TWI434606B - Sealing device and sealing process use the same - Google Patents

Description

Fusion sealing device and welding process using same

The present invention relates to a fusion sealing device and a welding process using the same, and more particularly to a fusion sealing device capable of saving process cost and improving process yield and a welding process using the same.

In the new generation of flat display elements, the principle of organic light emitting diode (OLED) or polymer light emitting diode (PLED) is to apply current to a specific organic light emitting material. In order to convert electrical energy into light energy, it has the advantages of thin and light-weight features of surface illumination, high luminous efficiency of self-luminescence, and low driving voltage.

In the process of an organic light emitting diode display, how to prevent moisture from penetrating into the display element is a critical technology. Generally, after the vapor deposition process of the metal electrode and the organic light-emitting film is completed on the glass substrate of the OLED/PLED display element, the components on the surface of the glass substrate are encapsulated by a cover. In order to extend the life of display elements, various techniques for reducing humidity have been developed. For organic materials with high sensitivity to oxygen, moisture and high temperature, epoxy resin can not completely isolate oxygen and moisture, and can not provide excellent bonding performance between glass substrate and cover plate, so it is not suitable for OLED/PLED display. Component requirements. Therefore, a fusion material containing a ceramic powder and a glass powder (generally called frit, glass paste or glass paste) is often used as a fusion material for an OLED/PLED display element.

After the fusion material containing the ceramic powder is applied between the two substrates, the fusion material must be irradiated with laser light or infrared light so that the two substrates can be welded to each other to complete the packaging of the display element. FIG. 1 is a schematic view of a conventional fusion sealing device for performing a package sintering process. Referring to FIG. 1 , the fusion sealing device 100 includes a light source 110 , a mask 120 , and a carrying platform 130 . The light source 110 is disposed on the bracket 140. The carrying platform 130 is used to carry the substrate 101 to be packaged, and the mask is also disposed on the carrying platform and located between the light source 110 and the substrate 101.

2 is a schematic view of a mask used in the fusion sealing device of FIG. 1. Referring to FIG. 1 and FIG. 2 simultaneously, the mask 120 has a plurality of light transmissive patterns 122, and the light transmissive patterns 122 correspond to regions on the substrate 101 coated with a welding material (not shown). The remaining areas of the substrate 101 that are not coated with the solder material are shielded by the opaque areas of the mask 120 to prevent light from the source from damaging the circuitry on the substrate.

The light source 110 is movable in a two-dimensional direction with respect to the carrying platform so that the light emitted by the light source 110 is incident on the substrate 101 through the light transmitting pattern 122, thereby fusing the welding material.

However, in the conventional fusion sealing device 100, since the mask 120 is fixed relative to the substrate 101, different masks 120 must be used for the substrates 101 of different designs or sizes, and the size of the mask 120 must be larger than Equal to the substrate 101 corresponding to it, the process cost cannot be reduced.

In addition, after the package fusion process of one substrate 101 is completed, the alignment of the mask 120 with the light source 110 and the next substrate 101 is required, which is quite time-consuming and inconvenient in the process.

Moreover, since the distance between the mask 120 and the substrate 101 is only about 0.5 to 5 cm, when the sintering process of the large substrate 101 is performed, the size of the mask 120 is too large, and the center of the mask 120 is bent and touched. The substrate 101 causes scratching of the mask 120 itself or the substrate 101.

It is an object of the present invention to provide a fusion seal to increase process yield.

It is still another object of the present invention to provide a fusion process to save process costs.

The invention provides a fusion sealing device adapted to weld a substrate, and the fusion sealing device comprises at least one mask, at least one light source and a carrying platform. The mask has at least one light transmissive pattern, and the light transmissive pattern has a first light transmissive portion and a second light transmissive portion, and the first light transmissive portion and the second light transmissive portion extend substantially perpendicular to each other, which are respectively the first direction With the second direction. The light source is disposed above the mask and adapted to move relative to the mask in the first direction. The carrying platform is configured to carry the substrate such that the substrate is positioned below the mask, and the mask is adapted to move in the second direction relative to the carrying platform.

In an embodiment of the invention, the first direction is substantially perpendicular to the second direction.

In an embodiment of the invention, the fusion sealing device further includes a bracket, a first transmission mechanism, a second transmission mechanism, and a third transmission mechanism. The first transmission mechanism is coupled to the bracket for driving the bracket to move in the second direction relative to the carrier platform. The second transmission mechanism is disposed on the bracket and coupled to the light source for driving the light source to move in the first direction on the bracket. The third transmission mechanism is also disposed on the bracket and connected to the mask, and is adapted to drive the mask to move in the second direction on the bracket.

In an embodiment of the invention, the fusion sealing device further includes a fine adjustment mechanism disposed on the bracket and coupled to the mask for driving the mask to move in the third direction. Wherein, the third direction is, for example, substantially perpendicular to the first direction and the second direction.

In an embodiment of the invention, the fusion sealing device further includes a bracket, a second transmission mechanism, a third transmission mechanism, and a fourth transmission mechanism. The second transmission mechanism is disposed on the bracket and connected to the light source, and is adapted to drive the light source to move in the first direction on the bracket. The third transmission mechanism is also disposed on the bracket and connected to the mask, and is adapted to drive the mask on the bracket. Move in the second direction. The fourth transmission mechanism is connected to the carrying platform, and is adapted to drive the carrying platform to move relative to the light source in the second direction.

In an embodiment of the invention, the fusion sealing device further includes a bracket, a fifth transmission mechanism, and a sixth transmission mechanism. The light source is fixed on the bracket, the fifth transmission mechanism is connected to the carrying platform, and is adapted to drive the loading platform to move in the first direction and the second direction, and the sixth transmission mechanism is connected to the mask, and is adapted to drive the shielding along the first Move in the direction and in the second direction.

In an embodiment of the invention, the first light transmitting portion and the second light transmitting portion of the light transmitting pattern are connected to each other.

In an embodiment of the invention, the light transmissive pattern comprises an L-shape or a U-shape.

In an embodiment of the invention, the mask has a plurality of light transmissive patterns, and the light transmissive patterns may be identical to each other or different from each other.

In an embodiment of the invention, the light transmissive patterns are arranged in an array.

In an embodiment of the invention, the fusion sealing device may include a plurality of light sources and a plurality of masks, and each of the light sources respectively corresponds to one of the masks.

The invention provides a welding process suitable for welding a substrate. First, at least one mask is provided, the mask having at least one light transmissive pattern, and the light transmissive pattern has a first light transmissive portion and at least one second light transmissive portion. The first light transmitting portion extends in the first direction, and the second light transmitting portion extends in the second direction. Next, at least one light source is provided, disposed above the mask. Then, a carrying platform is provided for carrying the substrate to be welded so that the substrate is under the mask. Then, the light source is corresponding to the first light transmitting portion of the transparent pattern of the mask, and the light source is moved relative to the mask in the first direction, so that the light emitted by the light source penetrates the first light transmitting portion and is incident on the substrate. . Subsequently, the mask is moved relative to the light source in the second direction such that the light source corresponds to the second light transmitting portion of the light transmissive pattern of the mask. Then, the light source and the mask are moved relative to the substrate in the second direction, so that the light emitted by the light source penetrates the second light transmitting portion and is incident on the substrate.

In an embodiment of the invention, the first direction is substantially perpendicular to the second direction.

In an embodiment of the invention, the method for moving the light source and the mask relative to the substrate in the second direction comprises first fixing the carrier platform, then providing the bracket and the first transmission mechanism, and driving the bracket along the second by the first transmission mechanism Move in direction. Then, the light source and the mask are placed on the bracket. Wherein, the light source is fixed relative to the bracket in the second direction.

In one embodiment of the invention, the method of moving the light source relative to the mask in the first direction includes providing a second transmission mechanism coupled between the light source and the bracket to drive the light source to move in the first direction on the bracket.

In one embodiment of the invention, the method of moving the mask relative to the light source in the second direction includes providing a third transmission mechanism coupled between the mask and the bracket to drive the mask in the second direction on the bracket mobile.

In an embodiment of the invention, the welding process may further include providing a fine adjustment mechanism disposed on the bracket and connected to the mask to drive the mask to move in the third direction.

In an embodiment of the invention, the third direction is substantially perpendicular to the first direction and the second direction.

