TWI472637B - Surface treatment for aluminum alloy and housing manufactured by the aluminum alloy - Google Patents

Surface treatment for aluminum alloy and housing manufactured by the aluminum alloy Download PDF

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TWI472637B
TWI472637B TW99131192A TW99131192A TWI472637B TW I472637 B TWI472637 B TW I472637B TW 99131192 A TW99131192 A TW 99131192A TW 99131192 A TW99131192 A TW 99131192A TW I472637 B TWI472637 B TW I472637B
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aluminum alloy
aluminum
surface treatment
treatment method
alloy substrate
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TW201211296A (en
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Hsin Pei Chang
wen rong Chen
Huan Wu Chiang
Cheng Shi Chen
Man-Xi Zhang
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Hon Hai Prec Ind Co Ltd
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鋁合金的表面處理方法及由鋁合金製得的殼體Surface treatment method of aluminum alloy and shell made of aluminum alloy

本發明涉及一種鋁合金的表面處理方法及由鋁合金製得的殼體。The invention relates to a surface treatment method for an aluminum alloy and a casing made of an aluminum alloy.

鋁合金目前被廣泛應用於航空、航天、汽車及微電子等工業領域。但鋁合金的標準電極電位很低,耐腐蝕差,暴露於自然環境中會引起表面快速腐蝕。Aluminum alloys are currently widely used in aerospace, aerospace, automotive and microelectronics industries. However, the standard electrode potential of aluminum alloy is very low, and the corrosion resistance is poor. Exposure to the natural environment causes rapid surface corrosion.

提高鋁合金耐腐蝕性的方法通常為在其表面形成保護性的塗層。傳統的陽極氧化、電沉積、化學轉化膜技術及電鍍等鋁合金的表面處理方法存在生產工藝複雜、效率低、環境污染嚴重等缺點。A method of improving the corrosion resistance of an aluminum alloy is usually to form a protective coating on the surface thereof. Conventional anodizing, electrodeposition, chemical conversion film technology and surface treatment methods of aluminum alloys such as electroplating have the disadvantages of complicated production process, low efficiency and serious environmental pollution.

真空鍍膜(PVD)為一清潔的成膜技術。然而,由於鋁合金的標準電極電位很低,且PVD塗層本身不可避免的會存在微小的孔隙,因此形成於鋁合金表面的PVD塗層容易發生電化學腐蝕,導致該PVD塗層的耐腐蝕性能降低,對鋁合金的耐腐蝕能力的提高有限。Vacuum coating (PVD) is a clean film forming technique. However, since the standard electrode potential of the aluminum alloy is very low, and the PVD coating itself inevitably has minute pores, the PVD coating formed on the surface of the aluminum alloy is prone to electrochemical corrosion, resulting in corrosion resistance of the PVD coating. The performance is reduced, and the improvement of the corrosion resistance of the aluminum alloy is limited.

鑒於此,提供一種可有效提高鋁合金的耐腐蝕性能的表面處理方法。In view of this, a surface treatment method capable of effectively improving the corrosion resistance of an aluminum alloy is provided.

另外,還提供一種由上述鋁合金製得的殼體。Further, a casing made of the above aluminum alloy is also provided.

一種鋁合金的表面處理方法,其包括如下步驟:A surface treatment method for an aluminum alloy, comprising the steps of:

提供鋁合金基體;Providing an aluminum alloy substrate;

於該鋁合金基體的表面磁控濺射鋁層;Magnetron sputtering an aluminum layer on the surface of the aluminum alloy substrate;

於該鋁層上注入氧離子,形成主要含有Al2 O3 及AlO固溶相的離子注入膜。Oxygen ions are implanted into the aluminum layer to form an ion-implanted film mainly containing Al 2 O 3 and AlO solid solution phases.

一種由鋁合金製得的殼體,該殼體包括鋁合金基體、依次形成於該鋁合金基體表面的鋁層及離子注入膜,所述離子注入膜中主要含有Al2 O3 及AlO固溶相。A casing made of an aluminum alloy, the casing comprising an aluminum alloy substrate, an aluminum layer sequentially formed on a surface of the aluminum alloy substrate, and an ion implantation film, wherein the ion implantation film mainly contains Al 2 O 3 and AlO solid solution phase.

本發明鋁合金的表面處理方法在鋁合金基體上磁控濺射形成鋁層,再於該鋁層上形成離子注入膜。該鋁層與離子注入膜組成的複合膜層顯著地提高了該鋁合金基體的耐腐蝕性,且該表面處理工藝簡單、幾乎無環境污染。The surface treatment method of the aluminum alloy of the present invention is formed by magnetron sputtering on an aluminum alloy substrate to form an aluminum layer, and an ion implantation film is formed on the aluminum layer. The composite film layer composed of the aluminum layer and the ion implantation film remarkably improves the corrosion resistance of the aluminum alloy substrate, and the surface treatment process is simple and has almost no environmental pollution.

請同時參閱圖1與圖2,本發明一較佳實施例的鋁合金的表面處理方法包括如下步驟:Referring to FIG. 1 and FIG. 2 simultaneously, a surface treatment method for an aluminum alloy according to a preferred embodiment of the present invention includes the following steps:

S101:提供鋁合金基體11。S101: An aluminum alloy substrate 11 is provided.

該鋁合金基體11可藉由沖壓成型得到。The aluminum alloy base 11 can be obtained by press molding.

S102:對該鋁合金基體11進行前處理。該前處理包括:S102: pretreating the aluminum alloy substrate 11. The pre-processing includes:

對鋁合金基體11進行拋光處理,以去除該鋁合金基體11表面的氧化膜。拋光後該鋁合金基體11的表面粗糙度Rz<1.2μm。The aluminum alloy substrate 11 is subjected to a polishing treatment to remove an oxide film on the surface of the aluminum alloy substrate 11. The surface roughness Rz of the aluminum alloy substrate 11 after polishing was < 1.2 μm.

將拋光處理後的鋁合金基體11依次置於去離子水及純度大於99.9%的丙酮中進行超聲波清洗,以去除表面的油污。清洗後將該鋁合金基體11乾燥備用。The polished aluminum alloy substrate 11 is sequentially placed in deionized water and acetone having a purity greater than 99.9% for ultrasonic cleaning to remove oil stains on the surface. After the cleaning, the aluminum alloy substrate 11 is dried for use.

S103:於該鋁合金基體11表面磁控濺射形成鋁層13。S103: Magnetron sputtering is performed on the surface of the aluminum alloy substrate 11 to form an aluminum layer 13.

形成鋁層13的具體操作方法及工藝參數為:將所述鋁合金基體11置於真空鍍膜機(圖未示)的真空室內,抽真空至真空度為8.0×10-3 ~5.0×10-2 Pa,於鋁合金基體11上施加-50~-300V的偏壓,加熱該真空室至50~180℃(即濺射溫度為50~180℃),通入流量為100~300sccm(標準狀態毫升/分鐘)的氬氣(工作氣體),開啟安裝於所述鍍膜機的真空室中的鋁靶的電源,沉積該鋁層13。沉積該鋁層13的時間為30~90min。其中,氬氣的純度為99.999%。The specific operation method and process parameters for forming the aluminum layer 13 are: placing the aluminum alloy substrate 11 in a vacuum chamber of a vacuum coating machine (not shown), and evacuating to a vacuum of 8.0×10 -3 to 5.0×10 - 2 Pa, applying a bias voltage of -50 to -300 V on the aluminum alloy substrate 11, heating the vacuum chamber to 50 to 180 ° C (ie, a sputtering temperature of 50 to 180 ° C), and a flow rate of 100 to 300 sccm (standard state) Argon gas (working gas) in milliliters per minute, the power source of the aluminum target installed in the vacuum chamber of the coater is turned on, and the aluminum layer 13 is deposited. The time for depositing the aluminum layer 13 is 30 to 90 minutes. Among them, the purity of argon gas is 99.999%.

所述的真空鍍膜機除可用以進行磁控濺射鍍膜處理外,還可用以多弧離子鍍膜、離子注入以及電漿清洗等表面處理。The vacuum coating machine can be used for surface treatment such as multi-arc ion plating, ion implantation and plasma cleaning, in addition to magnetron sputtering coating treatment.

由於鋁的電極電位與鋁合金相當,所述鋁層13與鋁合金基體11之間不易發生電偶腐蝕;此外,所述鋁層13的形成還可避免鋁合金基體11與腐蝕性介質直接接觸而發生第二相腐蝕,因此,鋁層13的形成可顯著提高所述鋁合金基體11的耐腐蝕性。Since the electrode potential of aluminum is equivalent to that of the aluminum alloy, galvanic corrosion is less likely to occur between the aluminum layer 13 and the aluminum alloy substrate 11; in addition, the formation of the aluminum layer 13 can also prevent the aluminum alloy substrate 11 from directly contacting the corrosive medium. The second phase corrosion occurs, and therefore, the formation of the aluminum layer 13 can significantly improve the corrosion resistance of the aluminum alloy substrate 11.

所述第二相腐蝕為:當鋁合金直接處於腐蝕性介質中時,鋁合金中的除鋁相外的其他雜質相等第二相粒子與鋁相之間容易產生電位差而發生局部的電化學腐蝕。The second phase corrosion is: when the aluminum alloy is directly in the corrosive medium, the impurities other than the aluminum phase in the aluminum alloy are equal, and the potential difference between the second phase particles and the aluminum phase is likely to occur and local electrochemical corrosion occurs. .

S104:採用離子注入工藝,於所述鋁層13表面注入氧離子,形成離子注入膜15。S104: Oxygen ions are implanted into the surface of the aluminum layer 13 by an ion implantation process to form an ion implantation film 15.

所述的氧離子注入過程為:將鍍覆有鋁層13的鋁合金基體11置於所述真空鍍膜機的真空室中,真空鍍膜機的離子源將氧氣進行電離,並經高壓電場加速成具有幾萬甚至幾百萬電子伏特能量的離子束,射入鋁層13的表面,與鋁層13表層中及其表面的原子或分子發生一系列的物理、化學反應,最終於該鋁層13的表面沉積形成主要含有Al2 O3 及AlO固溶相的離子注入膜15。由於金屬鋁的氧化體積比係數大於1,形成的Al2 O3 使離子注入膜15具有較好的緻密性,腐蝕性物質較難以經由該離子注入膜15進入到鋁合金基體11的表面,使得鋁合金基體11的耐腐蝕性增強。The oxygen ion implantation process is: placing an aluminum alloy substrate 11 coated with an aluminum layer 13 in a vacuum chamber of the vacuum coating machine, the ion source of the vacuum coating machine ionizing oxygen and accelerating by a high voltage electric field. An ion beam having tens of thousands or even millions of electron volts of energy is incident on the surface of the aluminum layer 13 to undergo a series of physical and chemical reactions with atoms or molecules in the surface layer of the aluminum layer 13 and finally on the aluminum layer 13 The surface deposition forms an ion implantation film 15 mainly containing Al 2 O 3 and AlO solid solution phases. Since the oxidized volume ratio coefficient of the metal aluminum is greater than 1, the formed Al 2 O 3 makes the ion implantation film 15 have better compactness, and it is difficult for the corrosive substance to enter the surface of the aluminum alloy substrate 11 via the ion implantation film 15, so that The corrosion resistance of the aluminum alloy base 11 is enhanced.

本實施例中注入所述氧離子的參數為:真空室的真空度為3.0×10-8 Pa,氧氣純度為99.99%,離子源功率為0.5~5kw,工作氣壓為0.8~8.0Pa,注入時間為30~120min。The parameters for injecting the oxygen ions in the embodiment are: vacuum degree of the vacuum chamber is 3.0×10 -8 Pa, oxygen purity is 99.99%, ion source power is 0.5~5kw, working pressure is 0.8~8.0Pa, injection time It is 30~120min.

可以理解,上述鋁合金基體11的表面處理方法還可包括在形成鋁層13前,在所述鍍膜機內對鋁合金基體11進行電漿清洗的步驟。It can be understood that the surface treatment method of the above aluminum alloy base 11 may further include a step of plasma cleaning the aluminum alloy base 11 in the coating machine before forming the aluminum layer 13.

請參閱圖2,一種由經上述表面處理後的鋁合金基體11製得的殼體10包括鋁合金基體11、依次形成於鋁合金基體11上的鋁層13及離子注入膜15。Referring to FIG. 2, a casing 10 made of the surface-treated aluminum alloy base 11 includes an aluminum alloy base 11, an aluminum layer 13 and an ion implantation film 15 which are sequentially formed on the aluminum alloy base 11.

該鋁層13的厚度可為0.5~1.0μm。The aluminum layer 13 may have a thickness of 0.5 to 1.0 μm.

所述離子注入膜15主要含有Al2 O3 及AlO固溶相。The ion implantation membrane 15 mainly contains Al 2 O 3 and an AlO solid solution phase.

本發明較佳實施方式鋁合金的表面處理方法,在鋁合金基體11上磁控濺射形成鋁層13,再於該鋁層13上形成離子注入膜15。該離子注入膜15的形成顯著地提高了所述殼體10的耐腐蝕性能,從而對所述殼體10起到了較好的抗腐蝕性保護。In the surface treatment method of the aluminum alloy according to the preferred embodiment of the present invention, the aluminum layer 13 is formed by magnetron sputtering on the aluminum alloy substrate 11, and the ion implantation film 15 is formed on the aluminum layer 13. The formation of the ion implantation film 15 remarkably improves the corrosion resistance of the casing 10, thereby providing better corrosion resistance protection to the casing 10.

10...殼體10. . . case

11...鋁合金基體11. . . Aluminum alloy substrate

13...鋁層13. . . Aluminum layer

15...離子注入膜15. . . Ion implantation membrane

圖1為本發明較佳實施方式鋁合金表面處理方法的流程圖;1 is a flow chart of a method for treating an aluminum alloy surface according to a preferred embodiment of the present invention;

圖2為本發明較佳實施方式殼體的剖視示意圖。2 is a cross-sectional view of a housing in accordance with a preferred embodiment of the present invention.

10...殼體10. . . case

11...鋁合金基體11. . . Aluminum alloy substrate

13...鋁層13. . . Aluminum layer

15...離子注入膜15. . . Ion implantation membrane

Claims (10)

一種鋁合金的表面處理方法,其包括如下步驟:
提供鋁合金基體;
於該鋁合金基體的表面磁控濺射鋁層;
於該鋁層上注入氧離子,形成主要含有Al2 O3 及AlO固溶相的離子注入膜。
A surface treatment method for an aluminum alloy, comprising the steps of:
Providing an aluminum alloy substrate;
Magnetron sputtering an aluminum layer on the surface of the aluminum alloy substrate;
Oxygen ions are implanted into the aluminum layer to form an ion-implanted film mainly containing Al 2 O 3 and AlO solid solution phases.
如申請專利範圍第1項所述之鋁合金的表面處理方法,其中磁控濺射所述鋁層的步驟以如下方式進行:以鋁靶為靶材,於鋁合金基體上施加-50~-300V的偏壓,以氬氣為工作氣體,其流量為100~300sccm,濺射溫度為50~180℃,濺射時間為20~90min。The surface treatment method of the aluminum alloy according to claim 1, wherein the step of magnetron sputtering the aluminum layer is performed in the following manner: applying an aluminum target as a target and applying -50 to the aluminum alloy substrate The bias voltage of 300V is argon gas as the working gas, the flow rate is 100~300sccm, the sputtering temperature is 50~180°C, and the sputtering time is 20~90min. 如申請專利範圍第1項所述之鋁合金的表面處理方法,其中形成所述離子注入膜的步驟為:在真空鍍膜機的真空室中進行,該真空室的真空度為3.0×10-8 Pa,離子注入的離子源功率為0.5~5kw,工作氣壓為0.8~8.0Pa,注入時間為30~120min。The surface treatment method of the aluminum alloy according to claim 1, wherein the step of forming the ion implantation membrane is performed in a vacuum chamber of a vacuum coating machine, and the vacuum degree of the vacuum chamber is 3.0×10 -8 Pa, ion source ion source power is 0.5~5kw, working pressure is 0.8~8.0Pa, and injection time is 30~120min. 如申請專利範圍第1項所述之鋁合金的表面處理方法,其中所述表面處理方法還包括在進行磁控濺射前對所述鋁合金基體進行拋光及超聲波清洗的步驟。The surface treatment method for an aluminum alloy according to claim 1, wherein the surface treatment method further comprises the step of polishing and ultrasonically cleaning the aluminum alloy substrate before performing magnetron sputtering. 如申請專利範圍第4項所述之鋁合金的表面處理方法,其中經所述拋光後的鋁合金基體的表面粗糙度Rz<1.2μm。The surface treatment method of the aluminum alloy according to Item 4, wherein the polished aluminum alloy substrate has a surface roughness Rz < 1.2 μm. 如申請專利範圍第1所述之鋁合金的表面處理方法,其中所述表面處理方法還包括在形成鋁層前,對鋁合金基體進行電漿清洗的步驟。The surface treatment method of the aluminum alloy according to claim 1, wherein the surface treatment method further comprises the step of plasma-cleaning the aluminum alloy substrate before forming the aluminum layer. 一種由鋁合金製得的殼體,該殼體包括鋁合金基體,其改良在於:該殼體還包括依次形成於該鋁合金基體表面的鋁層及離子注入膜,所述離子注入膜中主要含有Al2 O3 及AlO固溶相。A casing made of an aluminum alloy, the casing comprising an aluminum alloy base, the improvement comprising: the casing further comprising an aluminum layer and an ion implantation film sequentially formed on a surface of the aluminum alloy substrate, wherein the ion implantation film is mainly Contains Al 2 O 3 and AlO solid solution phase. 如申請專利範圍第7項所述之殼體,其中所述鋁層的厚度為0.5~1.0μm。The casing of claim 7, wherein the aluminum layer has a thickness of 0.5 to 1.0 μm. 如申請專利範圍第7或8項所述之殼體,其中所述鋁層以磁控濺射法形成。The casing of claim 7 or 8, wherein the aluminum layer is formed by magnetron sputtering. 如申請專利範圍第7項所述之殼體,其中所述離子注入膜為在所述鋁層上注入氧離子而形成。The casing according to claim 7, wherein the ion implantation membrane is formed by injecting oxygen ions onto the aluminum layer.
TW99131192A 2010-09-15 2010-09-15 Surface treatment for aluminum alloy and housing manufactured by the aluminum alloy TWI472637B (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101370961A (en) * 2006-04-19 2009-02-18 罗帕尔股份公司 Method to obtain a corrosion-resistant and shiny substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101370961A (en) * 2006-04-19 2009-02-18 罗帕尔股份公司 Method to obtain a corrosion-resistant and shiny substrate

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
劉柱, "氧離子注入對20鋼鍍鋁表面硬度及耐蝕性的影響", 新疆鋼鐵, 第3期, 1995年, page:30~32. *

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