5. . . Beam splitter (flat reflector)

6. . . Photodetector

11a. . . On the mold

11b. . . Under the mold

12a. . . On the forming section

12ac. . . Vertex

12b. . . Under the molding department

12bc. . . Under the apex

13a. . . On the flat

13b. . . Under the flat

34. . . Mirror (forming part reflection mechanism)

35. . . Mirror (flat reflection mechanism)

100, 300. . . Optical component forming device

Fig. 1 is a cross-sectional view showing a schematic configuration of an optical element molding apparatus according to an embodiment of the present invention.

Fig. 2 is a schematic view showing the principle of operation of the optical element molding apparatus shown in Fig. 1.

Fig. 3 is a cross-sectional view showing a schematic configuration of an optical element molding apparatus according to another embodiment of the present invention.

Fig. 4 is a schematic view showing the principle of operation of the optical element molding apparatus shown in Fig. 3.

1. . . Mold

2. . . light source

3, 4, 5. . . Splitter

6. . . Photodetector

11a. . . On the mold

11b. . . Under the mold

12a. . . On the forming section

12ac. . . Vertex

12b. . . Under the molding department

12bc. . . Under the apex

13a. . . On the flat

13b. . . Under the flat

100. . . Optical component forming device

Claims (4)

An optical element molding apparatus comprising: a molding die which is disposed by a molding portion provided with an effective diameter of a molding optical element and a mold disposed at a flat portion around the molding portion; and photodetection And a flat portion reflecting mechanism for guiding the incident light beam to the flat portion of each of the opposing molds, and passing through each of the molds a light beam reflected by the flat portion is guided to the photodetector; and a forming portion reflecting mechanism for guiding the incident light beam to the molding portion of each of the opposing molds, and the light beam obtained by the reflection of each molding portion a light guide that detects a tilt angle of each of the opposing molds based on a light beam that is guided to the light detector by the flat portion reflecting mechanism, and that is guided to the light detector based on the forming portion reflecting mechanism a light beam for detecting the parallel eccentric core; the flat portion reflecting mechanism and the forming portion reflecting mechanism comprise a light source for causing a light beam to enter; the flat portion is opposite The radiation mechanism includes a spectroscope that repeatedly reflects between the flat portions of the respective molds and returns to the photodetector side, and the molding portion reflection mechanism includes a reflection between the respective molding portions of the respective molds and returns to the photodetector. Side splitter. An optical element molding apparatus according to claim 1, wherein the beam splitter is provided a light beam incident from the light source is divided into at least two light beams, one of the divided light beams is emitted from the light detector, and the other side of the divided light beam is the flat portion reflecting mechanism and the forming portion reflecting mechanism. Exit. The optical element molding apparatus according to claim 1, wherein the molding portion of each of the opposing molds is provided with a plurality of arrays in the molding die, and the molding portion reflection mechanism is configured to at least form a molding portion of each of the opposing molds Two groups were tested for the above-mentioned parallel eccentricity. The optical element molding apparatus of claim 3, wherein the molding portion reflection mechanism is provided in each combination of the molding portions of the respective molds disposed oppositely.