TWI442403B - Erase process for use in semiconductor memory device - Google Patents
Erase process for use in semiconductor memory device Download PDFInfo
- Publication number
- TWI442403B TWI442403B TW99114114A TW99114114A TWI442403B TW I442403 B TWI442403 B TW I442403B TW 99114114 A TW99114114 A TW 99114114A TW 99114114 A TW99114114 A TW 99114114A TW I442403 B TWI442403 B TW I442403B
- Authority
- TW
- Taiwan
- Prior art keywords
- memory
- memory cells
- erase
- block
- cells
- Prior art date
Links
Landscapes
- Read Only Memory (AREA)
Description
本發明係關於電子記憶裝置,特別是關於適用作為記憶裝置的半導體記憶裝置。The present invention relates to electronic memory devices, and more particularly to semiconductor memory devices suitable for use as memory devices.
半導體記憶裝置已經被廣泛使用,而且可以在今日所使用的幾乎所有電子設備之中發現。大部分的半導體記憶裝置可以區分為揮發或非揮發型態。一個揮發記憶裝置需要電源以保存所儲存的資料,而一個非揮發記憶裝置則可以在沒有電源時仍能保存所儲存的資料。Semiconductor memory devices have been widely used and can be found in almost all electronic devices used today. Most semiconductor memory devices can be distinguished as volatile or non-volatile. A volatile memory device requires power to store the stored data, while a non-volatile memory device can store the stored data without power.
快閃記憶體是一種熟知的非揮發記憶體。一個典型的快閃記憶體包括一個記憶陣列其中的記憶胞係成行成列地安排。每一個記憶胞包括一浮動閘極場效電晶體。一記憶胞的邏輯狀態係根據此電晶體的臨界電壓決定,其係根據此電晶體浮動閘極中的電子數目而決定。浮動閘極中的電子會部分抵消自控制閘極產生的電場,因此而調整此電晶體的臨界電壓。故,一快閃記憶體的邏輯狀態可以藉由控制電晶體浮動閘極中的電子數目而控制。Flash memory is a well-known non-volatile memory. A typical flash memory includes a memory array in which the memory cells are arranged in rows and columns. Each memory cell includes a floating gate field effect transistor. The logic state of a memory cell is determined by the threshold voltage of the transistor, which is determined by the number of electrons in the floating gate of the transistor. The electrons in the floating gate partially cancel the electric field generated by the control gate, thus adjusting the threshold voltage of the transistor. Therefore, the logic state of a flash memory can be controlled by controlling the number of electrons in the floating gate of the transistor.
一個快閃記憶胞可以被程式化及抹除以寫入各自的邏輯狀態至此記憶胞中。此程式化及抹除操作與所寫入之各自的邏輯對應,其係對應於各自的臨界電壓。為了簡化起見,臨界電壓僅會稱為高及低臨界電壓,其理解為高臨界電壓係相對高於低臨界電壓數個可偵測的電壓邊界。儲存於此電晶體浮動閘極中的電子數目可以藉由施加一個強的電場於控制閘極與此電晶體的源極、汲極和基板至少一者之間而改變,以移除或堆積電子於此浮動閘極中。一個”抹除”操作是電子自此浮動閘極移除的操作,因此降低此記憶胞電晶體的臨界電壓至低臨界電壓,而一個”程式化”操作是將電子堆積在此浮動閘極中的操作,因此增加此記憶胞電晶體的臨界電壓至高臨界電壓。因為被程式化及抹除的記憶胞可以由其臨界電壓的不同而輕易地辨認,程式化及抹除的記憶胞可以用來代表不同的邏輯狀態。舉例而言,抹除的記憶胞可以用來代表邏輯狀態”1”,而程式化的記憶胞可以用來代表邏輯狀態”0”。A flash memory cell can be programmed and erased to write its respective logic state to this memory cell. This stylization and erase operation corresponds to the respective logic being written, which corresponds to the respective threshold voltages. For the sake of simplicity, the threshold voltage will only be referred to as the high and low threshold voltages, which is understood to be that the high threshold voltage is relatively higher than the low threshold voltage by several detectable voltage boundaries. The number of electrons stored in the floating gate of the transistor can be changed by applying a strong electric field between the control gate and at least one of the source, the drain and the substrate of the transistor to remove or stack electrons. In this floating gate. An "erase" operation is an operation in which electrons are removed from the floating gate, thereby lowering the threshold voltage of the memory cell to a lower threshold voltage, and a "stylized" operation is to deposit electrons in the floating gate. The operation thus increases the critical voltage of this memory cell to a high threshold voltage. Because the memory cells that are programmed and erased can be easily identified by their different threshold voltages, the stylized and erased memory cells can be used to represent different logic states. For example, the erased memory cell can be used to represent the logic state "1", and the stylized memory cell can be used to represent the logic state "0."
第1圖顯示使用在快閃記憶裝置中的傳統抹除操作之流程圖。在快閃記憶裝置中,稱為區塊的記憶胞通常係以群組方式一起被抹除。一個區塊代表一定數目的記憶胞其可以在一抹除操作時同時被抹除。抹除一個區塊中的記憶胞之傳統抹除操作,通常包括一預程式化循環110、一抹除循環120及一軟程式化循環130。Figure 1 shows a flow chart of a conventional erase operation used in a flash memory device. In flash memory devices, memory cells called blocks are usually erased together in groups. A block represents a certain number of memory cells that can be erased simultaneously during an erase operation. A conventional erase operation that erases a memory cell in a block typically includes a pre-programming loop 110, an erase loop 120, and a soft stylization loop 130.
