TWI388675B - A silicon-based metal alloy film, a silicon-based metal alloy film and an electronic device, and a method of manufacturing a silicon-based metal alloy film on a surface of a case - Google Patents

A silicon-based metal alloy film, a silicon-based metal alloy film and an electronic device, and a method of manufacturing a silicon-based metal alloy film on a surface of a case Download PDF

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TWI388675B
TWI388675B TW97122252A TW97122252A TWI388675B TW I388675 B TWI388675 B TW I388675B TW 97122252 A TW97122252 A TW 97122252A TW 97122252 A TW97122252 A TW 97122252A TW I388675 B TWI388675 B TW I388675B
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metal alloy
alloy film
based metal
bismuth
film
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TW200951231A (en
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China Steel Corp
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矽基金屬合金薄膜、具矽基金屬合金薄膜之外罩及電子裝置以及形成矽基金屬合金薄膜於一殼體表面之製造方法矽-based metal alloy film, ruthenium-based metal alloy film cover and electronic device, and method for forming bismuth-based metal alloy film on a surface of a casing

本發明係有關於一種鍍膜、具鍍膜之外罩及電子裝置以及形成鍍膜於一殼體表面之製造方法,詳言之,係關於一種矽基金屬合金薄膜、具矽基金屬合金薄膜之外罩及電子裝置以及形成矽基金屬合金薄膜於一殼體表面之製造方法。The invention relates to a coating film, a coating outer cover and an electronic device, and a manufacturing method for forming a coating film on a surface of a casing, in particular, a bismuth based metal alloy film, a bismuth based metal alloy film outer cover and an electron A device and a method of forming a ruthenium-based metal alloy film on a surface of a casing.

為了增加產品之美觀及附加價值,會於產品之表面設置一裝飾鍍膜。以行動3C產品(例如:行動電話或個人數位助理)為例,為達到降低生產成本及大量生產之目的,習知行動3C產品大多採用塑膠作為製造外殼的材料,僅有高階機種才會使用鎂合金等金屬材質。為了改善塑膠材質所產生之廉價感,業者常於產品之外殼噴塗添加金屬顆粒或珍珠之顏料,以增加產品之美感、科技感及現代感,藉以提昇產品之品質及價值。In order to increase the aesthetics and added value of the product, a decorative coating is placed on the surface of the product. For example, in the case of mobile 3C products (such as mobile phones or personal digital assistants), in order to reduce production costs and mass production, the conventional 3C products use plastic as the material for the outer casing, and only the high-end models use magnesium. Metal materials such as alloys. In order to improve the cheap feeling of plastic materials, the industry often sprays metal particles or pearl pigments on the outer shell of the product to increase the beauty, technology and modernity of the product, so as to enhance the quality and value of the product.

近年來,因無線通訊的廣泛應用,幾乎所有3C產品皆具有紅外線(IR)、藍牙(Bluetooth)、無線網路(Wi-Fi)、無線寬頻(Wi-Max)或全球定位系統(GPS)至少其中之一功能,然而,上述該等功能之高頻電磁波的傳遞易受金屬的阻隔。一般而言,導電度良好的材質,例如:銅、鋁、銀等金屬之薄膜,厚度只要數千(10-10 公尺),就會完全阻隔電磁波的傳輸及接收。因此,如何使塑膠材質之外殼具有金屬光澤,且不影響無線訊號的傳輸及接收,成為具有無 線傳輸及接收功能產品進行裝飾鍍膜的議題。In recent years, almost all 3C products have infrared (IR), Bluetooth, Wi-Fi, Wi-Max or Global Positioning System (GPS) due to the wide application of wireless communication. One of the functions, however, the transmission of high frequency electromagnetic waves of the above functions is susceptible to metal barrier. In general, materials with good electrical conductivity, such as films of metals such as copper, aluminum, and silver, are as thick as thousands. (10 - 10 meters), it will completely block the transmission and reception of electromagnetic waves. Therefore, how to make the plastic material shell have a metallic luster, and does not affect the transmission and reception of the wireless signal, and becomes a topic of decorative coating with a wireless transmission and reception function product.

圖1顯示習知產品殼件之局部示意圖。該習知產品殼件1包括一塑膠基板11、一裝飾鍍膜12及一透明染料層13。該裝飾鍍膜12係由銦或錫以蒸鍍製程在該塑膠基板11上沉積而成,其中該裝飾鍍膜12具有複數個不連續之島狀結構121,故不具導電特性,因此不干擾無線傳輸訊號強度,且可藉由該裝飾鍍膜12之該等島狀結構121之散射效果,以反射外界光線的光澤而產生流動金屬般的光影。Figure 1 shows a partial schematic view of a conventional product housing. The conventional product shell 1 comprises a plastic substrate 11, a decorative coating 12 and a transparent dye layer 13. The decorative coating 12 is deposited on the plastic substrate 11 by an indium or tin deposition process. The decorative coating 12 has a plurality of discontinuous island structures 121, so it has no conductive property and therefore does not interfere with wireless transmission signals. The intensity, and the scattering effect of the island structures 121 of the decorative coating 12, can reflect the gloss of the external light to produce a flowing metal-like light and shadow.

該透明染料層13係以噴塗方法形成,該透明染料層13覆蓋該裝飾鍍膜12及部分該塑膠基板11。該裝飾鍍膜12係為了使該產品殼件1具有金屬反射效果,以增加產品價值。但是,該裝飾鍍膜12有分佈不均勻、易變色、生產良率低、批次間色澤差異大、耐候性不佳、附著性差及不能應用於高生產效率之模內射出製程等缺點。The transparent dye layer 13 is formed by a spraying method, and the transparent dye layer 13 covers the decorative plating film 12 and a part of the plastic substrate 11. The decorative coating 12 is designed to increase the product value in order to impart a metallic reflection effect to the product shell member 1. However, the decorative coating 12 has disadvantages such as uneven distribution, easy discoloration, low production yield, large difference in color between batches, poor weather resistance, poor adhesion, and inability to be applied to an in-mold injection process with high production efficiency.

因此,有必要提供一創新且富有進步性之矽基金屬合金薄膜、具矽基金屬合金薄膜之外罩及電子裝置以及形成矽基金屬合金薄膜於一殼體表面之製造方法,以解決上述問題。Therefore, it is necessary to provide an innovative and progressive ruthenium-based metal alloy film, a ruthenium-based metal alloy film cover and an electronic device, and a method of forming a ruthenium-based metal alloy film on a surface of a casing to solve the above problems.

本發明提供一種矽基金屬合金薄膜,其中矽之含量為百分之62至百分之85重量百分比,其餘重量百分比為金屬,該金屬係選自鋁、鎳、鈦、鋅或其組合之群。The present invention provides a bismuth-based metal alloy film in which the content of cerium is 62 to 85 percent by weight, and the remaining weight percentage is metal, and the metal is selected from the group consisting of aluminum, nickel, titanium, zinc or a combination thereof. .

本發明另提供一種具矽基金屬合金薄膜之外罩,其包括:一殼體及一矽基金屬合金薄膜。該矽基金屬合金薄膜 設置於該殼體之一表面,其中矽之含量為百分之62至百分之85重量百分比,其餘重量百分比為金屬,該金屬係選自鋁、鎳、鈦、鋅或其組合之群。The invention further provides a bismuth-based metal alloy film outer cover comprising: a casing and a bismuth-based metal alloy film. The base metal alloy film It is disposed on a surface of the casing, wherein the content of cerium is 62 to 85 percent by weight, and the remaining weight percentage is metal, and the metal is selected from the group consisting of aluminum, nickel, titanium, zinc or a combination thereof.

本發明另提供一種具矽基金屬合金薄膜之電子裝置,其包括:一殼體及一矽基金屬合金薄膜。該矽基金屬合金薄膜設置於該殼體之一表面,其中矽之含量為百分之62至百分之85重量百分比,其餘重量百分比為金屬,該金屬係選自鋁、鎳、鈦、鋅或其組合之群。The invention further provides an electronic device with a ruthenium-based metal alloy film, comprising: a shell and a ruthenium-based metal alloy film. The bismuth-based metal alloy film is disposed on a surface of the casing, wherein the content of bismuth is 62 to 85 percent by weight, and the remaining weight percentage is metal, and the metal is selected from the group consisting of aluminum, nickel, titanium, and zinc. Or a group of combinations thereof.

本發明另提供一種形成矽基金屬合金薄膜於一殼體表面之製造方法,該製造方法包括以下步驟:(a)提供一矽基金屬合金靶材,其中該金屬係選自鋁、鎳、鈦、鋅或其組合之群;及(b)形成一矽基金屬合金薄膜於該殼體之表面,其中該矽基金屬合金薄膜中矽之含量為百分之62至百分之85重量百分比,其餘重量百分比為該金屬。The present invention further provides a method of forming a bismuth-based metal alloy film on a surface of a casing, the method comprising the steps of: (a) providing a bismuth-based metal alloy target, wherein the metal is selected from the group consisting of aluminum, nickel, and titanium. And a group of zinc or a combination thereof; and (b) forming a ruthenium-based metal alloy film on the surface of the casing, wherein the ruthenium-based metal alloy film has a cerium content of 62 to 85 percent by weight, The remaining weight percentage is the metal.

本發明之該矽基金屬合金薄膜係為非晶質連續結構,且該矽基金屬合金薄膜係為電性絕緣,故不會對任何電磁波訊號產生衰減,因此可保持電磁波訊號有效地、良好地傳輸及接收。並且,該矽基金屬合金薄膜具有非晶質連續結構,使得產品之殼體表面更為平滑,更增加反射外界光線的效果,以產生極佳之流動金屬般的光影,故可增加產品價值。The bismuth-based metal alloy film of the present invention is an amorphous continuous structure, and the bismuth-based metal alloy film is electrically insulated, so that it does not attenuate any electromagnetic wave signal, thereby keeping the electromagnetic wave signal effective and good. Transmission and reception. Moreover, the bismuth-based metal alloy film has an amorphous continuous structure, so that the surface of the shell of the product is smoother, and the effect of reflecting external light is increased, so as to produce an excellent flowing metal-like light and shadow, thereby increasing the product value.

另外,本發明係以濺鍍方法設置該矽基金屬合金薄膜於產品之殼體表面,因此該矽基金屬合金薄膜具有分佈均勻、不易變色、生產良率高、批次間色澤差異小、耐候性 佳、附著性強、半成品儲存時間長等之功效。In addition, the present invention provides the bismuth-based metal alloy film on the surface of the shell of the product by a sputtering method, so that the bismuth-based metal alloy film has uniform distribution, is not easy to change color, has high production yield, small difference in color between batches, and is resistant to weathering. Sex Good, strong adhesion, long storage time of semi-finished products, etc.

再者,本發明之該矽基金屬合金薄膜可直接應用於模內射出製程,而模內射出製程具有較高之生產效率,故可增加產量。此外,因該矽基金屬合金靶材可為晶質結構,亦即,該矽基金屬合金靶材可為電性導體,本發明可利用成本較低之直流濺鍍方法,以製作該矽基金屬合金薄膜,故可降低生產成本。Furthermore, the bismuth-based metal alloy film of the present invention can be directly applied to an in-mold injection process, and the in-mold injection process has a high production efficiency, thereby increasing the yield. In addition, since the bismuth-based metal alloy target may be a crystalline structure, that is, the bismuth-based metal alloy target may be an electrical conductor, the present invention can utilize a lower cost DC sputtering method to fabricate the ruthenium base. Metal alloy film can reduce production costs.

圖2A顯示本發明矽基金屬合金薄膜之示意圖。在本實施例中,該矽基金屬合金薄膜2係利用一矽基金屬合金靶材(圖未示出),以濺鍍方法製得。其中,根據不同應用,該濺鍍方法可選擇使用直流(DC)濺鍍、直流加脈衝(DC and pulse)濺鍍或射頻(RF)濺鍍。Fig. 2A shows a schematic view of a ruthenium-based metal alloy film of the present invention. In the present embodiment, the bismuth-based metal alloy film 2 is produced by a sputtering method using a bismuth-based metal alloy target (not shown). Among them, depending on the application, the sputtering method may use direct current (DC) sputtering, DC and pulse sputtering or radio frequency (RF) sputtering.

