TWI397602B - Vapor deposition coating center - Google Patents

Description

Vapor deposition coating center

The present invention is directed to a PVD and/or CVD coating center according to item 1 of the scope of the patent application.

In order to set up a production center for PVD or CVD processed products, the coating business is now an expensive and lengthy job for every investor. For small organizations with only one PVD/CVD equipment and minimal peripheral equipment, the lower cost limit is usually at least 1.3 to 2 million Euros, which is centered on only one PVD/CVD equipment, including buildings and standard production equipment. .

This high amount of investment is due to the fact that, in most cases, the construction of a new coating center requires adjustment of the working flow, the underlying infrastructure, and sometimes even the adjustment of the coating equipment to the local building, especially if Integrate the coating center into existing buildings.

In addition, at the specified time, it is necessary to plan and complete the coating center until the "production status" is usually based on local requirements and standardization needs, and requires at least four months or even as many as one year and more than one year.

With regard to processed product coatings, short delivery times are extremely important and the center of the coating must be positioned around the geographic boundaries of its most important customers to ensure competitive operation and price. Therefore, many of the smaller (lower critical) markets are not able to meet the demand in a satisfactory manner as they are considered to be the same required coating operation, as the market potential is sufficiently lower than the economically practicable low limit/impossible installation. New coating centers, while existing coating centers often far exceed the cost-effectiveness of supplying coated standard tools or components.

Accordingly, it is an object of the present invention to provide a "active", dense and cost effective PVD and/or CVD coating center that can be combined in a very short time into a mode of production or vice versa if If it is necessary to change the position for economic reasons or other reasons, it can be quickly disassembled.

The coating center can be placed in at least one transportable industrial module, wherein at least part of the production equipment (including a PVD/CVD equipment, cleaning, blowing and decoating facilities, and basic technology basic foundation) Facilities such as water preparation and circulation, compressed air supply, gas supply, distribution, air conditioning, etc. are pre-combined and transport locks are installed as necessary. The same is true for other production-required items such as cargo receiving/issuing, storage slides, lounge/reception rooms or others. In addition, when the self-conveying mode is changed to the production mode, part of the industrial module (such as the transport wall) can be designed to create additional space and/or a higher top height on the PVD device. Based on the degree of pre-combination of the components, the center of the coating can be converted into a production mode in one day or several days, ie: essentially, only by removing the transport lock, certain gases within the coating system, compressed air, water And the plug in the power line, and connect the center to the utility power and water supply system. Due to the high degree of standardized units, the investment cost is lower compared to the traditional center, that is, with a center of PVD/CVD equipment, the investment cost is between 0.5 and 1 million euros.

Accordingly, the present invention relates to PVD and/or CVD coating centers, including at least one PVD and/or CVD system, and additional equipment and facilities to supply coating systems and other equipment, thus the coating system and additional equipment and/or Or the facility is pre-assembled in at least one industrial module and/or on an industrial platform and provides equipment for converting the coating center from the conveying mode to the production mode and vice versa.

According to the present invention, a module or industrial module is a container that carries at least a portion of the PVD and/or CVD coating center technology equipment and/or facilities to a pre-combined condition and can be used for transport, and After transitioning to a production mode, at least the pre-assembled equipment and/or facilities are operated. When in production mode, the module is accessible and allows access to equipment and/or facilities and operates the module as a coating center or part of the coating center.

According to the present invention, a modular platform is a platform of technical equipment and/or facilities carrying a pre-combined at least part of a PVD and/or CVD coating center, and can be used for transport and has been transformed into After the mode of production, at least the pre-assembled equipment and/or facilities are operated. When in production mode, the platform is accessible and allows access to equipment and/or facilities. Transport walls and roof panels, canvas covers, etc. can be installed to protect technical equipment and/or facilities for transportation. A modular platform can be the basic component of an industrial module. When in production mode, the platform is accessible and allows access to the equipment and/or facilities and operates the module as part of the coating center.

Additional equipment at the coating center may include pre- and post-treatment equipment such as mechanically treated, spray or micro-blasting units, chemically cleaned and/or decoated units, heat treated degassing furnaces, etc. Quality control, analytical equipment, and cargo receipt/issuance or other similar processing.

As the basic infrastructure under the operating equipment, at least one of the following facilities or peripheral facilities is usually incorporated into the modular coating center: a. Process gas supply sources for various gases, such as argon or other inert gases, hydrogen, nitrogen, Methane, ethane, ethylene, acetylene, decane, etc., b. power supplies, such as main power racks, power distribution, for example, modular electrical networks and other electrical facilities, such as transformers or voltage stabilizers, c. For spraying, cleaning, valve control or other, d. water distribution and/or preparation unit for temperature control of the coating system or apparatus to provide cleaning and/or removal of the coating unit; e. additional facilities, such as monitoring frames Systems, telephone systems and lines or others; in addition, for a) to c), wire, air compression and / or gas line quick release fastener systems will facilitate the rapid mutual exchange between modules or platforms connection.

The apparatus for transforming the center of the coating from the conveying mode to the production mode may include at least one of a movable wall, a conveying cover, a top plate, a canvas cover, a seal, a cover, a guard, a center positioning member, a mounting device, a transport lock, and the like.

In its smallest system, the center of the coating may include only one module, but typically may include 2 or several modules depending on the needs of the respective production location. If a small-scale device is required, a four-module center as described later may be a good compromise. Smaller centers are advantageous when pre-treatment and/or post-treatment, such as cleaning, blowing or decoating operations, may be performed at other production locations. It should be noted that due to the modularization, the coating center can be rapidly extended according to the growth of business and trading. The rapid establishment of existing centers and quick release fastener systems extending via wires, air compression and/or gas lines are possible to provide interconnection. Additionally, additional movable walls can be configured to create additional space for the building when needed.

In the case of a specific production building in the area, an industrial platform can be used instead of or in conjunction with an industrial module, as it is no longer necessary to provide a plant to protect the coating center against environmental impact. However, similar to an industrial module, a shipping wall can be provided as needed to provide additional space for the building.

One of the main advantages of having at least some of the features described above is that at least one but most of the plurality of separable units (where placed for partial or full operation to produce all of the required equipment and associated sub-bases) Pre-assembled modules or platforms consisting of infrastructure or surrounding facilities; such modules or platforms can be separated in such a way that they can be transported by truck, by ship or even by aircraft.

Because of this modular concept, it is desirable to have a PVD/CVD coated assembly center at any production location within a few days.

Most centers are divided into at least two main areas: one production area where each component and one facility area are treated, in which the various facilities required to operate the equipment are installed. Due to operator safety, waste heat, noise and cleanliness, etc., these areas are usually separated by a partition wall. Although most of the time the operation is in the production area, it is mainly for maintenance and maintenance purposes that the maintenance personnel can be allowed to enter the facility area during operation and maintenance. If the equipment and components are constructed in such a way as to integrate the utility into the equipment itself, the spacing of the various zones and the water supply to the large coating system, the cleaning unit and the decoating unit should be adjusted, on the one hand. It minimizes the space required for the utility area, but on the other hand increases the production cost of the equipment. Those skilled in the art will be able to find the right balance between equipment integration and the needs of the public facilities space, depending on the type of equipment required and the safety regulations that must be followed.

The other area may be a storage area where consumables and spare parts, incoming/shipping areas, lounges and others are stored. The region may be formed from pre-assembled modules; or as long as no pre-assembly is required, formed from a movable wall or formed without the need for a transport wall after the module is assembled. The latter allows for a reduction in the transport volume and cost of the center without any substantial delay in installation time.

If additional material is required to be installed, additional walls, interlayers or roofs can be stored in the module during transport for later assembly in the production location.

Only small partial equipment needs to be set up. Such assembly PVD coating equipment includes a foundation to support modular centers as well as urban water lines, wastewater lines, power lines and/or telephone lines. Depending on local needs, an additional diesel generator and sink may be required. With regard to the surface of the foundation, it is necessary to have the strength of an open-air parking lot, for example, a module having concrete from a concrete should support a module having a weight of 10 to 30 tons.

Based on the equipment needs of the coating center, a coating center must be built with 1 to N modules. Figure 1 shows that the mesa plan at the small center of the production location includes only one module and the underlying infrastructure required for production. The openings that can close the doors 24 and 25 are conveyed via a movable wall or panel 25' as described below. The module is divided into two zones: a production zone 7, in which a coating system 12, a loading/unloading station 20, and a shelf for storing and shipping the shelves 22 and the components to be coated are disposed.

A common facility 8 can house a coating system facility 26, such as a pumping unit, a system power rack, etc., not shown in detail in the drawings, and a general utility such as a process gas source 16 that supplies the main power of all modules 1 Shelf 17, compressed air source 18 and water distribution and preparation unit 19.

Regarding the dimensions of the Industrial Module 1, it must be considered that the internal height must comply with the production requirements and comply with general local regulations to allow the central operation to be a standard production facility. Thus, the typical internal height of the module is between 2.5 and 2.9 meters. As an example, when access is limited to operational needs, smaller dimensions may be used in terms of facility modules or other units. At the same time, due to the need for transportability, the external dimensions should be limited to a typical length of 12.2m and an ISO-standard scale for transport containers of empty cargo of 3 meters (or 40' x 10' x 10'). This means that the typical area of this module is approximately 36 square meters. Weight restrictions may also be an argument that must be noted but often oversized is a major problem that makes transportation very difficult and expensive.

In general, maintaining standard container dimensions makes sense and when used for production or for maintenance purposes, the modules and platforms should be accessible, and the minimum external dimensions should not be less than (each) 3m x 2.4m x 2.4m (or 10' ×8'×8') ISO standard container or 3m × 2.4m (or 10' × 8') too much.

As mentioned above, due to size limitations, at least the transport size of the equipment should be adjusted to the internal dimensions of the container. Regarding the PVD/CVD coating center, typically, the coating system 12 is the device having the highest upright dimension of the piece. The need to choose a relatively small coating system with high production capacity to achieve a modular center is important. Suitable coating systems, for example, may be commercially available systems such as RCS, BAI830 or BAI730.

However, after installation, it may be necessary or practical to extend the height of at least some of the modules. For operational/maintenance reasons, this extension may have an upper portion that is preferably close to the coating system to mount a mobile cart, or for any other need for production. Figure 2 shows an example of how to use the cover 27 to extend the height dimension of the module. For transport, the cover 27 can be stored within the modules 1 to 6, however, the opening is closed via the transport cover 28. Alternatively, the extension can be placed through the establishment of a coating center so that it is no longer necessary to provide a movable transport wall during production. The transport cover can be secured during transport, similar to the explanation in Figure 6/7.

In order to meet transportation needs, such as watertight jackets, stability and others, and for operational requirements such as doors, window openings, extensions, static structures, pre-combined production facilities such as power lines, compressed air ducts, gas ducts and for external Pre-defined connections for supply and, for example, pre-defined connections for additional modules and others, several adjustments that can be provided for the module.

Figure 3 shows an exemplary structure of a fixed piece of equipment 46 on the table 48 of the module 1. A steel structure 49 having a modified screw hole, lattice structure or other device to permit stable connection to the countertop mounting device 46 is secured to the lower frame structure 53 of the container/module 1 via a reversible device such as a screw and nut or Non-reversible equipment such as welded joints or gold dowels are completed. The table top mounted device 46 can then be secured using a countertop screw 47 or equivalent. In addition, other deck, wall or roof structures can be adjusted, for example, to permanently secure the equipment, only to provide a transport lock or to ensure a stable and safe position of the equipment during production. Such measures are of particular importance in order to integrate the heavy equipment pre-combined within the module and/or the coating equipment with a high center of gravity.

Figure 4 depicts a plan view of four different modules 1 through 4 in a transport mode that can be combined in the field to form a four-module center, as shown in Figure 5. At the time of manufacture, the shipping cover 28 can be replaced by a cover 27 to provide a coating system arrangement 26 that is easily accessible to the top and portions of the coating system 12 in order to extend the height of the center. The shield 25' is detachably mounted to the protective window 25 during transportation. In addition, when the two blowing units 13, a decoating unit 14, a cleaning unit 15, the furnishings 21, the other storage shelves 22, a sanitary device 23, and the basic equipment and the PC equipment are pre-combined, Provided to the device as described in Figure 1, with an actual four module center.

The transport walls 29 to 34 can be quickly removed from the modules 1 to 4 to extend the footprint of the center of the four modules. With regard to the specific example of Fig. 5, the use of transport walls 29 to 31, together with the door 24 and the prefabricated top and bottom unit (the latter not further illustrated in the drawings), establishes a warehouse 9 and uses the transport wall 32. To 34 (including the double door 24') to establish a reception room 10. If additional walls are required, like any pre-manufactured units, they can be stored in the modules during transport and then combined in the production location.

Figure 6 shows the re-separation of the area of the actual four-module center with production area 7, utility room 8, warehouse 9, reception room 10 and lounge 11 in order to maintain high mobility and quick assembly and disassembly of the center, Recommendation: Pre-assemble a high percentage or even all major components of the equipment necessary to operate the coating system in transport modules 1 to 4 (when necessary, plus transport locks) to facilitate production. Once the modules are made, all the components of the device can be separately integrated and fixed into each module. In any case, in the case of basic facilities, such as furniture, cleaning or blowing equipment and other suppliers, as an example, using partially equipped modules to save taxes or to benefit from low prices may be An advantage.

In addition, in order to limit the electrical and gas supply interface and reduce the length of the wire or tube, each piece of equipment should belong to only one module and various utilities such as process gas source 16 and compressed air supply 18 and main power rack 17 and system. The power frame (for practical examples and incorporated into the coating system facility 26) should be placed in the module where the module is placed, in which case the maximum increase in gas, compressed air, high power or other demand. This is why: Regarding the actual example, the process gas source 16, the main power rack 17 and the coating system facility 26 are installed into the module 1 to supply the coating system 12, while the compressed air supply source 18 is installed into the same module 2 The middle is used as the blowing and/or micro-blowing unit 13.

For quick and easy handling, minimize the facility and pipe connections between the modules and use quick-removable connection equipment (not further mentioned in each drawing). As an example of power supply, the main power rack 17 is positioned in the module 1 while a secondary power distribution rack (not shown in the drawings) is provided in each of the other modules 2 to 4. Therefore, during the combination of the center modules 2 to 4, it is easy to electrify by connecting only one plug via each module. Because the fast-removable connection of any type of building wiring and piping is now readily available, water, gas and compressed air can be used for similar measures. In order to minimize the time required for on-site assembly, the interface between the modules 1 to 6 must be avoided as much as possible with respect to key components such as vacuum piping, process gas lines, busbars of the automatic characteristics of the coating system 12.

As an example of the coating center described in Figures 1, 4 and 5, everyone familiar with the art will be able to design industrial modules of different sizes and equipment, planning the activity according to local needs and customers. Coating center. However, the primary focus of any cost-effective mobile coating center is to pre-assemble equipment and facilities in such a way as to minimize the number of connected devices and interfaces between the modules and the length of the pipelines and cables within the modules.

As mentioned above, the modules must be constructed in such a way that all types of transportation are compatible and meet the usual static needs and strengths of standard shipping containers. This also means that the transport cover 28, the movable transport walls 29 to 34 and the guard 25' must have equal strength and can be closed in a watertight manner.

Figure 7 depicts the installed transport wall at the transport location and Figure 8 shows an example of a quick fix system. Preferably, the transporting wall 50 is mounted to the upper and lower frame structures 52, 53 of the container module _n 5 using a securing device 51, which may be a screw, a plug release handle or the like. The seal 35 is placed between the transport wall 50 and the frame structure 53, and the container module 5. The seal 35 can be designed to be partially or partially sealed and formed of an elastomer, a relatively thin paper such as neoprene or the like.

Figures 9 through 11 show an example of how to combine two modules, namely, module _n 5 and module _{n + 1} 6, and its self-transport mode becomes a change in production mode. For a center with n modules, this operation must be repeated n-1 times. When the modules 5 and 6 are in a row, as shown in Fig. 9, the first combining step includes removing the transport wall 50 and placing the seal 38 in position adjacent the outer side of the connecting side wall of the module n5. With regard to the design and materials of the seal 38, reference should be made to the transport seal 35.

Thereafter, the module _n 5 and the module _{n + 16} must be positioned via the crane, and the minimum distance can be used to allow the central positioning members 39 and 40 to be positioned at the center of the central module before being finally connected together. Their mutual position. According to the example shown in Figure 10, the fine positioning is accomplished using a threaded rod 40 that cooperates with the two eyelets 39, with the oppositely installable threads on the modules 5 and 6, or using another nut instead of the opposite Threads and so on. After the final positioning of the modules 5, 6, the central positioning members 39 and 40 can be removed.

In Fig. 11, it is shown how to install the last two modules 5, 6 to maintain the mutual position of the modules and provide a sufficiently compressed seal 38 to create a watertight connection. Two examples of differently mounted devices are described, which may be used alone or in combination as indicated by actual needs.

A planar mounting device includes a threaded bore 41 in the lower (or upper) frame structure 53 (52) of the two modules 5, 6, a mounting plate 42 and mounting screws 43. Due to its flat design it can be used as an internal connection device or - on top - as an external connection device.

A top mounted device includes a web 44 mounted to the upper frame structure 52 or laterally mounted on the outer walls of the two modules 5, 6 joined by at least one attachment screw 45. Due to the upright design, the top mount is quite suitable for external applications and not for interior.

When having a multi-module center, all of the modules are fastened together by a combination screw, and interfaces such as electricity, gas, and/or pressurized air can be connected using a quick connect device according to the pre-combined structure as explained above.

The consumption figures for all public facilities including the four module centers are shown in Table 1.

Figure 12 shows an example of a modular indoor coating center. Lease or purchase of a local building 61 should be a noteworthy method of adoption when considering contract costs or other considerations. Similar to the coating center described above, in order to shorten the set-up time in the building, the equipment and facility lines and pipes are combined and pre-combined into a module or pre-assembled on a platform prior to transportation.

However, in this case, the transport modules 54 to 58 are no longer needed to construct all of the buildings in the center of the coating, but are used only to separate the production areas from each other when needed. As an example, all facilities, such as process gas source 16, main power rack 17, water distribution/preparation 19, monitoring rack 19', and additional facilities 62, such as air conditioners or others, can now be placed within a module 54. This module should be isolated from the rest of the building 61 for noise, heat and safety. Alternatively, it can be placed outside of the building 61. A similar situation is with respect to the blowing chamber 56 due to the generation of dust and noise.

The other modules of the actual example are pre-combined according to the usual processing steps of the coating center, such as the cleaning module 58, the coating module 55, the decoating module 57, and the blowing module 56. A cargo receiving/issuing unit can be provided outside of each module within the building 61.

A prefabricated dielectric conduit 60 brings all of the required media (water, electricity, electricity, compressed air and others from the facility container 54 through the various connection devices 59 consisting of quick connect devices according to the actual media needs (when needed) From the equipment placed in the modules 55 to 58. During transport, the medium conduit 60 can be disassembled for transport and stored in one or several containers during transport. If some facilities are used for one piece For equipment, only suitable facilities can be combined in the same module. For example, with respect to the process gas source 16, it can be incorporated into the module 55 for use only in the supply coating center 12. Similar considerations can be taken, for example Regarding the compressed air source 18 and with respect to water distribution/preparation 19.

When the platform level of each module 54, 55, 56, 57, 58 is higher than the level of the countertop of the building 61, it is useful to provide a sliding table 63 so that the components can be moved, in particular to move using a rolling table from a die. Group to the other part of the module to be treated.

In this example, as opposed to the previous example, a modular platform with pre-combined production equipment can be used for each production step or zone that does not require a closed house, for the reasons described above, with respect to the facility module 58 Or blowing the module 56, the latter is clearly advantageous. In this example, units such as the roof and walls can be removed to transform the transport module into a production mode that facilitates lateral access to the equipment. As an example, the platform can be used for modules 55, 57 and 58.

For the sake of completion, it should be specifically mentioned that, in some instances, only the coating center in the form of a closed and/or open modular form is set up and locally supplied with other parts of the equipment for direct installation. It is more advantageous on the building.

1‧‧‧Container/Electric Module 1

2‧‧‧Container/Module 2

3‧‧‧Container/Module 3

4‧‧‧Container/Module 4

5‧‧‧ Container/Module n

6‧‧‧Container/module n+1

7‧‧‧Production area

8‧‧‧ public facilities room

9‧‧‧Warehouse

10‧‧‧ Reception Room

11‧‧‧ Lounge

12‧‧‧Coating system

13‧‧‧Micro-blowing/blowing unit

14‧‧‧Decoating unit

15‧‧‧ cleaning unit

16‧‧‧Process gas source

17‧‧‧ main power rack

18‧‧‧Compressed air supply

19‧‧‧Water distribution/preparation unit

19’‧‧‧Monitor (as needed)

20‧‧‧Loading/Unloading Station

21‧‧‧ furnishings

22‧‧‧Shelf

23‧‧‧ facilities

24‧‧‧

24’‧‧‧Double

25‧‧‧ window

25’‧‧‧Shield

26‧‧‧System Facilities

27‧‧‧ Cover

28‧‧‧Transport cover

29‧‧‧Transportation wall

30‧‧‧Transportation wall

31‧‧‧Transportation wall

32‧‧‧Transportation wall

33‧‧‧Transportation wall

34‧‧‧Transportation wall

35‧‧‧Transport seal

36‧‧‧Transportation location

37‧‧‧keeper

38‧‧‧ Seal

39‧‧‧ Eyes

40‧‧‧Threaded rod

41‧‧‧Threaded holes

42‧‧‧Installation board

43‧‧‧Installation thread

44‧‧‧Connecting plate

45‧‧‧Connecting thread

46‧‧‧Interlayer board installation equipment

47‧‧‧Interlayer plate thread

48‧‧‧Interlayer board

49‧‧‧Steel structure

50‧‧‧Transportation wall

51‧‧‧Fixed equipment

52‧‧‧Upper frame structure

53‧‧‧ Lower frame structure

54‧‧‧Facility Module/Platform

55‧‧‧Coated module/platform

56‧‧‧Blowing module/platform

57‧‧‧De-coated module/platform

58‧‧‧Clean modules/platforms

59‧‧‧Connecting device

60‧‧‧ catheter

61‧‧‧Buildings

62‧‧‧Additional facilities

63‧‧‧slide

The following is a description of certain specific embodiments of the invention with reference to the illustration of a coating center.

Figure 1 is a schematic view of a module coating center, Figure 2: a module with a cover, Figure 3 is a cross-section of the pre-assembled device, and Figure 4 is a plan view of the four modules of the transfer mode, Figure 5 shows the plan of the four modules in the production mode. Figure 6 is the sub-division of the area within the center of the four-module. Figure 7 is the transport wall installed. Figure 8 is an example of the fixed system. Figure 9 is a module for removing the transport wall, Figure 10 is a module with a central positioning member, and Figure 11 is a module with a mounting device. Figure 12 is a modular indoor coating center.

1. . . Container/electric module 1

8. . . Public facilities room

12. . . Coating system

16. . . Process gas

17. . . Main power rack

18. . . Compressed air supply

19. . . Water distribution/preparation unit

20. . . Loading/unloading station

twenty two. . . shelf

twenty four. . . door

25. . . window

26. . . System facilities

Claims (4)

A vapor deposition coating center comprising: at least one vapor deposition system selected from the group consisting of a physical vapor deposition system and a chemical vapor deposition system; and a first device selected from the following a group consisting of: a blowing unit, a micro-blowing unit, a decoating unit, a cleaning unit, a brushing unit, and a furnace; and a second device that supplies the at least one vapor deposition system and the first device, and the The second device is selected from the group consisting of: a process gas source, a power source, a compressed air supply source, a water distribution unit, and a water preparation unit; at least one industrial module, wherein the at least one vapor deposition system, the The first device and the second device are installed in a pre-combined manner; a conversion means for converting the coating center from the transportation mode to the production mode, and for converting the coating center from the production mode to the In the transport mode, the conversion means is selected from the group consisting of: a movable wall, a transport cover, a seal, a cover, a protective cover, a center member, a mounting device, and a transport lock; wherein the at least The industrial module is configured with an upper opening, and the transport opening covers the upper opening, and in the production mode for extending the height of one of the at least one industrial module, the cover is covered by the cover The upper opening. The vapor deposition coating center of claim 1, wherein the coating center comprises two industrial modules. A vapor deposition coating center according to claim 2, wherein each of the at least two industrial modules comprises at least one quick release fastener system for power lines, air compression and/or gas lines to provide mutual connection. For example, the vapor deposition coating center of claim 2, wherein the coating center comprises four industrial modules.