於預程式化循環110時,在所選取區塊中的所有記憶胞之浮動閘極被程式化以具有大約相等數目的電子,使得所選取區塊中的所有記憶胞具有大約相同的臨界電壓。此預程式化循環110包括一預程式化程序112及一預程式化驗證程序114。於此預程式化程序112中係施加一個預程式化脈衝至所選取區塊中的所有記憶胞。於此預程式化驗證程序114中,此區塊段中的所有記憶胞被檢查以驗證其各自的臨界電壓在施加預程式化脈衝之後是大致相同的。假如沒有足夠的記憶胞具有所預期的臨界電壓時,則可以重新進行預程式化程序112。否則,此操作繼續至抹除循環120。During the pre-programming loop 110, the floating gates of all of the memory cells in the selected block are programmed to have approximately equal numbers of electrons such that all of the memory cells in the selected block have approximately the same threshold voltage. The pre-programmed loop 110 includes a pre-programming program 112 and a pre-programmed verification program 114. A pre-programmed pulse is applied to the pre-programming program 112 to all of the memory cells in the selected block. In this pre-programmed verification program 114, all of the memory cells in this block segment are examined to verify that their respective threshold voltages are substantially the same after the application of the pre-programmed pulses. The pre-programming process 112 can be re-executed if there are not enough cells to have the expected threshold voltage. Otherwise, this operation continues to erase cycle 120.
於抹除循環120時,所選取區塊中的所有記憶胞藉由施加抹除脈衝至此區塊中所有記憶胞的控制閘極使得電子自此區塊中所有記憶胞的浮動閘極中移除。此抹除循環120包括一抹除程序122及一抹除驗證程序124。於此抹除程序122中係施加一個抹除脈衝至所選取區塊中的所有記憶胞。於此抹除驗證程序124中,此區塊段中的所有記憶胞被檢查以驗證其是否已被抹除。假如有足夠的記憶胞被抹除的話,則此區塊被視為成功地抹除。假如此區塊沒有通過抹除驗證程序124的話,則此區塊中的所有記憶胞可以重新施加另一個抹除脈衝而重新進行抹除。在某些系統中,可以使用一電壓步進程序,其中電壓在每一次抹除循環120後遞增。在其他的系統中,可以使用一時間步進程序,其中脈衝寬度在每一次抹除循環120後遞增。During the erase cycle 120, all of the memory cells in the selected block are removed from the floating gates of all of the memory cells in the block by applying an erase pulse to the control gates of all of the memory cells in the block. . This erase cycle 120 includes a erase program 122 and an erase verification program 124. In this erase program 122, an erase pulse is applied to all of the memory cells in the selected block. In this erase verification program 124, all memory cells in this block segment are checked to verify that they have been erased. If enough memory cells are erased, then this block is considered to be successfully erased. If the block is not erased by the verification program 124, then all of the memory cells in the block can be re-applied by re-applying another erase pulse. In some systems, a voltage stepping procedure can be used in which the voltage is incremented after each erase cycle 120. In other systems, a time stepping procedure can be used in which the pulse width is incremented after each erase cycle 120.
因為在實際的應用中,任一給定區塊段內記憶胞的臨界電壓常常有所變動,如此不同記憶胞之間抹除所需的抹除脈衝之電壓可以變動。在抹除循環120的後段中,施加相對大或是較長的抹除脈衝可以導致某些記憶胞的過度抹除。一個過度抹除的記憶胞可以導致耦接至相同行的其他記憶胞也被視為是抹除的記憶胞,即使其可能已被程式化了。因此,過度抹除的記憶胞通常需要使用軟程式化循環130加以修復。Because in practical applications, the threshold voltage of the memory cells in any given block segment often changes, so that the voltage of the erase pulse required for erasing between different memory cells can be varied. In the latter stage of the erase cycle 120, the application of a relatively large or long erase pulse can result in excessive erasure of certain memory cells. An over-erased memory cell can cause other memory cells coupled to the same row to be considered as erased memory cells, even though they may have been programmed. Therefore, over-erased memory cells typically need to be repaired using a soft stylized loop 130.
於軟程式化循環130中,此區塊中的過度抹除記憶胞被偵測及修復。於軟程式化循環130中包括一軟程式化程序132及一軟程式化驗證程序134。於此軟程式化程序132中,此區塊中的所有記憶胞皆被檢查以決定是否有任何記憶胞被過度抹除。假如偵測到一個過度抹除記憶胞的話,則施加一個軟程式化脈衝而將其修復。此軟程式化脈衝是與正常的程式化脈衝不同,在軟程式化脈衝中字元線和位元線電壓係低於正常程式化脈衝中的字元線和位元線電壓。此外,並不像是程式化脈衝的執行係程式化一記憶胞,軟程式化脈衝的執行係抹除一個過度抹除的記憶胞。舉例而言,一個正常的程式化脈衝可以使用3.0~4.0V的字元線電壓及3.0~4.0V的位元線電壓。一個軟程式化脈衝使用約為2.5V的字元線電壓及約為3.0V的位元線電壓。於軟程式化驗證程序134中,此區塊中的所有記憶胞被檢查以決定在軟程式化脈衝後是否仍有任何過度抹除的記憶胞。假如此區塊中的過度抹除記憶胞的數目是小於或等於一個預設的數目,例如0,此區塊被視為通過軟程式化驗證程序134。假如此區塊沒有通過軟程式化驗證程序134的話,則重新進行軟程式化程序132。此軟程式化循環130可以被連續執行直到此區塊通過軟程式化驗證程序134為止。In the soft stylized loop 130, the over-erased memory cells in this block are detected and repaired. A soft stylization program 132 and a soft stylization verification program 134 are included in the soft stylization loop 130. In this soft programming program 132, all memory cells in this block are checked to determine if any memory cells are over-erased. If an over-erasing of the memory cell is detected, a soft stylized pulse is applied to repair it. This soft stylized pulse is different from a normal stylized pulse in which the word line and bit line voltages are lower than the word line and bit line voltages in the normal stylized pulses. Furthermore, unlike the stylized pulse execution, which is programmed to program a memory cell, the execution of the soft stylized pulse erases an over-erased memory cell. For example, a normal stylized pulse can use a 3.0 to 4.0V word line voltage and a 3.0 to 4.0V bit line voltage. A soft stylized pulse uses a word line voltage of approximately 2.5V and a bit line voltage of approximately 3.0V. In the soft stylized verification program 134, all of the memory cells in this block are examined to determine if there are any over-erased memory cells after the soft stylized pulse. Assuming that the number of over-erased memory cells in such a block is less than or equal to a predetermined number, such as zero, the block is considered to pass the soft stylization verification procedure 134. If the block does not pass the soft stylization verification program 134, the soft program program 132 is re-executed. This soft stylization loop 130 can be executed continuously until the block passes the soft stylization verification program 134.
在步驟140中,假如有另一個區塊需要被抹除,傳統區塊抹除操作的預程式化循環110、一抹除循環120及一軟程式化循環130依序執行以抹除下一個區塊。在此情況下,傳統的”軟程式化”操作被執行以更正此快閃記憶體中所有被抹除區塊中的過度抹除記憶胞。In step 140, if another block needs to be erased, the pre-programming loop 110 of the traditional block erasing operation, an erase loop 120, and a soft stylization loop 130 are sequentially executed to erase the next block. . In this case, a conventional "soft stylization" operation is performed to correct over-erase memory cells in all erased blocks in the flash memory.
當執行傳統的”軟程式化”操作時,使用傳統的軟程式化循環需要大量的時間以更正被過度抹除的記憶胞。因此需要一種新的區塊抹除方法可以使用於非揮發記憶體中,以減少抹除此非揮發記憶體中的區塊所需的時間及/或步驟。When performing traditional "soft stylization" operations, using a traditional soft stylization loop requires a significant amount of time to correct over-erased memory cells. There is therefore a need for a new block erase method that can be used in non-volatile memory to reduce the time and/or steps required to erase blocks in the non-volatile memory.
本發明之一目的為提供一種使用在一記憶體的抹除方法。該記憶體包含複數個記憶胞且被分割成複數個區段的該些記憶胞。該方法包含對一記憶單元的記憶胞進行一抹除程序、當執行該抹除程序時接收一暫停命令、以及響應該暫停命令,而中斷該抹除程序且執行一程式化操作於該記憶單元的至少一記憶胞中。It is an object of the present invention to provide an erasing method for use in a memory. The memory includes a plurality of memory cells and is divided into a plurality of segments of the memory cells. The method includes performing an erase program on a memory cell of a memory unit, receiving a pause command when executing the erase program, and interrupting the erase program and performing a program operation on the memory unit in response to the pause command At least one memory cell.
本發明之另一目的為提供一種記憶體裝置。此裝置包含一記憶陣列及一記憶體控制器。此記憶陣列包含複數個記憶胞且被分割成複數個記憶區塊,每一個記憶區塊分割成複數個記憶區段的記憶胞。此記憶體控制器係組態成對該記憶陣列的一記憶單元的記憶胞進行一抹除程序,當執行該抹除程序時暫停該些記憶胞的抹除,以進行一中斷操作,以及於該暫停命令之後及執行該中斷操作之前,執行一程式化操作於該記憶單元的至少一記憶胞中。Another object of the present invention is to provide a memory device. The device includes a memory array and a memory controller. The memory array includes a plurality of memory cells and is divided into a plurality of memory blocks, each memory block being divided into memory cells of a plurality of memory segments. The memory controller is configured to perform an erasing process on the memory cells of a memory unit of the memory array, suspending the erasing of the memory cells when performing the erasing process, to perform an interrupt operation, and After the command is paused and before the interrupt operation is performed, a stylization operation is performed on at least one memory cell of the memory unit.
請參閱第2圖顯示根據本發明一實施例之記憶裝置200的方塊示意圖,此記憶裝置200包含一記憶陣列202、行解碼器204、感測放大器206、列解碼器208及一記憶體控制器209。此記憶陣列202可以包括複數個記憶區塊210。2 is a block diagram showing a memory device 200 according to an embodiment of the present invention. The memory device 200 includes a memory array 202, a row decoder 204, a sense amplifier 206, a column decoder 208, and a memory controller. 209. This memory array 202 can include a plurality of memory blocks 210.
此記憶裝置200可以組態為如此記憶陣列202包括安排於記憶區塊210中的反或閘(NOR)快閃記憶胞214,這些記憶區塊210標示為區塊0至區塊i,其中”i”可以是任何根據特定應用的設計規範所期望的自然數。位址及控制信號可以自控制器209經由行解碼器204、感測放大器206、列解碼器208輸入至記憶陣列202的位址/信號線以進行讀和寫以及其他之操作。此記憶體控制器209可以包括位址和控制電路,且可以组態為與記憶裝置200外的其他裝置,例如一個或多個處理器,進行溝通。此記憶體控制器209也可以组態為對記憶陣列202中的抹除操作中斷發出一暫停命令以允許例如是讀取或程式化操作的另一操作在記憶陣列202中進行。The memory device 200 can be configured such that the memory array 202 includes anti-gate (NOR) flash memory cells 214 arranged in the memory block 210, the memory blocks 210 being labeled as block 0 through block i, where i" can be any natural number desired according to the design specifications of a particular application. The address and control signals can be input from controller 209 via row decoder 204, sense amplifier 206, column decoder 208 to the address/signal lines of memory array 202 for read and write and other operations. The memory controller 209 can include address and control circuitry and can be configured to communicate with other devices external to the memory device 200, such as one or more processors. The memory controller 209 can also be configured to issue a pause command to the erase operation interrupt in the memory array 202 to allow another operation, such as a read or program operation, to be performed in the memory array 202.
如第3圖中所示,每一個記憶區塊210包括安排於記憶區段212中的反或閘(NOR)快閃記憶胞214,這些記憶區段標示為區塊0至區塊j,其中”j”可以是任何根據特定應用的設計規範所期望的自然數。舉例而言,記憶區塊210或是共享基板之記憶胞可以形成64kB或是128kB的記憶體,其可以安排成每一個為4kB的記憶區段212。As shown in FIG. 3, each memory block 210 includes inverse OR gate (NOR) flash memory cells 214 arranged in memory segment 212, which are labeled as block 0 through block j, wherein "j" can be any natural number desired according to the design specifications of a particular application. For example, the memory block 210 or the memory cell sharing the substrate can form a memory of 64 kB or 128 kB, which can be arranged into a memory segment 212 of 4 kB each.
請參閱第4圖顯示根據本發明一實施例之記憶區塊210的詳細方塊示意圖,此記憶區塊210包含複數個記憶區段212,其包含例示之記憶區段212a和212b。記憶區段212a和212b各自包括安排於一反或閘(NOR)快閃記憶架構中的快閃記憶胞214群組。此記憶區塊210也包含複數條位元線BL0-BLm,複數條字元線WL0-WLn,及複數條源極線SL0-SLm,其允許記憶胞214與記憶裝置200中記憶區塊210外的其他元件,例如行解碼器204、感測放大器206、列解碼器208及記憶體控制器209,進行溝通。Referring to FIG. 4, a detailed block diagram of a memory block 210 including a plurality of memory segments 212 including exemplary memory segments 212a and 212b is shown, in accordance with an embodiment of the present invention. Memory segments 212a and 212b each include a group of flash memory cells 214 arranged in a reverse OR gate (NOR) flash memory architecture. The memory block 210 also includes a plurality of bit lines BL0-BLm, a plurality of word lines WL0-WLn, and a plurality of source lines SL0-SLm, which allow the memory cells 214 and the memory block 200 to be outside the memory block 210. Other components, such as row decoder 204, sense amplifier 206, column decoder 208, and memory controller 209, communicate.
在此例示實施例中,第一記憶區段212a包括字元線WL0-WLs,其中”s”可以是任何根據特定應用的設計規範所期望的自然數。In this illustrative embodiment, first memory segment 212a includes word lines WL0-WLs, where "s" can be any natural number desired according to the design specifications of a particular application.
此記憶區塊210可以構成支援暫停-重新開始功能之快閃記憶裝置200的一部分。舉例而言,快閃記憶裝置200的記憶體控制器209可以组態為於抹除操作進行時發出一暫停命令以允許抹除操作被中斷而進行另一操作。舉例而言,此抹除程序可以被中斷使得資料可以自快閃記憶裝置200的其他區段212或是區塊210中的記憶胞214讀取/或是程式化至其中。This memory block 210 may form part of a flash memory device 200 that supports a pause-restart function. For example, the memory controller 209 of the flash memory device 200 can be configured to issue a pause command while the erase operation is in progress to allow the erase operation to be interrupted for another operation. For example, the erase program can be interrupted such that data can be read from or otherwise programmed into other segments 212 of flash memory device 200 or memory cells 214 in block 210.
