TWI447401B - Method for circuit stability compensation - Google Patents

Method for circuit stability compensation Download PDF

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TWI447401B
TWI447401B TW100101176A TW100101176A TWI447401B TW I447401 B TWI447401 B TW I447401B TW 100101176 A TW100101176 A TW 100101176A TW 100101176 A TW100101176 A TW 100101176A TW I447401 B TWI447401 B TW I447401B
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standard
voltage
impedance
measurement
transfer function
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TW201229526A (en
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Tsun I Wang
Kuei Lin Huang
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Chroma Ate Inc
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Description

電路穩定度補償方法Circuit stability compensation method

本發明係關於一種電路穩定度補償方法,並且特別是關於一種計算阻抗量測電路的回授電路特性,並補償阻抗量測電路相位之電路穩定度補償方法。The present invention relates to a circuit stability compensation method, and more particularly to a circuit stability compensation method for calculating a feedback circuit characteristic of an impedance measurement circuit and compensating for a phase of the impedance measurement circuit.

一般來說,於阻抗量測模組中,各個元件之間透過纜線(cable)互相連接,但在測量訊號傳輸的過程中,纜線往往會造成測量訊號的相位差,使得阻抗量測的結果有誤差。因此,傳統的阻抗量測模組於低頻範圍使用四線式(four-terminal pairs)方法進行阻抗量測時,需要進行校正程序。舉例來說,Hideki於美國第6,054,867號專利中提到了阻抗量測的傳統方法。其中,Hideki指出於阻抗量測時,至少需要使用三種以上且具有不同測量值之標準阻抗,分別連接於阻抗量測模組之中以進行三次或多次的校準。也就是說,傳統的阻抗量測方法係藉由三次以上的校準,以消除連接待測物(device under test,DUT)的纜線之影響因素,如纜線材質、長短或者其他原因,以得到精確的量測值。Generally, in the impedance measurement module, each component is connected to each other through a cable. However, during the measurement signal transmission, the cable tends to cause a phase difference of the measurement signal, so that the impedance measurement is performed. There are errors in the results. Therefore, when the conventional impedance measurement module uses the four-terminal pairs method for impedance measurement in the low frequency range, a calibration procedure is required. For example, Hideki's conventional method of impedance measurement is mentioned in U.S. Patent No. 6,054,867. Among them, Hideki pointed out that at least three or more standard impedances with different measured values need to be used in the impedance measurement, and are respectively connected to the impedance measuring module for three or more calibrations. That is to say, the traditional impedance measurement method uses three or more calibrations to eliminate the influence factors of the cable connecting the device under test (DUT), such as the cable material, length, or other reasons. Accurate measurement.

然而,多次更換標準阻抗增加了需要花費的校準時間,於更換標準阻抗時也可能一併產生其他的誤差。再者,隨著量測頻率的增加,連接待測物的連接線所產生的相移角度(Phase Shift)不僅會降低量測的精確度,而且阻抗量測模組中回授電路也會因相位之位移而導致整體系統的不穩定。因此,以往的設計方式為了維持量測的穩定度,會對使用於回授路徑中用以量測之纜線作嚴格的限制(包括材質、長度等),而降低阻抗量測模組使用上的彈性。However, multiple replacements of the standard impedance increase the calibration time that is required, and other errors may occur when replacing the standard impedance. Furthermore, as the measurement frequency increases, the phase shift angle (Phase Shift) generated by the connection line connecting the objects to be tested not only reduces the accuracy of the measurement, but also the feedback circuit in the impedance measurement module. The displacement of the phase causes instability of the overall system. Therefore, in order to maintain the stability of the measurement, the conventional design method imposes strict restrictions (including material, length, etc.) on the cable used for measurement in the feedback path, and reduces the use of the impedance measurement module. Flexibility.

因此,針對上述問題需要一種新的電路穩定度補償方法,使得在高頻阻抗量測時,能夠透過相位補償以解決高頻量測時因纜線不同所導致的量測準確與穩定度問題。Therefore, a new circuit stability compensation method is needed for the above problem, so that in the high-frequency impedance measurement, the phase compensation can be used to solve the problem of measurement accuracy and stability caused by different cables during high-frequency measurement.

本發明揭露一種電路穩定度補償方法,使得阻抗測量裝置於進行高頻阻抗量測時,能計算阻抗測量裝置中回授電路之相移角度,並透過相位補償以解決高頻量測時的量測準確與穩定度問題。The invention discloses a circuit stability compensation method, which enables the impedance measuring device to calculate the phase shift angle of the feedback circuit in the impedance measuring device when performing the high-frequency impedance measurement, and solve the high-frequency measurement amount through the phase compensation. Measure accuracy and stability issues.

