TWI410647B - Analytical system and method for electron emission properties - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technique capable of accurately separating a formation lag time and a statistical lag time in an analytic system and an analysis method for electron emission characteristics and identifying energetic density of one or a plurality of electron emission sources. <P>SOLUTION: Measurement data of an address discharge lag time t<SB>d</SB>to a suspension time t<SB>i</SB>and temperature T are input. Discharge probability frequency and existing discharge probability are calculated from the number of accumulation of the measurement data. An electron emission time constant t<SB>s</SB><SP>exp</SP>(t<SB>i</SB>, T) of a priming electron is calculated. A function for energy state density of an electron discharge source is set up, and an average value, a dispersed value, a searching range of an effective number, and a searching width of activated energy are established. The electron emission time constant t<SB>s</SB><SP>th</SP>(t<SB>i</SB>, T) of the priming electron is calculated by overlap integral of energy state density of the electron emission source and a window function. An average value, a dispersed value, and an effective number of the activated energy wherein an average mean square error of t<SB>s</SB><SP>exp</SP>(t<SB>i</SB>, T) and t<SB>s</SB><SP>th</SP>(t<SB>i</SB>, T) becomes the least are determined. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

Analytical system and analytical method for electronic emission characteristics

The present invention relates to an analytical technique for electron emission characteristics, and particularly relates to an oxide film material (MgO or the like), an ion crystal material, and a semiconductor material in a measuring device for a plasma display panel (PDP) or an impurity level. An analysis system and an analysis method for the electron emission characteristics of the electron emission source.

In recent years, development of a PDP has been carried out as a large-screen thin color display device.

For example, as shown in Fig. 18, an AC-discharge type PDP having a three-electrode structure has been widely developed. In the AC surface discharge type PDP, two glass substrates, that is, the front substrate 1501 and the rear substrate 1508 are opposed to each other, and the gap therebetween becomes the discharge space 1513. In the discharge space 1513, a discharge gas, that is, a mixed gas of He, Ne, Xe, or Ar, is sealed at a pressure of several hundred to six hundred Torr or more. On the lower surface of the front substrate 1501 on the display surface side, a pair of sustain discharge electrodes composed of the X electrode 1502 and the Y electrode 1503 are formed in parallel, and the driving voltage is repeatedly applied to continue the light emission. Generally, the X electrode and the Y electrode are composed of a transparent electrode and an opaque electrode that compensates for the conductivity of the transparent electrode. That is, the X electrode is composed of X transparent electrodes 1502-1, 1502-2, ..., and opaque X bus electrodes 1504-1, 1504-2, ..., and Y electrodes are made of Y transparent electrodes 1503. -1, 1503-2, ..., and opaque Y bus bar electrodes 1505-1, 1505-2, ... to make.

The sustain discharge electrodes are covered by the front dielectric 1506 to form a protective film 1507 of magnesium oxide (MgO) or the like on the surface of the dielectric. The secondary electron emission coefficient of MgO is high, and ions such as He, Ne, Xe, and Ar generated by the discharge are emitted when the ions collide with MgO, and the function of enhancing discharge can be exerted to lower the discharge starting voltage. In addition, MgO has excellent sputtering resistance and functions to protect the front dielectric 1506, and ions such as He, Ne, Xe, and Ar which are generated by discharge are directly damaged by the front dielectric 1506.

Further, on the upper surface of the rear substrate 1508, an address electrode for address discharge (hereinafter simply referred to as "A electrode") 1509 is provided in a direction orthogonal to the sustain discharge electrode. The A electrode 1509 is covered by the back surface dielectric 1510, and the partition wall 1511 is provided on the back surface dielectric 1510 so as to sandwich the A electrode 1509. Further, a phosphor 1512 is applied to a concave portion formed on the wall surface of the partition wall 1511 and the upper surface of the back surface dielectric 1510.

In the configuration, the intersection of the sustain discharge electrode pair and the A electrode corresponds to one discharge cell, and the discharge cells are arranged in a quadratic form to have a matrix structure of about 2000×2000. In the color display, three kinds of discharge cells coated with red, green, and blue phosphors are grouped to form one pixel.

The operation of the PDP will be described below.

The principle of illumination of the PDP is that a plasma composed of electrons and ions is generated by the discharge gas by a driving voltage applied between the X and Y electrodes, and the electrons cause the discharge gas in the state of the substrate to jump to an excited state by fluorescence. Body The ultraviolet light generated by the discharge gas in the excited state is converted into visible light.

As shown in the block diagram of FIG. 19, the PDP 1600 is assembled to the plasma display device 1602. The signal of the display screen is transmitted from the image source 1603 to the drive circuit 1601, and the drive circuit 1601 receives the signal and converts it into a drive voltage and supplies it to each electrode of the PDP 1600.

Fig. 20(A) is a timing chart showing driving voltages during a 1 TV field required for displaying one image of the PDP 1600 shown in Fig. 19. As shown in (I) of the figure, the 1TV field period 1700 is divided into subfields 1701 to 1708 in which the number of times the sustain voltage pulses are applied is different. The gray scale is expressed by adjusting the number of times the sustain voltage pulse is applied to each subfield, that is, the intensity of the light generated by sustaining the discharge. When eight subfields having an overlap based on the two-emission luminous intensity are provided, the discharge color of the three primary color display can respectively obtain a brightness display of 2 ⁸ (= 256) gray scales, and a color display of about 16.78 million colors can be displayed. In the subfield, as shown in (II) of the figure, the subfield is restored from the initial discharge state of the discharge cell 1709, the address discharge period 1710 of the discharge cell is selected, and the sustain discharge period 1711 for performing the luminescence display. Composition.

Fig. 20(B) shows voltage waveforms applied to the A electrode 1509, the X electrode, and the Y electrode during the address discharge period 1710 shown in Fig. 20(A). Waveform 1712 represents a voltage waveform applied to one of the A electrodes 1509 in the address discharge period 1710, and 1713, 1714 represents voltage waveforms applied to the ith and (i+1)th numbers of the Y electrode, and waveform 1717 represents The voltages applied to the X electrodes are individual voltages V0, V21, V21, and V1. As shown in FIG. 20(B), when the scan pulse 1715 is applied to the i-th row of the Y electrode, at the intersection of the A electrode 1509 at the voltage V0. The grid generates a discharge between the Y electrode and the A electrode, and the discharge changes between the Y electrode and the X electrode to cause address discharge. In the cell at the intersection of the i-th row of the Y electrode and the A electrode 1509 to which the voltage V0 is not applied, no address discharge occurs. The same applies to the case where the scan pulse 1716 is applied to the (i+1)th row of the Y electrode. In the cell where the address discharge occurs, the electric charge generated by the discharge becomes wall charges and is formed on the surface of the dielectric covering the X and Y electrodes and the protective film 1507, and a wall voltage Vw is generated between the X and Y electrodes. The presence or absence of the sustain discharge of the next sustain sustain discharge period 1711 is determined depending on the presence or absence of the wall charge.

21 shows a voltage waveform 1801 applied to the Y electrode, a voltage waveform 1802 applied to the A electrode 1509, and an address discharge current 1803 during the address discharge period 1710. After 1509 is applied to the A electrode voltages Va, address discharge current reaches a peak of time here referred to as the discharge delay time t _d. In addition, FIG. 21 shows a driving voltage waveform which is applied to the discharge electrode, that is, between the X electrode and the Y electrode, in the sustain discharge period 1711. The driving voltage of the rectangular waveform of the driving voltage waveform 1804 is repeatedly applied to the Y electrode, and the driving voltage of the rectangular waveform of the driving voltage waveform 1805 is repeatedly applied to the X electrode. The driving voltage of the rectangular waveform is alternately applied to the Y electrode and the X electrode. The voltage value of the sustain discharge voltage Vsus is set such that the presence or absence of the sustain discharge can be determined by the relative voltage difference between the Y electrode and the X electrode caused by the address discharge, that is, the presence or absence of the wall voltage Vw. In the discharge cell in which the address discharge is generated, the sum of the wall voltage Vw and the sustain discharge voltage Vsus causes the discharge start voltage to rise, and among the discharge cells in which the address discharge is not generated, the sustain discharge voltage Vsus causes the discharge start voltage to drop. , according to this is set. After the end of one cycle of sustain discharge driving voltage, the relative potential of the Y electrode and the X electrode is inverted in the discharge cell in which the address discharge is generated. When the second cycle of the sustain discharge driving voltage is applied between the sustain electrodes, the sum of the wall voltage Vw and the sustain discharge voltage Vsus is again increased, and the discharge start voltage is increased to repeat the discharge. In this case, in the discharge cell in which the address discharge is generated, light is generated when the sustain discharge driving voltage is applied, and in the discharge cell in which the address discharge is not generated, no light emission occurs. After the sustain discharge period 1711 elapses, the time until the application of the voltage to each of the A electrodes 1509 is referred to as the rest time t _i in the address discharge period 1710.

Further, the technique of such a PDP is disclosed, for example, in the technique of Patent Document 1.

Patent Document 1: JP-A-2007-109541

The inventors found the following problems with respect to the technical review results of the above PDP.

For example, in the progress of the PDP with Full High Vision, the number of discharge cells in the panel, and the number of lines of the X electrode 1502 and the Y electrode 1503 to be scanned in the address discharge period 1710 are Increase the tendency. Accordingly, the scanning pulse is applied to a discharge cell 1715 or 1716, to shorten the time of address discharge, i.e., the address discharge delay time t _d, to achieve high-speed operation is the important issue.

The address discharge delay time t _d is determined by the delay time t _f between the applied voltage of the Y electrode, the X electrode, and the A electrode and the residual wall charge after the reset discharge, and the electron that becomes the discharge type (ignition electron) It is composed of the sum of the statistical delay times t _s before the MgO is released. When variation exists in resetting the residual amount of wall charges after the discharge, the delay time t _f is formed also fluctuates.

Further, as shown in FIG. 22, in MgO, a Mg defect or an oxygen deficiency in which a Mg atom 1901 or an oxygen atom 1902 of a cubic crystal structure is released, or a replacement structure 1903 in which a proton is captured due to an oxygen deficiency, traps electrons. Electronic release source. The ignition electrons are discharged from the electron emission source to the discharge grid space, which varies due to statistical phenomena during statistical delay times.

Fig. 23 is a graph showing the measurement of the discharge delay time of the address discharge delay time in the same discharge cell, and the frequency distribution of the discharge delay time expressed by the cumulative number of each of the address discharge delay times. Even in the same discharge cell, the peak is about 500 ns, the discharge time is 400 ns when the discharge time is fast, and the discharge time is 1000 ns or more, and the left and right asymmetrical shape is exhibited.

Fig. 24 is a view showing a system and method for analyzing the formation delay time and the statistical delay time by performing an analysis system and an analysis method of the conventional electron emission characteristics, and inputting the measurement data t _{d of the} address discharge delay time, which are executed in the following order. .

(1) Measurement data of the input address discharge delay time t _d and the cumulative number.

(2) calculated for the address discharge delay time t _{d is} the cumulative number, address discharge is calculated for the delay time t _{d is} discharged probability.

(3) calculating the probability of discharge have 1% or _1% of the time T and the time becomes 95% t _95%.

(4) Calculate the formation delay time t _f = t _1% , and the statistical delay time t _s = t _{95% -} t _1% .

However, the explanation of the above phenomenon theory is to calculate the formation delay time and the statistical delay time by mixing, and it is not appropriate as an analysis method. When determining the design pointer for the high-speed operation of the address discharge, the delay time and the statistical delay time are high. Accuracy separation is difficult. In addition, it is difficult to determine the cause of the statistical delay time, that is, the electron emission characteristics of the electron emission source, for example, the energy state density of the electron emission source. Moreover, in the case where a large number of electron emission sources exist, it is impossible to identify the energy state density of each electron emission source.

An object of the present invention is to provide a high-precision separation between a formation delay time and a statistical delay time in an analysis system and an analysis method for electron emission characteristics, and can perform energy state density on one or a plurality of electron emission sources. Identification technology.

The above and other objects and features of the present invention will be understood from the description and drawings.

A representative outline of an embodiment of the present invention is briefly described below.

That is, the analysis system and the analysis method of the electron emission characteristics of the representative embodiments analyze one or a plurality of electronic discharge sources using the following procedure. Energy state density.

(1) The measurement data of the address discharge delay time t _d is input for the measurement condition of the rest time t _i between the application of the voltage and the application of the address voltage, and the temperature T of the measurement condition.

(2) Calculate the cumulative number of discharge delay times for each address based on the measurement data for each of the rest time t _i and the temperature T of the measurement conditions, and calculate the discharge probability frequency and the discharged probability.

(3) Calculate the electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data.

(4) Set the function of the energy state density of the electron emission source, and set the average value of the activation energy of the energy state density, the dispersion range and the search range and the exploration width of the effective number.

(5) The electron emission constant t _s ^th (t _i , T) of the ignition electron obtained by the calculation is calculated by the superposition of the energy state density of the electron emission source and the energy of the window function.

(6) The electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data is determined from the total number of measurement conditions of the rest time t _i and the temperature T of the measurement condition. The average quadratic error of the electron emission constant t _s ^th (t _i , T) of the ignition electron becomes the minimum value of the activation energy, the dispersion value, and the effective number.

(Best form of implementing the invention)

Embodiments of the present invention will be described below with reference to the drawings. Further, the embodiment In the entire drawings, the same components are denoted by the same reference numerals, and the repeated description is omitted.

(First embodiment)

1 is a block diagram showing an example of a configuration and a procedure of an electronic discharge characteristic analysis system and an analysis method according to a first embodiment of the present invention. Fig. 2 is a block diagram showing an example of the hardware configuration of the analysis system.

