TWI443055B - Enclosed substrate cassette - Google Patents

Description

Closed substrate

The invention relates to a closed substrate crucible, in particular to a sheet body which is opened by a non-contact type sheet opening and closing mechanism to effectively improve dust particle pollution, and the substrate is stored in a sealed substrate. In the crucible, it can avoid the contamination of the external environment (for example, water molecules, oxygen molecules or organic molecules in the air) to further improve the substrate substrate yield of the substrate.

According to the semiconductor, TFT-LCD or LED process, the substrate will be transferred back and forth between most process machines and the required process from the start of the filming to the verification of the shipment, in order to avoid the repeated transfer process of these substrates. In the event of damage or dust particles, a substrate cassette is usually used to carry and transport the substrate, and the robot arm is used to load and unload the substrate from the substrate.

Referring to FIG. 6 , a schematic perspective view of a conventional substrate , (4) is a box structure composed of a plurality of cover plates (41), and an internal space for placing a plurality of substrates. (5) wherein the substrate crucible (4) has an opening (42), and the opening (42) serves as both a loading and a loading port of the substrate (5); in a general process or on a production line, the substrate (4) The method is such that when a certain process is being carried out, the substrate (5) can be taken out from the substrate 匣 (4) via the opening (42) to perform the required processing; after the process step is completed, the substrate (5) is completed. Put it back in the substrate 4 (4), then Transfer to the next process; then remove the substrate (5) to be processed from the substrate 匣 (4), after the processing, then return the substrate (5) back to the substrate 匣 (4), and the substrate匣(4) is sent to the operation platform of the next process to repeat the above operation, and during this period, the substrate (5) of the substrate 匣(4) enters and exits the substrate 多次 multiple times due to different processing processes (4) The substrate 匣 (4) has an open opening (42), so that the substrate (5) is completely exposed to the outside air, causing the substrate (5) in the substrate 4 (4) to be dusted. Opportunities increase, where the main sources of dust pollution are people, instruments, equipment, and chemicals, which are prone to ionization, causing defects on the surface of the wafer or flat glass.

Therefore, some companies have developed another type of substrate, as shown in the seventh figure, which is a stereoscopic appearance of another conventional substrate, which is provided with a reversible function at the opening (61) of the substrate (6). The front cover (62), wherein the front cover (62) is a one-piece cover. When actually used, the mechanical arm must first lift the substrate (6) before accessing the substrate (7). The front cover (62), therefore, the entire substrate 匣 (6) is open when accessing the substrate (7), so that the substrate (7) in the storage substrate 6 (6) is also completely exposed to the outside air, Increasing the probability of contamination of the inner substrate (7) of the substrate 匣(6) by the dust particles, and the number of dust falling due to the multiple opening and closing of the front sill cover (62); further, in some processes, if necessary First, the substrate 匣 (6) is placed in a loading chamber and then the next step. At this time, in order to match the design of the substrate 匣 (6), the space of the loading chamber needs to include the substrate 匣 (6). Reserve the active space of the front cover (62), and This causes waste of space and an increase in cost in the process.

Nowadays, the inventor is still in the spirit of tirelessness in view of the above-mentioned existing closed substrate, which is still in the practical implementation, and is supported by its rich professional knowledge and years of practical experience. Improvements have been made and the present invention has been developed based on this.

The main object of the present invention is to provide a non-contact type of film opening and closing mechanism to open the sheet of the shutter door cover to effectively improve the problem of dust pollution, and the substrate is stored in the closed substrate to avoid the external environment ( For example, water molecules, oxygen molecules, or organic molecules in the air are polluted to further improve the substrate yield of the substrate.

In order to achieve the above-mentioned implementation, the inventors have developed the following implementation techniques, which mainly include a frame body, a one-leaf door cover, and a non-contact type film opening and closing mechanism; the frame system has a receiving space and is located One of the open ends of the accommodating space, the open end is the inlet and outlet of the substrate; the louver door cover is correspondingly disposed at the open end of the frame, so that the frame is airtight, wherein the louver cover comprises a frame And a plurality of sheets, wherein each of the limiting spaces is correspondingly provided with a sheet body, and each piece system is pivotally connected to the frame body by a rotating shaft; the non-contact type film opening and closing mechanism comprises one end disposed on the rotating shaft Rotating the magnet and a magnetic body corresponding to the rotating magnet, the magnetic body is disposed on a lifting rail device, and when the magnetic body slides to correspond to the rotating magnet, the rotating shaft is rotated to bring the sheet to the open and closed state; Thereby, the magnetic force generated by the magnetic pole opposite to the corresponding magnetic pole of the rotating magnet drives the rotating magnet disposed at one end of the rotating shaft to rotate, thereby driving the rotating shaft to rotate to make the sheet open. The invention not only saves the process space, but also avoids the situation of a large amount of dust generation when the sheet with a small area is opened, and can effectively improve the problem of dust particle pollution, so that the invention can further improve the yield of the substrate process.

In the sealed substrate according to the above aspect, a plurality of support plates arranged in parallel are arranged in the accommodating space of the frame body, so that the accommodating space forms a plurality of lateral limit spaces for the substrate to be stored in layers. The top surface of the carrier is provided with a plurality of protrusions arranged in an array to reduce contact with the substrate, and the fork of the mechanical arm can be deepened to perform the pick-and-place operation of the substrate; In addition, the carrier plate is a removable carrier plate so that the maintenance work of the carrier plate and the cleaning of the substrate fragments can be performed quickly.

The sealed substrate according to the above, wherein the louver cover is detachably assembled to the open end of the frame.

The sealed substrate board as described above, wherein at least one side of the frame adjacent to the louver door cover is provided with a transparent window, and an external optical sensing device is used to detect whether the carrier plate stores the substrate through the transparent window, so as to detect the closed type. The condition of the substrate in each of the limit spaces in the substrate.

The sealed substrate cartridge as described above, wherein a gas filling device and a gas pressure releasing device are further connected to the housing space of the housing, and when the sheet is opened, the gas filling device is supplemented with gas into the accommodating space. In order to maintain the positive pressure environment inside the frame; thereby avoiding the inflow of gas outside the frame, not only can improve the dust of the micro-disturbing flow caused by the opening of the sheet, reduce the pollution of the dust particles to the substrate, and also avoid the external water vapor and oxygen. Or other gas components enter the accommodating space in the substrate when the sheet is opened The situation that caused pollution.

The sealed substrate cartridge as described above, wherein a pressure display for reading the gas pressure in the frame body is disposed on the outer surface of the frame body, so that the optical reading sensor on the stock transfer system crane detects the position of the pointer to determine the frame body. Pressure value.

The object of the present invention and its structural design and advantages will be explained in the light of the preferred embodiments shown in the following drawings, so that the reviewing committee can have a more in-depth and specific understanding of the present invention.

First, please refer to the first to second figures, which are respectively an exploded perspective view of a partial appearance of the preferred embodiment of the present invention and an external perspective view of the assembled structure. The sealed substrate 匣(1) of the present invention is suitable for an inventory transfer system. (3) (Please refer to the fourth to fifth figures together), the closed substrate 匣(1) mainly includes: a frame body (11) having an accommodating space (111) and being located in the accommodating space. (111) one open end (112) on one side, the open end (112) is the inlet and outlet of the substrate (2); a plurality of support plates (12) are arranged in parallel to the accommodation space of the frame (11) In (111), the accommodating space (111) is formed into a plurality of lateral limit spaces (113) for the substrate (2) to be layered and stored on the carrier plate (12); wherein, the top of the carrier plate (12) The face is provided with a plurality of protrusions (121) arranged in an array to reduce contact with the substrate (2), and the fork of the robot arm (37) can be deepened to perform the substrate (2) Take the work In addition, the carrier plate (12) is a removable carrier plate (12) so that the maintenance work of the carrier plate (12) for maintaining and handling the substrate (2) fragments can be quickly performed; the one-leaf door cover plate (13) ), correspondingly disposed at the open end (112) of the frame body (11), the frame body (11) is in an airtight state, and the louver door cover (13) includes a frame body (131) and a plurality of sheets ( 132), each of the limiting spaces (113) is correspondingly provided with a sheet body (132), and each of the sheets (132) is pivotally connected to the frame body (131) by a rotating shaft (133); wherein, the louver door The cover plate (13) is detachably assembled to the open end (112) of the frame body (11); and a non-contact type film opening and closing mechanism (14) includes a one end disposed on the rotating shaft (133). a rotating magnet (141) and a magnetic body (142) magnetically corresponding to the rotating magnet (141), the magnetic body (142) being disposed on a lifting rail device (143), when the magnetic body (142) slides to the rotating magnet (141) correspondingly, driving the rotating shaft (133) to rotate, so that the sheet body (132) is opened and closed; wherein the magnetic body (142) can be one of a magnetic rod or a magnetic disk, in this embodiment, The magnetic body (142) is a magnetic disk.

Furthermore, at least one side of the adjacent louver door cover (13) of the frame body (11) is provided with a transparent window (114), and the optical plate (114) is used to detect the carrier plate (12) through the transparent window (114). Whether to store the substrate (2) to detect the condition of the substrate (2) of each of the limiting spaces (113) in the sealed substrate 匣(1), and the detection knot It will be checked against the data of the upper management system and transmitted to the robot controller (not shown).

In addition, a gas filling device (16) and a gas pressure releasing device (17) are further respectively connected to the receiving space (111) of the frame body (11), and the gas filling device (16) is opened when the film body (132) is opened. The gas is supplied to the accommodating space (111) to maintain a positive pressure environment in the frame (11); and the outer surface of the frame (11) may be provided with a gas pressure in the reading frame (11). The pressure display (18), wherein the pressure display (18) pointer position is determined by using an optical reading sensor (not shown) mounted on the stock transfer system (3) crane (34) to detect the position of the pointer to determine the frame Body (11) pressure value, and the pressure display (18) is a mechanical pressure gauge.

According to the third embodiment, the magnetic substrate corresponds to the rotating magnet, and the sheet is opened. The magnetic body (142) is shown in the third embodiment. According to the received signal, after the lifting rail device (143) slides to reach the specified limit space (113), the rotating magnet disposed at one end of the rotating shaft (133) is driven by the magnetic force generated by the opposite magnetic pole ( 141) rotating, thereby driving the rotating shaft (133) to rotate to bring the sheet body (132) into an open state; please refer to the fourth figure, the closed substrate of the present invention is used in the stock transfer system, and the chemical filtering is performed. The mesh filter is only used in the state of load and unloading load. Since the substrate of the present invention is a closed device, the sealed substrate (1) has been filled inside the load and unloading load (31). The chemical filter filters the air, so when the substrate (2) is accessed in the inventory transfer system area (33), this area does not need special isolation, and when the closed substrate 匣(1) is under load and unloading load (31) When the substrate (2) is accessed, only the load and the unloading load 埠 (31) need to be specially isolated, that is, the chemical filter can be used only in a small area, which can reduce the overall inventory transmission system (3) The cost of setting up the filter.

In addition, the load and unloading load 31 (31) can be filled with an inert gas (such as nitrogen) in addition to the air filtered by the chemical filter to prevent moisture, oxygen or other gas components from causing the product in the process. For the case of pollution, please refer to the fifth figure, which is a schematic diagram of the state of inert gas flow when the sealed substrate of the present invention is used in an inventory transfer system; wherein the stock transfer system (3) includes a closed type The substrate 匣(1) is loaded into the crane (34) of the load and unloading load 31 (31), the first sealed automatic door (35) and the second sealed automatic door (36) of the air flow in the control load and the unloading load 31 (31), and The executable substrate (2) can be used to pick up and release the working arm (37); when the closed substrate (1) is carried by the crane (34) into the load and unloading load (31), the first sealed automatic door (35) is opened. Since the pressure of the load and unloading load 31 (31) is greater than the inventory transfer system area (33), the inert gas leaks into the inventory transfer system area (33), and when the crane (34) is placed in the closed substrate 匣 (1), A closed automatic door (35) is closed; wherein the load and unloading load 31 (31) are in a normal state Over a certain pressure of an inert gas or other gas through the chemical filter filter; Next, when the front substrate (2) starts access, The optical sensing device (15) starts to detect the storage state of the inner substrate (2) of the sealed substrate 匣(1) and returns it to the upper management system. After the confirmation is correct, the second sealed automatic door (36) is opened, and the working area is The gas flows into the load and unloading load 埠 (31), and the magnetic body (142) of the non-contact type film opening and closing mechanism (14) slides to the designated limit space (113), so that the sheet body (132) is opened. In the state, the robot arm (37) can start the substrate (2) pick-and-place operation; when the substrate (2) is accessed, the second sealed automatic door (36) is closed, the load and unloading load (31) and the work area The gas is supplied to the set value, and the insufficient inert gas is introduced into the load and unloading load 31 (31) and the working area through an external pipe (not shown) through a pressure regulating valve or the like until the pressure is the same as the two zones.

From the above-described sealed substrate 匣 and the description of the implementation, the present invention has the following advantages:

1. The present invention drives the rotating magnet disposed at one end of the rotating shaft by the magnetic force generated by the magnetic body and the opposite magnetic pole of the corresponding rotating magnet, thereby rotating the rotating shaft to open the sheet, and the conventional The cover substrate is lower than the lower one, and the invention not only does not need to reserve the movement space of the front cover in the loading chamber, so as to save the process space, and avoid a large amount of dusting when the small-sized sheet is opened, and The invention can effectively improve the problem of dust particle pollution, so that the invention can further improve the yield of the substrate process.

2. The sealed substrate of the present invention slides on the lifting rail device by the magnetic body, so that when the magnetic body corresponds to the rotating magnet, the sheet body is opened, and any plate can be arbitrarily accessed. base The efficiency of the board provides the efficiency of the process.

3. The invention is provided by the gas filling device when the sheet is opened, that is, the gas is replenished into the accommodating space to maintain a positive pressure environment in the frame body, thereby avoiding gas inflow outside the frame body, and improving the sign caused by the opening of the sheet body. The dust of the spoiler not only reduces the pollution of the dust particles to the substrate, but also avoids the contamination of the substrate by the moisture, oxygen or other gas components in the process.

In summary, the sealed substrate of the present invention can achieve the intended use efficiency by the above-disclosed embodiments, and the present invention has not been disclosed before the application, and has completely complied with the provisions of the Patent Law. Claim.爰Issuing an application for a patent for invention in accordance with the law, and asking for a review, and granting a patent, is truly sensible.

The illustrations and descriptions of the present invention are merely preferred embodiments of the present invention, and are not intended to limit the scope of the present invention; those skilled in the art, which are characterized by the scope of the present invention, Equivalent variations or modifications are considered to be within the scope of the design of the invention.