本發明提出一種電路穩定度補償方法,用以校準具有一回授電路之阻抗測量裝置。電路穩定度補償方法包含下列步驟:提供一第一標準阻抗以執行一第一測量程序;提供一第二標準阻抗以執行一第二測量程序;由第一測量程序與第二測量程序之測量結果,計算回授電路之一相移角度;依據相移角度執行一校準程序,所述校準程序調整阻抗測量裝置之頻率響應特性。The invention provides a circuit stability compensation method for calibrating an impedance measuring device having a feedback circuit. The circuit stability compensation method comprises the steps of: providing a first standard impedance to perform a first measurement procedure; providing a second standard impedance to perform a second measurement procedure; and measuring results by the first measurement procedure and the second measurement procedure Calculating a phase shift angle of one of the feedback circuits; performing a calibration procedure according to the phase shift angle, the calibration procedure adjusting the frequency response characteristic of the impedance measuring device.

於一示範實施例中,本發明之第一測量程序包含下列步驟:於阻抗測量裝置之一第一電流迴路中,提供一第一標準電壓;自第一電流迴路中,產生對應第一標準阻抗之一第一測量電壓;於阻抗測量裝置之一第二電流迴路中,提供一第二標準電壓;自第二電流迴路中,產生對應第一標準阻抗之一第二測量電壓。此外,第二測量程序包含下列步驟:於阻抗測量裝置之第一電流迴路中,提供第一標準電壓;自第一電流迴路中,產生對應第二標準阻抗之一第三測量電壓;於阻抗測量裝置之第二電流迴路中,提供第二標準電壓;自第二電流迴路中,產生對應第二標準阻抗之一第四測量電壓。In an exemplary embodiment, the first measurement procedure of the present invention includes the steps of: providing a first standard voltage in a first current loop of one of the impedance measuring devices; generating a corresponding first standard impedance from the first current loop One of the first measurement voltages; in the second current loop of one of the impedance measuring devices, a second standard voltage is provided; and from the second current loop, a second measurement voltage corresponding to one of the first standard impedances is generated. In addition, the second measurement procedure includes the steps of: providing a first standard voltage in the first current loop of the impedance measuring device; generating a third measuring voltage corresponding to one of the second standard impedances from the first current loop; A second standard voltage is provided in the second current loop of the device; and a fourth measured voltage corresponding to one of the second standard impedances is generated from the second current loop.

因此,本發明之電路穩定度補償方法利用兩個已知阻抗的待測物與兩組可控制的信號源,判斷阻抗測量裝置的回授電路特性,使得當阻抗測量裝置被置入任意待測物時,可調整最佳的相位補償量,使得阻抗測量裝置不會.受到回授電路和測試纜線(cable)的限制,仍可維持系統的精確與穩定度。Therefore, the circuit stability compensation method of the present invention utilizes two objects of known impedance and two sets of controllable signal sources to determine the feedback circuit characteristics of the impedance measuring device, so that when the impedance measuring device is placed into any test In the case of the object, the optimal phase compensation amount can be adjusted so that the impedance measuring device is not limited by the feedback circuit and the test cable, and the accuracy and stability of the system can be maintained.

關於本發明之優點與精神可以藉由以下的發明詳述及所附圖式得到進一步的瞭解。The advantages and spirit of the present invention will be further understood from the following detailed description of the invention.

請一併參閱圖一A以及圖一B。圖一A係繪示應用本發明之阻抗測量裝置的功能方塊圖。本發明之電路穩定度補償方法用以校準阻抗測量裝置2,且阻抗測量裝置2至少具有一回授電路。以下分別描述本發明之電路穩定度補償方法的流程以及相對應之元件。Please refer to Figure 1A and Figure 1B together. Figure 1A is a functional block diagram showing an impedance measuring apparatus to which the present invention is applied. The circuit stability compensation method of the present invention is used to calibrate the impedance measuring device 2, and the impedance measuring device 2 has at least one feedback circuit. The flow of the circuit stability compensation method of the present invention and the corresponding components will be separately described below.

如圖一A所示,阻抗量測裝置2係一種四線式的測量載具,使得待測物載台60分別連接測量纜線20、測量纜線30、測量纜線40以及測量纜線50。其中,電阻21、電流迴路切換器22與信號源23透過測量纜線20連接待測物載台60的第一端61,且電流迴路切換器22用以切換測量纜線20應連接至信號源23或連接至電位地面。待測物載台60用以設置標準阻抗以及其他未知阻抗的待測物。另外,向量電位計31透過測量纜線30連接待測物載台60的第一端61。As shown in FIG. 1A, the impedance measuring device 2 is a four-wire measuring carrier, such that the measuring object carrier 60 is connected to the measuring cable 20, the measuring cable 30, the measuring cable 40 and the measuring cable 50, respectively. . The resistor 21, the current loop switch 22 and the signal source 23 are connected to the first end 61 of the object carrier 60 through the measuring cable 20, and the current loop switch 22 is used to switch the measuring cable 20 to be connected to the signal source. 23 or connect to the potential ground. The test object stage 60 is used to set a standard impedance and other unknown impedance objects to be tested. In addition, the vector potentiometer 31 is connected to the first end 61 of the object-mounting stage 60 through the measuring cable 30.

另一方面,測量纜線40以及測量纜線50之間為一回授電路。測量纜線40之一端連接待測物載台60的第二端62,而測量纜線40之另一端連接輸入放大器41、向量電位計42、電流迴路切換器43、狹帶高增益放大器44、電流迴路切換器45、信號源46以及輸出放大器47。此外,電阻51連接於輸出放大器47之輸出端以及測量纜線50之間,並且電阻51透過測量纜線50連接待測物載台60的第二端62。On the other hand, between the measurement cable 40 and the measurement cable 50 is a feedback circuit. One end of the measurement cable 40 is connected to the second end 62 of the test object stage 60, and the other end of the measurement cable 40 is connected to the input amplifier 41, the vector potentiometer 42, the current loop switch 43, the narrowband high gain amplifier 44, Current loop switch 45, signal source 46, and output amplifier 47. Further, a resistor 51 is connected between the output of the output amplifier 47 and the measurement cable 50, and the resistor 51 is connected to the second end 62 of the object carrier 60 through the measurement cable 50.

為了方便說明,在此將圖一A簡化成戴維寧(Thevenin)等效電路如圖一B。圖一B係繪示應用本發明之阻抗測量裝置的等效電路示意圖。如圖一B所示,阻抗Z1 與阻抗Z2 分別為從第一端61以及第二端62對地所看出去的戴維寧等效阻抗值,信號源70與信號源71則分別代表兩個戴維寧等效的信號源,輸入放大器73具有開迴路增益值A。其中,當信號源23用以提供E1 電壓,且信號源46用以提供Eφ 電壓時,信號源70與信號源71則分別提供K1 E1 電壓以及Kφ Eφ 電壓,K1 ,Kφ ,A,Z1 ,Z2 皆為複數變數。以下搭配本發明之電路穩定度補償方法,如何透過切換不同的信號源與向量電位計72之量測值,以求得這些變數的過程。For convenience of explanation, FIG. 1A is simplified here as the Thevenin equivalent circuit as shown in FIG. Figure 1B is a schematic diagram showing an equivalent circuit of an impedance measuring apparatus to which the present invention is applied. As shown in FIG. 1B, the impedance Z 1 and the impedance Z 2 are respectively the wearer equivalent impedance values seen from the first end 61 and the second end 62 to the ground, and the signal source 70 and the signal source 71 respectively represent two. The Thevenin equivalent signal source, the input amplifier 73 has an open loop gain value A. Wherein, when the signal source 23 is used to provide the E 1 voltage, and the signal source 46 is used to provide the E φ voltage, the signal source 70 and the signal source 71 respectively provide the K 1 E 1 voltage and the K φ E φ voltage, K 1 , K φ , A, Z 1 , and Z 2 are all complex variables. In the following, with the circuit stability compensation method of the present invention, how to obtain these variables by switching the different signal sources and the measured values of the vector potentiometer 72.

電流迴路切換器74整合了電流迴路切換器43以及電流迴路切換器45。舉例來說,當電流迴路切換器43未導通且電流迴路切換器45連接至電位地面時,則相當於從待測物載台60之第二端62看出去,電流迴路切換器74連接至電位地面。The current loop switch 74 integrates the current loop switch 43 and the current loop switch 45. For example, when the current loop switch 43 is not turned on and the current loop switch 45 is connected to the ground potential, it is equivalent to being seen from the second end 62 of the object carrier 60, and the current loop switch 74 is connected to the potential. ground.