First, the configuration of an analysis system for electronic emission characteristics according to the first embodiment of the present invention will be described with reference to Figs. In the analysis system of the first embodiment of the present invention, for example, a system for analyzing the electronic emission characteristics of the electron emission source of the oxide film material (MgO or the like) in the PDP is constituted by the personal computer 2200, the computing device 102, and the like. The personal computer 2200 is composed of an input device 101 including a memory device, an output device 103 including a video processing device, and the like. The computing device 102 is composed of a CPU device 2201, a memory device 2202, and the like. The CPU device 2201 and the memory device 2202 are connected by a data transfer coupling bus 2204.

Further, in FIG. 2, the plurality of computing devices 102 are connected in a matrix by the data transfer coupling busbar 2205. However, the present invention is not limited thereto, and the computing device 102 may be provided in one computer or in the personal computer 2200.

Hereinafter, an operation example of the electronic emission characteristic analysis system according to the first embodiment of the present invention will be described with reference to Figs. In the computing device 102, the memory device 2202 is stored (holds) an analysis program of the electronic release characteristics, and the CPU device 2201 reads the program and performs arithmetic processing in accordance with an instruction from the personal computer 2200. The result of the arithmetic processing is stored in the memory device 2202. Operation The necessary data classes are processed by the personal computer 2200 via the data transfer coupling bus 2205. Further, the result of the arithmetic processing by the computing device 102 is transmitted to the personal computer 2200 via the data transfer coupling bus 2205. Further, in the personal computer 2200, information necessary for the arithmetic processing is input from the input device 101, and the result of the arithmetic processing is output and displayed on the output device 103.

As shown in FIG. 1, the arithmetic processing of the computing device 102 is performed in the following order.

First, in step S102-1, the address discharge delay time t _{d obtained} by measuring the temperature T of the measurement time between the rest time t _i and the measurement condition of the application voltage after the application of the voltage to the PDP panel is performed. The measurement data is input to the computing device 102 by the input device 101.

Thereafter, in step S102-2, the calculation device 102 calculates the cumulative number of discharge delay times for each address based on the measurement data of the temperature T of the measurement conditions of each of the rest periods t _i and MgO, and calculates the frequency of the discharge probability. P(t).

Fig. 3 shows the discharge probability frequency P(t) 201 normalized by the maximum value of the discharge probability frequency being one. The discharge probability frequency P(t) is a Gaussian function type on the short time side, but the asymmetric shape of the tail end is subtracted on the long time side. The discharge probability G(t) is calculated using the discharge probability frequency P(t) and the equation (1). Figure 3 shows the discharged probability G(t) 202. The discharged probability G(t) is a convex shape from bottom to top, and the slope (inclination) on the long-term side becomes gentle.

In step S102-3, in order to remove the wobble of the formation delay time t _f , the electron emission constant t _s ^{exp of} the ignition electron is obtained, and the discharged probability G(t) in the long-term region satisfying [number 8] is used and Time t.

Where t _f ^ave is the average value of the formation delay time t _f and σ _tf is the dispersion value forming the delay time t _f . Forming the average value of the delay time t _f ^ave and the dispersion value σ _{tf of the} formation delay time, which can be used for the measurement of the short rest time t _i of the ignition electrons when the address voltage is applied, and the average of the discharge delay time of the address The value and the dispersion value are calculated. As shown in FIG. 3, the ignition electrons are calculated using t _a , t _b of the long-term region 203 satisfying [Number 9], the discharged probabilities G(t _a ) and G(t _b ), and the equation (2). The electron emits a constant t _s ^exp .

For example, for the measurement of the address discharge delay time of the short rest time of t _i = 0.1 ms and T = 25 ° C, the average value of the address discharge delay time t _f ^ave = 0.59 μs, the dispersion value σ _tf = 0.09 μs. The measurement conditions t _i = 50 ms of the analysis object, the time G of the discharge probability G(t) in T = 25 ° C became 63.2% and 95%, and the times t _63.2 and t ₉₅ were respectively 0.84 μs and 1.45 μs. t _s ^exp (t _i = 50 ms, T = 25 ° C) obtained using the formula (2) = 0.31 μs. therefore,

Become 0.71μs. This shows that the satisfaction is satisfied.

The condition of the long time zone.

Similarly, in Fig. 4, the electron emission constant t _s ^exp of the ignition electron calculated for the measurement data of 12 measurement conditions of t _i = 1 ms, 10 ms, 50 ms, and T = -10 ° C, 10 ° C, 25 ° C, and 60 ° C. Expressed by depiction 301. In this way, the electron emission constant t _s ^exp of the temperature T of the measurement conditions of the rest time t _i and MgO can be calculated.

A method of analyzing the energy state density D _j (E) of the type j of the electron emission source will be described below. The electron emission constant t _s ^th of the ignition electron obtained by the calculation is set by the following equation (3) and equation (4) and the energy state density D _j (E).

Where f _ph is the number of phonon vibrations of the electron emission source, and k _B is the Boltzmann constant. Further, W _j (E, t _i , T) is a measurement data of the temperature T of the measurement conditions of the rest time t _i and MgO, by [number 15] E _m ( t _i , T ) = k _B T ln ( t _i f _ph,j )

A window function having a maximum value e ^-1 t _i ^-1 and an energy width ± k _B T centered. As a measurement condition, the rest time t _i is set to be constant, and in the measurement of the temperature T in which the measurement condition of MgO is changed, the window function has a maximum value e ⁻¹ t _i ⁻¹ and the search energy determined by the measurement condition is made constant. The center value E _m (t _i , T) changes. In addition, the temperature T at which the measurement condition of MgO is set is constant, and the center value E _m (t _i , T) of the search energy determined by the measurement condition is changed while the maximum value e ^{-1 is} measured during the measurement of the change in the rest time t _i . t _i ^-1 will also change.

Fig. 5 shows the temperature of the measurement conditions of the rest time t _i = 0.01 ms, 0.1 ms, 1 ms, 10 ms, 100 ms, 1000 ms and MgO T = -10 ° C, 0 ° C, 10 ° C, 20 ° C, 30 ° C, 40 ° C, The window function at 60 °C becomes the maximum energy [16] E _m ( t _i , T ) = k _B T ln( t _i f _ph,j )

Among them, the phonon vibration number f _{ph of the} electron emission source is set to 3.1 × 10 ¹³ Hz. Among the rest time t _i =0.01 ms and the temperature T of -10 ° C of the measurement conditions of MgO, the maximum energy of the window function was 443 meV. Further, among the rest time t _i = 1000 ms and the temperature T of the measurement condition of MgO T = 60 ° C, the maximum energy of the window function was 892 meV.

As can be seen from Fig. 6, the inverse of the electron emission constant t _s ^th is equal to the energy state density D _j (E) 401 of the unknown electron emission source and the window function W _j (E, determined by the measurement conditions). The energy of t _i , T) 402 is calculated by overlapping integration, and the sum of all types of electron emission sources is taken as the sum.

