TWI390044B - Dust prevention device in roller hearth type heat treatment furnace - Google Patents

Dust prevention device in roller hearth type heat treatment furnace Download PDF

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Publication number
TWI390044B
TWI390044B TW94132434A TW94132434A TWI390044B TW I390044 B TWI390044 B TW I390044B TW 94132434 A TW94132434 A TW 94132434A TW 94132434 A TW94132434 A TW 94132434A TW I390044 B TWI390044 B TW I390044B
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roller
clean air
air duct
hearth
furnace body
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TW94132434A
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Chinese (zh)
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Iwao Morimoto
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Koyo Thermo Sys Co Ltd
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Description

滾子爐床式熱處理爐中之防塵裝置Dust-proof device in roller hearth type heat treatment furnace

本發明例如係關於一種防止灰塵侵入滾子爐床(Roller Hearth)式熱處理爐中之防塵裝置,該滾子爐床式熱處理爐係用以熱處理電漿顯示器面板製造步驟等所使用的玻璃基板或其中間加工物的處理品。The present invention relates to, for example, a dustproof device for preventing dust from intruding into a Roller Hearth type heat treatment furnace for heat-treating a glass substrate used in a manufacturing step of a plasma display panel or the like. A processed product of the intermediate processed product.

該種防塵裝置方面,使處理品搬運用爐床滾子貫穿爐體側壁,使其端部從側面突出,並在爐床滾子的突出端部以使二個密封環朝滾子軸方向並排且相互對向的側面彼此相抵接的方式嵌合覆被,其中,靠近爐體側壁之側的一方之密封環,是以密接狀固定於爐體側壁外面,而另一密封環則朝滾子軸方向自由移動且藉彈簧而朝接近一方之密封環的方向被彈壓,此係周知者(例如,參照專利文獻一)。In the dustproof device, the hearth roller for handling the product is passed through the side wall of the furnace body so that the end portion protrudes from the side, and the two sealing rings are arranged side by side in the direction of the roller axis at the protruding end of the hearth roller. And the mutually opposing side faces are fitted to each other, wherein one of the seal rings on the side closer to the side wall of the furnace body is fixed to the outside of the side wall of the furnace body in an intimate manner, and the other seal ring is directed toward the roller. The axial direction is free to move and is biased toward the seal ring close to one of the springs by a spring, and is well known (for example, refer to Patent Document 1).

在該習知的防塵裝置中存在有如下的問題。第一、在密封環材質的耐熱性上有困難。第二、從爐體側壁的滾子貫穿部產生灰塵。第三、無法完全避免滾子與密封環間的間隙,灰塵正是通過該間隙而從爐外侵入爐內。將二個密封環及彈簧安裝於爐體側壁及爐床滾子的構造相當複雜,因而花費成本。The conventional dustproof device has the following problems. First, there is difficulty in the heat resistance of the material of the seal ring. Second, dust is generated from the roller penetration portion of the side wall of the furnace body. Third, the gap between the roller and the seal ring cannot be completely avoided, and the dust is intruded into the furnace from outside the furnace through the gap. The construction of the two seal rings and springs on the side walls of the furnace body and the hearth rollers is quite complicated and costly.

[專利文獻一]日本特開平6-265273號公報[Patent Document 1] Japanese Patent Laid-Open No. Hei 6-265273

本發明之目的在提供一種滾子爐床式熱處理爐中之防塵裝置,其具有簡單的構造用以防止灰塵侵入爐內。SUMMARY OF THE INVENTION An object of the present invention is to provide a dustproof device in a roller hearth type heat treatment furnace which has a simple structure for preventing dust from intruding into the furnace.

本發明之防塵裝置,係在爐體側壁形成使處理品搬運用爐床滾子貫穿,且使其端部從側面突出的滾子貫穿孔的滾子爐床式熱處理爐中,以位於比滾子貫穿孔更上方的方式,在同爐體側壁外側面安裝清潔空氣導管,並於清潔空氣導管上,設置朝下方的空氣吹出口,並以從側方覆蓋空氣吹出口的方式,在清潔空氣導管設置護板。In the dustproof device of the present invention, a roller hearth type heat treatment furnace is formed in the side wall of the furnace body for forming a roller through which the workpiece is conveyed, and the end portion thereof protrudes from the side surface. The sub-through hole is placed above the side of the furnace body, and a clean air duct is installed on the outer side of the side wall of the furnace body, and on the clean air duct, a downward air blowing port is provided, and the air blowing port is covered from the side to clean the air. The catheter is provided with a shield.

