CN102101752A - Optical component forming device - Google Patents

Optical component forming device Download PDF

Info

Publication number
CN102101752A
CN102101752A CN2010105570959A CN201010557095A CN102101752A CN 102101752 A CN102101752 A CN 102101752A CN 2010105570959 A CN2010105570959 A CN 2010105570959A CN 201010557095 A CN201010557095 A CN 201010557095A CN 102101752 A CN102101752 A CN 102101752A
Authority
CN
China
Prior art keywords
light beam
forming part
mould
par
reflecting mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2010105570959A
Other languages
Chinese (zh)
Other versions
CN102101752B (en
Inventor
重光学道
花户宏之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of CN102101752A publication Critical patent/CN102101752A/en
Application granted granted Critical
Publication of CN102101752B publication Critical patent/CN102101752B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

The present invention relates to an optical component forming device. For realizing the optical component forming device which can perform forming to the optical component with restricted core shift. A photodetector of the optical component forming device according to the invention detects the inclination angle between an upper mold and a lower mold which are oppositely configured according to a light beam that is guided from a beam splitter to an optical detector. Furthermore parallel shifted core between an upper forming part and an opposite lower forming part is detected according to the light beam which is guided from the beam splitter to the optical detector.

Description

Optic element forming device
Technical field
The present invention relates to the optic element forming device that a kind of shape transferred thereon by shaping dies makes optical element forming.
Background technology
A kind of technology that is provided with on the mould supporter of subtend configuration in order to the detecting unit of keeping parallelism degree is disclosed in the patent documentation 1.
Yet the Technology Need of patent documentation 1 is realized the parallelism between mould supporter and the mould accurately, if can not get this parallelism, just can produce the problem of the accuracy of detection that can't obtain to expect.In addition, the technology of patent documentation 1 can produce the problem that can't detect the core shift that mould self produced.
To this,, in patent documentation 2 disclosed technology, be provided with the mechanism of detecting core shift between mould according to reflected light from the mould reflection in order to solve described problem.In addition, in the technology of patent documentation 2, be provided with planar portions, and detect, carry out the tilt adjustments (with reference to the Fig. 3 in the document) of patrix thus by the reflected light that this planar portions reflected at patrix.(prior art document)
Patent documentation 1: the open communique of Japan's patent application, " spy opens clear 63-295450 communique; On December 1st, 1988 is open.
Patent documentation 2: the open communique of Japan's patent application, " spy opens flat 4-342429 communique; On November 27th, 1992 is open.
Yet the technology of patent documentation 2 can't be applied to make the array of optical elements forming mould.Be specially, the technology of patent documentation 2 can produce following problem: the core shift that can't detect in the mold for forming of array of optical elements is peculiar, with around the cycle direction of optical axis (with vertical of optical axis on the cycle direction) the cycle degree of relevant array of optical elements (and constitute each optical element of this array of optical elements).
And the technology of patent documentation 2 can't be applied to forming mould is carried out for the lens of sphere in two surfaces.Be specially, the technology of patent documentation 2 can produce following problem: when counterdie is that spherical lens is when using mould, the shape of the lens moulding section in the counterdie just is a spherical surface, even therefore counterdie tilts, distribution of reflected light from this lens moulding section can not change yet, thereby can't carry out tilt detection.
According to above situation, be the mold for forming of the lens of sphere for array of optical elements or two surfaces, the technology of patent documentation 2 is difficult to detect core shift, therefore can produce the problem that is difficult to the optical element that has been suppressed core shift is carried out moulding.
Summary of the invention
The present invention develops in view of described problem, and its purpose is to realize a kind of optic element forming device that easily optical element that has been suppressed core shift is carried out moulding.
That is, problem of the present invention is the inclination to each other and the axle offset of the roller mould of optical element two surface shapes are adjusted.Especially for array of optical elements (wafer scale lens etc.),, need adjust cycle direction with regard to mould around optical axis as the adjustment of core shift.Therefore, if as each technology in patent documentation 1 and 2, only utilize the external diameter supporter, the rough adjustment of the core shift in the gang mould tool also can't be carried out, thereby when the meniscus with high-dipping structure was carried out moulding, the core shift in the time of may be owing to moulding caused mould to contact with each other and damaged.Therefore, optic element forming device needs and can transfer core to mould easily and exactly.
In order to solve described problem, optic element forming device of the present invention comprises, shaping dies, form by the mould subtend configuration that is provided with forming part and par, wherein, described forming part is with so that the effective pore radius moulding of optical element, described par be configured in described forming part around; Photodetector, forming part parallel core shift to each other in order to each mould of detecting the subtend configuration, this optic element forming device is characterised in that: possess, the par reflecting mechanism, in order to par with each mould of incident beam direction subtend configuration, and the described photodetector of beam direction that will obtain through the reflection of each par; The forming part reflecting mechanism, in order to forming part with each mould of incident beam direction subtend configuration, and will be through the reflection of each forming part and the described photodetector of beam direction that obtains, described photodetector detects the angle of inclination of each mould of subtend configuration according to the light beam of described par reflecting mechanism institute direct light detector, and detects described parallel core shift according to the light beam of described forming part reflecting mechanism institute direct light detector.
In described structure, use the par reflecting mechanism, according to reflected beam, detect the angle of inclination of each mould of subtend configuration from each par.If any run-off the straight of each mould of subtend configuration, no matter so whether to be the lens that two surfaces are sphere are carried out forming mould, distribute from the light of the reflected beam of each par and all can change, therefore by detect this variation by photodetector, just can detect this angle of inclination.Then, after the core shift adjustment has been carried out at the angle of inclination, use the forming part reflecting mechanism to detect the forming part parallel core shift to each other of each mould of subtend configuration, can impose the detection and the adjustment of core shift for the lens forming mould of sphere to making two surfaces thus.
