TWI408334B - - Google Patents
Info
- Publication number
- TWI408334B TWI408334B TW99121763A TW99121763A TWI408334B TW I408334 B TWI408334 B TW I408334B TW 99121763 A TW99121763 A TW 99121763A TW 99121763 A TW99121763 A TW 99121763A TW I408334 B TWI408334 B TW I408334B
- Authority
- TW
- Taiwan
- Prior art keywords
- controller
- workpiece
- optical
- line measurement
- white light
- Prior art date
Links
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW99121763A TW201202653A (en) | 2010-07-02 | 2010-07-02 | Fine machining equipment with optical on-line measurement function |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW99121763A TW201202653A (en) | 2010-07-02 | 2010-07-02 | Fine machining equipment with optical on-line measurement function |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201202653A TW201202653A (en) | 2012-01-16 |
TWI408334B true TWI408334B (zh) | 2013-09-11 |
Family
ID=46756179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW99121763A TW201202653A (en) | 2010-07-02 | 2010-07-02 | Fine machining equipment with optical on-line measurement function |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201202653A (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI786221B (zh) | 2017-12-22 | 2022-12-11 | 瑞士商謹觀股份公司 | 具有用於工具夾具及工件夾具間之三維對齊的光學測量裝置的工具機 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6321594B1 (en) * | 1997-10-22 | 2001-11-27 | Exponent, Inc. | System and method for performing bulge testing of films, coatings and/or layers |
TWI313346B (en) * | 2006-12-19 | 2009-08-11 | Ind Tech Res Inst | Profile measurement method and devices therefor |
TW201024658A (en) * | 2008-12-31 | 2010-07-01 | Univ Chung Yuan Christian | Surface profile measurement device having auto-focusing function and method thereof |
-
2010
- 2010-07-02 TW TW99121763A patent/TW201202653A/zh not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6321594B1 (en) * | 1997-10-22 | 2001-11-27 | Exponent, Inc. | System and method for performing bulge testing of films, coatings and/or layers |
TWI313346B (en) * | 2006-12-19 | 2009-08-11 | Ind Tech Res Inst | Profile measurement method and devices therefor |
TW201024658A (en) * | 2008-12-31 | 2010-07-01 | Univ Chung Yuan Christian | Surface profile measurement device having auto-focusing function and method thereof |
Also Published As
Publication number | Publication date |
---|---|
TW201202653A (en) | 2012-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |