201100750 六、發明說明： 【發明所屬之技術領域】 [0001] 本發明涉及一種工件内孔表面粗糙度測量裝置。 【先前技術】 [0002] 當前，工業生產對具有内孔的工件（如半導體機台中< 的管件及筒件）的内孔表面粗糙度要求越來越南°因此 工件使用前通常需經過工件内孔表面粗糙度測量’以 斷工件是否符合使用要求。目前，上件内孔表面粗链度 的測量大部分需通過大型精密測量機台完成（如光學檢'則 設備等），成本較高。 【發明内容】 [0003] 有鑒於此，有必要提供一種k本低的工件内孔表面粗糙 度測量裝置。 [0004] 一種工件内孔表面粗糙度測量裝置，其包括一個基座、 至少三個固定板、至少三組彈性元件、一個轉轴及一個 測微表。所述基座包括一個承載面及至少一個設立於所 述承載面上的側壁。所述至少一個侧壁界定一個具有一 個固定中心軸的内部空間。所述至少三個固定板朝向所 述固定中心軸放置於所述内部空間内。所述至少三組彈 性元件用於連接對應的—個固定板至所述至少一個側壁 上。所述至少三組彈性元件的作用力朝向所述固定中心 轴。所述轉軸沿所述中心軸設置。所述測微表包括一個 探頭及一個讀書器。所述探頭固定於所述轉抽’用於感 測工件内孔表面的粗糙度並產生對應的電訊號°所述讀 數器與所述探頭電性連接，用於接收並處理所述電訊號 098121739 表單編號A0101 第4真/共12頁 0982036948-0 201100750 、計算並顯示對應的粗糙度。 [0005] [0006] [0007] Ο [0008] 〇 所述工件内孔表面粗縫度測量裝置採用簡單的機構實現 工件内孔表面粗糙度的測量，成本低。 【實施方式】 請參閱圖1，本發明較佳實施方式的工件内孔表面粗糙度 測量裝置100包括一個基座10、三個固定板20、三組彈簧 30、一個轉軸40及一個測微表50。 基座10包括一個圓盤狀底板12及一個圓筒狀侧壁14。圓 盤狀底板12包括一個承載面122 »圓筒狀側壁14的外徑與 圓盤狀底板12的直徑基本相，同。圓筒狀侧壁14對齊圓盤 狀底板12的邊緣垂直設立於承載面122上。如此，圓盤狀 底板12與圓筒狀侧壁14共同界定一個圆筒狀内部空間142 。圓筒狀内部空間142具有一個固定中心軸144，即圓筒 狀側壁14的中心轴。本實施方式中，圓盤狀底板12與圓 筒狀側壁14一體成型。 ；、j :.卜 可以理解’圓盤狀底板12並不限於本實施方式。在其他 實施方式中’可採用其他具有承載面122的底板替換圓盤 狀底板12，如，方形底板。側壁14也不限於本實施方式 。在其他實施方式中’可採用其他可以界定一個具有一 個固定中心轴144的内部空間142的側壁。如，多個不連 續的弧形側壁。圓盤狀底板12與圓筒狀側壁14也可以分 離成型，再通過膠合等方式組裝成基座1 〇。 i 二個固定板20形狀基本相同，為長方形板。每個固定板 20包括一個固定面22。固定面22上形成有咬紋222。三 098121739 表單編號A0101 第5頁/共12 Ϊ 0982036948-0 [0009] 201100750 個固定板20放置於内部空間142内（如可直立放置於承載 面122上）。三個固定面22朝向固定中心軸144。 [0010] 可以理解，固定板20的形狀並不限於本實施方式，可為 其他形狀，如圓盤狀。在其他實施方式中，還可採用具 有平滑的固定面（即沒有咬紋222)的固定板。 [0011] 三組彈簧30分別用於連接一個固定板20至圓筒狀側壁14 。本實施方式中，固定板20由彈簧30懸掛於内部空間142 内。具體地，每組彈簧30包括有一個彈簧30。每個彈簧· 30基本沿圓筒狀側壁14的直徑方向連接固定板20與圓筒 0 狀側壁14，且：（1)當工件200具有圓形外輪廓時，一個 彈簧30的自然長度、一個固定板20的厚度及工件200的外 徑之和大於圓筒狀側壁14的内半徑；及（2)當工件200具 有非圓外輪廓時，一個彈簧30的自然長度、一個固定板 20的厚度及工件200外輪廓的最長尺寸的一半之和大於圓 筒狀侧壁14的内半徑。如此，當工件200放置於固定板20 之間時，彈簧30將被壓縮，並產生朝向固定中心144的作 用力，以約束固定板20固定工件200。 u [0012] 優選地，三組彈簧30及三個固定板20等角分佈於圓筒狀 侧壁14的内圓周上，如此，更有利於工件200的受力平衡 與固定。可以理解，固定板20的個數與彈簧30的組數不 限於本實施方式。在其他實施方式中，視定位強度的需 求，可以採用更多個的固定板20及更多組的彈簧30。可 以理解，彈簧30也不限於本實施方式。在其他實施方式 中，可採用其他的彈性元件替換彈簧30，如，彈片。 098121739 表單編號A0101 第6頁/共12頁 0982036948-0 201100750 [0013] [0014] Ο [0015] [0016]Ο 轉軸40可以為馬達的轉子，其沿固定中心軸設置。本 實施方式中，轉軸自圓盤狀底板12下面轉動伸入内部空 間142並沿固定中心軸丨44設置。 所述測微表50附設於轉軸4〇上，其包括一個讀數器52， ζ個連接板54及一個探頭56。連接板54固定於轉轴4〇上 ，讀數器52和探頭56固定於連接板54上。探頭56用於連 續感測工件200的内孔表面粗糙度並產生對應的電訊號。 讀數器52與探頭56電性連接，用於接收並處理探頭56產 生的電sfl说、计真並顯示工件2.0.0.的._内孔表面的粗縫度。 優選地’轉軸40可以沿固定中心轴上下移動。如此，探 頦5 6可以感測整個工件2 〇 〇内孔的粗糙度:。 町以理解，測微表50的設置並不限於本實施方式。如在 其實施方式中’探頭56可通過其他手段固定於轉轴40上 ，如捆綁或膠合，而讀數器52可與轉轴40分離設置，如 此可省去連接板5 4。 利用工件内孔表面粗糙度測量裝:、置10 〇測量工件2 0 0内孔 表面的粗糙度時’首先需克服三組彈簧30的彈力，撐開 三個固定板20，將工件2〇〇放置於内部空間142内但套設 於轉軸40及測微表50外。釋放三個固定板20，使其在三 組彈簧30的彈力作用下約束工件2〇〇，將工件200固定於 承載面122上’同時，探頭56與工件内孔表面接觸。啟動 轉轴40，使其帶動探頭56轉動，感測工件内孔表面的粗 縫度，感測完畢後，讀.數器52計算並顯示工件2〇〇内孔表 面的粗糙度。 098121739 表單編號A0101 0982036948-0 201100750 剛m表面粗糙度測讀£1轉用簡單的機構實現工 件内孔表面粗糙度的測量，成本低。 剛本技術領域的普通技術人員應當認㈣，以上的實施方 式僅是用來說明本發明，而並非用作為對本發明的限定 ，只要在本發明的實質精神_之内，對以上實施例所 作的適當改變和變化都落在本發明要求保護的之内 0 [_、综上所述，本發明確已符合發明專利之要件，遂依法提 出專利申請。惟，以上所述者僅為本發明之較佳實施# 0 式，自不能以此限制本案之巾請專利範圍。舉凡熟悉本 案技藝之人士援依本發明之精神所作之等效修飾或變化 ’例如該散射部可包括由複數第—條形凹槽圍成且分佈 規律的格子圖案及沿該鏡片光轴向外呈放射螺旋狀的複 數第二條形凹槽組成的螺旋圖案等，皆應涵蓋於以下申 請專利範圍内》 【圖式簡單說明】 圆m為本發_佳魏方式“㈣孔表面減υ 置的立體示意圖。 098121739 【主要元件符號說明】 工件内孔表面 100 咬紋 222 粗糙度測量裝 置 基座 10 \~ni~ 30 圓盤狀底板 12 轉軸 40 承載面 122 測微表 50 表單編號Α0101 第8頁/共12頁 0982036948-0 圓筒狀側壁 14 讀數器 52 圓筒狀内部空 間 142 連接板 54 固定中心軸 144 探頭 56 固定板 20 工件 200 固定面 22 201100750201100750 VI. Description of the Invention: [Technical Field of the Invention] [0001] The present invention relates to a device for measuring the surface roughness of a workpiece inner hole. [Prior Art] [0002] At present, industrial production requires more and more inner surface roughness of a workpiece having an inner hole (such as a tube and a cylinder of a semiconductor machine). Therefore, the workpiece usually needs to pass through the workpiece before use. Hole surface roughness measurement 'to break the workpiece to meet the requirements of use. At present, most of the measurement of the thick chain surface of the inner hole of the upper part needs to be completed by a large precision measuring machine (such as optical inspection, etc.), and the cost is high. SUMMARY OF THE INVENTION [0003] In view of the above, it is necessary to provide a workpiece inner surface roughness measuring apparatus having a low k. [0004] A workpiece inner hole surface roughness measuring device comprising a base, at least three fixing plates, at least three sets of elastic elements, a rotating shaft and a micrometer. The base includes a bearing surface and at least one side wall defined on the bearing surface. The at least one side wall defines an interior space having a fixed central axis. The at least three fixing plates are placed in the inner space toward the fixed central axis. The at least three sets of elastic elements are used to connect the corresponding one of the fixing plates to the at least one side wall. The forces of the at least three sets of elastic elements are directed toward the fixed central axis. The rotating shaft is disposed along the central axis. The micrometer includes a probe and a reading device. The probe is fixed to the pumping 'for sensing the roughness of the surface of the workpiece bore and generating a corresponding electrical signal. The reader is electrically connected to the probe for receiving and processing the electrical signal 098121739 Form No. A0101 4th True/Total 12 pages 0982036948-0 201100750 Calculate and display the corresponding roughness. [0007] [0008] The apparatus for measuring the thickness of the inner hole surface of the workpiece adopts a simple mechanism to measure the surface roughness of the inner hole of the workpiece, and the cost is low. [Embodiment] Referring to Figure 1, a workpiece inner surface roughness measuring apparatus 100 according to a preferred embodiment of the present invention includes a base 10, three fixing plates 20, three sets of springs 30, a rotating shaft 40 and a micrometer. 50. The base 10 includes a disc-shaped bottom plate 12 and a cylindrical side wall 14. The disk-shaped bottom plate 12 includes a bearing surface 122. The outer diameter of the cylindrical side wall 14 is substantially the same as the diameter of the disk-shaped bottom plate 12. The cylindrical side wall 14 is aligned with the edge of the disk-shaped bottom plate 12 to be vertically formed on the bearing surface 122. Thus, the disc-shaped bottom plate 12 and the cylindrical side wall 14 together define a cylindrical inner space 142. The cylindrical inner space 142 has a fixed central shaft 144, that is, a central axis of the cylindrical side wall 14. In the present embodiment, the disk-shaped bottom plate 12 is integrally formed with the cylindrical side wall 14. ;, j:. Bu It is understood that the disc-shaped bottom plate 12 is not limited to the embodiment. In other embodiments, other discs having a bearing surface 122 may be used in place of the disc-shaped bottom plate 12, such as a square bottom plate. The side wall 14 is also not limited to the embodiment. Other embodiments may employ other sidewalls that may define an interior space 142 having a fixed central axis 144. For example, a plurality of discrete curved side walls. The disc-shaped bottom plate 12 and the cylindrical side wall 14 may be separately formed and assembled into a susceptor 1 by gluing or the like. i The two fixing plates 20 have substantially the same shape and are rectangular plates. Each of the fixing plates 20 includes a fixing surface 22. A bite 222 is formed on the fixing surface 22. Three 098121739 Form No. A0101 Page 5 of 12 820 0982036948-0 [0009] The 201100750 fixing plate 20 is placed in the internal space 142 (if it can be placed upright on the carrying surface 122). The three fixing faces 22 face the fixed central axis 144. [0010] It can be understood that the shape of the fixing plate 20 is not limited to the embodiment, and may be other shapes such as a disk shape. In other embodiments, a fixed plate having a smooth fixing surface (i.e., without the biting 222) may also be employed. [0011] Three sets of springs 30 are used to connect one fixing plate 20 to the cylindrical side wall 14, respectively. In the present embodiment, the fixing plate 20 is suspended by the spring 30 in the internal space 142. Specifically, each set of springs 30 includes a spring 30. Each spring 30 integrally connects the fixed plate 20 and the cylindrical 0-shaped side wall 14 in the diametrical direction of the cylindrical side wall 14, and: (1) when the workpiece 200 has a circular outer contour, the natural length of one spring 30, one The sum of the thickness of the fixing plate 20 and the outer diameter of the workpiece 200 is greater than the inner radius of the cylindrical side wall 14; and (2) the natural length of one spring 30, the thickness of one fixing plate 20 when the workpiece 200 has a non-circular outer contour And the sum of half of the longest dimension of the outer contour of the workpiece 200 is greater than the inner radius of the cylindrical sidewall 14. As such, when the workpiece 200 is placed between the fixed plates 20, the springs 30 will be compressed and create a force toward the fixed center 144 to constrain the fixed plate 20 to secure the workpiece 200. [0012] Preferably, the three sets of springs 30 and the three fixing plates 20 are equiangularly distributed on the inner circumference of the cylindrical side wall 14, so that the force balance and fixing of the workpiece 200 are more favorable. It is to be understood that the number of the fixing plates 20 and the number of sets of the springs 30 are not limited to the embodiment. In other embodiments, more of the fixed plate 20 and more sets of springs 30 may be employed depending on the positioning strength requirements. It can be understood that the spring 30 is not limited to the embodiment. In other embodiments, other spring elements may be substituted for the spring 30, such as a spring. 098121739 Form No. A0101 Page 6 of 12 0982036948-0 201100750 [0014] [0016] [0016] The rotating shaft 40 may be a rotor of a motor that is disposed along a fixed central axis. In the present embodiment, the rotating shaft is rotated from the lower surface of the disc-shaped bottom plate 12 into the inner space 142 and disposed along the fixed central axis 44. The micrometer 50 is attached to the rotating shaft 4, and includes a reader 52, a connecting plate 54 and a probe 56. The connecting plate 54 is fixed to the rotating shaft 4, and the reader 52 and the probe 56 are fixed to the connecting plate 54. The probe 56 is used to continuously sense the inner surface roughness of the workpiece 200 and generate corresponding electrical signals. The reader 52 is electrically connected to the probe 56 for receiving and processing the electrical sfl generated by the probe 56, counting and displaying the roughness of the ._ bore surface of the workpiece 2.0.0. Preferably, the 'rotary shaft 40' is movable up and down along a fixed central axis. Thus, the probe 5 6 can sense the roughness of the inner hole of the entire workpiece 2 : ::. To understand, the setting of the micrometer 50 is not limited to the present embodiment. As in its embodiment, the probe 56 can be secured to the spindle 40 by other means, such as bundling or gluing, and the reader 52 can be disposed separately from the spindle 40, thereby eliminating the attachment plate 54. Using the surface roughness measurement of the workpiece inner hole: When setting 10 〇 to measure the roughness of the surface of the workpiece 200 hole, 'first need to overcome the elastic force of the three sets of springs 30, open the three fixed plates 20, and the workpiece 2〇〇 It is placed in the inner space 142 but is sleeved outside the rotating shaft 40 and the micrometer 50. The three fixing plates 20 are released so that the workpiece 2 is restrained by the elastic force of the three sets of springs 30, and the workpiece 200 is fixed to the bearing surface 122. Meanwhile, the probe 56 is in contact with the inner surface of the workpiece. The rotating shaft 40 is activated to drive the probe 56 to rotate, and the roughness of the surface of the inner hole of the workpiece is sensed. After the sensing is completed, the reading device 52 calculates and displays the roughness of the surface of the inner hole of the workpiece 2 . 098121739 Form No. A0101 0982036948-0 201100750 Just m surface roughness reading £1 conversion with a simple mechanism to achieve the measurement of the surface roughness of the workpiece hole, the cost is low. It should be understood by those skilled in the art that the above embodiments are merely illustrative of the present invention and are not intended to limit the present invention as long as it is within the spirit of the present invention. Appropriate changes and changes fall within the scope of the claimed invention. [_ In summary, the present invention has indeed met the requirements of the invention patent, and the patent application is filed according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations in accordance with the spirit of the invention may be employed by those skilled in the art of the present invention. For example, the scattering portion may include a lattice pattern surrounded by a plurality of strip-shaped grooves and distributed along the optical axis of the lens. A spiral pattern composed of a plurality of second strip-shaped grooves which are spirally spiraled, etc., should be covered in the following patent application. [Simple description of the drawing] Circle m is the hair _ Jia Wei method "(4) Hole surface reduction 098121739 [Description of main component symbols] Workpiece hole surface 100 Bite 222 Roughness measuring device base 10 \~ni~ 30 Disc-shaped bottom plate 12 Rotary shaft 40 Bearing surface 122 Micrometer 50 Form No. 1010101 No. 8 Page / Total 12 pages 0982036948-0 Cylindrical side wall 14 Reader 52 Cylindrical internal space 142 Connecting plate 54 Fixing central shaft 144 Probe 56 Fixing plate 20 Work piece 200 Fixing surface 22 201100750
G 098121739 表單編號A0101 第9頁/共12頁 0982036948-0G 098121739 Form No. A0101 Page 9 of 12 0982036948-0