TWI434928B - Wash the liquid composition - Google Patents

Wash the liquid composition Download PDF

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TWI434928B
TWI434928B TW100121511A TW100121511A TWI434928B TW I434928 B TWI434928 B TW I434928B TW 100121511 A TW100121511 A TW 100121511A TW 100121511 A TW100121511 A TW 100121511A TW I434928 B TWI434928 B TW I434928B
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TW201300520A (en
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Yu Jie Tsai
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Chi Mei Corp
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洗淨液組成物Cleaning composition

本發明係有關一種洗淨液組成物,詳言之,係有關一種消泡性佳及凝膠物生成量低之洗淨液組成物。The present invention relates to a composition of a cleaning liquid, and more particularly to a composition of a cleaning liquid having a good defoaming property and a low amount of gel formation.

於各式洗淨液之應用範圍中,清洗如玻璃之基板一直是重要之課題。附著於玻璃表面的污垢,經過長年之累積而使清洗更加困難,例如玻璃上之油漬經時間之推移,可能產生氧化而使油改質,或是經紫外線、酸雨、加熱等因子,而使其更難清除。Cleaning substrates such as glass has been an important issue in the application range of various cleaning solutions. The dirt attached to the surface of the glass is more difficult to clean after years of accumulation. For example, the oil stain on the glass may be oxidized to change the oil over time, or may be caused by ultraviolet rays, acid rain, heating, etc. More difficult to remove.

習知用以清洗基板之洗淨液通常包含鹼劑、界面活性劑及溶劑,其中鹼劑通常包含碳酸鈉或氫氧化鈉等強鹼或有機胺,溶劑則可選用水溶性溶劑。如日本特開平11-269486中所揭露之洗劑,其包含鹼劑、陽離子界面活性劑、非離子界面活性劑及水溶性溶劑,雖有可效清洗玻璃上之油污,但卻有消泡性不佳及凝膠物生成量高,造成後續洗淨液清除不易之問題。The cleaning solution for cleaning the substrate usually comprises an alkali agent, a surfactant and a solvent, wherein the alkali agent usually contains a strong base such as sodium carbonate or sodium hydroxide or an organic amine, and the solvent may be a water-soluble solvent. A lotion as disclosed in Japanese Laid-Open Patent Publication No. Hei 11-269486, which comprises an alkali agent, a cationic surfactant, a nonionic surfactant, and a water-soluble solvent. Although it is effective for cleaning oil on glass, it has defoaming property. Poor and high gel formation, causing the problem of subsequent cleaning of the cleaning solution is not easy.

玻璃基板之應用十分廣泛,自一般生活、建材到精密電子產品皆可應用,而如何有效清除基板上之油污,且可達到良好消泡性及降低凝膠物生成,俾利後續洗淨液清除,已成為本技術領域中之一重要課題。The application of glass substrate is very wide, from general life, building materials to precision electronic products, how to effectively remove the oil on the substrate, and can achieve good defoaming and reduce gel formation, and facilitate the subsequent cleaning of the cleaning solution. It has become an important topic in the technical field.

發明概述Summary of invention

本發明提供一種包含優異配方之洗淨液組成物,其具有消泡性佳及凝膠物生成量低之優點。The present invention provides a cleaning liquid composition comprising an excellent formulation which has the advantages of good defoaming property and low gel formation amount.

因此,本發明係有關一種洗淨液組成物,其包含:鹼性化合物(A);含氟化合物(B),其具有如式(1)所示之結構,Accordingly, the present invention relates to a cleaning liquid composition comprising: a basic compound (A); a fluorine-containing compound (B) having a structure represented by the formula (1),

R-A 式(1);R-A formula (1);

直鏈型界面活性劑(C),其具有如式(2)所示之結構,a linear surfactant (C) having a structure as shown in the formula (2),

R10 -O-(EO)a (PO)b -H 式(2);及R 10 -O-(EO) a (PO) b -H Formula (2);

水(D)。Water (D).

本發明亦提供一種清洗基板之方法,其係使用前述之洗淨液組成物。The present invention also provides a method of cleaning a substrate using the aforementioned cleaning liquid composition.

發明詳細說明Detailed description of the invention

本發明係有關一種洗淨液組成物,其包含:鹼性化合物(A);含氟化合物(B),其具有如式(1)所示之結構,The present invention relates to a cleaning liquid composition comprising: a basic compound (A); a fluorine-containing compound (B) having a structure represented by the formula (1),

R-A 式(1);R-A formula (1);

直鏈型界面活性劑(C),其具有如式(2)所示之結構,a linear surfactant (C) having a structure as shown in the formula (2),

R10 -O-(EO)a (PO)b -H 式(2);及R 10 -O-(EO) a (PO) b -H Formula (2);

水(D)。Water (D).

根據本發明之鹼性化合物(A)包含無機鹼性化合物(A-1)及/或有機鹼性化合物(A-2)。前述各該無機鹼性化合物(A-1)或有機鹼性化合物(A-2)可單獨使用或彼此混合使用。The basic compound (A) according to the present invention contains an inorganic basic compound (A-1) and/or an organic basic compound (A-2). Each of the above inorganic basic compound (A-1) or organic basic compound (A-2) may be used singly or in combination with each other.

本發明所言之無機鹼性化合物(A-1)係指pH值大於7之無機物質;於本發明之較佳具體例中,該無機鹼性化合物(A-1)係為碳酸鈉、碳酸鉀、碳酸氫鈉、碳酸氫鉀、矽酸鈉、矽酸鉀、氫氧化鈉、氫氧化鉀、磷酸鈉、磷酸鉀、磷酸二鈉、磷酸二鉀、磷酸三鈉或磷酸三鉀。上述之無機鹼性化合物(A-1)可單獨一種使用或混合複數種使用。The inorganic basic compound (A-1) as used in the present invention means an inorganic substance having a pH of more than 7; in a preferred embodiment of the present invention, the inorganic basic compound (A-1) is sodium carbonate or carbonic acid. Potassium, sodium hydrogencarbonate, potassium hydrogencarbonate, sodium citrate, potassium citrate, sodium hydroxide, potassium hydroxide, sodium phosphate, potassium phosphate, disodium phosphate, dipotassium phosphate, trisodium phosphate or tripotassium phosphate. The above inorganic basic compound (A-1) may be used singly or in combination of plural kinds.

本發明所言之有機鹼性化合物(A-2)係指pH值大於7之有機物質;於本發明之較佳具體例中,該有機鹼係為單乙醇胺、二乙醇胺、三乙醇胺、甲胺、二甲胺、乙胺、二乙胺、三乙胺、嗎啉、環己胺、氫氧化四甲銨、氫氧化四乙銨或二羥乙基三甲基氯化銨(通用名:膽鹼)。上述之有機鹼性化合物(A-2)可單獨一種使用或混合複數種使用。The organic basic compound (A-2) as used in the present invention means an organic substance having a pH of more than 7. In a preferred embodiment of the present invention, the organic base is monoethanolamine, diethanolamine, triethanolamine, methylamine. , dimethylamine, ethylamine, diethylamine, triethylamine, morpholine, cyclohexylamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide or dihydroxyethyltrimethylammonium chloride (common name: biliary Alkali). The above organic basic compound (A-2) may be used singly or in combination of plural kinds.

根據本發明之含氟化合物(B)具有如式(1)所示之結構,The fluorine-containing compound (B) according to the present invention has a structure represented by the formula (1),

R-A 式(1);R-A formula (1);

其中:R具有如式(3)所示之結構,Wherein: R has a structure as shown in formula (3),

其中,R1 至R9 係分別獨立選自由H、CH3 、F、CH2 F、CHF2 、CF3 、CF2 CF3 及CF2 CF2 CF3 所組成之群。式(3)之碳原子總數較佳為6至12;更佳為6至9。於本發明之一較佳具體例中,R1 至R9 中至少兩者為相同;於本發明之另一較佳具體例中,R1 至R9 係各為不同。Wherein R 1 to R 9 are each independently selected from the group consisting of H, CH 3 , F, CH 2 F, CHF 2 , CF 3 , CF 2 CF 3 and CF 2 CF 2 CF 3 . The total number of carbon atoms of the formula (3) is preferably from 6 to 12; more preferably from 6 to 9. In a preferred embodiment of the invention, at least two of R 1 to R 9 are the same; in another preferred embodiment of the invention, R 1 to R 9 are each different.

於本發明之一較佳具體例中,R1 、R3 、R4 及R5 為CF3 ;R2 、R6 、R7 、R8 及R9 為F。In a preferred embodiment of the invention, R 1 , R 3 , R 4 and R 5 are CF 3 ; R 2 , R 6 , R 7 , R 8 and R 9 are F.

於本發明之另一較佳具體例中,R1 至R7 及R9 為F;及R8 為CF3In another preferred embodiment of the invention, R 1 to R 7 and R 9 are F; and R 8 is CF 3 .

於本發明之再一較佳具體例中,R1 至R5 及R7 為F;R6 為CF2 CF3 ;及R8 及R9 為CF3In still another preferred embodiment of the present invention, R 1 to R 5 and R 7 are F; R 6 is CF 2 CF 3 ; and R 8 and R 9 are CF 3 .

於本發明之又一較佳具體例中,R1 及R2 及R4 至R7 為F;R3 為CF2 CF3 ;及R8 及R9 為CF3In still another preferred embodiment of the present invention, R 1 and R 2 and R 4 to R 7 are F; R 3 is CF 2 CF 3 ; and R 8 and R 9 are CF 3 .

根據本發明,A係選自由H、CH3 、F、CH2 F、CHF2 、CF3 、CF2 CF3 、CF2 CF2 CF3 、-O(CH2 CH2 O)m -CH3 、-O(CH2 )n OH、-O(CH2 )n OR及-OAr所組成之群;其中:m代表1至50之整數;n代表4至20之整數;Ar代表包含p個-CH2 X取代基或包含單一Rb 取代基之單環或多環之芳香基;X代表鹵素;p代表2至5之整數;Rb 係選自由CH2 CH2 OH、NH2 、SO3 Na、According to the invention, A is selected from the group consisting of H, CH 3 , F, CH 2 F, CHF 2 , CF 3 , CF 2 CF 3 , CF 2 CF 2 CF 3 , -O(CH 2 CH 2 O) m -CH 3 a group consisting of -O(CH 2 ) n OH, -O(CH 2 ) n OR and -OAr; wherein: m represents an integer from 1 to 50; n represents an integer from 4 to 20; and Ar represents p- a CH 2 X substituent or a monocyclic or polycyclic aromatic group containing a single R b substituent; X represents a halogen; p represents an integer from 2 to 5; and R b is selected from CH 2 CH 2 OH, NH 2 , SO 3 Na,

所組成之群;Y代表H或甲基;Mx 係選自由H、Na、K、Li、銨基、四甲銨基、四乙銨基及四丁銨基所組成之群;T代表U表示氫原子或芳香基;Z代表H或烷基;Rc 代表W代表示H或甲基;s代表1至140之整數;及q代表1或2。 a group consisting of; Y represents H or methyl; M x is selected from the group consisting of H, Na, K, Li, ammonium, tetramethylammonium, tetraethylammonium and tetrabutylammonium; U represents a hydrogen atom or an aromatic group; Z represents H or an alkyl group; R c represents or The W generation represents H or methyl; s represents an integer from 1 to 140; and q represents 1 or 2.

於本發明之一較佳具體例中,A係為H、CH3 、F、CH2 F、CHF2 、CF3 、CF2 CF3 或CF2 CF2 CF3 所表示者。In a preferred embodiment of the invention, A is represented by H, CH 3 , F, CH 2 F, CHF 2 , CF 3 , CF 2 CF 3 or CF 2 CF 2 CF 3 .

於本發明之另一較佳具體例中,A係為一親水極性基團,例如結合O原子至芳香基或脂肪鏈,如-O(CH2 CH2 O)m -CH3 、-O(CH2 )n OH、-O(CH2 )n OR及-OAr所表示者。In another preferred embodiment of the invention, A is a hydrophilic polar group, such as a combination of an O atom to an aromatic or aliphatic chain, such as -O(CH 2 CH 2 O) m -CH 3 , -O ( CH 2 ) n OH, -O(CH 2 ) n OR and -OAr are represented.

較佳地,該脂肪鏈較佳包含6至22個碳原子;更佳為8至18個碳原子。Preferably, the fatty chain preferably comprises from 6 to 22 carbon atoms; more preferably from 8 to 18 carbon atoms.

於本發明之另一較佳具體例中,該Ar芳香基之Rb 取代基係為硫酸鹽、羧基、磷酸鹽、有機及無機銨、醇基、鹵素取代之烷基、胺、磺醯胺或環氧化物。In another preferred embodiment of the present invention, the R b substituent of the Ar aryl group is a sulfate, a carboxyl group, a phosphate, an organic and inorganic ammonium, an alcohol group, a halogen-substituted alkyl group, an amine, a sulfonamide. Or epoxide.

於本發明之再一較佳具體例中,R係以二聚體形式存在,並以醚基或酯基連結。In still another preferred embodiment of the present invention, R is present as a dimer and is linked by an ether group or an ester group.

於本發明之具體例中,該含氟化合物(B)係為商品化之FTX-208G(NEOS製)或具有式(B-2)至(B-20)所示之結構:In a specific example of the present invention, the fluorine-containing compound (B) is a commercially available FTX-208G (manufactured by NEOS) or has a structure represented by the formulae (B-2) to (B-20):

於本發明之一較佳具體例中,該洗淨液組成物,基於鹼性化合物(A)之使用量為100重量份,其中含氟化合物(B)之使用量為自0.2至140重量份,較佳為1至120重量份,更佳為5至100重量份。由於含氟化合物(B)具有良好的疏水性,且不與洗淨液組成物中其他界面活性劑互溶,故可有效地提高消泡性並維持洗淨力,若完全無使用含氟化合物(B),則易有消泡性低下之問題。In a preferred embodiment of the present invention, the cleaning liquid composition is used in an amount of 100 parts by weight based on the basic compound (A), wherein the fluorine-containing compound (B) is used in an amount of from 0.2 to 140 parts by weight. It is preferably from 1 to 120 parts by weight, more preferably from 5 to 100 parts by weight. Since the fluorine-containing compound (B) has good hydrophobicity and is not miscible with other surfactants in the cleaning liquid composition, it can effectively improve the defoaming property and maintain the detergency, if no fluorine-containing compound is used at all ( B), it is easy to have the problem of low defoaming.

根據本發明之直鏈型界面活性劑(C)具有式(2)所示之結構:The linear surfactant (C) according to the present invention has the structure represented by the formula (2):

R10 -O-(EO)a (PO)b -H 式(2)R 10 -O-(EO) a (PO) b -H (2)

其中:R10 係選自由C8至C18之直鏈烷基、C8至C18之直鏈烯基、C8至C18之直鏈醯基及具C8至C12之直鏈烷基取代之苯基所組成之群;EO代表乙氧基;PO代表丙氧基;a代表1至20之整數;及b代表0至20之整數。Wherein: R 10 is selected from the group consisting of a linear alkyl group of C8 to C18, a linear alkenyl group of C8 to C18, a linear fluorenyl group of C8 to C18, and a phenyl group substituted with a linear alkyl group of C8 to C12. Group; EO represents ethoxy; PO represents propoxy; a represents an integer from 1 to 20; and b represents an integer from 0 to 20.

a和b分別為EO和PO之平均加成莫耳數。a and b are the average addition moles of EO and PO, respectively.

根據本發明之直鏈型界面活性劑(C)可單獨一種使用或混合複數種使用。The linear surfactant (C) according to the present invention may be used singly or in combination of plural kinds.

(EO)a (PO)b 可由乙氧基單獨構成,亦可由乙氧基和丙氧基構成。當(EO)a (PO)b 為由乙氧基和丙氧基構成時,EO和PO之排列可以是嵌段型亦可為隨機型。當EO和PO之排列為嵌段型時,只要各平均加成莫耳數在上述範圍內,則EO之嵌段數及PO之嵌段數分別可以是1個,亦可是2個以上。另外,當由EO構成的嵌段數為2個以上時,各嵌段中EO之重複數可彼此相同,亦可以不同。當PO之嵌段數為2個以上時,各嵌段中的PO之重複數可彼此相同,亦可以不同。(EO) a (PO) b may be composed of an ethoxy group alone or an ethoxy group and a propoxy group. When (EO) a (PO) b is composed of an ethoxy group and a propoxy group, the arrangement of EO and PO may be a block type or a random type. When the arrangement of EO and PO is a block type, the number of blocks of EO and the number of blocks of PO may be one or two or more, as long as the average addition molar number is within the above range. Further, when the number of blocks composed of EO is two or more, the number of repetitions of EO in each block may be the same or different. When the number of blocks of PO is two or more, the number of repetitions of PO in each block may be the same as or different from each other.

當EO和PO之排列為嵌段型或隨機型時,若EO與PO的莫耳比(MEO /MPO )為9.5/0.5至5/5,可達到高水溶性。另一方面,a較佳為1至15;更佳為1至10。再一方面,b較佳為1至15;更佳為1至10。a+b較佳為1至30;更佳為1至20。When the arrangement of EO and PO is block type or random type, if the molar ratio of EO to PO (M EO /M PO ) is 9.5/0.5 to 5/5, high water solubility can be achieved. On the other hand, a is preferably from 1 to 15; more preferably from 1 to 10. In still another aspect, b is preferably from 1 to 15; more preferably from 1 to 10. a+b is preferably from 1 to 30; more preferably from 1 to 20.

於本發明之較佳具體例中,根據本發明之直鏈型界面活性劑(C)為於下述化合物上加成乙氧基及/或丙氧基而得:辛醇、癸醇、十三烷醇、十二烷醇、十八烷醇、硬脂醇、油醇等醇類或辛基酚、壬基酚、十二烷基酚等酚類。In a preferred embodiment of the present invention, the linear surfactant (C) according to the present invention is obtained by adding an ethoxy group and/or a propoxy group to the following compounds: octanol, decyl alcohol, ten Alcohols such as trialkanol, dodecanol, stearyl alcohol, stearyl alcohol, oleyl alcohol, or phenols such as octylphenol, nonylphenol, and dodecylphenol.

於本發明之較佳具體例中,根據本發明之直鏈型界面活性劑(C)係為:Cj H2j+1 -O-(EO)e -H;Cj H2j+1 -O-(EO)f (PO)g -H(其為EO與PO嵌段加成而得);Cj H2j+1 -O-(PO)f (EO)g -H(其為EO與PO嵌段加成而得);Cj H2j+1 -O-(EO)h (PO)i (EO)k -H(其為EO與PO嵌段加成而得);Cj H2j+1 -O-(EO)f (PO)g -H(其為EO與PO隨機加成而得)。In a preferred embodiment of the invention, the linear surfactant (C) according to the invention is: C j H 2j+1 -O-(EO) e -H; C j H 2j+1 -O -(EO) f (PO) g -H (which is derived from the addition of EO and PO blocks); C j H 2j+1 -O-(PO) f (EO) g -H (which is EO and PO) Block addition; C j H 2j+1 -O-(EO) h (PO) i (EO) k -H (which is derived from EO and PO block addition); C j H 2j+ 1 -O-(EO) f (PO) g -H (which is obtained by random addition of EO and PO).

其中,j為8至18之整數;e、f、g、h、i和k分別為EO或PO之平均加成莫耳數;e為1至20之整數;f為1至20之整數;g為1至20之整數;h為1至10之整數;i為1至10之整數;k為1至10之整數。Wherein j is an integer from 8 to 18; e, f, g, h, i and k are the average addition moles of EO or PO, respectively; e is an integer from 1 to 20; and f is an integer from 1 to 20; g is an integer from 1 to 20; h is an integer from 1 to 10; i is an integer from 1 to 10; and k is an integer from 1 to 10.

於本發明之較佳具體例中,根據本發明之直鏈型界面活性劑(C)係為商品名SINOPOL 1308FG(中日合成化學製)、NONION K-204、NONION K-220、NONION K-230、NONION P-208、NONION P-210、NONION E-202、NONION E-205、NONION S-207、NONION S-220(日本油脂製)、EMULGEN 103、EMULGEN 220、EMULGEN 350、EMULGEN LS-106、EMULGEN LS-110(花王化學製)等。In a preferred embodiment of the present invention, the linear surfactant (C) according to the present invention is sold under the trade name SINOPOL 1308FG (manufactured by Sino-Japanese Synthetic Chemical Co., Ltd.), NONION K-204, NONION K-220, NONION K- 230, NONION P-208, NONION P-210, NONION E-202, NONION E-205, NONION S-207, NONION S-220 (made by Nippon Oil & Fat), EMULGEN 103, EMULGEN 220, EMULGEN 350, EMULGEN LS-106 EMULGEN LS-110 (made by Kao Chemical Co., Ltd.).

於本發明之一較佳體實施例中,該洗淨液組成物,基於鹼性化合物(A)之使用量為100重量份,其中直鏈型界面活性劑(C)之使用量為自1至500重量份,較佳為10至450重量份,更佳為20至400重量份,若完全無使用直鏈型界面活性劑(C),則易有凝膠物生成之問題。In a preferred embodiment of the present invention, the cleaning liquid composition is used in an amount of 100 parts by weight based on the basic compound (A), wherein the amount of the linear surfactant (C) is from 1 To 500 parts by weight, preferably 10 to 450 parts by weight, more preferably 20 to 400 parts by weight, if the linear type surfactant (C) is not used at all, the problem of gel formation is liable to occur.