第5圖顯示在快閃記憶裝置200中所使用的區段抹除操作之流程圖。在快閃記憶裝置200中,記憶胞214係以區段為單位進行群組抹除,如此一給定區段212中的記憶胞214係以群組方式一起被抹除。舉例而言,為了抹除記憶區段212a中的一個記憶胞214,根據第5圖中的抹除操作會對記憶區段212a中的所有記憶胞214進行抹除,而其他區段中的記憶胞,例如是記憶區段212b會保持不變。因為只有記憶區段212a中的記憶胞214被抹除,相較於對整個記憶區塊210中的所有記憶胞214進行抹除,此抹除程序僅需要較少的時間。FIG. 5 shows a flow chart of the segment erase operation used in the flash memory device 200. In the flash memory device 200, the memory cells 214 are group erased in units of segments, such that the memory cells 214 in a given segment 212 are erased together in a group manner. For example, in order to erase a memory cell 214 in the memory segment 212a, all memory cells 214 in the memory segment 212a are erased according to the erase operation in FIG. 5, while the memory in other segments is erased. The cell, for example, the memory segment 212b will remain unchanged. Since only the memory cells 214 in the memory segment 212a are erased, this erase process requires less time than erasing all of the memory cells 214 in the entire memory block 210.
此區段抹除操作包括一預程式化程序於方塊302之中,一抹除(ERS脈衝)程序於方塊308之中,一軟程式化程序於方塊312之中,及一抹除/軟程式化驗證程序於方塊316之中。第5圖中所示的區段抹除操作描述是與第4圖中所示的記憶區段212a相關。然而,第5圖中所示的區段抹除操作也可以類似地在記憶陣列202的其他記憶區段212執行抹除。The sector erase operation includes a pre-programming program in block 302, an erase (ERS pulse) program in block 308, a soft programming program in block 312, and an erase/software verification. The program is in block 316. The section erase operation description shown in Fig. 5 is related to the memory section 212a shown in Fig. 4. However, the segment erase operation shown in FIG. 5 can similarly perform erase on other memory segments 212 of memory array 202.
於方塊302的預程式化程序中,記憶區段212a中的所有記憶胞214之浮動閘極被程式化以具有大約相等的電子,使得記憶區段212a中的所有記憶胞214具有大約相同的臨界電壓。於此預程式化程序中,係施加一個預程式化脈衝至記憶區段212a中的所有記憶胞214。在某些實施例中,此預程式化程序中可以包含一預程式化驗證程序,其中記憶區段212a中的所有記憶胞214被檢查以驗證其各自的臨界電壓在施加預程式化脈衝之後是大致相同的。在如此的實施例中,假如沒有足夠的記憶胞214具有所預期的臨界電壓時,則可以重新施加預程式化脈衝。In the pre-programming process of block 302, the floating gates of all of the memory cells 214 in the memory segment 212a are programmed to have approximately equal electrons such that all of the memory cells 214 in the memory segment 212a have approximately the same criticality. Voltage. In this pre-programmed program, a pre-programmed pulse is applied to all of the memory cells 214 in the memory segment 212a. In some embodiments, the pre-programming program can include a pre-programmed verification program in which all of the memory cells 214 in the memory segment 212a are checked to verify that their respective threshold voltages are after the application of the pre-programmed pulses. Roughly the same. In such an embodiment, if there are not enough memory cells 214 to have the desired threshold voltage, then the pre-programmed pulses can be reapplied.
於方塊308的抹除程序中,記憶區段212a中的所有記憶胞214藉由施加抹除脈衝至記憶區段212a中的記憶胞214被抹除,使得電子自記憶區段212a中的所有記憶胞214中被移除。於方塊308的抹除程序中,可以施加一個抹除脈衝至記憶區段212a中的記憶胞214,使得在每一記憶胞電晶體之源極、汲極及/或基板的電壓是較每一記憶胞電晶體之閘極電壓為更大(正)的,因此強迫電子自電晶體的浮動閘極中移出。In the erase process of block 308, all of the memory cells 214 in the memory segment 212a are erased by applying an erase pulse to the memory cells 214 in the memory segment 212a such that all of the memory in the electronic self-memory segment 212a The cell 214 is removed. In the erase process of block 308, an erase pulse can be applied to the memory cell 214 in the memory segment 212a such that the voltage at the source, drain and/or substrate of each memory cell is more The gate voltage of the memory cell is larger (positive), thus forcing electrons to move out of the floating gate of the transistor.
在某些實施例中,於方塊308的抹除程序中可以包含一抹除驗證程序,其中記憶區段212a中的所有記憶胞214被檢查以驗證其是否被抹除。在如此的實施例中,假如有足夠的記憶胞被抹除的話,則此記憶區段212a被視為成功地抹除。在如此的實施例中,假如記憶區段212a沒有通過抹除驗證程序的話,則此記憶區段212a中的所有記憶胞可以重新施加另一個抹除脈衝而重新進行抹除。在某些如此的實施例中,可以使用一電壓步進程序,其中電壓在每一次方塊308的抹除/抹除驗證程序後遞增。在其他的如此實施例中,可以使用一時間步進程序,其中脈衝寬度在每一次方塊308的抹除/抹除驗證程序後遞增。In some embodiments, a erase verification procedure can be included in the erase program of block 308, wherein all memory cells 214 in memory segment 212a are examined to verify that they are erased. In such an embodiment, the memory segment 212a is considered to be successfully erased if sufficient memory cells are erased. In such an embodiment, if the memory segment 212a does not pass the erase verification procedure, then all of the memory cells in the memory segment 212a may be re-applied with another erase pulse. In some such embodiments, a voltage stepping procedure can be used in which the voltage is incremented after each erase/erase verification procedure of block 308. In other such embodiments, a time stepping procedure can be used in which the pulse width is incremented after each erase/erase verification procedure of block 308.
在實際的應用中,記憶胞214的臨界電壓可以在記憶區段212a內變動,如此不同記憶胞214之間,舉例而言因為製程所產生在浮動閘極電晶體之間的變動,抹除所需的抹除脈衝之電壓可以變動。在方塊308的抹除程序中,施加抹除脈衝可以導致某些記憶胞214的過度抹除。一個過度抹除的記憶胞可以導致耦接至相同行的其他記憶胞也被視為過度抹除的記憶胞,即使其可能已被程式化了。因此,過度抹除的記憶胞需要使用包括方塊312和316的軟程式化循環加以修復。In a practical application, the threshold voltage of the memory cell 214 can be varied within the memory segment 212a, such as between the different memory cells 214, for example, due to variations in the floating gate transistor generated by the process, the eraser The voltage of the desired erase pulse can vary. In the erase procedure of block 308, applying an erase pulse can result in excessive erasure of certain memory cells 214. An over-erased memory cell can cause other memory cells coupled to the same row to be considered as over-erased memory cells, even though they may have been programmed. Therefore, over-erased memory cells need to be repaired using a soft stylized loop that includes blocks 312 and 316.
於方塊312的軟程式化程序中,記憶區段212a中的過度抹除記憶胞被偵測及修復。於方塊312的軟程式化程序中,記憶區段212a中的所有記憶胞214皆被檢查以決定是否有任何記憶胞214被過度抹除。假如偵測到一個過度抹除的記憶胞的話,則施加一個軟程式化脈衝至此被過度抹除記憶胞的浮動閘極電晶體。In the soft programming of block 312, the over-erased memory cells in memory segment 212a are detected and repaired. In the soft stylization program of block 312, all of the memory cells 214 in the memory segment 212a are examined to determine if any of the memory cells 214 have been over erased. If an over-erased memory cell is detected, a soft stylized pulse is applied to the floating gate transistor that is over-erased.
此軟程式化脈衝是與正常的程式化脈衝不同,在軟程式化脈衝中字元線和位元線電壓係低於正常程式化脈衝中的字元線和位元線電壓。此外,並不像是程式化脈衝的執行係程式化一記憶胞,軟程式化脈衝的執行係抹除一個過度抹除的記憶胞。舉例而言,在某些實施例中,一個抹除的記憶胞可以代表邏輯狀態”1”及一個程式化的記憶胞可以代表邏輯狀態”0”。在如此的實施例中,軟程式化脈衝可以導致寫入邏輯狀態”1”,而程式化脈衝可以導致寫入邏輯狀態”0”。This soft stylized pulse is different from a normal stylized pulse in which the word line and bit line voltages are lower than the word line and bit line voltages in the normal stylized pulses. Furthermore, unlike the stylized pulse execution, which is programmed to program a memory cell, the execution of the soft stylized pulse erases an over-erased memory cell. For example, in some embodiments, an erased memory cell can represent a logic state of "1" and a stylized memory cell can represent a logic state of "0." In such an embodiment, the soft stylized pulse can cause the write logic state to be "1", while the stylized pulse can cause the write logic state to be "0."
於方塊316的軟程式化驗證程序中,其中記憶區段212a中的所有記憶胞214被檢查以決定在軟程式化脈衝後是否仍有任何過度抹除的記憶胞。假如此記憶區段212a之過度抹除記憶胞的數目是小於或等於一個預設的數目,例如0,則此記憶區段212a被視為通過方塊316的軟程式化驗證程序。假如記憶區段212a沒有通過方塊316的軟程式化驗證程序的話,則重新進行方塊312的軟程式化程序。此軟程式化循環包含方塊312的軟程式化程序及方塊316的軟程式化驗證程序可以被連續執行直到此記憶區段212a通過方塊316的軟程式化驗證程序。In the soft stylization verification procedure of block 316, all of the memory cells 214 in the memory segment 212a are examined to determine if there are any over-erased memory cells after the soft stylized pulse. If the number of over-erased memory cells of memory segment 212a is less than or equal to a predetermined number, such as zero, then memory segment 212a is considered to be a soft stylization verification procedure through block 316. If the memory section 212a does not pass the soft stylization verification procedure of block 316, then the soft programming of block 312 is re-executed. The soft stylization loop including the soft stylization program of block 312 and the soft stylization verification program of block 316 can be continuously executed until the memory section 212a passes the soft stylization verification procedure of block 316.
因為此記憶裝置200支援暫停命令以執行一中斷程序,舉例而言讀取或程式化程序,此抹除程序可以在其完成之前被一暫停命令所中斷,如同方塊304、310、314中所表示的一般。因為效能的原因,在記憶體控制器209發出暫停命令與控制器交出中斷命令,例如是讀取或程式化命令,之間的時間希望是很短的。舉例而言,在某些實施例中,一旦發出暫停命令,此控制器209應該在20微秒之內切換至中斷命令。Because the memory device 200 supports a pause command to execute an interrupt routine, such as a read or program program, the erase program can be interrupted by a pause command before it is completed, as represented by blocks 304, 310, 314. General. For performance reasons, the time between when the memory controller 209 issues a pause command to hand over an interrupt command to the controller, such as a read or program command, is expected to be short. For example, in some embodiments, once a pause command is issued, the controller 209 should switch to the interrupt command within 20 microseconds.
根據此暫停的命令在何處中斷此抹除程序,假如控制器交出之後並沒有進一步動作的話可能會產生一些問題。在快閃記憶陣列202中,每一個區塊210包含複數個記憶區段212其分享一共同基板。舉例而言,在記憶區塊210中,記憶區段212a中的記憶胞214與記憶區段212b中的記憶胞214分享位元線BL0-BLn及源極線SL0-SLn。因此,當此抹除程序,舉例而言,在方塊308的抹除程序或是方塊312的軟程式化程序被中斷時,此記憶區段212a中的記憶胞214潛在地會產生漏電,其可以在後續地其他記憶區段212之讀取或程式化命令時影響了其他記憶區段212的分享位元線之記憶胞214。Depending on where the command is paused, the eraser is interrupted. If the controller fails to move further, it may cause some problems. In flash memory array 202, each block 210 includes a plurality of memory segments 212 that share a common substrate. For example, in memory block 210, memory cell 214 in memory segment 212a shares bit line BL0-BLn and source line SL0-SLn with memory cell 214 in memory segment 212b. Therefore, when the erase program, for example, when the erase program of block 308 or the soft program of block 312 is interrupted, the memory cell 214 in the memory segment 212a potentially generates leakage, which may The memory cells 214 of the shared bit line of other memory segments 212 are affected by subsequent reading or stylization commands of other memory segments 212.
在第5圖所示的程序中,假如一暫停命令在程序中的任何時點接收到的話,則此抹除操作會切換至方塊306,其中會執行富勒-諾德漢(F-N)程式化脈衝程序。在某些實施例中,方塊306的富勒-諾德漢(F-N)程式化可以施加至記憶區段212a中的所有記憶胞214。在替代實施例中,方塊306的富勒-諾德漢(F-N)程式化僅施加至記憶區段212a中尚未完成方塊302、308、312和316抹除程序的記憶胞214。於方塊306的富勒-諾德漢(F-N)程式化程序中,一個正電壓被施加至正在進行抹除程序的記憶區段212a之字元線WL0-WLs上,及一個負電壓被施加至正在進行富勒-諾德漢(F-N)程式化的記憶區段212a每一個記憶胞214之基板上。In the procedure shown in Figure 5, if a pause command is received at any point in the program, then the erase operation switches to block 306 where a Fuller-Nordheim (FN) stylized pulse is executed. program. In some embodiments, the Fuller-Nordheim (F-N) stylization of block 306 can be applied to all of the memory cells 214 in the memory segment 212a. In an alternate embodiment, the Fuller-Nordheim (F-N) stylization of block 306 is only applied to memory cells 214 in memory segment 212a that have not completed blocks 302, 308, 312, and 316 erase programs. In the Fuller-Nordheim (FN) stylization program of block 306, a positive voltage is applied to the word lines WL0-WLs of the memory segment 212a where the erase process is being performed, and a negative voltage is applied to The Fuller-Nordheim (FN) stylized memory segment 212a is being processed on the substrate of each memory cell 214.
第6圖顯示一正在進行富勒-諾德漢(F-N)程式化的記憶胞214,其中正電壓施加在電晶體的閘極而負電壓施加在形成電晶體的基板上。因為此此富勒-諾德漢(F-N)程式化驅動電子進入各自記憶胞電晶體的浮動閘極之中而不是如抹除程序一般將其趕出浮動閘極,所以此富勒-諾德漢(F-N)程式化會導致程式化記憶胞而不是抹除記憶胞。然而,由方塊306導致之被程式化記憶胞並不會在中斷程序中如同過度抹除之記憶胞一般產生漏電。因為記憶區段212a的面積是相對小的,此富勒-諾德漢(F-N)程式化並不會影響到其他區段,如區段212b,的記憶胞214。在方塊306中的富勒-諾德漢(F-N)程式化可以具有在極短時間內完成暫停命令之優點,以符合暫停命令之時序需求而可以避免漏電的問題。Figure 6 shows a memory cell 214 that is undergoing a Fuller-Nordheim (F-N) stylization in which a positive voltage is applied to the gate of the transistor and a negative voltage is applied to the substrate on which the transistor is formed. Because this Fuller-Nordheim (FN) stylized drive electron enters the floating gate of the respective memory cell instead of driving it out of the floating gate as in the erase procedure, this Fuller-Nord Han (FN) stylization leads to stylized memory cells instead of erasing memory cells. However, the memory cells caused by block 306 do not generally generate leakage in the interrupt program as if they were over-erased. Since the area of the memory section 212a is relatively small, this Fuller-Nordheim (F-N) stylization does not affect the memory cells 214 of other sections, such as section 212b. The Fuller-Nordheim (F-N) stylization in block 306 can have the advantage of completing the pause command in a very short time to meet the timing requirements of the pause command to avoid leakage problems.
在某些實施例中,一旦完成中斷程序,第5圖中的抹除程序可以重新執行或恢復以至少將在方塊306中被程式化的記憶胞加以抹除。In some embodiments, once the interrupt routine is completed, the erase program in FIG. 5 can be re-executed or restored to erase at least the memory cells that were programmed in block 306.