Therefore, optic element forming device of the present invention can easily mold the optical element that has been suppressed core shift.
The invention effect
As previously discussed, optic element forming device of the present invention comprises: shaping dies is formed by the mould subtend configuration that is provided with forming part and par, wherein, described forming part is with so that the effective pore radius moulding of optical element, described par be configured in described forming part around; Photodetector is in order to the forming part parallel core shift to each other of each mould of detecting the subtend configuration.In this optic element forming device, possess: the par reflecting mechanism, in order to par with each mould of incident beam direction subtend configuration, and the described photodetector of beam direction that will obtain through the reflection of each par; The forming part reflecting mechanism, in order to forming part with each mould of incident beam direction subtend configuration, and will be through the reflection of each forming part and the described photodetector of beam direction that obtains, described photodetector detects the angle of inclination of each mould of subtend configuration according to the light beam of described par reflecting mechanism institute direct light detector, and detects described parallel core shift according to the light beam of described forming part reflecting mechanism institute direct light detector.
Therefore, the effect of optic element forming device of the present invention is easily to mold the optical element that has been suppressed core shift.
Description of drawings
Fig. 1 is the sectional view of schematic configuration of the optic element forming device of expression an embodiment of the present invention.
Fig. 2 is the sketch chart in order to the operating principle that optic element forming device shown in Figure 1 is described.
Fig. 3 is the sectional view of schematic configuration of the optic element forming device of expression the present invention other embodiments.
Fig. 4 is the sketch chart in order to the operating principle that optic element forming device shown in Figure 3 is described.
Description of reference numerals
1-mould (shaping dies)
2,2a, 2b-light source
3-beam splitter (light beam division mechanism)
4-beam splitter (forming part reflecting mechanism)
5-beam splitter (par reflecting mechanism)
The 6-photodetector
The 11a-patrix
The 11b-counterdie
The last forming part of 12a-
12b-compacted under portion
The last summit of 12ac-
Summit under the 12bc-
The last par of 13a-
Par under the 13b-
34-eyeglass (forming part reflecting mechanism)
35-eyeglass (par reflecting mechanism)
100,300-optic element forming device.
Embodiment
(embodiment 1)
Optic element forming device 100 shown in Figure 1 comprises mould (shaping dies) 1, light source 2, beam splitter (beam splitter) 3~5 and photodetector 6.
Mould 1 is in order to resin etc. be shaped to the mould of optical elements such as lens by forming composition, be made of patrix 11a and these two sub-moulds of counterdie 11b.
In patrix 11a, it is 4 that the required face with by the forming composition moulding time disposes among a plurality of forming part 12a(Fig. 1 of going up accordingly), last forming part 12a carries out moulding in order to the face (effective pore radius) to optical element.
In counterdie 11b, it is 4 that the required face with by the forming composition moulding time disposes among a plurality of compacted under 12b(Fig. 1 of portion accordingly), the 12b of compacted under portion is in order to carry out moulding to another face of optical element (effective pore radius).
In addition, in patrix 11a and counterdie 11b, each the required face during by the forming composition moulding is the subtend configuration each other.Be specially, patrix 11a and counterdie 11b with forming part 12a on each and pairing each 12b of compacted under portion at the Z(above-below direction parallel with paper) mode of subtend disposes on the direction.
Below, go up forming part 12a and be collectively referred to as " forming part combination " a certain with a certain compacted under 12b of portion of its subtend.In addition, for convenience of description, among Fig. 1~Fig. 4, Z direction, directions X (left and right directions parallel) and the Y direction (with the vertical direction of paper) that are mutual vertical relation have been set with paper.
On each of patrix 11a forming part 12a around be provided with par 13a.Last par 13a is the plane domain between two last forming part 12a of adjacency that are arranged on separately among the patrix 11a.
Around each 12b of compacted under portion of counterdie 11b, be provided with par 13b down.Following par 13b is arranged among the counterdie 11b two separately in abutting connection with the plane domain between the 12b of compacted under portion.
When carrying out moulding, mould 1 utilize patrix 11a and counterdie 11b to suppress to supply between patrix 11a and the counterdie 11b by forming composition.
Patrix 11a with supplied with by forming composition separately transfer printing become with each on the opposite shape of forming part 12a, thereby this is out of shape by forming composition, to mold a face of each optical element.
Counterdie 11b with supplied with by forming composition separately transfer printing become and the opposite shape of each 12b of compacted under portion, thereby this is out of shape by forming composition, to mold another face of each optical element.
Thus, make by forming composition by mould 1 and be shaped to following optical element: for a side face, transfer printing goes out the shape opposite with last forming part 12a of corresponding effective pore radius (lens face); For the opposing party's who is subtend face, transfer printing go out corresponding effective pore radius (lens face) with the opposite shape of the 12b of compacted under portion.Optical element is formed as single with each forming part combination.
In addition, when utilizing patrix 11a and counterdie 11b to suppress, last par 13a separates with mutually non-touching degree on the Z direction a little with following par 13b.Therefore, when carrying out this compacting, be fed in this space that separates by forming composition, in addition, also being reached down by last par 13a by forming composition, par 13b is transferred into planeform.By the transfer printing of this planeform, from being molded planar portions the forming composition.After having finished moulding, each optical element of formed thereby is situated between and is one by this planar portions.This Jie is made each optical element be one by planar portions structure is equivalent to array of optical elements of the present invention (lens arra).
Understand for convenience, illustrated upward forming part 12a and the 12b of compacted under portion are all only a plurality of for disposing along directions X, but also can be a plurality of along the configuration of Y direction in the same manner therewith.In patrix 11a and counterdie 11b, in patrix 11a, forming part 12a on can be set at least, a 12b of compacted under portion can be set in counterdie 11b at least, being when realizing thus required of subtend (among Fig. 1~Fig. 4, that arranges on directions X and Y direction is opposed face) by the forming composition moulding.