根據本發明之水(D)並無特殊限制,惟其於根據本發明之洗淨液組成物中能夠發揮作為溶劑的作用即可,其具體例如超純水(除無機離子外,不含有機物、生菌、微粒子及溶解氣體)、純水(經離子交換樹脂等行脫鹽處理而得之水)、蒸餾水及近年來被提案之各種機能水;較佳為超純水或純水;更佳為超純水。其中,純水和超純水可由下述處理而得:將自來水通入活性碳中,並進行離子交換處理,然後進行蒸餾後,必要時以紫外線殺菌燈照射或使其通過過濾器而得到。根據25℃之電阻值來區分,電阻值在1MΩ‧cm以上即可稱為純水,電阻值為10MΩ‧Cm以上即可稱為超純水。The water (D) according to the present invention is not particularly limited, but it can function as a solvent in the composition of the cleaning liquid according to the present invention, and specifically, for example, ultrapure water (excluding inorganic ions, no organic matter, Bacterium, microparticles and dissolved gases), pure water (water obtained by desalting by ion exchange resin, etc.), distilled water and various functional waters proposed in recent years; preferably ultrapure water or pure water; more preferably Ultra-pure water. Among them, pure water and ultrapure water can be obtained by subjecting tap water to activated carbon, performing ion exchange treatment, and then performing distillation, followed by irradiation with an ultraviolet germicidal lamp or passing through a filter. According to the resistance value of 25 °C, the resistance value is 1MΩ‧cm or more, which can be called pure water, and the resistance value is 10MΩ·Cm or more, which can be called ultrapure water.

於本發明之一較佳體實施例中,該洗淨液組成物,基於鹼性化合物(A)之使用量為100重量份,其中水(D)之使用量通常為300至25,000重量份;較佳為400至20,000重量份;更佳為500至15,000重量份。In a preferred embodiment of the present invention, the cleaning liquid composition is used in an amount of 100 parts by weight based on the basic compound (A), wherein the water (D) is usually used in an amount of 300 to 25,000 parts by weight; It is preferably from 400 to 20,000 parts by weight; more preferably from 500 to 15,000 parts by weight.

根據本發明之洗淨液組合物較佳可進一步包含支鏈型界面活性劑(E),其具有式(4)所示之結構:The cleaning liquid composition according to the present invention may preferably further comprise a branched surfactant (E) having the structure represented by the formula (4):

R11 -O-(EO)c (PO)d -H 式(4);R 11 -O-(EO) c (PO) d -H Formula (4);

其中:R11 係選自由C6至C20含支鏈之烷基、C6至C20含支鏈之烯基、C6至C20含支鏈之醯基及具C6至C14含支鏈烷基取代之苯基所組成之群;c代表1至20之整數;及d代表0至20之整數。Wherein: R 11 is selected from the group consisting of a C6 to C20 branched alkyl group, a C6 to C20 branched chain alkenyl group, a C6 to C20 branched chain fluorenyl group, and a C6 to C14 branched alkyl group substituted phenyl group. a group consisting of; c represents an integer from 1 to 20; and d represents an integer from 0 to 20.

c和d分別為EO和PO之平均加成莫耳數;當n表示1至20之整數時,(EO)與(PO)之排列可以是嵌段型亦可為隨機型。c and d are the average addition mole numbers of EO and PO, respectively; when n represents an integer from 1 to 20, the arrangement of (EO) and (PO) may be a block type or a random type.

根據本發明之支鏈型界面活性劑(E)可單獨一種使用或混合複數種使用。The branched surfactant (E) according to the present invention may be used singly or in combination of plural kinds.

(EO)c (PO)d 可由乙氧基單獨構成,亦可由乙氧基和丙氧基構成。當(EO)c (PO)d 為由乙氧基和丙氧基構成時,EO和PO之排列可以是嵌段型亦可為隨機型。當EO和PO之排列為嵌段型時,只要各平均加成莫耳數在上述範圍內,則EO之嵌段數及PO之嵌段數分別可以是1個,亦可是2個以上。另外,當由EO構成的嵌段數為2個以上時,各嵌段中EO之重複數可彼此相同,亦可以不同。當PO之嵌段數為2個以上時,各嵌段中的PO之重複數可彼此相同,亦可以不同。(EO) c (PO) d may be composed of an ethoxy group alone or an ethoxy group and a propoxy group. When (EO) c (PO) d is composed of an ethoxy group and a propoxy group, the arrangement of EO and PO may be a block type or a random type. When the arrangement of EO and PO is a block type, the number of blocks of EO and the number of blocks of PO may be one or two or more, as long as the average addition molar number is within the above range. Further, when the number of blocks composed of EO is two or more, the number of repetitions of EO in each block may be the same or different. When the number of blocks of PO is two or more, the number of repetitions of PO in each block may be the same as or different from each other.

當EO和PO之排列為嵌段型或隨機型時,若EO與PO的莫耳比(MEO /MPO )為9.5/0.5至5/5,可達到高水溶性。另一方面,c較佳為1至15;更佳為1至10。再一方面,d較佳為1至15;更佳為1至10。c+d較佳為2至30;更佳為2至20。When the arrangement of EO and PO is block type or random type, if the molar ratio of EO to PO (M EO /M PO ) is 9.5/0.5 to 5/5, high water solubility can be achieved. On the other hand, c is preferably from 1 to 15; more preferably from 1 to 10. In still another aspect, d is preferably from 1 to 15; more preferably from 1 to 10. c+d is preferably from 2 to 30; more preferably from 2 to 20.

於本發明之較佳具體例中,根據本發明之支鏈型界面活性劑(E)係為商品名SINOPOL E8002、SINOPOL E8003、SINOPOL E8008或SINOPOL E8015(中日合成化學製)Lutensol TO3、Lutensol TO5、Lutensol TO7、Lutensol TO10(BASF製)、Newcol 1004、Newcol 1006、Newcol 1008、Newcol 1020(日本乳化劑製)、NONION EH-204、NONION EH-208(日本油脂製)等。In a preferred embodiment of the present invention, the branched surfactant (E) according to the present invention is sold under the trade name SINOPOL E8002, SINOPOL E8003, SINOPOL E8008 or SINOPOL E8015 (manufactured by Sino-Japanese Synthetic Chemicals) Lutensol TO3, Lutensol TO5 Lutensol TO7, Lutensol TO10 (manufactured by BASF), Newcol 1004, Newcol 1006, Newcol 1008, Newcol 1020 (manufactured by Nippon Emulsifier), NONION EH-204, NONION EH-208 (manufactured by Nippon Oil Co., Ltd.), and the like.

於本發明之一較佳體實施例中,該洗淨液組成物,基於鹼性化合物(A)之使用量為100重量份,其中支鏈型界面活性劑(E)之使用量為自5至500重量份,較佳為15至450重量份,更佳為25至400重量份。若支鏈型界面活性劑(E)之使用量介於5至500重量份時,則可得到消泡性佳之洗淨液組成物。In a preferred embodiment of the present invention, the cleaning liquid composition is used in an amount of 100 parts by weight based on the basic compound (A), wherein the amount of the branched surfactant (E) is from 5 It is preferably from 15 to 450 parts by weight, more preferably from 25 to 400 parts by weight, to 500 parts by weight. When the amount of the branched surfactant (E) is from 5 to 500 parts by weight, a defoaming composition which is excellent in defoaming property can be obtained.

根據本發明之洗淨液組合物較佳可進一步包含添加劑(F),該添加劑(F)之選擇及比例為本發明所屬技術領域中具通常知識者可決定者,例如:消泡劑、螯合劑、抗氧化劑、pH調整劑、緩衝溶劑、防腐劑、水溶性有機溶劑、分散劑等。The cleaning liquid composition according to the present invention may preferably further comprise an additive (F), the selection and proportion of which are determinable by those of ordinary skill in the art to which the present invention pertains, for example: defoaming agent, chelate Mixtures, antioxidants, pH adjusters, buffer solvents, preservatives, water-soluble organic solvents, dispersants, and the like.

根據本發明之消泡劑,其具體例如:聚矽氧系、高級醇系、聚醚系、脂肪酸酯系、聚乙二醇系、鑛物油系及包含如式(5)所代表之化合物:The antifoaming agent according to the present invention is specifically, for example, a polyoxyxene system, a higher alcohol system, a polyether system, a fatty acid ester system, a polyethylene glycol system, a mineral oil system, and a compound represented by the formula (5). :

其中r表示1或2之整數;Ra 表示式(6)所代表之官能基:Wherein r represents an integer of 1 or 2; and R a represents a functional group represented by the formula (6):

其中t表示3至7之整數。Wherein t represents an integer from 3 to 7.

上述式(5)所代表之化合物之具體例為:商品名Surfynol MD-20、Surfynol MD-30(Air Products and Chemicals公司製)。Specific examples of the compound represented by the above formula (5) are: trade name Surfynol MD-20, Surfynol MD-30 (manufactured by Air Products and Chemicals Co., Ltd.).

根據本發明之消泡劑可單獨一種或混合複數種以上使用。The antifoaming agent according to the present invention may be used singly or in combination of plural kinds or more.

根據本發明之螫合劑,其具體例為:乙二胺四乙酸(鹽)(EDTA)、二乙三胺五乙酸(鹽)(DTPA)、三乙四胺六乙酸(鹽)(TTHA)、羥乙基乙二胺三乙酸(鹽)(HEDTA)、二羥乙基乙二胺四乙酸(鹽)(DHEDDA)、次氮基三乙酸(鹽)(NTA)、羥乙基亞胺基二乙酸(鹽)(HIDA)、β-丙胺酸二乙酸(鹽)、天冬醯胺酸二乙酸(鹽)、甲基甘胺酸二乙酸(鹽)、亞胺基二琥珀酸(鹽)、絲胺酸二乙酸(鹽)、羥基亞胺基二琥珀酸(鹽)、二羥基乙基甘胺酸(鹽)、天冬醯胺酸(鹽)、麩胺酸(鹽)等之胺基多羧酸(鹽);羥基乙酸(鹽)、酒石酸(鹽)、檸檬酸(鹽)、葡萄糖酸(鹽)等之羥基羧酸(鹽);甲基二膦酸(鹽)、胺基三(亞甲基膦酸)(鹽)、1-羥基亞乙基-1,1-二膦酸(鹽)、乙二胺四(亞甲基膦酸)(鹽)、己二胺四(亞甲基膦酸)(鹽)、丙二胺四(亞甲基膦酸)(鹽)、二乙三胺五(亞甲基膦酸)(鹽)、三乙四胺六(亞甲基膦酸)(鹽)、三胺基三乙基胺六(亞甲基膦酸)(鹽)、反-1,2-環己二胺四(亞甲基膦酸)(鹽)、二醇醚二胺四(亞甲基膦酸)(鹽)、四乙五胺七(亞甲基膦酸)(鹽)等之膦酸(鹽);偏磷酸(鹽)、三聚磷酸(鹽)、六偏磷酸(鹽)等之縮合磷酸(鹽)等。上述之螫合劑可單獨一種或混合複數種以上使用。Specific examples of the chelating agent according to the present invention are: ethylenediaminetetraacetic acid (salt) (EDTA), diethylenetriaminepentaacetic acid (salt) (DTPA), triethylenetetramine hexaacetic acid (salt) (TTHA), Hydroxyethylethylenediaminetriacetic acid (salt) (HEDTA), dihydroxyethylethylenediaminetetraacetic acid (salt) (DHEDDA), nitrilotriacetic acid (salt) (NTA), hydroxyethylimido Acetic acid (salt) (HIDA), β-alanine diacetic acid (salt), aspartic acid diacetic acid (salt), methyl glycine diacetic acid (salt), iminodisuccinic acid (salt), Amino groups such as serine diacetate (salt), hydroxyiminodisuccinic acid (salt), dihydroxyethylglycine (salt), aspartic acid (salt), glutamic acid (salt), etc. Polycarboxylic acid (salt); hydroxycarboxylic acid (salt), tartaric acid (salt), citric acid (salt), gluconic acid (salt), etc. hydroxycarboxylic acid (salt); methyl diphosphonic acid (salt), amine III (methylene phosphonic acid) (salt), 1-hydroxyethylidene-1,1-diphosphonic acid (salt), ethylenediaminetetrakis (methylene phosphonic acid) (salt), hexamethylenediamine (Asian) Methyl phosphonic acid) (salt), propylenediamine tetra (methylene phosphonic acid) (salt), diethylenetriamine penta (methylene phosphonic acid) (salt), triethylenetetramine hexa (methylene phosphine) Acid) (salt), triamine triethylamine Methylene phosphonic acid) (salt), trans-1,2-cyclohexanediamine tetra (methylene phosphonic acid) (salt), glycol ether diamine tetra (methylene phosphonic acid) (salt), four a phosphonic acid (salt) such as ethylene pentaamine (methylene phosphonic acid) (salt); a condensed phosphoric acid (salt) such as metaphosphoric acid (salt), tripolyphosphoric acid (salt) or hexametaphosphoric acid (salt). The above-mentioned chelating agents may be used singly or in combination of plural kinds or more.

根據本發明之抗氧化劑,其具體例為:2,6-二-第三丁基苯酚、2-第三丁基-4-甲氧基苯酚、2,4-二甲基-6-第三丁基苯酚等之苯酚系;單辛基二苯胺、單壬基二苯胺、4,4'-二丁基二苯胺、4,4'-二戊基二苯胺、四丁基二苯胺、四己基二苯胺、α-萘胺、苯基-α-萘胺等之胺系;吩噻嗪(phenothiazine)、季戊四醇四(3-月桂基硫代丙酸酯)、雙(3,5-第三丁基-4-羥基芐基)硫醚(bis(3,5-t-butyl-4-hydroxybenzyl)sulfide)等之硫系;二亞磷酸雙(2,4-二-第三丁基苯基)季戊四醇酯、亞磷酸一苯二異葵酯、亞磷酸二苯二異辛酯、亞磷酸三苯酯等之磷系等。上述之抗氧化劑可單獨一種或混合複數種以上使用。Specific examples of the antioxidant according to the present invention are: 2,6-di-tert-butylphenol, 2-tert-butyl-4-methoxyphenol, 2,4-dimethyl-6-third a phenol type such as butyl phenol; monooctyldiphenylamine, monodecyldiphenylamine, 4,4'-dibutyldiphenylamine, 4,4'-dipentyldiphenylamine, tetrabutyldiphenylamine, tetrahexyl Amines such as diphenylamine, α-naphthylamine, phenyl-α-naphthylamine; phenothiazine, pentaerythritol tetrakis(3-laurylthiopropionate), bis(3,5-tributyl) Sulfur based on bis(3,5-t-butyl-4-hydroxybenzylsulfide); bis(2,4-di-t-butylphenyl)diphosphite A phosphorus system such as pentaerythritol ester, monophenylisobutyl phosphite, diphenyl diisooctyl phosphite, or triphenyl phosphite. The above-mentioned antioxidants may be used singly or in combination of plural kinds or more.