在本實施例中,該矽基金屬合金薄膜2之矽含量為百分之62至百分之85重量百分比,其餘重量百分比為金屬。其中,該金屬係選自鋁、鎳、鈦、鋅或其組合之群,較佳地,該矽基金屬合金係為矽鋁合金。該矽基金屬合金薄膜2之厚度較佳為200至600奈米,在本實施例中,該矽基金屬合金薄膜2之厚度為500奈米,該矽基金屬合金薄膜2之電阻值大於100M歐姆(Ω)。其中,該矽基金屬合金薄膜2具有極薄之厚度且為電性絕緣,且為均勻之非晶質連續結構。因此,該矽基金屬合金薄膜2不會對任何電磁波訊號產生衰減,故可保持電磁波訊號有效地、良好地傳輸及接收,亦即,該矽基金屬合金薄膜2可應用至低電磁波屏蔽 (Low Electro Magnetic Shielding,LEMS)之技術領域。In the present embodiment, the bismuth-based metal alloy film 2 has a cerium content of 62 to 85 percent by weight, and the remaining weight percentage is metal. Wherein, the metal is selected from the group consisting of aluminum, nickel, titanium, zinc or a combination thereof. Preferably, the bismuth based metal alloy is a bismuth aluminum alloy. The thickness of the bismuth-based metal alloy film 2 is preferably 200 to 600 nm. In the embodiment, the thickness of the bismuth-based metal alloy film 2 is 500 nm, and the resistance of the bismuth-based metal alloy film 2 is greater than 100 M. Ohm (Ω). Among them, the bismuth-based metal alloy thin film 2 has an extremely thin thickness and is electrically insulating, and is a uniform amorphous continuous structure. Therefore, the bismuth-based metal alloy film 2 does not attenuate any electromagnetic wave signals, so that the electromagnetic wave signals can be effectively and efficiently transmitted and received, that is, the bismuth-based metal alloy film 2 can be applied to low electromagnetic wave shielding. (Low Electro Magnetic Shielding, LEMS) technical field.

此外,以濺鍍方法製得之該矽基金屬合金薄膜2具有分佈均勻、外觀色澤更高、不易變色、在可見光範圍內反射率可達50%以上以及承受製程溫度最高可達580℃之功效。In addition, the bismuth-based metal alloy film 2 obtained by the sputtering method has a uniform distribution, a higher appearance color, is less prone to discoloration, a reflectance of more than 50% in the visible light range, and a process temperature up to 580 ° C. .

其中,本發明可另形成至少一圖樣201(例如:文字或圖形)於該矽基金屬合金薄膜2之一表面(如圖2B所示),並且,可再形成一彩色透光層(圖未示出),以覆蓋該矽基金屬合金薄膜2及該圖樣201。在其他應用中,亦可另包括一基礎薄膜202,該圖樣201設置於該矽基金屬合金薄膜2及該基礎薄膜202之間,如圖2C所示。較佳地,該基礎薄膜202係為高分子薄膜。Wherein, the present invention may further form at least one pattern 201 (for example, text or graphics) on one surface of the bismuth-based metal alloy film 2 (as shown in FIG. 2B), and may further form a color light-transmitting layer (not shown). Shown to cover the base metal alloy film 2 and the pattern 201. In other applications, a base film 202 may be further included, and the pattern 201 is disposed between the base metal alloy film 2 and the base film 202, as shown in FIG. 2C. Preferably, the base film 202 is a polymer film.

圖3顯示本發明形成矽基金屬合金薄膜於一殼體表面之第一實施例之製造方法流程圖,其中,該矽基金屬合金薄膜與上述圖2A之結構大致相同,故以下茲以圖2A之矽基金屬合金薄膜2之元件符號加以說明。配合參考圖2A及圖3,首先參考步驟S31,提供一矽基金屬合金靶材,其中該金屬係選自鋁、鎳、鈦、鋅或其組合之群,在本實施例中,該矽基金屬合金靶材係為晶質結構,且該矽基金屬合金係為矽鋁合金。參考步驟S32,形成一矽基金屬合金薄膜2於一殼體之表面。3 is a flow chart showing the manufacturing method of the first embodiment of the present invention for forming a bismuth-based metal alloy film on a surface of a casing, wherein the bismuth-based metal alloy film is substantially the same as the structure of FIG. 2A, so that FIG. 2A The component symbols of the base metal alloy film 2 are described. Referring to FIG. 2A and FIG. 3, first referring to step S31, a bismuth-based metal alloy target is provided, wherein the metal is selected from the group consisting of aluminum, nickel, titanium, zinc or a combination thereof. In this embodiment, the ruthenium group is used. The metal alloy target is a crystalline structure, and the bismuth based metal alloy is a bismuth aluminum alloy. Referring to step S32, a base metal alloy film 2 is formed on the surface of a casing.

在本實施例中,係利用濺鍍方法形成該矽基金屬合金薄膜2於該殼體之表面。該濺鍍方法可選擇使用直流濺鍍、直流加脈衝濺鍍或射頻機鍍。其中,直流濺鍍方法成本較 低,且該矽基金屬合金靶材係為晶質結構,故本發明實施例之該濺鍍方法較佳地係選擇使用直流濺鍍,以降低生產成本。In the present embodiment, the base metal alloy film 2 is formed on the surface of the casing by a sputtering method. The sputtering method can be selected from DC sputtering, DC plus pulse sputtering or RF plating. Among them, the DC sputtering method costs more The bismuth-based metal alloy target is a crystalline structure. Therefore, the sputtering method of the embodiment of the present invention preferably uses DC sputtering to reduce the production cost.