In an embodiment of the invention, the method of moving the light source relative to the mask in the first direction and moving the substrate relative to the light source relative to the mask in the second direction comprises first providing a bracket, and then providing a second transmission mechanism, which is connected Between the bracket and the light source, the light source is driven to move in the first direction on the bracket. Then, a third transmission mechanism is provided that is coupled between the bracket and the cover to drive the shield to move in the second direction on the bracket. In succession, a fourth transmission mechanism is provided, which is coupled to the carrier platform to drive the carrier platform to move relative to the light source in the second direction.

In one embodiment of the invention, the method of moving the light source relative to the mask in the first direction and moving the mask relative to the light source in the second direction comprises first providing a bracket and securing the light source to the bracket. Next, a sixth transmission mechanism is provided that is coupled to the mask to move the mask in the first direction and the second direction.

In an embodiment of the invention, the method for moving the light source relative to the substrate in the first direction and the second direction includes providing a fifth transmission mechanism coupled to the carrier platform to drive the carrier platform in the first direction and the second direction mobile.

The fusion sealing device of the present invention allows the mask to be moved relative to the carrier platform, so that the substrate can be welded to a substrate having a size smaller than that of the substrate to be welded, and the substrates of different designs/sizes can be welded using the same mask. In this way, not only the process cost can be saved, but also the mask can be prevented from being bent toward the substrate due to the excessive size, resulting in scratching of the mask or the substrate.

The above and other objects, features and advantages of the present invention will become more <RTIgt;

The fusion sealing device of the present invention is suitable for use in any process that requires the use of a mask for welding. In order to familiarize the person skilled in the art with a better understanding of the present invention, a laser sintered package will be described below as an example, but it is not intended to limit the present invention. invention.

3A is a schematic view of a fusion sealing device according to an embodiment of the present invention, FIG. 3B is a side view of the fusion sealing device of FIG. 3A, and FIG. 4 is a schematic view of the present invention. A schematic view of a mask in an embodiment. Referring to FIG. 3A, FIG. 3B and FIG. 4 simultaneously, the fusion sealing device 300 includes at least one light source 310, at least one mask 320, and a carrying platform 330. In the present embodiment, the light source 310 is, for example, a laser light source. The mask 320 has at least one light transmissive pattern 322, and the light transmissive pattern 322 has a first light transmitting portion 322a and a plurality of second light transmitting portions 322b, and the extending direction of the first light transmitting portion 322a and the second light transmitting portion 322b It is substantially vertical, which is a first direction D1 and a second direction D2, respectively.

In the present embodiment, the first light transmitting portion 322a is connected to the second light transmitting portion 322b, and is, for example, a U-shaped light transmitting pattern 322, as shown in FIG. Of course, in other embodiments of the present invention, the first light transmitting portion 322a and the second light transmitting portion 322b of the light transmitting pattern 322 may also be separated from each other, but the light transmitting pattern 322 of the mask of the present invention is not limited thereto. .

The light source 310 is disposed above the mask 310 and adapted to move relative to the mask 310 in the first direction D1. In the present embodiment, the light source 310 is, for example, a laser light source. The carrying platform 330 is configured to carry the substrate 301 such that the substrate 301 is located below the mask 320, and the mask 310 is adapted to move relative to the carrying platform 330 in the second direction D2.

In detail, the fusion sealing device 300 of the embodiment further includes a bracket 340, a first transmission mechanism 342, a second transmission mechanism 350, and a third transmission mechanism 360. The first transmission mechanism 342 is coupled to the bracket 340 for driving the bracket 340 to move in the second direction D2. In the present embodiment, the first transmission mechanism 342 is, for example, a linear motor that can move the bracket 340 on the rail 348 in the second direction D2.

Continuing to refer to FIG. 3A and FIG. 3B , the light source 310 and the mask 320 are both disposed on the bracket 340 , and the second transmission mechanism 350 is disposed on the bracket 340 and connected to the light source 310 for driving the light source 310 relative to the bracket 340 . Cover 320 along The first direction D1 moves. In the present embodiment, the second transmission mechanism 350 is, for example, a linear motor. The third transmission mechanism 360 is connected between the bracket and the cover 320 for driving the shield 320 to move relative to the light source 310 in the second direction D2 on the bracket 340.

As shown in FIG. 3B, the third transmission mechanism 360 includes, for example, a carrier plate 361, a linear motor 362, and a slide rail 368 extending along the second direction D2, wherein the carrier plate 361 is, for example, a hollow frame for carrying the mask 320. The linear motor 362 is used to drive the carrier plate 361 to move on the slide rail 368. However, the present invention does not limit the manner of actuation of the third transmission mechanism 360 thereto. In other embodiments, as shown in FIG. 3C, the third transmission mechanism 360 may also be composed of a carrier plate 361, a motor 363, a screw 364, and a guide block 366. The carrier plate 361 is fixed to the guide block 366. Therefore, when the motor 363 drives the screw 364 to rotate, the guide block 366 drives the carrier plate 361 to move in the second direction D2.

As can be seen from the foregoing, in the fusion sealing device 300 of the present embodiment, the mask 320 can be moved along the second direction D2 relative to the loading platform 330 as the bracket 340 moves, or can be driven by the third transmission mechanism 360. At the same time, the opposite bracket 340 and the carrying platform 330 move in the second direction D2.

5A is a top plan view showing a mask disposed on a carrier board according to an embodiment of the present invention, and FIG. 5B is a front elevational view showing a mask disposed on a carrier board according to an embodiment of the present invention. Referring to FIG. 5A and FIG. 5B , the fusion sealing device 300 of the present embodiment may further include a positioning mechanism 370 disposed on the third transmission mechanism 360 for driving the mask 320 to move on the third transmission mechanism 360 . In detail, as shown in FIG. 5A, the alignment mechanism 370 is disposed on the carrier 361, for example, and includes an adjustment member 372 and an adjustment member 374. The adjustment member 372 is configured to adjust the mask 320 in the first direction D1. The position of the adjusting member 374 is used to adjust the position of the mask 320 in the second direction D2. In this way, the use of fusion Before the sealing device 300 is welded, the position of the mask 320 on the carrier 361 can be adjusted by the adjusting member 372 and the adjusting member 374 to complete the alignment between the mask 320 and the light source 310.

In addition, as shown in FIG. 5B, the alignment mechanism 370 may further include an adjusting member 376, which can be used to adjust the level of the mask 320 on the carrier board, in addition to fixing the mask 320 to the carrier board 361. In order to avoid the influence of the mask 320 on the substrate to be welded, the welding quality is affected.

It is worth mentioning that the mask 320 can also be disposed on the bracket 340 by vacuum adsorption. At this time, the third transmission mechanism 360 is connected to the optical vacuum adsorption device (not shown), and the actuation mode is substantially the same as The foregoing embodiments are the same and will not be described again here.

In this embodiment, since the light source 310 and the mask 320 are both disposed on the bracket 340, only a single position correction is required for the light source 310 and the mask 320 before the welding process is performed, and then the light source 310 and the substrate are further performed. The alignment between 301. After the subsequent replacement of the substrate 301 to be fused, it is not necessary to adjust the position of the light source 310 and the mask 320. Therefore, by using the fusion sealing device 300 of the present embodiment to perform the welding process, the time of a single production line can be greatly shortened.

In order to make the present invention more familiar with the present invention, the following will be described by way of a description of the steps of the fusion bonding process using the fusion sealing device of the foregoing embodiment.

6A-6G are schematic diagrams showing an operation flow of a fusion sealing device according to an embodiment of the present invention. Referring to FIG. 6A, the substrate 301 placed on the carrying platform 330 has a region to be welded, and the region to be welded is coated with a welding material (generally called Frit) 302 composed of ceramic powder and glass powder. And the welding material 302 is coated in a ring shape along the first direction D1 and the second direction D2. First, the mask 320 is disposed on the bracket 340, and relative positional correction between the mask 320 and the light source 310 is performed. Then, the third transmission mechanism 360 is used to drive the mask 320 to move along the second direction D2, so that the first light transmitting portion 322a of the light transmitting pattern 322 corresponds to the partial welding material 302 coated on the substrate 301 in the first direction D1. Then, the second transmission mechanism 350 is used to drive the light source 310 to move in the first direction D1 to reach the position shown in FIG. 6B.