請一併參閱圖一B、圖二以及圖三,圖二係繪示根據本發明之一示範實施例之電路穩定度補償方法的流程圖。圖三係繪示根據本發明之第一測量程序的流程圖。如圖所示,於步驟S10中,首先將標準阻抗Zxs1 置入待測物載台60以執行一第一測量程序。在此,第一測量程序更可進一步由步驟S102至步驟S108說明。於步驟S102中,當標準阻抗Zxs1 置入待測物載台60後,可形成一電流迴路,此電流迴路係由電流迴路切換器22與電流迴路切換器74所決定。於本步驟中,阻抗測量裝置2之電流迴路切換器22連接到信號源70,電流迴路切換器74連接到電位地面。藉此,阻抗測量裝置2中可形成一信號源70、阻抗Z1 、標準阻抗Zxs1 與阻抗Z2 以接地的電流迴路。Please refer to FIG. 1B, FIG. 2 and FIG. 3 together. FIG. 2 is a flow chart showing a circuit stability compensation method according to an exemplary embodiment of the present invention. Figure 3 is a flow chart showing a first measurement procedure in accordance with the present invention. As shown in the figure, in step S10, the standard impedance Z xs1 is first placed in the object carrier 60 to perform a first measurement procedure. Here, the first measurement procedure can be further explained by steps S102 to S108. In step S102, when the standard impedance Z xs1 is placed in the object carrier 60, a current loop is formed, which is determined by the current loop switch 22 and the current loop switch 74. In this step, the current loop switch 22 of the impedance measuring device 2 is connected to a signal source 70 which is connected to the potential ground. Thereby, a current source of the signal source 70, the impedance Z 1 , the standard impedance Z xs1 and the impedance Z 2 to be grounded can be formed in the impedance measuring device 2.

於步驟S104中,向量電位計72可由步驟S102的電流迴路中,產生對應標準阻抗Zxs1 之一測量電壓Vφ1 ,其中,由圖一B之阻抗測量裝置2的等效電路可運算出測量電壓Vφ1 ,如下式(1)所示。In step S104, the vector potentiometer 72 can generate a measured voltage V φ1 corresponding to one of the standard impedances Z xs1 in the current loop of step S102, wherein the measured voltage can be calculated from the equivalent circuit of the impedance measuring device 2 of FIG. V φ1 is as shown in the following formula (1).

於步驟S106中,阻抗測量裝置2更可切換成另一種電流迴路,使得電流迴路切換器22連接到電位地面,電流迴路切換器74連接到信號源71。藉此,阻抗測量裝置2中可形成一信號源71、阻抗Z2 、標準阻抗Zxs1 與阻抗Z1 以接地的電流迴路。In step S106, the impedance measuring device 2 is further switchable to another current loop such that the current loop switch 22 is connected to the potential ground, and the current loop switch 74 is connected to the signal source 71. Thereby, a current source of the signal source 71, the impedance Z 2 , the standard impedance Z xs1 and the impedance Z 1 to be grounded can be formed in the impedance measuring device 2.

於步驟S108中,向量電位計72可由步驟S106的電流迴路中,產生對應標準阻抗Zxs1 之一測量電壓Vφ2 ,其中,由圖一B之阻抗測量裝置2的等效電路可運算出第一測量電壓Vφ2 ,如下式(2)所示。In step S108, the vector potentiometer 72 can generate a measurement voltage V φ2 corresponding to one of the standard impedances Z xs1 in the current loop of step S106, wherein the equivalent circuit of the impedance measuring device 2 of FIG. 1B can calculate the first The voltage V φ2 is measured as shown in the following equation (2).

同理,於步驟S12中,阻抗測量裝置2可藉由開關電流迴路切換器22與電流迴路切換器74以產生兩種電流迴路,從而產生對應標準阻抗Zxs2 之測量電壓Vφ3 以及測量電壓Vφ4 ,如下式(3)、(4)所示。Similarly, in step S12, the impedance measuring device 2 can generate two current loops by switching the current loop switcher 22 and the current loop switcher 74 to generate the measured voltage V φ3 corresponding to the standard impedance Z xs2 and the measured voltage V. Φ4 is as shown in the following formulas (3) and (4).

接著,於步驟S14中,由已知的標準阻抗Zxs1 與Zxs2 以及各個測量電壓,能夠分別推算出阻抗測量裝置2於第一端61以及第二端62對地所看出去的戴維寧等效阻抗Z1 與阻抗Z2 。分別如下式(5)、(6)所示。Next, in step S14, by using the known standard impedances Z xs1 and Z xs2 and the respective measured voltages, it is possible to separately derive the Thevenin equivalent of the impedance measuring device 2 at the first end 61 and the second end 62 to the ground. Impedance Z 1 and impedance Z 2 . They are shown in the following equations (5) and (6), respectively.

其中,四個轉移函數值C1 、C2 、C3 與C4 分別為(Vφ1 /E1 )、(Vφ2 /Eφ )、(Vφ3 /E1 )以及(Vφ4 /Eφ ),當然,上述之轉移函數值C1 、C2 、C3 與C4 皆分別可由算式(1)、(2)、(3)與(4)推導而得,在此不予贅述。於實務上,轉移函數值C1 、C2 、C3 與C4 可視為已知,舉例來說,當信號源23提供E1 電壓且測量電壓Vφ1 為已知時,轉移函數值C1 當然可輕易推得而知。Among them, the four transfer function values C 1 , C 2 , C 3 and C 4 are (V φ1 /E 1 ), (V φ2 /E φ ), (V φ3 /E 1 ) and (V φ4 /E φ , respectively). And, of course, the transfer function values C 1 , C 2 , C 3 , and C 4 described above are derived from equations (1), (2), (3), and (4), respectively, and are not described herein. In practice, the transfer function values C 1 , C 2 , C 3 and C 4 can be considered as known, for example, when the signal source 23 provides the E 1 voltage and the measured voltage V φ1 is known, the transfer function value C 1 Of course, it can be easily learned.