圖4顯示本發明形成矽基金屬合金薄膜於一殼體表面之第二實施例之製造方法流程圖,其中,該矽基金屬合金薄膜與上述圖2B之結構大致相同,故以下茲以圖2B之矽基金屬合金薄膜2之元件符號加以說明。配合參考圖2B及圖4,首先參考步驟S41,提供一矽基金屬合金靶材,其中該金屬係選自鋁、鎳、鈦、鋅或其組合之群,且該矽基金屬合金靶材係為晶質結構。4 is a flow chart showing a manufacturing method of a second embodiment of the present invention for forming a bismuth-based metal alloy film on a surface of a casing, wherein the bismuth-based metal alloy film is substantially the same as the structure of FIG. 2B, so that FIG. 2B The component symbols of the base metal alloy film 2 are described. Referring to FIG. 2B and FIG. 4, first referring to step S41, a bismuth-based metal alloy target is provided, wherein the metal is selected from the group consisting of aluminum, nickel, titanium, zinc or a combination thereof, and the bismuth-based metal alloy target system It is a crystalline structure.

參考步驟S42,形成該矽基金屬合金薄膜2於一殼體之表面。其中,該第二實施例之製造方法與上述該第一實施例之製造方法不同之處在於,在該第二實施例中,在步驟S42之後可另包括一步驟S43,形成至少一圖樣201於該矽基金屬合金薄膜2之表面,其中,該圖樣201可以噴塗方法形成於該矽基金屬合金薄膜2之表面。Referring to step S42, the base metal alloy film 2 is formed on the surface of a casing. The manufacturing method of the second embodiment is different from the manufacturing method of the first embodiment in that, in the second embodiment, after step S42, a step S43 may be further included to form at least one pattern 201. The surface of the base metal alloy film 2, wherein the pattern 201 is formed on the surface of the base metal alloy film 2 by a spraying method.

在本實施例中,在形成該圖樣201於該矽基金屬合金薄膜2之表面之後,可另包括一步驟S44,形成一彩色透光層,以覆蓋該矽基金屬合金薄膜2及該圖樣201。In this embodiment, after the pattern 201 is formed on the surface of the bismuth-based metal alloy film 2, a step S44 may be further included to form a color light-transmitting layer to cover the bismuth-based metal alloy film 2 and the pattern 201. .

圖5A顯示本發明形成矽基金屬合金薄膜於一殼體表面之第三實施例之製造方法流程圖,其中,該矽基金屬合金薄膜與上述圖2C之結構大致相同,故以下茲以圖2C之矽基金屬合金薄膜2之元件符號加以說明。配合參考圖2C及圖5,首先參考步驟S51,提供一矽基金屬合金靶材,其中該 金屬係選自鋁、鎳、鈦、鋅或其組合之群,且該矽基金屬合金靶材係為晶質結構。5A is a flow chart showing a manufacturing method of a third embodiment of the present invention for forming a bismuth-based metal alloy film on a surface of a casing, wherein the bismuth-based metal alloy film is substantially the same as the structure of FIG. 2C, so that FIG. 2C The component symbols of the base metal alloy film 2 are described. Referring to FIG. 2C and FIG. 5, first referring to step S51, a germanium-based metal alloy target is provided, wherein The metal is selected from the group consisting of aluminum, nickel, titanium, zinc, or a combination thereof, and the bismuth-based metal alloy target is a crystalline structure.

參考步驟S52,形成一矽基金屬合金薄膜於一殼體之表面,該矽基金屬合金薄膜2係為非晶質連續結構。其中,在該第三實施例中,步驟S52係包括以下步驟。Referring to step S52, a bismuth-based metal alloy film is formed on the surface of a casing, and the bismuth-based metal alloy film 2 is an amorphous continuous structure. Wherein, in the third embodiment, step S52 includes the following steps.

首先,參考步驟S521,提供一基礎薄膜202,較佳地,該基礎薄膜202係為塑膠薄膜。參考步驟S522,形成至少一圖樣201於該基礎薄膜202之一表面。參考步驟S523,濺鍍該矽基金屬合金薄膜2於該基礎薄膜202之該表面,且覆蓋該圖樣201及該基礎薄膜202,以形成一轉印基材。First, referring to step S521, a base film 202 is provided. Preferably, the base film 202 is a plastic film. Referring to step S522, at least one pattern 201 is formed on one surface of the base film 202. Referring to step S523, the base metal alloy film 2 is sputtered on the surface of the base film 202, and the pattern 201 and the base film 202 are covered to form a transfer substrate.

配合參考圖5B及步驟S524,設置該轉印基材於一成型模具203中,該成型模具之內部形狀係配合該殼體之形狀,該基礎薄膜202之另一表面接觸該成型模具203之內面。參考步驟S525,以射出成型方法設置製造該殼體之材料於該成型模具203中,使該殼體結合該矽基金屬合金薄膜2。Referring to FIG. 5B and step S524, the transfer substrate is disposed in a molding die 203. The internal shape of the molding die matches the shape of the casing, and the other surface of the base film 202 contacts the molding die 203. surface. Referring to step S525, the material for manufacturing the casing is set in the molding die 203 by an injection molding method, and the casing is bonded to the base metal alloy film 2.

配合參考圖5B及步驟S526,移除該成型模具203及該基礎薄膜202。其中,該殼體與該矽基金屬合金薄膜2間之結合力大於該基礎薄膜202與該矽基金屬合金薄膜2間之結合力,故射出成型該殼體後,可移除該成型模具203及該基礎薄膜202。較佳地,在步驟S526之後,可另包括一形成一彩色透光層之步驟S53,以覆蓋該矽基金屬合金薄膜2及該圖樣201。Referring to FIG. 5B and step S526, the molding die 203 and the base film 202 are removed. The bonding force between the casing and the base metal alloy film 2 is greater than the bonding force between the base film 202 and the base metal alloy film 2, so that the molding die 203 can be removed after injection molding the casing. And the base film 202. Preferably, after step S526, a step S53 of forming a color light transmitting layer may be further included to cover the germanium-based metal alloy film 2 and the pattern 201.

圖6顯示本發明具矽基金屬合金薄膜之外罩之剖面示意圖。該具矽基金屬合金薄膜之外罩3包括:一殼體4及一矽 基金屬合金薄膜2。其中,該矽基金屬合金薄膜2與上述圖2B之結構大致相同,故以下茲以圖2B之矽基金屬合金薄膜2之元件符號加以說明。配合參考圖2B及圖6,在本實施例中,該矽基金屬合金薄膜2設置於該殼體4之一表面。並且,至少一圖樣201設置於該矽基金屬合金薄膜2之表面,以及,一彩色透光層204更覆蓋該矽基金屬合金薄膜2及該圖樣201。Fig. 6 is a schematic cross-sectional view showing the outer cover of the bismuth-based metal alloy film of the present invention. The bismuth-based metal alloy film outer cover 3 comprises: a casing 4 and a raft Base metal alloy film 2. Here, the bismuth-based metal alloy thin film 2 is substantially the same as the above-described structure of FIG. 2B, and therefore, the element symbols of the bismuth-based metal alloy thin film 2 of FIG. 2B will be described below. Referring to FIG. 2B and FIG. 6, in the present embodiment, the base metal alloy film 2 is disposed on one surface of the casing 4. Further, at least one pattern 201 is disposed on the surface of the bismuth-based metal alloy film 2, and a color light-transmitting layer 204 further covers the bismuth-based metal alloy film 2 and the pattern 201.

圖7顯示本發明具矽基金屬合金薄膜之電子裝置之示意圖。配合參考圖6及圖7,該具矽基金屬合金薄膜之電子裝置5包括:一殼體4及一矽基金屬合金薄膜2。其中,該殼體4及該矽基金屬合金薄膜2與上述圖6之外罩3結構大致相同,故茲以圖6之外罩3之元件符號加以說明。在本實施例中,該殼體4係為非金屬基材,例如:塑膠材質。其中,該殼體4係可利用射出成型方法或模具成型方法製造。Fig. 7 is a view showing the electronic device of the present invention having a ruthenium-based metal alloy film. Referring to FIG. 6 and FIG. 7, the electronic device 5 having a bismuth-based metal alloy film includes a casing 4 and a bismuth-based metal alloy film 2. Here, the casing 4 and the base metal alloy film 2 are substantially the same as the outer cover 3 of Fig. 6, and therefore, the components of the outer cover 3 of Fig. 6 will be described. In this embodiment, the housing 4 is a non-metallic substrate, such as a plastic material. Among them, the casing 4 can be manufactured by an injection molding method or a mold forming method.

在不同領域中之應用中,該電子裝置5可為行動通訊裝置,例如:行動電話或個人數位助理(PDA);該電子裝置5可為影像顯示裝置,例如:陰極射線管顯示器、液晶顯示器或具有機發光二極體之平面顯示器;該電子裝置5可為計算裝置,例如:個人電腦或筆記型電腦;該電子裝置5可為影音多媒體電子裝置,該影音多媒體電子裝置可接收/播放影像及音訊至少其中之一,例如:卡帶式音訊播放裝置、組合式音響、MP3播放裝置或MP4播放裝置;或該電子裝置5可為電腦輸入裝置,例如:滑鼠或鍵盤。在本實施例中,該電子裝置5係為具有觸控式顯示幕之行動通訊 裝置。In an application in different fields, the electronic device 5 can be a mobile communication device, such as a mobile phone or a personal digital assistant (PDA); the electronic device 5 can be an image display device, such as a cathode ray tube display, a liquid crystal display, or A flat-panel display having a light-emitting diode; the electronic device 5 can be a computing device, such as a personal computer or a notebook computer; the electronic device 5 can be an audio-visual multimedia device that can receive/play images and At least one of the audio, such as a cassette type audio playback device, a combined audio system, an MP3 player or an MP4 player; or the electronic device 5 can be a computer input device such as a mouse or a keyboard. In this embodiment, the electronic device 5 is a mobile communication with a touch display screen. Device.

其中,特別是對於上述具有接收電磁波之電子裝置,由於,該矽基金屬合金薄膜2係為非晶質連續結構,且該矽基金屬合金薄膜2係為電性絕緣,故不會對任何電磁波訊號(例如:行動通訊裝置之高頻電磁波訊號)產生衰減,因此可保持電磁波訊號有效地、良好地傳輸及接收。Especially, in the above-mentioned electronic device having electromagnetic waves, since the bismuth-based metal alloy film 2 is an amorphous continuous structure, and the bismuth-based metal alloy film 2 is electrically insulated, no electromagnetic wave is applied thereto. The signal (for example, the high-frequency electromagnetic wave signal of the mobile communication device) is attenuated, so that the electromagnetic wave signal can be effectively and well transmitted and received.

要注意的是,該矽基金屬合金薄膜2可於形成該殼體4後,再設置於該殼體4之該表面(如本發明設置矽基金屬合金薄膜2於一殼體表面之第一實施例之製造方法);或者,該矽基金屬合金薄膜2亦可先於一基礎薄膜之一表面,以形成一轉印基材,接著設置該轉印基材於一成型模具中,使該基礎薄膜之另一表面接觸該成型模具之內面,再以射出成型方法將製造該殼體4之材料設置於該成型模具中,最後移除該成型模具及該基礎薄膜,以使該矽基金屬合金薄膜2覆蓋於該殼體4之表面(如本發明設置矽基金屬合金薄膜2於一殼體表面之第三實施例之製造方法)。It should be noted that the bismuth-based metal alloy film 2 can be disposed on the surface of the casing 4 after forming the casing 4 (as in the present invention, the bismuth-based metal alloy film 2 is disposed on the surface of a casing Or the base metal alloy film 2 may be preceded by a surface of one of the base films to form a transfer substrate, and then the transfer substrate is disposed in a molding die to The other surface of the base film contacts the inner surface of the molding die, and the material for manufacturing the casing 4 is placed in the molding die by an injection molding method, and finally the molding die and the base film are removed to make the base. The metal alloy film 2 covers the surface of the casing 4 (as in the third embodiment of the present invention in which the base metal alloy film 2 is provided on a surface of a casing).

較佳地,在該矽基金屬合金薄膜2設置於該殼體4表面之後,可依不同之產品需求形成一彩色透光層,以覆蓋該矽基金屬合金薄膜2;或先設置至少一圖樣於該矽基金屬合金薄膜2之表面,再形成一彩色透光層,以覆蓋該矽基金屬合金薄膜2及該圖樣。上述該彩色透光層及該圖樣之形成方法,已於本發明設置矽基金屬合金薄膜2於一殼體表面之第二實施例及第三實施例之製造方法中詳述,在此不再加以贅述。Preferably, after the bismuth-based metal alloy film 2 is disposed on the surface of the casing 4, a colored light-transmissive layer may be formed to cover the bismuth-based metal alloy film 2 according to different product requirements; or at least one pattern may be set first. On the surface of the base metal alloy film 2, a color light transmitting layer is formed to cover the base metal alloy film 2 and the pattern. The above-mentioned color light-transmitting layer and the method for forming the same are described in detail in the second embodiment and the manufacturing method of the third embodiment in which the bismuth-based metal alloy film 2 is provided on the surface of a casing of the present invention, and no longer Repeat them.

本實施例中,至少一圖樣201設置於該矽基金屬合金薄膜2之表面,並且,一彩色透光層204更覆蓋該矽基金屬合金薄膜2及該圖樣201。In this embodiment, at least one pattern 201 is disposed on the surface of the base metal alloy film 2, and a color light transmitting layer 204 further covers the base metal alloy film 2 and the pattern 201.

另外,關於材料之導電特性,因自由電子在材料中運動時,其速度受到材料的晶格缺陷、孔洞、差排、不純物,以及晶格原子振動的影響,故降低自由電子遷移速度,此即電阻產生的原因。因此根據電子在材料中的移動速度,即可計算材料的電阻或導電率。In addition, regarding the conductive properties of materials, when free electrons move in the material, their velocity is affected by lattice defects, holes, poor rows, impurities, and lattice atomic vibrations, thus reducing the free electron migration velocity. The cause of the resistance. Therefore, the electrical resistance or electrical conductivity of the material can be calculated based on the speed of movement of the electrons in the material.

Matthiessen及Nordheim規則係假設添加之合金元素為任意分布的不純物,使得週邊的晶格扭曲,並造成電子接近此區域時電位的改變,導致電子的散射。若合金原子非任意分布,而是分別佔據特定的晶格位置,合金結構可視為純的化合物(如晶質結構),電阻值將低於組成相同而原子任意排列的合金(如非晶質結構)。本發明實施例之該矽基金屬合金靶材為晶質結構,其具有較低之電阻值,故為電性導體。本發明實施例之該矽基金屬合金薄膜2為非晶質結構,其具有較高之電阻值,故為電性絕緣。因此,在上述本發明之該等實施例中,係使用晶質結構之矽基金屬合金靶材,因該矽基金屬合金靶材為電性導體,故可選擇使用成本較低直流濺鍍方法,以形成該矽基金屬合金薄膜。The Matthiessen and Nordheim rules assume that the added alloying elements are randomly distributed impurities, causing the surrounding lattice to distort and causing a change in potential when electrons approach this region, resulting in scattering of electrons. If the alloy atoms are not randomly distributed, but occupy a specific lattice position, respectively, the alloy structure can be regarded as a pure compound (such as a crystalline structure), and the resistance value will be lower than the alloy with the same composition and arbitrary arrangement of atoms (such as an amorphous structure). ). The bismuth-based metal alloy target of the embodiment of the invention is a crystalline structure, which has a low resistance value and is therefore an electrical conductor. The bismuth-based metal alloy film 2 of the embodiment of the present invention has an amorphous structure and has a high electrical resistance value, so it is electrically insulated. Therefore, in the above embodiments of the present invention, a bismuth-based metal alloy target having a crystalline structure is used, and since the bismuth-based metal alloy target is an electrical conductor, a lower cost DC sputtering method can be selected. To form the bismuth based metal alloy film.

圖8顯示習知裝飾鍍膜及本發明之矽基金屬合金薄膜於不同波長之光源下之反射率示意圖。其中,曲線L1顯示習知裝飾鍍膜於不同波長之光源下之反射率變化;曲線L2顯示本發明矽基金屬合金薄膜2於不同波長之光源下之反射 率變化。經由曲線L1及曲線L2之比較顯示,該習知裝飾鍍膜之反射率係為20%至40%,而本發明之該矽基金屬合金薄膜2於波長之光源下之反射率皆大於50%(反射率為50%至65%)。因此,本發明之該矽基金屬合金薄膜2確實具有極佳之光源反射效果,亦即具有較佳之金屬質感。Fig. 8 is a view showing the reflectance of a conventional decorative coating film and a bismuth-based metal alloy film of the present invention under light sources of different wavelengths. Wherein, the curve L1 shows the reflectance change of the conventional decorative coating under the light source of different wavelengths; the curve L2 shows the reflection of the germanium-based metal alloy film 2 of the present invention under the light source of different wavelengths. Rate changes. The comparison between the curve L1 and the curve L2 shows that the reflectance of the conventional decorative coating is 20% to 40%, and the reflectance of the bismuth-based metal alloy film 2 of the present invention is greater than 50% under the light source of the wavelength ( The reflectivity is 50% to 65%). Therefore, the bismuth-based metal alloy film 2 of the present invention does have an excellent light source reflection effect, that is, has a better metallic texture.

本發明之該矽基金屬合金薄膜係為非晶質連續結構,且該矽基金屬合金薄膜係為電性絕緣,故不會對任何電磁波訊號產生衰減,因此可保持電磁波訊號有效地、良好地傳輸及接收。並且,該矽基金屬合金薄膜具有非晶質連續結構,使得產品(例如:電子裝置)之殼體表面更為平滑,更增加反射外界光線的效果,以產生極佳之流動金屬般的光影,故可增加產品價值。The bismuth-based metal alloy film of the present invention is an amorphous continuous structure, and the bismuth-based metal alloy film is electrically insulated, so that it does not attenuate any electromagnetic wave signal, thereby keeping the electromagnetic wave signal effective and good. Transmission and reception. Moreover, the bismuth-based metal alloy film has an amorphous continuous structure, so that the surface of the shell of the product (for example, an electronic device) is smoother, and the effect of reflecting external light is further increased to produce an excellent flowing metal-like light and shadow. Therefore, the product value can be increased.

另外,本發明係以濺鍍方法設置該矽基金屬合金薄膜於產品之殼體表面,因此該矽基金屬合金薄膜具有分佈均勻、不易變色、生產良率高、批次間色澤差異小、耐候性佳、附著性強、半成品儲存時間長等之功效。In addition, the present invention provides the bismuth-based metal alloy film on the surface of the shell of the product by a sputtering method, so that the bismuth-based metal alloy film has uniform distribution, is not easy to change color, has high production yield, small difference in color between batches, and is resistant to weathering. Good effect, strong adhesion, long storage time of semi-finished products, etc.

再者,本發明之該矽基金屬合金薄膜可直接應用於模內射出製程,而模內射出製程具有較高之生產效率,故可增加產量。此外,因該矽基金屬合金靶材可為晶質結構,亦即,該矽基金屬合金靶材可為電性導體,本發明可利用成本較低之直流濺鍍方法,以製作該矽基金屬合金薄膜,故可降低生產成本。Furthermore, the bismuth-based metal alloy film of the present invention can be directly applied to an in-mold injection process, and the in-mold injection process has a high production efficiency, thereby increasing the yield. In addition, since the bismuth-based metal alloy target may be a crystalline structure, that is, the bismuth-based metal alloy target may be an electrical conductor, the present invention can utilize a lower cost DC sputtering method to fabricate the ruthenium base. Metal alloy film can reduce production costs.

上述實施例僅為說明本發明之原理及其功效,並非限制本發明。因此習於此技術之人士對上述實施例進行修改及 變化仍不脫本發明之精神。本發明之權利範圍應如後述之申請專利範圍所列。The above embodiments are merely illustrative of the principles and effects of the invention and are not intended to limit the invention. Therefore, those skilled in the art have modified the above embodiments and Changes remain without departing from the spirit of the invention. The scope of the invention should be as set forth in the appended claims.

1‧‧‧習知產品殼件1‧‧‧Study product shell

2‧‧‧本發明之矽基金屬合金薄膜2‧‧‧ 矽-based metal alloy film of the invention

3‧‧‧本發明具矽基金屬合金薄膜之外罩3‧‧‧The present invention has a base metal alloy film cover

4‧‧‧殼體4‧‧‧Shell

5‧‧‧本發明之具矽基金屬合金薄膜之電子裝置5‧‧‧Electronic device with bismuth-based metal alloy film of the present invention

11‧‧‧塑膠基板11‧‧‧Plastic substrate

12‧‧‧裝飾鍍膜12‧‧‧Decorative coating

13‧‧‧透明染料層13‧‧‧Transparent dye layer

121‧‧‧島狀結構121‧‧‧ island structure

201‧‧‧圖樣201‧‧‧ pattern

202‧‧‧基礎薄膜202‧‧‧Basic film

203‧‧‧成型模具203‧‧‧Molding mould

204‧‧‧彩色透光層204‧‧‧Color transparent layer

圖1顯示習知產品殼件之局部示意圖;圖2A至2C顯示本發明矽基金屬合金薄膜之三種態樣之示意圖;圖3顯示本發明形成矽基金屬合金薄膜於一殼體表面之第一實施例之製造方法流程圖;圖4顯示本發明形成矽基金屬合金薄膜於一殼體表面之第二實施例之製造方法流程圖;圖5A顯示本發明形成矽基金屬合金薄膜於一殼體表面之第三實施例之製造方法流程圖;圖5B顯示本發明設置一轉印基材於一成型模具中之示意圖;圖6顯示本發明具矽基金屬合金薄膜之外罩之剖面示意圖;圖7顯示本發明具矽基金屬合金薄膜之電子裝置之示意圖;及圖8顯示習知裝飾鍍膜及本發明之矽基金屬合金薄膜於不同波長之光源下之反射率示意圖。1 is a partial schematic view showing a conventional product shell member; FIGS. 2A to 2C are views showing three aspects of the bismuth-based metal alloy film of the present invention; and FIG. 3 is a view showing the first step of forming a bismuth-based metal alloy film on a surface of a casing of the present invention. FIG. 4 is a flow chart showing a manufacturing method of a second embodiment of the present invention for forming a bismuth-based metal alloy film on a surface of a casing; FIG. 5A is a view showing a method for forming a bismuth-based metal alloy film in a casing according to the present invention; FIG. 5B is a schematic view showing the arrangement of a transfer substrate in a molding die according to the present invention; FIG. 6 is a schematic cross-sectional view showing the outer cover of the bismuth-based metal alloy film according to the present invention; A schematic view showing an electronic device having a ruthenium-based metal alloy thin film of the present invention; and FIG. 8 is a view showing a reflectance of a conventional decorative plating film and a bismuth-based metal alloy film of the present invention under light sources of different wavelengths.

2‧‧‧本發明之矽基金屬合金薄膜2‧‧‧ 矽-based metal alloy film of the invention

3‧‧‧本發明具矽基金屬合金薄膜之外罩3‧‧‧The present invention has a base metal alloy film cover

4‧‧‧殼體4‧‧‧Shell

201‧‧‧圖樣201‧‧‧ pattern

204‧‧‧彩色透光層204‧‧‧Color transparent layer

Claims (18)

一種矽基金屬合金薄膜,其中矽之含量為百分之62至百分之85重量百分比,其餘重量百分比為金屬,該金屬係選自鋁、鎳、鈦、鋅或其組合之群,該矽基金屬合金薄膜包括至少一圖樣及一基礎薄膜,該圖樣設置於該矽基金屬合金薄膜之一表面,且該圖樣設置於該矽基金屬合金薄膜及該基礎薄膜之間。 A bismuth-based metal alloy film in which the content of cerium is 62 to 85 percent by weight, and the remaining weight percentage is metal, and the metal is selected from the group consisting of aluminum, nickel, titanium, zinc or a combination thereof. The base metal alloy film includes at least one pattern and a base film disposed on a surface of the base metal alloy film, and the pattern is disposed between the base metal alloy film and the base film. 如請求項1之矽基金屬合金薄膜,其中該矽基金屬合金薄膜之厚度為200至600奈米。 The bismuth based metal alloy film of claim 1, wherein the bismuth based metal alloy film has a thickness of 200 to 600 nm. 如請求項1之矽基金屬合金薄膜,其中該矽基金屬合金薄膜之電阻值大於100M歐姆。 The bismuth based metal alloy film of claim 1, wherein the bismuth based metal alloy film has a resistance value greater than 100 M ohms. 如請求項1之矽基金屬合金薄膜,其中該矽基金屬合金係為矽鋁合金。 The bismuth based metal alloy film of claim 1, wherein the bismuth based metal alloy is a bismuth aluminum alloy. 如請求項1之矽基金屬合金薄膜,其中該矽基金屬合金薄膜係為電性絕緣。 The bismuth based metal alloy film of claim 1, wherein the bismuth based metal alloy film is electrically insulating. 如請求項1之矽基金屬合金薄膜,其中該矽基金屬合金薄膜係為非晶質連續結構。 The bismuth-based metal alloy film of claim 1, wherein the bismuth-based metal alloy film is an amorphous continuous structure. 如請求項1之矽基金屬合金薄膜,其中該基礎薄膜係為高分子薄膜。 The bismuth-based metal alloy film according to claim 1, wherein the base film is a polymer film. 一種具矽基金屬合金薄膜之外罩,包括:一殼體;一矽基金屬合金薄膜,設置於該殼體之一表面,其中矽之含量為百分之62至百分之85重量百分比,其餘重量百分比為金屬,該金屬係選自鋁、鎳、鈦、鋅或 其組合之群;至少一圖樣,設置於該矽基金屬合金薄膜之一表面;及一彩色透光層,覆蓋該圖樣及該矽基金屬合金薄膜。 A ruthenium-based metal alloy film outer cover comprising: a casing; a ruthenium-based metal alloy film disposed on a surface of the casing, wherein the content of niobium is 62 to 85 percent by weight, and the rest The weight percentage is metal, and the metal is selected from aluminum, nickel, titanium, zinc or a group of combinations; at least one pattern disposed on a surface of the base metal alloy film; and a colored light transmitting layer covering the pattern and the base metal alloy film. 如請求項8之外罩,其中該矽基金屬合金係為矽鋁合金。 The outer cover of claim 8 wherein the base metal alloy is a tantalum aluminum alloy. 如請求項8之外罩,其中該矽基金屬合金薄膜係為電性絕緣。 The outer cover of claim 8, wherein the base metal alloy film is electrically insulated. 如請求項8之外罩,其中該矽基金屬合金薄膜係為非晶質連續結構。 The outer cover of claim 8, wherein the bismuth-based metal alloy film is an amorphous continuous structure. 一種形成矽基金屬合金薄膜於一殼體表面之製造方法,包括:(a)提供一矽基金屬合金靶材,其中該金屬係選自鋁、鎳、鈦、鋅或其組合之群;及(b)形成一矽基金屬合金薄膜於該殼體之表面,其中該矽基金屬合金薄膜中矽之含量為百分之62至百分之85重量百分比,其餘重量百分比為該金屬;其中在步驟(b)中另包括形成至少一圖樣於該矽基金屬合金薄膜之表面,且在形成該圖樣步驟之後,另包括形成一彩色透光層,以覆蓋該矽基金屬合金薄膜及該圖樣。 A method of forming a bismuth-based metal alloy film on a surface of a casing, comprising: (a) providing a bismuth-based metal alloy target, wherein the metal is selected from the group consisting of aluminum, nickel, titanium, zinc, or a combination thereof; (b) forming a bismuth-based metal alloy film on the surface of the casing, wherein the bismuth-based metal alloy film has a cerium content of 62 to 85 percent by weight, and the remaining weight percentage is the metal; The step (b) further includes forming at least one pattern on the surface of the bismuth-based metal alloy film, and after forming the pattern, further comprising forming a color light-transmitting layer to cover the bismuth-based metal alloy film and the pattern. 如請求項12之製造方法,其中在步驟(a)中所使用之該矽基金屬合金靶材係為晶質結構。 The manufacturing method of claim 12, wherein the bismuth-based metal alloy target used in the step (a) is a crystalline structure. 如請求項12之製造方法,其中在步驟(b)中係利用濺鍍方 法形成該矽基金屬合金薄膜於該殼體之表面。 The manufacturing method of claim 12, wherein in the step (b), the sputtering method is utilized The method forms the bismuth based metal alloy film on the surface of the casing. 如請求項12之製造方法,其中步驟(b)包括以下步驟:(b1)提供一基礎薄膜;(b2)濺鍍該矽基金屬合金薄膜於該基礎薄膜之該表面,以形成一轉印基材;(b3)設置該轉印基材於一成型模具中,該成型模具之內部形狀係配合該殼體之形狀,該基礎薄膜之另一表面接觸該成型模具之內面;(b4)以射出成型方法設置製造該殼體之材料於該成型模具中,使該殼體結合該矽基金屬合金薄膜:及(b5)移除該成型模具及該基礎薄膜。 The method of claim 12, wherein the step (b) comprises the steps of: (b1) providing a base film; and (b2) sputtering the base metal alloy film on the surface of the base film to form a transfer base. (b3) disposing the transfer substrate in a molding die, the internal shape of the molding die is matched with the shape of the casing, and the other surface of the base film contacts the inner surface of the molding die; (b4) The injection molding method provides a material for manufacturing the casing in the molding die, bonding the casing to the base metal alloy film: and (b5) removing the molding die and the base film. 如請求項15之製造方法,其中在步驟(b1)之後另包括一步驟,形成至少一圖樣於該基礎薄膜之一表面。 The method of claim 15, wherein the step (b1) further comprises a step of forming at least one pattern on a surface of the base film. 如請求項16之製造方法,其中在步驟(b5)之後,另包括一步驟,形成一彩色透光層,以覆蓋該矽基金屬合金薄膜及該圖樣。 The method of claim 16, wherein after the step (b5), further comprising a step of forming a color light transmissive layer to cover the bismuth based metal alloy film and the pattern. 如請求項12之製造方法,其中在步驟(b)之濺鍍方法為直流(DC)濺鍍、直流加脈衝(DC and pulse)濺鍍或射頻(RF)濺鍍。 The manufacturing method of claim 12, wherein the sputtering method in the step (b) is direct current (DC) sputtering, direct current (DC and pulse) sputtering, or radio frequency (RF) sputtering.
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