雖然本發明係已參照實施例來加以描述,然本發明創作並未受限於其詳細描述內容。替換方式及修改樣式係已於先前描述中所建議,且其他替換方式及修改樣式將為熟習此項技藝之人士所思及。特別是,所有具有實質上相同於本發明之構件結合而達成與本發明實質上相同結果者,皆不脫離本發明之精神範疇。因此,所有此等替換方式及修改樣式係意欲落在本發明於隨附申請專利範圍及其均等物所界定的範疇之中。Although the present invention has been described with reference to the embodiments, the present invention is not limited by the detailed description thereof. Alternatives and modifications are suggested in the foregoing description, and other alternatives and modifications will be apparent to those skilled in the art. In particular, all combinations of components that are substantially identical to the invention can achieve substantially the same results as the present invention without departing from the spirit of the invention. Therefore, all such alternatives and modifications are intended to be within the scope of the invention as defined by the appended claims and their equivalents.
200...記憶裝置200. . . Memory device
202...記憶陣列202. . . Memory array
204...行解碼器204. . . Row decoder
206...感測放大器206. . . Sense amplifier
208...列解碼器208. . . Column decoder
209...記憶體控制器209. . . Memory controller
210...記憶區塊210. . . Memory block
212...記憶區段212. . . Memory section
214...快閃記憶胞214. . . Flash memory cell
本發明係由申請專利範圍所界定。這些和其它目的,特徵,和實施例,會在下列實施方式的章節中搭配圖式被描述,其中:The invention is defined by the scope of the patent application. These and other objects, features, and embodiments are described in the following sections of the accompanying drawings, in which:
第1圖顯示使用在快閃記憶裝置中的傳統抹除操作之流程圖。Figure 1 shows a flow chart of a conventional erase operation used in a flash memory device.
第2圖顯示根據本發明一實施例之記憶裝置的方塊圖。Figure 2 is a block diagram showing a memory device in accordance with an embodiment of the present invention.
第3圖顯示第2圖所示之記憶裝置的記憶區塊之方塊圖。Fig. 3 is a block diagram showing the memory block of the memory device shown in Fig. 2.
第4圖顯示第2圖所示之記憶裝置的記憶區塊之詳細方塊示意圖。Fig. 4 is a detailed block diagram showing the memory block of the memory device shown in Fig. 2.
第5圖顯示在快閃記憶裝置中所使用的區段抹除操作之流程圖。Figure 5 shows a flow chart of the segment erase operation used in the flash memory device.
第6圖顯示第2圖所示之記憶裝置的記憶胞之詳細方塊示意圖。Fig. 6 is a detailed block diagram showing the memory cells of the memory device shown in Fig. 2.
為一流程圖,元件符號己說明於圖中。For a flow chart, the component symbols have been illustrated in the figures.
Claims (15)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW99114114A TWI442403B (en) | 2010-05-03 | 2010-05-03 | Erase process for use in semiconductor memory device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW99114114A TWI442403B (en) | 2010-05-03 | 2010-05-03 | Erase process for use in semiconductor memory device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201140596A TW201140596A (en) | 2011-11-16 |
TWI442403B true TWI442403B (en) | 2014-06-21 |
Family
ID=46760362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW99114114A TWI442403B (en) | 2010-05-03 | 2010-05-03 | Erase process for use in semiconductor memory device |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI442403B (en) |
-
2010
- 2010-05-03 TW TW99114114A patent/TWI442403B/en active
Also Published As
Publication number | Publication date |
---|---|
TW201140596A (en) | 2011-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8374038B2 (en) | Erase process for use in semiconductor memory device | |
JP3860573B2 (en) | Nonvolatile memory with block erase function | |
TWI550619B (en) | Memory circuit and operation thereof | |
JP5514135B2 (en) | Nonvolatile semiconductor memory device | |
US9183937B2 (en) | Method and apparatus for the erase suspend operation | |
JP5058461B2 (en) | Selective erase method for flash memory | |
JP2009301616A (en) | Nonvolatile semiconductor storage device | |
JP4028301B2 (en) | Nonvolatile semiconductor memory device and erase method thereof | |
JP2012226806A (en) | Nonvolatile semiconductor storage device | |
KR20100006662A (en) | Method for programming of non volatile memory device | |
TWI482158B (en) | Method and apparatus for leakage suppression in flash memory in response to external commands | |
TWI613657B (en) | Non-volatile memory (nvm) with adaptive write operations | |
JP2012133833A (en) | Nonvolatile semiconductor memory device | |
TW201337930A (en) | Method and apparatus for shortened erase operation | |
JP2005011490A (en) | Semiconductor device | |
JP2009134848A (en) | Method for erasing flash memory device | |
JP2007323760A (en) | Nonvolatile semiconductor memory device and its test method | |
JP2007102923A (en) | Nonvolatile semiconductor storage device and its data erasing method | |
TWI442403B (en) | Erase process for use in semiconductor memory device | |
KR101161393B1 (en) | Method for erasing flash memory device | |
TWI501242B (en) | Erase method for flash | |
TWI650756B (en) | Erasing method used in flash memory | |
KR20100054468A (en) | Erasing method and programming method of non volatile memory device | |
JP2007188547A (en) | Nonvolatile semiconductor memory device | |
JP7223900B1 (en) | ELECTRONIC DEVICE, MEMORY CELL OVERERASE DETECTION AND REMOVAL METHOD |