本發明之防塵裝置中,滾子貫穿孔的外側開口端周圍,是面對由清潔空氣導管及護板所包夾的空間,在該空間內被由來自吹出口所吹出之清潔空氣所充滿,而灰塵不會侵入同一空間內。即使爐外的空氣從滾子貫穿孔周面及爐床滾子外面之間侵入時,該空氣亦只是清潔空氣而不含有灰塵。因此可防止灰塵侵入爐內。In the dustproof device of the present invention, the space around the outer open end of the roller through hole faces the space surrounded by the clean air duct and the shield, and is filled in the space by the clean air blown from the air outlet. The dust does not intrude into the same space. Even if the air outside the furnace invades from the peripheral surface of the roller through hole and the outside of the hearth roller, the air is only clean air and does not contain dust. Therefore, dust can be prevented from intruding into the furnace.

又,當使護板的下緣部,位於比爐床滾子的突出端部更下方處,且在護板的下緣部形成使爐床滾子的突出端部貫穿的缺口時,則滾子貫穿孔的周圍變成由護板廣泛地覆蓋,因而防止灰塵侵入的效果很大。Further, when the lower edge portion of the shield is located lower than the protruding end portion of the hearth roller, and the lower edge portion of the shield is formed with a notch through which the protruding end portion of the hearth roller penetrates, The periphery of the sub-through hole becomes widely covered by the shield, and thus the effect of preventing dust intrusion is large.

另外,當在滾子貫穿孔周面及爐床滾子外面之間,插入金屬或耐熱玻璃製保護套管時,可防止從由通常之隔熱材所形成的爐體側壁的滾子貫穿孔周面產生灰塵。Further, when a metal or heat-resistant glass protective sleeve is inserted between the circumferential surface of the roller through hole and the outer surface of the hearth roller, the roller through hole of the side wall of the furnace body formed of the usual heat insulating material can be prevented. Dust is generated on the circumference.

根據本發明的話,可使用簡單的構造來防止灰塵侵入爐內。According to the present invention, a simple configuration can be used to prevent dust from intruding into the furnace.

將參照圖面說明本發明之貫施形態。The form of the present invention will be described with reference to the drawings.

以下之說明中,左右是以第1圖為基準,以其左右側稱為左右。In the following description, the left and right sides are based on the first figure, and the left and right sides are referred to as left and right.

滾子爐床式熱處理爐具備有橫剖面為方形之爐體11。爐體11係由頂壁21、底壁22及兩側壁23所構成。此等頂壁21、底壁22及兩側壁23是由隔熱材所形成。另外,在頂壁21、底壁22及兩側壁23上具有加熱器(省略圖示)。又,在頂壁21、底壁22及兩側壁23的內面,是由耐熱玻璃製防塵壁(省略圖示)所覆蓋。The roller hearth type heat treatment furnace is provided with a furnace body 11 having a square cross section. The furnace body 11 is composed of a top wall 21, a bottom wall 22, and two side walls 23. The top wall 21, the bottom wall 22 and the two side walls 23 are formed of a heat insulating material. Further, a heater (not shown) is provided on the top wall 21, the bottom wall 22, and the both side walls 23. Moreover, the inner surfaces of the top wall 21, the bottom wall 22, and the both side walls 23 are covered with a heat-resistant glass dustproof wall (not shown).

滾子貫穿孔31係在兩側壁23的長度方向的數處,以在各處成為同心的方式來形成。在各滾子貫穿孔31內插入有金屬製保護套管32。保護套管32的材質,亦可改採耐熱玻璃以取代金屬。The roller through holes 31 are formed at a plurality of positions in the longitudinal direction of the both side walls 23 so as to be concentric everywhere. A metal protective sleeve 32 is inserted into each of the roller through holes 31. The material of the protective sleeve 32 can also be replaced by heat-resistant glass instead of metal.

使陶瓷製水平圓棒狀處理品搬運用爐床滾子33,通過保護套管32而貫穿於各處之滾子貫穿孔31,且使其端部從側方突出。The hearth roller 33 for conveyance of the ceramic horizontal round bar-shaped workpiece is passed through the protective sleeve 32 to penetrate the roller through hole 31, and the end portion thereof protrudes from the side.

分別以位於比左右的滾子貫穿孔31更上方的方式,在兩側壁23外側面呈懸臂狀地安裝左右的橫剖面為方形之清潔空氣導管41。兩清潔空氣導管41是左右之朝向為相反且為相同的構造者。以下,將針對右側的清潔空氣導管41來說明。A clean air duct 41 having a square cross section is attached to the outer side surfaces of the side walls 23 so as to be positioned above the left and right roller through holes 31, respectively. The two clean air ducts 41 are configured such that the left and right directions are opposite and the same. Hereinafter, the cleaning air duct 41 on the right side will be described.

在清潔空氣導管41的頂壁適當處連接有清潔空氣供給管42。在清潔空氣導管41的底壁上,朝長度方向相隔一定之間隔設置朝下之空氣吹出口43。在清潔空氣導管41上,爐體11相反側的側壁設有垂直板狀之鐵弗龍(註冊商標)製護板44。護板44的下緣部是位於比爐床滾子33突出端部更下方處。在該護板44的下緣部形成有使爐床滾子33突出端部貫穿的缺口45。該缺口45形成為逆U字狀的輪廓,上部具有圓弧狀部。在該圓弧狀部與爐床滾子33外面上半部之間具有若干間隙。該間隙以幾乎不允許空氣流通的程度的小間隙為較佳。A clean air supply pipe 42 is connected at a suitable portion of the top wall of the clean air duct 41. On the bottom wall of the clean air duct 41, the downward air blowing port 43 is provided at a certain interval in the longitudinal direction. On the clean air duct 41, a side wall on the opposite side of the furnace body 11 is provided with a vertical plate-shaped Teflon (registered trademark) guard plate 44. The lower edge portion of the shield 44 is located below the protruding end of the hearth roller 33. A notch 45 that penetrates the protruding end portion of the hearth roller 33 is formed at a lower edge portion of the shield 44. The notch 45 is formed in an inverted U-shaped outline, and the upper portion has an arc-shaped portion. There is a gap between the arcuate portion and the upper half of the outer surface of the hearth roller 33. This gap is preferably a small gap to the extent that air is not allowed to flow.

從空氣吹出口43吹出的清潔空氣,被充滿於由爐體側壁23、清潔空氣導管41及護板44所區劃的下方開放空間內。即使假設空氣從爐床滾子33及保護套管32間的間隙侵入爐體11內時,該空氣亦為清潔空氣,故不用擔心爐體11外的灰塵侵入爐體11內。尤其是在熱處理爐中,在升溫.脫黏合劑區中,雖然由於爐體11內排氣而保持為負壓,因此爐體11外的灰塵侵入爐內之疑慮,但利用同一空間內的清潔空氣,即可化解該疑慮。又,雖然從貫穿孔31的周面產生形成爐體11的隔熱材之纖維狀乃至顆粒狀的灰塵,但是保護套管32可阻止其飛散。The clean air blown from the air blowing port 43 is filled in the lower open space partitioned by the furnace body side wall 23, the clean air duct 41, and the shield 44. Even if air is intruded into the furnace body 11 from the gap between the hearth roller 33 and the protective sleeve 32, the air is clean air, so there is no fear that dust outside the furnace body 11 intrudes into the furnace body 11. Especially in the heat treatment furnace, heating up. In the debonding agent zone, although the negative pressure is maintained by the exhaust in the furnace body 11, the dust outside the furnace body 11 is invaded into the furnace. However, the cleaning air in the same space can be used to resolve the doubt. Further, although fibrous or particulate dust forming the heat insulating material of the furnace body 11 is generated from the circumferential surface of the through hole 31, the protective sleeve 32 can prevent it from scattering.

上述中,清潔空氣導管、空氣吹出口、護板及缺口的形狀,並不限於圖示者。缺口例如亦可以圓孔來取代。又,護板的材質亦可採用耐熱性塑膠來取代鐵弗龍(註冊商標)。In the above, the shapes of the clean air duct, the air outlet, the guard, and the notch are not limited to those shown. The gap can also be replaced, for example, by a round hole. In addition, the material of the shield can also be replaced by heat-resistant plastic (T-River (registered trademark)).

11...爐體11. . . Furnace body

21...頂壁twenty one. . . Top wall

22...底壁twenty two. . . Bottom wall

23...側壁twenty three. . . Side wall

31...滾子貫穿孔31. . . Roller through hole

32...保護套管32. . . Protective casing

33...爐床滾子33. . . Hearth roller

41...清潔空氣導管41. . . Clean air duct

42...清潔空氣供給管42. . . Clean air supply pipe

43...空氣吹出口43. . . Air outlet

44...護板44. . . Guard

45...缺口45. . . gap

第1圖為同時顯示本發明之防塵裝置及滾子爐床式熱處理爐的橫剖面圖。Fig. 1 is a cross-sectional view showing the dustproof device and the roller hearth type heat treatment furnace of the present invention at the same time.

第2圖為放大顯示第1圖之局部的剖面圖。Fig. 2 is a cross-sectional view showing a part of Fig. 1 in an enlarged manner.

第3圖為第2圖所示部分的立體圖。Fig. 3 is a perspective view of a portion shown in Fig. 2.

23...側壁twenty three. . . Side wall

31...滾子貫穿孔31. . . Roller through hole

32...保護套管32. . . Protective casing

33...爐床滾子33. . . Hearth roller

41...清潔空氣導管41. . . Clean air duct

42...清潔空氣供給管42. . . Clean air supply pipe

43...空氣吹出口43. . . Air outlet

44...護板44. . . Guard

45...缺口45. . . gap

Claims (5)

一種防塵裝置,其係在爐體側壁形成使處理品搬運用爐床滾子貫穿,且使其端部從側面突出的滾子貫穿孔的滾子爐床式熱處理爐中,以位於比滾子貫穿孔更上方處的方式,在同一爐體側壁外側面安裝清潔空氣導管,並於清潔空氣導管上,設置朝下方之空氣吹出口,並在清潔空氣導管設置護板,以從側面覆蓋空氣吹出口,清潔空氣導管相對於兩側壁的外側面呈懸臂狀,清潔空氣導管沿爐體側壁的長度方向配置,於清潔空氣導管頂壁連接清潔空氣供給管,清潔空氣通過清潔空氣供給管供給於清潔空氣導管,再通過清潔空氣導管內部而從空氣吹出口朝下方吹出。 A dustproof device which is formed in a roller hearth type heat treatment furnace for forming a roller through hole of a roller for conveying a workpiece to be conveyed on a side wall of a furnace body, and is located at a side of the furnace body so as to be located at a specific roller Install the clean air duct on the outer side of the side wall of the same furnace body, and set the air outlet port downwards on the clean air duct, and install a guard plate on the clean air duct to cover the air from the side. The outlet, the clean air duct is cantilevered with respect to the outer side surfaces of the two side walls, the clean air duct is arranged along the length direction of the side wall of the furnace body, and the clean air supply pipe is connected to the top wall of the clean air duct, and the clean air is supplied to the clean air supply tube for cleaning. The air duct is blown downward from the air outlet by cleaning the inside of the air duct. 如申請專利範圍第1項之防塵裝置,其中利用清潔空氣導管及護板區劃出下方開放空間。 For example, in the dustproof device of claim 1, the clean air duct and the guard plate area are used to draw out the open space below. 如申請專利範圍第1項之防塵裝置,其中使護板的下緣部位於比爐床滾子的突出端部更下方處,且在護板的下緣部形成使爐床滾子的突出端部貫穿的缺口。 The dustproof device of claim 1, wherein the lower edge portion of the shield is located lower than the protruding end portion of the hearth roller, and the protruding end of the hearth roller is formed at the lower edge portion of the shield The gap that runs through the department. 如申請專利範圍第2項之防塵裝置,其中使護板的下緣部位於比爐床滾子的突出端部更下方處,且在護板的下緣部形成使爐床滾子的突出端部貫穿的缺口。 The dustproof device of claim 2, wherein the lower edge portion of the shield is located lower than the protruding end of the hearth roller, and the protruding end of the hearth roller is formed at the lower edge portion of the shield The gap that runs through the department. 如申請專利範圍第1至4項中任一項之防塵裝置,其中在滾子貫穿孔周面及爐床滾子外面之間,插入金屬或耐熱玻璃製保護套管。 A dustproof device according to any one of claims 1 to 4, wherein a metal or heat-resistant glass protective sleeve is inserted between the circumferential surface of the roller through hole and the outer surface of the hearth roller.
TW94132434A 2005-09-20 2005-09-20 Dust prevention device in roller hearth type heat treatment furnace TWI390044B (en)

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