TWI385129B - Isopipes having improved dimensional stability - Google Patents

Isopipes having improved dimensional stability Download PDF

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TWI385129B
TWI385129B TW098129189A TW98129189A TWI385129B TW I385129 B TWI385129 B TW I385129B TW 098129189 A TW098129189 A TW 098129189A TW 98129189 A TW98129189 A TW 98129189A TW I385129 B TWI385129 B TW I385129B
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aperture
weir
structural member
overflow
tube
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TW098129189A
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TW201024235A (en
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Andrea Weiss Bookbinder
Dana Craig Bookbinder
Paul Maynard Schermerhorn
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Corning Inc
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06Forming glass sheets
    • C03B17/064Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06Forming glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips

Description

具有改良尺寸穩定性之等管Tube with improved dimensional stability

本發明係關於利用融合處理過程製造玻璃片之等管,特別是在使用過程中控制等管呈現出尺寸變化。The present invention relates to the use of a fusion process to produce tubes of glass sheets, particularly in the course of use, to control the tube to exhibit dimensional changes.

為了參考的方便,目前發明的描述"等管"在傳統上是用來描述在融合處理過程中所使用的成形裝置。要了解的是使用這個專有名詞並不意指且不應該解釋成本發明只局限在由等壓壓製所製造的成形裝置。For convenience of reference, the description of the present invention "isometric" is conventionally used to describe a forming apparatus used in a fusion process. It is to be understood that the use of this proper noun does not mean and should not be construed that the invention is limited only to forming devices made by isostatic pressing.

而是,如申請專利範圍中所陳述的(也參看總結),本發明可以應用到融合處理過程中的所有成形裝置類型,不管此成形裝置的製造材料是什麼,及/或那些材料的處理方式如何。Rather, as set forth in the scope of the claims (see also summary), the invention can be applied to all types of forming devices in a fusion process, regardless of the materials of manufacture of the forming device, and/or the manner in which those materials are processed. how is it.

同時為了描述的方便,等管(成形裝置)被視為包含:1)由裝置的第一和第二溢流堰(堰)構成的第一部分,以及2)由裝置的楔狀物部分構成的第二部分。第二部分也含有第一外表面是第一溢流堰之外表面的接續部分,和第二外表面是第二溢流堰之外表面的接續部分。因為此專有名詞只是為了方便描述,因此第一和第二部分之間真正的過渡位置並不重要,可以視為在溢流堰底部下方,和裝置之楔狀物部分底部上方的任何位置。Also for convenience of description, the equal tube (forming device) is considered to comprise: 1) a first portion consisting of the first and second weirs (堰) of the device, and 2) consisting of a wedge portion of the device. the second part. The second portion also includes a contiguous portion of the first outer surface that is the outer surface of the first weir, and the second outer surface is a contiguous portion of the outer surface of the second weir. Since this proper noun is for convenience of description only, the true transitional position between the first and second portions is not critical and can be considered to be below the bottom of the weir and any position above the bottom of the wedge portion of the device.

平板顯示器例如液晶顯示器(LCD)的製造商使用玻璃基板同時製造多個顯示器,例如一次製造六個或更多的顯示器。基板的寬度限制了在單一基板上可以製造的顯示器數目,因此較寬的基板可以增加經濟規模。同時,顯示器製造商需要更寬的基板來滿足對較大尺寸顯示器逐漸成長的需求。Manufacturers of flat panel displays, such as liquid crystal displays (LCDs), use glass substrates to simultaneously manufacture multiple displays, such as six or more displays at a time. The breadth of the substrate limits the number of displays that can be fabricated on a single substrate, so a wider substrate can increase the economic scale. At the same time, display manufacturers need wider substrates to meet the growing demand for larger displays.

此外,這些製造商也在尋找可以配合在較高溫度下處理之多晶矽裝置一起使用的玻璃基板。特別地,他們需要在顯示器製造期間不會經歷壓縮的高應變點玻璃組成份。這些玻璃通常需要較高的成形溫度,因此需要可以忍受這些較高溫度的玻璃成形處理。In addition, these manufacturers are also looking for glass substrates that can be used with polycrystalline germanium devices that are processed at higher temperatures. In particular, they need a high strain point glass composition that does not undergo compression during display manufacture. These glasses typically require higher forming temperatures and therefore require glass forming processes that can withstand these higher temperatures.

融合處理過程是產生薄片玻璃之玻璃製造業所使用的基本技術之一。跟其他業界已知的處理例如浮式和細縫抽拉處理作比較,由融合處理過程所製造的玻璃薄片具有優越平坦性和平滑性的表面。因此,在製造液晶顯示器所使用的玻璃基板時,融合處理過程變得特別重要。The fusion process is one of the basic techniques used in the glass manufacturing of sheet glass. The glass flakes produced by the fusing process have superior flatness and smoothness compared to other processes known in the art such as floating and slit drawing processes. Therefore, the fusion processing becomes particularly important in the manufacture of a glass substrate used in a liquid crystal display.

融合處理過程特別是溢流抽拉融合處理過程是Stuart M. Dockerty在共同申請人之美國專利編號3,338,696和3,682,609中的主題。這些專利方法的簡圖顯示在圖1中。如圖所示,此系統包含供給管9,將熔融玻璃提供給等管13中的收集槽11。The fusion process, and in particular the overflow extraction process, is the subject of U.S. Patent Nos. 3,338,696 and 3,682,609, the entire disclosure of which is incorporated by reference. A simplified diagram of these patented methods is shown in Figure 1. As shown, the system includes a supply tube 9 for supplying molten glass to the collection tank 11 in the equal tube 13.

一旦達到了穩定的作業狀態,熔融玻璃會從供給管傳到此槽,然後溢流過槽的頂端兩側,如此形成兩個向下流動的玻璃帶狀物,然後沿著等管的外表面向內。這兩個帶狀物在等管底部或根部15相遇,熔融在一起形成單一帶狀物。然後將此帶狀物餵到抽拉儀器(簡單地由箭頭17來表示),透過將帶狀物拉離根部的速率來控制帶狀物的厚度,也就是最終的薄片厚度。拉製儀器正好位於根部的下游,使單一帶狀物在接觸儀器之前就已經冷卻而變得堅硬。Once a stable working condition is reached, the molten glass will pass from the supply pipe to the tank and then overflow over the top ends of the trough so that two downwardly flowing glass ribbons are formed and then along the outer surface of the equal tubes Inside. The two ribbons meet at the bottom of the tube or at the root 15 and fuse together to form a single ribbon. This strip is then fed to a drawing instrument (simply indicated by arrow 17) which controls the thickness of the strip, i.e., the final sheet thickness, by the rate at which the strip is pulled away from the root. The drawing instrument is located just downstream of the root so that the single ribbon is cooled and hardened before it contacts the instrument.

如圖1所示,在處理的任何部分期間,最終玻璃帶狀物的外表面都沒有接觸等管外表面的任何部分。而是,這些表面只看到周圍的大氣。形成最終帶狀物之兩半帶狀物的內表面的確會接觸等管,但是這些內表面在等管根部熔融在一起,因此埋在最終帶狀物的本體中。以這種方式,從此帶狀物切割出來的最終玻璃薄片可以達到優越的外表面特性。As shown in Figure 1, the outer surface of the final glass ribbon does not contact any portion of the outer surface of the tube during any portion of the process. Instead, these surfaces only see the surrounding atmosphere. The inner surfaces of the two halves of the ribbon forming the final ribbon do contact the tubes, but these inner surfaces are fused together at the roots of the tubes and are thus buried in the body of the final ribbon. In this way, the final glass sheet cut from the ribbon can achieve superior outer surface characteristics.

從前面的敘述可以清楚知道,等管13對於融合處理過程的成功與否是相當重要的。特別的,等管的尺寸穩定度相當重要,因為等管幾何的改變會影響處理的整體成功與否。很明顯的,等管的使用條件讓它很容易遭受尺寸的改變。等管通常在1000℃和更高的高溫下運作。此外,等管在這些高溫下運作,同時還要支撐它自己本身的重量,以及溢流過它的側邊和在槽11中之熔融玻璃的重量,以及當熔融玻璃被拉製時,從熔融玻璃傳回到等管的至少一些張力。決定於欲生產之玻璃薄片的寬度,等管的未支撐長度可能有2.0公尺或更多。As is clear from the foregoing description, the equal pipe 13 is quite important for the success of the fusion process. In particular, the dimensional stability of the equal tubes is important because changes in the isopipe geometry can affect the overall success of the process. Obviously, the conditions of use of the tube make it very susceptible to dimensional changes. The tubes are usually operated at a high temperature of 1000 ° C and higher. In addition, the tube operates at these elevated temperatures while supporting its own weight, as well as the weight of the molten glass that overflows over its sides and in the tank 11, and from the melting when the molten glass is drawn. The glass is passed back to at least some of the tension of the tube. Depending on the width of the glass sheet to be produced, the unsupported length of the tube may be 2.0 meters or more.

為了忍受這些嚴苛的條件,使用等壓壓製的耐火材料磚來製造等管13,因此命名為"等管"。特別地,使用等壓壓製的鋯耐火材來形成融合處理過程的等管。In order to endure these harsh conditions, isopipeded refractory bricks were used to make the equal tubes 13, hence the name "isopipes". In particular, isostatically pressed zirconium refractories are used to form the tubes of the fusion process.

即使使用這麼高效能的材料,在實用上等管還是會顯現尺寸的改變,因此限制了它們的使用壽命。例如,等管會顯現下垂,使得此管的無支撐長度中央,掉到低於它的外部支撐端。這些尺寸的改變會沿著等管的根部,以及沿著等管頂端的溢流堰發生。Even with such high-performance materials, dimensional changes can be seen in practical applications, thus limiting their useful life. For example, the tube will appear to sag so that the unsupported length of the tube is centered and falls below its outer support end. These dimensional changes occur along the root of the equal tube and the weir along the top of the equal tube.

從前面的敘述可以看出,我們仍然需要裝置和方法可以有效且經濟地使用融合處理過程來製造具有較大寬度,及/或由較高應變點之玻璃組成份的玻璃薄片。特別地,我們需要改進等壓管的尺寸穩定度,如此來延長它們的使用壽命,並減少處理的停機時間和等管的置換成本。As can be seen from the foregoing description, we still need apparatus and methods to efficiently and economically use a fusion process to produce glass flakes having a greater width and/or a glass composition of higher strain points. In particular, we need to improve the dimensional stability of the isopipes to extend their service life and reduce the downtime of processing and the cost of replacement of the tubes.

根據第一項,本發明提供裝置(例如等管13),透過融合處理過程形成玻璃帶狀物(19),其包含:第一部分(21),含有槽(11)及第一和第二溢流堰(1,2),每個溢流堰有內表面(25),頂表面(27),和外表面(29);及第二部分(23),含有第一外表面(31),是第一溢流堰(1)之外表面(29)的接續部分,和第二外表面(32),是第二溢流口(2)之外表面(29)的接續部分,此第一和第二外表面(31,32)相對於彼此定位,使第二部分(23)的至少一部分(33)具有楔狀物斷面;其中每個溢流堰(1,2)都包含一個孔徑(35),此孔徑:According to a first aspect, the present invention provides a device (e.g., isopipe 13) that forms a glass ribbon (19) through a fusion process comprising: a first portion (21) containing a trough (11) and first and second overflows Flowing weirs (1, 2), each overflow weir having an inner surface (25), a top surface (27), and an outer surface (29); and a second portion (23) containing a first outer surface (31), Is the continuation of the outer surface (29) of the first weir (1), and the second outer surface (32) is the continuation of the outer surface (29) of the second overflow (2), this first And the second outer surface (31, 32) are positioned relative to each other such that at least a portion (33) of the second portion (23) has a wedge cross section; wherein each overflow weir (1, 2) comprises an aperture (35), this aperture:

(i)沿著至少一部分的溢流堰長度延伸,以及(i) extending along at least a portion of the overflow weir length, and

(ii)至少有一部分的孔徑(35)位於溢流堰的內和外表面(25,29)之間。(ii) At least a portion of the aperture (35) is located between the inner and outer surfaces (25, 29) of the weir.

根據第二項,本發明提供使用融合處理過程來製造玻璃帶狀物(19)的方法,其包括:According to a second aspect, the invention provides a method of manufacturing a glass ribbon (19) using a fusion process comprising:

(A)提供熔融玻璃到成形裝置(例如等管13),此成形裝置包含第一和第二溢流堰(1,2),每個溢流堰都含有:(A) providing molten glass to a forming device (e.g., tube 13), the forming device comprising first and second weirs (1, 2), each containing:

(i)內表面(25),(i) inner surface (25),

(ii)頂表面(27),(ii) the top surface (27),

(iii)外表面(29),以及(iii) the outer surface (29), and

(iv)孔徑(35),此孔徑:(iv) Aperture (35), this aperture:

(a)沿著至少一部分的溢流堰長度延伸,以及(a) extending along at least a portion of the length of the weir, and

(b)至少有一部分位於溢流堰的內表面和外表面(25,29)之間;以及(b) at least a portion is located between the inner and outer surfaces (25, 29) of the weir;

(B)讓流體(例如氣體或氣體混合物或液體或液體混合物)通過這些孔徑(35)將溢流堰(1,2)冷卻。(B) Allowing a fluid (such as a gas or gas mixture or a liquid or liquid mixture) to cool the weir (1, 2) through these apertures (35).

在特定實施例中,溢流堰(1,2)中的孔徑(35)可以包含完全或部分填充此孔徑的結構構件(41,42)。結構構件可以是實心或空心。在其他實施例中,成形裝置的本體也可以包含一個或多個孔徑(43),這些孔徑中可以包含結構元件(45)。In a particular embodiment, the aperture (35) in the weir (1, 2) may comprise structural members (41, 42) that fully or partially fill the aperture. The structural member can be solid or hollow. In other embodiments, the body of the forming device may also include one or more apertures (43), which may include structural elements (45).

上面關於本發明各方面的總結中所使用的參考數字,只是為了讀者的方便,並非用來且不應該解釋成限制本發明的範圍。更普遍地說,要瞭解的是前面的一般描述和底下的詳細描述都只是本發明的例子是用來提供概要和架構以瞭解本發明的本質和特性。The above reference numerals used in the summary of the various aspects of the invention are merely for the convenience of the reader and are not intended to be construed as limiting the scope of the invention. More generally, it is to be understood that the foregoing general description and the detailed description

如上面所討論的,製造LCD基板的較好方法是使用熔融法,在其中將熔融玻璃傳到稱為等管的大陶瓷結構中,形成帶狀物。隨著時間的過去,LCD基板的尺寸增加了,目前的尺寸(Gen 10,後G10世代)大約是2850公釐x3050公釐。每一次尺寸(寬度)的增加都意指著等管長度需隨之增加。As discussed above, a preferred method of making an LCD substrate is to use a fusion process in which molten glass is passed into a large ceramic structure called an equal tube to form a ribbon. Over time, the size of the LCD substrate has increased, and the current size (Gen 10, post G10 generation) is approximately 2850 mm x 3050 mm. Each increase in size (width) means that the length of the equal pipe needs to increase.

這種轉移到較大等管的趨勢,對於讓等管擁有多年使用壽命是相當大的挑戰。對於目前的玻璃組成份,等管的溢流堰通常在大約1220℃或更高的溫度下運作,而根部在1180℃和1140℃之間運作。這種高溫條件會使等管的耐火材料例如鋯石遭受潛變。Gen的尺寸越大,連帶的等管會越大,會產生更多潛變。This shift to larger equals is a considerable challenge for having equal life spans. For current glass compositions, the weir of the equal tube typically operates at a temperature of about 1220 ° C or higher, while the root operates between 1180 ° C and 1140 ° C. Such high temperature conditions can cause potential refractory materials such as zircon to undergo creep. The larger the size of Gen, the larger the associated tubes will be, resulting in more creep.

應力分析顯示,第一近似值,等管的絕對撓曲(D)決定於等管之製造材料的內在潛變速率()(單位1/小時),以及等管的已使用時間和等管的長度(L)和高度(H),其中(k)是常數:Stress analysis shows that the first approximation, the absolute deflection of the tube (D) is determined by the inherent creep rate of the material of the tube ( ) (units / hour), and the used time of the equal pipe and the length (L) and height (H) of the equal pipe, where (k) is a constant: .

從此方程式可以看出將等管的長度加倍會比相同材料,高度,和已使用時間的等管增加16倍的撓曲。It can be seen from this equation that doubling the length of the equal pipe will increase the deflection by 16 times compared to the same material, height, and used time.

這種撓曲的增加,可以潛在地藉由增加等管的高度來解決。然而,等管的高度已經接近目前工業界可用之等壓壓製儀器的基本限制。另一個選擇是增進施加到等管側邊的壓縮力以對抗潛變(參看共同讓受的美國專利公告編號2003/0192349),但是這種方式會對等管的設計產生相當大的限制,可能使玻璃的流量低於預定目標。降低整體的運作溫度是另一種可能性,但是必須發展出可以在較低溫度下處理的新玻璃組成份。最後,用來製造等管之陶瓷材料的潛變速率可以透過發展改善的材料來降低(參看共同申請人的PCT(專利合作條約)專利出版編號WO2002/044102)。然而,即使是這種情況,未來的基板尺寸和等管的設計也可能繼續將陶瓷材料推入無法達到夠長可用年期的境地。This increase in deflection can potentially be solved by increasing the height of the tubes. However, the height of the equal pipe is close to the basic limitations of the isostatic pressing instruments currently available in the industry. Another option is to increase the compressive force applied to the sides of the tube to counter the creep (see U.S. Patent Publication No. 2003/0192349), but this approach imposes considerable limitations on the design of the tube, possibly The flow rate of the glass is made lower than the predetermined target. Reducing the overall operating temperature is another possibility, but new glass components that can be processed at lower temperatures must be developed. Finally, the rate of creep of the ceramic material used to make the tube can be reduced by developing improved materials (see co-applicant's PCT (Patent Cooperation Treaty) patent publication number WO2002/044102). However, even in this case, future substrate sizes and equal tube designs may continue to push ceramic materials into situations where they cannot reach a long enough usable life.

如上面所提的,在運作期間,等管的最熱部分通常是溢流堰。例如,如上面提及之WO 2002/044102所描述的,鋯耐火材(以及其他高溫耐火材)的潛變速率會隨著溫度而增加。因此,跟等管的本體比較起來,溢流堰會顯現最高的潛變速率。As mentioned above, during operation, the hottest portion of the tube is typically a weir. For example, as described in WO 2002/044102, the rate of creep of zirconium refractories (and other high temperature refractories) increases with temperature. Therefore, compared with the body of the equal pipe, the weir will show the highest rate of creep.

此外,在使用期間溢流堰會受到重力所產生的向下力,以及包含在等管槽中的熔融玻璃所產生的向外力(膨脹力)。此外,不只有這兩種力,溢流堰的厚度還比等管本體小很多,因此使得溢流堰在長時間使用下,特別容易受到尺寸的不穩定性。In addition, the weir will be subjected to the downward force generated by gravity during use and the outward force (expansion force) generated by the molten glass contained in the equal tube groove. In addition, not only these two forces, the thickness of the weir is much smaller than that of the equal tube body, so that the overflow weir is particularly susceptible to dimensional instability under prolonged use.

對抗這種易受尺寸改變影響的一種可能方式是使用較厚的溢流堰。然而,這種方式對於等管的設計會產生相當大的限制,可能使玻璃的流量低於預定目標。One possible way to combat this vulnerability to dimensional changes is to use thicker weirs. However, this approach creates considerable limitations on the design of the equal pipe, which may cause the flow of the glass to be below a predetermined target.

有很多計劃透過在等管本體中使用支撐棒和洞以降低等管的下垂。參閱美國第3437470號專利,日本第11-246230號公告專利,日本第2006-298736號公告專利,日本第2006-321708號公告專利,以及日本第2007-197303號公告專利。很明顯地,這些參考文獻中沒有一個認知到由於:1)溢流堰通常曝露到較高的運作溫度,2)溢流堰會受到垂直和水平變形力的事實,以及3)跟等管其他部分作比較,溢流堰相當薄;因此使得溢流堰更容易受到尺寸的改變。同樣的,這些參考文獻中沒有一個提出對這個問題的解決方式。There are many plans to reduce the sagging of the tubes by using support rods and holes in the body of the tube. Japanese Patent No. 3, 437, 470, Japanese Patent No. 11-246,230, Japanese Patent No. 2006-298736, Japanese Patent No. 2006-321708, and Japanese Patent Publication No. 2007-197303. Obviously, none of these references are recognized by: 1) the fact that the weir is usually exposed to higher operating temperatures, 2) the fact that the weir is subject to vertical and horizontal deformation forces, and 3) the other In part, the weir is quite thin; therefore, the weir is more susceptible to dimensional changes. Similarly, none of these references propose a solution to this problem.

本發明透過在每個溢流堰中包含至少一個孔徑以特別處理溢流堰的不穩定問題。最初的好處是,此孔徑會降低溢流堰的重量,因此可以降低在溢流堰上所引起的下垂-產生負載。The present invention specifically addresses the instability of the weir by providing at least one aperture in each weir. The initial benefit is that this aperture reduces the weight of the weir, thus reducing the sagging-induced load on the weir.

此外,在某些實施例中,此孔徑用來降低構成溢流堰之陶瓷材料的內部溫度。例如,可以將溫度控制在低於溢流堰標稱溫度的流體以控制的流速通過此孔徑。如底下顯示的,即使構成溢流堰之材料的溫度只有相當小的改變,也會對材料的潛變速率有顯著的影響。Moreover, in some embodiments, this aperture is used to reduce the internal temperature of the ceramic material that constitutes the weir. For example, a fluid having a temperature below the nominal temperature of the weir enthalpy can be passed through the aperture at a controlled flow rate. As shown below, even a relatively small change in the temperature of the material that constitutes the weir will have a significant effect on the creep rate of the material.

此流體可以是惰性氣體,例如氮,非惰性氣體,例如空氣,只要在使用鉬時不會曝露到非惰性氣體,或液體,例如水。如果想要的話,也可以使用氣體或液體混合物。對某些應用來說,液體可能比氣體更有效,因為它有較高的熱容量。The fluid may be an inert gas such as nitrogen, a non-inert gas such as air, as long as it is not exposed to a non-inert gas, or a liquid, such as water, when molybdenum is used. A gas or liquid mixture can also be used if desired. For some applications, liquids may be more effective than gases because of their higher heat capacity.

流體可以從任何方向通過孔徑,在一些情況中,讓流體從等壓管的入口端開始通過孔徑是比較好的,因為熔融玻璃進入等管的入口端通常比等管的遠端還熱。如果流體從入口端拾起較多的熱,它可以幫忙緩和沿著溢流堰的熱梯度,因此可以幫忙控制玻璃的流動。同時,讓流體在入口端進入孔徑可以幫忙降低熔融玻璃在入口端的溫度,這對某些應用來說可能是需要的。透過熱交換器結構的使用,也可以讓流體多次通過孔徑。例如,可以將流體引進含有中心鏜孔的管道中,此中心鏜孔連接到周圍的環帶。流體可以例如傳下中心鏜孔而經由環帶回來。這種方式可以更有效地將熱轉移到流體。或者,流體可以在第一次通過環帶,而第二次通過中心鏜孔。當然,如果想要的話,也可以使用更複雜的熱交換器結構。The fluid can pass through the aperture from any direction, and in some cases, it is preferred to have the fluid pass through the aperture from the inlet end of the isopipe because the inlet end of the molten glass into the equal tube is typically hotter than the distal end of the equal tube. If the fluid picks up more heat from the inlet end, it can help to moderate the thermal gradient along the weir, thus helping to control the flow of the glass. At the same time, having fluid enter the aperture at the inlet end can help reduce the temperature of the molten glass at the inlet end, which may be desirable for some applications. Through the use of the heat exchanger structure, the fluid can also be passed through the aperture multiple times. For example, fluid can be introduced into a tube containing a central bore that is connected to the surrounding annulus. The fluid can, for example, pass down the central bore and come back through the loop. This way it is more efficient to transfer heat to the fluid. Alternatively, the fluid can pass through the annulus for the first time and the central pupil for the second time. Of course, more complex heat exchanger structures can be used if desired.

在其他實施例中,孔徑是用來包圍結構構件,此結構元件的組成份材料具有比構成溢流堰之材料還低的潛變速率。結構組件可以是實心的,且完全或部分填滿孔徑的斷面。在後者的情況中,孔徑中未填滿的部分可以用來冷卻結構構件和溢流口材料例如藉由讓流體通過孔徑未填滿的部分,如此來覆蓋結構構件的曝露表面和孔徑的內壁。In other embodiments, the aperture is used to enclose the structural member, the constituent material of the structural element having a lower creep rate than the material constituting the weir. The structural components can be solid and completely or partially fill the cross-section of the aperture. In the latter case, the unfilled portion of the aperture can be used to cool the structural member and the overflow material, such as by passing fluid through the unfilled portion of the aperture, thereby covering the exposed surface of the structural member and the inner wall of the aperture. .

在進一步的實施例中,結構構件可以是空心的,而它的外殼可以完全或部分填滿孔徑的斷面。在兩種情況下,結構構件的空心部分都可以用來冷卻例如藉由讓流體通過結構構件的內部。如果空心結構構件的外殼只部分填滿孔徑的斷面,那麼孔徑的未填滿部分也可以用來冷卻。In a further embodiment, the structural member may be hollow and its outer casing may completely or partially fill the cross-section of the aperture. In both cases, the hollow portion of the structural member can be used to cool, for example, by passing fluid through the interior of the structural member. If the outer shell of the hollow structural member only partially fills the cross-section of the aperture, the unfilled portion of the aperture can also be used for cooling.

孔徑通常延伸穿過溢流堰的整個長度,不過有一或兩端封閉的孔徑也可以用來實施本發明,例如當冷卻流體通過熱交換器結構時。結構構件可以包含在溢流堰內,或者可以延伸超過溢流堰,而在其中一端最好是兩端上跟支撐結構接合。The aperture generally extends through the entire length of the weir, although a closed aperture at one or both ends can also be used to practice the invention, such as when a cooling fluid passes through the heat exchanger structure. The structural member may be contained within the weir, or may extend beyond the weir, with one end preferably engaging the support structure at both ends.

除了每個溢流堰中的一個孔徑(含或不含結構構件)之外,等管也可以在等管的本體中也就是在低於溢流堰的水平下包含一個或多個孔徑。就像形成在溢流堰中的孔徑一樣,形成在本體中的孔徑也可以包含結構構件可以完全或部分填滿孔徑。而且,像溢流堰中的孔徑一樣,本體中的孔徑也可以用來將等管內部冷卻以降低構成等管本體之材料的潛變速率。In addition to one of the apertures in each weir (with or without structural members), the tubes may also contain one or more apertures in the body of the tube, that is, at a level below the weir. Like the aperture formed in the weir, the aperture formed in the body may also comprise structural members that may completely or partially fill the aperture. Moreover, like the aperture in the weir, the aperture in the body can also be used to cool the interior of the tubes to reduce the rate of creep of the materials that make up the tube body.

溢流堰和等管本體中(當使用時)的孔徑可以藉由中心鑽探到等管中,或者最好是鑽探到用來形成等管的毛胚中來製造,或者也可以在製造毛胚期間原位形成。The apertures in the weir and the isopipe body (when used) may be drilled into the tube by the center, or preferably drilled into the blank used to form the tube, or may be fabricated in the blank. Formed in situ during the period.

製造等管之陶瓷炭黑的普遍處理是多步驟處理。例如,可以由例如噴霧乾燥以準備鋯或其他陶瓷材料以及黏合劑的配料材料。然後可以將配料材料放在伸縮袋中並振動,讓顆粒沉降而達到初始的壓實。然後可以將此袋氣密封,放在冷等靜壓機中更完全地壓實此結構。然後可以將此壓實過結構在高溫下燃燒成緻密陶瓷。The general treatment of ceramic carbon blacks such as tubes is a multi-step process. For example, the dosing material of zirconium or other ceramic materials and binders can be prepared, for example, by spray drying. The ingredient material can then be placed in a bellows and vibrated to allow the particles to settle for initial compaction. The bag can then be hermetically sealed and placed in a cold isostatic press to more fully compact the structure. This compacted structure can then be burned to a dense ceramic at elevated temperatures.

這類處理可以經過修改,將由石墨或其他可燃材料例如固體或泡沫的天然或合成聚合物構成的一個或多個棒,放到等靜壓袋中作為心軸以便在毛胚中產生孔徑。然後將配料倒在棒的四周並振動,讓配料顆粒以更緻密的緊縮結構排列。然後將此袋氣密封並等壓壓製。然後將壓實過的配料和棒放在烘爐中,首先燒掉棒,接著在高溫下燒結。在另一種處理中,可以首先燒掉配料黏合劑,接著預-燒結此結構。在冷卻到室溫之後將棒從毛胚移除,接著高溫燒結。Such treatments can be modified to place one or more rods of graphite or other combustible material, such as a solid or foamed natural or synthetic polymer, into an isostatic bag as a mandrel to create a pore size in the blank. The ingredients are then poured around the stick and vibrated to allow the ingredients to be arranged in a denser, compact structure. The bag is then hermetically sealed and pressed isostatically. The compacted ingredients and bars are then placed in an oven, which is first burned off and then sintered at elevated temperatures. In another process, the ingredient binder can be first burned off, followed by pre-sintering the structure. The rod was removed from the blank after cooling to room temperature and then sintered at a high temperature.

孔徑可以有各種尺寸,例如對Gen 10等管來說,從幾毫米到幾英吋。通常,當孔徑的目的是讓流體通過孔徑以冷卻等管的內部時會使用較小的孔徑。如上面所討論的,此流體流動提供一種方式,從等管內部吸取熱,如此降低內部溫度並減少材料的潛變。溫度上的微小改變,可以顯著地降低等管中的潛變水平。例如,如表格2所示,對鋯來說,溫度從1250℃降低到1180℃會使潛變速率減少大約50%。所需要的流體流量決定於流體的熱容量,流體的溫度,預定減少的內部溫度,和等管的特定幾何。熟練的工作者可以根據這裡的公佈資料很輕易地決定特定應用所需要的流動速率。The apertures can be of various sizes, for example from a few millimeters to a few inches for tubes such as Gen 10. Typically, a smaller aperture is used when the purpose of the aperture is to allow fluid to pass through the aperture to cool the interior of the tube. As discussed above, this fluid flow provides a means of drawing heat from the interior of the equal tubes, thus reducing internal temperature and reducing material creep. Minor changes in temperature can significantly reduce the level of creep in the tube. For example, as shown in Table 2, for zirconium, a temperature reduction from 1250 ° C to 1180 ° C reduces the creep rate by about 50%. The fluid flow rate required is determined by the heat capacity of the fluid, the temperature of the fluid, the predetermined reduced internal temperature, and the particular geometry of the tubes. Skilled workers can easily determine the flow rate required for a particular application based on the published information herein.

如上面所討論的,在某些實施例中,孔徑可以包含結構組件。這些結構構件最好是由潛變比等管所使用之材料還小的材料來構成。例如,對鋯等管來說,結構構件可以由例如,Al2 O3 ,SiN,SiC,鉬,或纖維強化結構來構成。在鉬棒的情況中,此棒最好可以由鉑包覆,或圍包在惰性大氣中,例如N2 以減少氧化。這幾種材料經過證實即使在1250℃下都有非常低的潛變,因此可以在運作期間為由鋯或其他耐火材構成的等管提供額外的支撐。As discussed above, in certain embodiments, the aperture can include structural components. These structural members are preferably constructed of a material having a material that is less than the material used for the tube. For example, for a tube such as zirconium, the structural member may be composed of, for example, Al 2 O 3 , SiN, SiC, molybdenum, or a fiber-reinforced structure. In the case of the molybdenum rod, this rod may preferably be coated with platinum, or a wrap in an inert atmosphere such as N 2 to reduce oxidation. These materials have proven to have very low creep potential even at 1250 ° C, so they can provide additional support for tubes made of zirconium or other refractory materials during operation.

由本發明所提供的其中一個好處是可以繼續使用已證實的材料例如鋯石以製造LCD基板。這些材料已知可以跟顯示器製造商所准予的玻璃組成份相容。本發明也擴大了等壓管的設計窗口。例如,可以製造減少高度的等管,而不會影響下垂,因而影響運作壽命。這降低了等管本身,和熔融機器整體尺寸的成本。減少高度也可以幫忙降低形成次生晶體的機會,如共同申請人之PCT專利公告編號03/055813中所描述的。One of the benefits provided by the present invention is that a proven material such as zircon can be used to fabricate an LCD substrate. These materials are known to be compatible with the glass components approved by the display manufacturer. The invention also expands the design window of the isopipe. For example, it is possible to manufacture a tube that reduces the height without affecting the sag, thus affecting the operational life. This reduces the cost of the tube itself, and the overall size of the melting machine. Reducing the height can also help to reduce the chances of forming a secondary crystal, as described in co-pending PCT Patent Publication No. 03/055,813.

底下將利用圖2到圖8的實施例進一步說明本發明,但是並不表示以任何方式來作限制。The invention will be further described below using the embodiment of Figures 2 through 8, but is not meant to be limiting in any way.

圖2顯示的實施例在溢流堰1和2中應用孔徑35,而在等壓管本體中應用孔徑43。溢流堰1和2中的孔徑35完全填滿結構構件41和42,而孔徑43完全填滿結構構件45。The embodiment shown in Figure 2 applies an aperture 35 in the weirs 1 and 2 and an aperture 43 in the isopipe body. The apertures 35 in the weirs 1 and 2 completely fill the structural members 41 and 42, while the apertures 43 completely fill the structural members 45.

圖3顯示圖2實施例的變異,其中溢流堰1和2的孔徑35透過另外的孔徑37彼此連接,同樣的孔徑35填滿結構組件。此實施例也使用圓形構造的孔徑43,而不是圖2中的長方形構造。Figure 3 shows a variation of the embodiment of Figure 2 in which the apertures 35 of the weirs 1 and 2 are connected to each other through an additional aperture 37, and the same aperture 35 fills the structural components. This embodiment also uses a circular configuration of the aperture 43 instead of the rectangular configuration of FIG.

圖4顯示適合用來冷卻部分等管內部的實施例。此實施例應用五個相當小的孔徑,其中兩個位於溢流堰中,也就是孔徑35,而其中三個位於等管的本體中,也就是孔徑43。Figure 4 shows an embodiment suitable for cooling the interior of a portion of the tube. This embodiment applies five relatively small apertures, two of which are located in the weir, i.e., aperture 35, and three of which are located in the body of the equal tube, i.e., aperture 43.

圖5顯示圖4實施例的變異,再次地應用適合冷卻的孔徑。此實施例應用等管本體中一個相當大的孔徑43,和溢流堰1和2中的橢圓形孔徑35。Figure 5 shows a variation of the embodiment of Figure 4, again applying an aperture suitable for cooling. This embodiment applies a relatively large aperture 43 in the isobath body and an elliptical aperture 35 in the weirs 1 and 2.

