TWI443482B - 用以改正使用一馬達之壓力變化之系統及方法，與電腦可讀媒體 - Google Patents

用以改正使用一馬達之壓力變化之系統及方法，與電腦可讀媒體 Download PDF

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Publication number
TWI443482B
TWI443482B TW095142930A TW95142930A TWI443482B TW I443482 B TWI443482 B TW I443482B TW 095142930 A TW095142930 A TW 095142930A TW 95142930 A TW95142930 A TW 95142930A TW I443482 B TWI443482 B TW I443482B
Authority
TW
Taiwan
Prior art keywords
pressure
dispensing
valve
volume
pump
Prior art date
Application number
TW095142930A
Other languages
English (en)
Chinese (zh)
Other versions
TW200732872A (en
Inventor
George Gonnella
James Cedrone
Raymond A Zagers
Robert F Mcloughlin
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200732872A publication Critical patent/TW200732872A/zh
Application granted granted Critical
Publication of TWI443482B publication Critical patent/TWI443482B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
TW095142930A 2005-12-02 2006-11-21 用以改正使用一馬達之壓力變化之系統及方法，與電腦可讀媒體 TWI443482B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74168105P 2005-12-02 2005-12-02

Publications (2)

Publication Number Publication Date
TW200732872A TW200732872A (en) 2007-09-01
TWI443482B true TWI443482B (zh) 2014-07-01

Family

ID=38123375

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095142930A TWI443482B (zh) 2005-12-02 2006-11-21 用以改正使用一馬達之壓力變化之系統及方法，與電腦可讀媒體

Country Status (5)

Country Link
JP (2) JP5355091B2 (de)
KR (1) KR101243524B1 (de)
CN (2) CN101495756B (de)
TW (1) TWI443482B (de)
WO (1) WO2007067359A2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
JP5079516B2 (ja) 2004-11-23 2012-11-21 インテグリス・インコーポレーテッド 可変定位置ディスペンスシステムのためのシステムおよび方法
KR101281210B1 (ko) 2005-12-02 2013-07-02 엔테그리스, 아이엔씨. 펌프에서의 밸브 시퀀싱 시스템 및 방법
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
KR101243509B1 (ko) 2005-12-02 2013-03-20 엔테그리스, 아이엔씨. 펌프에서의 압력 보상을 위한 시스템 및 방법
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
JP4845969B2 (ja) 2005-12-02 2011-12-28 エンテグリース，インコーポレイテッド ポンプ制御装置を結合する入出力システム、方法、および装置
WO2007067360A2 (en) 2005-12-05 2007-06-14 Entegris, Inc. Error volume system and method for a pump
TWI402423B (zh) 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
ES2340085T5 (es) 2006-09-28 2014-04-16 Smith & Nephew, Inc. Sistema portátil de terapia de heridas
GB0723855D0 (en) 2007-12-06 2008-01-16 Smith & Nephew Apparatus and method for wound volume measurement
US8684705B2 (en) 2010-02-26 2014-04-01 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
WO2012006019A2 (en) * 2010-06-28 2012-01-12 Entegris, Inc. Customizable dispense system with smart controller
GB201015656D0 (en) 2010-09-20 2010-10-27 Smith & Nephew Pressure control apparatus
TWI563351B (en) * 2010-10-20 2016-12-21 Entegris Inc Method and system for pump priming
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
KR102141271B1 (ko) * 2014-05-28 2020-08-04 엔테그리스, 아이엔씨. 정밀 시스템 및 용도에서 모터-구동식 부품을 위한 백래시 방지 메커니즘
CN107249524A (zh) 2014-12-22 2017-10-13 史密夫及内修公开有限公司 负压伤口治疗装置和方法
EP3445978B1 (de) 2016-04-19 2021-03-10 Clearmotion, Inc. Verfahren und systeme zur aktiven aufhebung von hydraulischer welligkeit
KR20240052026A (ko) 2021-11-11 2024-04-22 아사히 슈낙 가부시키 가이샤 액체 분사 장치

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4131393A (en) * 1977-01-21 1978-12-26 Altex Scientific, Inc. Fluid pump mechanism
JPS5573563A (en) * 1978-11-29 1980-06-03 Ricoh Co Ltd Ink feed pump of ink jet printer
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
JPH04167916A (ja) * 1990-10-30 1992-06-16 Sumitomo Metal Ind Ltd スプレー用給水圧力制御装置
JP3822362B2 (ja) * 1998-07-10 2006-09-20 株式会社スギノマシン 液体加圧装置
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
DE69917927T2 (de) * 1998-11-23 2005-06-23 Mykrolis Corp., Billerica Pumpensteuergerät für hochpräzisionsdosierpumpe
US6330517B1 (en) 1999-09-17 2001-12-11 Rosemount Inc. Interface for managing process
KR100754342B1 (ko) * 1999-10-18 2007-09-03 인터그레이티드 디자인즈 엘.피. 유체 분배 방법 및 장치
JP4531328B2 (ja) * 2002-05-31 2010-08-25 株式会社タクミナ 定量搬送装置
JP3792624B2 (ja) * 2002-08-08 2006-07-05 核燃料サイクル開発機構 粗大結晶粒組織を有する高温クリープ強度に優れたフェライト系酸化物分散強化型鋼の製造方法
JP3861060B2 (ja) * 2003-01-31 2006-12-20 日機装株式会社 無脈動ポンプ
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US7443483B2 (en) * 2006-08-11 2008-10-28 Entegris, Inc. Systems and methods for fluid flow control in an immersion lithography system
JP5059821B2 (ja) * 2009-08-28 2012-10-31 ルネサスエレクトロニクス株式会社 光ディスク装置

Also Published As

Publication number Publication date
JP5524269B2 (ja) 2014-06-18
KR101243524B1 (ko) 2013-03-20
JP2009527674A (ja) 2009-07-30
TW200732872A (en) 2007-09-01
WO2007067359A2 (en) 2007-06-14
CN101495756A (zh) 2009-07-29
JP5355091B2 (ja) 2013-11-27
JP2012154337A (ja) 2012-08-16
KR20080071582A (ko) 2008-08-04
WO2007067359A3 (en) 2009-04-23
CN101495756B (zh) 2012-07-04
CN102705213A (zh) 2012-10-03

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