此外,本發明所屬技術領域具有通常知識者可透過步驟S14之運算結果,進一步推導出阻抗測量裝置2的回授迴路轉移函數(null loop transfer function)G,如下式(7)所示。Further, in the technical field to which the present invention pertains, a person skilled in the art can further derive a feedback loop transfer function G of the impedance measuring device 2 through the calculation result of the step S14, as shown in the following formula (7).

在此,上式中Z0 =Z1 +Z2 ,K φ =AKφ ,且Zx 可為任意阻抗或者標準阻抗Zxs1 、Zxs2 。一般來說,回授迴路轉移函數G又可表示為下列形式,如下式(8)所示。Here, Z 0 = Z 1 + Z 2 , K ' φ = AK φ , and Z x can be any impedance or standard impedance Z xs1 , Z xs2 . In general, the feedback loop transfer function G can be expressed in the following form as shown in the following formula (8).

當比較算式(7)與算式(8)時,Kp 與Kq 可推得如下式(9)以及下式(10)。When the equations (7) and (8) are compared, K p and K q can be derived by the following equation (9) and the following equation (10).

若以上述轉移函數值C1 、C2 、C3 與C4 表示時,Kp 與Kq 可進一步表示如下式(11)以及下式(12)。When expressed by the transfer function values C 1 , C 2 , C 3 and C 4 described above, K p and K q can further represent the following formula (11) and the following formula (12).

而Z0 又可表示如下式(13)所示。Z 0 can be expressed as shown in the following formula (13).

從算式(11)、(12)、(13)可看出,本發明之電路穩定度補償方法可利用已知的兩個標準阻抗(Zxs1 以及Zxs2 ),與四個轉移函數值C1 、C2 、C3 、C4 ,可以計算出K p K q Z o 三個參數值。實際應用上,當帶入任意阻抗Zx 時,回授迴路轉移函數G可對應阻抗Zx 至一複數平面,且透過所述對應的結果阻抗Zx 應落於複數平面之右半面。It can be seen from equations (11), (12), (13) that the circuit stability compensation method of the present invention can utilize two known standard impedances (Z xs1 and Z xs2 ), and four transfer function values C 1 . , C 2 , C 3 , C 4 , can calculate the three parameter values of K p , K q , Z o . In practical applications, when any impedance Z x is brought in, the feedback loop transfer function G may correspond to the impedance Z x to a complex plane, and the corresponding result impedance Z x should fall on the right half of the complex plane.

請參閱圖四。圖四係繪示回授迴路轉移函數對應阻抗至複數平面的示意圖。如圖所示,當帶入任意阻抗Zx 時,阻抗Zx 位於所述複數平面之右半面,且可運算出圓心座標值,繼而求出圓心與複數平面實數軸的相移角度a 。然而,所屬技術領域具有通常知識者應明瞭,狹帶高增益放大器在狹帶內有±90°的相位特性,故圖四之回授迴路轉移函數的相位範圍涵蓋了複數平面的正實數軸。若從控制理論的特徵方程式零點位置來看,回授迴路若涵蓋到圖四中座標(1,0),則阻抗測量裝置就會發生振盪,造成量測的不穩定。Please refer to Figure 4. Figure 4 is a schematic diagram showing the corresponding impedance of the feedback loop transfer function to the complex plane. As shown, when any impedance Z x is brought in, the impedance Z x is located on the right half of the complex plane, and the centroid coordinate value can be calculated, and then the phase shift angle a of the center of the circle and the real axis of the complex plane is obtained. However, it should be apparent to those skilled in the art that the narrowband high gain amplifier has a phase characteristic of ±90° in the strip, so the phase range of the loopback transfer function of Figure 4 covers the positive real axis of the complex plane. From the point of view of the characteristic equation of the control theory, if the feedback loop covers the coordinates (1, 0) in Figure 4, the impedance measuring device will oscillate, resulting in unstable measurement.

