TWI427176B - Apparatus and method for detecting coated substrate - Google Patents

Description

Coating substrate detecting device and coating substrate detecting method

The invention relates to a coating technology, in particular to a coating substrate detecting device and a coating substrate detecting method.

At present, the coating process is widely used in optoelectronic products. More common optical coating methods include vacuum evaporation. The substrate is sealed by vacuum evaporation in a vacuum evaporation chamber free of contaminants such as dust to form a film layer on the substrate. However, due to technical limitations, it is impossible for the vacuum evaporation chamber to reach a complete vacuum state. The coated substrate is usually stored in pitting (particle size 5-10 microns) or white spots (particle size 50-100 microns). . Therefore, it is necessary to perform a related test on the coated substrate to determine whether the quality of the coated substrate meets the requirements. At present, commonly used detection methods include visual inspection (which may be detected by means of a magnifying glass). However, the visual inspection efficiency is poor, the standards are different, and the detection effect is not satisfactory.

In view of the above, it is necessary to provide a coated substrate detecting device and a coated substrate detecting method which have high detection efficiency and uniform detection standards.

A coated substrate detecting device comprising a dark box having opposite end faces, a light source disposed on one end face of the dark box, and another one disposed in the dark box a light intensity sensor of the end face and a transmittance display device electrically connected to the light intensity sensor, the dark box forming a black box door between the two end faces and a coated substrate corresponding to the black box door The coated substrate receiving portion is configured to receive a plurality of coated substrates that are accessed by the black box door.

A coated substrate detecting method comprising: providing a coated substrate detecting device, the coated substrate detecting device comprising a dark box having opposite end faces, a light source disposed on one end face of the dark box, and one disposed in the dark box a light intensity sensor of an end face and a transmittance display device electrically connected to the light intensity sensor, the dark box forming a black box door and a coated substrate corresponding to the black box door between the two end faces a accommodating portion for accommodating a plurality of coated substrates that are fed in and out of the black box door; opening the black box door; placing a plurality of standard coated substrates on the coated substrate receiving portion; closing the black box door Opening the coated substrate detecting device; reading the transmittance from the transmittance display device as a predetermined transmittance; closing the coated substrate detecting device, opening the black box door, and taking out the plurality of standard coated substrates; Depositing a substrate on the coated substrate receiving portion; closing the black box door; Turning on the coated substrate detecting device; and reading the transmittance from the transmittance display device to determine whether the transmittance is higher than a predetermined transmittance; if so, the plurality of coated substrates are qualified.

The coating substrate detecting method is used to perform the coating substrate detecting method, and the plurality of coated substrates can be simultaneously detected, the detection efficiency is high, the detection standard is uniform, and the detection effect is good.

10‧‧‧coated substrate inspection device

110‧‧‧black box

120‧‧‧Light source

130‧‧‧Light intensity sensor

140‧‧‧Transmission rate display device

112, 114‧‧‧ end face

116‧‧‧black box door

118‧‧‧coated substrate accommodating department

20‧‧‧coated substrate

11a‧‧‧Clamping groove

310, 320, 322, 324, 326, 328, 330, 332, 334, 336, 338 ‧ ‧ steps

1 is a schematic perspective view of a coated substrate detecting device according to a preferred embodiment of the present invention.

2 is a schematic cross-sectional view of the coated substrate detecting device of FIG. 1.

3 is a flow chart of a method for detecting a coated substrate according to a preferred embodiment of the present invention.

Referring to FIG. 1 and FIG. 2 together, the coated substrate detecting apparatus 10 of the preferred embodiment of the present invention includes a black box 110, a light source 120, a light intensity sensor 130, and a transmittance display device 140. The dark box 110 includes two opposing end faces 112, 114. The light source 120 and the light intensity sensor 130 are respectively disposed on the end faces 112 and 114. The transmittance display device 140 is electrically connected to the light intensity sensor 130. The dark box 110 is formed with a black box door 116 and a coated substrate receiving portion 118 corresponding to the black box door 116 between the two end faces 112, 114. The coated substrate receiving portion 118 is for accommodating a plurality of coated substrates 20 (such as coated glass sheets) that are accessed by the black box door 116.

The dark box 110 is a rectangular hollow box made of an opaque material. The end faces 112, 114 are the two inner surfaces of the dark box 110 that are perpendicular to its length. The black box door 116 is formed on one long side (such as the top side) of the rectangular hollow box. The coated substrate receiving portion 118 is formed on the inner surface (such as the inner surface of the bottom) of the rectangular hollow box and the dark box door 116. The number of the grooves 11a is clamped.

Of course, the dark box 110 is not limited to the present embodiment, and other shapes such as a cylindrical shape (for testing a circular coated substrate) can be made for visual inspection.

Preferably, the light source 120 is a visible light source. More preferably, the area of the light source 120 matches the shape of the end face 112 to reduce edge phenomena of the light source 120.

The light intensity sensor 130 is a photometer for sensing the intensity of the visible light emitted by the light source 120 after passing through the plurality of coated substrates 20, and converting the transmittance into transmittance.

The transmittance display device 140 may employ a liquid crystal display that is fixed to the dark box 110, and of course, may be separately disposed. The transmittance display device 140 is configured to read the transmittance of the output of the light intensity sensor 130 (the transmittance of the light emitted from the light source 120 through the plurality of coated substrates 20) and display it.

Referring to FIG. 3 together, the method for detecting a coated substrate according to a preferred embodiment of the present invention includes the following steps: Step 310: providing a coated substrate detecting device 10; Step 320: opening the black box door 116; Step 322: applying a plurality of standard coatings a substrate (not shown) is placed in the coated substrate receiving portion 118; step 324: closing the black box door 116; step 326: opening the coated substrate detecting device 10; step 328: reading the transmittance from the transmittance display device 140 as a predetermined transmittance (step 90%); step 330: closing the coated substrate detecting device 10, opening the black box door 116, taking out the plurality of standard coated substrate; step 332: placing a plurality of coated substrate 20 in the coated substrate receiving portion 118; Step 334: closing the black box door 116; step 336: turning on the coated substrate detecting device 10; and step 338: reading the transmittance from the transmittance display device 140 (the transmittance of the light emitted by the light source 120 through the plurality of coated substrates 20) To determine whether the transmittance is higher than the predetermined transmittance (e.g., 90%); if so, the plurality of coated substrates 20 are qualified; if not, the plurality of coated substrates 20 are present in the failed coated substrate 20 ( In this case, the plurality of coated substrates 20 can be re-detected in conjunction with other coated substrates, or visually inspected).

It can be understood that the plurality of coated substrates 20 are usually obtained through the same batch of vapor deposition processes, and the difference in coating quality is small. The detection by the coated substrate detecting device 10 and the coated substrate detecting method can improve the detection efficiency, and the detection standard is uniform, and the detection effect is good.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

10‧‧‧coated substrate inspection device

120‧‧‧Light source

130‧‧‧Light intensity sensor

112, 114‧‧‧ end face

116‧‧‧black box door

118‧‧‧coated substrate accommodating department

11a‧‧‧Clamping groove

Claims (9)

A coated substrate detecting device is improved in that it comprises a dark box having opposite end faces, a light source disposed on one end face of the dark box, a light intensity sensor disposed on the other end face of the dark box, and a light intensity a transmittance display device electrically connected to the sensor, wherein the dark box is formed with a dark box door and a coated substrate receiving portion corresponding to the dark box door, the coated substrate receiving portion is configured to receive a plurality of pieces The coated substrate that enters and exits the black box door causes the light emitted by the light source to sequentially pass through the plurality of coated substrates to enter the light intensity sensor. The coated substrate detecting device according to claim 1, wherein the dark box is a rectangular hollow box made of an opaque material, and the two end faces are two inner surfaces of the dark box perpendicular to the longitudinal direction thereof, A dark box door is formed on one long side of the dark box, and the coated substrate receiving portion is a plurality of clamping grooves formed on an inner surface of the dark box opposite to the black box door. The coated substrate detecting device according to claim 1, wherein the light source is a surface light source. The coated substrate detecting device of claim 1, wherein the light source area matches the corresponding end face area. The coated substrate detecting device of claim 1, wherein the light source is a visible light source. The coated substrate detecting device of claim 1, wherein the light intensity sensor comprises a photometer. The coated substrate detecting device according to claim 1, wherein the transmitting The rate display device includes a liquid crystal display. The coated substrate detecting device according to claim 1, wherein the transmittance display device is fixed to the dark box. A coated substrate detecting method comprising: providing a coated substrate detecting device, wherein the coated substrate detecting device comprises a dark box having opposite end faces, a light source disposed on one end face of the dark box, and a setting a light intensity sensor of the other end face of the black box and a transmittance display device electrically connected to the light intensity sensor, the dark box forming a black box door between the two end faces and a corresponding one of the black box doors a coated substrate receiving portion, wherein the coated substrate receiving portion is configured to receive a plurality of coated substrates that are fed in and out of the black box door such that light emitted by the light source sequentially passes through the plurality of coated substrates and enters the light intensity sensor; Opening the black box door according to the item; placing a plurality of standard coated substrates on the coated substrate receiving portion of the item; closing the dark box door according to the above item; and coating the substrate detecting device according to the opening item; The transmittance display device reads the transmittance as a predetermined transmittance; the coated substrate detecting device described in the closing item opens the black box door and takes out the plurality of standard coated substrates; The sheet-coated substrate is placed in the coated substrate receiving portion of the item; the dark box door according to the above item; the coated substrate detecting device according to the opening item; and the transmittance read from the transmittance display device to determine Whether the transmittance is higher than a predetermined transmittance; if so, the plurality of coated substrates are acceptable.