TWI408334B - - Google Patents

Info

Publication number
TWI408334B
TWI408334B TW99121763A TW99121763A TWI408334B TW I408334 B TWI408334 B TW I408334B TW 99121763 A TW99121763 A TW 99121763A TW 99121763 A TW99121763 A TW 99121763A TW I408334 B TWI408334 B TW I408334B
Authority
TW
Taiwan
Prior art keywords
controller
workpiece
optical
line measurement
white light
Prior art date
Application number
TW99121763A
Other languages
English (en)
Other versions
TW201202653A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW99121763A priority Critical patent/TW201202653A/zh
Publication of TW201202653A publication Critical patent/TW201202653A/zh
Application granted granted Critical
Publication of TWI408334B publication Critical patent/TWI408334B/zh

Links

Landscapes

  • Machine Tool Sensing Apparatuses (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW99121763A 2010-07-02 2010-07-02 Fine machining equipment with optical on-line measurement function TW201202653A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW99121763A TW201202653A (en) 2010-07-02 2010-07-02 Fine machining equipment with optical on-line measurement function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW99121763A TW201202653A (en) 2010-07-02 2010-07-02 Fine machining equipment with optical on-line measurement function

Publications (2)

Publication Number Publication Date
TW201202653A TW201202653A (en) 2012-01-16
TWI408334B true TWI408334B (zh) 2013-09-11

Family

ID=46756179

Family Applications (1)

Application Number Title Priority Date Filing Date
TW99121763A TW201202653A (en) 2010-07-02 2010-07-02 Fine machining equipment with optical on-line measurement function

Country Status (1)

Country Link
TW (1) TW201202653A (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI786221B (zh) 2017-12-22 2022-12-11 瑞士商謹觀股份公司 具有用於工具夾具及工件夾具間之三維對齊的光學測量裝置的工具機

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6321594B1 (en) * 1997-10-22 2001-11-27 Exponent, Inc. System and method for performing bulge testing of films, coatings and/or layers
TWI313346B (en) * 2006-12-19 2009-08-11 Ind Tech Res Inst Profile measurement method and devices therefor
TW201024658A (en) * 2008-12-31 2010-07-01 Univ Chung Yuan Christian Surface profile measurement device having auto-focusing function and method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6321594B1 (en) * 1997-10-22 2001-11-27 Exponent, Inc. System and method for performing bulge testing of films, coatings and/or layers
TWI313346B (en) * 2006-12-19 2009-08-11 Ind Tech Res Inst Profile measurement method and devices therefor
TW201024658A (en) * 2008-12-31 2010-07-01 Univ Chung Yuan Christian Surface profile measurement device having auto-focusing function and method thereof

Also Published As

Publication number Publication date
TW201202653A (en) 2012-01-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees