TWI404599B - Clamping device, handling apparatus and clamping method - Google Patents
Clamping device, handling apparatus and clamping method Download PDFInfo
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本發明涉及一種夾持裝置、搬運裝置及夾持方法,特別是關於一種大尺寸設備的夾持裝置、搬運裝置及夾持方法。The present invention relates to a clamping device, a handling device and a clamping method, and more particularly to a clamping device, a handling device and a clamping method for a large-sized device.
隨著液晶技術的發展,液晶面板的尺寸可以做的越來越大,則液晶面板的製造設備的尺寸也需相應地放大,以製造大尺寸的液晶面板。With the development of liquid crystal technology, the size of the liquid crystal panel can be made larger and larger, and the size of the manufacturing equipment of the liquid crystal panel needs to be enlarged accordingly to manufacture a large-sized liquid crystal panel.
以習知的液晶面板製造設備曝光機為例,早期的液晶面板之尺寸較小,因此曝光機的光罩的尺寸也較小,該較小尺寸的曝光機光罩在搬運過程中手動直接搬運即可。另外,當光罩背面具有表面微塵時,也可直接由一操作者將該光罩舉起,另一操作者於光罩下方用空氣槍對光罩表面進行清潔。但是,隨著液晶面板的尺寸越來越大,該光罩的尺寸也越來越大,在搬運或清潔的過程中已無法用徒手抓舉該光罩。特別是在大尺寸光罩從製造端搬運至客戶端的過程中,僅憑多人徒手及簡單的工具抓取光罩,不僅速度慢、秏費人力且對搬運人員的危險性非常大;一旦不慎,亦將導致昂貴的光罩損毀,因此人工搬運仍存有濳在的成本。Taking the conventional liquid crystal panel manufacturing equipment exposure machine as an example, the size of the early liquid crystal panel is small, so the size of the mask of the exposure machine is also small, and the small size exposure machine mask is manually handled directly during the handling process. Just fine. In addition, when the back surface of the reticle has surface dust, the hood can be lifted directly by an operator, and the other operator can clean the surface of the reticle with an air gun under the reticle. However, as the size of the liquid crystal panel is getting larger and larger, the size of the reticle is also increasing, and it is no longer possible to grasp the reticle by hand during handling or cleaning. Especially in the process of transporting large-size reticle from the manufacturing end to the client, the reticle is only taken by many people with simple hands and simple tools, which is not only slow, laborious and very dangerous to the transporter; Caution, it will also lead to the destruction of expensive reticle, so there is still a hidden cost in manual handling.
目前雖有一些習知搬運裝置係以支架托取或真空吸取方式拿取包括液晶面板的基板與光罩,但該兩種方式皆需與基板或光罩表面(如位在液晶面板的顯示區域)接觸,容易在基板或光罩表面造成損傷,且該真空吸取方式不僅成本高且易失效。At present, although some conventional handling devices take the substrate and the reticle including the liquid crystal panel by bracket feeding or vacuum suction, both methods need to be with the substrate or the reticle surface (such as the display area of the liquid crystal panel). The contact is easy to cause damage on the surface of the substrate or the reticle, and the vacuum suction method is not only costly but also easy to fail.
因此,確有必要開發一種方便搬運和清潔大尺寸光罩的裝置,以克服習知技術之前述缺陷。Therefore, it is indeed necessary to develop a device that facilitates handling and cleaning of large-sized reticle to overcome the aforementioned drawbacks of the prior art.
本發明之目的在於提供一種夾持裝置、搬運裝置及夾持方法,其可用以方便地搬運和抓舉大尺寸之設備。It is an object of the present invention to provide a clamping device, a handling device and a clamping method that can be used to conveniently handle and snatch large-sized devices.
為達成上述發明目的,本發明揭示一種夾持裝置,包含:一座體、一對第一夾持臂及第二夾持臂、一對第一搖臂及第二搖臂、一對第一偏心輪及第二偏心輪,以及一對第一彈性元件及第二彈性元件。前述座體,具有兩相對端。每一夾持臂具有一樞接端可供夾持臂樞轉於該座體之其中一相對端、一壓桿從該樞接端延伸、一夾持端用於抵接一受夾持物之一端、以及一連接端形成於該壓桿與該夾持端之間。In order to achieve the above object, the present invention discloses a clamping device comprising: a body, a pair of first clamping arms and a second clamping arm, a pair of first rocker arms and a second rocker arm, and a pair of first eccentricities a wheel and a second eccentric wheel, and a pair of first elastic members and second elastic members. The aforementioned seat has two opposite ends. Each of the clamping arms has a pivoting end for the clamping arm to pivot to one of the opposite ends of the body, a pressing rod extending from the pivoting end, and a clamping end for abutting a clamped object One end and a connecting end are formed between the pressing rod and the clamping end.
該每一搖臂設於該座體之其中一相對端上,其中該搖臂具有一自由端及一樞轉端可供搖臂樞轉於該座體之相對端上。該每一偏心輪,係與相對搖臂之樞轉端連接,且分成具有不同徑向長度之一短徑區域及一長徑區域。每一彈性元件之一端連接該座體,且其另一相對端連接於該相對夾持臂之連接端上。Each rocker arm is disposed on one of the opposite ends of the seat body, wherein the rocker arm has a free end and a pivot end for pivoting the rocker arm to the opposite end of the seat body. Each of the eccentric wheels is connected to the pivot end of the opposite rocker arm and is divided into a short diameter region having a different radial length and a long diameter region. One end of each elastic element is connected to the seat body, and the other opposite end is connected to the connecting end of the opposite clamping arm.
當該搖臂之自由端在該座體之相對端上作往復移動時,經由樞轉端帶動該偏心輪之長徑區域壓迫該夾持臂之壓桿進行轉動,直至該夾持臂之夾持端抵接該受夾持物,或帶動該偏心輪之短徑區域接近該夾持臂之壓桿,使彈性元件提供彈力轉動夾持臂,直至該夾持臂之夾持端遠離該受夾持物。When the free end of the rocker arm reciprocates on the opposite end of the seat body, the long diameter region of the eccentric wheel is driven via the pivot end to press the pressure bar of the clamp arm to rotate until the clamp arm is clamped The holding end abuts the clamped object, or drives the short diameter area of the eccentric to approach the pressing rod of the clamping arm, so that the elastic element provides elastic rotation of the clamping arm until the clamping end of the clamping arm is away from the clamping Holding things.
另,本發明亦揭示一種使用該夾持裝置之搬運裝置,包含:一基座、複數支導軌柱各具有一導軌平行設置於該基座兩側以形成一容置空間、複數支導螺桿設置於該複數支導軌柱之間、複數個聯軸器各自連接該複數支導螺桿、一轉向器連接該複數個聯軸器、一驅動源用於驅動該轉向器來轉動該複數個聯軸器以帶動該複數支導螺桿,以及一夾持裝置,具有至少一夾持組件以夾持一受夾持物於該容置空間內,該夾持裝置兩側螺合該複數支導螺桿,當該驅動源帶動該複數支導螺桿時,該複數支導螺桿連動該夾持裝置沿著該導軌作向上或向下移動,直至該受夾持物所在之位置。In addition, the present invention also discloses a handling device using the clamping device, comprising: a base, a plurality of guide rails each having a guide rail disposed in parallel on both sides of the base to form an accommodation space, and a plurality of guide screw settings Between the plurality of guide rails, a plurality of couplings are respectively connected to the plurality of lead screws, a steering gear is connected to the plurality of couplings, and a driving source is used for driving the steering device to rotate the plurality of couplings The plurality of guiding screws are driven to have a clamping device having at least one clamping component for clamping a receiving object in the accommodating space, and the plurality of guiding screws are screwed on both sides of the clamping device. When the driving source drives the plurality of lead screws, the plurality of lead screws interlock the clamping device to move up or down along the rail until the position of the object to be clamped.
為達成前述目的,本發明之一種夾持方法係運用於一夾持裝置上,該夾持裝置具有一座體及一對夾持組件分設於該座體之兩相對端上,且該每一夾持組件包括:一夾持臂具有一樞接端可供該夾持臂樞轉於該座體上、一壓桿、一夾持端,以及一連接端形成於該壓桿與該夾持端之間;一搖臂具有一自由端及一樞轉端可供該搖臂樞轉於該座體上;一偏心輪係分成具有不同徑向長度之一短徑區域及一長徑區域,且該偏心輪係與該搖臂之樞轉端連接;以及一彈性元件,其一端連接該座體,且其另一相對端連接於該夾持臂之連接端上,且該夾持方法包括以下步驟:使該每一夾持組件之搖臂的自由端以其樞轉端為中心在該座體上旋轉至不同位置;透過樞轉端帶動該偏心輪偏轉;當該偏心輪偏轉至長徑區域壓迫該夾持臂之壓桿以產生一第一力矩時,該第一力矩驅使該夾持臂之夾持端以樞接端為支點轉動直至該夾持臂之夾持端抵接該受夾持物;以及當該偏心輪偏轉至短徑區域接近該夾持臂之壓桿以解除該第一力矩時,該彈性元件對該夾持臂之連接端提供一反彈力矩,該反彈力矩驅使該夾持臂之夾持端以樞接端為支點轉動直至遠離該受夾持物。In order to achieve the foregoing object, a clamping method of the present invention is applied to a clamping device having a body and a pair of clamping assemblies disposed on opposite ends of the housing, and each of the two The clamping assembly includes: a clamping arm having a pivoting end for pivoting the clamping arm to the base body, a pressing rod, a clamping end, and a connecting end formed on the pressing rod and the clamping Between the ends, a rocker arm has a free end and a pivot end for the rocker arm to pivot on the seat body; an eccentric wheel train is divided into a short-diameter area and a long-path area having different radial lengths. And the eccentric wheel is coupled to the pivot end of the rocker arm; and an elastic member having one end connected to the seat body and the other opposite end connected to the connecting end of the clamping arm, and the clamping method comprises The following steps: rotating the free end of the rocker arm of each clamping component on the seat body to a different position centering on the pivoting end thereof; driving the eccentric wheel through the pivoting end; when the eccentric wheel is deflected to a long length When the diameter region presses the pressure bar of the clamping arm to generate a first moment, the first torque drives The clamping end of the clamping arm rotates with the pivoting end as a fulcrum until the clamping end of the clamping arm abuts the clamped object; and when the eccentric wheel is deflected to the short diameter region, the pressing lever of the clamping arm is released to release During the first moment, the elastic element provides a rebounding moment to the connecting end of the clamping arm, and the rebounding torque drives the clamping end of the clamping arm to pivot away from the pivoting end until it is away from the object to be clamped.
因此,利用本發明之夾持裝置、搬運裝置及其夾持方法,能很容易抓舉大尺寸設備,便於搬運及清潔該設備。Therefore, with the holding device, the carrying device and the clamping method thereof of the present invention, it is possible to easily grasp a large-sized device, and it is easy to carry and clean the device.
請參閱第1A及第1B圖所示,其中第1A圖為一種依據本發明之一第一實施例之夾持裝置1之示意圖,第1B圖為該夾持裝置1之放大示意圖,圖中僅顯示其兩相對端101,102之詳細結構並顯示尚未夾持一受夾持物30。該夾持裝置1包括:一座體10,以及一對夾持組件彼此分隔並對稱設置於該座體10之相對端101,102之側壁上,其中位於該座體10之相對端101之夾持組件具有一夾持臂11、一彈性元件12、一搖臂13及一偏心輪14,以及另一位於該座體10之相對端102之夾持組件具有一夾持臂21、一彈性元件22、一搖臂23及一偏心輪24。Please refer to FIG. 1A and FIG. 1B , wherein FIG. 1A is a schematic view of a clamping device 1 according to a first embodiment of the present invention, and FIG. 1B is an enlarged schematic view of the clamping device 1 . The detailed structure of its opposite ends 101, 102 is shown and it is shown that a gripper 30 has not been clamped. The clamping device 1 comprises: a body 10, and a pair of clamping assemblies spaced apart from each other and symmetrically disposed on the side walls of the opposite ends 101, 102 of the housing 10, wherein the clamping assembly at the opposite end 101 of the housing 10 has A clamping arm 11, an elastic member 12, a rocker arm 13 and an eccentric 14 and another clamping assembly at the opposite end 102 of the base 10 have a clamping arm 21, an elastic member 22, and a clamping member The rocker arm 23 and an eccentric wheel 24.
該兩個夾持臂11,21用於夾持一受夾持物30之兩對應末端,且該每一夾持臂11,21具有一樞接端111,211可供該夾持臂11,21樞轉固定於該座體10之相對端101,102的側壁上、一壓桿112,212從該樞接端111,211朝該端101,102延伸、一夾持端113,213用於抵接該受夾持物30之其中一端、以及一連接端114,214形成於該壓桿112,212與該夾持端113,213之間。因為該兩夾持臂11,21之夾持端113,213皆呈凹槽結構,且兩者之凹槽結構的開口方向係反相對稱,故可穩固夾持該受夾持物30的兩相對末端,其中該凹槽結構之開口大小可依據欲夾持的受夾持物30之厚度決定。需注意的是,該受夾持物30可為任何一種需要搬運的平板裝置;於本實施例中,雖是以一種大尺寸液晶面板的曝光機光罩(如G7.5)為例加以述明,惟不因此限定本發明之應用範圍。The two clamping arms 11, 21 are for holding two corresponding ends of a clamped object 30, and each of the clamping arms 11, 21 has a pivoting end 111, 211 for pivoting the clamping arms 11, 21 Fixed on the side walls of the opposite ends 101, 102 of the base 10, a pressing rod 112, 212 extending from the pivoting ends 111, 211 toward the ends 101, 102, a clamping end 113, 213 for abutting one end of the holder 30, and a Connecting ends 114, 214 are formed between the pressing rods 112, 212 and the clamping ends 113, 213. Because the clamping ends 113, 213 of the two clamping arms 11, 21 are in a groove structure, and the opening directions of the groove structures of the two are reverse-phase symmetric, the opposite ends of the object 30 can be firmly clamped. The size of the opening of the groove structure can be determined according to the thickness of the object to be clamped 30 to be clamped. It should be noted that the clamped object 30 can be any flat device that needs to be transported; in this embodiment, an exposure reticle (such as G7.5) of a large-sized liquid crystal panel is taken as an example for illustration. However, the scope of application of the invention is not limited thereby.
如第1B圖所示,該每一彈性元件12,22之一端固定連接於該座體10的相對端101,102的側壁上,且其另一相對端固定連接於該夾持臂11,21的連接端114,214上。在本實施例中,至少其中一端101,102的彈性元件12,22可為一種伸縮彈簧。As shown in FIG. 1B, one end of each of the elastic members 12, 22 is fixedly coupled to the side walls of the opposite ends 101, 102 of the base 10, and the other opposite end thereof is fixedly coupled to the connection of the clamping arms 11, 21 On ends 114, 214. In this embodiment, at least one of the elastic members 12, 22 of one of the ends 101, 102 can be a telescopic spring.
該兩搖臂13,23分別設於該座體10之兩端101,102的頂部,其中每一搖臂13,23具有一自由端131,231,以及一樞轉端132,232可供該搖臂13樞轉於該座體10之相對端101,102上,使該自由端131,231可往復移動於該相對端101,102之左右兩側,亦即該該搖臂13之自由端131可往復移動至相對端101之一第一位置及一第二位置,而該搖臂23之自由端231可往復移動至相對端102之一第三位置及一第四位置。The two rocker arms 13, 23 are respectively disposed at the tops of the two ends 101, 102 of the base body 10. Each of the rocker arms 13, 23 has a free end 131, 231, and a pivot end 132, 232 for the rocker arm 13 to pivot The opposite ends 101, 102 of the base body 10 enable the free ends 131, 231 to reciprocate to the left and right sides of the opposite ends 101, 102, that is, the free end 131 of the rocker arm 13 can be reciprocated to one of the opposite ends 101. The position and a second position, and the free end 231 of the rocker arm 23 is reciprocally movable to a third position and a fourth position of the opposite end 102.
如第1B圖所示,該兩偏心輪14,24分別連接於該搖臂13,23之樞轉端132,232。以第1C圖所示之搖臂13為例,其樞轉端132連接於該偏心輪14的一偏心軸心上,因此當該搖臂13繞該樞轉端132轉動時,即可帶動該偏心輪14以偏心軸心為基準作偏心轉動。若依據一條貫穿該第一偏心輪14的偏心軸心之水平軸作區隔,可將該偏心輪14劃分成上下兩個具有不同徑向長度之一短徑區域141及一長徑區域142。該偏心輪24之作動原理亦同於該偏心輪14。As shown in FIG. 1B, the two eccentrics 14, 24 are connected to the pivoting ends 132, 232 of the rocker arms 13, 23, respectively. For example, the rocker arm 13 shown in FIG. 1C has a pivot end 132 connected to an eccentric axis of the eccentric 14 so that when the rocker arm 13 is rotated about the pivot end 132, the rocker arm 13 can be driven. The eccentric wheel 14 is eccentrically rotated with respect to the eccentric axis. If the horizontal axis of the eccentric axis of the first eccentric 14 is separated, the eccentric 14 can be divided into two short diameter regions 141 and a long diameter region 142 having different radial lengths. The principle of actuation of the eccentric 24 is also the same as that of the eccentric 14 .
如第1B及1D圖所示,該夾持裝置1還包括:兩對固定扣15,16和25,26分別藉由兩對固定軸151,161和251,261設置在座體10之兩相對端101,102的上表面的第一位置、第二位置和第三位置和第四位置。As shown in FIGS. 1B and 1D, the holding device 1 further includes two pairs of fixing buckles 15, 16 and 25, 26 which are respectively disposed on the upper surfaces of the opposite ends 101, 102 of the base 10 by two pairs of fixed shafts 151, 161 and 251, 261, respectively. The first position, the second position, and the third position and the fourth position.
如第1B圖及第1C圖所示,當欲使該夾持裝置1解除夾持該受夾持物30時,將該搖臂13之自由端131以其樞轉端132為中心旋轉到該座體10之相對端101之第一位置,以及該搖臂23之自由端231以其樞轉端232為中心作反向於該搖臂13之旋轉,使自由端231移動至該座體10之相對端102之第三位置上。此時,該搖臂13之樞轉端132會帶動該偏心輪14之短徑區域141的輪緣接近該夾持臂11之壓桿112,而該短徑區域141的輪緣不會對該夾持臂11產生力矩,但該彈性元件12會經由該連接端114對該夾持臂11提供一反彈力矩(如果事先己被拉伸),該反彈力矩會使夾持臂11基於樞接端111在該座體10之相對端101上作逆時鐘樞轉,以轉動該夾持臂11之夾持端113遠離該受夾持物30。接著,利用固定扣16繞該對固定軸161作朝內旋轉或朝外旋轉,即可將該自由端131鎖扣於第一位置上或解除鎖扣。類似的,該搖臂23之樞轉端232反向帶動偏心輪24之短徑區域的輪緣接近該夾持臂21之壓桿212,該短徑區域的輪緣不對該夾持臂21產生力矩,但該彈性元件22會經由該連接端214對該夾持臂21提供一反彈力矩(如果事先己被拉伸),該反彈力矩會使夾持臂21基於樞接端211在該座體10之相對端102上作順時鐘樞轉,以轉動該夾持臂21之夾持端213遠離該受夾持物30。接著,利用固定扣25繞該對固定軸251作朝內旋轉或朝外旋轉,即可將該自由端231鎖扣於第三位置上或解除鎖扣。As shown in FIG. 1B and FIG. 1C, when the holding device 1 is to be unwound to clamp the holder 30, the free end 131 of the rocker arm 13 is rotated to the seat about its pivot end 132. The first position of the opposite end 101 of the body 10 and the free end 231 of the rocker arm 23 are rotated about the pivoting end 232 opposite to the rocker arm 13 to move the free end 231 to the seat body 10. At the third position of the opposite end 102. At this time, the pivot end 132 of the rocker arm 13 drives the rim of the short diameter region 141 of the eccentric 14 to approach the pressing rod 112 of the clamping arm 11, and the rim of the short diameter region 141 does not The clamping arm 11 generates a torque, but the elastic member 12 provides a rebounding moment to the clamping arm 11 via the connecting end 114 (if it has been stretched beforehand), the rebounding torque causes the clamping arm 11 to be based on the pivoting end. 111 is pivoted counterclockwise on the opposite end 101 of the body 10 to rotate the clamping end 113 of the clamping arm 11 away from the holder 30. Then, by using the fixing buckle 16 to rotate inward or outward toward the pair of fixed shafts 161, the free end 131 can be locked in the first position or the buckle can be released. Similarly, the pivot end 232 of the rocker arm 23 reversely drives the rim of the short diameter region of the eccentric 24 to approach the pressing rod 212 of the clamping arm 21, and the rim of the short diameter region does not generate the clamping arm 21 Torque, but the elastic member 22 will provide a rebounding moment to the clamping arm 21 via the connecting end 214 (if it has been stretched beforehand), the rebounding force will cause the clamping arm 21 to be based on the pivoting end 211 at the seat body. The opposite end 102 of the 10 pivots clockwise to rotate the grip end 213 of the gripping arm 21 away from the holder 30. Then, the fixed end 25 is rotated inward or outward by the fixing buckle 25, so that the free end 231 can be locked in the third position or the buckle can be released.
請參閱第1C圖及第1D圖所示,當欲使該夾持裝置1夾持該受夾持物30時,將該搖臂13之自由端131以其樞轉端132為中心從該座體10之相對端101之第一位置旋轉到第二位置,以及將該搖臂23之自由端231以其樞轉端232為中心作反向於該搖臂13之旋轉,以移動自由端231從該座體10之相對端102之第三位置旋轉到第四位置。此時,該搖臂13之樞轉端132會轉反向帶動該偏心輪14之長徑區域142的輪緣壓迫該夾持臂11之壓桿112以產生一第一力矩,該第一力矩會使該夾持臂11基於樞接端111在該座體10之相對端101上作順時鐘樞轉,使該夾持臂11之夾持端113抵接該受夾持物30之其中一末端,同時使該彈性元件12對該夾持臂11之連接端114提供一拉伸彈力以產生一第二力矩,但該第一力矩大於第二力矩。接著,利用固定扣15繞該對固定軸151作朝內旋轉或朝外旋轉,即可將該自由端131鎖扣於第二位置上或解除鎖扣。類似的,利用該搖臂23之樞轉端232反向帶動偏心輪24之長徑區域的輪緣壓迫該夾持臂21之壓桿212以產生一第三力矩,該第三力矩會使該夾持臂21基於樞接端211在該座體10之相對端102上作逆時鐘樞轉,使該夾持臂21之夾持端213抵接該受夾持物30之另一末端,同時使該彈性元件22會經由該連接端214對該夾持臂21提供一拉伸彈力以產生一第四力矩,但該第三力矩大於第四力矩。接著,利用固定扣26繞該對固定軸261作朝內旋轉或朝外旋轉,即可將該自由端231鎖扣於第四位置上或解除鎖扣。其結果如第1E圖所示,該夾持裝置1之座體10之兩相對端101,102上的夾持臂11,21可穩固地夾持於該受夾持物30的兩相對末端。Referring to FIG. 1C and FIG. 1D, when the clamping device 1 is to be clamped by the clamping device 30, the free end 131 of the rocker arm 13 is centered on the pivoting end 132 thereof. The first position of the opposite end 101 of the 10 is rotated to the second position, and the free end 231 of the rocker arm 23 is rotated about the pivot end 232 against the rotation of the rocker arm 13 to move the free end 231 from The third position of the opposite end 102 of the body 10 is rotated to a fourth position. At this time, the pivoting end 132 of the rocker arm 13 reversely drives the rim of the long diameter region 142 of the eccentric 14 to press the pressing rod 112 of the clamping arm 11 to generate a first moment. The clamping arm 11 is pivoted clockwise on the opposite end 101 of the base 10 based on the pivoting end 111, so that the clamping end 113 of the clamping arm 11 abuts one end of the clamped object 30. At the same time, the elastic member 12 provides a tensile force to the connecting end 114 of the clamping arm 11 to generate a second moment, but the first moment is greater than the second moment. Then, the fixed end 15 is rotated inward or outward by the fixing buckle 15, so that the free end 131 can be locked in the second position or the buckle can be released. Similarly, the pivoting end 232 of the rocker arm 23 reversely drives the rim of the long diameter region of the eccentric wheel 24 to press the pressing rod 212 of the clamping arm 21 to generate a third moment, which causes the third moment. The clamping arm 21 pivots counterclockwise on the opposite end 102 of the base 10 based on the pivoting end 211 such that the clamping end 213 of the clamping arm 21 abuts the other end of the holder 30 while The elastic member 22 provides a tensile force to the clamping arm 21 via the connecting end 214 to generate a fourth moment, but the third torque is greater than the fourth moment. Then, the fixed end 26 is rotated inward or outwardly around the pair of fixed shafts 261, so that the free end 231 can be locked in the fourth position or the buckle can be released. As a result, as shown in Fig. 1E, the gripping arms 11, 21 on the opposite ends 101, 102 of the seat body 10 of the holding device 1 can be firmly held at the opposite ends of the holder 30.
請參閱第2A圖所示,係為一種依據本發明之第二實施例之夾持裝置2,其正處於解除對該受夾持物30的夾持。由於本發明第二實施例之夾持裝置2與前述第一實施例之夾持裝置1之部份結構與功能相似,因此在該兩實施例中相同結構的部分均以相同的標號代表,且在此不再予以冗述。Referring to Fig. 2A, there is shown a clamping device 2 according to a second embodiment of the present invention which is detaching the clamping of the object 30. Since the clamping device 2 of the second embodiment of the present invention is similar in structure and function to the clamping device 1 of the first embodiment, the same components are denoted by the same reference numerals in the two embodiments, and It will not be redundant here.
請參閱第2B圖所示,與第一實施例之夾持裝置1不同之處在於:該第二實施例之夾持裝置2之兩夾持臂11’,21’的夾持端113’,213’係呈一L型結構,並於該座體10之兩相對末端101、102的下表面分別向下設置有兩個呈柱體的壓頂裝置17,27,用於配合前述夾持端113’,213’。該第2B圖顯示該夾持裝置2正解除對該受夾持物30之夾持。Referring to FIG. 2B, the difference from the clamping device 1 of the first embodiment is that the clamping ends 113' of the two clamping arms 11', 21' of the clamping device 2 of the second embodiment, The 213' has an L-shaped structure, and two lowering surfaces of the opposite ends 101, 102 of the base 10 are respectively provided with two cylindrical pressing devices 17, 27 for engaging the clamping end 113. ', 213'. This Fig. 2B shows that the holding device 2 is releasing the clamping of the object to be held 30.
請參閱第2C圖所示,為本發明第二實施例之夾持裝置2夾持該受夾持物30,與第一實施例不同的是:第二實施例之夾持臂11’受壓後繞樞接端111作順時針轉動,直至夾持臂11’之夾持端113’的L型結構與壓頂裝置17共同夾持該受夾持物30之其中一末端;以及該夾持臂21’受壓後繞樞接端211作逆時針轉動,直至夾持臂21’之夾持端213’的L型結構與壓頂裝置27共同夾持該受夾持物30之另一末端。因此,最終如第2D圖所示,該夾持裝置2之座體10之兩相對端101,102上的夾持臂11’,21’及壓頂裝置17,27穩固地夾持於該受夾持物30的兩相對末端。Referring to FIG. 2C, the clamping device 2 of the second embodiment of the present invention clamps the clamped object 30, which is different from the first embodiment in that the clamping arm 11' of the second embodiment is pressed. Rotating clockwise around the pivoting end 111 until the L-shaped structure of the clamping end 113' of the clamping arm 11' holds the one end of the clamped object 30 together with the pressing device 17; and the clamping arm 21' After being pressed, the pivoting end 211 is rotated counterclockwise until the L-shaped structure of the clamping end 213' of the clamping arm 21' and the pressing device 27 jointly clamp the other end of the clamped object 30. Therefore, as shown in FIG. 2D, the gripping arms 11', 21' and the pressing device 17, 27 on the opposite ends 101, 102 of the seat body 10 of the holding device 2 are firmly clamped to the holder 30. The opposite ends of the two.
請參閱第3圖及第4圖所示,其顯示一種依據本發明之搬運裝置3如為一種光罩抓取機構,係使用前述夾持裝置1。該搬運裝置3包括一呈矩形框架之基座32,該基座32具有一上表面,且於該基座32兩側平行設置有複數支導軌柱31,該等導軌柱31各具有一導軌311,平行設置於該基座兩側,且該等導軌柱31支撐該基座32共同形成一容置空間以收容該夾持裝置1,且該夾持裝置1之座體10之兩相對末端101、102分別架設於該兩相對導軌311內。於該基座32之上表面中央設置有一轉向器40,且於基座32之上表面兩端各設置有一導螺桿41以螺合該夾持裝置1,使該轉向器40之兩端分別使用一設置於基座32上表面的聯軸器42以聯結該等導螺桿41。該基座32上表面該轉向器40旁側設置有一驅動源43如伺服馬達,用於驅動該轉向器40來轉動該複數個聯軸器42以帶動該複數支導螺桿41,然後該兩個相對的導螺桿41即可驅動該夾持裝置1沿著該導軌311作上昇或下降移動,直至該受夾持物30所在之位置,以便於在該容置空間中抓取該受夾持物30或該夾持裝置1之兩夾持臂11,21夾持該受夾持物30一起移動。例如,當該受夾持物30為一光罩且該光罩背面有沾附顆粒(Particle)時,利用此具有夾持裝置1之光罩抓取機構3即可將光罩提起,以方便人員清潔該光罩背面薄膜(Pellicle),或方便搬運較大型的光罩或置換光罩盒。Referring to Figures 3 and 4, there is shown a handling device 3 in accordance with the present invention, such as a reticle grasping mechanism, using the aforementioned clamping device 1. The carrier device 3 includes a base 32 having a rectangular frame. The base 32 has an upper surface, and a plurality of guide rails 31 are disposed in parallel on opposite sides of the base 32. Each of the guide rails 31 has a guide rail 311. Parallelly disposed on two sides of the base, and the rails 31 support the base 32 to form an accommodating space for accommodating the clamping device 1, and the opposite ends 101 of the base 10 of the clamping device 1 And 102 are respectively installed in the two opposite guide rails 311. A diverter 40 is disposed at a center of the upper surface of the base 32, and a lead screw 41 is disposed at each end of the upper surface of the base 32 to screw the clamping device 1 so that the two ends of the diverter 40 are respectively used. A coupling 42 disposed on the upper surface of the base 32 is coupled to the lead screw 41. A driving source 43 such as a servo motor is disposed on the upper surface of the base 32 on the upper surface of the base 32 for driving the steering gear 40 to rotate the plurality of couplings 42 to drive the plurality of lead screws 41, and then the two The opposite lead screw 41 can drive the clamping device 1 to move up or down along the guide rail 311 until the position of the clamped object 30 is located, so as to grasp the clamped object 30 in the accommodating space or The two clamping arms 11, 21 of the holding device 1 move together with the clamped object 30. For example, when the clamped object 30 is a reticle and the back surface of the reticle has a particle, the reticle grasping mechanism 3 having the clamping device 1 can lift the reticle to facilitate the person. Clean the Pellicle on the back of the reticle, or handle larger reticle or replacement reticle.
在夾持該受夾持物30的過程中,由於該夾持裝置1之兩相對端101,102的第一夾持臂11和第二夾持臂21的運作方式相同,因是此處僅以第一夾持臂11的夾持過程為例,並請參考第1C、1D及1E圖,對本發明之夾持方法加以說明,其包括如下步驟:當欲以夾持裝置1夾持該受夾持物30時,先將位於座體10之第一位置上的固定扣16朝外旋轉以解除對該搖臂13之自由端131的鎖扣;使該搖臂13的自由端131以其樞轉端132為中心從座體10之第一位置旋轉至第二位置;該搖臂13之樞轉端132帶動該偏心輪14以該樞轉端132進行偏心旋轉,直至該偏心輪14之長徑區域142壓迫該夾持臂11之壓桿112以對該夾持臂11提供一第一力矩,該第一力矩促使該夾持臂11以其樞接端111為支點作順時鐘轉動,同時拉伸該彈性元件12作彈性變形以對該夾持臂11之連接端114產生一第二力矩,其中因該第一力矩大於該第二力矩,持續驅使該夾持臂11之夾持端113以樞接端111為支點轉動,直至該夾持臂11之夾持端113抵接該受夾持物30之其中一末端;以及當搖臂13之自由端131旋轉至座體10之第二位置之後,利用位於座體10之第二位置的固定扣15朝內旋轉以鎖扣該搖臂13之自由端131於第二位置,則即可保持夾持狀態。In the process of clamping the clamped object 30, since the first clamping arm 11 and the second clamping arm 21 of the opposite ends 101, 102 of the clamping device 1 operate in the same manner, it is only the first here. The clamping process of the clamping arm 11 is taken as an example, and the clamping method of the present invention will be described with reference to FIGS. 1C, 1D and 1E, which includes the following steps: when the clamping object 30 is to be clamped by the clamping device 1 When the fixing buckle 16 at the first position of the seat body 10 is first rotated outward to release the locking of the free end 131 of the rocker arm 13; the free end 131 of the rocker arm 13 is pivoted at its pivot end 132. Rotating from the first position of the base 10 to the second position; the pivoting end 132 of the rocker arm 13 drives the eccentric 14 to rotate eccentrically with the pivot end 132 until the long diameter region 142 of the eccentric 14 Pressing the pressing rod 112 of the clamping arm 11 to provide a first moment to the clamping arm 11, the first moment causing the clamping arm 11 to rotate clockwise with its pivoting end 111 as a fulcrum, while stretching the The elastic member 12 is elastically deformed to generate a second moment to the connecting end 114 of the clamping arm 11, wherein the first moment is greater than the first moment The torque continuously drives the clamping end 113 of the clamping arm 11 to pivot with the pivoting end 111 as a fulcrum until the clamping end 113 of the clamping arm 11 abuts one end of the clamped object 30; and when the rocker arm After the free end 131 of the 13 is rotated to the second position of the base 10, the fixing buckle 15 located at the second position of the base 10 is rotated inwardly to lock the free end 131 of the rocker arm 13 to the second position, that is, Can be kept clamped.
此外,並請參考第1A、1B及1C圖,當欲以夾持裝置1解除對該受夾持物30之夾持時,先將位於座體10之第二位置上的固定扣15朝外旋轉,以解除對該搖臂13之自由端131的鎖扣;將搖臂13的自由端131以其樞轉端132為中心從座體10之第二位置反向旋轉至第一位置;該搖臂13之樞轉端132帶動偏心輪14以樞轉端132作反向偏心旋轉,隨著該偏心輪14之短徑區域141接近該夾持臂11之壓桿112以解除對壓桿112的壓迫,使該第一力矩逐漸變小直至消失,此時該彈性元件12之第二(反彈)力矩將驅使該夾持臂11之夾持端113以樞接端111為支點作逆時鐘轉動,直至夾持端113遠離該受夾持物30;以及當搖臂13之自由端131旋轉至座體10之第一位置之後,利用位於座體10之第一位置的固定扣16朝內旋轉以鎖扣該搖臂13之自由端131於第一位置。利用本發明之夾持裝置及其夾持方法,即可很容易抓舉受夾持物,便於搬運及清潔該受夾持物。In addition, referring to FIGS. 1A, 1B, and 1C, when the clamping device 1 is to release the clamping of the object 30, the fixing buckle 15 at the second position of the body 10 is first rotated outward. To release the latch of the free end 131 of the rocker arm 13; the free end 131 of the rocker arm 13 is rotated from the second position of the seat body 10 to the first position with its pivot end 132 as the center; The pivot end 132 of the arm 13 drives the eccentric 14 to rotate eccentrically with the pivot end 132. As the short diameter region 141 of the eccentric 14 approaches the pressing rod 112 of the clamping arm 11 to release the pressing rod 112. Pressing, the first moment is gradually reduced until it disappears. At this time, the second (bounce) moment of the elastic member 12 will drive the clamping end 113 of the clamping arm 11 to rotate counterclockwise with the pivoting end 111 as a fulcrum. Until the clamping end 113 is away from the holder 30; and after the free end 131 of the rocker arm 13 is rotated to the first position of the seat body 10, the fixing buckle 16 at the first position of the seat body 10 is rotated inwardly to lock The free end 131 of the rocker arm 13 is buckled in the first position. With the clamping device of the present invention and the clamping method thereof, the object to be gripped can be easily grasped, and the object to be gripped can be easily handled and cleaned.
雖然本發明已用較佳實施例揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作各種之更動與修改,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the invention may be variously modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.
1...夾持裝置1. . . Clamping device
10...座體10. . . Seat
101,102...相對端101,102. . . Opposite end
11,11’...夾持臂11,11’. . . Clamping arm
111...樞轉端111. . . Pivot end
112...壓桿112. . . Pressure bar
113...夾持端113. . . Clamping end
114...連接端114. . . Connection end
12...彈性元件12. . . Elastic component
13...搖臂13. . . Rocker arm
131...自由端131. . . Free end
132...樞轉端132. . . Pivot end
14...偏心輪14. . . Eccentric wheel
141...短徑區域141. . . Short diameter area
142...長徑區域142. . . Long diameter area
15...固定扣15. . . Fixed buckle
151...固定軸151. . . Fixed axis
16...固定扣16. . . Fixed buckle
161...固定軸161. . . Fixed axis
21,21’...夾持臂21, 21’. . . Clamping arm
211...樞轉端211. . . Pivot end
212...壓桿212. . . Pressure bar
213...夾持端213. . . Clamping end
214...連接端214. . . Connection end
22...彈性元件twenty two. . . Elastic component
23...搖臂twenty three. . . Rocker arm
231...自由端231. . . Free end
232...樞轉端232. . . Pivot end
24...偏心輪twenty four. . . Eccentric wheel
241...短徑區域241. . . Short diameter area
242...長徑區域242. . . Long diameter area
25...固定扣25. . . Fixed buckle
251...固定軸251. . . Fixed axis
26...固定扣26. . . Fixed buckle
261...固定軸261. . . Fixed axis
2...夾持裝置2. . . Clamping device
113’...夾持端113’. . . Clamping end
213’...夾持端213’. . . Clamping end
17、27...壓頂裝置17, 27. . . Capping device
30...受夾持物30. . . Clamped object
3...搬運裝置3. . . Handling device
32...基座32. . . Pedestal
31...導軌柱31. . . Rail column
311...導軌311. . . guide
40...轉向器40. . . Steering gear
41...導螺桿41. . . Lead screw
42...聯軸器42. . . Coupling
43...驅動源43. . . Drive source
第1A圖係本發明之第一實施例之夾持裝置處於打開狀態之整體示意圖。Fig. 1A is a schematic overall view showing the holding device of the first embodiment of the present invention in an open state.
第1B圖係本發明之第一實施例之夾持裝置打開狀態之放大示意圖。Fig. 1B is an enlarged schematic view showing the open state of the holding device of the first embodiment of the present invention.
第1C圖係本發明之夾持裝置之搖臂與偏心輪之結構示意圖。Fig. 1C is a schematic view showing the structure of the rocker arm and the eccentric wheel of the holding device of the present invention.
第1D圖係本發明之第一實施例之夾持裝置夾持受夾持物之放大示意圖。Fig. 1D is an enlarged schematic view showing the holding device of the first embodiment of the present invention holding the object to be clamped.
第1E圖係本發明之第一實施例之夾持裝置夾持受夾持物之整體示意圖。Fig. 1E is a schematic view showing the entire holding device of the first embodiment of the present invention.
第2A圖係本發明之第二實施例之夾持裝置處於開啟狀態之整體示意圖。Fig. 2A is an overall schematic view showing the holding device of the second embodiment of the present invention in an open state.
第2B圖係本發明之第二實施例之夾持裝置處於開啟狀態之放大示意圖。Fig. 2B is an enlarged schematic view showing the holding device of the second embodiment of the present invention in an open state.
第2C圖係本發明之第二實施例之夾持裝置夾持受夾持物之放大示意圖。Fig. 2C is an enlarged schematic view showing the holding device holding the object to be clamped in the second embodiment of the present invention.
第2D圖係本發明之第二實施例之夾持裝置夾持受夾持物之整體示意圖。Fig. 2D is a schematic view showing the entire holding device of the second embodiment of the present invention.
第3圖係與本發明之夾持裝置相配合之搬運裝置之前視圖。Figure 3 is a front elevational view of the handling device mated with the clamping device of the present invention.
第4圖係與本發明之夾持裝置相配合之搬運裝置之俯視圖。Figure 4 is a plan view of the handling device cooperating with the clamping device of the present invention.
1...夾持裝置1. . . Clamping device
10...座體10. . . Seat
101,102...相對端101,102. . . Opposite end
11,21...夾持臂11,21. . . Clamping arm
30...受夾持物30. . . Clamped object
Claims (29)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW96135504A TWI404599B (en) | 2007-09-21 | 2007-09-21 | Clamping device, handling apparatus and clamping method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW96135504A TWI404599B (en) | 2007-09-21 | 2007-09-21 | Clamping device, handling apparatus and clamping method |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200914206A TW200914206A (en) | 2009-04-01 |
TWI404599B true TWI404599B (en) | 2013-08-11 |
Family
ID=44725375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW96135504A TWI404599B (en) | 2007-09-21 | 2007-09-21 | Clamping device, handling apparatus and clamping method |
Country Status (1)
Country | Link |
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TW (1) | TWI404599B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI680348B (en) * | 2018-12-06 | 2019-12-21 | 家登精密工業股份有限公司 | Reticle pod and connecting frame |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01130597A (en) * | 1987-11-17 | 1989-05-23 | Sanyo Electric Co Ltd | Substrate positioning equipment |
TW553794B (en) * | 2000-11-20 | 2003-09-21 | Kosmek Kk | Clamping device |
CN1975541A (en) * | 2005-11-29 | 2007-06-06 | Lg.菲利浦Lcd株式会社 | Substrate-chucking electrostatic chuck, and substrate bonding apparatus and method for liquid crystal display panel using the same |
-
2007
- 2007-09-21 TW TW96135504A patent/TWI404599B/en not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01130597A (en) * | 1987-11-17 | 1989-05-23 | Sanyo Electric Co Ltd | Substrate positioning equipment |
TW553794B (en) * | 2000-11-20 | 2003-09-21 | Kosmek Kk | Clamping device |
CN1975541A (en) * | 2005-11-29 | 2007-06-06 | Lg.菲利浦Lcd株式会社 | Substrate-chucking electrostatic chuck, and substrate bonding apparatus and method for liquid crystal display panel using the same |
Also Published As
Publication number | Publication date |
---|---|
TW200914206A (en) | 2009-04-01 |
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