TWI426149B - Coated articles and method for making the same - Google Patents

Description

Coating member and manufacturing method thereof

The invention relates to a coated part and a manufacturing method thereof.

Metal materials are more susceptible to corrosion in air. In order to improve the corrosion resistance of the metal material, a surface of the metal material may be covered with a film having a high corrosion resistance. Conventional methods for forming a corrosion-resistant film layer on the surface of a metal material include electroplating, electroless plating, baking varnish, and vacuum coating (PVD). However, the environmental pollution caused by electroplating, electroless plating and baking varnish is very large and will gradually be eliminated. However, the film layer formed by vacuum coating has micropores, which has an adverse effect on the improvement of corrosion resistance.

At present, a commonly used method for improving the corrosion resistance of a PVD film layer is to prepare a multilayer film by repeatedly stacking the film layers to shield the micropores between the film layers, thereby avoiding the formation of micropores penetrating the surface of the substrate and the film layer, thereby eliminating The micropores of the film layer have an adverse effect on corrosion resistance. However, the process of this method is very complicated, requires high equipment, is costly, and is difficult to apply in industry.

In view of this, it is necessary to provide a corrosion-resistant coating member.

In addition, it is also necessary to provide a method for producing the above-mentioned coated member which is simple in process and low in cost.

A coating member comprising a substrate and a film layer formed on the substrate, the film layer being a magnetron sputtering film layer, the film layer being formed with a plurality of micropores filled with sealing particles.

A method for fabricating a coating member, comprising the steps of: providing a substrate, forming a film layer on the surface of the substrate by magnetron sputtering, sealing the film layer with a hole liquid, and sealing the hole The sealing liquid contains 40-60 g/L of NaCOOCH ₃ , 10-20 g/L of HCOOCH ₃ , 1-2 g/L of NH ₃ ‧H ₂ O, 2-8 g/L of NaSO ₄ , 1-5 g/ HNO _{3 of} L, and 2-6 g/L of NaTiF ₄ .

The coated member produced by the above method can well reduce the influence of the micropores generated on the surface of the film on the corrosion resistance of the substrate of the coated member, and isolate the substrate of the coated member from the outside, thereby improving the corrosion resistance of the coated member.

Referring to FIG. 1, a coated article 100 according to a preferred embodiment of the present invention includes a substrate 10 and a film layer 20 formed on the surface of the substrate 10.

The base 10 may be made of a metal material such as an aluminum alloy or a magnesium alloy, or may be made of a non-metal material such as ceramic or glass.

The film layer 20 is an Al-Ti-N layer which is formed by magnetron sputtering. The film layer 20 has a thickness of 0.5 to 8 μm.

The film layer 20 is formed with a plurality of micropores 201. The plurality of micropores 201 are filled with the sealing particles 30. The plugged particles 30 are formed by immersing the film layer 20 in a liquid for a certain period of time and then drying it. The plugging liquid contains 40-60 g/L of NaCOOCH ₃ , 10-20 g/L of HCOOCH ₃ , 1-2 g/L of NH ₃ ‧H ₂ O, 2-8 g/L of NaSO ₄ , 1-5 g /L of HNO ₃ , and 2-6 g/L of NaTiF ₄ .

Referring to FIG. 1 and FIG. 2, a method for fabricating a coated member 100 according to a preferred embodiment of the present invention includes the following steps:

A substrate 10 is provided. The material of the base 10 may be a metal material such as an aluminum alloy or a magnesium alloy, or may be a non-metal material such as ceramic or glass.

The substrate 10 is subjected to surface pretreatment. The surface pretreatment may include conventional chemical degreasing, wax removal, pickling, ultrasonic cleaning, and drying of the substrate 10.

The surface of the substrate 10 subjected to the above treatment is subjected to plasma cleaning such as argon gas to further remove oil stain on the surface of the substrate 10 to improve the bonding force between the surface of the substrate 10 and the subsequent coating layer. The specific operation and process parameters of the plasma cleaning may be: placing the substrate 10 in a vacuum chamber of a magnetron sputtering coating machine (not shown), and vacuuming the vacuum chamber to 8.0×10 ^-3 Pa, Argon gas (purity: 99.999%) with a flow rate of 50-400 sccm (standard state ML/min), a bias of -300 to -600 V is applied to the substrate 10, and the surface of the substrate 10 is plasma-cleaned for 5-10 min. .

After the plasma cleaning is completed, a power source of an aluminum-titanium alloy target (the mass percentage of aluminum in the aluminum-titanium alloy target is 20 to 60%) is turned on, and the power of the power source can be set to 4-14 kW. The argon flow rate is adjusted to 50-300 sccm, preferably 150 sccm; and nitrogen gas is passed through at a flow rate of 10-150 sccm; and a bias of -100 to -350 V is applied to the aluminum-titanium alloy target to deposit the film layer 20. The time for depositing the film layer 20 is 20-30 min. After the deposition is completed, the power supply and the negative bias of the aluminum-titanium alloy target are turned off, and the introduction of argon gas and nitrogen gas is stopped. The film layer 20 is an Al-Ti-N layer having a thickness of 0.5 to 8 μm. The film layer 20 is formed with a plurality of micropores 201.

The micropores 201 of the film layer 20 formed on the surface of the substrate 10 are subjected to immersion sealing treatment using a hole solution. The plugging liquid contains 40-60 g/L of NaCOOCH ₃ , 10-20 g/L of HCOOCH ₃ , 1-2 g/L of NH ₃ ‧H ₂ O, 2-8 g/L of NaSO ₄ , 1-5 g /L of HNO ₃ , and 2-6 g/L of NaTiF ₄ . The plugging solution has a pH of 3-7. The temperature of the sealing liquid is kept at 20 to 30 ° C when sealing. The time for immersion sealing is 5~15s. During the sealing process, the sealing liquid is filled into the micropores 201 of the film layer 20; after the sealing is completed, the film layer 20 is rinsed and dried by deionized water, and after being dried, the filling into the micropores 201 is performed. The plugging liquid forms solidified plugging particles 30. The plugging particles 30 can block the plurality of micropores 201 of the film layer 20, thereby avoiding corrosion of the substrate 10 by contacting the plurality of micropores 201 with the outside, thereby improving the corrosion resistance of the coated member 100.

The coated member 100 prepared by the above method was placed in a salt spray (3.5% NaCl, 25 ° C) test chamber for testing, and placed in a non-sealed coated coating for comparison. The coated member which was not subjected to the sealing treatment was etched for 8 hours, and the coated member 100 subjected to the above sealing treatment was etched for 60 hours.

100‧‧‧coated parts

10‧‧‧ base

20‧‧‧ film layer

201‧‧‧Micropores

30‧‧‧Seal particle

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view showing the structure of a coated member according to a preferred embodiment of the present invention.

2 is a flow chart showing a method of fabricating a coated member according to a preferred embodiment of the present invention.

100‧‧‧coated parts

10‧‧‧ base

20‧‧‧ film layer

201‧‧‧Micropores

30‧‧‧Seal particle

Claims (9)

A coating member comprising a substrate and a film layer formed on the substrate, wherein the film layer is a magnetron sputtering film layer, the film layer is formed with a plurality of micropores, and the plurality of micropores are filled with Sealed particles. The coated article according to claim 1, wherein the plugged particles are immersed in the film containing NaCOOCH ₃ , HCOOCH ₃ , NH ₃ ‧H ₂ O, NaSO ₄ , HNO ₃ and NaTiF ₄ It is formed in a sealing liquid and then dried. The coated article of claim 1, wherein the film layer is an Al-Ti-N film. A method of fabricating a coated article according to any one of claims 1-3, comprising the steps of:
Providing a substrate;
Forming a film layer on the surface of the substrate by magnetron sputtering;
The film layer was subjected to an immersion sealing treatment using a hole solution. The method for producing a coated member according to claim 4, wherein the sealing liquid contains 40-60 g/L of NaCOOCH ₃ , 10-20 g/L of HCOOCH ₃ , and 1-2 g/L of NH ₃ ‧ H ₂ O, 2-8 g/L of NaSO ₄ , 1-5 g/L of HNO ₃ , and 2-6 g/L of NaTiF ₄ . The method for producing a coated member according to claim 5, wherein the sealing liquid has a pH of 3-7. The method for fabricating a coated member according to claim 4, wherein the sealing treatment time is 5-15 s. The method for producing a coated member according to claim 4, wherein the temperature of the plugging liquid is 20-30 °C. The method of fabricating a coated article according to claim 4, wherein the film layer is an Al-Ti-N film.