It should be noted that the solder material 302 is disposed between two pre-fixed substrates, and the substrate has the characteristics of being transparent or heat-transmissible, so that the light or heat of the light source 310 disposed above the two substrates can be penetrated. The substrate is transferred to the fusion material 302 in the middle of the two substrates to enable fusion of the fusion material 302 to achieve the effect of welding and fixing the two substrates. However, in order to keep the illustration clear, the drawing is illustrated by drawing only one substrate 301.

In the present embodiment, the light source 310 is moved, for example, from right to left. In this way, the light emitted by the light source 310 can be irradiated from the first light transmitting portion 322a of the light transmitting pattern 322 to the portion of the solder material 302 coated on the substrate 301 in the first direction D1 from right to left. A portion of the fusion material 302 corresponding to the light transmitting portion 322a.

Referring to FIG. 6B to FIG. 6C, the third transmission mechanism 360 is used to drive the mask 320 to move along the second direction D2, so as to utilize the second light transmitting portion 322b of the light transmitting pattern 322 corresponding to the partial welding material 302. The portion of the mask 320 that is opaque shields the portion of the fused material 302 that has been fused. In the direction of FIG. 6B, the third transmission mechanism 360 drives the mask 320 to move from bottom to top in the second direction D2.

Then, as shown in FIG. 6D, the holder 340 is moved in the second direction D2 to cause the light source 310 to move relative to the mask 320 relative to the substrate 301. In this way, the light emitted by the light source 310 can be transmitted through the second light transmitting portion 322b of the light transmitting pattern 322 to the portion of the welding material 302 coated in the second direction D2 to fuse it. In the direction of Fig. 6C, the bracket 340 is moved from top to bottom, for example, to the position shown in Fig. 6D.

Referring to FIG. 6D to FIG. 6E, after the left side portion of the solder material 302 is cured, the third transmission mechanism 360 is used to drive the mask 320 to move along the second direction D2 to make the first light transmitting portion 322a of the light transmitting pattern 322. Corresponding to a portion of the weld material 302 coated in the first direction D1. In the direction of FIG. 6D, the third transmission mechanism 360 drives the mask 320 to move from top to bottom in the second direction D2.

Then, as shown in FIG. 6F, the second transmission mechanism 350 is used to drive the light source 310 to move from left to right in the first direction D1 to fuse the portion of the fusion material 302.

Referring to FIG. 6F to FIG. 6G, the third transmission mechanism 360 is used to drive the mask 320 to move along the second direction D2, so as to utilize the second transparent portion 322b of the transparent pattern 322 corresponding to the partial fusion material 302. The portion of the mask 320 that is opaque shields the portion of the fused material 302 that has been fused. In the direction of FIG. 6G, the third transmission mechanism 360 drives the mask 320 to move from bottom to top in the second direction D2.

Then, as shown in FIG. 6H, the holder 340 is moved in the second direction D2 to cause the light source 310 to move relative to the mask 320 relative to the substrate 301. In this way, the light emitted by the light source 310 can pass through the second light transmitting portion 322b of the light transmitting pattern 322 to the right side welding material 302 coated in the second direction D2 to fuse it. In the direction of Fig. 6G, the bracket 340 is moved from top to bottom, for example, to the position shown in Fig. 6H.

It can be seen from the above embodiment that the mask 320 of the embodiment can be moved along the second direction D2 with respect to the light source 310 and the carrying platform 330 to selectively align the first light transmitting portion 322a and the second light transmitting portion of the light transmitting pattern 322. One of the portions 322b corresponds to the weld material 302. Therefore, in the welding process, the welding to be welded can be accurately performed to prevent the light used in the welding process from damaging components in other regions, thereby improving the process yield.

In other embodiments of the present invention, the relative movement between the light source, the mask, and the carrying platform may be achieved by other means, which will be described below.

Figure 7 is a perspective view of a fusion sealing device in accordance with another embodiment of the present invention. It should be noted that the components of FIG. 7 are the same as those of FIG. 3, and the components represented by them are the same as or similar to those of the foregoing embodiment. The following is only for the difference between the fusion sealing device 600 and the fusion sealing device 300 of FIG. Description.