因此,為了避免阻抗測量裝置就會發生振盪,本發明於步驟S16中,依據前述的相移角度執行一校準程序,且校準程序可調整阻抗測量裝置之頻率響應特性。於此一步驟中,本發明係將回授迴路轉移函數的相位範圍加以調整,使其不再涵蓋複數平面的正實數軸。在此舉圖五為例,請參閱圖五。圖五係繪示調整回授迴路轉移函數的示意圖。如圖五所示,本發明之校準程序可將回授迴路轉移函數的相位範圍轉換至複數平面的左半面,使圓心座標位限制於負實數軸上,以避開複數平面上的座標(1,0)位置。另外,若事先已算出相移角度a ,當然可利用可變相移器來作180°-a 的相位移,使得回授迴路的相位角所包含的範圍避開複數平面的正實數軸。在此,由於調整回授迴路轉移函數的相位範圍有許多方法,本發明不加以限制,所屬技術領域具有通常知識者可自行決定。Therefore, in order to prevent the impedance measuring device from oscillating, the present invention performs a calibration procedure in accordance with the phase shift angle described above in step S16, and the calibration procedure can adjust the frequency response characteristic of the impedance measuring device. In this step, the present invention adjusts the phase range of the feedback loop transfer function so that it does not cover the positive real axis of the complex plane. Take Figure 5 as an example, please refer to Figure 5. Figure 5 is a schematic diagram showing the adjustment feedback loop transfer function. As shown in FIG. 5, the calibration procedure of the present invention converts the phase range of the feedback loop transfer function to the left half of the complex plane, and limits the center coordinate position to the negative real axis to avoid coordinates on the complex plane (1) , 0) location. Further, if the phase shift angle a has been calculated in advance, it is of course possible to use a variable phase shifter to make a phase shift of 180° -a such that the phase angle of the feedback loop encompasses the positive real axis of the complex plane. Here, since there are many methods for adjusting the phase range of the feedback loop transfer function, the present invention is not limited, and those skilled in the art can determine at their own discretion.

值得注意的是,傳統的阻抗量測方法中,通常包含開路(open)測量、短路(short)測量以及負載(load)測量,也就是說,用以測量的待測物之阻抗應分別為無限大、零以及其他阻抗值。但是,所屬技術領域具有通常知識者應明瞭,於進行高頻測試時,待測物往往會耦合環境中的信號,故要求待測物之阻抗趨近於無限大是相當困難的,同時也更容易因而造成測量之誤差。It is worth noting that the traditional impedance measurement method usually includes open measurement, short measurement, and load measurement. That is, the impedance of the object to be measured should be infinite. Large, zero, and other impedance values. However, it should be understood by those having ordinary skill in the art that when performing high frequency testing, the object to be tested tends to couple signals in the environment, so it is quite difficult to require the impedance of the object to be measured to be infinitely large, and at the same time It is easy to cause measurement errors.

然而,本發明與傳統的阻抗量測方法不同的是,本發明僅需透過兩個標準阻抗,即可運算阻抗測量裝置的回授電路特性。藉此,本發明不必需選擇開路測量,而能選擇短路測量以及負載測量,不僅降低高頻測量時的非理想情況,也能夠更準確的計算阻抗測量裝置的回授電路特性。However, the present invention differs from the conventional impedance measurement method in that the present invention only needs to pass two standard impedances to calculate the feedback circuit characteristics of the impedance measuring device. Thereby, the present invention does not necessarily select an open circuit measurement, but can select a short circuit measurement and a load measurement, which not only reduces the non-ideal situation at the time of high frequency measurement, but also more accurately calculates the feedback circuit characteristic of the impedance measuring device.

綜上所述,本發明之電路穩定度補償方法利用兩個已知阻抗的待測物與兩組可控制的信號源,判斷阻抗測量裝置的回授電路特性。與傳統技術相比,傳統技術往往需要使用三個或三個以上已知阻抗的待測物方能判斷阻抗測量裝置的回授電路特性,因此本發明能夠進一步簡化測量流程,加快測量的速度。此外,當阻抗測量裝置被置入任意待測物時,本發明可調整最佳的相位補償量,使得阻抗測量裝置不會受到回授電路和測試纜線的限制,仍可維持系統的精確與穩定度。In summary, the circuit stability compensation method of the present invention utilizes two objects of known impedance and two sets of controllable signal sources to determine the feedback circuit characteristics of the impedance measuring device. Compared with the conventional technology, the conventional technology often needs to use three or more known impedances of the object to determine the feedback circuit characteristics of the impedance measuring device. Therefore, the present invention can further simplify the measurement process and speed up the measurement. In addition, when the impedance measuring device is placed in any object to be tested, the present invention can adjust the optimal phase compensation amount so that the impedance measuring device is not limited by the feedback circuit and the test cable, and the accuracy of the system can be maintained. stability.

藉由以上較佳具體實施例之詳述,係希望能更加清楚描述本發明之特徵與精神,而並非以上述所揭露的較佳具體實施例來對本發明之範疇加以限制。相反地,其目的是希望能涵蓋各種改變及具相等性的安排於本發明所欲申請之專利範圍的範疇內。The features and spirit of the present invention will be more apparent from the detailed description of the preferred embodiments. On the contrary, the intention is to cover various modifications and equivalents within the scope of the invention as claimed.