In addition, last forming part 12a and the 12b of compacted under portion all can have spherical surface shown in Figure 1, but also can have aspheric surface.
In addition, though last forming part 12a and the 12b of compacted under portion are respectively concave shape and convex form in Fig. 1, also can be respectively convex form and concave shape.
In addition, mould 1 need comprise the patrix 11a with last forming part 12a and last par 13a and have the 12b of compacted under portion and the counterdie 11b of following par 13b.But it is a plurality of that the quantity of the combination of the forming part in the mould 1 is not defined as, and also can be one.
In addition, mould 1 is as long as satisfying to make by forming composition is shaped to optical element, and satisfied can the reflection light, and then its material is not particularly limited, the shaping dies that the also replaceable one-tenth of mould 1 is made of the material beyond the metal.
Mould 1 will describe in detail afterwards at optic element forming device 300(shown in Figure 3) in, the structure identical also had with the above structure.
Light source 2 is configured in mould 1 transversely, in other words, and on each required the parallel direction when light source 2 is configured in by the forming composition moulding with respect to mould 1.Light source 2 can penetrate thinner collimated beam to mould 1, and known semiconductor laser is for example arranged.Though light source 2 is one in Fig. 1, also can be a plurality of.
Beam splitter 3~5 is divided into light beam of institute's incident the separating light beam more than two or three respectively.
Beam splitter (light beam division mechanism) 3 is configured between light source 2 and beam splitter 4 and 5, and is configured on the optical axis of the light beam that penetrates from light source 2.
Beam splitter 3 by incident during from light beam that light source 2 penetrates, this light beam is divided at least two light beams, and the light beam after will cutting apart penetrates.Cut apart in two light beams that penetrate the back, one of them light beam penetrates to photodetector 6, and another light beam penetrates to beam splitter 4 and 5.
Beam splitter 4 and 5 all is configured in from beam splitter 3 on the optical axis of beam splitter 4 and 5 light beams that penetrate.
Beam splitter (forming part reflecting mechanism) 4 be configured in order to constitute the combination of a certain composing type portion, go up between forming part 12a and the 12b of compacted under portion.Beam splitter 4 is configured on this between following summit 12bc among the last summit 12ac among forming part 12a and the 12b of this compacted under portion, the summit of a face of the corresponding optical element of last summit 12ac, the summit of another face of the corresponding optical element of following summit 12bc.
Beam splitter 4 by incident during from light beam that beam splitter 3 penetrates, this beam direction should be gone up forming part 12a and the 12b of this compacted under portion, so that reflect this light beam in order to the last forming part 12a that constitutes composing type portion combination and the both sides of the 12b of compacted under portion corresponding to the allocation position of beam splitter 4.In addition, the light beam of forming part 12a is reflected by last forming part 12a on the guiding, and this reflected beam is incident to beam splitter 4 once more.The light beam of the guiding compacted under 12b of portion is by the 12b of compacted under portion reflection, and this reflected beam is incident to beam splitter 4 once more.
Beam splitter 4 by incident through on when both sides' the reflection of forming part 12a and the 12b of compacted under portion and the light beam that obtains, with this beam direction beam splitter 3.Penetrate to photodetector 6 by beam splitter 3 from the light beam of beam splitter 4 guiding beam splitters 3.
Beam splitter (par reflecting mechanism) 5 be configured in par 13a and and the following par 13b of its subtend between.
Beam splitter 5 by incident during from light beam that beam splitter 3 penetrates, this beam direction should be gone up par 13a and this time par 13b, so that reach and the both sides of the following par 13b of its subtend are reflected this light beam corresponding to the last par 13a of the allocation position of beam splitter 5.In addition, the light beam of par 13a is reflected by last par 13a on the guiding, and this reflected beam is incident to beam splitter 5 once more.Guiding is the light beam quilt par 13b reflection down of par 13b down, and this reflected beam is incident to beam splitter 5 once more.
Beam splitter 5 by incident through on when par 13a and the light beam that obtains with the both sides' of the following par 13b of its subtend reflection, with this beam direction beam splitter 3.Penetrate to photodetector 6 by beam splitter 3 from the light beam of beam splitter 5 guiding beam splitters 3.
Photodetector 6 is by known optical position measuring elements such as photo-detectors and constitute.
As mentioned above, cut apart the back from the light beam of light source 2 by beam splitter 3 and the light beam that obtains, the light beam that obtains via beam splitter 3 from beam splitter 4, the light beam that obtains via beam splitter 3 from beam splitter 5 are directed to photodetector 6.
Each light beam irradiates of direct light detector 6 to the surface of photodetector 6 and optically focused, thereby form the luminous point (being also referred to as focal point) that has nothing in common with each other.So-called luminous point is meant the zone in its illuminated portion that occurs when thinner illumination is mapped on certain face, is to compare the higher zone of light intensity with other parts.
The purpose that photodetector 6 is set is, goes up each luminous point position offsets each other that form according to photodetector 6 surfaces and knows side-play amount in the mould 1, and specifically be to know position offset and/or the angular deflection amount of counterdie 11b with respect to patrix 11a.This counterdie 11b is equivalent to core shift amount in the mould 1 with respect to the position offset of patrix 11a and/or angular deflection amount.
Fig. 2 is the sketch chart of the operating principle of explanation optic element forming device 100 shown in Figure 1.
The collimated beam 21 that penetrates from light source 2 is incident to beam splitter 3.
Beam splitter 3 incident collimated beam 21 is divided into the light beam 22 that penetrates to photodetector 6 and to beam splitter 4(5) light beam 23 that penetrates.
Shine on the surface of photodetector 6 to the light beam 22 that photodetector 6 penetrates from beam splitter 3 and optically focused and form luminous point S1.
From beam splitter 3 to beam splitter 4(5) light beam 23 that penetrates is incident to beam splitter 4(5).
Beam splitter 4(5) reflection institute incident light beam 23, and with this beam reflected as light beam 24 and guiding patrix 11a.
The light beam 24 of guiding patrix 11a is reflected by patrix 11a, and its reflected beam 25 is incident to beam splitter 4(5).
Beam splitter 4(5) incident light beam 25 is seen through, and with this light beam that sees through as light beam 26 and guiding counterdie 11b.
The light beam 26 of guiding counterdie 11b is reflected by counterdie 11b, and its reflected beam 27 is incident to beam splitter 4(5).
Beam splitter 4(5) incident light beam 27 is seen through, and with this light beam that sees through as light beam 28 and guiding patrix 11a.