Referring to FIG. 7 , in the fusion sealing device 600 , the light source 310 and the mask 320 are disposed on the bracket 640 , and the fusion sealing device 600 further includes a fourth transmission device 660 connected to the bearing platform 630 for driving the bearing platform 630 . Moves in the second direction D2. That is, the difference between the fusion sealing device 600 and the fusion sealing device 300 of the foregoing embodiment is how to achieve the movement of the light source 310 and the mask 320 relative to the bearing platform 330/630, and the welding process using the fusion sealing device 600. The method is the same as or similar to the foregoing embodiment, and details are not described herein again.

Figure 8 is a perspective view of a fusion sealing device in accordance with another embodiment of the present invention. Similarly, the components of FIG. 8 are the same as those of FIG. 3, and the components represented by them are the same as or similar to those of the foregoing embodiment. Hereinafter, only the differences between the fusion sealing device 700 and the fusion sealing device 300 of FIG. 3 will be described.

Referring to FIG. 8, in the fusion sealing device 700 of the present embodiment, the light source 310 is fixed on the bracket 740, and the carrying platform 730 and the shield 720 are respectively driven by the fifth transmission mechanism 760 and the sixth transmission mechanism 770. It is moved in the first direction D1 and the second direction D2 to achieve the same relative motion as the previous embodiment. In particular, as shown in FIG. 9, in the embodiment, the light transmissive pattern 722 of the mask 720 may have only one first light transmitting portion 722a and one second light transmitting portion 722b, and the first light transmitting portion 722a. The second light transmitting portions 722b are connected to each other to have an L shape. In the welding process, when the first light transmitting portion 722a corresponds to the to-be-welded region of the substrate 301, at least one of the mask 720 and the carrying platform 330 moves in the first direction D1. When the second light transmitting portion 722b corresponds to the to-be-welded region of the substrate 301, at least one of the mask 720 and the carrying platform 330 moves in the second direction D2.

Although the light transmission pattern on the mask of the foregoing embodiment is U-shaped or L-shaped, the present invention is not limited thereto. As shown in FIG. 10, in other embodiments, the light transmissive pattern 922 of the mask 920 may also be composed of one first light transmitting portion 922a and three or more second light transmitting portions 922b.

It is worth mentioning that, by using the fusion sealing device of the present invention for the welding process, the substrate having different regions to be welded can be welded by a single mask. The mask 920 of Fig. 10 will be described below as an example.

11A and 11B are respectively top plan views of the fusion sealing device in operation according to an embodiment of the present invention. As shown in FIG. 11A and FIG. 11B, since the mask 920 has a plurality of second light transmitting portions 922b, not only the mask 920 can be used to weld the substrate 901 coated with only a single annular welding material 902 (see FIG. 11A). A plurality of small-sized substrates 903 can be simultaneously placed on the carrying platform, and the welding materials 904 of the substrates 903 are simultaneously welded using the mask 920 (see FIG. 11B). It can be seen that in the fusion sealing device of the present invention, the light transmission pattern on the mask can be designed according to actual needs to conform to the shape, size and arrangement of the region to be welded.

Based on the above, in other embodiments, the mask may also have a plurality of light transmissive patterns. As shown in FIG. 12, the mask 1100 may have a plurality of different light transmissive patterns 322, and the light transmissive patterns 322 may be arranged in a one-dimensional or two-dimensional direction. As shown in FIG. 13, the mask 122 may also have a plurality of identical light transmissive patterns 322, and the light transmissive patterns 322 may also be arranged in one or two dimensions.

In particular, in another embodiment, as shown in FIG. 14, the fusion sealing device 1300 may further include a plurality of light sources 310 and a plurality of masks 1320, and each of the light sources 310 corresponds to one of the masks 1320. In this way, accurate position correction can be performed for each light source 310 and the mask 1320 to improve the yield of the welding process.

In summary, in the fusion sealing device of the present invention and the welding process using the same, the mask can be moved relative to the bearing platform, so that the substrate can be welded to the substrate with a size smaller than that of the substrate to be welded. Moreover, substrates of different designs/sizes can also be welded using the same mask. In this way, not only the process cost can be saved, but also the mask can be prevented from being bent toward the substrate due to the excessive size, resulting in scratching of the mask or the substrate.

In addition, since the fusion sealing device of the present invention can dispose the light source and the mask on the same bracket, after replacing the substrate to be welded, it is not necessary to align the light source with the mask again, so as to shorten the time of a single production line.

While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.

100, 300, 600, 700, 1300. . . Fusion seal

101, 301, 901, 903. . . Substrate

110, 310‧‧‧ Light source

120, 320, 920, 1100, 1200, 1320‧‧ ‧ mask

122, 322, 722, 922‧‧‧ light transmission pattern

130, 330, 630, 730‧‧‧ bearing platform

140, 340, 640, 740‧‧‧ brackets

302, 902, 904‧‧‧ welding materials

322a, 722a, 922a‧‧‧ first light transmission department

322b, 722b, 922b‧‧‧second light transmission department

348‧‧‧ Track

350‧‧‧Second transmission

360‧‧‧3rd transmission mechanism

361‧‧‧ carrier board

362‧‧‧Linear motor

363‧‧‧Motor

364‧‧‧ screw

366‧‧‧ Guide block

368‧‧‧Slide rails

370‧‧‧ aligning agency

372, 374, 376‧‧‧ adjustments

660‧‧‧fourth transmission mechanism

760‧‧‧ fifth transmission mechanism

770‧‧‧ sixth transmission mechanism

D1‧‧‧ first direction

D2‧‧‧ second direction

Figure 1 is a schematic illustration of a conventional fusion seal.

2 is a schematic view of a mask used in the fusion sealing device of FIG. 1.

3A is a schematic view of a fusion sealing device in accordance with an embodiment of the present invention.

Figure 3B is a side elevational view of the fusion seal of Figure 3A.

3C is a side elevational view of a fusion seal in accordance with another embodiment of the present invention.

4 is a schematic view of a mask in an embodiment of the present invention.

5A is a top plan view showing a mask disposed on a carrier in accordance with an embodiment of the present invention.

FIG. 5B is a front elevational view showing a mask disposed on a carrier in accordance with an embodiment of the present invention. FIG.

6A-6H are schematic diagrams showing the operation flow of a fusion sealing device according to an embodiment of the present invention.

Figure 7 is a perspective view of a fusion sealing device in accordance with another embodiment of the present invention.

Figure 8 is a perspective view of a fusion sealing device in accordance with another embodiment of the present invention.

Figure 9 is a schematic view of a mask in another embodiment of the present invention.

Figure 10 is a schematic view of a mask in another embodiment of the present invention.

Figure 11A is a top plan view of the fusion sealing device in operation in an embodiment of the present invention.

Figure 11B is a top plan view of the fusion sealing device in operation in an embodiment of the present invention.

Figure 12 is a schematic view of a mask in another embodiment of the present invention.

Figure 13 is a schematic view of a mask in another embodiment of the present invention.

Figure 14 is a top plan view of a fusion sealing device in accordance with another embodiment of the present invention.

300. . . Fusion seal

301. . . Substrate

310. . . light source

320. . . Mask

330. . . Carrier platform

340. . . support

342. . . First transmission

348. . . track

350. . . Second transmission mechanism

360. . . Third transmission mechanism

361. . . Carrier board

D1. . . First direction

D2. . . Second direction

Claims (21)