In step S102-4, when the Gaussian function of the equation (5) is set as the energy state density D _j (E) of the electron emission source, the type j of one electron emission source is calculated according to the condition of FIG. The number N _ee,j , the average value of the activation energy ΔE _a,j , and the dispersion value of the activation energy σ _E,j . At this time, the search range, the search width, and the number to be input in order to explore the values of these parameters are explained below.

When the measurement conditions t _i = 1 ms, 10 ms, 50 ms, T = -10 ° C, 10 ° C, 25 ° C, and 60 ° C, the energy system with the largest window function is in the range of 526 meV to 778 meV. The energy width of the window function is 3k _B T of about 75 meV, so the energy region becomes 451 meV to 853 meV. Wherein, the search range of the average value of the activation energy ΔE _a,j is set to include the minimum value -3k _B T to E _m (t _i ) of the center value E _m (t _i , T) of the search energy determined by the measurement conditions. , T) maximum + 3k _B T 400meV ~ 900meV. Moreover, the energy interval of the center value E _m (t _i , T) of the search energy determined by the measurement conditions has a minimum interval of 10.1 meV, a maximum interval of 52.2 meV, and an average interval of 31.5 meV, so the experimental precision is High 30meV level. Wherein, the average value of the activation energy ΔE _a,j , and the energy search width of the dispersion value σ _E,j of the activation energy are set as the energy of the center value E _m (t _i ,T) of the search energy determined by the measurement conditions. 10 meV below the average of the interval. In addition, the effective number N _{ee,j is} because the time order width of the measurement condition t _i is two digits, and the search range of the effective number is set to the width of the time series, that is, the number of two digits. It is 1 × 10 ⁵ / grid ~ 1 × 10 ⁷ / grid. Wherein, the search point of the significant number N _ee,j is set to 1×10 ⁵ /di, 1.1×10 ⁵ /di, 2×10 ⁵ /di, 2.1×10 ⁵ /di, 1×10 ⁶ / div, 1.1 × 10 ⁶ cells / cells, 2 × 10 ⁶ cells / cells, 2.1 × 10 ⁶ cells / cells, 1 × 10 ⁷ cells / lattice 201. By the above, the range of the average value of the activation energy ΔE _a,j is 51 exploration points which are discretized from 400 meV to 900 meV at a width of 10 meV, and the range of exploration of the dispersion value σ _E,j of the activation energy is 10 exploration points for discretizing 5~100meV with a width of 10meV. For the effective number N _ee, the exploration range of _j is 201 exploration points with 1 × 10 ⁵ / Grid ~ 1 × 10 ⁷ / Grid discretized The composition, the exploration range, the exploration width, and all combinations are input with about 1 × 10 ⁵ parameter values.

In step S102-5, the equation (5) in which the average value of the activation energy ΔE _a,j , the dispersion value of the activation energy σ _E,j and the effective number N _ee,j are set is substituted into the equation (3). Calculate the overlap integral for the energy state density D _j (E) of the electron emission source and the energy of the window function W _j (E, t _i , T), and calculate the electron emission constant of the ignition electron obtained by the calculation from the inverse number t _s ^th (t _i , T). Among them, the number of phonon vibrations of the type j of one electron discharge source was set to 1.19 × 10 ¹³ Hz.

In step S102-6, the total number of measurement conditions of the temperature T of the measurement conditions of the rest time t _i and the MgO is N=12, and the electron emission constant of the ignition electron obtained from the measurement data represented by the formula (6) is obtained. _s ^exp (t _i , T) and the average quadratic error RMSD of the electron emission constant t _s ^th (t _i , T) of the ignition electron obtained by the calculation become minimum, and the average value of the activation energy ΔE _{a is obtained. , j} , the dispersion value of the activation energy σ _{E, j} and the effective number N _ee,j .

Σ _N=12 {t _s ^Exp (t _i, T)-t _s ^Th (t _i, T)} ²    (6)

In Fig. 8, the electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data is represented by a plot 301, and the electron emission constant of the ignition electron obtained by the calculation is t _s ^th (t _i , T ) is indicated by a solid line 501. The two have excellent consistency. As a result, the average quadratic error RMSD is calculated to be a minimum value of 165 ns, the average value of the activation energy ΔE _{a, j} = 760 meV, the dispersion value of the activation energy σ _{E, j} = 55 meV, the effective number N _{ee, j} = 1.3 × 10 ⁶ / grid.

As described above, as shown in FIG. 9, as the energy state density D _j (E) 601 of the unknown electron emission source, the average value of the activation energy ΔE _{a, j} = 760 meV, the dispersion value σ _{E of the} activation energy _{, j} = 55 meV, the effective number N _{ee, j} = 1.3 × 10 ⁶ / division, which is output and displayed by the output device 103.

(Second embodiment)

Fig. 10 is a block diagram showing an example of a configuration and a procedure of an electronic discharge characteristic analysis system and an analysis method according to a second embodiment of the present invention.

The hardware configuration and operation example of the analysis system for the electronic emission characteristics according to the second embodiment of the present invention are the same as those of the first embodiment, and thus the description thereof will be omitted.

As shown in Fig. 10, the arithmetic processing of the computing device 102 of the second embodiment is executed in the following order.

First, steps S102-1 to S102-3 are the same as those of the first embodiment described above. In step S102, so as to obtain the measurement panel for PDP, for MgO quiescent time t _I and the measured temperature T conditions of the address discharge delay time t _d of the measured data, is input by the input device 101 to the computing device 102. In step S102-2, the cumulative number of discharge delay times for each address is calculated based on the measured data of the temperature T for each of the rest time t _i and the MgO measurement conditions, and the discharge probability frequency P(t) and the discharged probability are calculated. G(t). In step S102-3, the use satisfies [number 18]

The electron emission constant t _s ^{exp of} the ignition electron is obtained for the long-term regions t _a , t _b , the discharge probability G(t _a ) and G(t _b ), and the equation (2).

In Fig. 11, the measurement conditions of 18 measurement conditions are obtained from the measurement conditions of t _i = 1 ms, 10 ms, 50 ms, T = -10 ° C, 0 ° C, 10 ° C, 25 ° C, 40 ° C, and 60 ° C. The electron emission constant t _s ^{exp of the} ignition electron is represented by the depiction 801.

In step S102-4, as the energy state density D ₁ (E) of the first electron emission source, when the Gaussian function of the equation (7) is set, the effective number N _ee,1 and the average of the activation energy are calculated according to FIG. 7 . The value ΔE _a,1 , the dispersion value of the activation energy σ _E,1 . At this time, the search range, the search width, and the number to be input for exploring the values of the parameters are described below.

When the measurement conditions t _i = 1 ms, 10 ms, 50 ms, T = -10 ° C, 0 ° C, 10 ° C, 25 ° C, 40 ° C, and 60 ° C, the energy region of the window function is in the range of 451 meV to 853 meV. Similarly to the first embodiment described above, the average value of the activation energy ΔE _{a,1 is in} the range of 400 meV to 900 meV. In addition, the energy interval of the center value E _m (t _i , T) of the search energy determined by the measurement condition has a minimum interval of 0.5 meV, a maximum interval of 46.2 meV, and an average interval of 14.8 meV, so the experimental precision is at most 10meV level. The energy of the average value of the activation energy ΔE _a,1 and the dispersion value of the activation energy σ _{E,1 is} the energy of the center value E _m (t _i ,T) of the energy of exploration determined by the measurement conditions. 5meV below the average of the intervals.

In addition, the effective number N _ee,1 , because the time series width of the measurement condition is about 2 digits, the search range of the effective number is set to the width of the time series, that is, 2 digits, and 1 × 10 ⁵ / grid ~ 1 × 10 ⁷ / grid to discretize 201. According to the above, the search range of the average value ΔE _a,1 of the activation energy is 101 exploration points which are discretized by 400 meV to 900 meV at a width of 5 meV _{, and} the search range of the dispersion value σ _E,1 of the activation energy is obtained. It is 20 exploration points that make 5~100meV discretized by 5meV width. For the effective number N _ee, the range of exploration is 1 × 10 ⁵ / grid ~ 1 × 10 ⁷ / grid is discretized 201 The exploration points are composed, the exploration range, the exploration width, and all combinations are input with about 4.1×10 ⁵ parameter values.

In step S102-5, the formula (7) in which the average value of the activation energy ΔE _a,1 , the dispersion value of the activation energy σ _E,1 and the effective number N _ee,1 are set is substituted into the equation (3). Calculate the overlap integral for the energy state density D ₁ (E) of the electron emission source and the energy of the window function W ₁ (E, t _i , T), and calculate the first electron of the ignition electron obtained by the calculation from the inverse number The constant t _{1 s} ^th (t _i , T) is released. Among them, the number of phonon vibrations of the first electron emission source was set to 1.19 × 10 ¹³ Hz.

In step S102-6, the total number of measurement conditions of the temperature T of the measurement conditions of the rest time t _i and MgO is N=18, and the electron emission constant t _s ^exp of the ignition electron obtained from the measurement data is expressed by the equation (8). (t _i , T) and the average quadratic error RMSD of the first electron emission constant t _1,s ^th (t _i , T) of the ignition electron obtained by the calculation become minimum, and the average value of the activation energy is obtained. E _a,1 , the dispersion value of the activation energy σ _E,1 and the effective number N _ee,1 .

Σ _N=18 {t _s ^Exp (t _i, T)-t _1,s ^Th (t _i, T)} ²    (8)

In Fig. 12, the electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data is represented by a drawing 801, and the first electron emission constant t _{1, s} ^th of the ignition electron obtained by the calculation is obtained. t _i , T) is indicated by a solid line 901. Both have better consistency. As a result, the average quadratic error RMSD is calculated to be a minimum value of 115 ns, the average value of the activation energy ΔE _{a, 1} = 780 meV, the dispersion value of the activation energy σ _{E, 1} = 95 meV, the effective number N _{ee, 1} = 1.0 × 10 ⁶ / grid.

As described above, as shown in Fig. 13, as the solid line 1001 of the energy state density D ₁ (E) of the first electron emission source, the average value of the activation energy ΔE _a,1 = 780 meV, and the dispersion of the activation energy The value σ _{E, 1} = 95 meV, the effective number N _{ee, 1} = 1.0 × 10 ⁶ / division, and is output and displayed by the output device 103.

Next, in consideration of the presence of a new electron emission source, according to step S102-7 shown in FIG. 10, the process returns to step S102-4 as the energy state density D ₂ (E) of the second electron emission source, in the setting formula ( In the case of the Gaussian function of 9), the effective number N _{ee, 2} , the average value of the activation energy ΔE _{a, 2} , and the dispersion value of the activation energy σ _{E, 2 are} calculated according to FIG. 7 . At this time, the search range, the search width, and the number to be input for exploring the values of the parameters are described below.

For the measurement conditions t _i =1 ms, 10 ms, 50 ms, T=-10 ° C, 0 ° C, 10 ° C, 25 ° C, 40 ° C, 60 ° C, as in the description of the first electron emission source, the average value of the activation energy The range of exploration of ΔE _a,2 is 101 exploration points that discretize 400meV~900meV with a width of 5meV. The range of exploration of the dispersion value of activation energy σ _{E,2 is} such that 5~100meV is dispersed by 5meV width. 20 exploration points, the exploration range of the effective number N _{ee, 2} is composed of 201 exploration points that discretize 1 × 10 ⁵ / grid ~ 1 × 10 ⁷ / grid, the scope of exploration, the width of exploration and All combinations are input with approximately 4.1 × 10 ⁵ parameter values.

In step S102-5, the equation (9) in which the average value of the activation energy ΔE _a,2 , the dispersion value of the activation energy σ _E,2 and the effective number N _ee,2 are set is substituted into the equation (3). Calculate the overlap integral for the energy state density D ₂ (E) of the electron emission source and the energy of the window function W ₂ (E, t _i , T), and calculate the second electron of the ignition electron obtained by the calculation from the inverse number The constant t _2,s ^th (t _i ,T) is released. Among them, the number of phonon vibrations of the second electron emission source was set to 3.1 × 10 ¹³ Hz.

In step S102-6, the total number of measurement conditions of the temperature T of the measurement conditions of the rest time t _i and MgO is N=18, and the electron emission constant t _s ^exp of the ignition electron obtained from the measurement data is expressed by the equation (10). (t _i , T) and the first electron emission constant t _{1 s} ^th (t _i , T) for the ignition electron obtained by the calculation and the second electron emission constant t _{2, s} of the ignition electron obtained by the calculation The average quadratic error RMSD of the sum of ^th (t _i , T) is minimized, and the average value ΔE _a,2 of the activation energy, the dispersion value σ _{E,2 of the} activation energy _, and the effective number N _{ee,2 are obtained} .

Σ _N=18 {t _s ^Exp (t _i, T)-t _1,s ^Th (t _i, T)-t _2,s ^Th (t _i, T)} ²

In Fig. 14, the electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data is represented by a plot 801, and the electron emission constant of the ignition electron obtained by the calculation is t _s ^th (t _i , T == the first electron emission constant t _1,s ^th (t _i ,T) of the ignition electron obtained by the calculation + the second electron emission constant t _2,s ^th (t _i ,T of the ignition electron obtained by the calculation ) is indicated by a solid line 1001. Both have better consistency. As a result, it is calculated that the average quadratic error RMSD is reduced to a minimum value of 95 ns, and the average value of the activation energy is calculated as ΔE _{a, 2} = 550 meV, the dispersion value of the activation energy σ _{E, 2} = 20 meV, the effective number N _{ee, 2} = 2.0 × 10 ⁵ / grid.

Thus, as shown in FIG. 15, the solid line 1001 of the energy state density D ₁ (E) of the first type and the first type of electron emission source and the solid line 1201 of D ₂ (E) are activated energy. The average value ΔE _a,1 =780 meV, the dispersion value of the activation energy σ _E,1 =95 meV, the effective number N _ee,1 =1.0×10 ⁶ cells/division, and the average value of the activation energy ΔE _a,2 =550 meV The dispersion value of the activation energy σ _{E, 2} = 20 meV, the effective number N _{ee, 2} = 2.0 × 10 ⁵ / division, is output and displayed by the output device 103.

(Third embodiment)

Fig. 16 is a block diagram showing an example of the configuration and sequence of an electronic discharge characteristic analysis system and an analysis method according to a third embodiment of the present invention.

The hardware configuration and operation example of the analysis system for the electronic emission characteristics according to the third embodiment of the present invention are the same as those of the first embodiment, and thus the description thereof will be omitted.

As shown in Fig. 16, the arithmetic processing of the computing device 102 of the third embodiment is executed in the following order.

First, steps S102-1 to S102-3 are the same as those of the first embodiment described above. In step S102-1, so as to obtain the measurement panel for PDP, for MgO quiescent time t _I and the measured temperature T conditions of the address discharge delay time t _d of the measured data, is input by the input device 101 to the computing device 102. In step S102-2, the cumulative number of discharge delay times for each address is calculated based on the measured data of the temperature T for each of the rest time t _i and the MgO measurement conditions, and the discharge probability frequency P(t) and the discharged probability are calculated. G(t). In step S102-3, the use is satisfied

The electron emission constant t _s ^{exp of} the ignition electron is obtained for the long-term regions t _a , t _b , the discharge probability G(t _a ) and G(t _b ), and the equation (2).

In Fig. 17, the electrons of the ignition electrons calculated from the measurement data of the six measurement conditions are measured under the conditions of t _i = 16 ms, T = -10 ° C, -5 ° C, 0 ° C, 5 ° C, 10 ° C, and 20 ° C. The constant t _s ^{exp is} emitted and represented by the depiction 1401.

In step S1302-4, as the energy state density D(E) of the first electron emission source, when the δ function of the equation (11) is set, the method for calculating the average value ΔE _a of the effective number N _ee and the activation energy Explain as follows.

[22] D ( E )= N _ee δ ( E -△ E _a ) (11)

Using the formula (3) and the formula (11), the following formula (12) is obtained.

In step S1302-5, the horizontal axis takes 1/k _B T and the vertical axis is taken

Among them, the number of phonon vibrations of the electron emission source was set to 3.1 × 10 ¹³ Hz.

In step S1302-6, to obtain the respective measurement conditions for the temperature T is calculated assuming a mean value of △ E _a the activation energy

The value, the slope of the straight line 1402 after the adjustment of the minimum quadratic error is ΔE _a . According to the ΔE _a , the temperature T for each measurement condition is calculated again.

The value is obtained, and the slope ΔE _a of the straight line 1402 adjusted by the minimum quadratic error is obtained. The convergence value of the repeated calculation, the slope and intercept △ E _{a (intercet) ln (f ph N} ee) obtained N _ee.

As shown in Fig. 17, the correlation coefficient when the correlation coefficient at the minimum quadratic error adjustment is about 0.96 is obtained, and the average value of the activation energy ΔE _a is 661 meV, and the effective number N _ee is 6.2×10. ⁵ / grid. As described above, as the energy state density D(E) of the electron emission source, the average value of the activation energy ΔE _a = 661 meV, the effective number N _ee = 6.2 × 10 ⁵ / division, and output by the output device 103, display.

(Effects of the first to third embodiments)

Therefore, according to the analysis system and the analysis method of the electron emission characteristics of the first to third embodiments, the rest time t _i between the application of the voltage and the application of the address voltage and the measurement conditions of the oxide film (MgO or the like) are The temperature T can be used to calculate the average value, the dispersion value, and the effective number of the activation energy of the energy state density of one or a plurality of electron emission sources using measurement data with respect to the address discharge delay time t _d of the addresses.

The present invention has been specifically described with reference to the embodiments, but the present invention is not limited to the embodiments described above, and various modifications can be made without departing from the scope of the invention. Further, the first to third embodiments described above may be combined as appropriate.

(industrial availability)

The present invention can be applied to an oxide film material (MgO, etc.), an ion crystal material, and a semiconductor material in a PDP or an impurity level measuring device. The source is released, and the analysis of the electron emission characteristics is effectively implemented.

(effect of the invention)

Representative embodiments according to the rest time before the address voltage is applied to the oxide film t _i measured (MgO etc.) conditions of temperature T, the use of the address with respect to its discharge delay time is measured for t _D after the applied voltage is maintained The data can be used to calculate the average value, the dispersion value, and the effective number of the activation energy for the energy state density of one or a plurality of electron emission sources.

101‧‧‧ Input device

102‧‧‧ Computing device

103‧‧‧Output device

201‧‧‧Discharge probability frequency

202‧‧‧Discharge probability

203‧‧‧Long time zone

301, 801, 1401‧‧

501, 901, 1001, 1201‧‧‧ solid line

1402‧‧‧ Straight line

401, 601‧‧‧ Energy state density of electron emission sources

402‧‧‧ window function

1501‧‧‧ front substrate

1502‧‧‧X electrode

1503‧‧‧Y electrode

1504‧‧‧X bus bar electrode

1505‧‧‧Y bus bar electrode

1506‧‧‧ Front dielectric

1507‧‧‧Protective film

1508‧‧‧Back substrate

1509‧‧‧ address electrode (A electrode)

1510‧‧‧Back dielectric

1511‧‧‧ partition wall

1512‧‧‧Fertior

1513‧‧‧Discharge space

1600‧‧‧Plastic Display Panel (PDP)

1601‧‧‧ drive circuit

1602‧‧‧Plastic display device

1603‧‧‧Image source

1700‧‧1TV period

1701~1708‧‧‧Sub-field

1709‧‧‧Reset discharge period

1710‧‧‧ address discharge period

1711‧‧‧Maintaining discharge period

1801‧‧‧ voltage waveform applied to the Y electrode

1802‧‧‧ Voltage waveform applied to the A electrode

1803‧‧‧ address discharge current

1804, 1805‧‧‧ drive voltage waveform

1803‧‧‧Maintaining discharge current

1901‧‧‧Mg atom

1902‧‧‧Oxygen atom

1903‧‧‧Replacement structure

2200‧‧‧ PC

2201‧‧‧CPU device

2202‧‧‧ memory device

2204, 2205‧‧‧Coupling busbar for data transmission

1 is a block diagram showing an example of a configuration and a procedure of an electronic discharge characteristic analysis system and an analysis method according to a first embodiment of the present invention.

2 is a block diagram showing an example of a hardware configuration of an analysis system in an analysis system and an analysis method for electronic emission characteristics according to the first embodiment of the present invention.

3 is an explanatory diagram of analysis of an electron emission constant of an ignition electron having a discharge probability in the analysis system and the analysis method of the electron emission characteristics according to the first embodiment of the present invention.

4 is a diagram for showing the expression of the electron emission constant of the ignition electron obtained from the measurement data in the analysis system and the analysis method of the electron emission characteristics according to the first embodiment of the present invention.

Fig. 5 is a view showing an energy representation in which the window function of the temperature T of the rest time t _i and the measurement condition is maximized in the analysis system and the analysis method of the electron emission characteristics according to the first embodiment of the present invention.

Fig. 6 is an explanatory diagram showing an energy overlap between an energy state density of an electron emission source and a window function in an analysis system and an analysis method for an electron emission characteristic according to the first embodiment of the present invention.

Fig. 7 is a view showing the average value of the activation energy, the dispersion value, the search range of the effective number, and the search width in the analysis system and the analysis method for the electron emission characteristics according to the first embodiment of the present invention.

8 is an analysis system and an analysis method for an electron emission characteristic according to the first embodiment of the present invention, in which an electron emission constant of an ignition electron obtained by calculation (solid line) and a measurement data (drawing) are obtained for an electron emission source. A comparison chart of the electron emission constants of the ignition electrons.

Fig. 9 is a view showing the energy state density of the electron emission source in the analysis system and the analysis method of the electron emission characteristics according to the first embodiment of the present invention.

Fig. 10 is a block diagram showing an example of a configuration and a procedure of an electronic discharge characteristic analysis system and an analysis method according to a second embodiment of the present invention.

FIG. 11 is a diagram for showing the expression of the electron emission constant of the ignition electron obtained from the measurement data in the analysis system and the analysis method of the electron emission characteristics according to the second embodiment of the present invention.

Fig. 12 is a diagram showing an electron emission constant and a measurement data of an ignition electron obtained by calculation (solid line) for the first electron emission source in the analysis system and the analysis method for the electron emission characteristics according to the second embodiment of the present invention. A comparison chart of the electron emission constants of the ignition electrons obtained.

Fig. 13 is a view showing the energy state density of the first electron emission source in the analysis system and the analysis method for the electron emission characteristics according to the second embodiment of the present invention.

14 is a diagram showing an electron emission constant of an ignition electron obtained by calculation (solid line) for the first type and the second type of electron emission source in the analysis system and the analysis method for the electron emission characteristics according to the second embodiment of the present invention; A comparison chart of the electron emission constants of the ignition electrons obtained by the measurement data (drawing).

Fig. 15 is a view showing the energy state density of the first type and the second type of electron emission source in the analysis system and the analysis method for the electron emission characteristics according to the second embodiment of the present invention.

Fig. 16 is a block diagram showing an example of the configuration and sequence of an electronic discharge characteristic analysis system and an analysis method according to a third embodiment of the present invention.

Fig. 17 is an analysis diagram showing activation energy and effective number of an electron emission source using temperature dependence of an ignition electron emission constant in an analysis system and an analysis method for electron emission characteristics according to a third embodiment of the present invention.

Fig. 18 is a perspective view showing a partial structure of a three-electrode structure AC surface discharge type plasma display panel which is reviewed as a premise of the present invention.

Fig. 19 is a block diagram showing a schematic configuration of a plasma display device which is reviewed as a premise of the present invention.

20(A) and (B) are explanatory views showing the operation of the drive circuit during the display of the 1TV field of the image on the plasma display panel in the plasma display device which is reviewed as a premise of the present invention.

Fig. 21 is a view showing a voltage time series and a discharge current waveform of a plasma display panel of a plasma display device which is reviewed as a premise of the present invention.

Fig. 22 is a view showing the crystal structure of magnesium oxide (MgO) and an electron emission source which are reviewed as a premise of the present invention.

Fig. 23 is a diagram showing an analytical method for calculating the statistical delay time t _s and the formation delay time t _f using the cumulative number of the measured data of the address discharge delay time and the discharged probability as a premise of the present invention.

Fig. 24 is a block diagram showing an example of the configuration and sequence of an analysis system and an analysis method for electronic emission characteristics which are reviewed as a premise of the present invention.

101‧‧‧ Input device

102‧‧‧ Computing device

103‧‧‧Output device

2200‧‧‧ PC

Claims (18)

An analysis system for electronic emission characteristics, comprising: a computing device, comprising: a CPU for performing arithmetic processing; a memory device for maintaining a program and data executed by the CPU; and a bus bar for combining the above a CPU and the above memory device; an input device for inputting the data; and an output device for outputting a calculation result of the computing device; wherein the program is a program for analyzing an energy state density of one or a plurality of electron emission sources; In the first step, the measurement data of the address discharge delay time t _{d for} the measurement condition of the rest time t _i between the application of the sustain voltage and the application of the temperature T of the measurement condition is input; the second step is based on Calculating the cumulative number of discharge delay times for each address, calculating the frequency of the discharge delay time and the probability of discharge, and calculating the frequency of the above-described rest time t _i and the temperature T of the above-mentioned measurement conditions; Calculating an electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data; and a fourth step for setting the electricity a function of the energy state density of the sub-discharge source, setting an average value, a dispersion value, a search range and a search width of the activation energy for the energy state density; and a fifth step, by using the energy state density of the electron emission source The overlap integral of the energy of the window function calculates the electron emission constant t _s ^th (t _i , T) of the ignition electron obtained by the calculation; and the sixth step, the measurement of the temperature T of the rest time t _i and the measurement condition The total number of conditions determines the electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data and the electron emission constant t _s ^th (t _i , T of the ignition electron obtained by the above calculation) The average quadratic error becomes the minimum of the activation energy, the dispersion value, and the effective number. An analysis system for an electronic emission characteristic according to the first aspect of the patent application, wherein the third step is to calculate the above-described discharge probability G(t) in a long-term region satisfying the following [number 1] and the time t thereof. The electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data, and the measurement data of the short rest time t _i of the ignition electron when the address voltage is applied, t _f ^ave is the address discharge The average value of the delay time, σ _tf is the dispersion value of the address discharge delay time, An analysis system for an electron emission characteristic according to the second aspect of the patent application, wherein in the third step, the measurement data is calculated using G(t) having a discharge probability G(t) of 63.2% or more and a time t thereof. The obtained electron emission constant of the ignition electron is t _s ^exp (t _i , T). An analysis system for electronic emission characteristics according to the first aspect of the patent application, wherein in the fourth step, a Gaussian function is set as the energy state density of the electron emission source, and for the type j of one electron emission source, the effective number N is searched. _{When ee,j} , the average value of the activation energy ΔE _a,j , and the dispersion value of the activation energy σ _E,j are set, the search range and the exploration width to be input are set. An analysis system for electronic emission characteristics according to item 4 of the patent application, wherein in the fourth step, a Gaussian function is set as the energy state density of the electron emission source as the average value of the activation energy ΔE _a,j Set the energy range including the minimum value of the center value E _m (t _i, T) of the search energy determined by the measurement conditions -3k _B T to the maximum value of E _m (t _i, T) + 3k _B T , [ Number 2] E _m ( t _i , T )= K _B T ln( t _i f _ph,j ) , where f _ph is the number of phonon vibrations of the electron emission source, and k _B is the Boltzmann constant (Boltzmann's constant ). An analytical system for electronic emission characteristics according to item 4 of the patent application, wherein in the fourth step, a Gaussian function is set as the energy state density of the electron emission source, and the average value of the activation energy ΔE _a,j and the activation energy are obtained. The search width of the energy of the dispersion value σ _E,j is equal to or less than the average value of the energy intervals of the center values E _m (t _i, T) of the search energy determined by the measurement conditions. An analysis system for electronic emission characteristics according to item 4 of the patent application, wherein in the fourth step, a Gaussian function is set as an energy state density of the electron emission source, and a time series width of the rest time t _i is set as a valid number. N _{ee, j} 's scope of exploration. An analysis system for an electron emission characteristic according to the first aspect of the patent application, wherein the first electron emission constant t _{1, s} ^th (t) of the ignition electron obtained by the calculation is calculated with respect to the energy state density of the first electron emission source _i , T), determining the effective number N _ee,1 , the average value of the activation energy ΔE _a,1 , the dispersion value of the activation energy σ _E,1 , and then returning to the fourth step, setting the Gaussian function as the second electron The energy state density of the source is released, and the second electron emission constant t _2,s ^th (t _i ,T) of the ignition electron obtained by the calculation is calculated, and the measurement conditions of the rest time t _i and the temperature T of the measurement condition are The sum determines the electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data and the first electron emission constant t _{i, s} ^th (t _i , of the ignition electron obtained by the above calculation. T)+ The average quadratic error of the second electron emission constant t _2,s ^th (t _i ,T) of the ignition electron obtained by the above calculation becomes the minimum effective number N _ee,2 , and the average value of the activation energy Δ E _{a, 2} , the dispersion value of the activation energy σ _{E, 2} . For example, in the analysis system of the electronic emission characteristic of the fourth application patent, wherein the δ function is set as the energy state density of the electron emission source, and the horizontal axis is 1/k _B T , and the vertical axis is taken. △ E _a by the slope and intercept of the In (f _ph N _ee) of the straight line to be corrected least squares error is determined N _ee; wherein, f _ph is the number of the electron emission source of the phonon, k _B is the wave Boltzmann's constant. A method for analyzing an electron emission characteristic is to analyze an energy state density of one or a plurality of electron emission sources; and the method includes: a first step of inputting a rest time t _i until an application of a sustain voltage to an address voltage is applied The measurement data of the address discharge delay time t _d of the measurement condition of the temperature T of the measurement condition; the second step, calculating each address based on the above-described measurement data for the above-described rest time t _i and the temperature T of the above-mentioned measurement condition The cumulative number of discharge delay times is used to calculate the frequency of discharge probability and the probability of discharge; and in the third step, the electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data is calculated based on the discharge probability; The fourth step is for setting a function of the energy state density of the electron emission source, setting an average value, a dispersion value, a search range and a search width of the activation energy for the energy state density; and the fifth step, by The overlap of the energy state density of the electron emission source and the energy of the window function, and calculating the electron emission of the ignition electron obtained by the calculation ^{_{t s th (t i, T}} ); and a sixth step of, for the pause time t _i and the temperature T of the total of the measurement conditions of the measurement conditions described above, is determined so that the information obtained by the measurement of electron emission constant ignition electronics The average value, the dispersion value, and the effective activation energy of t _s ^exp (t _i , T) and the average quadratic error of the electron emission constant t _s ^th (t _i , T) of the ignition electron obtained by the above calculation become the minimum number. The method for analyzing an electron emission characteristic according to the tenth aspect of the patent application, wherein the third step is to calculate the above-described discharge probability G(t) in the long-term region satisfying the following [number 4] and the time t thereof. The electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data, and the measurement data of the short rest time t _i of the ignition electron when the address voltage is applied, t _f ^ave is the address discharge The average value of the delay time, σ _tf is the dispersion value of the address discharge delay time, The method for analyzing an electron emission characteristic according to the eleventh aspect of the patent application, wherein in the third step, the measurement data is calculated using G(t) having a discharge probability G(t) of 63.2% or more and a time t thereof. The obtained electron emission constant of the ignition electron is t _s ^exp (t _i , T). The method for analyzing the electron emission characteristics of claim 10, wherein in the fourth step, the Gaussian function is set as the energy state density of the electron emission source, and for the type j of one electron emission source, the effective number N is searched. _{When ee,j} , the average value of the activation energy ΔE _a,j , and the dispersion value of the activation energy σ _E,j are set, the search range and the exploration width to be input are set. The method for analyzing the electron emission characteristics of the thirteenth aspect of the patent application, wherein in the fourth step, the Gaussian function is set as the energy state density of the electron emission source as the average value of the activation energy ΔE _a,j Set the energy range including the minimum value of the center value E _m (t _i, T) of the search energy determined by the measurement conditions -3k _B T to the maximum value of E _m (t _i, T) + 3k _B T , [ Number 5] E _m ( t _i , T )= k _B T ln( t _i f _ph,j ) where f _ph is the number of phonon vibrations of the electron emission source, and k _B is the Boltzmann constant. The method for analyzing the electron emission characteristics of the thirteenth aspect of the patent application, wherein in the fourth step, the Gaussian function is set as the energy state density of the electron emission source, and the average value of the activation energy ΔE _a,j and the activation energy are obtained. The search width of the energy of the dispersion value σ _E,j is equal to or less than the average value of the energy intervals of the center values E _m (t _i, T) of the search energy determined by the measurement conditions. The method for analyzing an electron emission characteristic according to claim 13 , wherein in the fourth step, a Gaussian function is set as an energy state density of the electron emission source, and a time series width of the rest time t _i is set as a valid number. N _{ee, j} 's scope of exploration. An analysis method of an electron emission characteristic according to claim 10, wherein the first electron emission constant t _{1, s} ^th (t) of the ignition electron obtained by the calculation is calculated with respect to the energy state density of the first electron emission source _i , T), determining the effective number N _ee,1 , the average value of the activation energy ΔE _a,1 , the dispersion value of the activation energy σ _E,1 , and then returning to the fourth step, setting the Gaussian function as the second electron The energy state density of the source is released, and the second electron emission constant t _2,s ^th (t _i ,T) of the ignition electron obtained by the calculation is calculated, and the measurement conditions of the rest time t _i and the temperature T of the measurement condition are The sum determines the electron emission constant t _s ^exp (t _i , T) of the ignition electron obtained from the measurement data and the first electron emission constant t _{1, s} ^th (t _i , of the ignition electron obtained by the above calculation. T)+ The average quadratic error of the second electron emission constant t _2,s ^th (t _i ,T) of the ignition electron obtained by the above calculation becomes the minimum effective number N _ee,2 , and the average value of the activation energy Δ E _{a, 2} , the dispersion value of the activation energy σ _{E, 2} . For example, in the analytical method of the electron emission characteristic of claim 13, wherein the δ function is set as the energy state density of the electron emission source, and the horizontal axis is 1/k _B T , and the vertical axis is taken. △ E _a by the slope and intercept of the In (f _ph N _ee) of the straight line to be corrected least squares error is determined N _ee; wherein, f _ph is the number of the electron emission source of the phonon, k _B is the wave Boltzmann's constant.