The light beam 28 of guiding patrix 11a is reflected by patrix 11a, and its reflected beam 29 is incident to beam splitter 4(5).
Beam splitter 4(5) reflection incident light beam 29, and with this beam reflected as light beam 30 and guiding beam splitter 3.
From beam splitter 4(5) guiding beam splitter 3 light beam 30 be incident to beam splitter 3.
Beam splitter 3 reflects incident light beams 30, and this beam reflected is penetrated to photodetector 6 as light beam 31.
Shine on the surface of photodetector 6 to the light beam 31 that photodetector 6 penetrates from beam splitter 3 and optically focused, thereby form luminous point S2.
When the formation position consistency of the formation position of luminous point S1 and luminous point S2, then can be considered as: counterdie 11b does not produce position skew and/or angular deflection with respect to patrix 11a,, in the mould 1 core shift does not take place that is.At this moment, patrix 11a and counterdie 11b are the desired configuration relation of skew of each other no position or angular deflection, thereby mould 1 can mold the optical element that has fully been suppressed core shift.
When the formation position of the formation position of luminous point S1 and luminous point S2 is inconsistent, then be considered as having core shift in the mould 1, the amount of this core shift (the core shift amount in the detected mould) depends on the vector of the interval d of luminous point S1 and luminous point S2.
Understand for convenience, illustrated at this to be incident to beam splitter 4(5) light beam 23 twice of patrix 11a reflection and in counterdie 11b reflection back situation about penetrating once to beam splitter 3.But, should understand be incident to beam splitter 4(5) light beam 23 be actually and reflect many times repeatedly between patrix 11a and counterdie 11b that the back penetrates to beam splitter 3.
In addition, beam splitter 4(5) both can be considered beam splitter 4, and also can be considered beam splitter 5, beam splitter 4 and 5 operating principle are identical.
That is, if beam splitter 4(5) be meant beam splitter 4, then light beam 24 and 28 by the last forming part 12a(of patrix 11a with reference to Fig. 1) reflection, and light beam 26 by the 12b(of compacted under portion of counterdie 11b with reference to Fig. 1) reflect.
Similarly, if beam splitter 4(5) be meant beam splitter 5, then light beam 24 and 28 by the last par 13a(of patrix 11a with reference to Fig. 1) reflection, and light beam 26 by the following par 13b(of counterdie 11b with reference to Fig. 1) reflect.
Below, the method for the core shift of revising mould 1 by the optic element forming device 100 with above structure (below, be called transfer core with this action) is described.
At first, penetrate collimated beam, on the surface of photodetector 6, form luminous point S1(with reference to Fig. 2 from light source 2), and use beam splitter 5 on the surface of photodetector 6, to form luminous point S2(with reference to Fig. 2).Then, adjust the angle of inclination of patrix 11a and/or counterdie 11b, so that the formation position consistency of the formation position of luminous point S1 and luminous point S2.When these position consistency, among the patrix 11a make by the forming composition moulding time required (being provided with the face of forming part 12a) and counterdie 11b in make by the forming composition moulding time required (being provided with the face of the 12b of compacted under portion) all become appropriate angle of inclination, and be parallel to each other.Like this, can transfer core to the inclination core shift by patrix 11a in the correction mould 1 and the parallelism of counterdie 11b.
Then, adjust the position on directions X and Y direction beam splitter 4 or patrix 11a in advance, so that be incident upon last summit 12ac in the combination of a certain composing type portion from the light beam of beam splitter 4 guiding patrix 11a (that is, shown in Figure 2 light beam 24).Afterwards, make light source 2 penetrate collimated beam, and on the surface of photodetector 6, form luminous point S1(with reference to Fig. 2), and use beam splitter 4 on the surface of photodetector 6, to form luminous point S2(with reference to Fig. 2).Then, adjust the position on directions X and Y direction of counterdie 11b, so that the formation position consistency of the formation position of luminous point S1 and luminous point S2.When these position consistency, the last summit 12ac in the combination of a described composing type portion is located on the same straight line of Z direction (with the perpendicular direction in described appropriate angle of inclination) extension each other with following summit 12bc.So just, can reach parallel core shift between the 12b of compacted under portion with its subtend (two surfaces of optical element separately in the heart position offset) to the last forming part 12a that a composing type portion described in the mould 1 combination be correlated with and transfer core.
Next, accent core same as described above, parallel core shift is carried out in other at least one group forming part combinations different with above-mentioned forming part combination.At this moment,, beam splitter 4 is moved for above-mentioned other the forming part combination of beam direction, also can reset other beam splitters 4(make up at each forming part of each mould of subtend configuration the forming part reflecting mechanism is set).Consequently, can make up the accent core that carries out parallel core shift with regard at least two composing type portions, therefore can be on the cycle direction of the optical axis of each optical element (with the cycle direction on vertical of the optical axis), promptly, can transfer core to counterdie 11b with respect to the cycle degree of patrix 11a along the face that is constituted by directions X and Y direction.
In addition, beam splitter 4 and 5 need not to be provided with separately separately, also can the be shared same beam splitter that moves of accent core operation that can corresponding mould 1.
In addition, about in order to adjusting patrix 11a and the angle of inclination of counterdie 11b and/or the technical pattern of position, can be by with patrix 11a and counterdie 11b is installed on the movable pedestal respectively and this pedestal is moved realizes.Such structure can utilize known common technology easily to realize, therefore omits its detailed description at this.
(embodiment 2)
Optic element forming device 300 shown in Figure 3 is as follows with the difference of optic element forming device 100 shown in Figure 1.
Light source 2 is become and is had light source 2a and these two light sources of 2b from having a light source.
Light source 2a and the 2b structure with light source 2 respectively are identical.At this, the relative position relation of light source 2a and 2b is known.
Beam splitter 4 and 5 has become eyeglass 34 and 35.
Eyeglass (forming part reflecting mechanism) 34 be configured in the same position of beam splitter 4 on, and comprise eyeglass 34a and eyeglass 34b down.
Last eyeglass 34a by incident from light source 2a penetrate and through beam splitter 3 is cut apart after and light beam the time, with divided this beam reflection of institute and the allocation position with eyeglass 34 of leading corresponding in order to constitute the last forming part 12a that a composing type portion makes up.The light beam of forming part 12a is reflected by last forming part 12a on the guiding, and its reflected beam is once more by last eyeglass 34a reflection and be directed to beam splitter 3.Penetrate to photodetector 6 by beam splitter 3 from the light beam of last eyeglass 34a guiding beam splitter 3.
Following eyeglass 34b by incident from light source 2b penetrate and through beam splitter 3 is cut apart after and light beam the time, with divided this beam reflection of institute and the allocation position with eyeglass 34 of leading corresponding in order to constitute the 12b of compacted under portion that a composing type portion makes up.The light beam of the guiding compacted under 12b of portion is by the 12b of compacted under portion reflection, and its reflected beam is played eyeglass 34b reflection once more and is directed to beam splitter 3.Penetrate to photodetector 6 by beam splitter 3 from the light beam of following eyeglass 34b guiding beam splitter 3.
Eyeglass (par reflecting mechanism) 35 be configured in the same position of beam splitter 5 on, and comprise eyeglass 35a and eyeglass 35b down.
Last eyeglass 35a by incident from light source 2a penetrate and through beam splitter 3 is cut apart after and light beam the time, with divided this beam reflection of institute last par 13a corresponding that also lead with the allocation position of eyeglass 35.The light beam of par 13a is reflected by last par 13a on the guiding, and its reflected beam is once more by last eyeglass 35a reflection and be directed to beam splitter 3.Penetrate to photodetector 6 by beam splitter 3 from the light beam of last eyeglass 35a guiding beam splitter 3.
Following eyeglass 35b by incident from light source 2b penetrate and through beam splitter 3 is cut apart after and light beam the time, with divided this beam reflection of institute following par 13b corresponding that also lead with the allocation position of eyeglass 35.Down the light beam of par 13b is by par 13b reflection down for guiding, and its reflected beam is once more by eyeglass 35b reflection down and be directed to beam splitter 3.Penetrate to photodetector 6 by beam splitter 3 from the light beam of following eyeglass 35b guiding beam splitter 3.
From light source 2a and after beam splitter 3 is cut apart and light beam, from light source 2b and through beam splitter 3 is cut apart after and light beam, the light beam that obtains via beam splitter 3 from last eyeglass 34a, the light beam that obtains via beam splitter 3 from the light beam that plays eyeglass 34b to obtain, from last eyeglass 35a, the light beam that obtains via beam splitter 3 from eyeglass 35b down via beam splitter 3 be directed to photodetector 6.
Fig. 4 is the sketch chart in order to the operating principle that optic element forming device 300 shown in Figure 3 is described.
The collimated beam 41a that penetrates from light source 2a is incident to beam splitter 3.
Beam splitter 3 is divided into the light beam 42a that penetrates to photodetector 6 and eyeglass 34a(35a upwards with incident collimated beam 41a) the light beam 43a that penetrates, and they are penetrated.
Shine on the surface of photodetector 6 to the light beam 42a that photodetector 6 penetrates from beam splitter 3 and optically focused and form luminous point S1a.
From beam splitter 3 eyeglass 34a(35a upwards) the light beam 43a that penetrates is by last eyeglass 34a(35a) reflection.
Last eyeglass 34a(35a) with beam reflected 43a as light beam 44a and the patrix 11a that leads.
The light beam 44a of guiding patrix 11a is reflected by patrix 11a, and its reflected beam 45a is by last eyeglass 34a(35a) reflection.
Last eyeglass 34a(35a) with beam reflected 45a as light beam 46a and the beam splitter 3 that leads.
From last eyeglass 34a(35a) guiding beam splitter 3 light beam 46a be incident to beam splitter 3.
Beam splitter 3 reflection incident light beam 46a also penetrate as light beam 47a this beam reflected to photodetector 6.
Shine on the surface of photodetector 6 to the light beam 47a that photodetector 6 penetrates from beam splitter 3 and optically focused and form luminous point S2a.
The collimated beam 41b that penetrates from light source 2b is incident to beam splitter 3.
Beam splitter 3 is divided into the light beam 42b that penetrates to photodetector 6 and eyeglass 34b(35b downwards with incident collimated beam 41b) the light beam 43b that penetrates, and they are penetrated.
Shine on the surface of photodetector 6 to the light beam 42b that photodetector 6 penetrates from beam splitter 3 and optically focused and form luminous point S1b.
From beam splitter 3 downward eyeglass 34b(35b) the light beam 43b that penetrates is by eyeglass 34b(35b down) reflection.
Following eyeglass 34b(35b) with beam reflected 43b as light beam 44b and the counterdie 11b that leads.
The light beam 44b of guiding counterdie 11b is reflected by counterdie 11b, and its reflected beam 45b quilt is eyeglass 34b(35b down) reflection.
Following eyeglass 34b(35b) with beam reflected 45b as light beam 46b and the beam splitter 3 that leads.
From following eyeglass 34b(35b) the light beam 46b of guiding beam splitter 3 is incident to beam splitter 3.
Beam splitter 3 reflects incident light beam 46b, and this beam reflected is penetrated to photodetector 6 as light beam 47b.
Shine on the surface of photodetector 6 to the light beam 47b that photodetector 6 penetrates from beam splitter 3 and optically focused and form luminous point S2b.
When the formation position of luminous point S1a and the formation position consistency of luminous point S2a, and when the formation position of luminous point S1b and the formation position consistency of luminous point S2b, just can be considered as counterdie 11b and not produce position skew and/or angular deflection, promptly not produce core shift in the mould 1 with respect to patrix 11a.At this moment, patrix 11a and counterdie 11b are the desired configuration relation of skew of mutual not location or angular deflection, and mould 1 can mold the optical element that has fully been suppressed core shift thus.
When the formation position of the formation position of luminous point S1a and luminous point S2a inconsistent, and/or the formation position of the formation position of luminous point S1b and luminous point S2b is when inconsistent, just can be considered in the mould 1 and produced core shift, the amount of this core shift (the core shift amount in the detected mould) depends on the vector of the interval db of the vector of interval da of luminous point S1a and luminous point S2a and luminous point S1b and luminous point S2b.
In addition, last eyeglass 34a(35a) both can be considered eyeglass 34a, also can be considered eyeglass 35a, and the operating principle of last eyeglass 34a and last eyeglass 35a is identical.
That is, if eyeglass 34a(35a is gone up in supposition) be last eyeglass 34a, then light beam 44a by the last forming part 12a(of patrix 11a with reference to Fig. 3) reflect.
Similarly, if eyeglass 34a(35a is gone up in supposition) be last eyeglass 35a, then light beam 44a by the last par 13a(of patrix 11a with reference to Fig. 3) reflect.
In addition, following eyeglass 34b(35b) both can be considered eyeglass 34b down, also can be considered eyeglass 35b down, and the operating principle of eyeglass 35b was identical under eyeglass 34b reached down.
That is, if the following eyeglass 34b(35b of supposition) be eyeglass 34b down, then light beam 44b by the 12b(of compacted under portion of counterdie 11b with reference to Fig. 3) reflection.
Similarly, if the following eyeglass 34b(35b of supposition) be eyeglass 35b down, then light beam 44b by the following par 13b(of counterdie 11b with reference to Fig. 3) reflection.
Below, the method that the optic element forming device 300 that utilization is had an above structure carries out the accent core of mould 1 describes.
At first, penetrate collimated beam from light source 2a and 2b, and on the surface of photodetector 6, form luminous point S1a and S1b() with reference to Fig. 4, and eyeglass 35a forms luminous point S2a(with reference to Fig. 4 in the use on the surface of photodetector 6), use down eyeglass 35b forms luminous point S2b(with reference to Fig. 4 on the surface of photodetector 6).Then, adjust the angle of inclination of patrix 11a and/or counterdie 11b, so that the formation position consistency of the formation position of luminous point S1a and luminous point S2a, and make the formation position of luminous point S1b and the formation position consistency of luminous point S2b.When these position consistency, among the patrix 11a by the forming composition moulding time the face of wanting (being provided with the face of forming part 12a) and counterdie 11b in by the forming composition moulding time the face of wanting (being provided with the face of the 12b of compacted under portion) all become appropriate angle of inclination, and be parallel to each other.Like this, by the parallelism of patrix 11a and counterdie 11b in the correction mould 1, just can transfer core to the inclination core shift.
Then, adjust the position on directions X and Y direction eyeglass 34 or patrix 11a in advance, so that from the last summit 12ac ejaculation of the light beam of last eyeglass 34a guiding patrix 11a (that is, shown in Figure 4 light beam 44a) in the combination of a certain composing type portion.Afterwards, penetrate collimated beam from light source 2a and 2b, and on the surface of photodetector 6, form luminous point S1a and S1b() with reference to Fig. 4, and eyeglass 34a forms luminous point S2a(with reference to Fig. 4 in the use on the surface of photodetector 6), use down eyeglass 34b forms luminous point S2b(with reference to Fig. 4 on the surface of photodetector 6).Then, adjust the position of counterdie 11b on directions X and Y direction, so that the formation position consistency of the formation position of luminous point S1a and luminous point S2a, and make the formation position of luminous point S1b and the formation position consistency of luminous point S2b.When these position consistency, the last summit 12ac in the combination of a described composing type portion is located on the same straight line of Z direction (with the described appropriate perpendicular direction in angle of inclination) extension each other with following summit 12bc.So, can transfer core to the last forming part 12a of a composing type portion described in the mould 1 combination with the parallel core shift between the 12b of compacted under portion of its subtend.
Next, to making up the accent core that the parallel core shift identical with aforesaid method carried out in different another composing type portion combinations at least with a described composing type portion.At this moment, in order to import light beam to this forming part combination different with described one group forming part combination, eyeglass 34 is moved, and also reconfigurable other eyeglasses 34(is provided with the forming part reflecting mechanism with regard to each combination in the forming part of each mould of subtend configuration).Consequently, can carry out the accent core of parallel core shift to the combination of at least two composing type portions, therefore can be on the cycle direction of each optical element optical axis (with the cycle direction on vertical of the optical axis), promptly, can transfer core to counterdie 11b with respect to the cycle degree of patrix 11a along the face that is constituted by directions X and Y direction.
Eyeglass 34 and 35 need not indivedual settings, also can be shared same can be according to the core shift correction operation of mould 1 and mobile eyeglass (being specially the combination of eyeglass up and down).
Optic element forming device of the present invention is characterised in that: possess and use so that light beam is incident to the light source of described par reflecting mechanism and described forming part reflecting mechanism, described par reflecting mechanism and described forming part reflecting mechanism are beam splitters.
In addition, optic element forming device of the present invention is characterised in that: possess two usefulness so that light beam is incident to the light source of described par reflecting mechanism and described forming part reflecting mechanism, described par reflecting mechanism and described forming part reflecting mechanism are the eyeglass of corresponding configuration by the mould of each light source and the configuration of each subtend.
By described structure, the light beam that can obtain according to the reflection through mould easily detects the dislocation of mould.
In addition, optic element forming device of the present invention is characterised in that: possess the light beam division mechanism, this light beam division mechanism will be divided at least two light beams from described light source incident light beam, and one of them light beam of the light beam of being cut apart is penetrated to photodetector, another light beam in the light beam of being cut apart is penetrated to described par reflecting mechanism and described forming part reflecting mechanism.
By described structure, can and pass position skew between the light beam of light beam division mechanism from described par reflecting mechanism and forming part reflecting mechanism according to the light beam that passes the light beam division mechanism from light source, detect angle of inclination and parallel core shift, therefore can easily carry out this detection.
In addition, optic element forming device of the present invention is characterised in that: in described shaping dies, the forming part of each mould of subtend configuration is set to many groups, and described forming part reflecting mechanism detects described parallel core shift in order at least 2 composing type portions with regard to each mould of subtend configuration.
In addition, optic element forming device of the present invention is characterised in that: be provided with described forming part reflecting mechanism by each combination of the forming part of each mould of subtend configuration.
In described structure, each forming part combination with subtend configuration mould, organize in the mould more, in other words, in order to array of optical elements is carried out in the forming mould, the combination of at least two composing type portions is carried out the accent core of parallel core shift, can on the cycle direction of the optical axis of each optical element of coiled shape mould institute moulding (with the cycle direction on vertical of the optical axis), transfer core thus to the cycle degree.The realization of this accent core also is convenient to implement the rough adjustment of shaping dies.
The present invention is not limited to the respective embodiments described above, can carry out various changes according to the scope shown in the claim, suitably makes up the technique means of recording and narrating in the different embodiments and the embodiment that obtains also is contained within the technical scope of the present invention.
(industrial utilize possibility)
The present invention can apply to: the optic element forming device that makes optical element forming by the shape transferred thereon of shaping dies.

Claims (7)

1. an optic element forming device comprises,
Shaping dies is formed by the mould subtend configuration that is provided with forming part and par, and wherein, described forming part is with so that the effective pore radius moulding of optical element, described par be configured in described forming part around;
Photodetector, in order to the forming part parallel core shift to each other of each mould of detecting the subtend configuration,
This optic element forming device is characterised in that:
Possess,
The par reflecting mechanism, in order to par with each mould of incident beam direction subtend configuration, and the described photodetector of beam direction that will obtain through the reflection of each par;
The forming part reflecting mechanism, in order to forming part with each mould of incident beam direction subtend configuration, and the described photodetector of beam direction that will obtain through the reflection of each forming part,
Described photodetector detects the angle of inclination of each mould of subtend configuration according to the light beam of described par reflecting mechanism institute direct light detector, and detects described parallel core shift according to the light beam of described forming part reflecting mechanism institute direct light detector.
2. optic element forming device according to claim 1 is characterized in that:
Possess and use so that light beam is incident to the light source of described par reflecting mechanism and described forming part reflecting mechanism,
Described par reflecting mechanism and described forming part reflecting mechanism are beam splitters.
3. optic element forming device according to claim 1 is characterized in that:
Possess two usefulness so that light beam is incident to the light source of described par reflecting mechanism and described forming part reflecting mechanism,
Described par reflecting mechanism and described forming part reflecting mechanism are the eyeglass of corresponding configuration by the mould of each light source and the configuration of each subtend.
4. optic element forming device according to claim 2 is characterized in that:
Possesses the light beam division mechanism, this light beam division mechanism will be divided at least two light beams from described light source incident light beam, and one of them light beam of the light beam of being cut apart is penetrated to photodetector, another light beam in the light beam of being cut apart is penetrated to described par reflecting mechanism and described forming part reflecting mechanism.
5. optic element forming device according to claim 3 is characterized in that:
Possesses the light beam division mechanism, this light beam division mechanism will be divided at least two light beams from described light source incident light beam, and one of them light beam of the light beam of being cut apart is penetrated to photodetector, another light beam in the light beam of being cut apart is penetrated to described par reflecting mechanism and described forming part reflecting mechanism.
6. optic element forming device according to claim 1 is characterized in that:
In described shaping dies, the forming part of each mould of subtend configuration is set to many groups,
Described forming part reflecting mechanism detects described parallel core shift in order at least 2 composing type portions with regard to each mould of subtend configuration.
7. optic element forming device according to claim 6 is characterized in that:
Be provided with described forming part reflecting mechanism by each combination of the forming part of each mould of subtend configuration.
CN 201010557095 2009-12-21 2010-11-25 Optical component forming device Active CN102101752B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009289526A JP4943495B2 (en) 2009-12-21 2009-12-21 Optical element molding equipment
JP2009-289526 2009-12-21

Publications (2)

Publication Number Publication Date
CN102101752A true CN102101752A (en) 2011-06-22
CN102101752B CN102101752B (en) 2013-06-05

Family

ID=44154842

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201010557095 Active CN102101752B (en) 2009-12-21 2010-11-25 Optical component forming device

Country Status (3)

Country Link
JP (1) JP4943495B2 (en)
CN (1) CN102101752B (en)
TW (1) TWI448380B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11067433B2 (en) 2015-12-29 2021-07-20 Bio-Rad Laboratories, Inc. Optical detection system with light sampling

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04342429A (en) * 1991-05-17 1992-11-27 Olympus Optical Co Ltd Optical element molding system
JP2007153669A (en) * 2005-12-05 2007-06-21 Fujinon Corp Centering device for molding die of glass optical element, and centering method therefor
CN101049720A (en) * 2006-04-05 2007-10-10 鸿富锦精密工业(深圳)有限公司 Sensor for alignment of mould core, sensing method, and mould composition of possessing the sensor for alignment

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI319745B (en) * 2005-03-18 2010-01-21 Mold capable of adjusting the concentricity
JP4646074B2 (en) * 2006-09-29 2011-03-09 Hoya株式会社 Method for producing glass preform group and method for producing optical element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04342429A (en) * 1991-05-17 1992-11-27 Olympus Optical Co Ltd Optical element molding system
JP2007153669A (en) * 2005-12-05 2007-06-21 Fujinon Corp Centering device for molding die of glass optical element, and centering method therefor
CN101049720A (en) * 2006-04-05 2007-10-10 鸿富锦精密工业(深圳)有限公司 Sensor for alignment of mould core, sensing method, and mould composition of possessing the sensor for alignment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11067433B2 (en) 2015-12-29 2021-07-20 Bio-Rad Laboratories, Inc. Optical detection system with light sampling

Also Published As

Publication number Publication date
TW201127614A (en) 2011-08-16
TWI448380B (en) 2014-08-11
JP4943495B2 (en) 2012-05-30
JP2011126760A (en) 2011-06-30
CN102101752B (en) 2013-06-05

Similar Documents

Publication Publication Date Title
CN104797904B (en) Displacement measurement method and displacement measuring device
US9764424B2 (en) Method and arrangement for forming a structuring on surfaces of components by means of a laser beam
JP5909365B2 (en) Contact probe
CN101067560B (en) Position measuring device
US10668678B2 (en) Die tool, device and method for producing a lens wafer
CN109059765A (en) position detecting device
JP4987359B2 (en) Surface shape measuring device
CN101099103A (en) Device for homogenizing light
CN102364317A (en) Apparatus for measuring surface misalignment and angular misalignment
CN102101752B (en) Optical component forming device
TWI264520B (en) System for measurement of height, angle and their variations of surface of articles
CN102183878A (en) Microstructural stereoscopic anaglyph image-text platemaking method and device
US9885656B2 (en) Line scan knife edge height sensor for semiconductor inspection and metrology
CN101358835B (en) Super-resolution compound shade differential confocal measuring device and method
KR101724189B1 (en) Method and device for producing a plurality of microlenses
CN102612419B (en) Laser processing device
JP6327641B2 (en) Surface shape measurement method using laser scanning interferometer
KR101751414B1 (en) Three-dimensional measuring apparatus has a high-precision measurement function
JP7201547B2 (en) optical encoder
JP2013104672A (en) Shape measuring apparatus
CN102012218A (en) Parallel confocal measurement system based on digital micro-mirror light source and measurement method thereof
CN101126836B (en) 100% matching circular and annular beam aperture microarray grating
CN104516214A (en) Detection apparatus, lithography apparatus, and method of manufacturing article
JP3700459B2 (en) Stylus reflector
US20240200937A1 (en) Optical tilt sensor

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant