TWI419261B - Method for separating ic substrate and support component - Google Patents

Method for separating ic substrate and support component Download PDF

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Publication number
TWI419261B
TWI419261B TW100132300A TW100132300A TWI419261B TW I419261 B TWI419261 B TW I419261B TW 100132300 A TW100132300 A TW 100132300A TW 100132300 A TW100132300 A TW 100132300A TW I419261 B TWI419261 B TW I419261B
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carrier
substrate
photoresist
present
substrate unit
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TW100132300A
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TW201312696A (en
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Yung Ching Lin
Tsung Yuan Chen
Chung W Ho
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Unimicron Technology Crop
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Description

分離IC基板與承載件之方法Method for separating IC substrate and carrier

本發明係關於一種分離IC基板與承載件之方法,特別是一種經過封裝製程後再分離IC基板與承載件之方法。The invention relates to a method for separating an IC substrate and a carrier, in particular to a method for separating an IC substrate and a carrier after a packaging process.

目前分離式IC載板設計及製作方法,需將各IC基板區塊(IC substrate block)黏著於條狀承載基座上,於封裝完成後,再將IC基板區塊自承載基座拆下,但因承載基座不易彎折(厚度較IC基板區塊厚或材質較IC基板區塊硬),在拆下時很可能將造成封裝後之IC基板區塊損壞(譬如崩角或破裂)或是直接造成承載基座斷裂。由於承載基座之成本較高,如果承載基座之再利用性不佳,將增加製作上之成本。At present, the design and manufacturing method of the separate IC carrier board requires that each IC substrate block is adhered to the strip-shaped carrier base, and after the package is completed, the IC substrate block is removed from the carrier base. However, since the carrier base is not easily bent (the thickness is thicker than the IC substrate block or the material is harder than the IC substrate block), it is likely to cause damage to the packaged IC substrate block (such as chipping or cracking) when it is removed or It is directly caused to break the bearing base. Due to the high cost of the carrier base, if the reuse of the carrier base is not good, the manufacturing cost will be increased.

因此,有必要提供一種分離IC基板與承載件之方法、IC基板條之製作方法及IC基板條,以改善上述所存在的問題。Therefore, it is necessary to provide a method of separating an IC substrate and a carrier, a method of fabricating an IC substrate strip, and an IC substrate strip to improve the above problems.

本發明之一目的在於提供一種分離IC基板與承載件之方法及IC基板條之製作方法。An object of the present invention is to provide a method of separating an IC substrate and a carrier and a method of fabricating the IC substrate strip.

鑑於本發明之上述目的,本發明之分離IC基板與承載件之方法包括下列步驟:提供承載件,其中承載件係可透光;配置感光膠於承載件之上方;將至少一IC基板單元貼覆在感光膠上以形成IC基板條;對至少一IC基板單元進行加工製程;自承載件之下方照射特定光線,使感光膠發泡;以及移除承載件。In view of the above object of the present invention, the method for separating an IC substrate and a carrier of the present invention comprises the steps of: providing a carrier, wherein the carrier is permeable; arranging the photographic adhesive over the carrier; and attaching at least one IC substrate unit Covering the photoresist to form an IC substrate strip; processing the at least one IC substrate unit; irradiating a specific light from the underside of the carrier to foam the photoresist; and removing the carrier.

在本發明之一實施例中,感光膠包括液態或凝態的感光樹脂,或固態的感光黏膠。In one embodiment of the invention, the photoresist comprises a liquid or condensed photosensitive resin, or a solid photosensitive adhesive.

在本發明之一實施例中,感光膠包括紫外線硬化樹脂,且特定光線包括紫外線。In an embodiment of the invention, the photoresist comprises an ultraviolet curable resin and the specific light comprises ultraviolet light.

在本發明之一實施例中,加工製程包括封裝製程。In one embodiment of the invention, the processing process includes a packaging process.

為讓本發明之上述和其他目的、特徵和優點能更明顯易懂,下文特舉出較佳實施例,並配合所附圖式,作詳細說明如下。The above and other objects, features, and advantages of the present invention will become more apparent from the description of the appended claims.

請先參考圖1至圖8關於依據本發明之分離IC基板與承載件之方法之一實施例之示意圖。其中,圖1為依據本發明之分離IC基板與承載件之方法之一實施例之步驟流程圖;圖2為依據本發明之承載件之一實施例之示意圖;圖3為依據本發明之感光膠配置在承載件上之一實施例之示意圖;圖4為依據本發明之IC基板單元之一實施例之示意圖;及圖5至圖8為依據本發明之分離IC基板與承載件之方法之一實施例之示意圖。Please refer to FIG. 1 to FIG. 8 for a schematic diagram of an embodiment of a method for separating an IC substrate and a carrier according to the present invention. 1 is a flow chart of steps of an embodiment of a method for separating an IC substrate and a carrier according to the present invention; FIG. 2 is a schematic view of an embodiment of a carrier according to the present invention; and FIG. 3 is a photosensitive according to the present invention; FIG. 4 is a schematic view showing an embodiment of an IC substrate unit according to the present invention; and FIGS. 5 to 8 are a method for separating an IC substrate and a carrier according to the present invention; A schematic diagram of an embodiment.

如圖1所示,本發明之分離IC基板與承載件首先進行步驟S71:提供承載件。As shown in FIG. 1, the separated IC substrate and the carrier of the present invention first perform step S71: providing a carrier.

如圖2所示,本發明之承載件3a係可透光。在本發明之一實施例中,承載件3a係透明的承載基座,但本發明不以透明為限。As shown in Fig. 2, the carrier 3a of the present invention is permeable to light. In an embodiment of the invention, the carrier 3a is a transparent carrier base, but the invention is not limited to transparency.

本發明接著進行步驟S72:配置感光膠於承載件之上方。The invention then proceeds to step S72: arranging the photoresist over the carrier.

如圖3所示,步驟S72係均勻配置感光膠4於承載件3a上,在本發明之一實施例中,感光膠係一種液態或凝態的感光樹脂,例如紫外線硬化樹脂,但本發明不以此為限。在本發明之一實施例中,配置感光膠4的方式可為塗佈,其中塗佈的方法包括網版印刷、滾塗印刷或噴墨印刷,但本發明不以此為限;接著對感光膠4進行烘乾,以去除多餘溶劑。As shown in FIG. 3, step S72 is to uniformly dispose the photosensitive adhesive 4 on the carrier 3a. In one embodiment of the invention, the photosensitive adhesive is a liquid or condensed photosensitive resin, such as an ultraviolet curing resin, but the present invention does not. This is limited to this. In an embodiment of the present invention, the manner of disposing the photosensitive adhesive 4 may be coating, wherein the coating method includes screen printing, roll coating printing or inkjet printing, but the invention is not limited thereto; The glue 4 is dried to remove excess solvent.

在本發明之另一實施例中,感光膠係一種具黏性的固態感光膜,且同樣可利用紫外線曝照方式進行硬化或發泡的感光樹脂,但本發明不以此為限。在本發明之一實施例中,配置感光膠4的方式可為貼附且/或壓合,例如習知電鍍銅製程中,將阻鍍型光阻形成於線路板表面上的貼附且/或壓合方法,但本發明不以此為限。In another embodiment of the present invention, the photosensitive adhesive is a viscous solid photosensitive film, and the photosensitive resin which is hardened or foamed by ultraviolet exposure is also used, but the invention is not limited thereto. In an embodiment of the present invention, the photosensitive adhesive 4 may be disposed by attaching and/or pressing. For example, in the conventional electroplating copper process, the resistive plating resist is formed on the surface of the circuit board and/ Or a method of pressing, but the invention is not limited thereto.

須注意的是,若承載件3a之原始尺寸較大,可先經適當裁切成條狀之承載件3,再進行下一步驟,但本發明之承載件3a亦可已為適當尺寸的條狀承載基座。It should be noted that if the original size of the carrier member 3a is large, the carrier member 3 can be appropriately cut into strips, and the next step is performed, but the carrier member 3a of the present invention can also be an appropriately sized strip. Shaped carrier base.

本發明接著進行步驟S73:將IC基板單元貼覆在感光膠上。The present invention then proceeds to step S73: the IC substrate unit is attached to the photosensitive paste.

如圖4所示,本發明之IC基板單元(IC substrate module)11係由大面積之IC基板板材(IC substrate panel)10切割出來之IC基板區塊(IC substrate block),IC基板單元11包括複數IC基板單位元件(IC substrate unit)111,IC基板單位元件111係呈矩陣排列,IC基板單位元件111上具有線路層(圖未示),換言之,IC基板單位元件係封裝載板的一種,也可以是具有高布線密度增層結構線路板的一種,但本發明不以此為限。須注意的是,IC基板單元11及其IC基板單位元件111之數量及排列方式不以圖4為限,在其他實施例中,IC基板單元11亦可只包括一個IC基板單位元件111。須注意的是,本發明所述之IC即為積體電路(Integrated Circuit)之英文縮寫。As shown in FIG. 4, the IC substrate module 11 of the present invention is an IC substrate block which is cut out by a large-area IC substrate panel 10, and the IC substrate unit 11 includes The IC substrate unit 111, the IC substrate unit 111 are arranged in a matrix, and the IC substrate unit 111 has a wiring layer (not shown). In other words, the IC substrate unit is a package carrier. It may also be a type of circuit board having a high wiring density build-up structure, but the invention is not limited thereto. It should be noted that the number and arrangement of the IC substrate unit 11 and its IC substrate unit element 111 are not limited to FIG. 4 . In other embodiments, the IC substrate unit 11 may include only one IC substrate unit element 111 . It should be noted that the IC described in the present invention is an abbreviation of Integrated Circuit.

在本發明之一實施例中,IC基板單元11之尺寸可為10毫米(mm)x10毫米(mm)至50毫米(mm)x50毫米(mm)之間,厚度約為0.3毫米(mm),但本發明不以此為限。In an embodiment of the present invention, the IC substrate unit 11 may have a size of between 10 millimeters (mm) x 10 millimeters (mm) and 50 millimeters (mm) x 50 millimeters (mm), and a thickness of about 0.3 millimeters (mm). However, the invention is not limited thereto.

如圖5所示,步驟S73係將上述之各IC基板單元11貼覆在感光膠4上,由於感光膠4此時為具黏性之膠體,將各IC基板單元11貼覆在感光膠4並以滾輪輕壓各IC基板單元11後即可使各IC基板單元11與感光膠4緊密結合。在本發明之一實施例中,各IC基板單元11貼覆在感光膠4後即形成本發明之IC基板條6,IC基板條6可出貨給封測廠進行後續製程,但本發明不以此為限。As shown in FIG. 5, in step S73, each of the IC substrate units 11 is attached to the photosensitive adhesive 4, and since the photosensitive adhesive 4 is a viscous colloid at this time, each IC substrate unit 11 is attached to the photosensitive adhesive 4 After each of the IC substrate units 11 is lightly pressed by a roller, each of the IC substrate units 11 and the photosensitive paste 4 can be tightly coupled. In an embodiment of the present invention, after the IC substrate unit 11 is attached to the photoresist 4, the IC substrate strip 6 of the present invention is formed, and the IC substrate strip 6 can be shipped to the packaging and testing factory for subsequent processing, but the present invention does not This is limited to this.

本發明接著進行步驟S74:對IC基板單元進行加工製程。The present invention then proceeds to step S74: processing the IC substrate unit.

如圖6所示,在本發明之一實施例中,封測廠即對IC基板條6上之IC基板單元11進行封裝製程,但本發明不以此製程為限。由於封裝製程係習知所使用之技術,也非本發明之重點,因此在此不做贅述。As shown in FIG. 6, in one embodiment of the present invention, the packaging and testing factory performs a packaging process on the IC substrate unit 11 on the IC substrate strip 6, but the present invention is not limited to this process. Since the technology used in the packaging process is not the focus of the present invention, it will not be described here.

本發明接著進行步驟S75:自承載件之下方照射特定光線,使感光膠發泡。The present invention then proceeds to step S75 by irradiating a specific light from under the carrier to foam the photosensitive paste.

如圖7所示,步驟S75自承載件3之下方照射特定光線,由於承載件3係可透光,故特定光線可穿透承載件3,感光膠4經特定光線照射後可進行發泡反應並失去黏性。在本發明之一實施例中,特定光線可為紫外線(Ultraviolet Rays),但本發明不以此為限。As shown in FIG. 7, step S75 irradiates a specific light from the lower side of the carrier 3. Since the carrier 3 is transparent, specific light can penetrate the carrier 3, and the photosensitive adhesive 4 can be foamed after being irradiated with specific light. And lose the viscosity. In an embodiment of the invention, the specific light may be ultraviolet rays (Ultraviolet Rays), but the invention is not limited thereto.

本發明最後進行步驟S76:移除承載件。The invention finally proceeds to step S76: removing the carrier.

如圖8所示,失去黏性後之感光膠4幾乎可自動從承載件3及IC基板單元11分離,若有殘膠在承載件3及IC基板單元11上,可使用有機溶劑(譬如酮類溶劑)進行清洗,清洗後之承載件3可回收再使用,可克服如先前技術中,IC基板單位元件111或承載件3在拆板時可能造成損壞之缺失,因此可達到增加封裝後之IC基板單元11之良率及降低製造成本。As shown in FIG. 8, the photosensitive adhesive 4 after the viscosity is lost can be almost automatically separated from the carrier 3 and the IC substrate unit 11. If the residual glue is on the carrier 3 and the IC substrate unit 11, an organic solvent such as a ketone can be used. The solvent-like solvent is cleaned, and the carrier 3 after cleaning can be recycled and reused, which can overcome the loss of damage of the IC substrate unit element 111 or the carrier 3 when the board is removed as in the prior art, so that the package can be increased after the package is removed. The yield of the IC substrate unit 11 and the manufacturing cost are reduced.

綜上所陳,本發明無論就目的、手段及功效,在在均顯示其迥異於習知技術之特徵,懇請 貴審查委員明察,早日賜准專利,俾嘉惠社會,實感德便。惟應注意的是,上述諸多實施例僅係為了便於說明而舉例而已,本發明所主張之權利範圍自應以申請專利範圍所述為準,而非僅限於上述實施例。To sum up, the present invention, regardless of its purpose, means and efficacy, shows its distinctive features of the prior art. You are requested to review the examination and express the patent as soon as possible. It should be noted that the various embodiments described above are merely illustrative for ease of explanation, and the scope of the invention is intended to be limited by the scope of the claims.

3a、3...承載件3a, 3. . . Carrier

4...感光膠4. . . Photosensitive adhesive

6...IC基板條6. . . IC substrate strip

10...IC基板板材10. . . IC substrate sheet

11...IC基板單元11. . . IC substrate unit

111...IC基板單位元件111. . . IC substrate unit component

圖1係關於本發明之分離IC基板與承載件之方法之一實施例之步驟流程圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a flow chart showing the steps of an embodiment of a method for separating an IC substrate and a carrier of the present invention.

圖2係關於本發明之承載件之一實施例之示意圖。Figure 2 is a schematic illustration of one embodiment of a carrier of the present invention.

圖3係關於本發明之感光膠配置在承載件上之一實施例之示意圖。Fig. 3 is a schematic view showing an embodiment of the photosensitive paste of the present invention disposed on a carrier.

圖4係關於本發明之IC基板單元之一實施例之示意圖。Fig. 4 is a schematic view showing an embodiment of an IC substrate unit according to the present invention.

圖5至圖8係關於本發明之分離IC基板與承載件之方法之一實施例之示意圖。5 to 8 are schematic views showing an embodiment of a method of separating an IC substrate and a carrier according to the present invention.

3...承載件3. . . Carrier

4...感光膠4. . . Photosensitive adhesive

6...IC基板條6. . . IC substrate strip

11...IC基板單元11. . . IC substrate unit

Claims (7)

一種分離IC基板與承載件之方法,包括下列步驟:提供一承載件,其中該承載件係可透光;配置一感光膠於該承載件之上方;將至少一IC基板單元貼覆在該感光膠上以形成一IC基板條;對該至少一IC基板單元進行一加工製程;自該承載件之下方照射一特定光線,使該感光膠發泡;以及移除該承載件。A method for separating an IC substrate and a carrier comprises the steps of: providing a carrier, wherein the carrier is transparent; and arranging a photoresist on the carrier; and attaching at least one IC substrate unit to the photosensitive Forming an IC substrate strip on the glue; performing a processing process on the at least one IC substrate unit; irradiating a specific light from the lower side of the carrier member to foam the photosensitive adhesive; and removing the carrier member. 如申請專利範圍第1項所述之方法,其中形成該IC基板條之製作方法,包括下列步驟:提供一可透光的承載基座;配置該感光膠於該承基座之上方;以及將該至少一IC基板單元貼覆在該感光膠上。The method of claim 1, wherein the method for fabricating the IC substrate strip comprises the steps of: providing a light transmissive carrier base; arranging the photoresist over the base; and The at least one IC substrate unit is attached to the photoresist. 如申請專利範圍第1或2項所述之方法,其中該感光膠係液態或凝態的感光樹脂,或具黏性的固態感光膜,且該特定光線係紫外線。The method of claim 1 or 2, wherein the photosensitive adhesive is a liquid or condensed photosensitive resin, or a viscous solid photosensitive film, and the specific light is ultraviolet light. 如申請專利範圍第1或2項所述之方法,其中該加工製程包括一封裝製程。The method of claim 1 or 2, wherein the processing includes a packaging process. 如申請專利範圍第1或2項所述之方法,其中該各至少一IC基板單元包括一IC基板區塊。The method of claim 1 or 2, wherein each of the at least one IC substrate unit comprises an IC substrate block. 如申請專利範圍第1或2項所述之方法,其中配置該感光膠於該承載件之上方之方式包括下列步驟:塗佈該感光膠於該承載件之上方;以及烘乾該感光膠。The method of claim 1 or 2, wherein the method of disposing the photoresist on the carrier comprises the steps of: coating the photoresist over the carrier; and drying the photoresist. 如申請專利範圍第1或2項所述之方法,其中配置該感光膠於該承載件之上方之方式包括下列步驟:貼附或壓合該感光膠於該承載件之上方;以及烘乾該感光膠。The method of claim 1 or 2, wherein the method of disposing the photoresist on the carrier comprises the steps of: attaching or pressing the photoresist over the carrier; and drying the Photosensitive adhesive.
TW100132300A 2011-09-07 2011-09-07 Method for separating ic substrate and support component TWI419261B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200532812A (en) * 2004-03-19 2005-10-01 United Test Ct Inc Semiconductor molding structure and method thereof
TW200610069A (en) * 2004-09-07 2006-03-16 Siliconware Precision Industries Co Ltd Fabrication method and carrier of semiconductor packages
TW200629503A (en) * 2005-02-02 2006-08-16 Siliconware Precision Industries Co Ltd Chip-stacked semiconductor package and fabrication method thereof
TW200837844A (en) * 2007-03-03 2008-09-16 Siliconware Precision Industries Co Ltd Method for fabricating semiconductor device and carrier applied therein

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200532812A (en) * 2004-03-19 2005-10-01 United Test Ct Inc Semiconductor molding structure and method thereof
TW200610069A (en) * 2004-09-07 2006-03-16 Siliconware Precision Industries Co Ltd Fabrication method and carrier of semiconductor packages
TW200629503A (en) * 2005-02-02 2006-08-16 Siliconware Precision Industries Co Ltd Chip-stacked semiconductor package and fabrication method thereof
TW200837844A (en) * 2007-03-03 2008-09-16 Siliconware Precision Industries Co Ltd Method for fabricating semiconductor device and carrier applied therein

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