TWI391636B - Knock sensor and method of manufacturing the same - Google Patents
Knock sensor and method of manufacturing the same Download PDFInfo
- Publication number
- TWI391636B TWI391636B TW98116075A TW98116075A TWI391636B TW I391636 B TWI391636 B TW I391636B TW 98116075 A TW98116075 A TW 98116075A TW 98116075 A TW98116075 A TW 98116075A TW I391636 B TWI391636 B TW I391636B
- Authority
- TW
- Taiwan
- Prior art keywords
- base
- tube portion
- terminal plate
- sleeved
- rim
- Prior art date
Links
Description
本發明與爆震感測器有關,特別是有關於一種爆震感測器及其製造方法。The invention relates to a knock sensor, and more particularly to a knock sensor and a method of manufacturing the same.
中國公開第CN1760654號專利案揭露出一種「爆震感測器及其製造方法」,主要係於基座之管部的外周面成形一環槽,將一止動環套設於基座之管部並施以軸向的負載之後,讓事先套設於基座之管部的壓電元件、端子板、絕緣片與配重塊等元件互相保持著適當的壓迫,接著再對止動環施以徑向的負載,使某一部份的止動環嵌設於基座之管部的環槽中,以完成止動環的固定而對壓電元件施加穩定的預加負載。The Chinese Patent Publication No. CN1760654 discloses a "knock sensor and a method of manufacturing the same", which mainly forms a ring groove on the outer peripheral surface of the pipe portion of the base, and a snap ring is sleeved on the pipe portion of the base. After the axial load is applied, the piezoelectric element, the terminal plate, the insulating sheet, the weight, and the like which are previously sleeved on the tube portion of the base are appropriately pressed against each other, and then the stop ring is applied with a diameter. The load is applied such that a certain portion of the snap ring is embedded in the ring groove of the tube portion of the base to complete the fixing of the stop ring to apply a stable preload to the piezoelectric element.
雖然上述專利案之止動環能夠有效解決上述專利案之先前技術中使用螺母所產生的問題,但是無論是止動環或螺母,都是藉由額外的構件將壓電元件、端子板、絕緣片與配重塊等元件加以固定,同時施加預定的負載。因此,這些額外的構件往往將會造成整體製造成本的提高,且需控制機台之輸出壓力並在壓力達到預定值時,由軸向施力鉚合止動環,其製造過程易使基座之管部產生變型,造成不良品,製造過程當然也會較為繁複。Although the retaining ring of the above patent can effectively solve the problems caused by the use of the nut in the prior art of the above patent, the retaining ring or the nut is used to insulate the piezoelectric element, the terminal plate, and the insulating member by an additional member. The sheet is fixed with components such as counterweights while applying a predetermined load. Therefore, these additional components tend to cause an increase in the overall manufacturing cost, and it is necessary to control the output pressure of the machine and when the pressure reaches a predetermined value, the thrust ring is riveted by the axial force, and the manufacturing process is easy to make the base The tube is deformed, resulting in defective products, and the manufacturing process will of course be more complicated.
本發明之主要目的在於提供一種爆震感測器,其具有低廉的製造成本與簡易的製造過程。SUMMARY OF THE INVENTION A primary object of the present invention is to provide a knock sensor having an inexpensive manufacturing cost and a simple manufacturing process.
為達成上述目的,本發明所提供之爆震感測器包含有一基座、一下絕緣片、一下端子板、一壓電元件、一上端子板、一上絕緣片與一配重塊。該基座具有一圓盤狀之基部、一管部與一環緣,該管部由該基部沿著該基部之軸向延伸而出,該環緣由該管部延伸而出並環繞於該管部之外圍,而該下絕緣片、絕緣環、該下端子板、該壓電元件、該上端子板、該上絕緣片與該配重塊則依序套設於該基座之管部,並依序堆疊於該基座之基部上方,同時被迫緊在該基座之環緣與該基座之基部之間。To achieve the above object, the knock sensor of the present invention comprises a base, a lower insulating sheet, a lower terminal plate, a piezoelectric element, an upper terminal plate, an upper insulating sheet and a weight. The base has a disc-shaped base portion, a tube portion and a rim, the tube portion extending from the base portion along an axial direction of the base portion, the rim portion extending from the tube portion and surrounding the tube portion The outer insulating sheet, the insulating ring, the lower terminal plate, the piezoelectric element, the upper terminal plate, the upper insulating sheet and the weight are sequentially sleeved on the tube portion of the base, and Stacked sequentially over the base of the base while being forced between the rim of the base and the base of the base.
本發明之爆震感測器在製造時,是利用一沖頭對該基座之環緣進行沖壓,使該基座之環緣產生彎折,用以將該下絕緣片、該下端子板、該壓電元件、該上端子板、該上絕緣片與該配重塊加以迫緊,同時施加預定的負載。The knock sensor of the present invention is manufactured by punching the edge of the base with a punch to bend the edge of the base for the lower insulating sheet, the lower terminal plate, The piezoelectric element, the upper terminal plate, the upper insulating sheet and the weight are pressed while applying a predetermined load.
由上述可知,本發明之爆震感測器省略掉額外的元件,而是設定鉚合機台的沖衝直接在該基座之管部外圍一體形成出可加以彎折之該環緣,用以將套設於該基座之管部的前述元件加以迫緊,有效達到降低製造成本與提供簡易製造過程的目的。It can be seen from the above that the knock sensor of the present invention omits the extra component, but sets the punching of the riveting machine to directly form the rim at the periphery of the tube portion of the base, which can be bent. The aforementioned components disposed on the tube portion of the base are tightened, effectively achieving the purpose of reducing manufacturing costs and providing a simple manufacturing process.
為了詳細說明本發明之結構、特徵及功效所在,茲舉以下較佳實施例並配合圖式說明如後。In order to explain the structure, features, and advantages of the present invention in detail, the following preferred embodiments are illustrated in the accompanying drawings.
請參閱第二圖,為本發明第一較佳實施例所提供之爆震感測器(10),主要包含有一基座(20)、一下絕緣片(30)、絕緣環、一下端子板(40)、一壓電元件(50)、一上端子板(60)、一上絕緣片(70)、一配重塊(80)、一絕緣環(82)、一墊圈(84)與一保護層(86)。Referring to the second figure, a knock sensor (10) according to a first preferred embodiment of the present invention mainly includes a base (20), a lower insulating sheet (30), an insulating ring, and a lower terminal plate (40). a piezoelectric element (50), an upper terminal plate (60), an upper insulating sheet (70), a weight (80), an insulating ring (82), a gasket (84) and a protective layer (86).
基座(20)具有一圓盤狀之基部(22)、一管部(24)與一環緣(26)。管部(24)由基部(22)之頂面沿著基部(22)之軸向向上延伸而出,並具有一大徑段(242)與一小徑段(244);環緣(26)具有一垂直段(262)與一水平段(264),垂直段(262)由管部(24)之大徑段(242)向上延伸而出,水平段(264)則由垂直段(262)之末端沿著管部(24)之徑向水平延伸而出,並連續不間斷地環繞於管部(24)之小徑段(244)外圍,如第三圖所示。The base (20) has a disk-shaped base (22), a tube portion (24) and a ring edge (26). The tube portion (24) extends upward from the top surface of the base portion (22) along the axial direction of the base portion (22) and has a large diameter section (242) and a small diameter section (244); the collar (26) There is a vertical section (262) and a horizontal section (264), the vertical section (262) extends upward from the large diameter section (242) of the tube portion (24), and the horizontal section (264) is defined by the vertical section (262). The end extends horizontally along the radial direction of the tube portion (24) and continuously surrounds the periphery of the small diameter section (244) of the tube portion (24) continuously, as shown in the third figure.
下絕緣片(30)套設於基座(20)之管部(24)的大徑段(242),並堆疊於基座(20)之基部(22)的上方。The lower insulating sheet (30) is sleeved on the large diameter section (242) of the tube portion (24) of the base (20) and stacked above the base (22) of the base (20).
下端子板(40)套設於基座(20)之管部(24)的大徑段(242),並堆疊於下絕緣片(30)的上方,使下端子板(40)透過下絕緣片(30)與基座(20)之基部(22)保持絕緣的狀態。The lower terminal plate (40) is sleeved on the large diameter section (242) of the tube portion (24) of the base (20), and is stacked above the lower insulating sheet (30) to pass the lower terminal plate (40) through the lower insulation. The sheet (30) is kept insulated from the base (22) of the base (20).
壓電元件(50)套設於基座(20)之管部(24)的大徑段(242),並堆疊於下端子板(40)的上方,用以感受由基座(20)傳遞而來的軸向振動以輸出電壓信號。The piezoelectric element (50) is sleeved on the large diameter section (242) of the tube portion (24) of the base (20) and stacked above the lower terminal plate (40) for sensing transmission by the base (20) The resulting axial vibration is to output a voltage signal.
上端子板(60)套設於基座(20)之管部(24)的大徑段(242),並堆疊於壓電元件(50)的上方,同時與下端子板(40)電性接觸。The upper terminal plate (60) is sleeved on the large diameter section (242) of the tube portion (24) of the base (20), and is stacked above the piezoelectric element (50) while being electrically connected to the lower terminal plate (40). contact.
上絕緣片(70)套設於基座(20)之管部(24)的大徑段(242),並堆疊於上端子板(60)的上方。The upper insulating sheet (70) is sleeved on the large diameter section (242) of the tube portion (24) of the base (20) and stacked above the upper terminal board (60).
配重塊(80)套設於基座(20)之管部(24)的大徑段(242),並堆疊於上絕緣片(70)的上方而可透過上絕緣片(70)保持與上端子板(60)之間的絕緣狀態,用以提供振動力給壓電元件(50)。The weight (80) is sleeved on the large diameter section (242) of the tube portion (24) of the base (20), and is stacked above the upper insulating sheet (70) to be held by the upper insulating sheet (70). An insulating state between the upper terminal plates (60) for providing a vibration force to the piezoelectric element (50).
絕緣環(82)套設於基座(20)之大徑段(242)的大徑段(242),並位於管部(24)之大徑段(242)與下端子板(40)、壓電元件(50)、上端子板(60)及配重塊(80)之間,使基座(20)絕緣於下端子板(40)、壓電元件(50)、上端子板(60)及配重塊(80)The insulating ring (82) is sleeved on the large diameter section (242) of the large diameter section (242) of the base (20), and is located at the large diameter section (242) and the lower terminal board (40) of the tube portion (24), Between the piezoelectric element (50), the upper terminal plate (60) and the weight (80), the base (20) is insulated from the lower terminal plate (40), the piezoelectric element (50), and the upper terminal plate (60). ) and weights (80)
墊圈(84)套設於基座(20)之管部(24),並迫緊在基座(20)之環緣(26)的水平段(264)與配重塊(80)之間。當然,墊圈(84)可依實際需要而不設置。The washer (84) is sleeved on the tube portion (24) of the base (20) and is forced between the horizontal section (264) of the rim (26) of the base (20) and the weight (80). Of course, the gasket (84) can be set without actual needs.
保護層(86)由合成樹脂所製成,包覆於基座(20)之外圍。The protective layer (86) is made of synthetic resin and is coated on the periphery of the susceptor (20).
經由上述結構可知,本發明之爆震感測器(10)係於基座(20)之管部(24)外圍一體形成出可被彎折之環緣(26),用以將下絕緣片(30)、下端子板(40)、壓電元件(50)、上端子板(60)、上絕緣片(70)、配重塊(80)與墊圈(84)加以迫緊,並同時對上述元件施加預定的負載,並未使用如習用專利案之止動環或螺母等元件。藉此,由於本發明之爆震感測器(10)省略掉額外的元件,使得本發明之爆震感測器(10)與習用之專利案相比較之下更能提供更為簡易的製造過程與有效降低製造成本。According to the above structure, the knock sensor (10) of the present invention integrally forms a bendable edge (26) on the periphery of the tube portion (24) of the base (20) for lowering the insulating sheet ( 30), the lower terminal plate (40), the piezoelectric element (50), the upper terminal plate (60), the upper insulating sheet (70), the weight (80) and the gasket (84) are pressed, and simultaneously The component is subjected to a predetermined load, and components such as a snap ring or a nut as in the conventional patent are not used. Thereby, since the knock sensor (10) of the present invention omits additional components, the knock sensor (10) of the present invention can provide a simpler manufacturing process and comparison with the conventional patent. Effectively reduce manufacturing costs.
值得一提的是,本發明之爆震感測器的結構可有多種變化。如第四圖所示,為本發明第二較佳實施例所提供之爆震感測器(90),主要差異在於基座(92)之環緣(96)具有四個缺口(962)(至少一個缺口即可)而不連續地環繞於基座(92)之管部(94)外圍,同樣可透過水平段(964)迫緊套設於基座(92)之管部(94)的元件,並對該等元件施加預定的負載。It is worth mentioning that the structure of the knock sensor of the present invention can be varied. As shown in the fourth figure, the knock sensor (90) provided by the second preferred embodiment of the present invention differs mainly in that the rim (96) of the pedestal (92) has four notches (962) (at least A notch can be discontinuously wrapped around the periphery of the tube portion (94) of the base (92), and the element of the tube portion (94) of the base (92) can also be forced through the horizontal portion (964). And apply a predetermined load to the components.
以下再配合圖式就本發明之爆震感測器(10)的製造方法進行說明。Hereinafter, a method of manufacturing the knock sensor (10) of the present invention will be described with reference to the drawings.
步驟a):如第一圖A所示,提供一基座(20),基座(20)具有一圓盤狀之基部(22)、一管部(24)與一環緣(26)。管部(24)由基部(22)之頂面沿著基部(22)之軸向向上延伸而出,並具有一大徑段(242)與一小徑段(244);環緣(26)由管部(24)之大徑段(244)向上延伸而出並連續不間斷地環繞於管部(24)之小徑段(244)外圍。Step a): As shown in Fig. A, a base (20) is provided. The base (20) has a disk-shaped base (22), a tube portion (24) and a ring edge (26). The tube portion (24) extends upward from the top surface of the base portion (22) along the axial direction of the base portion (22) and has a large diameter section (242) and a small diameter section (244); the collar (26) The large diameter section (244) of the tube portion (24) extends upward and continuously surrounds the periphery of the small diameter section (244) of the tube portion (24) continuously.
步驟b):如第一圖B所示,依序將一絕緣環(82)、一下絕緣片(30)、一下端子板(40)、一壓電元件(50)、一上端子板(60)、一上絕緣片(70)、一配重塊(80)與一墊圈(84)套設於基座(20)之管部(24)的大徑段(242)而依序堆疊在基座(20)之基部(22)上方。Step b): As shown in FIG. B, an insulating ring (82), a lower insulating sheet (30), a lower terminal plate (40), a piezoelectric element (50), and an upper terminal plate (60) are sequentially disposed. An insulating sheet (70), a weight (80) and a gasket (84) are sleeved on the large diameter section (242) of the tube portion (24) of the base (20) and sequentially stacked on the base Above the base (22) of the seat (20).
步驟c):如第一圖C所示,使用一沖頭(12)對基座(20)之環緣(26)進行沖壓,使環緣(26)彎折形成出一垂直段(262)與一水平段(264),並利用水平段(264)將步驟b)之該等元件加以迫緊,同時施加預定的負載,如第一圖D所示。Step c): As shown in the first figure C, the rim (26) of the pedestal (20) is punched using a punch (12), and the rim (26) is bent to form a vertical section (262). The components of step b) are forced with a horizontal segment (264) and horizontal segments (264) while applying a predetermined load, as shown in Figure D.
步驟d):包覆一層由合成樹脂所製成之保護層(86)於基座(20)之外圍,以完成本發明之爆震感測器(10)的製造,如第二圖所示。Step d): coating a protective layer (86) made of synthetic resin on the periphery of the susceptor (20) to complete the manufacture of the knock sensor (10) of the present invention, as shown in the second figure.
經由上述步驟可知,本發明之爆震感測器(10)只需透過沖頭(12)對基座(20)之環緣(26)進行沖壓,使基座(20)之環緣(26)產生彎折,即可對步驟b)之該等元件施加預定的負載。反觀習用專利案則是先將止動環套設於基座之管部後,並施加軸向負載於止動環後,再將某部份之止動環嵌設於基座之管部的環槽中,以完成止動環的固定。相比較之下可知,本發明之爆震感測器(10)比習用專利案提供更為簡易的製造過程,同時可有效降低整體的製造成本。Through the above steps, the knock sensor (10) of the present invention only needs to punch the rim (26) of the base (20) through the punch (12) to make the rim (26) of the base (20). By creating a bend, a predetermined load can be applied to the elements of step b). In contrast, in the conventional patent case, the stop ring is sleeved on the tube portion of the base, and the axial load is applied to the stop ring, and then a certain part of the stop ring is embedded in the tube portion of the base. In the ring groove, to complete the fixing of the stop ring. In comparison, the knock sensor (10) of the present invention provides a simpler manufacturing process than the conventional patent, and at the same time effectively reduces the overall manufacturing cost.
值得一提的是,本發明之爆震感測器的結構可有多種變化。如第四圖所示,步驟a)之環緣(96)可具有四個缺口(962)(至少一個缺口即可)而不連續地環繞於基座(92)之管部(94)外圍。當環緣(96)被步驟c)之沖頭()沖壓形成水平段(964)後,同樣可透過水平段(964)迫緊套設於基座(92)之管部(94)的元件,並對該等元件施加預定的負載。It is worth mentioning that the structure of the knock sensor of the present invention can be varied. As shown in the fourth figure, the rim (96) of step a) can have four notches (962) (at least one notch) that do not continuously surround the periphery of the tube portion (94) of the base (92). After the rim (96) is stamped by the punch of step c) to form the horizontal section (964), the component of the tube portion (94) of the pedestal (92) can also be forced through the horizontal section (964). And apply a predetermined load to the components.
本發明於前揭實施例中所揭露的構成元件,僅為舉例說明,並非用來限制本案之範圍,其他等效元件的替代或變化,亦應為本案之申請專利範圍所涵蓋。The constituent elements of the present invention disclosed in the foregoing embodiments are merely illustrative and are not intended to limit the scope of the present invention. The alternative or variations of other equivalent elements are also covered by the scope of the patent application.
(10)...爆震感測器(10). . . Knock sensor
(12)...沖頭(12). . . shower
(20)...基座(20). . . Pedestal
(22)...基部(twenty two). . . Base
(24)...管部(twenty four). . . Tube department
(242)...大徑段(242). . . Large diameter section
(244)...小徑段(244). . . Small diameter section
(26)...環緣(26). . . Ring
(262)...垂直段(262). . . Vertical segment
(264)...水平段(264). . . Horizontal section
(30)...下絕緣片(30). . . Lower insulation sheet
(40)...下端子板(40). . . Lower terminal board
(50)...壓電元件(50). . . Piezoelectric element
(60)...上端子板(60). . . Upper terminal board
(70)...上絕緣片(70). . . Upper insulation sheet
(80)...配重塊(80). . . Counterweight
(82)...絕緣環(82). . . Insulation ring
(84)...墊圈(84). . . washer
(86)...保護層(86). . . The protective layer
(90)...爆震感測器(90). . . Knock sensor
(92)...基座(92). . . Pedestal
(94)...管部(94). . . Tube department
(96)...環緣(96). . . Ring
(962)...缺口(962). . . gap
(964)...水平段(964). . . Horizontal section
第一圖A為一剖視圖,主要顯示本發明第一較佳實施例所提供之基座;FIG. 1 is a cross-sectional view showing the susceptor provided by the first preferred embodiment of the present invention;
第一圖B為一剖視圖,主要顯示下絕緣片、下端子板、壓電元件、上端子板、上絕緣片與配重塊套設於基座之管部後之狀態;FIG. 2B is a cross-sectional view showing the state in which the lower insulating sheet, the lower terminal plate, the piezoelectric element, the upper terminal plate, the upper insulating sheet and the weight are sleeved on the tube portion of the base;
第一圖C為一剖視圖,主要顯示沖頭對基部之環緣進行沖壓之狀態。The first figure C is a cross-sectional view mainly showing the state in which the punch punches the edge of the base.
第一圖D為一剖視圖,主要顯示環緣彎折形成一垂直段與一水平段。The first figure D is a cross-sectional view, mainly showing that the ring edge is bent to form a vertical segment and a horizontal segment.
第二圖為本發明第一較佳實施例之剖視圖。The second figure is a cross-sectional view of a first preferred embodiment of the present invention.
第三圖為本發明第一較佳實施例去除保護層之俯視圖,主要顯示環緣連續不間斷地環繞於該基座之管部外圍。The third figure is a top view of the protective layer removed according to the first preferred embodiment of the present invention, mainly showing that the rim continuously and continuously surrounds the periphery of the tube portion of the susceptor.
第四圖為本發明第二較佳實施例去除保護層之俯視圖,主要顯示環緣具有四個缺口而不連續地環繞於該基座之管部外圍。The fourth figure is a top view of the second embodiment of the present invention with the protective layer removed, mainly showing that the rim has four notches and does not continuously surround the periphery of the tube portion of the pedestal.
10...爆震感測器10. . . Knock sensor
20...基座20. . . Pedestal
22...基部twenty two. . . Base
24...管部twenty four. . . Tube department
242...大徑段242. . . Large diameter section
244...小徑段244. . . Small diameter section
26...環緣26. . . Ring
262...垂直段262. . . Vertical segment
264...水平段264. . . Horizontal section
30...下絕緣片30. . . Lower insulation sheet
40...下端子板40. . . Lower terminal board
50...壓電元件50. . . Piezoelectric element
60...上端子板60. . . Upper terminal board
70...上絕緣片70. . . Upper insulation sheet
80...配重塊80. . . Counterweight
82...絕緣環82. . . Insulation ring
84...墊圈84. . . washer
86...保護層86. . . The protective layer
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW98116075A TWI391636B (en) | 2009-05-14 | 2009-05-14 | Knock sensor and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW98116075A TWI391636B (en) | 2009-05-14 | 2009-05-14 | Knock sensor and method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201040509A TW201040509A (en) | 2010-11-16 |
TWI391636B true TWI391636B (en) | 2013-04-01 |
Family
ID=44995956
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW98116075A TWI391636B (en) | 2009-05-14 | 2009-05-14 | Knock sensor and method of manufacturing the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI391636B (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1971228A (en) * | 2005-11-22 | 2007-05-30 | 三菱电机株式会社 | Knock sensor |
WO2008080727A1 (en) * | 2006-12-29 | 2008-07-10 | Robert Bosch Gmbh | Piezoelectric knock sensor |
-
2009
- 2009-05-14 TW TW98116075A patent/TWI391636B/en active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1971228A (en) * | 2005-11-22 | 2007-05-30 | 三菱电机株式会社 | Knock sensor |
WO2008080727A1 (en) * | 2006-12-29 | 2008-07-10 | Robert Bosch Gmbh | Piezoelectric knock sensor |
Also Published As
Publication number | Publication date |
---|---|
TW201040509A (en) | 2010-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10158949B2 (en) | MEMS microphone and method of manufacturing the same | |
US10993041B2 (en) | MEMS microphone and method of manufacturing the same | |
JP6038145B2 (en) | Shielding device with shielding member and at least one heat shielding and vibration shielding fixing device | |
US10544038B2 (en) | MEMS microphone and method of manufacturing the same | |
JP5880136B2 (en) | Rotor structure of rotating electrical machine and manufacturing method thereof | |
KR102116807B1 (en) | Winding component attachment structure and power conversion device provided with said attachment structure | |
JP5637156B2 (en) | Semiconductor module | |
US9400224B2 (en) | Pressure sensor and manufacturing method of the same | |
TWI391636B (en) | Knock sensor and method of manufacturing the same | |
JP4763832B2 (en) | Electrical contact between terminal pin and terminal wire and method of manufacturing the same | |
JP6534863B2 (en) | Laminated rubber bearing | |
JP6202188B2 (en) | Ball screw device | |
WO2015170444A1 (en) | Ball screw device and manufacturing method therefor | |
KR20160026716A (en) | Rolling bearing | |
CN106783490A (en) | Liner grounding assembly, reaction chamber and semiconductor processing equipment | |
CN215818620U (en) | MEMS microphone | |
JP7427578B2 (en) | Seismic isolation device | |
JP6561872B2 (en) | Wire harness and exterior member | |
JP2017041991A (en) | Manufacturing method of rotor core | |
JP6064135B2 (en) | Method of attaching MEMS to bonding wafer | |
TWI228854B (en) | Motor and manufacturing method of motor | |
JP6389604B2 (en) | Elastic washers and building foundations using them | |
JP2014135157A (en) | Planar heater | |
JP6236544B2 (en) | Semiconductor device and mounting method of semiconductor device | |
JP2003332108A (en) | Lightning arrester |