A fusion sealing device is adapted to weld a substrate, the fusion sealing device comprising: at least one mask having at least one light transmissive pattern, wherein the light transmissive pattern has a first light transmissive portion and at least one second light transmissive portion The first light transmitting portion extends along a first direction, the second light transmitting portion extends along a second direction; at least one light source is disposed above the mask, and the light source is adapted to be opposite to the mask edge The first direction moves; and a carrying platform adapted to carry the substrate such that the substrate is positioned below the mask, and the mask is adapted to move in the second direction relative to the carrying platform. The fusion sealing device of claim 1, wherein the first direction is substantially perpendicular to the second direction. The fusion sealing device of claim 1, further comprising: a bracket; a first transmission mechanism coupled to the bracket, adapted to drive the bracket to move in the second direction relative to the carrying platform; a second transmission mechanism, disposed on the bracket and connected to the light source, adapted to drive the light source to move along the first direction on the bracket; and a third transmission mechanism disposed between the bracket and the mask The mask is driven to move along the second direction on the bracket. The fusion sealing device of claim 3, further comprising a pair of positioning mechanisms disposed on the third transmission mechanism, adapted to drive the mask along the The third transmission mechanism moves. The fusion sealing device of claim 1, further comprising: a bracket; a second transmission mechanism disposed on the bracket and coupled to the light source, adapted to drive the light source along the first along the bracket Moving in a direction; a third transmission mechanism disposed between the bracket and the mask, adapted to drive the mask to move along the second direction on the bracket; and a fourth transmission mechanism coupled to the carrying platform Suitable for driving the carrying platform to move in the second direction relative to the light source. The fusion sealing device of claim 1, further comprising: a bracket, and the light source is fixed on the bracket; a fifth transmission mechanism is connected to the carrying platform, and is adapted to drive the carrying platform along the first Moving in a direction and the second direction; and a sixth transmission mechanism coupled to the mask adapted to move the mask in the first direction and the second direction. The fusion sealing device of claim 1, wherein the first light transmitting portion and the second light transmitting portion of the light transmitting pattern are connected to each other. The fusion sealing device of claim 1, wherein the light transmission pattern comprises an L shape or a U shape. The fusion sealing device of claim 1, wherein the mask has a plurality of light transmitting patterns, and the light transmitting patterns are identical to each other. The fusion sealing device of claim 1, wherein the mask has a plurality of light transmitting patterns, and the light transmitting patterns are different from each other. The fusion sealing device of claim 10, wherein the light transmitting patterns are arranged in an array. The fusion sealing device of claim 1, comprising a plurality of light sources and a plurality of masks, and each of the light sources respectively corresponding to one of the masks. A splicing process for welding a substrate, the splicing process comprising the steps of: providing at least one mask, wherein the mask has at least one light transmissive pattern, the light transmissive pattern having a first light transmissive portion and at least one a second light transmitting portion, the first light transmitting portion extending along a first direction, the second light transmitting portion extending along a second direction; providing at least one light source disposed above the mask; providing a carrying platform Suitable for carrying the substrate such that the substrate is located under the mask; the light source is corresponding to the first light transmissive portion of the light transmissive pattern of the mask, and the light source is along the first direction relative to the mask Moving to cause light emitted by the light source to penetrate the first light transmitting portion and onto the substrate; moving the mask relative to the light source in the second direction, so that the light source corresponds to the mask The second light transmitting portion of the light transmitting pattern; and moving the light source and the mask relative to the substrate in the second direction, so that light emitted by the light source penetrates the second light transmitting portion and is incident on the substrate on. The welding process of claim 13, wherein the first direction is substantially perpendicular to the second direction. The welding process of claim 13, wherein the method of moving the light source and the mask relative to the substrate in the second direction comprises fixing the carrying platform; providing a bracket; providing a first transmission mechanism, connecting To the bracket, adapted to drive the bracket to move in the second direction; and to connect the light source and the mask to the bracket, wherein the light source is fixed relative to the bracket in the second direction. The splicing process of claim 15, wherein the method of moving the light source relative to the mask in the first direction comprises providing a second transmission mechanism coupled between the light source and the bracket to drive the The light source moves in the first direction on the bracket. The splicing process of claim 16, wherein the method of moving the mask relative to the light source in the second direction comprises providing a third transmission mechanism coupled between the mask and the bracket to drive The mask moves in the second direction on the bracket. The splicing process of claim 17, further comprising providing a pair of positioning mechanisms disposed on the third transmission mechanism for driving the mask to move on the third transmission mechanism. The splicing process of claim 13, wherein the method of moving the light source relative to the mask in the first direction and moving the substrate relative to the light source in the second direction comprises: providing a bracket is disposed between the bracket and the light source to drive the light source to move along the first direction on the bracket; and a third transmission mechanism is connected to the bracket and the mask And moving the mask along the second direction on the bracket: and providing a fourth transmission mechanism coupled to the carrying platform to drive the carrying platform to move in the second direction relative to the light source. The splicing process of claim 13, wherein the method of moving the light source relative to the mask in the first direction and moving the mask relative to the light source in the second direction comprises: providing a bracket; The light source is fixed on the bracket; and a sixth transmission mechanism is provided to be coupled to the mask to drive the mask to move in the first direction and the second direction. The splicing process of claim 20, wherein the method of moving the light source relative to the substrate in the first direction and the second direction comprises providing a fifth transmission mechanism coupled to the carrying platform to drive the The carrying platform moves in the first direction and the second direction.