<this invention>

(1) ‧‧‧ Closed substrate

(11) ‧‧‧Frame

(111)‧‧‧ accommodating space

(112)‧‧‧Open end

(113)‧‧‧Limited space

(114)‧‧‧Transparent window

(12) ‧‧‧ board

(121)‧‧‧ convex

(13) ‧‧‧ louver door cover

(131)‧‧‧ ‧ Body

(132)‧‧‧

(133)‧‧‧Rotary axis

(14) ‧‧‧ Non-contact film opening and closing mechanism

(141)‧‧‧Rotating magnet

(142)‧‧‧ magnetic body

(143)‧‧‧ Lifting rail device

(15)‧‧‧Optical sensing device

(16)‧‧‧ gas filling device

(17)‧‧‧Gas pressure relief device

(18)‧‧‧ Pressure display

(2) ‧‧‧Substrate

(3) ‧‧‧Stock Transfer System

(31)‧‧‧Load and unloading埠

(32) ‧‧‧Processing equipment

(33) ‧‧‧Stock Transfer System Area

(34)‧‧‧ Cranes

(35) ‧‧‧First closed automatic door

(36)‧‧‧Second closed automatic door

(37)‧‧‧ Robotic arm

<existing>

(4) ‧‧‧Substrate test

(41)‧‧‧ Cover

(42) ‧ ‧ openings

(5) ‧‧‧Substrate

(6) ‧‧‧Substrate test

(61) ‧ ‧ openings

(62) ‧ ‧ front cover

(7) ‧‧‧Substrate

First Figure: An exploded perspective view of a partial appearance of a preferred embodiment of the present invention

Second drawing: a perspective view of the appearance of the preferred embodiment of the present invention

Third: In the preferred embodiment of the present invention, the magnetic body corresponds to the rotating magnet, and the state of the sheet is opened.

The fourth figure: the closed substrate of the present invention is used in the stock transfer system, and the chemical screen filter is only used for the state of load and unloading load.

Fig. 5 is a schematic view showing the state of inert gas flow when the sealed substrate of the present invention is used in an inventory transfer system

Figure 6: An external perspective view of a substrate

Figure 7: Appearance perspective view of the existing two substrates

(1) ‧‧‧ Closed substrate

(11) ‧‧‧Frame

(111)‧‧‧ accommodating space

(112)‧‧‧Open end

(113)‧‧‧Limited space

(114)‧‧‧Transparent window

(12) ‧‧‧ board

(121)‧‧‧ convex

(13) ‧‧‧ louver door cover

(131)‧‧‧ ‧ Body

(132)‧‧‧

(133)‧‧‧Rotary axis

(141)‧‧‧Rotating magnet

(16)‧‧‧ gas filling device

(17)‧‧‧Gas pressure relief device

(18)‧‧‧ Pressure display

(2) ‧‧‧Substrate

Claims (10)

The invention relates to a sealed substrate, which is suitable for use in an inventory transfer system. The sealed substrate includes: a frame having an accommodating space and an open end on one side of the accommodating space, the open end being a substrate The louver door cover is disposed in an airtight state corresponding to the open end of the frame body, and the louver door cover comprises a frame body and a plurality of sheets, and each of the pieces The system is pivotally connected to the frame body by a rotating shaft; and a non-contact type film opening and closing mechanism includes a rotating magnet disposed at one end of the rotating shaft, and a magnetic body corresponding to the magnetic rotating magnet, the magnetic body It is disposed on a lifting rail device, and when the magnetic body slides to correspond to the rotating magnet, the rotating shaft is rotated to bring the sheet into an open and closed state. The sealed substrate according to claim 1, wherein the housing is provided with a plurality of supporting plates arranged in parallel at intervals, so that the receiving space forms a plurality of lateral limiting spaces. The substrate is stored in layers on the carrier. The sealed substrate according to claim 2, wherein the sheet is disposed corresponding to the limiting space. The sealed substrate according to claim 2, wherein the top surface of the carrier is provided with a plurality of convex portions arranged in an array. The sealed substrate according to claim 2, wherein the carrier is a removable carrier. The sealed substrate according to claim 1, wherein the frame is provided with a transparent window adjacent to at least one side of the louver cover, and The optical sensing device detects the storage and storage of the substrate through the transparent window. The sealed substrate according to claim 1, wherein a gas filling device and a gas pressure releasing device are further connected to the housing space of the housing, and the gas filling device is supplemented when the sheet is opened. The gas is placed in the accommodating space to maintain a positive pressure environment in the frame. The sealed substrate according to claim 7, wherein a surface of the frame is provided with a pressure display for reading the gas pressure in the frame. The sealed substrate according to claim 1, wherein the louver cover is detachably assembled to the open end of the frame. The sealed substrate according to claim 1, wherein the magnetic system is one of a magnetic bar or a magnetic disk.