圖6顯示圖5的變異,將結構構件41和42引進孔徑35,而結構構件45引進孔徑43。可以讓冷卻流體通過孔徑的未填滿部分,或者可以單獨使用結構構件來減少等管的下垂。Figure 6 shows the variation of Figure 5, with structural members 41 and 42 introduced into aperture 35 and structural member 45 introduced into aperture 43. The cooling fluid can be passed through an unfilled portion of the aperture, or the structural member can be used alone to reduce the sag of the equal tube.

圖7和8顯示空心結構構件的使用,如圖所示可以是橢圓形。使用空心結構構件可以有減少結構構件重量的好處。同時,如果想要的話,可以讓冷卻流體通過結構構件的中心部分。要注意的是,不管結構構件的外殼是否填滿孔徑,結構組件的空心部分都構成孔徑的未填滿部分。Figures 7 and 8 illustrate the use of a hollow structural member, which may be elliptical as shown. The use of hollow structural members can have the benefit of reducing the weight of the structural members. At the same time, if desired, the cooling fluid can be passed through the central portion of the structural member. It is to be noted that the hollow portion of the structural component constitutes an unfilled portion of the aperture regardless of whether the outer casing of the structural member is filled with the aperture.

對這方面具有一般技術的人,從前面的描述中都可以瞭解到,對於本發明可以有各種修改但是都不脫離本發明的範圍和精神。例如,雖然用來說明本發明的等管,其溢流口含有垂直側壁,但是含有斜邊溢流堰的等管也可以使用,例如含有V或Y斷面形狀的等管,在管側楔狀物部分上端的管外表面沒有稜角。同時,雖然圖2到圖8顯示的是單式等管,但是包含兩個或更多分開元件(可以由相同或不同材料構成)的等管也可以用來實施本發明。底下的申請專利範圍涵蓋了這裡所描述的特定實施例,以及各種修改,變動,和它們及其他類型的同等物。It will be apparent to those skilled in the art that the invention may be For example, although the isopipe for illustrating the present invention has a vertical side wall, the tube containing the beveled weir may be used, for example, a tube having a V or Y cross-section, and a tube-side wedge. The outer surface of the tube at the upper end of the portion has no edges. Meanwhile, although FIGS. 2 through 8 show a single tube, etc., tubes including two or more separate elements (which may be composed of the same or different materials) may also be used to practice the invention. The scope of the patent application is intended to cover the specific embodiments described herein, as well as various modifications, variations, and equivalents thereof.

1,2...溢流堰1,2. . . Overflow

9...供給管9. . . Supply tube

11...收集槽11. . . Collection tank

13...等管13. . . Equal tube

15...根部15. . . Root

17...抽拉裝置方向之箭頭17. . . Arrow of direction of the drawing device

19...玻璃帶狀物19. . . Glass ribbon

21...第一部分twenty one. . . first part

23...第二部分twenty three. . . the second part

25...內表面25. . . The inner surface

27...頂表面27. . . Top surface

29...外表面29. . . The outer surface

31...第一外表面31. . . First outer surface

32...第二外表面32. . . Second outer surface

33...第二個部分的一部分33. . . Part of the second part

35,37,43...孔徑35,37,43. . . Aperture

41...第一結構構件41. . . First structural member

42...第二結構構件42. . . Second structural member

45...結構構件45. . . Structural member

圖1為透視示意圖,其顯示出使用於製造平坦玻璃片之溢流向下抽拉融合處理過程中裝置代表性構造。1 is a perspective schematic view showing a representative configuration of a device during an overflow down draw fusion process for making a flat glass sheet.

圖2-8為示意性地斷面骨,其顯示出具有溢流堰等管代表實施例,孔隙形成於其中以承受冷卻流體及/或結構構件。2-8 are schematic cross-sectional bones showing a tube having a weir, etc., representative of an embodiment in which pores are formed to withstand cooling fluid and/or structural members.

1,2...溢流堰1,2. . . Overflow

13...等管13. . . Equal tube

15...根部15. . . Root

21...第一部分twenty one. . . first part

23...第二部分twenty three. . . the second part

25...內表面25. . . The inner surface

27...頂表面27. . . Top surface

29...外表面29. . . The outer surface

31...第一外表面31. . . First outer surface

32...第二外表面32. . . Second outer surface

33...第二個部分的一部分33. . . Part of the second part

35...孔徑35. . . Aperture

41,42,45...結構構件41,42,45. . . Structural member

43...孔徑43. . . Aperture

Claims (20)