根據本發明之pH調整劑,其具體例為:鹽酸、硫酸、硝酸、磺胺酸、磷酸等之無機酸;氫氧化鋰、氫氧化鈉、氫氧化鉀等之無機鹼等。上述之pH調整劑可單獨一種或混合複數種以上使用。Specific examples of the pH adjuster according to the present invention include inorganic acids such as hydrochloric acid, sulfuric acid, nitric acid, sulfamic acid, and phosphoric acid; and inorganic bases such as lithium hydroxide, sodium hydroxide, and potassium hydroxide. The above-mentioned pH adjusters may be used singly or in combination of plural kinds or more.

根據本發明之緩衝溶劑,其具體例為:蟻酸、醋酸、琥珀酸、乳酸、蘋果酸、酪酸、順丁烯二酸、丙酮酸、丙二酸、沒食子酸等之有機酸及鹽類;磷酸、硼酸等之無機酸及其鹽類等。上述之緩衝溶劑可單獨一種或混合複數種以上使用。Specific examples of the buffer solvent according to the present invention are: organic acids and salts of formic acid, acetic acid, succinic acid, lactic acid, malic acid, butyric acid, maleic acid, pyruvic acid, malonic acid, gallic acid, and the like. A mineral acid such as phosphoric acid or boric acid or a salt thereof. The above-mentioned buffering solvents may be used singly or in combination of plural kinds or more.

根據本發明之防腐劑,其具體例為:六氫-1,3,5-三(羥乙基)-s-三嗪等之三嗪(triazine)衍生物;1,2-苯並異噻唑啉-3-酮、2-甲基-4-異噻唑啉-3-酮、5-氯-2-甲基-4-異噻唑啉-3-酮等之異噻唑啉(isothiazolin)衍生物;4-(2-硝基丁基)嗎啉、4,4-(2-乙基-2-硝基三亞甲基)二嗎啉等之嗎啉衍生物;2-(4-噻唑基)苯並咪唑等之苯並咪唑(benzimidazole)衍生物等。上述之防腐劑可單獨一種或混合複數種以上使用。Specific examples of the preservative according to the present invention are: triazine derivatives such as hexahydro-1,3,5-tris(hydroxyethyl)-s-triazine; 1,2-benzisothiazole Isothiazolin derivatives such as oxa-3-one, 2-methyl-4-isothiazolin-3-one, 5-chloro-2-methyl-4-isothiazolin-3-one; a morpholine derivative such as 4-(2-nitrobutyl)morpholine or 4,4-(2-ethyl-2-nitrotrimethylene)dimorpholine; 2-(4-thiazolyl)benzene A benzimidazole derivative such as imidazole or the like. The above-mentioned preservatives may be used singly or in combination of plural kinds or more.

根據本發明之水溶性有機溶劑於20℃時對水之溶解度以3(g/100g)以上為佳,更佳為10以上,其具體例為:二甲基亞碸、環丁碸、3-甲基環丁碸、2,4-二甲基環丁碸等之亞碸類;二甲碸、二乙碸、雙(2-羥乙基)碸等之碸類;N,N-二甲基甲醯胺、N-甲基甲醯胺、N,N-二甲基乙醯胺、N,N-二甲基丙酼胺等之醯胺類;N-甲基-2-吡咯烷酮、N-乙基-2-吡咯烷酮、N-羥甲基-2-吡咯烷酮等之內醯胺類;β-丙內酯、β-丁內酯、γ-丁內酯、γ-戊內酯、δ-戊內酯等之內酯類;甲醇、乙醇、異丙醇等之醇類;乙二醇、乙二醇單甲基醚、乙二醇單乙基醚、二乙二醇、二乙二醇單甲基醚、二乙二醇單乙基醚、二乙二醇單丁基醚、二乙二醇單己基醚、二乙二醇單苯基醚、三乙二醇單甲基醚、丙二醇、丙二醇單甲基醚、二丙二醇單甲基醚、1,3-丁二醇、二乙二醇二甲基醚、二乙二醇二乙基醚、三乙二醇二甲基醚、三乙二醇三乙基醚等之乙二醇及乙二醇醚類;N-甲基-2-噁唑烷酮、3,5-二甲基-2-噁唑烷酮等之噁唑烷酮(oxazolidinone)類;乙腈、丙腈、丁腈、丙烯腈、甲基丙烯腈、苯甲腈等之腈(nitrile)類;碳酸鹽類;碳酸乙烯酯、碳酸丙烯酯等之碳酸酯類;丙酮、二乙酮、苯乙酮、甲乙酮、環己酮、環戊酮、二丙酮醇等之酮類;四氫呋喃、四氫吡喃等之環醚類等。上述之水溶性有機溶劑可單獨一種或混合複數種以上使用。The water-soluble organic solvent according to the present invention preferably has a solubility in water of 3 (g/100 g) or more at 20 ° C, more preferably 10 or more, and specific examples thereof are: dimethyl hydrazine, cyclobutyl hydrazine, and 3- Anthraquinones such as methylcyclobutyl hydrazine and 2,4-dimethylcyclobutyl hydrazine; hydrazines such as dimethyl hydrazine, diethyl hydrazine, and bis(2-hydroxyethyl) hydrazine; N, N-dimethyl Amidoxime, such as carbamide, N-methylformamide, N,N-dimethylacetamide, N,N-dimethylpropionamide; N-methyl-2-pyrrolidone, N -Indoleamines such as ethyl-2-pyrrolidone and N-hydroxymethyl-2-pyrrolidone; β-propiolactone, β-butyrolactone, γ-butyrolactone, γ-valerolactone, δ- Lactones such as valerolactone; alcohols such as methanol, ethanol, isopropanol; ethylene glycol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol, diethylene glycol Monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, diethylene glycol monohexyl ether, diethylene glycol monophenyl ether, triethylene glycol monomethyl ether, propylene glycol , propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, 1,3-butylene glycol, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, triethyl Ethylene glycol and glycol ethers such as alcohol dimethyl ether and triethylene glycol triethyl ether; N-methyl-2-oxazolidinone, 3,5-dimethyl-2-oxazole An oxazolidinone such as an alkyl ketone; a nitrile such as acetonitrile, propionitrile, butyronitrile, acrylonitrile, methacrylonitrile or benzonitrile; carbonates; ethylene carbonate and propylene carbonate A carbonate such as an ester; a ketone such as acetone, diethyl ketone, acetophenone, methyl ethyl ketone, cyclohexanone, cyclopentanone or diacetone; a cyclic ether such as tetrahydrofuran or tetrahydropyran. The above-mentioned water-soluble organic solvents may be used singly or in combination of plural kinds or more.

根據本發明之分散劑,其具體例為:羥乙基纖維素、陽離子化纖維素、羥甲基纖維素、羥丙基纖維素、瓜爾膠(guar gum)、陽離子化瓜爾膠、三仙膠(xanthan gum)、海藻酸鹽、陽離子化澱粉等之多糖類及其衍生物;植酸(phytic acid)、二(聚氧乙烯)烷基醚磷酸、三(聚氧乙烯)烷基醚磷酸等之聚乙烯醇(poval)及其磷酸酯類。上述之分散劑可單獨一種或混合複數種以上使用。Specific examples of the dispersant according to the present invention are: hydroxyethyl cellulose, cationized cellulose, hydroxymethyl cellulose, hydroxypropyl cellulose, guar gum, cationized guar gum, three Polysaccharides and derivatives thereof, such as xanthan gum, alginate, cationized starch; phytic acid, bis(polyoxyethylene) alkyl ether phosphate, tris(polyoxyethylene) alkyl ether A polyvinyl alcohol (poval) such as phosphoric acid and a phosphate thereof. The above dispersing agents may be used singly or in combination of plural kinds or more.

於本發明之一較佳體實施例中,該洗淨液組成物,基於鹼性化合物(A)之使用量為100重量份,消泡劑之使用量為0.1至10重量份,較佳為0.3至9重量份,更佳為0.5至8重量份;螫合劑之使用量通常為30重量份以下,較佳為1至20重量份,更佳為3至20重量份;抗氧化劑、緩衝溶劑、防腐劑及分散劑之使用量通常為10重量份以下,較佳為8重量份以下,更佳為5重量份以下;pH調整劑之使用量通常為90重量份以下,較佳為85重量份以下,更佳為80重量份以下;水溶性有機溶劑之使用量通常為500重量份以下,較佳為400重量份以下,更佳為300重量份以下。In a preferred embodiment of the present invention, the cleaning liquid composition is used in an amount of 100 parts by weight based on the basic compound (A), and the antifoaming agent is used in an amount of 0.1 to 10 parts by weight, preferably 0.3 to 9 parts by weight, more preferably 0.5 to 8 parts by weight; the chelating agent is usually used in an amount of 30 parts by weight or less, preferably 1 to 20 parts by weight, more preferably 3 to 20 parts by weight; an antioxidant, a buffer solvent The amount of the preservative and the dispersing agent to be used is usually 10 parts by weight or less, preferably 8 parts by weight or less, more preferably 5 parts by weight or less, and the pH adjusting agent is usually used in an amount of 90 parts by weight or less, preferably 85 parts by weight or less. The amount is preferably 80 parts by weight or less or less; the amount of the water-soluble organic solvent used is usually 500 parts by weight or less, preferably 400 parts by weight or less, more preferably 300 parts by weight or less.

本發明所屬技術領域中具通常知識者可依所需,而調配各組分而得該洗淨液組成物。於本發明之一較佳具體例中,該組成物在25℃之表面張力為自15至45 dyne/cm,較佳為20至40 dyne/cm,更佳為25至35 dyne/cm。當洗淨液組成物在25℃時之表面張力為15至45 dyne/cm時,對基板之洗淨力佳。Those skilled in the art to which the present invention pertains can formulate the components as needed to obtain the cleaning liquid composition. In a preferred embodiment of the invention, the composition has a surface tension at 25 ° C of from 15 to 45 dyne/cm, preferably from 20 to 40 dyne/cm, more preferably from 25 to 35 dyne/cm. When the surface tension of the cleaning composition at 25 ° C is 15 to 45 dyne/cm, the cleaning power to the substrate is good.

本發明亦提供一種清洗基板之方法,其係使用前述之洗淨液組成物。The present invention also provides a method of cleaning a substrate using the aforementioned cleaning liquid composition.

使用根據本發明之洗淨液組成物以清洗基板之詳細操作步驟可為本發明所屬技術領域中具通常知識者所熟知,例如使用浸泡法,將該基板浸入盛有該洗淨液組成物之容器。亦可使用刷子或海棉進行擦洗、澆淋、噴霧或噴射方式清洗;較佳亦可使用超音波清洗以提高效率,或使用泡沫清洗。The detailed operational steps of using the cleaning fluid composition according to the present invention to clean the substrate can be well known to those of ordinary skill in the art to which the present invention pertains, for example, using a soaking method, immersing the substrate in a composition containing the cleaning liquid. container. It can also be scrubbed, sprayed, sprayed or sprayed with a brush or sponge; it is also preferable to use ultrasonic cleaning for efficiency or foam cleaning.

適用於本發明之基板較佳為鈉鈣玻璃、硼矽玻璃、二氧化矽玻璃、無鹼玻璃等玻璃基板。The substrate suitable for the present invention is preferably a glass substrate such as soda lime glass, borosilicate glass, cerium oxide glass or alkali-free glass.

茲以下列實例予以詳細說明本發明,唯並不意謂本發明僅侷限於此等實例所揭示之內容。The invention is illustrated by the following examples, which are not intended to be limited to the scope of the invention.

依下表1及表2之比例配製洗淨液組成物。The cleaning liquid composition was prepared in the proportions of Tables 1 and 2 below.

Comment 價方式:Price method:

評價結果示於上表1。可知本發明之洗淨液組成物具有消泡性佳及凝膠物生成量低之優點。The evaluation results are shown in Table 1 above. It is understood that the cleaning liquid composition of the present invention has the advantages of good defoaming property and low gel formation amount.

表面張力:Surface Tension:

以恆溫水槽控制洗淨液組成物在25℃,並使用表面張力儀(Tensiometer Model CBVP-A2,協和界面科學製)量測表面張力。(單位:dyne/cm)The composition of the washing liquid was controlled at 25 ° C with a constant temperature water bath, and the surface tension was measured using a surface tension meter (Tensiometer Model CBVP-A2, manufactured by Kyowa Interface Science Co., Ltd.). (Unit: dyne/cm)

消泡性:Defoaming:

取50ml洗淨液組成物,倒入100ml量筒,上下震盪20回後,量測泡沫高度(T1),靜置30秒後,再次量測泡沫高度(T2),並根據以下基準評價:Take 50ml of the washing liquid composition, pour into a 100ml measuring cylinder, shake up and down 20 times, measure the foam height (T1), and after standing for 30 seconds, measure the foam height (T2) again, and evaluate according to the following criteria:

消泡率(%)=(T1-T2)/T1×100%Defoaming rate (%) = (T1-T2) / T1 × 100%

○:消泡率>80%○: defoaming rate>80%

△:50%<消泡率≦80%△: 50% < defoaming rate ≦ 80%

╳:消泡率≦50%╳: defoaming rate ≦ 50%

凝膠物生成量:Gel production:

將洗淨液組成物以水稀釋至5%後,清洗尺寸為1.5m x 1.85m之玻璃基板,並以恆溫水槽控制在40℃。接著於清洗3000片玻璃基板後,量測濾網內由洗淨液與髒汙所生成之凝膠物的重量,並根據以下基準評價:After the detergent composition was diluted to 5% with water, the glass substrate having a size of 1.5 m x 1.85 m was washed and controlled at 40 ° C with a constant temperature water bath. Next, after cleaning 3,000 glass substrates, the weight of the gel formed by the washing liquid and the dirt in the sieve was measured and evaluated according to the following criteria:

○:凝膠物生成量<10g○: Gel production amount <10g

△:10g≦凝膠物生成量<100g△: 10g ≦ gel formation amount <100g

╳:凝膠物生成量≧100g╳: Gel production amount ≧100g

上述實施例僅為說明本發明之原理及其功效,而非限制本發明。習於此技術之人士對上述實施例所做之修改及變化仍不違背本發明之精神。本發明之權利範圍應如後述之申請專利範圍所列。The above-described embodiments are merely illustrative of the principles and effects of the invention, and are not intended to limit the invention. Modifications and variations of the embodiments described above will be apparent to those skilled in the art without departing from the spirit of the invention. The scope of the invention should be as set forth in the appended claims.

Claims (6)

一種洗淨液組成物,其包含:鹼性化合物(A);含氟化合物(B),其具有如式(1)所示之結構,R-A 式(1);直鏈型界面活性劑(C),其具有如式(2)所示之結構,R10 -O-(EO)a (PO)b -H 式(2);及水(D);其中:R具有如式(3)所示之結構, R1 至R9 係分別獨立選自由H、CH3 、F、CH2 F、CHF2 、CF3 、CF2 CF3 及CF2 CF2 CF3 所組成之群;A係選自由表示H、CH3 、F、CH2 F、CHF2 、CF3 、CF2 CF3 、CF2 CF2 CF3 、-O(CH2 CH2 O)m -CH3 、-O(CH2 )n OH、-O(CH2 )n OR及-OAr所組成之群,m代表1至50之整數;n代表4至20之整數;Ar代表包含p個-CH2 X取代基或包含單一Rb 取代基之單環或多環之芳香基;X代表鹵素; p代表2至5之整數;Rb 係選自由CH2 CH2 OH、NH2 、SO3 Na、 、-(COOMx )q 、-T-(CH2 )3 -N+ (CH3 )3 ‧I-所組成之群;Y代表H或甲基;Mx 係選自由H、Na、K、Li、銨基、四甲銨基、四乙銨基及四丁銨基所組成之群;T代表;U表示氫原子或芳香基;Z代表H或烷基; Rc 代表W代表示H或甲基;s代表1至140之整數;q代表1或2;R10 係選自由C8至C18之直鏈烷基、C8至C18之直鏈烯基、C8至C18之直鏈醯基及具C8至C12之直鏈烷基取代之苯基所組成之群;EO代表乙氧基; PO代表丙氧基;a代表1至20之整數;及b代表0至20之整數;基於鹼性化合物(A)之使用量為100重量份,其中含氟化合物(B)之使用量為自0.2至140重量份;直鏈型界面活性劑(C)之使用量為自1至500重量份;及水(D)之使用量為自300至25,000重量份。A cleaning liquid composition comprising: a basic compound (A); a fluorine-containing compound (B) having a structure represented by the formula (1), RA formula (1); a linear surfactant (C) ) having the structure shown in formula (2), R 10 -O-(EO) a (PO) b -H (2); and water (D); wherein: R has the formula (3) Structure of the show, R 1 to R 9 are each independently selected from the group consisting of H, CH 3 , F, CH 2 F, CHF 2 , CF 3 , CF 2 CF 3 and CF 2 CF 2 CF 3 ; CH 3 , F, CH 2 F, CHF 2 , CF 3 , CF 2 CF 3 , CF 2 CF 2 CF 3 , -O(CH 2 CH 2 O) m -CH 3 , -O(CH 2 ) n OH, a group consisting of -O(CH 2 ) n OR and -OAr, m represents an integer from 1 to 50; n represents an integer from 4 to 20; and Ar represents a p-CH 2 X substituent or a single R b substituent Monocyclic or polycyclic aromatic groups; X represents halogen; p represents an integer from 2 to 5; R b is selected from CH 2 CH 2 OH, NH 2 , SO 3 Na, , -(COOM x ) q , -T-(CH 2 ) 3 -N + (CH 3 ) 3 ‧I - , and a group consisting of; Y represents H or methyl; M x is selected from the group consisting of H, Na, K, Li, ammonium, tetramethylammonium, tetraethylammonium and tetrabutylammonium; or ; U represents a hydrogen atom or an aromatic group; Z represents H or an alkyl group; R c represents or W represents H or methyl; s represents an integer from 1 to 140; q represents 1 or 2; and R 10 is selected from a linear alkyl group of C8 to C18, a linear alkenyl group of C8 to C18, and a C8 to C18 straight a group consisting of a chain thiol group and a phenyl group substituted with a linear alkyl group of C8 to C12; EO represents an ethoxy group; PO represents a propoxy group; a represents an integer of 1 to 20; and b represents an integer of 0 to 20 The amount of the basic compound (A) to be used is 100 parts by weight, wherein the fluorine-containing compound (B) is used in an amount of from 0.2 to 140 parts by weight; and the linear surfactant (C) is used in an amount of from 1 to 1 500 parts by weight; and water (D) are used in an amount of from 300 to 25,000 parts by weight. 根據請求項1之洗淨液組成物,其中R1 至R9 係各為不同。The detergent composition according to claim 1, wherein each of R 1 to R 9 is different. 根據請求項1之洗淨液組成物,其中R1 至R9 中至少兩者為相同。A cleaning composition according to claim 1, wherein at least two of R 1 to R 9 are the same. 根據請求項1之洗淨液組成物,其另包含支鏈型界面活性劑(E),該支鏈型界面活性劑(E)具有如式(4)所示之結構,R11 -O-(EO)c (PO)d -H 式(4);R11 係選自由C6至C20含支鏈之烷基、C6至C20含支鏈之烯基、C6至C20含支鏈之醯基及具C6至C14含支鏈烷基取代之苯基所組成之群;c代表1至20之整數;及d代表0至20之整數;基於鹼性化合物(A)之使用量為100重量份,其中支鏈型界面活性劑(E)之使用量為自5至500重量份。The cleaning liquid composition according to claim 1, which further comprises a branched surfactant (E) having a structure represented by the formula (4), R 11 -O- (EO) c (PO) d -H Formula (4); R 11 is selected from a C6 to C20 branched alkyl group, a C6 to C20 branched alkenyl group, a C6 to C20 branched chain fluorenyl group and a group consisting of C6 to C14 phenyl groups substituted with a branched alkyl group; c represents an integer of 1 to 20; and d represents an integer of 0 to 20; and the amount used based on the basic compound (A) is 100 parts by weight, The branched surfactant (E) is used in an amount of from 5 to 500 parts by weight. 根據請求項1之洗淨液組成物,其中該組成物在25℃之表面張力為自15至45dyne/cm。 A cleaning composition according to claim 1, wherein the composition has a surface tension of from 15 to 45 dyne/cm at 25 °C. 一種清洗基板之方法,其係使用根據請求項1至5任何一項之洗淨液組成物。A method of cleaning a substrate using the cleaning liquid composition according to any one of claims 1 to 5.
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