2...阻抗測量裝置2. . . Impedance measuring device

20、30、40、50...測量纜線20, 30, 40, 50. . . Measuring cable

21、51...電阻21, 51. . . resistance

22、43、45、74...電流迴路切換器22, 43, 45, 74. . . Current loop switcher

23、46、70、71...信號源23, 46, 70, 71. . . signal source

31、42、72...向量電位計31, 42, 72. . . Vector potentiometer

41、44、47、73...放大器41, 44, 47, 73. . . Amplifier

60...待測物載台60. . . Dust-bearing stage

61...第一端61. . . First end

62...第二端62. . . Second end

Z1 、Z2 ...阻抗Z 1 , Z 2 . . . impedance

S10~S16、S102~S108...流程步驟S10~S16, S102~S108. . . Process step

圖一A係繪示應用本發明之阻抗測量裝置的功能方塊圖。Figure 1A is a functional block diagram showing an impedance measuring apparatus to which the present invention is applied.

圖一B係繪示應用本發明之阻抗測量裝置的等效電路示意圖。Figure 1B is a schematic diagram showing an equivalent circuit of an impedance measuring apparatus to which the present invention is applied.

圖二係繪示根據本發明之一示範實施例之電路穩定度補償方法的流程圖。2 is a flow chart showing a circuit stability compensation method according to an exemplary embodiment of the present invention.

圖三係繪示根據本發明之第一測量程序的流程圖。Figure 3 is a flow chart showing a first measurement procedure in accordance with the present invention.

圖四係繪示回授迴路轉移函數對應阻抗至複數平面的示意圖。Figure 4 is a schematic diagram showing the corresponding impedance of the feedback loop transfer function to the complex plane.

圖五係繪示調整回授迴路轉移函數的示意圖。Figure 5 is a schematic diagram showing the adjustment feedback loop transfer function.

S10~S16...步驟流程S10~S16. . . Step flow

Claims (7)

一種電路穩定度補償方法,用以校準一阻抗測量裝置,該阻抗測量裝置具有一回授電路,該方法包含下列步驟:提供一第一標準阻抗以執行一第一測量程序,其中該第一測量程序包含下列步驟:於該阻抗測量裝置之一第一電流迴路中,提供一第一標準電壓;自該第一電流迴路中,產生對應該第一標準阻抗之一第一測量電壓;於該阻抗測量裝置之一第二電流迴路中,提供一第二標準電壓;以及自該第二電流迴路中,產生對應該第一標準阻抗之一第二測量電壓;提供一第二標準阻抗以執行一第二測量程序,其中該第二測量程序包含下列步驟:於該阻抗測量裝置之該第一電流迴路中,提供該第一標準電壓;自該第一電流迴路中,產生對應該第二標準阻抗之一第三測量電壓;於該阻抗測量裝置之該第二電流迴路中,提供該第二標準電壓;以及自該第二電流迴路中,產生對應該第二標準阻抗之一第四測量電壓;由該第一測量程序與該第二測量程序之測量結果,計算該回授電路之一相移角度;以及依據該相移角度執行一校準程序,該校準程序調整該阻抗測量裝置之頻率響應特性。 A circuit stability compensation method for calibrating an impedance measuring device, the impedance measuring device having a feedback circuit, the method comprising the steps of: providing a first standard impedance to perform a first measurement procedure, wherein the first measurement The program includes the steps of: providing a first standard voltage in a first current loop of the impedance measuring device; and generating, from the first current loop, a first measured voltage corresponding to one of the first standard impedances; Providing a second standard voltage in one of the second current loops of the measuring device; and generating a second measured voltage corresponding to one of the first standard impedances from the second current loop; providing a second standard impedance to perform a first a second measurement program, wherein the second measurement program comprises the steps of: providing the first standard voltage in the first current loop of the impedance measuring device; and generating a corresponding second standard impedance from the first current loop a third measurement voltage; the second standard voltage is provided in the second current loop of the impedance measuring device; and the second current is a fourth measurement voltage corresponding to one of the second standard impedances; a phase shift angle of one of the feedback circuits is calculated by the first measurement program and the measurement result of the second measurement program; and the phase shift angle is determined according to the phase shift angle A calibration procedure is performed that adjusts the frequency response characteristics of the impedance measuring device. 如申請專利範圍第1項所述之電路穩定度補償方法,其中於計算該回授電路之該相移角度的步驟中,係依據該第一標準阻抗、該第二標準阻抗、該第一標準電壓、該第二標準電壓、該第一測量電壓、該第二測量電壓、該第三測量電壓與該第四測量電壓以計算該相移角度。 The circuit stability compensation method according to claim 1, wherein the step of calculating the phase shift angle of the feedback circuit is based on the first standard impedance, the second standard impedance, and the first standard. The voltage, the second standard voltage, the first measured voltage, the second measured voltage, the third measured voltage, and the fourth measured voltage are used to calculate the phase shift angle. 如申請專利範圍第1項所述之電路穩定度補償方法,其中於計算該回授電路之該相移角度的步驟中,包含下列步驟:由該第一標準電壓與該第一測量電壓計算一第一轉移函數;由該第二標準電壓與該第二測量電壓計算一第二轉移函數;由該第一標準電壓與該第三測量電壓計算一第三轉移函數;由該第二標準電壓與該第四測量電壓計算一第四轉移函數;以及依據該第一轉移函數、該第二轉移函數、該第三轉移函數與該第四轉移函數計算該相移角度。 The circuit stability compensation method according to claim 1, wherein the step of calculating the phase shift angle of the feedback circuit includes the following steps: calculating a first standard voltage from the first measurement voltage a first transfer function; calculating a second transfer function from the second standard voltage and the second measured voltage; calculating a third transfer function from the first standard voltage and the third measured voltage; and the second standard voltage The fourth measured voltage calculates a fourth transfer function; and calculates the phase shift angle according to the first transfer function, the second transfer function, the third transfer function, and the fourth transfer function. 如申請專利範圍第1項所述之電路穩定度補償方法,其中該第二測量程序包含下列步驟:於該阻抗測量裝置之一第一電流迴路中,提供一第一標準電壓;自該第一電流迴路中,產生對應該第二標準阻抗之一第三測量電壓;於該阻抗測量裝置之一第二電流迴路中,提供一第二標準電壓;以及自該第二電流迴路中,產生對應該第二標準阻抗之一第四測量電壓。 The circuit stability compensation method of claim 1, wherein the second measurement procedure comprises the steps of: providing a first standard voltage in a first current loop of the impedance measuring device; a third measurement voltage corresponding to one of the second standard impedances is generated in the current loop; a second standard voltage is provided in the second current loop of the impedance measuring device; and a corresponding voltage is generated from the second current loop One of the second standard impedances is the fourth measured voltage. 如申請專利範圍第4項所述之電路穩定度補償方法,其中該第一測量程序包含下列步驟:於該阻抗測量裝置之該第一電流迴路中,提供該第一標準電壓;自該第一電流迴路中,產生對應該第一標準阻抗之一第一測量電壓;於該阻抗測量裝置之該第二電流迴路中,提供該第二標準電壓;以及自該第二電流迴路中,產生對應該第一標準阻抗之一第二測量電壓。 The circuit stability compensation method of claim 4, wherein the first measurement procedure comprises the step of: providing the first standard voltage in the first current loop of the impedance measuring device; a first measurement voltage corresponding to one of the first standard impedances is generated in the current loop; the second standard voltage is provided in the second current loop of the impedance measuring device; and correspondingly generated from the second current loop One of the first standard impedances is the second measured voltage. 如申請專利範圍第5項所述之電路穩定度補償方法,其中於計算該回授電路之該相移角度的步驟中,係依據該第一標準阻抗、該第二標準阻抗、該第一標準電壓、該第二標準電壓、該第一測量電壓、該第二測量電壓、該第三測量電壓與該第四測量電壓以計算該相移角度。 The circuit stability compensation method according to claim 5, wherein the step of calculating the phase shift angle of the feedback circuit is based on the first standard impedance, the second standard impedance, and the first standard The voltage, the second standard voltage, the first measured voltage, the second measured voltage, the third measured voltage, and the fourth measured voltage are used to calculate the phase shift angle. 如申請專利範圍第5項所述之電路穩定度補償方法,其中於計算該回授電路之該相移角度的步驟中,包含下列步驟:由該第一標準電壓與該第一測量電壓計算一第一轉移函數;由該第二標準電壓與該第二測量電壓計算一第二轉移函數;由該第一標準電壓與該第三測量電壓計算一第三轉移函數;由該第二標準電壓與該第四測量電壓計算一第四轉移函數;以及依據該第一轉移函數、該第二轉移函數、該第三轉移函數與該第四轉移函數計算該相移角度。 The circuit stability compensation method of claim 5, wherein the step of calculating the phase shift angle of the feedback circuit comprises the steps of: calculating a first standard voltage from the first measurement voltage a first transfer function; calculating a second transfer function from the second standard voltage and the second measured voltage; calculating a third transfer function from the first standard voltage and the third measured voltage; and the second standard voltage The fourth measured voltage calculates a fourth transfer function; and calculates the phase shift angle according to the first transfer function, the second transfer function, the third transfer function, and the fourth transfer function.
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