一種利用融合處理過程來形成玻璃帶狀物之裝置,其包含:第一部分,其含有槽及第一和第二溢流堰,每個溢流堰有內表面,頂表面,和外表面;及第二部分,其含有第一外表面,是第一溢流堰之外表面的接續部分,和第二外表面,是第二溢流口之外表面的接續部分,此第一和第二外表面相對於彼此定位,使第二部分的至少一部分具有楔狀物斷面;其中每個溢流堰都包含一個孔徑,此孔徑:(i)沿著至少一部分的溢流堰長度延伸,以及(ii)至少有一部分的孔徑位於溢流堰的內和外表面之間。An apparatus for forming a glass ribbon using a fusion process comprising: a first portion comprising a trough and first and second weirs, each overflow weir having an inner surface, a top surface, and an outer surface; a second portion comprising a first outer surface that is a continuation of the outer surface of the first weir, and a second outer surface that is a contiguous portion of the outer surface of the second overflow, the first and second outer surfaces The faces are positioned relative to each other such that at least a portion of the second portion has a wedge section; wherein each weir comprises an aperture that (i) extends along at least a portion of the weir length, and (ii) At least a portion of the aperture is located between the inner and outer surfaces of the weir. 依據申請專利範圍第1項之裝置,其中對於每一溢流堰,孔徑沿著溢流堰整體長度延伸。The device of claim 1, wherein for each weir, the aperture extends along the entire length of the weir. 依據申請專利範圍第1項之裝置,其中對於每一溢流堰,孔徑具有圓形斷面。A device according to the first aspect of the invention, wherein the aperture has a circular cross section for each overflow weir. 依據申請專利範圍第1項之裝置,其中對於每一溢流堰,孔徑具有橢圓形斷面。A device according to the first aspect of the invention, wherein the aperture has an elliptical cross section for each overflow weir. 依據申請專利範圍第1項之裝置,其中第一及第二溢流堰之孔徑藉由在槽下另一孔徑連接。The device of claim 1, wherein the apertures of the first and second overflow weirs are connected by another aperture under the slot. 依據申請專利範圍第1項之裝置,其中裝置更進一步包含第一及第二結構構件,第一結構構件位於第一溢流堰之孔徑內以及第二結構構件位於第二溢流堰之孔徑內。The device of claim 1, wherein the device further comprises first and second structural members, the first structural member being located within the aperture of the first weir and the second structural member being located within the aperture of the second weir . 依據申請專利範圍第1項之裝置,其中第一及第二結構構件由一種材料所構成,該材料在裝置操作溫度下呈現出較小潛變而低於溢流堰所構成之材料的潛變。The device according to claim 1, wherein the first and second structural members are composed of a material which exhibits a small creep at the operating temperature of the device and is lower than the creep of the material composed of the weir. . 依據申請專利範圍第6項之裝置,其中結構構件填滿其各別孔徑。A device according to claim 6 wherein the structural member fills its respective aperture. 依據申請專利範圍第6項之裝置,其中結構構件部份地填滿其各別孔徑。A device according to claim 6 wherein the structural member partially fills its respective aperture. 依據申請專利範圍第6項之裝置,其中結構構件為中空的。A device according to claim 6 wherein the structural member is hollow. 依據申請專利範圍第1項之裝置,其中更進一步包含至少一個其他孔徑,其並未位於溢流堰的內表面與外表面之間。The device of claim 1, further comprising at least one other aperture that is not located between the inner surface and the outer surface of the weir. 依據申請專利範圍第11項之裝置,其中裝置更進一步包含結構構件位於另一孔徑內。The device of claim 11, wherein the device further comprises the structural member being located within the other aperture. 依據申請專利範圍第12項之裝置,其中位於另一孔徑內之結構構件由一種材料所構成,該材料在裝置操作溫度下呈現出較小潛變而低於溢流堰所構成之材料的潛變。The device according to claim 12, wherein the structural member located in the other aperture is composed of a material which exhibits a lower creep at the operating temperature of the device and is lower than the potential of the material of the weir. change. 依據申請專利範圍第1項之裝置,其中第一及第二部份為材料單一本體之部份。In accordance with the apparatus of claim 1, wherein the first and second portions are part of a single body of material. 一種使用融合處理過程來製造玻璃帶狀物的方法,該方法包括:(A)提供熔融玻璃到成形裝置,此成形裝置包含第一和第二溢流堰,每個溢流堰都含有:(i)內表面,(ii)頂表面,(iii)外表面,以及(iv)孔徑,此孔徑:(a)沿著至少一部分的溢流堰長度延伸,以及(b)至少有一部分位於溢流堰的內表面和外表面之間;以及(B)讓流體通過這些孔徑將溢流堰冷卻。A method of making a glass ribbon using a fusion process, the method comprising: (A) providing molten glass to a forming apparatus, the forming apparatus comprising first and second weirs, each overflow containing: i) an inner surface, (ii) a top surface, (iii) an outer surface, and (iv) an aperture, the aperture: (a) extending along at least a portion of the weir length, and (b) at least a portion of the overflow Between the inner and outer surfaces of the crucible; and (B) allowing fluid to cool the overflow weir through these apertures. 依據申請專利範圍第15項之方法,其中:(a)成形裝置更進一步包含第一及第二結構構件,第一結構構件位於第一溢流堰之孔徑內以及第二結構構件位於第二溢流堰之孔徑內;(b)結構構件部份地填滿其各別孔徑;以及(c)讓流體通過孔徑未填滿部份以及將溢流堰以及結構構件冷卻。The method of claim 15 wherein: (a) the forming apparatus further comprises first and second structural members, the first structural member being located within the aperture of the first weir and the second structural member being located in the second overflow (b) the structural member partially fills its respective aperture; and (c) allows fluid to pass through the unfilled portion of the aperture and cools the overflow weir and structural member. 依據申請專利範圍第16項之方法,其中第一及第二結構構件由一種材料所構成,該材料在成形裝置操作溫度下呈現出較小潛變而低於溢流堰所構成之材料的潛變。The method of claim 16, wherein the first and second structural members are comprised of a material that exhibits a lower creep at the operating temperature of the forming device and is lower than the material of the overflow weir. change. 依據申請專利範圍第15項之方法,其中:(a)成形裝置包含至少一個其他孔徑,其並未位於溢流堰的內表面與外表面之間;(b)讓流體通過其他孔徑將成形裝置冷卻。The method of claim 15, wherein: (a) the forming device comprises at least one other aperture that is not located between the inner surface and the outer surface of the weir; (b) the fluid is passed through the other aperture to form the device cool down. 依據申請專利範圍第18項之方法,其中:(a)成形裝置包含結構構件,其位於另一孔徑內;(b)結構構件部份地填滿該另一孔徑;以及(c)讓流體通過該另一孔徑未填滿部份以及將成形構件以及結構構件冷卻。The method of claim 18, wherein: (a) the forming device comprises a structural member located in the other aperture; (b) the structural member partially fills the other aperture; and (c) allowing the fluid to pass The other aperture is not filled up and the shaped member and structural member are cooled. 依據申請專利範圍第19項之方法,其中位於另一孔徑內結構構件由一種材料所構成,該材料在成形裝置操作溫度下呈現出較小潛變而低於溢流堰所構成之材料的潛變。The method according to claim 19, wherein the structural member located in the other aperture is composed of a material which exhibits a lower creep at the operating temperature of the forming device and is lower than the material of the material formed by the weir. change.
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