TWI426230B - Device for measuring roughness of internal surface of workpiece - Google Patents

Description

Workpiece inner hole surface roughness measuring device

The invention relates to a workpiece inner surface roughness measuring device.

At present, industrial production requires increasingly higher surface roughness of the inner hole of a workpiece having an inner hole, such as a pipe member and a cylinder member used in a semiconductor machine. Therefore, before the workpiece is used, it is usually necessary to measure the surface roughness of the inner hole of the workpiece to determine whether the workpiece meets the requirements for use. At present, most of the measurement of the surface roughness of the inner hole of the workpiece needs to be completed by a large precision measuring machine (such as an optical detecting device), and the cost is high.

In view of this, it is necessary to provide a low-cost workpiece inner surface roughness measuring device.

A workpiece inner hole surface roughness measuring device comprises a base, at least three fixing plates, at least three sets of elastic elements, a rotating shaft and a micrometer. The base includes a bearing surface and at least one side wall defined on the bearing surface. The at least one side wall defines an interior space having a fixed central axis. The at least three fixing plates are placed in the inner space toward the fixed central axis. The at least three sets of elastic elements are used to connect a corresponding one of the fixing plates to the at least one side wall. The force of the at least three sets of elastic elements faces the fixed central axis. The rotating shaft is disposed along the central axis. The micrometer includes a probe and a reader . The probe is fixed to the rotating shaft for sensing the roughness of the surface of the hole in the workpiece and generating a corresponding electrical signal. The reader is electrically connected to the probe for receiving and processing the electrical signal, calculating and displaying a corresponding roughness.

The workpiece inner surface roughness measuring device adopts a simple mechanism to measure the surface roughness of the inner hole of the workpiece, and the cost is low.

100‧‧‧Workpiece inner hole surface roughness measuring device

10‧‧‧ Pedestal

12‧‧‧Disc floor

122‧‧‧ bearing surface

14‧‧‧Cylindrical side wall

142‧‧‧Cylindrical interior space

144‧‧‧Fixed central axis

20‧‧‧ fixed board

22‧‧‧Fixed surface

222‧‧‧ bite

30‧‧‧ Spring

40‧‧‧ shaft

50‧‧‧Micrometer

52‧‧‧Reader

54‧‧‧Connecting plate

56‧‧‧ Probe

200‧‧‧Workpiece

1 is a perspective view of a surface roughness measuring device for a workpiece inner hole according to a preferred embodiment of the present invention.

Referring to FIG. 1, a workpiece inner surface roughness measuring apparatus 100 according to a preferred embodiment of the present invention includes a base 10, three fixing plates 20, three sets of springs 30, a rotating shaft 40, and a micrometer 50.

The base 10 includes a disc-shaped bottom plate 12 and a cylindrical side wall 14. The disc-shaped bottom plate 12 includes a bearing surface 122. The outer diameter of the cylindrical side wall 14 is substantially the same as the diameter of the disc-shaped bottom plate 12. The cylindrical side wall 14 is aligned on the bearing surface 122 perpendicularly to the edge of the disk-shaped bottom plate 12. As such, the disc-shaped bottom plate 12 and the cylindrical side wall 14 together define a cylindrical interior space 142. The cylindrical inner space 142 has a fixed central shaft 144, that is, a central axis of the cylindrical side wall 14. In the present embodiment, the disk-shaped bottom plate 12 is integrally formed with the cylindrical side wall 14.

It is to be understood that the disk-shaped base plate 12 is not limited to the embodiment. In other embodiments, other bottom plates having bearing surfaces 122 may be used in place of the disk-shaped bottom plate 12, such as a square bottom plate. The side wall 14 is not limited to the embodiment. In other embodiments, other sidewalls may be defined that define an interior space 142 having a fixed central axis 144. For example, a plurality of discrete curved side walls. Disc-shaped bottom plate 12 and cylindrical side wall 14 can also be separately formed and assembled into a susceptor 10 by gluing or the like.

The three fixing plates 20 have substantially the same shape and are rectangular plates. Each of the fixing plates 20 includes a fixing surface 22. A bite 222 is formed on the fixing surface 22. Three fixed plates 20 are placed in the interior space 142 (e.g., can be placed upright on the load bearing surface 122). The three fixing faces 22 face the fixed central axis 144.

It can be understood that the shape of the fixing plate 20 is not limited to the embodiment, and may be other shapes such as a disk shape. In other embodiments, a fixed plate having a smooth fixed surface (i.e., without the bite 222) may also be employed.

Three sets of springs 30 are used to connect one of the fixed plates 20 to the cylindrical side walls 14, respectively. In the present embodiment, the fixing plate 20 is suspended by the spring 30 in the internal space 142. Specifically, each set of springs 30 includes a spring 30. Each spring 30 connects the fixed plate 20 and the cylindrical side wall 14 substantially along the diametrical direction of the cylindrical side wall 14, and: (1) when the workpiece 200 has a circular outer contour, the natural length of a spring 30, a fixed plate The sum of the thickness of 20 and the outer diameter of the workpiece 200 is greater than the inner radius of the cylindrical side wall 14; and (2) the natural length of a spring 30, the thickness of a fixed plate 20, and the workpiece when the workpiece 200 has a non-circular outer contour. The sum of half of the longest dimension of the outer contour of 200 is greater than the inner radius of the cylindrical side wall 14. As such, when the workpiece 200 is placed between the fixed plates 20, the springs 30 will be compressed and create a force toward the fixed center 144 to constrain the fixed plate 20 to secure the workpiece 200.

Preferably, the three sets of springs 30 and the three fixing plates 20 are equiangularly distributed on the inner circumference of the cylindrical side wall 14, so that the force balance and fixation of the workpiece 200 are more favorable. It can be understood that the number of the fixing plates 20 and the number of sets of the springs 30 are not limited to the present embodiment. In other embodiments, more fixed plates 20 and more sets of springs 30 may be employed depending on the positioning strength requirements. It will be understood that the spring 30 is not limited to the embodiment. In its In his implementation, other spring elements may be used in place of the spring 30, such as a shrapnel.

The rotating shaft 40 can be a rotor of a motor that is disposed along a fixed central axis 144. In the present embodiment, the rotating shaft is rotated from the lower surface of the disc-shaped bottom plate 12 into the inner space 142 and disposed along the fixed central axis 144.

The micrometer 50 is attached to the rotating shaft 40 and includes a reader 52, a connecting plate 54 and a probe 56. The connecting plate 54 is fixed to the rotating shaft 40, and the reader 52 and the probe 56 are fixed to the connecting plate 54. The probe 56 is used to continuously sense the inner surface roughness of the workpiece 200 and generate corresponding electrical signals. The reader 52 is electrically connected to the probe 56 for receiving and processing the electrical signals generated by the probe 56, calculating and displaying the roughness of the inner bore surface of the workpiece 200. Preferably, the rotating shaft 40 is movable up and down along a fixed central axis. As such, the probe 56 can sense the roughness of the bore of the entire workpiece 200.

It is to be understood that the setting of the micrometer 50 is not limited to the embodiment. As in its embodiment, the probe 56 can be secured to the spindle 40 by other means, such as bundling or gluing, and the reader 52 can be disposed separately from the spindle 40, thus eliminating the web 54.

When the roughness of the inner surface of the workpiece 200 is measured by the workpiece inner surface roughness measuring device 100, firstly, the elastic force of the three sets of springs 30 is overcome, the three fixing plates 20 are opened, and the workpiece 200 is placed in the inner space 142 but the sleeve is placed. It is disposed outside the rotating shaft 40 and the micrometer 50. The three fixing plates 20 are released to restrain the workpiece 200 under the elastic force of the three sets of springs 30, and the workpiece 200 is fixed on the bearing surface 122, and at the same time, the probe 56 is in contact with the inner hole surface of the workpiece. The rotating shaft 40 is activated to drive the probe 56 to rotate, and the roughness of the surface of the inner hole of the workpiece is sensed. After the sensing is completed, the reader 52 calculates and displays the roughness of the surface of the inner hole of the workpiece 200.

The workpiece inner hole surface roughness measuring device 100 realizes the inner hole of the workpiece by a simple mechanism The measurement of surface roughness is low in cost.

It is to be understood by those skilled in the art that the above embodiments are only intended to illustrate the invention, and are not intended to limit the invention, as long as it is within the spirit of the invention Changes and modifications are intended to fall within the scope of the invention.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

100‧‧‧Workpiece inner hole surface roughness measuring device

10‧‧‧ Pedestal

12‧‧‧Disc floor

122‧‧‧ bearing surface

14‧‧‧Cylindrical side wall

142‧‧‧Cylindrical interior space

144‧‧‧Fixed central axis

20‧‧‧ fixed board

22‧‧‧Fixed surface

222‧‧‧ bite

30‧‧‧ Spring

40‧‧‧ shaft

50‧‧‧Micrometer

52‧‧‧Reader

54‧‧‧Connecting plate

56‧‧‧ Probe

200‧‧‧Workpiece

Claims (10)

A workpiece inner hole surface roughness measuring device, comprising: a base comprising a bearing surface and at least one side wall defined on the bearing surface, the at least one side wall defining an inner space having a fixed central axis At least three fixing plates placed in the inner space toward the fixed central axis; at least three sets of elastic elements for connecting a corresponding one of the fixing plates to the at least one side wall, the at least three sets of elastic elements a force directed toward the fixed central axis; a rotating shaft disposed along the central axis; and a micrometer including a probe fixed to the rotating shaft and a reader electrically connected to the probe The probe is used to sense the roughness of the surface of the hole in the workpiece and generate a corresponding electrical signal, the reader is for receiving and processing the electrical signal, calculating and displaying the corresponding roughness. The workpiece inner hole surface roughness measuring device according to claim 1, wherein the at least one side wall is a cylindrical side wall. The workpiece inner hole surface roughness measuring device according to claim 1, wherein the base further includes a bottom plate, and the bottom plate includes the bearing surface. The workpiece inner hole surface roughness measuring device according to claim 3, wherein the bottom plate is integrally formed with the at least one side wall. The workpiece inner surface roughness measuring apparatus according to claim 1, wherein the fixing plate includes a fixing surface facing the fixed central axis, and the fixing surface is formed with a bite. The workpiece inner hole surface roughness measuring device according to claim 1, wherein the elastic member is a spring or a spring piece. The workpiece inner hole surface roughness measuring device according to claim 1, wherein each set of elastic members includes a spring. The workpiece inner hole surface roughness measuring device according to claim 1, wherein the at least three sets of elastic members and the at least three fixing plates are equiangularly distributed on an inner circumference of the side wall. The workpiece inner hole surface roughness measuring device according to claim 1, wherein the micrometer further includes a connecting plate, the connecting plate is fixed on the rotating shaft, the probe and the reading The watch is fixed to the connecting plate. The workpiece inner surface roughness measuring device according to claim 1, wherein the probe is fixed to the rotating shaft by binding or gluing.